CRITICAL MATERIALS HANDLING INVUE INTEGRATED FLOW CONTROLLERS NT6510, NT6520
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1 CRITICAL MATERIALS HANDLING INVUE INTEGRATED FLOW CONTROLLERS NT6510, NT6520 Precise point-of-use chemical flow control
2 innovative flow control technology Overview Entegris is solving today s flow control challenges using innovative flow control technology. The InVue Integrated Flow Controllers (IFC) NT6510 and NT6520 are designed for point-of-use chemical blending and dispense. NT6510 is engineered for applications requiring low to medium flow rates, and is the smallest InVue Integrated Flow Controller available, saving valuable space in liquid handling systems. NT6520 is engineered for applications requiring medium to high flow rates. The following table contrasts the flow range capabilities of each product. Model NT6510 NT6520 Flow Range Capability 15 ml/min to 1,250 ml/min 2.5 L/min to 40 L/min Both integrated flow controllers use proven and reliable differential pressure flow measurement technology and advanced closed-loop process control. Visual indicators provide diagnostics for preventive maintenance, trouble shooting and alarm conditions, enabling users to integrate more process functionality. PTFE and modified PTFE wetted surfaces for high-purity applications Nonmetallic components for corrosion resistance Integral pressure transducer for additional process information One percent (1%) full scale accuracy for critical dispense applications Compact footprint for easy field installs with limited space Fast response for accurate dispense rates LED status and discrete alarm output Constructed for Compatibility The InVue Integrated Flow Controllers are used in ultrapure liquid chemical applications and with DI water and slurry. They also effectively control liquids containing bubbles. The valve seat and diaphragm are designed to minimize dead volume and fluid shear, reducing the possibility of process conta mination. Featuring fluorinated materials for wetted parts, the InVue Integrated Flow Controllers are ideal for protecting chemical integrity. In addition, the chemical resistant nonwetted parts perform well in harsh chemical environments. Advanced Technology The InVue Integrated Flow Controllers utilize dual PTFE valve diaphragms for fluid containment and contami nation protection. Leveraging the latest motorized valve and flowmeter tech nology, encapsulated internal electronics control all aspects of the flow controllers. The units are activated by a setpoint signal (for example, 4 20 ma, 0 10 VDC, 0 5 VDC) to maintain fluid flow at the desired setpoint. Applications The InVue Integrated Flow Controllers combine Entegris differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller ideal for: Critical dispense applications Chemical spiking and blending On-demand chemical mixing High flow applications such as bulk delivery or tool liquid dispense (NT6520) 2 ENTEGRIS, INC.
3 Specifications Materials: Wetted parts Body: Modified PTFE Nonwetted parts Operating range options: Diaphragms: PTFE Sensor interface: CTFE or PFA Primary o-ring: Kalrez 6375 UP Polypropylene, PVDF, Viton, polyurethane and nylon (in addition to materials listed above) % of full scale flow (Code T flow range default) 5 100% of full scale flow (Code Y flow range) Flow control accuracy: ±1% of full scale (calibrated using DI 23 C [73 ]) Repeatability: Pressure measurement: Pressure accuracy: ±0.5% of full scale kpa (0-60 psig) ±1% of full scale Operating pressure: kpa (10-60 psig) kpa (25-60 psig) Minimum required differential pressure: * Output signals: Response time: Over-pressure limit: Process temperature: Electrical input Setpoint input signal: Enclosure: Weight: Approvals: 10 psi, differential 25 psi, differential Two 4 20 ma electrically isolated outputs, one for flow and one for pressure < 3 seconds 690 kpa (100 psig) 10 C 65 C (50 F 149 F) 24 VDC amps 4 20 ma, 0-10 VDC, 0-5 VDC IP64 NT6510: 1.6 kg (3.5 lb) approximate NT6520: 2.4 kg (5.3 lb) approximate * Minimum required differential pressure is the minimum inlet to outlet fitting differential pressure required to reach full scale flow and response time specifications. Note: Specifications are subject to change without notice. Please consult Entegris for the most current information. ENTEGRIS, INC. 3
![of full scale (calibrated using DI water @ 23 C [73 ]) Repeatability: Pressure measurement: Pressure accuracy: ±0.](/docs-images/48/19023234/images/page_3.jpg "5% of full scale 0 414 kpa (0-60 psig) ±1% of full scale Operating pressure: 69 414 kpa (10-60 psig) 172 414 kpa (25-60 psig) Minimum required differential pressure: * Output signals: Response time:")
4 NT6510 FLARETEK TUBE FITTING Top View mm (5.31 ) 5.1 mm (0.20 ) Side View End View 39.4 mm (1.55 ) 53.2 mm (2.10 ) A mm (5.40 ) mm (6.10 ) mm (6.60 ) C B Inlet/Outlet Port Connection A B C 1 4 Flaretek tube fitting mm (4.64 ) 17.0 mm (0.67 ) mm (7.38") 3 8 Flaretek tube fitting mm (4.64 ) 17.0 mm (0.67 ) mm (7.52") 1 2 Flaretek tube fitting mm (4.76 ) 17.0 mm (0.67 ) mm (7.68") SUPER 300 TYPE PILLAR FITTING Top View C Side View End View A B Inlet/Outlet Port Connection A B C 1 4 Super 300 Type Pillar tube fitting mm (4.64 ) 17.0 mm (0.67 ) mm (6.27 ) 3 8 Super 300 Type Pillar tube fitting mm (4.64 ) 17.0 mm (0.67 ) mm (6.58 ) The following fitting size and flow range combinations are available: Flow Range (ml/min) TL TT T0/Y0 T1/Y1 T2/Y2 T3/Y3 T4/Y4 Fitting Size Yes Yes Yes Yes Yes Yes Yes 3 8 Yes Yes Yes Yes Yes Yes Yes 1 2 Yes* Yes* * Flaretek only. Note: The operating range for "T" code flow ranges (default) is % of full scale flow. The operating range for "Y" code flow ranges is 5 100% of full scale flow. Please consult Entegris for PrimeLock tube fitting options or custom flow range requirements. 4 ENTEGRIS, INC.
5 NT6520 FLARETEK TUBE FITTING 7.1 mm (0.28 ) Top View mm (7.88 ) mm (7.38 ) mm (6.70 ) 47 mm (1.85 ) Side View A End View 7.1 mm (0.28 ) 71.1 mm (2.80 ) B C Inlet/Outlet Port Connection A B C 3 8 Flaretek tube fitting mm (4.62 ) 15.7 mm (0.62 ) mm (8.82 ) 1 2 Flaretek tube fitting mm (4.76 ) 18.3 mm (0.72 ) mm (8.98 ) 3 4 Flaretek tube fitting mm (5.08 ) 23.6 mm (0.93 ) mm (9.22 ) SUPER 300 TYPE PILLAR FITTING Top View C Side View End View A B Inlet/Outlet Port Connection A B C 3 8 Super 300 Type Pillar tube fitting mm (4.62 ) 15.7 mm (0.62 ) mm (7.88 ) 1 2 Super 300 Type Pillar tube fitting mm (4.76 ) 18.3 mm (0.72 ) mm (8.08 ) 3 4 Super 300 Type Pillar tube fitting mm (5.08 ) 23.6 mm (0.93 ) mm (8.43 ) The following fitting size and flow range combinations are available: Flow Range (L/min) T5/Y5 T6/Y6 T7/Y7 T8/Y8 T9/Y9 Fitting Size Yes Yes 1 2 Yes Yes Yes 3 4 Yes Yes Note: The operating range for "T" code flow ranges (default) is % of full scale flow. The operating range for "Y" code flow ranges is 5 100% of full scale flow. Please consult Entegris for PrimeLock tube fitting options or custom flow range requirements. ENTEGRIS, INC. 5
6 Ordering Information InVue Integrated Flow Controller NT Primary/Secondary Seal U3 = Kalrez 6375UP/Viton Sensor Interface P7 = CTFE (for acids, bases and oxidants, typically) P8 = PFA (for solvents and temperatures >40 C, typically) Note: Selection is dependent on application and chemical media. Please contact Entegris for best selection. Setpoint Input Signal, Controller Type A = 4 20 ma, continuous K = 4 20 ma, batch B = 0 10 VDC, continuous L = 0 10 VDC, batch C = 0 5 VDC, continuous M = 0 5 VDC, batch Electrical Connector Type V06 = PVC-jacketed 6 pigtail electrical cable V12 = PVC-jacketed 12 pigtail electrical cable B06 = FEP-jacketed 6 pigtail electrical cable B12 = FEP-jacketed 12 pigtail electrical cable B30 = FEP-jacketed 30 pigtail electrical cable G01 = PVC-jacketed 1 electrical cable terminated with 14-pin Turck connector** G06 = PVC-jacketed 6 electrical cable terminated with 14-pin Turck connector** Flow Range* TL = 0 15 ml/min TT = 0 25 ml/min T0 = 0 50 ml/min T1 = ml/min T2 = ml/min T3 = ml/min T4 = ml/min Inlet/Outlet Port Connection*** F02 = 1 4 Flaretek tube fitting F03 = 3 8 Flaretek tube fitting F04 = 1 2 Flaretek tube fitting W02 = 1 4 Super 300 type Pillar tube fitting W03 = 3 8 Super 300 type Pillar tube fitting Y0 = 0 50 ml/min Y1 = ml/min Y2 = ml/min Y3 = ml/min Y4 = ml/min * Code T flow ranges are scaled to zero flow, measurement is from % of full scale flow range. Code Y flow ranges are scaled to zero flow, measurements is from 5-100% of full scale flow range. ** For electrical connector types G01 and G06, a 14-pin mating cable is required for installation. See Electrical Mating Cables for InVue Flow Controllers NT6510 and NT6520 Accessory (p. 7) for ordering information. *** For PrimeLock and other options not shown here, please contact Entegris. Product specified with a flared tube connection is packaged with two PVDF nuts. For custom configurations and specifications, please contact Entegris. 6 ENTEGRIS, INC.
7 InVue Integrated Flow Controller NT Primary/Secondary Seal U3 = Kalrez 6375UP/Viton Sensor Interface P7 = CTFE (for acids, bases and oxidants, typically) P8 = PFA (for solvents and temperatures >40 C, typically) Note: Selection is dependent on application and chemical media. Please contact Entegris for best selection. Setpoint Input Signal, Controller Type A = 4 20 ma, continuous K = 4 20 ma, batch B = 0 10 VDC, continuous L = 0 10 VDC, batch C = 0 5 VDC, continuous M = 0 5 VDC, batch Electrical Connector Type V06 = PVC-jacketed 6 pigtail electrical cable V12 = PVC-jacketed 12 pigtail electrical cable B06 = FEP-jacketed 6 pigtail electrical cable B12 = FEP-jacketed 12 pigtail electrical cable B30 = FEP-jacketed 30 pigtail electrical cable G01 = PVC-jacketed 1 electrical cable terminated with 14-pin Turck connector** G06 = PVC-jacketed 6 electrical cable terminated with 14-pin Turck connector** Inlet/Outlet Port Connection*** F03 = 3 8 Flaretek tube fitting F04 = 1 2 Flaretek tube fitting F06 = 3 4 Flaretek tube fitting W03 = 3 8 Super 300 type Pillar tube fitting W04 = 1 2 Super 300 type Pillar tube fitting W06 = 3 4 Super 300 type Pillar tube fitting Flow Range* T5 = L/min T6 = 0 5 L/min T7 = 0 10 L/min T8 = 0 20 L/min T9 = 0 40 L/min Y5 = L/min Y6 = 0 5 L/min Y7 = 0 10 L/min Y8 = 0 20 L/min Y9 = 0 40 L/min * Code T flow ranges are scaled to zero flow, measurement is from % of full scale flow range. Code Y flow ranges are scaled to zero flow, measurements is from 5-100% of full scale flow range. ** For electrical connector types G01 and G06, a 14-pin mating cable is required for installation. See Electrical Mating Cables for InVue Flow Controllers NT6510 and NT6520 Accessory chart below for ordering information. *** For PrimeLock and other options not shown here, please contact Entegris. Product specified with a flared tube connection is packaged with two PVDF nuts. For custom configurations and specifications, please contact Entegris. Electrical Mating Cables for InVue Flow Controllers NT6510 and NT6520 Accessory Part Number Description Quantity 14G02 14-pin mating Turck connector with 2-meter (6.5 ) PVC-jacketed cable 1 14G05 14-pin mating Turck connector with 5-meter (16.4 ) PVC-jacketed cable 1 14G10 14-pin mating Turck connector with 10-meter (32.8 ) PVC-jacketed cable 1 ENTEGRIS, INC. 7
8 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material Advantage, InVue, Flaretek, FlareLock and PrimeLock are trademarks of Entegris, Inc. Kalrez and Viton are registered trademarks of E. I. du Pont de Nemours and Company. Pillar is a registered trademark of Nippon Pillar Packaging Company, Ltd. Turck is a registered trademark of Turck Inc. ENTEGRIS, INC. Corporate Headquarters 129 Concord Road Billerica, MA USA Customer Service Tel Customer Service Fax In North America Entegris, Inc. All rights reserved Printed in USA ENT-0915
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