Equipment & gas distribution systems. HiQ. Specialty gas program.

Equipment & gas distribution systems. HiQ. Specialty gas program.

HiQ equipment and gases Contact your Linde local sales representative for ordering any of the specialty gas catalogues: Automotive Biotech, chemical, petrochemical & pharmaceutical Indoor & outdoor environment Manufacturing For more information about the HiQ Specialty Gas products, equipment and services program from Linde, please visit our homepage at: http://hiq.linde-gas.com You will find this site most useful in your everyday work with specialty gases. Apart from the complete program of Specialty Gas products and equipment from Linde we have also included extensive information and supporting on-line tools. origami [origami] (jap., from ori folding' and kami 'paper'), the art of folding paper to create figures and artistic decoration. Existed in Japan already at the 9 Th century, when paper become a common material. Figures can be all from very simple to artistic and complex. They have been used both in ceremonies and as toys, pedagogical examples, wrappings, lamp screens, etc. Source: Encyclopedia Britannica ACCURA is a registered trademark of the Linde Group. HiQ REDLINE is a registered trademark of the Linde Group. BASELINE is a trademark of the Linde Group. ECOCYL is a registered trademark of the Linde Group. HiQ is a registered trademark of the Linde Group. Linde minican is a trademark of the Linde Group. SECCURA is a trademark of the Linde Group. BUNA is a registered trademark of Bayer AG. CleanLine is a trademark of BROEN A/S. ELGILOY is a registered trademark of Elgiloy Limited Partnership. HASTELLOY is a registered trademark of Haynes International, Inc. HOGEN is a registered trademark of Distributed Energy Systems Corp. IntelliSwitch is a trademark of CONCOA. KALREZ is a registered trademark of E.I. DuPont de Nemours & Co., Inc. KEL-F is a registered trademark of 3M. MONEL is a registered trademark of Inco Alloys International. Nanochem is a registered trademark of Matheson Tri-Gas, Inc. NEOPRENE is a registered trademark of E.I. DuPont de Nemours & Co., Inc. NITRONIC is a registered tradename of Armco, Inc. NYLON is a registered trademark of E.I. DuPont de Nemours & Co., Inc. SIMRIZ is a registered trademark of Freudenberg-NOK. STABLEFLOW is a trademark of Distributed Energy Systems Corp. SWAGELOK is a registered trademark of Swagelok Company. TEFLON is a registered trademark of E.I. DuPont de Nemours & Co., Inc. VCR is a registered trademark of Swagelok Company. VESPEL is a registered trademark of E.I. DuPont de Nemours & Co., Inc. VITON is a registered trademark of E.I. DuPont de Nemours & Co., Inc.

Table of contents. Preface 5 Central gas supply 9 HiQ REDLINE Gas panels 15 HiQ REDLINE Points of use 53 HiQ REDLINE Cylinder regulators 63 The right HiQ REDLINE choice 72 CleanLine 79 Quick Connect 89 BASELINE 101 Components 111 Special equipment 137 IntelliSwitch Automatic gas management system 138 STABLEFLOW HCS Hydrogen control system 140 Ultra high pressure cylinder regulator 142 High flow regulator for corrosive gases 144 Low flow cylinder regulator 146 Mini cylinder regulator 148 Safety solutions 151 Standard cabinets 152 2-valve purge gas panel 154 3-valve process gas panel 156 5-valve process gas panel 158 Operation monitor 160 Fully automatic 162 Containers 165 HiQ specialty gas generators 171 Portable gas solutions 197 Cylinder types 203 Equipment connections, tubings and fittings 209 Inlet connections 210 Outlet connections 214 Fittings 215 Tubings 215 Accessories 217 Centralized monitoring systems 218 Contact gauges & Pressure transducers 220 Mounting bracket 222 Wall mounting bracket & gas cylinder trolley 224 HiQ Gas Supply System Installations 227 Services 231 Physical data 237 Conversion tables 250 Material compatibility 252 Index 255

Preface. In order to simplify everyday work, Linde has created the HiQ Specialty Gas product program. This contains different sections for different industrial areas, to focus the amount of information and concentrate on routine use. Also, it is intended to meet the increasing demands on quality and new applications. This section deals with the hardware need for gas distribution ranging from cylinders to large gas installations.

Preface. One of the most critical points when using gas for analysis and high tech production, is to maintain the integrity of the gas between cylinder and instrument or reactor. The quality of the gas is often not better than the quality of the distribution system. Therefore, it is very important to design and plan the gas supply system carefully. The equipment in this catalog is divided in different series, the HiQ REDLINE portfolio, the CleanLine points of use and the Quick Connect points of use for laboratory use, and the BASELINE regulators for use in chemical applications that use gases of lower purity. At the end of this catalog are some useful checklists for when planning and carrying through central gas supply system installations. If nothing else is stated the pressure is gauge pressure at STP (Standard Temperature and Pressure; 273.15 K and 101,325 Pa). n.a. stands for not applicable, e.g., pressure rating for a point of use that does not contain any pressure restricting components. Linde reserve the right to make alterations to specifications, quantities, etc., for production or other reason, subsequent to publication. The information contained herein has been prepared by qualified experts within Linde. While we believe that the information is General symbols Group green central gas supply system equipment for inert and non-reactive gases used as carrier gas or likewise, where gas integrity is non-crucial at cylinder change. Group blue central gas supply system equipment, with own gas purge, for inert and nonreactive gases and gas mixtures where gas integrity is important at cylinder change. Group orange central gas supply system equipment, with purge gas (nitrogen or likewise) purging, for toxic and reactive gases and gas mixtures, where gas integrity and safety is important at cylinder change.

accurate within the limits of the analytical methods employed and is complete to the extent of the specific analyses performed, we make no warranty or representation as to the suitability of the use of the information for any particular purposes. The information is offered with the understanding that any use of the information is at the sole discretion and risk of the user. In any case Linde s liability arising out of the use of the information contained herein shall be limited by the fee established for providing such information. The HiQ codes work like this; A full code is 10 digits long (xxxxyyyzzz). For Hardware the first four defines the Equipment (xxxx), the following three the Equipment Outlet (yyy) and the last three the Equipment Inlet (zzz). When Outlet and/or Inlet are undefined these are zeros (000). For gases the first four digits define the Gas product (xxxx), the following three the Cylinder (yyy) and the last three the Cylinder Valve (zzz). Equipment matching a specific gas shall have the same three last figures (zzz) where Cylinder Valve connection and Equipment Inlet connection follow the same standard. pn 2 = 0.78 bar(a) pn 2 = 0 bar(a) Ar 10 bar The driving force in diffusion is the difference in concentration, here expressed as partial pressures.

Central gas supply. The system that gives you control over the gas supply. Due to their special properties, specialty gases place particular demands on components for distribution, control and monitoring. Either because the applications require that the gases shall maintain their high purity throughout the point of use, or because their chemical and physical properties require special design of the central gas supply system.

Central gas supply. The advantages of a HiQ REDLINE central gas supply system are among others these: Increased safety The risk of accidents is reduced, as there is no need to handle gas cylinders inside the work place. Only low-pressure equipment and small gas quantities are present in the work place. Gas cylinders are collected under one roof, which facilitates removal from labs and work areas. The handling of high-pressure cylinders and the connection of toxic gases should be carried out by trained staff. If a problem with leaking gas should occur, ventilation is essential. This is especially important while handling inflammable and toxic gases, and is simplified by the central approach. Improved operating economy A continuous gas supply to each work station means less wasted time and fewer unplanned disruptions for changing gas cylinders. Fewer and larger gas cylinders which together supply all users, means more effective emptying of the cylinders which in turn give lower costs for gas and cylinder rental as well as transport charges. In addition the store monitoring and purchasing can be centralized and rationalized. Better working environment The work place can be designed more appropriately. Heavy gas cylinders containing toxic gases under high pressure can involve great risks. Outlets positioned at every work station are convenient and easy to use. Turnkey deliveries Together with the customer we carry out a requirement analysis. Thereafter, planning and installation takes place. A service agreement guarantees a troublefree gas supply without unplanned operating stoppages. Quality requirements govern the choice of material The gas to be distributed and the level of contamination that can be accepted in the gas determine the choice of component material in a gas supply system. The inner surface finish of components is of great importance to the final purity of the gas at the point of use. A better surface finish will make the pipe system easier to clean and reduce the risk of particles being released into the gas stream.

ppm 50 40 1 = Constant flow 10 l/h 2 = 5 x pressurized/decompression P 3 bar 3 = 7 x pressurized/decompression P 3 bar 4 = 10 x pressurized/decompression P 3 bar 30 1 20 10 2 4 3 2 O2 content in the purging gas 0.5 1.0 1.5 2.0 2.5 h The figure illustrates the relation between purge time, purging method and the purity realized with regard to the oxygen content in a gas system. Copper Copper has been used within gas supply technology for a long time and is still an option when using industrial grade gas. Make sure only to use cleaned copper tubing. Stainless steel Over the past years, stainless steel has become the number one choice of material for pure gas applications. This is primarily because the material is easy to clean and can be supplied with a very good surface finish. The increasing use of chemically reactive gases and the great demands made on purity have also contributed towards this trend. Welding methods have been developed which provide advantages with assembly in confined areas and which make it possible to join stainless steel systems while still maintaining a level of cleanliness and finish. Stainless steel is also chosen purely for aesthetic reasons or where the environment is aggressive and can give rise to corrosion. As a general guide the selection of components for a gas supply system is always based on the chosen gas quality. Standard purity specialty gases (Equivalent to 2.5 [99.5%] to 6.0 [99.9999%]) Component: Stainless steel or brass depending on the gas to be used. Threaded connectors, type NPT or G. Piping: Washed stainless steel. Connection: Orbital welding compression couplings, designed to clamp onto the pipe. The coupling requires the pipe to have a good degree of roundness (stainless steel) and gives a seal equivalent to 10 6 bar cm 3 /s. High purity specialty gases (Equivalent to 6.0 [99.9999] or higher) Component: Stainless steel or brass depending on the gas to be used. Threaded connectors, type NPT or G. Piping: Washed stainless steel. Connection: VCR couplings, welded onto the pipes and valves. Using a pointed profile that, under a great pressure from two sides, is pressed into metallic packing seals the couplings. The coupling gives a seal equivalent to 10 8 10 10 bar cm 3 /s. System design and start-up System design can be broken down into three stages: Determine the maximum contamination level for the gas. Select the components to be used for the gas supply system. Design, assemble and commission the system. Linde has extensive know-how within the gas industry and experience of gas media and applications everything from component selection,

Central gas supply. via system design to installation and start-up as well as all technical documentation. Linde acts as advisor and consultant together with the user in order to assess the requirements and conditions of the project in question. It is extremely important to look at the system in its entirety, both from an economic and safety point of view. Highlighted below are some of the areas that greatly affect the whole system. Distribution and storage Arrange if possible a storage area for the gas cylinders in a separate building. Connected gas cylinders are placed in a separate area, preferably in adjacent to the access area. Avoid transporting gas cylinders indoors. The gases are stored (separately) according to fixed directives depending on their physical characteristics. Ventilation is provided based on safety requirements regarding the amount and type of gas used. Gas cabinets and pipe systems Separate gas cabinets should be considered for corrosive gases and toxic gases. When using extremely dangerous gases there is a possibility of flow control and emergency stop functions. Gas pipes should be run in such a manner that the risk of mechanical damage is eliminated and that, as far as possible, through areas where any leaking gas causes as little damage as possible. Detection and alarms The need of detection is assessed. Regard should be taken to future requirements concerning types of gas and suitable flexibility to avoid unnecessary costs at a later stage. The possibility of an auto-stop if a leak is indicated. This can be achieved using detection equipment. The need of an alarm to an operating centre and/or an evacuation alarm within a certain area is defined. Linde has well-trained assembly teams with vast experience of specialty gas installations.

Each team has a supervisor who is responsible for the completion of the project and at the same time functions as an on-site contact person. Pipe and components are delivered sealed and well packed to the assembly area. To maintain the purity requirements and to produce a tight gas system, automatic computer controlled pipe welding equipment is used. All welding is carried out using internal and external shield-gas purging, which results in clean and bright joints. A complete system is purged clean and analyzed to determine the humidity and oxygen content. To guarantee that a system is tight, we carry out a helium leak detection test. A certificate of tightness is drawn up. Before a gas supply system can be regarded as completed and is handed over for start-up it is documented. A complete set of documentation comprises: Layout documents (show the entire supply systems design and positions in respective buildings). Technical information covering all components. Spare part lists. Pressure testing protocols. Analysis certificates where applicable. Tightness certificates where applicable. Operating and servicing instructions. Pressure testing according to applicable standards is carried out and a protocol is established. System specifications including equipment lists.

HiQ REDLINE Gas panels. The starting point. Gas panels are used in central gas supply systems for reducing the high primary pressure in the cylinders to more manageable secondary pressures and is the place where the cylinders are changed, etc. It can be considered the heart of the central gas system. Linde has three types of gas panels: Single, double and semi-automatic. Single panels handle one cylinder or bundle at a time. When the cylinder/bundle is empty it has to be changed. Double panels handle two cylinders or bundles (or a combination) at a time. When the cylinder or bundle is empty, switchover has to be done manually. Semi-automatic panels handle two cylinders/bundles at a time. When the pressure at one side (the primary side) reaches a pre-set value the manifold switches to the other side. This means that it is possible to change the gas cylinders without interrupting the gas flow. After the cylinders at the primary side are changed the handle is turned, thus changing the secondary side (delivering the gas) to the new primary side. It is possible to create a fully automatic manifold, with either electric or pneumatic valves, but since the cylinders have to be changed anyway the cost is rarely justified. Note: Gas panels are not supplied with cylinder connections. For information on available cylinder connections, please contact your local Linde representative. Group green equipment for inert and nonreactive gases used as carrier gas or likewise, where gas integrity is non-crucial at cylinder change. S 200 Group blue equipment, with own gas purge, for inert and non-reactive gases and gas mixtures where gas integrity is important at cylinder change. S 201 S 202 D 204 A 208 Group orange equipment, with purge gas (nitrogen or likewise) purging, for toxic and reactive gases and gas mixtures, where gas integrity and safety is important at cylinder change. S 203 A 209

HiQ REDLINE Gas panels S 200. Single gas panel. Single stage gas supply panel designed for pure gases and mixtures. Description Gas panel S 200 is designed for single cylinders or bundles. It is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and a shut-off valve for the process gas. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 145 3,000 psi Outlet gauge range 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,400 psi 0 315 bar 0 4,500 psi Operating temperature 20 +70 C 4 +158 F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

Downstream pressure, bar To process 9 10 bar* 6 3 Max flow 0 0 3 6 9 12 15 18 21 23 27 * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ 160 245 30 60 155 100 All measurements in millimeters. Drawings of other types available on request.

Gas panels S 200. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 200 S200 short flexihose and 1 cylinder S 200 long flexihose and 2 cylinders B 6 85 3409 B 14 200 3144 B 50 725 3410 B 200 3,000 3411 SS 6 85 3412 SS 14 200 3145 SS 50 725 3413 SS 200 3,000 3414 B SH1 6 85 3509 B SH1 14 200 3510 B SH1 50 725 3511 B SH1 200 3,000 3512 SS SH1 6 85 3544 SS SH1 14 200 3545 SS SH1 50 725 3546 SS SH1 200 3,000 3547 B LH2 6 85 3525 B LH2 14 200 3526 B LH2 50 725 3527 B LH2 200 3,000 3528 SS LH2 6 85 3560 SS LH2 14 200 3561 SS LH2 50 725 3562 SS LH2 200 3,000 3563 S 200 coil and 1 cylinder S 200 short flexihose and 2 cylinders S 200 long flexihose and 4 cylinders B C1 6 85 3497 B C1 14 200 3498 B C1 50 725 3499 B C1 200 3,000 3500 SS C1 6 85 4450 SS C1 14 200 3533 SS C1 50 725 3534 SS C1 200 3,000 3535 B SH2 6 85 3513 B SH2 14 200 3514 B SH2 50 725 3515 B SH2 200 3,000 3516 SS SH2 6 85 3548 SS SH2 14 200 3549 SS SH2 50 725 3550 SS SH2 200 3,000 3551 B LH4 6 85 3529 B LH4 14 200 3530 B LH4 50 725 3531 B LH4 200 3,000 3532 SS LH4 6 85 3564 SS LH4 14 200 3565 SS LH4 50 725 3566 SS LH4 200 3,000 3567 S 200 coil and 2 cylinders S 200 short flexihose and 4 cylinders S 200C contact gauge B C2 6 85 3501 B C2 14 200 3502 B C2 50 725 3503 B C2 200 3,000 3504 SS C2 6 85 3536 SS C2 14 200 3537 SS C2 50 725 3538 SS C2 200 3,000 3539 B SH4 6 85 3517 B SH4 14 200 3518 B SH4 50 725 3519 B SH4 200 3,300 3520 SS SH4 6 85 3552 SS SH4 14 200 3553 SS SH4 50 725 3554 SS SH4 200 3,000 3555 B C 6 85 4465 B C 14 200 4466 B C 50 725 4467 B C 200 3,000 4468 SS C 6 85 4505 SS C 14 200 4506 SS C 50 725 4507 SS C 200 3,000 4508 S 200 coil and 4 cylinders S 200 long flexihose and 1 cylinder B C4 6 85 3505 B C4 14 200 3506 B C4 50 725 3507 B C4 200 3,000 3508 SS C4 6 85 3540 SS C4 14 200 3541 SS C4 50 725 3542 SS C4 200 3,000 3543 B LH1 6 85 3521 B LH1 14 200 3522 B LH1 50 725 3523 B LH1 200 3,000 3524 SS LH1 6 85 3556 SS LH1 14 200 3557 SS LH1 50 725 3558 SS LH1 200 3,000 3559

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 200C contact gauge, coil and 1 cylinder S 200C contact gauge, short flexihose and 1 cylinder S 200C contact gauge,long flexihose and 1 cylinder B C C1 6 85 4469 B C C1 14 200 4470 B C C1 50 725 4471 B C C1 200 3,000 4472 SS C C1 6 85 4509 SS C C1 14 200 4510 SS C C1 50 725 4511 SS C C1 200 3,000 4512 S 200C contact gauge, coil and 2 cylinders B C C2 6 85 4473 B C C2 14 200 4474 B C C2 50 725 4475 B C C2 200 3,000 4476 SS C C2 6 85 4513 SS C C2 14 200 4514 SS C C2 50 725 4515 SS C C2 200 3,000 4516 S 200C contact gauge, coil and 4 cylinders B C C4 6 85 4477 B C C4 14 200 4478 B C C4 50 725 4479 B C C4 200 3,000 4480 SS C C4 6 85 4517 SS C C4 14 200 4518 SS C C4 50 725 4519 SS C C4 200 3,000 4520 B C SH1 6 85 4481 B C SH1 14 200 4482 B C SH1 50 725 4483 B C SH1 200 3,000 4484 SS C SH1 6 85 4521 SS C SH1 14 200 4522 SS C SH1 50 725 4523 SS C SH1 200 3,000 4524 S 200C contact gauge, short flexihose and 2 cylinders B C SH2 6 85 4485 B C SH2 14 200 4486 B C SH2 50 725 4487 B C SH2 200 3,000 4488 SS C SH2 6 85 4525 SS C SH2 14 200 4526 SS C SH2 50 725 4527 SS C SH2 200 3,000 4528 S 200C contact gauge, short flexihose and 4 cylinders B C SH4 6 85 4489 B C SH4 14 200 4490 B C SH4 50 725 4491 B C SH4 200 3,000 4492 SS C SH4 6 85 4529 SS C SH4 14 200 4530 SS C SH4 50 725 4531 SS C SH4 200 3,000 4532 B C LH1 6 85 4493 B C LH1 14 200 4494 B C LH1 50 725 4495 B C LH1 200 3,000 4496 SS C LH1 6 85 4533 SS C LH1 14 200 4534 SS C LH1 50 725 4535 SS C LH1 200 3,000 4536 S 200C contact gauge, long flexihose and 2 cylinders B C LH2 6 85 4497 B C LH2 14 200 4498 B C LH2 50 725 4499 B C LH2 200 3,000 4500 SS C LH2 6 85 4537 SS C LH2 14 200 4538 SS C LH2 50 725 4539 SS C LH2 200 3,000 4540 S 200C contact gauge, long flexihose and 4 cylinders B C LH4 6 85 4501 B C LH4 14 200 4502 B C LH4 50 725 4503 B C LH4 200 3,000 4504 SS C LH4 6 85 4541 SS C LH4 14 200 4542 SS C LH4 50 725 4543 SS C LH4 200 3,000 4544

HiQ REDLINE Gas panels S 201. Single gas panel. Single stage gas supply panel with internal gas purging, designed for high purity gases and mixtures (including flammable). Description Gas panel S 201 is designed for single cylinders or bundles. It is equipped with internal gas purging to avoid contaminants entering the process line after changing the cylinders. It is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas and for the purge gas. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 145 3,000 psi Outlet gauge range 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,400 psi 0 315 bar 0 4,500 psi Operating temperature 20 +70 C 4 +158 F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet NPT 1/4 female Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

Downstream pressure, bar To process To ventilation 9 10 bar* 6 3 0 0 Max flow 3 6 9 12 15 18 21 23 27 * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ 160 245 6 60 155 100 All measurements in millimeters. Model R. Drawings of other types available on request.

Gas panels S 201. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 201 S 201 short flexihose and 1 cylinder S 201 long flexihose and 2 cylinder B 6 85 3415 B 14 200 3146 B 50 725 3416 B 200 3,000 3417 SS 6 85 3418 SS 14 200 3147 SS 50 725 3419 SS 200 3,000 3420 B SH1 6 85 3580 B SH1 14 200 3581 B SH1 50 725 3582 B SH1 200 3,000 3583 SS SH1 6 85 3652 SS SH1 14 200 3653 SS SH1 50 725 3654 SS SH1 200 3,000 3655 B LH2 6 85 3596 B LH2 14 200 3597 B LH2 50 725 3598 B LH2 200 3,000 3599 SS LH2 6 85 3668 SS LH2 14 200 3669 SS LH2 50 725 3670 SS LH2 200 3,000 3671 S 201 coil and 1 cylinder S 201 short flexihose and 2 cylinders S 201 long flexihose and 4 cylinders B C1 6 85 3568 B C1 14 200 3569 B C1 50 725 3570 B C1 200 3,000 3571 SS C1 6 85 3640 SS C1 14 200 3641 SS C1 50 725 3642 SS C1 200 3,000 3643 B SH2 6 85 3584 B SH2 14 200 3585 B SH2 50 725 3586 B SH2 200 3,000 3587 SS SH2 6 85 3656 SS SH2 14 200 3657 SS SH2 50 725 3658 SS SH2 200 3,000 3659 B LH4 6 85 3600 B LH4 14 200 3601 B LH4 50 725 3602 B LH4 200 3,000 3603 SS LH4 6 85 3672 SS LH4 14 200 3673 SS LH4 50 725 3674 SS LH4 200 3,000 3675 S 201 coil and 2 cylinders S 201 short flexihose and 4 cylinders S 201/R residual gas outlet B C2 6 85 3572 B C2 14 200 3573 B C2 50 725 3574 B C2 200 3,000 3575 SS C2 6 85 3644 SS C2 14 200 3645 SS C2 50 725 3646 SS C2 200 3,000 3647 S 201 coil and 4 cylinders B SH4 6 85 3588 B SH4 14 200 3589 B SH4 50 725 3590 B SH4 200 3,000 3591 SS SH4 6 85 3660 SS SH4 14 200 3661 SS SH4 50 725 3662 SS SH4 200 3,000 3663 S 201 long flexihose and 1 cylinder B R 6 85 3471 B R 14 200 3472 B R 50 725 3473 B R 200 3,000 3474 SS R 6 85 3475 SS R 14 200 3476 SS R 50 725 3477 SS R 200 3,000 3478 SS R C1 200 3,000 3679 B C4 6 85 3576 B C4 14 200 3577 B C4 50 725 3578 B C4 200 3,000 3579 SS C4 6 85 3648 SS C4 14 200 3649 SS C4 50 725 3650 SS C4 200 3,000 3651 B LH1 6 85 3592 B LH1 14 200 3593 B LH1 50 725 3594 B LH1 200 3,000 3595 SS LH1 6 85 3664 SS LH1 14 200 3665 SS LH1 50 725 3666 SS LH1 200 3,000 3667

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 201/R residual gas outlet, coil and 1 cylinder S 201/R residual gas outlet, short flexihose and 1 cylinder S 201/R residual gas outlet, long flexihose and 1 cylinder B R C1 6 85 3604 B R C1 14 200 3605 B R C1 50 725 3606 B R C1 200 3,000 3607 SS R C1 6 85 3676 SS R C1 14 200 3677 SS R C1 50 725 3678 S 201/R residual gas outlet, coil and 2 cylinders B R C2 6 85 3608 B R C2 14 200 3609 B R C2 50 725 3610 B R C2 200 3,000 3611 SS R C2 6 85 3680 SS R C2 14 200 3681 SS R C2 50 725 3682 SS R C2 200 3,000 3683 S 201/R residual gas outlet, coil and 4 cylinders B R C4 6 85 3612 B R C4 14 200 3613 B R C4 50 725 3614 B R C4 200 3,000 3615 SS R C4 6 85 3684 SS R C4 14 200 3685 SS R C4 50 725 3686 SS R C4 200 3,000 3687 B R SH1 6 85 3616 B R SH1 14 200 3617 B R SH1 50 725 3618 B R SH1 200 3,000 3619 SS R SH1 6 85 3688 SS R SH1 14 200 3689 SS R SH1 50 725 3690 SS R SH1 200 3,000 3691 S 201/R residual gas outlet, short flexihose and 2 cylinders B R SH2 6 85 3620 B R SH2 14 200 3621 B R SH2 50 725 3622 B R SH2 200 3,000 3623 SS R SH2 6 85 3692 SS R SH2 14 200 3693 SS R SH2 50 725 3694 SS R SH2 200 3,000 3695 S 201/R residual gas outlet, short flexihose and 4 cylinders B R SH4 6 85 3624 B R SH4 14 200 3625 B R SH4 50 725 3626 B R SH4 200 3,000 3627 SS R SH4 6 85 3696 SS R SH4 14 200 3697 SS R SH4 50 725 3698 SS R SH4 200 3,000 3699 B R LH1 6 85 3628 B R LH1 14 200 3629 B R LH1 50 725 3630 B R LH1 200 3,000 3631 SS R LH1 6 85 3700 SS R LH1 14 200 3701 SS R LH1 50 725 3702 SS R LH1 200 3,000 3703 S 201/R residual gas outlet, long flexihose and 2 cylinders B R LH2 6 85 3632 B R LH2 14 200 3633 B R LH2 50 725 3634 B R LH2 200 3,000 3635 SS R LH2 6 85 3704 SS R LH2 14 200 3705 SS R LH2 50 725 3706 SS R LH2 200 3,000 3707 S 201/R residual gas outlet, long flexihose and 4 cylinders B R LH4 6 85 3636 B R LH4 14 200 3637 B R LH4 50 725 3638 B R LH4 200 3,000 3639 SS R LH4 6 85 3708 SS R LH4 14 200 3709 SS R LH4 50 725 3710 SS R LH4 200 3,000 3711

Gas panels S 201. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 201/C contact gauge B C 6 85 4545 B C 14 200 4546 B C 50 725 4547 B C 200 3,000 4548 SS C 6 85 4625 SS C 14 200 4626 SS C 50 725 4627 SS C 200 3,000 4628 S 201/C contact gauge, coil and 1 cylinder B C C1 6 85 4549 B C C1 14 200 4550 B C C1 50 725 4551 B C C1 200 3,000 4552 SS C C1 6 85 4629 SS C C1 14 200 4630 SS C C1 50 725 4631 SS C C1 200 3,000 4632 S 201/C contact gauge, coil and 2 cylinders B C C2 6 85 4553 B C C2 14 200 4554 B C C2 50 725 4555 B C C2 200 3,000 4556 SS C C2 6 85 4633 SS C C2 14 200 4634 SS C C2 50 725 4635 SS C C2 200 3,000 4636 S 201/C contact gauge, coil and 4 cylinders B C C4 6 85 4557 B C C4 14 200 4558 B C C4 50 725 4559 B C C4 200 3,000 4560 SS C C4 6 85 4637 SS C C4 14 200 4638 SS C C4 50 725 4639 SS C C4 200 3,000 4640 S 201/C contact gauge, short flexihose and 1 cylinder B C SH1 6 85 4561 B C SH1 14 200 4562 B C SH1 50 725 4563 B C SH1 200 3,000 4564 SS C SH1 6 85 4641 SS C SH1 14 200 4642 SS C SH1 50 725 4643 SS C SH1 200 3,000 4644 S 201/C contact gauge, short flexihose and 2 cylinders B C SH2 6 85 4565 B C SH2 14 200 4566 B C SH2 50 725 4567 B C SH2 200 3,000 4568 SS C SH2 6 85 4645 SS C SH2 14 200 4646 SS C SH2 50 725 4647 SS C SH2 200 3,000 4648 S 201/C contact gauge, short flexihose and 4 cylinders B C SH4 6 85 4569 B C SH4 14 200 4570 B C SH4 50 725 4571 B C SH4 200 3,000 4572 SS C SH4 6 85 4649 SS C SH4 14 200 4650 SS C SH4 50 725 4651 SS C SH4 200 3,000 4652 S 201/C contact gauge, long flexihose and 1 cylinder B C LH1 6 85 4573 B C LH1 14 200 4574 B C LH1 50 725 4575 B C LH1 200 3,000 4576 SS C LH1 6 85 4653 SS C LH1 14 200 4654 SS C LH1 50 725 4655 SS C LH1 200 3,000 4656 S 201/C contact gauge, long flexihose and 2 cylinders B C LH2 6 85 4577 B C LH2 14 200 4578 B C LH2 50 725 4579 B C LH2 200 3,000 4580 SS C LH2 6 85 4657 SS C LH2 14 200 4658 SS C LH2 50 725 4659 SS C LH2 200 3,000 4660 S 201/C contact gauge, long flexihose and 4 cylinders B C LH4 6 85 4581 B C LH4 14 200 4582 B C LH4 50 725 4583 B C LH4 200 3,000 4584 SS C LH4 6 85 4661 SS C LH4 14 200 4662 SS C LH4 50 725 4663 SS C LH4 200 3,000 4664

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code S 201/RC residual gas outlet, contact gauge B RC 6 85 4585 B RC 14 200 4586 B RC 50 725 4587 B RC 200 3,000 4588 SS RC 6 85 4665 SS RC 14 200 4666 SS RC 50 725 4667 SS RC 200 3,000 4668 S 201/RC residual gas outlet, contact gauge, coil and 1 cylinder B RC C1 6 85 4589 B RC C1 14 200 4590 B RC C1 50 725 4591 B RC C1 200 3,000 4592 SS RC C1 6 85 4669 SS RC C1 14 200 4670 SS RC C1 50 725 4671 SS RC C1 200 3,000 4672 S 201/RC residual gas outlet, contact gauge, coil and 2 cylinders B RC C2 6 85 4593 B RC C2 14 200 4594 B RC C2 50 725 4595 B RC C2 200 3,000 4596 SS RC C2 6 85 4673 SS RC C2 14 200 4674 SS RC C2 50 725 4675 SS RC C2 200 3,000 4676 S 201/RC residual gas outlet, contact gauge, coil and 4 cylinders B RC C4 6 85 4597 B RC C4 14 200 4598 B RC C4 50 725 4599 Specifications bar psi HiQ code B RC C4 200 3,000 4600 SS RC C4 6 85 4677 SS RC C4 14 200 4678 SS RC C4 50 725 4679 SS RC C4 200 3,000 4680 S 201/RC residual gas outlet, contact gauge, short flexihose and 1 cylinder B RC SH1 6 85 4601 B RC SH1 14 200 4602 B RC SH1 50 725 4603 B RC SH1 200 3,000 4604 SS RC SH1 6 85 4681 SS RC SH1 14 200 4682 SS RC SH1 50 725 4683 SS RC SH1 200 3,000 4684 S 201/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders B RC SH2 6 85 4605 B RC SH2 14 200 4606 B RC SH2 50 725 4607 B RC SH2 200 3,000 4608 SS RC SH2 6 85 4685 SS RC SH2 14 200 4686 SS RC SH2 50 725 4687 SS RC SH2 200 3,000 4688 S 201/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders B RC SH4 6 85 4609 B RC SH4 14 200 4610 B RC SH4 50 725 4611 B RC SH4 200 3,000 4612 SS RC SH4 6 85 4689 SS RC SH4 14 200 4690 SS RC SH4 50 725 4691 SS RC SH4 200 3,000 4692 Specifications bar psi HiQ code S 201/RC residual gas outlet, contact gauge, long flexihose and 1 cylinder B RC LH1 6 85 4613 B RC LH1 14 200 4614 B RC LH1 50 725 4615 B RC LH1 200 3,000 4616 SS RC LH1 6 85 4693 SS RC LH1 14 200 4694 SS RC LH1 50 725 4695 SS RC LH1 200 3,000 4696 S 201/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC LH2 6 85 4617 B RC LH2 14 200 4618 B RC LH2 50 725 4619 B RC LH2 200 3,000 4620 SS RC LH2 6 85 4697 SS RC LH2 14 200 4698 SS RC LH2 50 725 4699 SS RC LH2 200 3,000 4700 S 201/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC LH4 6 85 4621 B RC LH4 14 200 4622 B RC LH4 50 725 4623 B RC LH4 200 3,000 4624 SS RC LH4 6 85 4701 SS RC LH4 14 200 4702 SS RC LH4 50 725 4703 SS RC LH4 200 3,000 4704

HiQ REDLINE Gas panels S 202. Single gas panel. Single stage gas supply panel with internal gas purging, designed for pure gases and mixtures. Description Gas panel S 202 is designed for single cylinders or bundles. It is equipped with internal gas purging to avoid contaminants entering the process line after changing the cylinders. It is is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas at high and low pressure ends and for the purging gas. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 145 3,000 psi Outlet gauge range 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,400 psi 0 315 bar 0 4,500 psi Operating temperature 20 +70 C 4 +158 F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet NPT 1/4 female Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

Downstream pressure, bar To process To ventilation 9 10 bar* 6 3 0 0 Max flow 3 6 9 12 15 18 21 23 27 * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ 160 30 245 60 155 100 All measurements in millimeters. Model R. Drawings of other types available on request.

Gas panels S 202. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202 S 202 short flexihose and 1 cylinder S 202 long flexihose and 2 cylinders B 6 85 3421 B 14 200 3148 B 50 725 3422 B 200 3,000 3423 SS 6 85 3424 SS 14 200 3149 SS 50 725 3425 SS 200 3,000 3426 B SH1 6 85 3724 B SH1 14 200 3725 B SH1 50 725 3726 B SH1 200 3,000 3727 SS SH1 6 85 3796 SS SH1 14 200 3797 SS SH1 50 725 3798 SS SH1 200 3,000 3799 B LH2 6 85 3740 B LH2 14 200 3741 B LH2 50 725 3742 B LH2 200 3,000 3743 SS LH2 6 85 3812 SS LH2 14 200 3813 SS LH2 50 725 3814 SS LH1 200 3,000 3815 S 202 coil and 1 cylinder S 202 short flexihose and 2 cylinders S 202 long flexihose and 4 cylinders B C1 6 85 3712 B C1 14 200 3713 B C1 50 725 3714 B C1 200 3,000 3715 SS C1 6 85 3784 SS C1 14 200 3785 SS C1 50 725 3786 SS C1 200 3,000 3787 B SH2 6 85 3728 B SH2 14 200 3729 B SH2 50 725 3730 B SH2 200 3,000 3731 SS SH2 6 85 3800 SS SH2 14 200 3801 SS SH2 50 725 3802 SS SH2 200 3,000 3803 B LH4 6 85 3744 B LH4 14 200 3745 B LH4 50 725 3746 B LH4 200 3,000 3747 SS LH4 6 85 3816 SS LH4 14 200 3817 SS LH4 50 725 3818 SS LH4 200 3,000 3819 S 202 coil and 2 cylinders S 202 short flexihose and 4 cylinders S 202/R residual gas outlet B C2 6 85 3716 B C2 14 200 3717 B C2 50 725 3718 B C2 200 3,000 3719 SS C2 6 85 3788 SS C2 14 200 3789 SS C2 50 725 3790 SS C2 200 3,000 3791 B SH4 6 85 3732 B SH4 14 200 3733 B SH4 50 725 3734 B SH4 200 3,000 3735 SS SH4 6 85 3804 SS SH4 14 200 3805 SS SH4 50 725 3806 SS SH4 200 3,000 3807 B R 6 85 3479 B R 14 200 3480 B R 50 725 3481 B R 200 3,000 3482 SS R 6 85 3483 SS R 14 200 3484 SS R 50 725 3485 SS R 200 3,000 3486 S 202 coil and 4 cylinders S 202 long flexihose and 1 cylinder B C4 6 85 3720 B C4 14 200 3721 B C4 50 725 3722 B C4 200 3,000 3723 SS C4 6 85 3792 SS C4 14 200 3793 SS C4 50 725 3794 SS C4 200 3,000 3795 B LH1 6 85 3736 B LH1 14 200 3737 B LH1 50 725 3738 B LH1 200 3,000 3739 SS LH1 6 85 3808 SS LH1 14 200 3809 SS LH1 50 725 3810 SS LH1 200 3,000 3811

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202/R residual gas outlet, coil and 1 cylinder B R C1 6 85 3748 B R C1 14 200 3749 B R C1 50 725 3750 B R C1 200 3,000 3751 SS R C1 6 85 3820 SS R C1 14 200 3821 SS R C1 50 725 3822 SS R C1 200 3,000 3823 S 202/R residual gas outlet, coil and 2 cylinders B R C2 6 85 3752 B R C2 14 200 3753 B R C2 50 725 3754 B R C2 200 3,000 3755 SS R C2 6 85 3824 SS R C2 14 200 3825 SS R C2 50 725 3826 SS R C2 200 3,000 3827 S 202/R residual gas outlet, coil and 4 cylinders B R C4 6 85 3756 B R C4 14 200 3757 B R C4 50 725 3758 B R C4 200 3,000 3759 SS R C4 6 85 3828 SS R C4 14 200 3829 SS R C4 50 725 3830 SS R C4 200 3,000 3831 S 202/R residual gas outlet, short flexihose and 1 cylinder B R SH1 6 85 3760 B R SH1 14 200 3761 B R SH1 50 725 3762 B R SH1 200 3,000 3763 SS R SH1 6 85 3832 SS R SH1 14 200 3833 SS R SH1 50 725 3834 SS R SH1 200 3,000 3835 S 202/R residual gas outlet, short flexihose and 2 cylinders B R SH2 6 85 3764 B R SH2 14 200 3765 B R SH2 50 725 3766 B R SH2 200 3,000 3767 SS R SH2 6 85 3836 SS R SH2 14 200 3837 SS R SH2 50 725 3838 SS R SH2 200 3,000 3839 S 202/R residual gas outlet, short flexihose and 4 cylinders B R SH4 6 85 3768 B R SH4 14 200 3769 B R SH4 50 725 3770 B R SH4 200 3,000 3771 SS R SH4 6 85 3840 SS R SH4 14 200 3841 SS R SH4 50 725 3842 SS R SH4 200 3,000 3843 S 202/R residual gas outlet, long flexihose and 1 cylinder B R LH1 6 85 3772 B R LH1 14 200 3773 B R LH1 50 725 3774 B R LH1 200 3,000 3775 SS R LH1 6 85 3844 SS R LH1 14 200 3845 SS R LH1 50 725 3846 SS R LH1 200 3,000 3847 S 202/R residual gas outlet, long flexihose and 2 cylinders B R LH2 6 85 3776 B R LH2 14 200 3777 B R LH2 50 725 3778 B R LH2 200 3,000 3779 SS R LH2 6 85 3848 SS R LH2 14 200 3849 SS R LH2 50 725 3850 SS R LH2 200 3,000 3851 S 202/R residual gas outlet, long flexihose and 4 cylinders B R LH4 6 85 3780 B R LH4 14 200 3781 B R LH4 50 725 3782 B R LH4 200 3,000 3783 SS R LH4 6 85 3852 SS R LH4 14 200 3853 SS R LH4 50 725 3854 SS R LH4 200 3,000 3855 S 202/C contact gauge B C 6 85 4705 B C 14 200 4706 B C 50 725 4707 B C 200 3,000 4708 SS C 6 85 4785 SS C 14 200 4786 SS C 50 725 4787 SS C 200 3,000 4788

Gas panels S 202. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202/C contact gauge, coil and 1 cylinder B C C1 6 85 4709 B C C1 14 200 4710 B C C1 50 725 4711 B C C1 200 3,000 4712 SS C C1 6 85 4789 SS C C1 14 200 4790 SS C C1 50 725 4791 SS C C1 200 3,000 4792 S 202/C contact gauge, coil and 2 cylinders B C C2 6 85 4713 B C C2 14 200 4714 B C C2 50 725 4715 B C C2 200 3,000 4716 SS C C2 6 85 4793 SS C C2 14 200 4794 SS C C2 50 725 4795 SS C C2 200 3,000 4796 S 202/C contact gauge, coil and 4 cylinders B C C4 6 85 4717 B C C4 14 200 4718 B C C4 50 725 4719 B C C4 200 3,000 4720 SS C C4 6 85 4797 SS C C4 14 200 4798 SS C C4 50 725 4799 SS C C4 200 3,000 4800 S 202/C contact gauge, short flexihose and 1 cylinder B C SH1 6 85 4721 B C SH1 14 200 4722 B C SH1 50 725 4723 B C SH1 200 3,000 4724 SS C SH1 6 85 4801 SS C SH1 14 200 4802 SS C SH1 50 725 4803 SS C SH1 200 3,000 4804 S 202/C contact gauge, short flexihose and 2 cylinders B C SH2 6 85 4725 B C SH2 14 200 4726 B C SH2 50 725 4727 B C SH2 200 3,000 4728 SS C SH2 6 85 4805 SS C SH2 14 200 4806 SS C SH2 50 725 4807 SS C SH2 200 3,000 4808 S 202/C contact gauge, short flexihose and 4 cylinders B C SH4 6 85 4729 B C SH4 14 200 4730 B C SH4 50 725 4731 B C SH4 200 3,000 4732 SS C SH4 6 85 4809 SS C SH4 14 200 4810 SS C SH4 50 725 4811 SS C SH4 200 3,000 4812 S 202/C contact gauge, long flexihose and 1 cylinder B C LH1 6 85 4733 B C LH1 14 200 4734 B C LH1 50 725 4735 B C LH1 200 3,000 4736 SS C LH1 6 85 4813 SS C LH1 14 200 4814 SS C LH1 50 725 4815 SS C LH1 200 3,000 4816 S 202/C contact gauge, long flexihose and 2 cylinders B C LH2 6 85 4737 B C LH2 14 200 4738 B C LH2 50 725 4739 B C LH2 200 3,000 4740 SS C LH2 6 85 4817 SS C LH2 14 200 4818 SS C LH2 50 725 4819 SS C LH2 200 3,000 4820 S 202/C contact gauge, long flexihose and 4 cylinders B C LH4 6 85 4741 B C LH4 14 200 4742 B C LH4 50 725 4743 B C LH4 200 3,000 4744 SS C LH4 6 85 4821 SS C LH4 14 200 4822 SS C LH4 50 725 4823 SS C LH4 200 3,000 4824 S 202/RC residual gas outlet,contact gauge B RC 6 85 4745 B RC 14 200 4746 B RC 50 725 4747 B RC 200 3,000 4748 SS RC 6 85 4825 SS RC 14 200 4826 SS RC 50 725 4827 SS RC 200 3,000 4828

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202/RC residual gas outlet, contact gauge, coil and 1 cylinder S 202/RC residual gas outlet, contact gauge, short flexihose and 1 cylinder S 202/RC residual gas outlet, contact gauge, long flexihose and 1 cylinder B RC C1 6 85 4749 B RC C1 14 200 4750 B RC C1 50 725 4751 B RC C1 200 3,000 4752 SS RC C1 6 85 4829 SS RC C1 14 200 4830 SS RC C1 50 725 4831 SS RC C1 200 3,000 4832 B RC SH1 6 85 4761 B RC SH1 14 200 4762 B RC SH1 50 725 4763 B RC SH1 200 3,000 4764 SS RC SH1 6 85 4841 SS RC SH1 14 200 4842 SS RC SH1 50 725 4843 SS RC SH1 200 3,000 4844 B RC LH1 6 85 4773 B RC LH1 14 200 4774 B RC LH1 50 725 4775 B RC LH1 200 3,000 4776 SS RC LH1 6 85 4853 SS RC LH1 14 200 4854 SS RC LH1 50 725 4855 SS RC LH1 200 3,000 4856 S 202/RC residual gas outlet, contact gauge, coil and 2 cylinders S 202/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders S 202/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC C2 6 85 4753 B RC C2 14 200 4754 B RC C2 50 725 4755 B RC C2 200 3,000 4756 SS RC C2 6 85 4833 SS RC C2 14 200 4834 SS RC C2 50 725 4835 SS RC C2 200 3,000 4836 B RC SH2 6 85 4765 B RC SH2 14 200 4766 B RC SH2 50 725 4767 B RC SH2 200 3,000 4768 SS RC SH2 6 85 4845 SS RC SH2 14 200 4846 SS RC SH2 50 725 4847 SS RC SH2 200 3,000 4848 B RC LH2 6 85 4777 B RC LH2 14 200 4778 B RC LH2 50 725 4779 B RC LH2 200 3,000 4780 SS RC LH2 6 85 4857 SS RC LH2 14 200 4858 SS RC LH2 50 725 4859 SS RC LH2 200 3,000 4860 S 202/RC residual gas outlet, contact gauge, coil and 4 cylinders S 202/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders S 202/RC residual gas outlet, contact gauge, long flexihose and 4 cylinder B RC C4 6 85 4757 B RC C4 14 200 4758 B RC C4 50 725 4759 B RC C4 200 3,000 4760 SS RC C4 6 85 4837 SS RC C4 14 200 4838 SS RC C4 50 725 4839 SS RC C4 200 3,000 4840 B RC SH4 6 85 4769 B RC SH4 14 200 4770 B RC SH4 50 725 4771 B RC SH4 200 3,000 4772 SS RC SH4 6 85 4849 SS RC SH4 14 200 4850 SS RC SH4 50 725 4851 SS RC SH4 200 3,000 4852 B RC LH4 6 85 4781 B RC LH4 14 200 4782 B RC LH4 50 725 4783 B RC LH4 200 3,000 4784 SS RC LH4 6 85 4861 SS RC LH4 14 200 4862 SS RC LH4 50 725 4863 SS RC LH4 200 3,000 4864

HiQ REDLINE Gas panels S 203. Single gas panel. Single stage gas supply panel with external gas purging, designed for reactive, toxic and corrosive gases. Description Gas panel S 203 is designed for single cylinders or bundles. It is equipped with external gas purging to allow purging of the high pressure side before disconnecting cylinders. It is is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas at high and low pressure ends and for the purging gas. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 145 3,000 psi Outlet gauge range 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,400 psi 0 315 bar 0 4,500 psi Operating temperature 20 +70 C 4 +158 F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas inlet Tube fitting 6 mm Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

Downstream pressure, bar Purge gas inlet To process To ventilation 9 10 bar* 6 3 Max flow 0 0 3 6 9 12 15 18 21 23 27 * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ 160 30 6 6 100 155 23 60 245 All measurements in millimeters. Model R. Drawings of other types available on request.

Gas panels S 203. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203 S 203 short flexihose and 1 cylinder S 203 long flexihose and 2 cylinders B 6 85 3427 B 14 200 3150 B 50 725 3428 B 200 3,000 3429 SS 6 85 3430 SS 14 200 3151 SS 50 725 3431 SS 200 3,000 3432 B SH1 6 85 3868 B SH1 14 200 3869 B SH1 50 725 3870 B SH1 200 3,000 3871 SS SH1 6 85 3904 SS SH1 14 200 3905 SS SH1 50 725 3906 SS SH1 200 3,000 3907 B LH2 6 85 3884 B LH2 14 200 3885 B LH2 50 725 3886 B LH2 200 3,000 3887 SS LH2 6 85 3920 SS LH2 14 200 3921 SS LH2 50 725 3922 SS LH2 200 3,000 3923 S 203 coil and 1 cylinder S 203 short flexihose and 2 cylinders S 203 long flexihose and 4 cylinders B C1 6 85 3856 B C1 14 200 3857 B C1 50 725 3858 B C1 200 3,000 3859 SS C1 6 85 3892 SS C1 14 200 3893 SS C1 50 725 3894 SS C1 200 3,000 3895 B SH2 6 85 3872 B SH2 14 200 3873 B SH2 50 725 3874 B SH2 200 3,000 3875 SS SH2 6 85 3908 SS SH2 14 200 3909 SS SH2 50 725 3910 SS SH2 200 3,000 3911 B LH4 6 85 3888 B LH4 14 200 3889 B LH4 50 725 3890 B LH4 200 3,000 3891 SS LH4 6 85 3924 SS LH4 14 200 3925 SS LH4 50 725 3926 SS LH4 200 3,000 3927 S 203 coil and 2 cylinders S 203 short flexihose and 4 cylinders S 203/R residual gas outlet B C2 6 85 3860 B C2 14 200 3861 B C2 50 725 3862 B C2 200 3,000 3863 SS C2 6 85 3896 SS C2 14 200 3897 SS C2 50 725 3898 SS C2 200 3,000 3899 B SH4 6 85 3876 B SH4 14 200 3877 B SH4 50 725 3878 B SH4 200 3,000 3879 SS SH4 6 85 3912 SS SH4 14 200 3913 SS SH4 50 725 3914 SS SH4 200 3,000 3915 B R 6 85 4865 B R 14 200 4866 B R 50 725 4867 B R 200 3,000 4868 SS R 6 85 4985 SS R 14 200 4986 SS R 50 725 4987 SS R 200 3,000 4988 S 203 coil and 4 cylinders S 203 long flexihose and 1 cylinder B C4 6 85 3864 B C4 14 200 3865 B C4 50 725 3866 B C4 200 3,000 3867 SS C4 6 85 3900 SS C4 14 200 3901 SS C4 50 725 3902 SS C4 200 3,000 3903 B LH1 6 85 3880 B LH1 14 200 3881 B LH1 50 725 3882 B LH1 200 3,000 3883 SS LH1 6 85 3916 SS LH1 14 200 3917 SS LH1 50 725 3918 SS LH1 200 3,000 3919

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203/R residual gas outlet, coil and 1 cylinder B R C1 6 85 4869 B R C1 14 200 4870 B R C1 50 725 4871 B R C1 200 3,000 4872 SS R C1 6 85 4989 SS R C1 14 200 4990 SS R C1 50 725 4991 SS R C1 200 3,000 4992 S 203/R residual gas outlet, coil and 2 cylinders B R C2 6 85 4873 B R C2 14 200 4874 B R C2 50 725 4875 B R C2 200 3,000 4876 SS R C2 6 85 4993 SS R C2 14 200 4994 SS R C2 50 725 4995 SS R C2 200 3,000 4996 S 203/R residual gas outlet, coil and 4 cylinders B R C4 6 85 4877 B R C4 14 200 4878 B R C4 50 725 4879 B R C4 200 3,000 4880 SS R C4 6 85 4997 SS R C4 14 200 4998 SS R C4 50 725 4999 SS R C4 200 3,000 5000 S 203/R residual gas outlet, short flexihose and 1 cylinder B R SH1 6 85 4881 B R SH1 14 200 4882 B R SH1 50 725 4883 B R SH1 200 3,000 4884 SS R SH1 6 85 5001 SS R SH1 14 200 5002 SS R SH1 50 725 5003 SS R SH1 200 3,000 5004 S 203/R residual gas outlet, short flexihose and 2 cylinders B R SH2 6 85 4885 B R SH2 14 200 4886 B R SH2 50 725 4887 B R SH2 200 3,000 4888 SS R SH2 6 85 5005 SS R SH2 14 200 5006 SS R SH2 50 725 5007 SS R SH2 200 3,000 5008 S 203/R residual gas outlet, short flexihose and 4 cylinders B R SH4 6 85 4889 B R SH4 14 200 4890 B R SH4 50 725 4891 B R SH4 200 3,000 4892 SS R SH4 6 85 5009 SS R SH4 14 200 5010 SS R SH4 50 725 5011 SS R SH4 200 3,000 5012 S 203/R residual gas outlet, long flexihose and 1 cylinder B R LH1 6 85 4893 B R LH1 14 200 4894 B R LH1 50 725 4895 B R LH1 200 3,000 4896 SS R LH1 6 85 5013 SS R LH1 14 200 5014 SS R LH1 50 725 5015 SS R LH1 200 3,000 5016 S 203/R residual gas outlet, long flexihose and 2 cylinders B R LH2 6 85 4897 B R LH2 14 200 4898 B R LH2 50 725 4899 B R LH2 200 3,000 4900 SS R LH2 6 85 5017 SS R LH2 14 200 5018 SS R LH2 50 725 5019 SS R LH2 200 3,000 5020 S 203/R residual gas outlet, long flexihose and 4 cylinders B R LH4 6 85 4901 B R LH4 14 200 4902 B R LH4 50 725 4903 B R LH4 200 3,000 4904 SS R LH4 6 85 5021 SS R LH4 14 200 5022 SS R LH4 50 725 5023 SS R LH4 200 3,000 5024 S 203/C contact gauge B C 6 85 4905 B C 14 200 4906 B C 50 725 4907 B C 200 3,000 4908 SS C 6 85 5025 SS C 14 200 5026 SS C 50 725 5027 SS C 200 3,000 5028

Gas panels S 203. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203/C contact gauge, coil and 1 cylinder B C C1 6 85 4909 B C C1 14 200 4910 B C C1 50 725 4911 B C C1 200 3,000 4912 SS C C1 6 85 5029 SS C C1 14 200 5030 SS C C1 50 725 5031 SS C C1 200 3,000 5032 S 203/C contact gauge, coil and 2 cylinders B C C2 6 85 4913 B C C2 14 200 4914 B C C2 50 725 4915 B C C2 200 3,000 4916 SS C C2 6 85 5033 SS C C2 14 200 5034 SS C C2 50 725 5035 SS C C2 200 3,000 5036 S 203/C contact gauge, coil and 4 cylinders B C C4 6 85 4917 B C C4 14 200 4918 B C C4 50 725 4919 B C C4 200 3,000 4920 SS C C4 6 85 5037 SS C C4 14 200 5038 SS C C4 50 725 5039 SS C C4 200 3,000 5040 S 203/C contact gauge, short flexihose and 1 cylinder B C SH1 6 85 4921 B C SH1 14 200 4922 B C SH1 50 725 4923 B C SH1 200 3,000 4924 SS C SH1 6 85 5041 SS C SH1 14 200 5042 SS C SH1 50 725 5043 SS C SH1 200 3,000 5044 S 203/C contact gauge, short flexihose and 2 cylinders B C SH2 6 85 4925 B C SH2 14 200 4926 B C SH2 50 725 4927 B C SH2 200 3,000 4928 SS C SH2 6 85 5045 SS C SH2 14 200 5046 SS C SH2 50 725 5047 SS C SH2 200 3,000 5048 S 203/C contact gauge, short flexihose and 4 cylinders B C SH4 6 85 4929 B C SH4 14 200 4930 B C SH4 50 725 4931 B C SH4 200 3,000 4932 SS C SH4 6 85 5049 SS C SH4 14 200 5050 SS C SH4 50 725 5051 SS C SH4 200 3,000 5052 S 203/C contact gauge, long flexihose and 1 cylinder B C LH1 6 85 4933 B C LH1 14 200 4934 B C LH1 50 725 4935 B C LH1 200 3,000 4936 SS C LH1 6 85 5053 SS C LH1 14 200 5054 SS C LH1 50 725 5055 SS C LH1 200 3,000 5056 S 203/C contact gauge, long flexihose and 2 cylinders B C LH2 6 85 4937 B C LH2 14 200 4938 B C LH2 50 725 4939 B C LH2 200 3,000 4940 SS C LH2 6 85 5057 SS C LH2 14 200 5058 SS C LH2 50 725 5059 SS C LH2 200 3,000 5060 S 203/C contact gauge, long flexihose and 4 cylinders B C LH4 6 85 4941 B C LH4 14 200 4942 B C LH4 50 725 4943 B C LH4 200 3,000 4944 SS C LH4 6 85 5061 SS C LH4 14 200 5062 SS C LH4 50 725 5063 SS C LH4 200 3,000 5064 S 203/RC residual gas outlet, contact gauge B RC 6 85 4945 B RC 14 200 4946 B RC 50 725 4947 B RC 200 3,000 4948 SS RC 6 85 5065 SS RC 14 200 5066 SS RC 50 725 5067 SS RC 200 3,000 5068

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203/RC residual gas outlet, contact gauge, coil and 1 cylinder S 203/RC residual gas outlet, contact gauge, short flexihose and 1 cylinder S 203/RC residual gas outlet, contact gauge, long flexihose and 1 cylinder B RC C1 6 85 4949 B RC C1 14 200 4950 B RC C1 50 725 4951 B RC C1 200 3,000 4952 SS RC C1 6 85 5069 SS RC C1 14 200 5070 SS RC C1 50 725 5071 SS RC C1 200 3,000 5072 B RC SH1 6 85 4961 B RC SH1 14 200 4962 B RC SH1 50 725 4963 B RC SH1 200 3,000 4964 SS RC SH1 6 85 5081 SS RC SH1 14 200 5082 SS RC SH1 50 725 5083 SS RC SH1 200 3,000 5084 B RC LH1 6 85 4973 B RC LH1 14 200 4974 B RC LH1 50 725 4975 B RC LH1 200 3,000 4976 SS RC LH1 6 85 5093 SS RC LH1 14 200 5094 SS RC LH1 50 725 5095 SS RC LH1 200 3,000 5096 S 203/RC residual gas outlet, contact gauge, coil and 2 cylinders S 203/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders S 203/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC C2 6 85 4953 B RC C2 14 200 4954 B RC C2 50 725 4955 B RC C2 200 3,000 4956 SS RC C2 6 85 5073 SS RC C2 14 200 5074 SS RC C2 50 725 5075 SS RC C2 200 3,000 5076 B RC SH2 6 85 4965 B RC SH2 14 200 4966 B RC SH2 50 725 4967 B RC SH2 200 3,000 4968 SS RC SH2 6 85 5085 SS RC SH2 14 200 5086 SS RC SH2 50 725 5087 SS RC SH2 200 3,000 5088 B RC LH2 6 85 4977 B RC LH2 14 200 4978 B RC LH2 50 725 4979 B RC LH2 200 3,000 4980 SS RC LH2 6 85 5097 SS RC LH2 14 200 5098 SS RC LH2 50 725 5099 SS RC LH2 200 3,000 5100 S 203/RC residual gas outlet, contact gauge, coil and 4 cylinders S 203/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders S 203/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC C4 6 85 4957 B RC C4 14 200 4958 B RC C4 50 725 4959 B RC C4 200 3,000 4960 SS RC C4 6 85 5077 SS RC C4 14 200 5078 SS RC C4 50 725 5079 SS RC C4 200 3,000 5080 B RC SH4 6 85 4969 B RC SH4 14 200 4970 B RC SH4 50 725 4971 B RC SH4 200 3,000 4972 SS RC SH4 6 85 5089 SS RC SH4 14 200 5090 SS RC SH4 50 725 5091 SS RC SH4 200 3,000 5092 B RC LH4 6 85 4981 B RC LH4 14 200 4982 B RC LH4 50 725 4983 B RC LH4 200 3,000 4984 SS RC LH4 6 85 5101 SS RC LH4 14 200 5102 SS RC LH4 50 725 5103 SS RC LH4 200 3,000 5104

HiQ REDLINE Gas panels D 204. Double gas panel. Single stage gas supply panel with internal gas purging, designed for high purity gases and mixtures (including flammable), with connection for 2x1 cylinder. Description Gas panel D 204 is designed for double cylinders or bundles. It is equipped with internal gas purging to avoid contaminants entering the process line after changing the cylinders. It is is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas at the high pressure end and for the purging gas. The gas supply is uninterrupted during cylinder change. Switch-over is done manually. The panel can also be equipped with a contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 145 3,000 psi Outlet gauge range 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,400 psi 0 315 bar 0 4,500 psi Operating temperature 20 +70 C 4 +158 F Connection 2x1, 2x2 or 2x4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

Downstream pressure, bar To process To ventilation 9 10 bar* 6 3 0 0 Max flow 3 6 9 12 15 18 21 23 27 * Set pressure Flow, Nm 3 /h N 2 Process gas inlet 158 245 60 ~ 180 155 All measurements in millimeters. Model R. Drawings of other types available on request.

Gas panels D 204. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code D 204 D 204 short flexihose and 2 cylinders D 204 long flexihose and 4 cylinders B 6 85 3433 B 14 200 3152 B 50 725 3434 B 200 3,000 3435 SS 6 85 3436 SS 14 200 3153 SS 50 725 3437 SS 200 3,000 3438 B SH2 6 85 3940 B SH2 14 200 3941 B SH2 50 725 3942 B SH2 200 3,000 3943 SS SH2 6 85 3976 SS SH2 14 200 3977 SS SH2 50 725 3978 SS SH2 200 3,000 3979 B LH4 6 85 3956 B LH4 14 200 3957 B LH4 50 725 3958 B LH4 200 3,000 3959 SS LH4 6 85 3992 SS LH4 14 200 3993 SS LH4 50 725 3994 SS LH4 200 3,000 3995 D 204 coil and 2 cylinders D 204 short flexihose and 4 cylinders D 204 long flexihose and 8 cylinders B C2 6 85 3928 B C2 14 200 3929 B C2 50 725 3930 B C2 200 3,000 3931 SS C2 6 85 3964 SS C2 14 200 3965 SS C2 50 725 3966 SS C2 200 3,000 3967 B SH4 6 85 3944 B SH4 14 200 3945 B SH4 50 725 3946 B SH4 200 3,000 3947 SS SH4 6 85 3980 SS SH4 14 200 3981 SS SH4 50 725 3982 SS SH4 200 3,000 3983 B LH8 6 85 3960 B LH8 14 200 3961 B LH8 50 725 3962 B LH8 200 3,000 3963 SS LH8 6 85 3996 SS LH8 14 200 3997 SS LH8 50 725 3998 SS LH8 200 3,000 3999 D 204 coil and 4 cylinders D 204 short flexihose and 8 cylinders D 204/R residual gas outlet B C4 6 85 3932 B C4 14 200 3933 B C4 50 725 3934 B C4 200 3,000 3935 SS C4 6 85 3968 SS C4 14 200 3969 SS C4 50 725 3970 SS C4 200 3,000 3971 B SH8 6 85 3948 B SH8 14 200 3949 B SH8 50 725 3950 B SH8 200 3,000 3951 SS SH8 6 85 3984 SS SH8 14 200 3985 SS SH8 50 725 3986 SS SH8 200 3,000 3987 B R 6 85 5105 B R 14 200 5106 B R 50 725 5107 B R 200 3,000 5108 SS R 6 85 5145 SS R 14 200 5146 SS R 50 725 5147 SS R 200 3,000 5148 D 204 coil and 8 cylinders B C8 6 85 3936 B C8 14 200 3937 B C8 50 725 3938 B C8 200 3,000 3939 SS C8 6 85 3972 SS C8 14 200 3973 SS C8 50 725 3974 SS C8 200 3,000 3975 D 204 long flexihose and 2 cylinders B LH2 6 85 3952 B LH2 14 200 3953 B LH2 50 725 3954 B LH2 200 3,000 3955 SS LH2 6 85 3988 SS LH2 14 200 3989 SS LH2 50 725 3990 SS LH2 200 3,000 3991 D 204/R residual gas outlet, coil and 2 cylinders B R C2 6 85 5109 B R C2 14 200 5110 B R C2 50 725 5111 B R C2 200 3,000 5112

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code SS R C2 6 85 5149 SS R C2 14 200 5150 SS R C2 50 725 5151 SS R C2 200 3,000 5152 D 204/R residual gas outlet, coil and 4 cylinders B R C4 6 85 5113 B R C4 14 200 5114 B R C4 50 725 5115 B R C4 200 3,000 5116 SS R C4 6 85 5153 SS R C4 14 200 5154 SS R C4 50 725 5155 SS R C4 200 3,000 5156 D 204/R residual gas outlet, coil and 8 cylinders B R C8 6 85 5117 B R C8 14 200 5118 B R C8 50 725 5119 B R C8 200 3,000 5120 SS R C8 6 85 5157 SS R C8 14 200 5158 SS R C8 50 725 5159 SS R C8 200 3,000 5160 D 204/R residual gas outlet, short flexihose and 2 cylinders B R SH2 6 85 5121 B R SH2 14 200 5122 B R SH2 50 725 5123 B R SH2 200 3,000 5124 SS R SH2 6 85 5161 SS R SH2 14 200 5162 SS R SH2 50 725 5163 SS R SH2 200 3,000 5164 D 204/R residual gas outlet, short flexihose and 4 cylinders B R SH4 6 85 5125 B R SH4 14 200 5126 B R SH4 50 725 5127 B R SH4 200 3,000 5128 SS R SH4 6 85 5165 SS R SH4 14 200 5166 SS R SH4 50 725 5167 SS R SH4 200 3,000 5168 D 204/R residual gas outlet, short flexihose and 8 cylinders B R SH8 6 85 5129 B R SH8 14 200 5130 B R SH8 50 725 5131 B R SH8 200 3,000 5132 SS R SH8 6 85 5169 SS R SH8 14 200 5170 SS R SH8 50 725 5171 SS R SH8 200 3,000 5172 D 204/R residual gas outlet, long flexihose and 2 cylinders B R LH2 6 85 5133 B R LH2 14 200 5134 B R LH2 50 725 5135 B R LH2 200 3,000 5136 SS R LH2 6 85 5173 SS R LH2 14 200 5174 SS R LH2 50 725 5175 SS R LH2 200 3,000 5176 D 204/R residual gas outlet, long flexihose and 4 cylinders B R LH4 6 85 5137 B R LH4 14 200 5138 B R LH4 50 725 5139 B R LH4 200 3,000 5140 SS R LH4 6 85 5177 SS R LH4 14 200 5178 SS R LH4 50 725 5179 SS R LH4 200 3,000 5180 D 204/R residual gas outlet, long flexihose and 8 cylinders B R LH8 6 85 5141 B R LH8 14 200 5142 B R LH8 50 725 5143 B R LH8 200 3,000 5144 SS R LH8 6 85 5181 SS R LH8 14 200 5182 SS R LH8 50 725 5183 SS R LH8 200 3,000 5184 D 204/C contact gauge B C 6 85 3439 B C 14 200 3154 B C 50 725 3440 B C 200 3,000 3441 SS C 6 85 3442 SS C 14 200 3155 SS C 50 725 3443 SS C 200 3,000 3444 D 204/C contact gauge, coil and 2 cylinders B C C2 6 85 4000 B C C2 14 200 4001 B C C2 50 725 4002 B C C2 200 3,000 4003 SS C C2 6 85 4036 SS C C2 14 200 4037 SS C C2 50 725 4038 SS C C2 200 3,000 4039

Gas panels D 204. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code D 204/C contact gauge, coil and 4 cylinders D 204/C contact gauge, short flexihose and 4 cylinders D 204/C contact gauge, long flexihose and 4 cylinders B C C4 6 85 4004 B C C4 14 200 4005 B C C4 50 725 4006 B C C4 200 3,000 4007 SS C C4 6 85 4040 SS C C4 14 200 4041 SS C C4 50 725 4042 SS C C4 200 3,000 4043 B C SH4 6 85 4016 B C SH4 14 200 4017 B C SH4 50 725 4018 B C SH4 200 3,000 4019 SS C SH4 6 85 4052 SS C SH4 14 200 4053 SS C SH4 50 725 4054 SS C SH4 200 3,000 4055 B C LH4 6 85 4028 B C LH4 14 200 4029 B C LH4 50 725 4030 B C LH4 200 3,000 4031 SS C LH4 6 85 4064 SS C LH4 14 200 4065 SS C LH4 50 725 4066 SS C LH4 200 3,000 4067 D 204/C contact gauge, coil and 8 cylinders D 204/C contact gauge, short flexihose and 8 cylinders D 204/C contact gauge, long flexihose and 8 cylinders B C C8 6 85 4008 B C C8 14 200 4009 B C C8 50 725 4010 B C C8 200 3,000 4011 SS C C8 6 85 4044 SS C C8 14 200 4045 SS C C8 50 725 4046 SS C C8 200 3,000 4047 B C SH8 6 85 4020 B C SH8 14 200 4021 B C SH8 50 725 4022 B C SH8 200 3,000 4023 SS C SH8 6 85 4056 SS C SH8 14 200 4057 SS C SH8 50 725 4058 SS C SH8 200 3,000 4059 B C LH8 6 85 4032 B C LH8 14 200 4033 B C LH8 50 725 4034 B C LH8 200 3,000 4035 SS C LH8 6 85 4068 SS C LH8 14 200 4069 SS C LH8 50 725 4070 SS C LH8 200 3,000 4071 D 204/C contact gauge, short flexihose and 2 cylinders D 204/C contact gauge, long flexihose and 2 cylinders D 204/RC residual gas outlet, contact gauge B C SH2 6 85 4012 B C SH2 14 200 4013 B C SH2 50 725 4014 B C SH2 200 3,000 4015 SS C SH2 6 85 4048 SS C SH2 14 200 4049 SS C SH2 50 725 4050 SS C SH2 200 3,000 4051 B C LH2 6 85 4024 B C LH2 14 200 4025 B C LH2 50 725 4026 B C LH2 200 3,000 4027 SS C LH2 6 85 4060 SS C LH2 14 200 4061 SS C LH2 50 725 4062 SS C LH2 200 3,000 4063 B RC 6 85 5185 B RC 14 200 5186 B RC 50 725 5187 B RC 200 3,000 5188 SS RC 6 85 5225 SS RC 14 200 5226 SS RC 50 725 5227 SS RC 200 3,000 5228

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code D 204/RC residual gas outlet, contact gauge, coil and 2 cylinders D 204/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders D 204/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC C2 6 85 5189 B RC C2 14 200 5190 B RC C2 50 725 5191 B RC C2 200 3,000 5192 SS RC C2 6 85 5229 SS RC C2 14 200 5230 SS RC C2 50 725 5231 SS RC C2 200 3,000 5232 B RC SH2 6 85 5201 B RC SH2 14 200 5202 B RC SH2 50 725 5203 B RC SH2 200 3,000 5204 SS RC SH2 6 85 5241 SS RC SH2 14 200 5242 SS RC SH2 50 725 5243 SS RC SH2 200 3,000 5244 B RC LH2 6 85 5213 B RC LH2 14 200 5214 B RC LH2 50 725 5215 B RC LH2 200 3,000 5216 SS RC LH2 6 85 5253 SS RC LH2 14 200 5254 SS RC LH2 50 725 5255 SS RC LH2 200 3,000 5256 D 204/RC residual gas outlet, contact gauge, coil and 4 cylinders D 204/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders D 204/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC C4 6 85 5193 B RC C4 14 200 5194 B RC C4 50 725 5195 B RC C4 200 3,000 5196 SS RC C4 6 85 5233 SS RC C4 14 200 5234 SS RC C4 50 725 5235 SS RC C4 200 3,000 5236 B RC SH4 6 85 5205 B RC SH4 14 200 5206 B RC SH4 50 725 5207 B RC SH4 200 3,000 5208 SS RC SH4 6 85 5245 SS RC SH4 14 200 5246 SS RC SH4 50 725 5247 SS RC SH4 200 3,000 5248 B RC LH4 6 85 5217 B RC LH4 14 200 5218 B RC LH4 50 725 5219 B RC LH4 200 3,000 5220 SS RC LH4 6 85 5257 SS RC LH4 14 200 5258 SS RC LH4 50 725 5259 SS RC LH4 200 3,000 5260 D 204/RC residual gas outlet, contact gauge, coil and 8 cylinders D 204/RC residual gas outlet, contact gauge, short flexihose and 8 cylinders D 204/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC C8 6 85 5197 B RC C8 14 200 5198 B RC C8 50 725 5199 B RC C8 200 3,000 5200 SS RC C8 6 85 5237 SS RC C8 14 200 5238 SS RC C8 50 725 5239 SS RC C8 200 3,000 5240 B RC SH8 6 85 5209 B RC SH8 14 200 5210 B RC SH8 50 725 5211 B RC SH8 200 3,000 5212 SS RC SH8 6 85 5249 SS RC SH8 14 200 5250 SS RC SH8 50 725 5251 SS RC SH8 200 3,000 5252 B RC LH8 6 85 5221 B RC LH8 14 200 5222 B RC LH8 50 725 5223 B RC LH8 200 3,000 5224 SS RC LH8 6 85 5261 SS RC LH8 14 200 5262 SS RC LH8 50 725 5263 SS RC LH8 200 3,000 5264

HiQ REDLINE Gas panels A 208. Semi-automatic gas panel. Single stage, semi-automatic gas supply panel with internal gas purging, designed for high purity gases and mixtures. Description Gas panel A 208 is a semi-automatic gas panel designed for uninterrupted gas supply. Switch-over between the two connected cylinders or bundles occurs when the pressure of one side (the primary side) falls below a pre-set pressure level. This is achieved by two integrated regulators (factory-set to slightly different delivery pressure levels) which are connected at their outlet ports. Semi-automatic supply panels should be connected to an alarm so that the cylinders will be switched on time. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 14 +3/ 3 bar 200 +45/ 45 psi 50 +8/ 10 bar 725 +115/ 145 psi Operating temperature 20 +70 C 4 +158 F Connection 2x1 to 2x4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Highlights Continuous supply of pure gases Automatic switch over without auxiliary power Positive indication of active cylinder Process-gas purging system High flow capacity Compact design

Downstream pressure, bar To ventilation To process 16 16 bar* 12 8 4 12 bar** Max flow 0 0 5 10 15 20 25 30 35 * Set pressure operating side ** Set pressure backup Flow, Nm 3 /h N 2 Process gas inlet Process gas inlet ~ 156 30 400 60 155 All measurements in millimeters. R model. Drawings of other types available on request.

Gas panels A 208. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 208 B 14 200 3164 B 50 725 3463 SS 14 200 3165 SS 50 725 3464 A 208 coil and 2 cylinders B C2 14 200 4306 B C2 50 725 4307 SS C2 14 200 4324 SS C2 50 725 4325 A 208 coil and 4 cylinders B C4 14 200 4308 B C4 50 725 4309 SS C4 14 200 4326 SS C4 50 725 4327 A 208 coil and 8 cylinders B C8 14 200 4310 B C8 50 725 4311 SS C8 14 200 4328 SS C8 50 725 4329 A 208 short flexihose and 2 cylinders B SH2 14 200 4312 B SH2 50 725 4313 SS SH2 14 200 4330 SS SH2 50 725 4331 SS LH2 14 200 4336 SS LH2 50 725 4337 A 208 long flexihose and 4 cylinders B LH4 14 200 4320 B LH4 50 725 4321 SS LH4 14 200 4338 SS LH4 50 725 4339 A 208 long flexihose and 8 cylinders B LH8 14 200 4322 B LH8 50 725 4323 SS LH8 14 200 4340 SS LH8 50 725 4341 A 208/R residual gas outlet B R 14 200 5265 B R 50 725 5266 SS R 14 200 5285 SS R 50 725 5286 A 208/R residual gas outlet, coil and 2 cylinders B R C2 14 200 5267 B R C2 50 725 5268 SS R C2 14 200 5287 SS R C2 50 725 5288 A 208/R residual gas outlet, coil and 4 cylinders SS R SH2 14 200 5293 SS R SH2 50 725 5294 A 208/R residual gas outlet, short flexihose and 4 cylinders B R SH4 14 200 5275 B R SH4 50 725 5276 SS R SH4 14 200 5295 SS R SH4 50 725 5296 A 208/R residual gas outlet, short flexihose and 8 cylinders B R SH8 14 200 5277 B R SH8 50 725 5278 SS R SH8 14 200 5297 SS R SH8 50 725 5298 A 208/R residual gas outlet, long flexihose and 2 cylinders B R LH2 14 200 5279 B R LH2 50 725 5280 SS R LH2 14 200 5299 SS R LH2 50 725 5300 A 208/R residual gas outlet, long flexihose and 4 cylinders B R LH4 14 200 5281 B R LH4 50 725 5282 SS R LH4 14 200 5301 SS R LH4 50 725 5302 A 208 short flexihose and 4 cylinders B SH4 14 200 4314 B SH4 50 725 4315 SS SH4 14 200 4332 SS SH4 50 725 4333 A 208 short flexihose and 8 cylinders B SH8 14 200 4316 B SH8 50 725 4317 SS SH8 14 200 4334 SS SH8 50 725 4335 A 208 long flexihose and 2 cylinders B R C4 14 200 5269 B R C4 50 725 5270 SS R C4 14 200 5289 SS R C4 50 725 5290 A 208/R residual gas outlet, coil and 8 cylinders B R C8 14 200 5271 B R C8 50 725 5272 SS R C8 14 200 5291 SS R C8 50 725 5292 A 208/R residual gas outlet, short flexihose and 2 cylinders A 208/R residual gas outlet, long flexihose and 8 cylinders B R LH8 14 200 5283 B R LH8 50 725 5284 SS R LH8 14 200 5303 SS R LH8 50 725 5304 A 208/C contact gauge B C 14 200 3166 B C 50 725 3465 SS C 14 200 3167 SS C 50 725 3466 B LH2 14 200 4318 B LH2 50 725 4319 B R SH2 14 200 5273 B R SH2 50 725 5274

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 208/C contact gauge, coil and 2 cylinders SS C LH2 14 200 4372 SS C LH2 50 725 4373 A 208/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders B C C2 14 200 4342 B C C2 50 725 4343 SS C C2 14 200 4360 SS C C2 50 725 4361 A 208/C contact gauge, coil and 4 cylinders A 208/C contact gauge, long flexihose and 4 cylinders B C LH4 14 200 4356 B C LH4 50 725 4357 SS C LH4 14 200 4374 SS C LH42 50 725 4375 B RC SH2 14 200 5313 B RC SH2 50 725 5314 SS RC SH2 14 200 5333 SS RC SH2 50 725 5334 A 208/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders B C C4 14 200 4344 B C C4 50 725 4345 SS C C4 14 200 4362 SS C C4 50 725 4363 A 208/C contact gauge, coil and 8 cylinders A 208/C contact gauge, long flexihose and 8 cylinders B C LH8 14 200 4358 B C LH8 50 725 4359 SS C LH8 14 200 4376 SS C LH8 50 725 4377 B RC SH4 14 200 5315 B RC SH4 50 725 5316 SS RC SH4 14 200 5335 SS RC SH4 50 725 5336 A 208/RC residual gas outlet, contact gauge, short flexihose and 8 cylinders B C C8 14 200 4346 B C C8 50 725 4347 SS C C8 14 200 4364 SS C C8 50 725 4365 A 208/C contact gauge, short flexihose and 2 cylinders A 208/RC residual gas outlet, contact gauge B RC 14 200 5305 B RC 50 725 5306 SS RC 14 200 5325 SS RC 50 725 5326 B RC SH8 14 200 5317 B RC SH8 50 725 5318 SS RC SH8 14 200 5337 SS RC SH8 50 725 5338 A 208/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B C SH2 14 200 4348 B C SH2 50 725 4349 SS C SH2 14 200 4366 SS C SH2 50 725 4367 A 208/C contact gauge, short flexihose and 4 cylinders A 208/RC residual gas outlet, contact gauge, coil and 2 cylinders B RC C2 14 200 5307 B RC C2 50 725 5308 SS RC C2 14 200 5327 SS RC C2 50 725 5328 B RC LH2 14 200 5319 B RC LH2 50 725 5320 SS RC LH2 14 200 5339 SS RC LH2 50 725 5340 A 208/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B C SH4 14 200 4350 B C SH4 50 725 4351 SS C SH4 14 200 4368 SS C SH4 50 725 4369 A 208/C contact gauge, short flexihose and 8 cylinders A 208/RC residual gas outlet, contact gauge, coil and 4 cylinders B RC C4 14 200 5309 B RC C4 50 725 5310 SS RC C4 14 200 5329 SS RC C4 50 725 5330 B RC LH4 14 200 5321 B RC LH4 50 725 5322 SS RC LH4 14 200 5341 SS RC LH4 50 725 5342 A 208/RC residual gas outlet, contact gauge,long flexihose and 8 cylinders B C SH8 14 200 4352 B C SH8 50 725 4353 SS C SH8 14 200 4370 SS C SH8 50 725 4371 A 208/C contact gauge, long flexihose and 2 cylinders A 208/RC residual gas outlet, contact gauge, coil and 8 cylinders B RC C8 14 200 5311 B RC C8 50 725 5312 SS RC C8 14 200 5331 SS RC C8 50 725 5332 B RC LH8 14 200 5323 B RC LH8 50 725 5324 SS RC LH8 14 200 5343 SS RC LH8 50 725 5344 B C LH2 14 200 4354 B C LH2 50 725 4355

HiQ REDLINE Gas panels A 209. Semi-automatic gas panel. Single stage, semi-automatic gas supply panel with external gas purging, designed for reactive, toxic and corrosive gases. Description Gas panel A 209 is a semi-automatic gas panel designed for uninterrupted gas supply. Switch-over between the two connected cylinders or bundles occurs when the pressure of one side (the primary side) falls below a pre-set pressure level. This is achieved by two integrated regulators (factory-set to slightly different delivery pressure levels) which are connected at their outlet ports. Semi-automatic supply panels should be connected to an alarm so that the cylinders will be switched on time. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 14 +3/ 3 bar 200 +45/ 45 psi 50 +8/ 10 bar 725 +115/ 145 psi Operating temperature 20 +70 C 4 +158 F Connection 2x1 to 2x4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas inlet NPT 1/4 female Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Highlights Continuous supply of pure gases Automatic switch over without auxiliary power Positive indication of active cylinder Process-gas purging system High flow capacity Compact design

Downstream pressure, bar To ventilation To process 16 16 bar* Purge gas inlet Purge gas inlet 12 8 4 12 bar** Max flow 0 0 5 10 15 20 25 30 35 * Set pressure operating side ** Set pressure backup Flow, Nm 3 /h N 2 Process gas inlet Process gas inlet ~ 156 550 30 ~ 218 6 6 60 155 All measurements in millimeters. R model. Drawings of other types available on request.

Gas panels A 209. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 209 B 14 200 3168 B 50 725 3467 SS 14 200 3169 SS 50 725 3468 A 209 coil and 2 cylinders B C2 14 200 4378 B C2 50 725 4379 SS C2 14 200 4396 SS C2 50 725 4397 A 209 coil and 4 cylinders B C4 14 200 4380 B C4 50 725 4381 SS C4 14 200 4398 SS C4 50 725 4399 A 209 coil and 8 cylinders B C8 14 200 4382 B C8 50 725 4383 SS C8 14 200 4400 SS C8 50 725 4401 A 209 short flexihose and 2 cylinders B SH2 14 200 4384 B SH2 50 725 4385 SS SH2 14 200 4402 SS SH2 50 725 4403 SS LH2 14 200 4408 SS LH2 50 725 4409 A 209 long flexihose and 4 cylinders B LH4 14 200 4392 B LH4 50 725 4393 SS LH4 14 200 4410 SS LH4 50 725 4411 A 209 long flexihose and 8 cylinders B LH8 14 200 4394 B LH8 50 725 4395 SS LH8 14 200 4412 SS LH8 50 725 4413 A 209/R residual gas outlet B R 14 200 5345 B R 50 725 5346 SS R 14 200 5365 SS R 50 725 5366 A 209/R residual gas outlet, coil and 2 cylinders B R C2 14 200 5347 B R C2 50 725 5348 SS R C2 14 200 5367 SS R C2 50 725 5368 A 209/R residual gas outlet, coil and 4 cylinders SS R SH2 14 200 5373 SS R SH2 50 725 5374 A 209/R residual gas outlet, short flexihose and 4 cylinders B R SH4 14 200 5355 B R SH4 50 725 5356 SS R SH4 14 200 5375 SS R SH4 50 725 5376 A 209/R residual gas outlet, short flexihose and 8 cylinders B R SH8 14 200 5357 B R SH8 50 725 5358 SS R SH8 14 200 5377 SS R SH8 50 725 5378 A 209/R residual gas outlet, long flexihose and 2 cylinders B R LH2 14 200 5359 B R LH2 50 725 5360 SS R LH2 14 200 5379 SS R LH2 50 725 5380 A 209/R residual gas outlet, long flexihose and 4 cylinders B R LH4 14 200 5361 B R LH4 50 725 5362 SS R LH4 14 200 5381 SS R LH4 50 725 5382 A 209 short flexihose and 4 cylinders B SH4 14 200 4386 B SH4 50 725 4387 SS SH4 14 200 4404 SS SH4 50 725 4405 A 209 short flexihose and 8 cylinders B SH8 14 200 4388 B SH8 50 725 4389 SS SH8 14 200 4406 SS SH8 50 725 4407 A 209 long flexihose and 2 cylinders B R C4 14 200 5349 B R C4 50 725 5350 SS R C4 14 200 5369 SS R C4 50 725 5370 A 209/R residual gas outlet, coil and 8 cylinders B R C8 14 200 5351 B R C8 50 725 5352 SS R C8 14 200 5371 SS R C8 50 725 5372 A 209/R residual gas outlet, short flexihose and 2 cylinders A 209/R residual gas outlet, long flexihose and 8 cylinders B R LH8 14 200 5363 B R LH8 50 725 5364 SS R LH8 14 200 5383 SS R LH8 50 725 5384 A 209/C contact gauge B C 14 200 3170 B C 50 725 3469 SS C 14 200 3171 SS C 50 725 3470 B LH2 14 200 4390 B LH2 50 725 4391 B R SH2 14 200 5353 B R SH2 50 725 5354

B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 209/C contact gauge, coil and 2 cylinders SS C LH2 14 200 4444 SS C LH2 50 725 4445 A 209/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders B C C2 14 200 4414 B C C2 50 725 4415 SS C C2 14 200 4432 SS C C2 50 725 4433 A 209/C contact gauge, coil and 4 cylinders A 209/C contact gauge, long flexihose and 4 cylinders B C LH4 14 200 4428 B C LH4 50 725 4429 SS C LH4 14 200 4446 SS C LH4 50 725 4447 B RC SH2 14 200 5393 B RC SH2 50 725 5394 SS RC SH2 14 200 5413 SS RC SH2 50 725 5414 A 209/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders B C C4 14 200 4416 B C C44 50 725 4417 SS C C4 14 200 4434 SS C C4 50 725 4435 A 209/C contact gauge, coil and 8 cylinders B C C8 14 200 4418 B C C8 50 725 4419 SS C C8 14 200 4436 SS C C8 50 725 4437 A 209/C contact gauge, short flexihose and 2 cylinders B C SH2 14 200 4420 B C SH2 50 725 4421 SS C SH2 14 200 4438 SS C SH2 50 725 4439 A 209/C contact gauge, short flexihose and 4 cylinders B C SH4 14 200 4422 B C SH4 50 725 4423 SS C SH4 14 200 4440 SS C SH4 50 725 4441 A 209/C contact gauge, short flexihose and 8 cylinders B C SH8 14 200 4424 B C SH8 50 725 4425 SS C SH8 14 200 4442 SS C SH8 50 725 4443 A 209/C contact gauge, long flexihose and 2 cylinders A 209/C contact gauge, long flexihose and 8 cylinders B C LH8 14 200 4430 B C LH8 50 725 4431 SS C LH8 14 200 4448 SS C LH8 50 725 4449 A 209/RC residual gas outlet, contact gauge B RC 14 200 5385 B RC 50 725 5386 SS RC 14 200 5405 SS RC 50 725 5406 A 209/RC residual gas outlet, contact gauge, coil and 2 cylinders B RC C2 14 200 5387 B RC C2 50 725 5388 SS RC C2 14 200 5407 SS RC C2 50 725 5408 A 209/RC residual gas outlet, contact gauge, coil and 4 cylinders B RC C4 14 200 5389 B RC C4 50 725 5390 SS RC C4 14 200 5409 SS RC C4 50 725 5410 A 209/RC residual gas outlet, contact gauge, coil and 8 cylinders B RC C8 14 200 5391 B RC C8 50 725 5392 SS RC C8 14 200 5411 SS RC C8 50 725 5412 B RC SH4 14 200 5395 B RC SH4 50 725 5396 SS RC SH4 14 200 5415 SS RC SH4 50 725 5416 A 209/RC residual gas outlet, contact gauge, short flexihose and 8 cylinders B RC SH8 14 200 5397 B RC SH8 50 725 5398 SS RC SH8 14 200 5417 SS RC SH8 50 725 5418 A 209/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC LH2 14 200 5399 B RC LH2 50 725 5400 SS RC LH2 14 200 5419 SS RC LH2 50 725 5420 A 209/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC LH4 14 200 5401 B RC LH4 50 725 5402 SS RC LH4 14 200 5421 SS RC LH4 50 725 5422 A 209/RC residual gas outlet, contact gauge, long flexihose and 8 cylinders B RC LH8 14 200 5403 B RC LH8 50 725 5404 SS RC LH8 14 200 5423 SS RC LH8 50 725 5424 B C LH2 14 200 4426 B C LH2 50 725 4427

HiQ REDLINE Points of use. Where all the action is. The point of use is the second stage of a central gas supply system. Together with the gas panel it guarantees a very stable outlet pressure and handles any pressure changes that may be caused in the system. When used together with a semi-automatic gas manifold it handles the pressure changes that are due to the changes from secondary to primary side. The HiQ REDLINE system is a modular system which allows maximum freedom. Each point of use can be individually equipped or stripped by the functions shut-off, pressure regulation and flow regulation. In this way, the point of use at the work place can be updated at any point to fit the present needs. Note: HiQ REDLINE points of use are delivered with 6 or 12 mm tube fitting inlet connection and 6 mm tube fitting outlet connection. Green group Use nickel- and chromium plated brass equipment. Blue group Use nickel- and chromium plated brass or stainless steel equipment. Orange group Use stainless steel equipment. Please see page 11 for detailed information about the groups.

HiQ REDLINE Points of use W 40. Wall design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for wall-mounting with external gas supply line. Design F is a version with fixed pressure and flow meter. Product name bar psi HiQ code W 40 A, brass n.a. n.a. 3247 W 40 A, stainless steel n.a. n.a. 3248 W 40 B, brass 0.1 1 1.5 15 3249 W 40 B, brass 0.5 6 8 85 3251 W 40 B, brass 1 10.5 15 150 3253 W 40 B, stainless steel 0.1 1 1.5 15 3250 W 40 B, stainless steel 0.5 6 8 85 3252 W 40 B, stainless steel 1 10.5 15 150 3254 W 40 C, brass 0.1 1 1.5 15 3255 W 40 C, brass 0.5 6 8 85 3257 W 40 C, brass 1 10.5 15 150 3259 W 40 C, stainless steel 0.1 1 1.5 15 3256 W 40 C, stainless steel 0.5 6 8 85 3258 W 40 C, stainless steel 1 10.5 15 150 3260 W 40 F, brass 3 45 5425 W 40 F, stainless steel 3 45 5426 Technical data Max primary pressure 40 bar 550 psi Secondary pressure 0.1 1 bar 1.5 15 psi 0.5 6 bar 8 85 psi 1 10.5 bar 15 150 psi Pressure gauge scale 1 1.5 bar 14.5 21 psi 1 10 bar 14.5 145 psi 1 18 bar 14.5 260 psi Max flow (nitrogen) 2 Nm 3 /h 700 SCFH 6 Nm 3 /h 2,100 SCFH 11 Nm 3 /h 3,850 SCFH Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature 20 +70 C 4 +158 F

Design A 53 100 120 Design B 100 154 120 Design C 100 154 120 All measurements in millimeters. W40 C in the drawing is extra equipped.

HiQ REDLINE Points of use B 40. Bench design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for mounting on a bench e.g. a laboratory desk, with a gas supply line from below through the table stand. Design F is a version with fixed pressure and flow meter. Product name bar psi HiQ code B 40 A, brass n.a. n.a. 3261 B 40 A, stainless steel n.a. n.a. 3262 B 40 B, brass 0.1 1 1.5 15 3263 B 40 B, brass 0.5 6 8 85 3265 B 40 B, brass 1 10.5 15 150 3267 B 40 B, stainless steel 0.1 1 1.5 15 3264 B 40 B, stainless steel 0.5 6 8 85 3266 B 40 B, stainless steel 1 10.5 15 150 3268 B 40 C, brass 0.1 1 1.5 15 3269 B 40 C, brass 0.5 6 8 85 3271 B 40 C, brass 1 10.5 15 150 3273 B 40 C, stainless steel 0.1 1 1.5 15 3270 B 40 C, stainless steel 0.5 6 8 85 3272 B 40 C, stainless steel 1 10.5 15 150 3274 B 40 F, brass 3 45 5427 B 40 F, stainless steel 3 45 5428 Technical data Max primary pressure 40 bar 550 psi Secondary pressure 0.1 1 bar 1.5 15 psi 0.5 6 bar 8 85 psi 1 10.5 bar 15 150 psi Pressure gauge scale 1 1.5 bar 14.5 21 psi 1 10 bar 14.5 145 psi 1 18 bar 14.5 260 psi Max flow (nitrogen) 2 Nm 3 /h 700 SCFH 6 Nm 3 /h 2,100 SCFH 11 Nm 3 /h 3,850 SCFH Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature 20 +70 C 4 +158 F

Design A 58 ø 50 Design B ~ 53 ~ 154 58 235 ø 50 Design C 160 ~ 154 ~ 85 235 ø 50 All measurements in millimeters.

HiQ REDLINE Points of use L 40. Fume cupboard design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for mounting with gas supply line hidden behind a wall. Design F is a version with fixed pressure and flow meter. Product name bar psi HiQ code L 40 A, brass n.a. n.a. 3275 L 40 A, stainless steel n.a. n.a. 3276 L 40 B, brass 0.1 1 1.5 15 3277 L 40 B, brass 0.5 6 8 85 3279 L 40 B, brass 1 10.5 15 150 3281 L 40 B, stainless steel 0.1 1 1.5 15 3278 L 40 B, stainless steel 0.5 6 8 85 3280 L 40 B, stainless steel 1 10.5 15 150 3282 L 40 C, brass 0.1 1 1.5 15 3283 L 40 C, brass 0.5 6 8 85 3285 L 40 C, brass 1 10.5 15 150 3287 L 40 C, stainless steel 0.1 1 1.5 15 3284 L 40 C, stainless steel 0.5 6 8 85 3286 L 40 C, stainless steel 1 10.5 15 150 3288 L 40 F, brass 3 45 5429 L 40 F, stainless steel 3 45 5430 Technical data Max primary pressure 40 bar 550 psi Secondary pressure 0.1 1 bar 1.5 15 psi 0.5 6 bar 8 85 psi 1 10.5 bar 15 150 psi Pressure gauge scale 1 1.5 bar 14.5 21 psi 1 10 bar 14.5 145 psi 1 18 bar 14.5 260 psi Max flow (nitrogen) 2 Nm 3 /h 700 SCFH 6 Nm 3 /h 2,100 SCFH 11 Nm 3 /h 3,850 SCFH Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature 20 +70 C 4 +158 F

Design A ~ 73 ~ 58 Design B ~ 53 ~ 159 Design C ~ 53 ~ 110 ~ 159 xxxxxx xxxxxx xxxxxx xxxxxx All measurements in millimeters.

HiQ REDLINE Points of use I 40X. Inset design. The point of use is especially developed for wall, bench or panel mounting, for inert, flammable and corrosive gases and gas mixtures. I 40 X is delivered with shut-off valve, regulator and needle valve. The n-version is without shut-off valve and s-version without needle valve. I 40 sn is a version with shut-off valve, gauge & needle valve and the I 40 Xlh is an analysis version with shut-off valve, regulator & needle valve low hysteresis. Product name bar psi HiQ code I 40 X, brass 0.1 1 1.5 15 5538 I 40 X, brass 0.5 4 8 60 5539 I 40 X, brass 0.5 10.5 8 150 5540 I 40 X, stainless steel 0.1 1 1.5 15 5551 I 40 X, stainless steel 0.5 4 8 60 5552 I 40 X, stainless steel 0.5 10.5 8 150 5553 I 40 Xn, brass 0.1 1 1.5 15 5541 I 40 Xn, brass 0.5 4 8 60 5542 I 40 Xn, brass 0.5 10.5 8 150 5543 I 40 Xn, stainless steel 0.1 1 1.5 15 5554 I 40 Xn, stainless steel 0.5 4 8 60 5555 I 40 Xn, stainless steel 0.5 10.5 8 150 5556 I 40 Xs, brass 0.1 1 1.5 15 5544 I 40 Xs, brass 0.5 4 8 60 5545 I 40 Xs, brass 0.5 10.5 8 150 5546 I 40 Xs, stainless steel 0.1 1 1.5 15 5557 I 40 Xs, stainless steel 0.5 4 8 60 5558 I 40 Xs, stainless steel 0.5 10.5 8 150 5559 I 40 sn, brass 0.1 1 1.5 15 5547 I 40 sn, brass 0.5 4 8 60 5548 I 40 sn, brass 0.5 10.5 8 150 5549 I 40 sn, stainless steel 0.1 1 1.5 15 5560 I 40 sn, stainless steel 0.5 4 8 60 5561 I 40 sn, stainless steel 0.5 10.5 8 150 5562 I 40 Xlh, brass 0.1 2.2 1.5 32 5550 I 40 Xlh, stainless steel 0.1 2.2 1.5 32 5563 Technical data Max primary pressure 40 bar 550 psi Secondary pressure 0.1 1 bar 1.5 15 psi 0.5 4 bar 8 60 psi 0.5 10.5 bar 8 150 psi Pressure gauge scale 0 2.5 bar 0 40 psi 0 6 bar 0 90 psi psi 0 16 bar 0 230 psi psi Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature 20 +70 C 4 +158 F

I 40 X 85 I 40 X 4 Outlet pressure, bar 4 3 112 2 1 Max flow 0 1 2 3 Flow, Nm 3 /h N 2 59 42 3 ~ 53 I 40 X 10.5 Outlet pressure, bar 11 10 9 8 7 6 5 4 3 2 1 Max flow 0 2 4 6 8 10 Flow, Nm 3 /h N 2 All measurements in millimeters.

HiQ REDLINE Cylinder regulators. When mobility and flexibility is the key. Cylinder regulators are used to reduce the high pressure in the gas cylinder to a more manageable pressure in the simplest of gas delivery systems. The cylinder regulator is equipped with a cylinder connection, a high pressure gauge to monitor the content of the cylinder and a low pressure gauge to monitor the adjustable secondary pressure. If there is a need for flow adjustments, the cylinder regulator is equipped with a needle valve, otherwise it is equipped with a shut-off valve. Cylinder regulators are used when central gas systems are not applicable. Such a case is mobile calibrations for environmental applications when maximum mobility is a prerequisite.

HiQ REDLINE Cylinder regulators C 200/1. Single stage regulator. C 200/1 is a single stage cylinder regulator, especially suitable for specialty gases where demands on purity, tightness and safety are high. A single stage regulator is preferred where the primary pressure is fairly constant (e.g. for gases in liquid phase). C 200/1 can be plain or equipped with a shut-off valve (type A), a needle valve (type B) or equipped for purging of the high pressure side (type P) or cross-purge (type XP). Product name bar psi HiQ code C 200/1, brass 0.2 3 3 45 4451 C 200/1, brass 0.5 6 8 85 5465 C 200/1, brass 2.5 14 35 200 5466 C 200/1, brass 2.5 50 35 725 4453 C 200/1, brass 10 200 150 3,000 4454 C 200/1, stainless steel 0.2 3 3 45 4455 C 200/1, stainless steel 0.5 6 8 85 5473 C 200/1, stainless steel 2.5 14 35 200 5474 C 200/1, stainless steel 2.5 50 35 725 4457 C 200/1, stainless steel 10 200 150 3,000 4458 C 200/1 A, brass 0.2 3 3 45 3100 C 200/1 A, brass 0.5 6 8 85 5467 C 200/1 A, brass 2.5 14 35 200 5468 C 200/1 A, brass 2.5 50 35 725 3102 C 200/1 A, brass 10 200 150 3,000 3103 C 200/1 A, stainless steel 0.2 3 3 45 3112 C 200/1 A, stainless steel 0.5 6 8 85 5475 C 200/1 A, stainless steel 2.5 14 35 200 5476 C 200/1 A, stainless steel 2.5 50 35 725 3114 C 200/1 A, stainless steel 10 200 150 3,000 3115 C 200/1 B, brass 0.2 3 3 45 3104 C 200/1 B, brass 0.5 6 8 85 5469 C 200/1 B, brass 2.5 14 35 200 5470 C 200/1 B, stainless steel 0.2 3 3 45 3116 C 200/1 B, stainless steel 0.5 6 8 85 5477 C 200/1 B, stainless steel 2.5 14 35 200 5478 C 200/1 P, brass 0.2 3 3 45 3108 C 200/1 P, brass 0.5 6 8 85 5471 C 200/1 P, brass 2.5 14 35 200 5472 C 200/1 P, brass 2.5 50 35 725 3110 C 200/1 P, brass 10 200 150 3,000 3111 C 200/1 P, stainless steel 0.2 3 3 45 3120 C 200/1 P, stainless steel 0.5 6 8 85 5479 C 200/1 P, stainless steel 2.5 14 35 200 5480 C 200/1 P, stainless steel 2.5 50 35 725 3122 C 200/1 P, stainless steel 10 200 150 3,000 3123 C 200/1 XP, brass 0.2 3 3 45 5564 C 200/1 XP, brass 0.5 6 8 85 5565 C 200/1 XP, brass 2.5 14 35 200 5566 C 200/1 XP, brass 2.5 50 35 725 5567 C 200/1 XP, brass 10 200 150 3,000 5568 C 200/1 XP, stainless steel 0.2 3 3 45 5569 C 200/1 XP, stainless steel 0.5 6 8 85 5570 C 200/1 XP, stainless steel 2.5 14 35 200 5571 C 200/1 XP, stainless steel 2.5 50 35 725 5572 C 200/1 XP, stainless steel 10 200 150 3,000 5573 Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure 0.2 3 bar 3 45 psi 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 150 3,000 psi Outlet gauge range 1 5 bar 14.5 75 psi 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,150 psi 0 315 bar 0 4,500 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.1 bar, 1.5 psi. Connection Out = NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 1.3 kg 2.9 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

C 200/1 3 Outlet pressure, bar 4 3 7 bar* 2 1 3 bar* 5 bar* Max flow C200/1 0 1 2 3 4 5 6 7 * Inlet pressure Flow, Nm 3 /h N 2 C 200/1 6 8 7 6 5 4 3 2 1 Outlet pressure, bar 5 bar* 9 bar* Max flow 13 bar* 0 3 6 9 12 15 * Inlet pressure Flow, Nm 3 /h N 2 C200/1A C 200/1 14 16 14 12 10 8 6 4 2 Outlet pressure, bar 11 bar* 21 bar* Max flow 29 bar* 0 6 12 18 24 30 * Inlet pressure Flow, Nm 3 /h N 2 C200/1P C 200/1 50 Outlet pressure, bar 60 50 40 30 20 41 bar* 10 101 bar* 81 bar* 61 bar* Max flow 0 10 20 30 40 * Inlet pressure Flow, Nm 3 /h N 2 C200/1XP C 200/1 200 Outlet pressure, bar 120 230 bar* 100 80 161 bar* 60 40 81 bar* 20 Max flow 240 120 140 0 10 20 30 40 50 60 70 * Inlet pressure Flow, Nm 3 /h N2 All measurements in millimeters. Type P. Drawings of other types available on request.

HiQ REDLINE Cylinder regulators C 200/2. Two stage regulator. C 200/2 is a two-stage regulator made especially for the high demands on purity, safety and tightness that is necessary for specialty gases. Two stage regulators are preferred when a very stable secondary pressure is necessary and the primary pressure varies. C 200/2 can be plain or equipped with a shut-off valve (type A), a needle valve (type B) or equipped for purging of the high pressure side (type P). Product name bar psi HiQ code C 200/2, brass 0.2 3 3 45 5481 C 200/2, brass 0.5 6 8 85 4460 C 200/2, brass 1 10.5 15 150 4461 C 200/2, stainless steel 0.2 3 3 45 5485 C 200/2, stainless steel 0.5 6 8 85 4463 C 200/2, stainless steel 1 10.5 15 150 4464 C 200/2 A, brass 0.2 3 3 45 5482 C 200/2 A, brass 0.5 6 8 85 3125 C 200/2 A, brass 1 10.5 15 150 3126 C 200/2 A, stainless steel 0.2 3 3 45 5486 C 200/2 A, stainless steel 0.5 6 8 85 3134 C 200/2 A, stainless steel 1 10.5 15 150 3135 C 200/2 B, brass 0.2 3 3 45 5483 C 200/2 B, brass 0.5 6 8 85 3128 C 200/2 B, brass 1 10.5 15 150 3129 C 200/2 B, stainless steel 0.2 3 3 45 5487 C 200/2 B, stainless steel 0.5 6 8 85 3137 C 200/2 B, stainless steel 1 10.5 15 150 3138 C 200/2 P, brass 0.2 3 3 45 5484 C 200/2 P, brass 0.5 6 8 85 3131 C 200/2 P, brass 1 10.5 15 150 3132 C 200/2 P, stainless steel 0.2 3 3 45 5488 C 200/2 P, stainless steel 0.5 6 8 85 3140 C 200/2 P, stainless steel 1 10.5 15 150 3141 Technical data Primary pressure 7 230 bar 100 3,300 psi Outlet pressure 0.2 3 bar 3 45 psi 0.5 6 bar 8 85 psi 1 10 bar 15 150 psi Outlet gauge range 1 5 bar 14.5 75 psi 1 10 bar 14.5 145 psi 1 18 bar 14.5 260 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.01 bar, 0.1 psi. Connection Out = NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 3.0 kg 6.6 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

C200/2 C 200/2 3 Outlet pressure, bar 4.0 3.5 3.0 2.5 2.0 1.5 8 bar* 1.0 0.5 8 bar* 8 bar* Max flow C200/2B 0 2 4 6 8 10 12 Inlet pressure first stage, 17 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 8 bar. * Inlet pressure C 200/2 6 Outlet pressure, bar 8 6 17 bar* 17 bar* 2 4 2 17 bar* Max flow C200/2P 0 2 4 6 8 10 12 14 Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure C 200/2 10.5 11 10 9 8 7 6 5 4 3 2 1 Outlet pressure, bar 17 bar* 17 bar* 17 bar* Max flow 17 bar* 220 199 211 0 5 10 15 20 25 30 Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure All measurements in millimeters. Type A. Drawings of other types available on request.

HiQ REDLINE Cylinder regulators C 200hv/2. Two stage regulator. C 200hv/2 is a two-stage regulator made especially for the high demands on purity, safety and tightness that is necessary for specialty gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. C 200hv/2 can be plain or equipped with a shut-off valve (type A), a needle valve (type B). Product name bar(a) psi(a) HiQ code C 200hv/2, brass 0.1 2 1.5 30 5441 C 200hv/2, brass 0.2 3 3 45 5442 C 200hv/2, stainless steel 0.1 2 1.5 30 5447 C 200hv/2, stainless steel 0.2 3 3 45 5448 C 200hv/2 A, brass 0.1 2 1.5 30 5443 C 200hv/2 A, brass 0.2 3 3 45 5444 C 200hv/2 A, stainless steel 0.1 2 1.5 30 5449 C 200hv/2 A, stainless steel 0.2 3 3 45 5450 C 200hv/2 B, brass 0.1 2 1.5 30 5445 C 200hv/2 B, brass 0.2 3 3 45 5446 C 200hv/2 B, stainless steel 0.1 2 1.5 30 5451 C 200hv/2 B, stainless steel 0.2 3 3 45 5452 Technical data Primary pressure 230 bar 3,300 psi Outlet pressure 0.1 2 bar(a) 1.5 30 psi(a) 0.2 3 bar(a) 3 45 psi(a) Outlet gauge range 1 1.5 bar 14.5 40 psi 1 5 bar 14.5 75 psi Connection Out = NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 1.9 kg 4.2 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

C200hv/2 C200hv/2B C 200hv/2 2.4 2.0 Outlet pressure, bar 2 bar* 220 1.6 1.2 0.8 1 bar* 0.4 0 0 0.5 1.0 1.5 2.0 2.5 3.0 Flow, Nm 3 /h N 2 199 211 All measurements in millimeters. Type A. Drawings of other types available on request.

HiQ REDLINE Cylinder regulators C 12hv/1. Single stage regulator. C 12hv/1 is a single stage cylinder regulator, especially suitable for specialty gases where demands on purity, tightness and safety are high. C 12hv/1 is suited for all low vapour pressure gases of all purities and gas mixtures, especially liquified gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. C 12hv/1 can be plain or equipped with a shut-off valve (type A), a needle valve (type B). Product name bar(a) psi(a) HiQ code C 12hv/1, brass 0.1 2 1.5 30 5453 C 12hv/1, brass 0.2 3 3 45 5454 C 12hv/1, stainless steel 0.1 2 1.5 30 5459 C 12hv/1, stainless steel 0.2 3 3 45 5460 C 12hv/1 A, brass 0.1 2 1.5 30 5455 C 12hv/1 A, brass 0.2 3 3 45 5456 C 12hv/1 A, stainless steel 0.1 2 1.5 30 5461 C 12hv/1 A, stainless steel 0.2 3 3 45 5462 C 12hv/1 B, brass 0.1 2 1.5 30 5457 C 12hv/1 B, brass 0.2 3 3 45 5458 C 12hv/1 B, stainless steel 0.1 2 1.5 30 5463 C 12hv/1 B, stainless steel 0.2 3 3 45 5464 Technical data Primary pressure 12 bar 175 psi Outlet pressure 0.1 2 bar(a) 1.5 30 psi(a) 0.2 3 bar(a) 3 45 psi(a) Outlet gauge range 1 1.5 bar 14.5 40 psi 1 5 bar 14.5 75 psi Max flow (nitrogen) 5.8 Nm 3 /h 84 SCFH Connection Out = NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 1.5 kg 3.3 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

C12hv/1 C12hv/1A C 12hv/1 2.5 2.0 1.5 Outlet pressure, bar 240 1.0 0.5 Max flow 0 0 1 2 3 4 5 6 Flow, Nm 3 /h N 2 120 140 All measurements in millimeters. Type A. Drawings of other types available on request.

The right HiQ REDLINE choice Gas name Chemical formula Gas panels Points of use S200 S201 S202 S203 D204 A208 A209 W40 B40 L40 I40X Acetylene C 2 H 2 3) Air, synthetic Ammonia NH 3 5) Argon Ar Arsine AsH 3 Boron trichloride BCl 3 Boron trifluoride BF 3 1,3-Butadiene C 4 H 6 n-butane C 4 H 10 iso-butane C 4 H 10 1-Butene C 4 H 8 cis-2-butene C 4 H 8 trans-2-butene C 4 H 8 iso-butene C 4 H 8 Carbon dioxide CO 2 Carbon monoxide CO Carbonyl sulfide COS Chlorine Cl 2 Chlorine trifluoride ClF 3 Cyanogen CNCN Cyanogen chloride CNCl Cyclopropane C 3 H 6 Deuterium D 2 Diborane B 2 H 6 Dichlorosilane SiH 2 Cl 2 Dimethylamine (CH 3 ) 2 NH Dimethyl ether C 2 H 6 O 2,2-Dimethylpropane C 5 H 12 Ethane C 2 H 6 Ethene C 2 H 4 Ethylamine C 2 H 5 NH 2 Ethyl chloride C 2 H 5 Cl Ethylene oxide C 2 H 4 O Fluorine 6) F 2 Germane GeH 4

Cylinder regulators PoU Typical filling pressure at C200/1 C200/2 1) C200hv/2 C12hv1 Valve 2) 15 C [bar] Typical filling pressure at 70 F [psig] Safety Material recommendation Gas name 16 250 F+ Brass 4) Acetylene 200 2,400 Brass Air, synthetic 5) 5) 7.3 114 T, C, N SS Ammonia 150/200 2,640 A Brass Argon 13.5 205 F+, T+, N SS Arsine 1.1 4.4 T+, C SS Boron trichloride 60 1,600 T+, C SS Boron trifluoride 2 22 F+, Carc2, Muta2 Brass 1,3-Butadiene 1.75 16.3 F+ Brass n-butane 2.6 31 F+ Brass iso-butane 2.25 23.5 F+ Brass 1-Butene 1.5 13 F+ Brass cis-2-butene 1.62 15 F+ Brass trans-2-butene 2.3 24.3 F+ Brass iso-butene 51 830 A Brass Carbon dioxide 100/150/200 1,660/2,000 F+, T,Tera1 Brass Carbon monoxide 9.6 85 F+, T SS Carbonyl sulfide 5.8 85.3 T, Xi, N SS Chlorine 1 0.9 C+, N SS Chlorine trifluoride 5 55 F+, T+ SS Cyanogen 19 260 T+ SS Cyanogen chloride 6 68 F+ Brass Cyclopropane 100 1,740 F+ Brass Deuterium 38 520 F+, T+ SS Diborane 1.3 9 F+, T,C SS Dichlorosilane 1.4 11 F+, Xn, Xi SS Dimethylamine 5 62.3 F+ Brass Dimethyl ether 1.2 7 F+ Brass 2,2-Dimethylpropane 33.8 544 F+ Brass Ethane 76 1,200 F+ Brass Ethene 1 5.3 F+, Xi SS Ethylamine 1 5.3 F+ SS Ethyl chloride 1.23 7 F+,T,Xi, Muta2,Carc2 SS Ethylene oxide 20 300 T+, C SS Fluorine 6) 29 415 F+, T+ Brass Germane

The right HiQ REDLINE choice Gas name Chemical formula Gas panels Points of use S200 S201 S202 S203 D204 A208 A209 W40 B40 L40 I40X Helium He Hydrogen H 2 Hydrogen bromide HBr Hydrogen chloride HCl Hydrogen fluoride HF Hydrogen sulfide H 2 S Krypton Kr Methane CH 4 Methylamine CH 3 NH 2 Methyl bromide CH 3 Br Methyl chloride CH 3 Cl Methyl fluoride CH 3 F Methyl mercaptan CH 3 SH Natural gas n.a. Neon Ne Nitric oxide NO Nitrogen N 2 Nitrogen dioxide NO 2 Nitrogen trifluoride NF 3 Nitrous oxide N 2 O Octafluoropropane C 3 F 8 Oxygen O 2 Phosgene COCl 2 Phosphine PH 3 Propane C 3 H 8 Propene C 3 H 6 Propyne C 3 H 4 R 11 Trichlorofluoromethane CFCl 3 R 12 Dichlorodifluoromethane CF 2 Cl 2 R 13 Chlorotrifluoromethane CF 3 Cl R 13 b1 Bromotrifluoromethane CF 3 Br R 14 Tetrafluoromethane CF 4 R 21 Dichlorofluoromethane CHFCl 2 R 22 Chlorodifluoromethane CHF 2 Cl R 23 Trifluoromethane CHF 3

Cylinder regulators PoU Typical filling pressure at C200/1 C200/2 1) C200hv/2 C12hv1 Valve 2) 15 C [bar] Typical filling pressure at 70 F [psig] Safety Material recommendation Gas name 200 2,640 A Brass Helium 100/200 2,000/2,400 F+ Brass Hydrogen 19.3 320 C SS Hydrogen bromide 38 613 T, C SS Hydrogen chloride 0.9 0.9 T+,C SS Hydrogen fluoride 15.7 252 F+,T+,N SS Hydrogen sulfide 130 1,900 A Brass Krypton 100/150/200 2,000/2,400 F+ Brass Methane 2.5 29 F+, Xn, Xi SS Methylamine 1.6 13 T, Xi,N SS Methyl bromide 4.2 59 F+, Carc3, Xn SS Methyl chloride 38 538 F+ Brass Methyl fluoride 1.4 15 F+, T+ SS Methyl mercaptan 20 100 440 1,309 F+ Brass Natural gas 100/200 2,000/2,400 A Brass Neon 30/40 500 T+,C SS Nitric oxide 150/200 2,000/2,640 A Brass Nitrogen 1.0 0 T+,C SS Nitrogen dioxide 19 1,450 O, Xn SS Nitrogen trifluoride 45 745 O Brass Nitrous oxide 7.0 100 A Brass Octafluoropropane 150/200 2,000/2,640 O Brass Oxygen 1.3 10.7 T+ SS Phosgene 32 594 F+, T+ SS Phosphine 7.4 109 F+ Brass Propane 9.0 136 F+ Brass Propene 4.5 65 F+ Brass Propyne 0.8 13.4 N Brass R 11 Trichlorofluoromethane 5.0 70.2 N Brass R 12 Dichlorodifluoromethane 31 457 N Brass R 13 Chlorotrifluoromethane 14 189 N Brass R 13 b1 Bromotrifluoromethane 127 2,000 A Brass R 14 Tetrafluoromethane 1.0 4.0 N Brass R 21 Dichlorofluoromethane 8.0 121.4 N Brass R 22 Chlorodifluoromethane 37.5 635 A Brass R 23 Trifluoromethane

The right HiQ REDLINE choice Gas name Chemical formula Gas panels Points of use S200 S201 S202 S203 D204 A208 A209 W40 B40 L40 I40X R 32 Difluoromethane CH 2 F 2 R114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F 4 R115 Chloropentafluoroethane C 2 ClF 5 R116 Hexafluoroethane C 2 F 6 R142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF 2 R152a 1,1-Difluoroethane C 2 H 4 F 2 Silane SiH 4 Silicon tetrafluoride SiF 4 Sulphur dioxide SO 2 Sulphur hexafluoride SF 6 Trimethylamine (CH 3 ) 3 N Tungsten hexafluoride WF 6 Vinyl bromide Vinyl chloride Vinyl methyl ether C 2 H 3 Br C 2 H 3 Cl C 3 H 6 O Xenon Xe Footnotes 1. Min. 7 bar primary pressure 2. Max. 50 bar primary pressure 3. W40 B Ac 4. Brass with <65% copper 5. Ammonia relief valve 6. Mixtures <10% F 2 Safety A = Asphyxiant C = Corrosive Carc1/2/3 = Carcinogenic category 1 3 F = Flammable F+ = Extremely flammable Muta1/2/3 = Mutagenic category 1 3 N = Environmentally harmful O = Oxidizing T = Toxic T+ = Very toxic Tera1/2/3 = Teratogenic category 1 3 Xn = Harmful Xi = Irritating Note! For toxic, harmful/irritating or flammable gas, Linde recommends that the ventilation line shall end at a safe place outside the building or that it is connected to separate ventilation. Note! Gas panels aimed for flammable use shall have a non-return valve before the regulator. Note! Halocarbons damage the ozone layer of the atmosphere. Hence the use of halocarbons is restricted and in some cases prohibited by local legislation. If a halocarbon can be substituted with an environmentally less harmful substance, this shall be done. 4 = Standard equipment, all other requirements are special, please contact your local supplier.

Cylinder regulators PoU Typical filling pressure at C200/1 C200/2 1) C200hv/2 C12hv1 Valve 2) 15 C [bar] Typical filling pressure at 70 F [psig] Safety Material recommendation Gas name 12.6 160 F+ Brass R 32 Difluoromethane 1.5 12.6 N Brass R114 1,2-Dichlorotetrafluorethane 8 121.4 N Brass R115 Chloropentafluoroethane 27 430 A Brass R116 Hexafluoroethane 2.5 35 F+,N Brass R142b 1-Chloro-1,1-difluoroethane 4.2 60 F+ Brass R152a 1,1-Difluoroethane 14 80 150 1,205 F+ SS Silane 69 1,000 T, C SS Silicon tetrafluoride 2.7 34 T,C SS Sulfur dioxide 19 320 A Brass Sulfur hexafluoride 1.6 20 F+, Xn, Xi SS Trimethylamine 0.9 35 T SS Tungsten hexafluoride 1 6 F+,Carc1 SS Vinyl bromide 2.3 24.3 F+,Carc1 SS Vinyl chloride 1.5 11 F+ Brass Vinyl methyl ether 56 680 A Brass Xenon

CleanLine. Points of use 6.0. CleanLine is a series of points of use equipment and components for purities up to 6.0 (99.9999% pure). Features: Unique design by Christian Bjørn (the famous Danish designer) Combined pressure regulator, shut-off and flow regulating valves Space saving design Easy and quick to mount Easy-grip handle Full metallic diaphragms in shut-off valve, pressure regulator and flow regulating valve Built-in manometer with bar/psi scale

CleanLine Points of use P 25. Panel mounting. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for panel mounting. There are six different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code P 25 s n.a. n.a. 5773 P 25 f n.a. n.a. 5774 P 25 r 0 1.5 bar 0 25 psi 5775 P 25 r 0 4 bar 0 60 psi 5776 P 25 r 0 10 bar 0 150 psi 5777 P 25 sr 0 1.5 bar 0 25 psi 5778 P 25 sr 0 4 bar 0 60 psi 5779 P 25 sr 0 10 bar 0 150 psi 5780 P 25 rf 0 1.5 bar 0 25 psi 5781 P 25 rf 0 4 bar 0 60 psi 5782 P 25 rf 0 10 bar 0 150 psi 5783 P 25 srf 0 1.5 bar 0 25 psi 5784 P 25 srf 0 4 bar 0 60 psi 5785 P 25 srf 0 10 bar 0 150 psi 5786 Product name Model Outlet code CL-S, brass CleanLine straight outlet,npt ¼ female 554 CL-S, stainless steel CleanLine straight outlet,npt ¼ female 555 CL-45, brass CleanLine 45 outlet,npt ¼ female 556 CL-45, stainless steel CleanLine 45 outlet,npt ¼ female 557 Technical data Max primary pressure 25 bar 360 psi Secondary pressure 0 1.5 bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar 0 150 psi Pressure gauge scale 1 2.5 bar 14.5 36 psi 1 6 bar 14.5 85 psi 1 12 bar 14.5 174 psi Operating temperature 20 +70 C 4 +158 F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE

P 25 srf Typical flow curve for type srf. 12 10 Outlet pressure [bar] 8 6 4 2 0 0 20 40 60 80 100 120 140 160 180 Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar CleanLine outlets 1/4" NPT 1/2" NPSM 1/4" NPT 1/2" NPT 33 1/2" NPSM 1/4" NPT 1/2" NPT 1/4" NPT 45 27 60 60 Design P srf Flow valve Stop valve Max 16 Type Dimensions [mm] B C D sr 136 77.5 20.5 srf 136 77.5 20.5 r 109 48 20.5 rf 109 48 20.5 D B C 79 Pressure regulator Panel All measurements in millimeters. Drawings of type s and f available on request.

CleanLine Points of use I 25. Inset design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for wall mounting with built-in pipework. Model I 25X is equipped with internal inlet and external outlet. There are eight different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code I 25 s n.a. n.a. 5787 I 25 f n.a. n.a. 5788 I 25 r 0 1.5 bar 0 25 psi 5789 I 25 r 0 4 bar 0 60 psi 5790 I 25 r 0 10 bar 0 150 psi 5791 I 25 sr 0 1.5 bar 0 25 psi 5792 I 25 sr 0 4 bar 0 60 psi 5793 I 25 sr 0 10 bar 0 150 psi 5794 I 25 rf 0 1.5 bar 0 25 psi 5795 I 25 rf 0 4 bar 0 60 psi 5796 I 25 rf 0 10 bar 0 150 psi 5797 I 25 srf 0 1.5 bar 0 25 psi 5798 I 25 srf 0 4 bar 0 60 psi 5799 I 25 srf 0 10 bar 0 150 psi 5800 I 25X rf 0 1.5 bar 0 25 psi 5801 I 25X rf 0 4 bar 0 60 psi 5802 I 25X rf 0 10 bar 0 150 psi 5803 I 25X srf 0 1.5 bar 0 25 psi 5804 I 25X srf 0 4 bar 0 60 psi 5805 I 25X srf 0 10 bar 0 150 psi 5806 Technical data Max primary pressure 25 bar 360 psi Secondary pressure 0 1.5 bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar 0 150 psi Pressure gauge scale 1 2.5 bar 14.5 36 psi 1 6 bar 14.5 85 psi 1 12 bar 14.5 174 psi Operating temperature 20 +70 C 4 +158 F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE Product name Model Outlet code CL-S, brass CleanLine straight outlet,npt ¼ female 554 CL-S, stainless steel CleanLine straight outlet,npt ¼ female 555 CL-45, brass CleanLine 45 outlet,npt ¼ female 556 CL-45, stainless steel CleanLine 45 outlet,npt ¼ female 557

79 I 25 srf Typical flow curve for type srf. 12 10 Outlet pressure [bar] 8 6 4 2 0 0 20 40 60 80 100 120 140 160 180 Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar CleanLine outlets 1/4" NPT 1/2" NPSM 1/4" NPT 1/2" NPT 33 Design I srf Max 52 Flow valve Stop valve OUT Ø52 *Ø20 Ø65 1/2" NPSM 1/4" NPT 1/2" NPT 1/4" NPT 45 27 60 60 *Ø 21 *27 Panel IN 113 52 49 Pressure regulator *Max dimensions of the tube fittings All measurements in millimeters. Other drawings available on request.

CleanLine Points of use W 25. Wall mounting. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for wall mounting with exposed pipework. There are six different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code W 25 s n.a. n.a. 5807 W 25 f n.a. n.a. 5808 W 25 r 0 1.5 bar 0 25 psi 5809 W 25 r 0 4 bar 0 60 psi 5810 W 25 r 0 10 bar 0 150 psi 5811 W 25 sr 0 1.5 bar 0 25 psi 5812 W 25 sr 0 4 bar 0 60 psi 5813 W 25 sr 0 10 bar 0 150 psi 5814 W 25 rf 0 1.5 bar 0 25 psi 5815 W 25 rf 0 4 bar 0 60 psi 5816 W 25 rf 0 10 bar 0 150 psi 5817 W 25 srf 0 1.5 bar 0 25 psi 5818 W 25 srf 0 4 bar 0 60 psi 5819 W 25 srf 0 10 bar 0 150 psi 5820 Technical data Max primary pressure 25 bar 360 psi Secondary pressure 0 1.5 bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar 0 150 psi Pressure gauge scale 1 2.5 bar 14.5 36 psi 1 6 bar 14.5 85 psi 1 12 bar 14.5 174 psi Operating temperature 20 +70 C 4 +158 F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE

W 25 srf Typical flow curve for type srf. Outlet pressure [bar] 12 10 8 6 4 2 0 0 20 40 60 80 100 120 140 160 180 Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar Design W srf E Flow valve Stop valve Wall Type Dimensions [mm] B C D E sr 147 86 20.5 22.5 srf 147 86 20.5 22.5 r 123 61 20.5 26.5 rf 123 61 20.5 26.5 Ø 52 D B C 79 Pressure regulator 33 All measurements in millimeters. Drawings of type s and f available on request.

CleanLine Points of use B 25. Bench/suspended mounting. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for mounting on a bench or in the ceiling. There are six different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code B 25 s n.a. n.a. 5821 B 25 f n.a. n.a. 5822 B 25 r 0 1.5 bar 0 25 psi 5823 B 25 r 0 4 bar 0 60 psi 5824 B 25 r 0 10 bar 0 150 psi 5825 B 25 sr 0 1.5 bar 0 25 psi 5826 B 25 sr 0 4 bar 0 60 psi 5827 B 25 sr 0 10 bar 0 150 psi 5828 B 25 rf 0 1.5 bar 0 25 psi 5829 B 25 rf 0 4 bar 0 60 psi 5830 B 25 rf 0 10 bar 0 150 psi 5831 B 25 srf 0 1.5 bar 0 25 psi 5832 B 25 srf 0 4 bar 0 60 psi 5833 B 25 srf 0 10 bar 0 150 psi 5834 Technical data Max primary pressure 25 bar 360 psi Secondary pressure 0 1.5 bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar 0 150 psi Pressure gauge scale 1 2.5 bar 14.5 36 psi 1 6 bar 14.5 85 psi 1 12 bar 14.5 174 psi Operating temperature 20 +70 C 4 +158 F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE

B 25 srf Typical flow curve for type srf. Outlet pressure [bar] 12 10 8 6 4 2 0 0 20 40 60 80 100 120 140 160 180 Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar Design B srf Ceiling A Ø52 Max. 32 Type Dimensions [mm] A B C D sr 171 136 77.5 20.5 srf 171 136 77.5 20.5 r 144 109 48 20.5 rf 144 109 48 20.5 Flow valve Pressure regulator Stop valve 34 12 79 120 D Table B C 4 Ø22 Max. 32 All measurements in millimeters. Other drawings available on request.

Quick Connect. Points of use and outlets 5.0. Quick Connect offers a set of point of use equipment that combines flexibility with high quality and safety. Advantages for the end user: Flexible and compact design increases size of working area. Reduces downtime. Innovative and compact design. Combined flow valve and Quick Connect. Key system protects against undesired mix of media, 11 keys are available. Clear media indication. Possibility of attaching additional equipment: flow meters, pressure regulators, etc. Non return valve in outlets protects against contamination of equipment. Valve locked with no plug inserted. Gasket that seals between outlet and Quick Connect, replaceable without disassembling the Quick Connect. Advantages for the architect & furniture producer: Increased flexibility in laboratory design. Last minute determination of media possible. Number of fittings can be reduced due to the flexibility of the Quick Connect. Advantages for the fitter: Simple and rational installation. 6 different methods of installation. Last minute change of media possible (Prior to start of use). Possibility to install additional Quick Connect in the laboratory, using a model for exposed piping. Technical data Max primary pressure 10 bar 145 psi Connections NPT ¼ female Operating temperature 0 +60 C 32 +140 F Material External Nickel plated brass, Stainless steel, EPDM rubber Media wetted parts Stainless steel, brass, PVDF Seals Viton Quick Connect equipment and accessories are delivered with labeling for different media according to standard EN13792:2002 or American recommendations. We also provide 3 versions that are not specified. Note: Equipment labeled for a specific media is delivered with a unique connection key to avoid undesired mix. When the option Not specified or customer specified labeling is desired, please contact your local Linde representative for further information. Standard Media Air Vacuum Oxygen Nitrogen Carbon dioxide Hydrogen Argon Helium Not specified Not specified Not specified EN13792:2002 American recommendation

Quick Connect Points of use. Connection points. Quick Connect connection points are delivered in four different versions: inset design (I), panel mounted with concealed piping (BE) and panel mounted with exposed piping (SE). For bench mounted/suspended mounting (B) see next spread. The wall bracket (WB) is intended for use with the SE models when front side mounting is desired of the Quick Connect connection points. For technical data see page 89. Media labeling according to standard EN13792:2002 Product name Media HiQ code QC W I air 5835 QC W I vacuum 5836 QC W I oxygen 5837 QC W I nitrogen 5838 QC W I carbon dioxide 5839 QC W I hydrogen 5840 QC W I argon 5841 QC W I helium 5842 QC W I not specified 5843 QC W I not specified 5844 QC W I not specified 5845 QC W BE air 5846 QC W BE vacuum 5847 QC W BE oxygen 5848 QC W BE nitrogen 5849 QC W BE carbon dioxide 5850 QC W BE hydrogen 5851 QC W BE argon 5852 QC W BE helium 5853 QC W BE not specified 5854 QC W BE not specified 5855 QC W BE not specified 5856 QC W SE air 5857 QC W SE vacuum 5858 QC W SE oxygen 5859 QC W SE nitrogen 5860 QC W SE carbon dioxide 5861 QC W SE hydrogen 5862 QC W SE argon 5863 QC W SE helium 5864 QC W SE not specified 5865 QC W SE not specified 5866 QC W SE not specified 5867 QC WB (wall bracket) all media 5868 Media labeling according to American recommendations Product name Media HiQ code QC W I air 5869 QC W I vacuum 5870 QC W I oxygen 5871 QC W I nitrogen 5872 QC W I carbon dioxide 5873 QC W I hydrogen 5874 QC W I argon 5875 QC W I helium 5876 QC W I not specified 5877 QC W I not specified 5878 QC W I not specified 5879 QC W BE air 5880 QC W BE vacuum 5881 QC W BE oxygen 5882 QC W BE nitrogen 5883 QC W BE carbon dioxide 5884 QC W BE hydrogen 5885 QC W BE argon 5886 QC W BE helium 5887 QC W BE not specified 5888 QC W BE not specified 5889 QC W BE not specified 5890 QC W SE air 5891 QC W SE vacuum 5892 QC W SE oxygen 5893 QC W SE nitrogen 5894 QC W SE carbon dioxide 5895 QC W SE hydrogen 5896 QC W SE argon 5897 QC W SE helium 5898 QC W SE not specified 5899 QC W SE not specified 5900 QC W SE not specified 5901 QC WB (wall bracket) all media 5868

Built in (QC-W I) 49 30 Ø75 Ø72 Mounting hole Ø57 Panel Max 30 Ø25 Ø51 Back side mounted (QC-W BE and SE) QC-W I 45 12.5 Center inlet (Exposed piping) Ø75 Mounting hole Outer diameter quick connect Ø52 Ø44.5 1.5 52 1.5 Panel Max 12 Ø25 Front side mounted (QC-W BE and SE) 12.5 Center inlet (Exposed piping) Mounting holes (Shown from the backside) 34 Outer diameter quick connect Ø52 4.5 45º 52 Wall bracket (for QC-W SE) M3 X 0.5 Thread depth min. 6mm 29.5 Center inlet (Exposed piping) Ø23 12 Ø6 (2 Pcs.) 16 QC-W BE Ø52 Ø52 Ø20 Ø30 Wall/panel 68 All measurements in millimeters. Flow regulation curve 300 250 Flow [l/min] 200 150 100 50 0 0 1 14.5 2 29 3 43.5 4 58 5 72.5 Inlet pressure 6 87 7 101.5 8 116 9 130.5 10 145 bar psi QC-W SE

Quick Connect Points of use. Connection points. For bench mounted or suspended mounting. Technical data see page 89. Media labeling according to standard EN13792:2002 Product name Media HiQ code QC B air 5902 QC B vacuum 5903 QC B oxygen 5904 QC B nitrogen 5905 QC B carbon dioxide 5906 QC B hydrogen 5907 QC B argon 5908 QC B helium 5909 QC B not specified 5910 QC B not specified 5911 QC B not specified 5912 Media labeling according to American recommendations Product name Media HiQ code QC B air 5913 QC B vacuum 5914 QC B oxygen 5915 QC B nitrogen 5916 QC B carbon dioxide 5917 QC B hydrogen 5918 QC B argon 5919 QC B helium 5920 QC B not specified 5921 QC B not specified 5922 QC B not specified 5923

Bench mounted 87 52 12 Max. 32 120 Ø52 5 Ø22 QC-B Table/ceiling Mounting hole Contour Column Flow [l/min] Flow regulation curve 300 250 200 150 100 50 18 13 28 0 0 1 14.5 2 29 3 43.5 4 58 5 72.5 Inlet pressure 6 87 7 101.5 8 116 9 130.5 10 145 bar psi All measurements in millimeters.

Quick Connect Outlets. Quick Connect outlets are delivered in four different versions: 90 outlet with serrated hose nozzle (ON), 90 outlet with ¼ NPT female (OF), straight outlet with ¼ NPT male (OS) and a 1.5 m stainless steel wire braded PTFE hose. The hose is equipped with ¼ NPSM female connection in one end and ¼ NPT male in the other end (OHM). One version with ¼ NPSM female in both ends (OHF) also available. The hose plugs in to Quick Connect via the straight outlet (OS). Other lengths of hoses on request. Models ON, OF and OS includes a non-return valve. For technical data see page 89. Media labeling according to standard EN13792:2002 Product name Media Outlet code QC ON air 521 QC ON vacuum 522 QC ON oxygen 523 QC ON nitrogen 524 QC ON carbon dioxide 525 QC ON hydrogen 526 QC ON argon 527 QC ON helium 528 QC ON not specified 529 QC ON not specified 530 QC ON not specified 531 QC OF air 532 QC OF vacuum 533 QC OF oxygen 534 QC OF nitrogen 535 QC OF carbon dioxide 536 QC OF hydrogen 537 QC OF argon 538 QC OF helium 539 QC OF not specified 540 QC OF not specified 541 QC OF not specified 542 QC OS air 543 QC OS vacuum 544 QC OS oxygen 545 QC OS nitrogen 546 QC OS carbon dioxide 547 QC OS hydrogen 548 QC OS argon 549 QC OS helium 550 QC OS not specified 551 QC OS not specified 552 QC OS not specified 553 QC OHM all media 564 QC OHF all media 565 Media labeling according to American recommendations Product name Media Outlet code QC ON air 607 QC ON vacuum 608 QC ON oxygen 609 QC ON nitrogen 610 QC ON carbon dioxide 611 QC ON hydrogen 612 QC ON argon 613 QC ON helium 614 QC ON not specified 615 QC ON not specified 616 QC ON not specified 617 QC OF air 618 QC OF vacuum 619 QC OF oxygen 620 QC OF nitrogen 621 QC OF carbon dioxide 622 QC OF hydrogen 623 QC OF argon 624 QC OF helium 625 QC OF not specified 626 QC OF not specified 627 QC OF not specified 628 QC OS air 629 QC OS vacuum 630 QC OS oxygen 631 QC OS nitrogen 632 QC OS carbon dioxide 633 QC OS hydrogen 634 QC OS argon 635 QC OS helium 636 QC OS not specified 637 QC OS not specified 638 QC OS not specified 639 QC OHM all media 564 QC OHF all media 565

90 with serrated hose nozzle Ø22 49 39 44 Ø10 QC-ON 90 with ¼ NPT female 49 Ø22 39 QC-OF Straight outlet with ¼ NPT male 18 5 QC-OS Hose outlet with ¼ NPT male All measurements in millimeters. QC-OH

Quick Connect Outlets. Regulator. Quick Connect pressure regulator is used when pressure control is needed at the point of use. The Quick Connect pressure regulator is delivered in two pressure intervals and it is provided with a scale expressed in bar or psi. The regulator is delivered with a non-return valve. For other combinations than mentioned below (e.g. scale expressed in kpa or media labeling according to EN standard with scale in psi) please contact your local Linde representative. For technical data see page 89. Media labeling according to standard EN13792:2002 Product Pressure range/ Media Outlet name scale in bar code QC OR 0 5 air 566 QC OR 0 10 air 567 QC OR 0 5 oxygen 568 QC OR 0 10 oxygen 569 QC OR 0 5 nitrogen 570 QC OR 0 10 nitrogen 571 QC OR 0 5 carbon dioxide 572 QC OR 0 10 carbon dioxide 573 QC OR 0 5 hydrogen 574 QC OR 0 10 hydrogen 575 QC OR 0 5 argon 576 QC OR 0 10 argon 577 QC OR 0 5 helium 578 QC OR 0 10 helium 579 QC OR 0 5 not specified 580 QC OR 0 10 not specified 581 QC OR 0 5 not specified 582 QC OR 0 10 not specified 583 QC OR 0 5 not specified 584 QC OR 0 10 not specified 585 Media labeling according to American recommendations Product Pressure range/ Media Outlet name scale in psi code QC OR 0 75 air 652 QC OR 0 150 air 653 QC OR 0 75 oxygen 654 QC OR 0 150 oxygen 655 QC OR 0 75 nitrogen 656 QC OR 0 150 nitrogen 657 QC OR 0 75 carbon dioxide 658 QC OR 0 150 carbon dioxide 659 QC OR 0 75 hydrogen 660 QC OR 0 150 hydrogen 661 QC OR 0 75 argon 662 QC OR 0 150 argon 663 QC OR 0 75 helium 664 QC OR 0 150 helium 665 QC OR 0 75 not specified 666 QC OR 0 150 not specified 667 QC OR 0 75 not specified 668 QC OR 0 150 not specified 669 QC OR 0 75 not specified 670 QC OR 0 150 not specified 671

QC-OR 101 26 30 Ø42 48 Ø39 40 All measurements in millimeters.

Quick Connect Outlets. Flow meter. Quick Connect flow meter is used when indication of flow is needed at the point of use. The Quick Connect flow meter is delivered in three flow intervals and is provided with a scale expressed in l/min. The flow meter is delivered with a non-return valve. For other media than mentioned below please contact your local Linde representative. For technical data see page 89. Media labeling according to standard EN13792:2002 Product Flow range, Media Outlet name l/min code QC OFM 0 6 air 586 QC OFM 0 15 air 587 QC OFM 0 30 air 588 QC OFM 0 6 oxygen 589 QC OFM 0 15 oxygen 590 QC OFM 0 30 oxygen 591 QC OFM 0 6 nitrogen 592 QC OFM 0 15 nitrogen 593 QC OFM 0 30 nitrogen 594 QC OFM 0 6 carbon dioxide 595 QC OFM 0 15 carbon dioxide 596 QC OFM 0 30 carbon dioxide 597 QC OFM 0 6 hydrogen 598 QC OFM 0 15 hydrogen 599 QC OFM 0 30 hydrogen 600 QC OFM 0 6 argon 601 QC OFM 0 15 argon 602 QC OFM 0 30 argon 603 QC OFM 0 6 helium 604 QC OFM 0 15 helium 605 QC OFM 0 30 helium 606 Media labeling according to American recommendations Product Flow range, Media Outlet name l/min code QC OFM 0 6 air 672 QC OFM 0 15 air 673 QC OFM 0 30 air 674 QC OFM 0 6 oxygen 675 QC OFM 0 15 oxygen 676 QC OFM 0 30 oxygen 677 QC OFM 0 6 nitrogen 678 QC OFM 0 15 nitrogen 679 QC OFM 0 30 nitrogen 680 QC OFM 0 6 carbon dioxide 681 QC OFM 0 15 carbon dioxide 682 QC OFM 0 30 carbon dioxide 683 QC OFM 0 6 hydrogen 684 QC OFM 0 15 hydrogen 685 QC OFM 0 30 hydrogen 686 QC OFM 0 6 argon 687 QC OFM 0 15 argon 688 QC OFM 0 30 argon 689 QC OFM 0 6 helium 690 QC OFM 0 15 helium 691 QC OFM 0 30 helium 692

QC-OFM 130 Ø29 77 Ø30 Ø25 Ø8 85 36 All measurements in millimeters.

BASELINE. Cylinder regulators 5.0 Regulators are used to reduce the high pressure in the gas cylinder to a more manageable pressure in the simplest of gas delivery systems. The cylinder regulator is equipped with a cylinder connection, a high pressure gauge to monitor the content of the cylinder and a low pressure gauge to monitor the adjustable secondary pressure. If there is a need for flow adjustments the cylinder regulator is equipped with a needle valve, otherwise it is equipped with a shut-off valve. BASELINE cylinder regulators are the entry point into the world of specialty gas equipment. They are meant for more stable operation than industrial equipment can provide, at a competitive price. Typical applications are gas and liquid chromatography, carrier gases, zero and span calibration gases, high purity chamber pressurization, liquified hydrocarbon gas control and control of cryogenic gases.

BASELINE C 106/1. Six-port single stage cylinder regulator. The C 106/1 cylinder regulators are intended for primary pressure control of noncorrosive, high purity or liquefied gases or for applications where minor fluctuations in outlet pressure due to diminishing inlet supply can be tolerated. For ultra high purity or corrosive gases use the stainless steel version. C 106/1 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi Outlet code C 106/1, brass 0 1 0 15 5724 C 106/1, brass 0 3.5 0 50 5725 C 106/1, brass 0 7 0 100 5726 C 106/1, brass 0 10.5 0 150 5727 C 106/1, brass 0 17 0 250 5728 C 106/1, brass 0 35 0 500 5729 C 106/1, stainless steel 0 1 0 15 5730 C 106/1, stainless steel 0 3.5 0 50 5731 C 106/1, stainless steel 0 7 0 100 5732 C 106/1, stainless steel 0 10.5 0 150 5733 C 106/1, stainless steel 0 17 0 250 5734 C 106/1, stainless steel 0 35 0 500 5735 C 106/1 A, brass 0 1 0 15 5736 C 106/1 A, brass 0 3.5 0 50 5737 C 106/1 A, brass 0 7 0 100 5738 C 106/1 A, brass 0 10.5 0 150 5739 C 106/1 A, brass 0 17 0 250 5740 C 106/1 A, brass 0 35 0 500 5741 C 106/1 A, stainless steel 0 1 0 15 5742 C 106/1 A, stainless steel 0 3.5 0 50 5743 C 106/1 A, stainless steel 0 7 0 100 5744 C 106/1 A, stainless steel 0 10.5 0 150 5745 C 106/1 A, stainless steel 0 17 0 250 5746 C 106/1 A, stainless steel 0 35 0 500 5747 C 106/1 B, brass 0 1 0 15 5748 C 106/1 B, brass 0 3.5 0 50 5749 C 106/1 B, brass 0 7 0 100 5750 C 106/1 B, brass 0 10.5 0 150 5751 C 106/1 B, brass 0 17 0 250 5752 C 106/1 B, brass 0 35 0 500 5753 C 106/1 B, stainless steel 0 1 0 15 5754 C 106/1 B, stainless steel 0 3.5 0 50 5755 C 106/1 B, stainless steel 0 7 0 100 5756 C 106/1 B, stainless steel 0 10.5 0 150 5757 C 106/1 B, stainless steel 0 17 0 250 5758 C 106/1 B, stainless steel 0 35 0 500 5759 Technical data Max primary pressure 210 bar 3,000 psi Outlet pressure 0 1 bar 0 15 psi 0 3.5 bar 0 50 psi 0 7 bar 0 100 psi 0 10.5 bar 0 150 psi 0 17 bar 0 250 psi 0 35 bar 0 500 psi Outlet gauge range 2 2 bar 30 30 psi 2 7 bar 30 100 psi 2 14 bar 30 200 psi 0 28 bar 0 400 psi 0 70 bar 0 1,000 psi Connection Out = NPT ¼ female Operating temperature 40 +60 C 40 +140 F Weight 1.4 kg 3.1 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PTFE

??? C 106/1B C 106/1 single stage regulator 100 (6.9) 90 (6.2) 80 (5.5) 2000 PSIG (138 BAR) INLET PRESSURE 70 (4.8) 500 PSIG (35 BAR) INLET PRESSURE 60 (4.1) 200 PSIG (13.8 BAR) INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 50 (3.4) 40 (2.8) 30 (2.0) 20 (1.4) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) 2000 PSIG (138 BAR) INLET PRESSURE INLET PRESSURE 10 (0.7) 200 PSIG (13.8 BAR) INLET PRESSURE 5 (142) 500 PSIG (35 BAR) INLET PRESSURE 10 (283) 2000 PSIG (138 BAR) INLET PRESSURE 15 (425) 20 (566) 500 (34.5) 450 (31) 2000 PSIG (138 BAR) INLET PRESSURE 400 (27.6) 1000 PSIG (138 BAR) INLET PRESSURE 350 (24.1) 300 (20.7) 60 117 10.5 OUTLET PRESSURE - PSIG (BAR) 250 (17.2) 200 (13.8) 150 (10.3) 100 (6.9) 50 (3.4) 500 PSIG (35 BAR) INLET PRESSURE 500 PSIG (35 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 60 60 OUTLE T G AUG E OUTLET AUX. OUTLE T??????????? 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø 44 Ø 50 Ø 53 5 (142) 10 (283) 15 (425) 20 (566) 25 (708) FLOW RATE SCFM (LPM) N 2 30 (850) 35 (991) 40 (1133) All measurements in millimeters. Drawings of other types available on request.

BASELINE C 106X/1. Six-port single stage extra high pressure cylinder regulator. The C 106X/1 high pressure cylinder regulators are intended for primary pressure control of noncorrosive, high purity or liquefied gases or for applications where minor fluctuations in outlet pressure due to diminishing inlet supply can be tolerated. For ultra high purity or corrosive gases use the stainless steel version. C 106X/1 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code C 106X/1, brass 0 3.5 0 50 5574 C 106X/1, brass 0 7 0 100 5575 C 106X/1, brass 0 10.5 0 150 5576 C 106X/1, brass 0 17 0 250 5577 C 106X/1, brass 0 35 0 500 5578 C 106X/1, stainless steel 0 3.5 0 50 5579 C 106X/1, stainless steel 0 7 0 100 5580 C 106X/1, stainless steel 0 10.5 0 150 5581 C 106X/1, stainless steel 0 17 0 250 5582 C 106X/1, stainless steel 0 35 0 500 5583 C 106X/1 A, brass 0 3.5 0 50 5584 C 106X/1 A, brass 0 7 0 100 5585 C 106X/1 A, brass 0 10.5 0 150 5586 C 106X/1 A, brass 0 17 0 250 5587 C 106X/1 A, brass 0 35 0 500 5588 C 106X/1 A, stainless steel 0 3.5 0 50 5589 C 106X/1 A, stainless steel 0 7 0 100 5590 C 106X/1 A, stainless steel 0 10.5 0 150 5591 C 106X/1 A, stainless steel 0 17 0 250 5592 C 106X/1 A, stainless steel 0 35 0 500 5593 C 106X/1 B, brass 0 3.5 0 50 5594 C 106X/1 B, brass 0 7 0 100 5595 C 106X/1 B, brass 0 10.5 0 150 5596 C 106X/1 B, brass 0 17 0 250 5597 C 106X/1 B, brass 0 35 0 500 5598 C 106X/1 B, stainless steel 0 3.5 0 50 5599 C 106X/1 B, stainless steel 0 7 0 100 5600 C 106X/1 B, stainless steel 0 10.5 0 150 5601 C 106X/1 B, stainless steel 0 17 0 250 5602 C 106X/1 B, stainless steel 0 35 0 500 5603 Technical data Max primary pressure 310 bar 4,500 psi Outlet pressure 0 3.5 bar 0 50 psi 0 7 bar 0 100 psi 0 10.5 bar 0 150 psi 0 17 bar 0 250 psi 0 35 bar 0 500 psi Outlet gauge range 2 7 bar 30 100 psi 2 14 bar 30 200 psi 0 28 bar 0 400 psi 0 70 bar 0 1,000 psi Connection Out = NPT ¼ female Operating temperature 40 +60 C 40 +140 F Weight 1.4 kg 3.1 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PCTFE

??? C 106X/1B C 106/1 single stage regulator 100 (6.9) 90 (6.2) 80 (5.5) 2000 PSIG (138 BAR) INLET PRESSURE 70 (4.8) 500 PSIG (35 BAR) INLET PRESSURE 60 (4.1) 200 PSIG (13.8 BAR) INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 50 (3.4) 40 (2.8) 30 (2.0) 20 (1.4) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) 2000 PSIG (138 BAR) INLET PRESSURE INLET PRESSURE 10 (0.7) 200 PSIG (13.8 BAR) INLET PRESSURE 5 (142) 500 PSIG (35 BAR) INLET PRESSURE 10 (283) 2000 PSIG (138 BAR) INLET PRESSURE 15 (425) 20 (566) 500 (34.5) 450 (31) 2000 PSIG (138 BAR) INLET PRESSURE 400 (27.6) 1000 PSIG (138 BAR) INLET PRESSURE 350 (24.1) 300 (20.7) 60 117 10.5 OUTLET PRESSURE - PSIG (BAR) 250 (17.2) 200 (13.8) 150 (10.3) 100 (6.9) 50 (3.4) 500 PSIG (35 BAR) INLET PRESSURE 500 PSIG (35 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 60 60 OUTLE T G AUG E OUTLET AUX. OUTLE T??????????? 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø 44 Ø 50 Ø 53 5 (142) 10 (283) 15 (425) 20 (566) 25 (708) FLOW RATE SCFM (LPM) N 2 30 (850) 35 (991) 40 (1133) All measurements in millimeters. Drawings of other types available on request.

BASELINE C 106/2. Six-port two stage cylinder regulator. The C 106/2 cylinder regulators are are intended for primary pressure control of noncorrosive, high purity or liquefied gases for applications requiring constant pressure control and delivery regardless of supply pressure variations. For ultra high purity or corrosive gases use the stainless steel version. C 106/2 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code C 106/2, brass 0 1 0 15 5628 C 106/2, brass 0 3.5 0 50 5629 C 106/2, brass 0 7 0 100 5630 C 106/2, brass 0 10.5 0 150 5631 C 106/2, brass 0 17 0 250 5632 C 106/2, stainless steel 0 1 0 15 5633 C 106/2, stainless steel 0 3.5 0 50 5634 C 106/2, stainless steel 0 7 0 100 5635 C 106/2, stainless steel 0 10.5 0 150 5636 C 106/2, stainless steel 0 17 0 250 5637 C 106/2 A, brass 0 1 0 15 5638 C 106/2 A, brass 0 3.5 0 50 5639 C 106/2 A, brass 0 7 0 100 5640 C 106/2 A, brass 0 10.5 0 150 5641 C 106/2 A, brass 0 17 0 250 5642 C 106/2 A, stainless steel 0 1 0 15 5643 C 106/2 A, stainless steel 0 3.5 0 50 5644 C 106/2 A, stainless steel 0 7 0 100 5645 C 106/2 A, stainless steel 0 10.5 0 150 5646 C 106/2 A, stainless steel 0 17 0 250 5647 C 106/2 B, brass 0 1 0 15 5648 C 106/2 B, brass 0 3.5 0 50 5649 C 106/2 B, brass 0 7 0 100 5650 C 106/2 B, brass 0 10.5 0 150 5651 C 106/2 B, brass 0 17 0 250 5652 C 106/2 B, stainless steel 0 1 0 15 5653 C 106/2 B, stainless steel 0 3.5 0 50 5654 C 106/2 B, stainless steel 0 7 0 100 5655 C 106/2 B, stainless steel 0 10.5 0 150 5656 C 106/2 B, stainless steel 0 17 0 250 5657 Technical data Max primary pressure 210 bar 3,000 psi Outlet pressure 0 1 bar 0 15 psi 0 3.5 bar 0 50 psi 0 7 bar 0 100 psi 0 10.5 bar 0 150 psi 0 17 bar 0 250 psi Outlet gauge range 2 2 bar 30 30 psi 2 7 bar 30 100 psi 2 14 bar 30 200 psi 0 28 bar 0 400 psi Connection Out = NPT ¼ female Operating temperature 40 +60 C 40 +140 F Weight 2 kg 4.4 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PTFE

?????????????? C 106/2B C 106/2 dual stage regulator 20 (1.38) 18 (1.24) 16 (1.1) 14 (.97) OUTLET PRESSURE - PSIG (BAR) 12 (.83) 10 (.69) 8 (.55) 6 (.41) 2000 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 4 (.27) 2 (.13) 1 (28.3) 2 (56.6) FLO W - SCFM (LPM ) 3 (85) 4 (113) 250 (17.2) 225 (15.5) 2000 PSIG INLET PRESSURE 200 (13.8) 500 PSIG INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 175 (12.0) 150 (10.3) 125 (8.6) 100 (6.9) 75 (5.2) 2000 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 2000 PSIG INLET PRESSURE 60 60 O UT L E T G AUG E OUTLET AUX. 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø 44.5 196 Ø 50 82.5 Ø 53 50 (3.4) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 60 25 (1.7) 5 (142) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 10 (283) FLO W - SCFM (LPM) 15 (425) 2000 PSIG INLET PRESSURE 20 (566) All measurements in millimeters. Drawings of other types available on request.

BASELINE C 106X/2. Six-port two stage extra high pressure cylinder regulator. The C 106X/2 high pressure cylinder regulators are are intended for primary pressure control of noncorrosive, high purity or liquefied gases for applications requiring constant pressure control and delivery regardless of supply pressure variations. For ultra high purity or corrosive gases use the stainless steel version. C 106X/2 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code C 106X/2, brass 0 1 0 15 5658 C 106X/2, brass 0 3.5 0 50 5659 C 106X/2, brass 0 7 0 100 5660 C 106X/2, brass 0 10.5 0 150 5661 C 106X/2, brass 0 17 0 250 5662 C 106X/2, stainless steel 0 1 0 15 5663 C 106X/2, stainless steel 0 3.5 0 50 5664 C 106X/2, stainless steel 0 7 0 100 5665 C 106X/2, stainless steel 0 10.5 0 150 5666 C 106X/2, stainless steel 0 17 0 250 5667 C 106X/2 A, brass 0 1 0 15 5668 C 106X/2 A, brass 0 3.5 0 50 5669 C 106X/2 A, brass 0 7 0 100 5670 C 106X/2 A, brass 0 10.5 0 150 5671 C 106X/2 A, brass 0 17 0 250 5672 C 106X/2 A, stainless steel 0 1 0 15 5673 C 106X/2 A, stainless steel 0 3.5 0 50 5674 C 106X/2 A, stainless steel 0 7 0 100 5675 C 106X/2 A, stainless steel 0 10.5 0 150 5676 C 106X/2 A, stainless steel 0 17 0 250 5677 C 106X/2 B, brass 0 1 0 15 5678 C 106X/2 B, brass 0 3.5 0 50 5679 C 106X/2 B, brass 0 7 0 100 5680 C 106X/2 B, brass 0 10.5 0 150 5681 C 106X/2 B, brass 0 17 0 250 5682 C 106X/2 B, stainless steel 0 1 0 15 5683 C 106X/2 B, stainless steel 0 3.5 0 50 5684 C 106X/2 B, stainless steel 0 7 0 100 5685 C 106X/2 B, stainless steel 0 10.5 0 150 5686 C 106X/2 B, stainless steel 0 17 0 250 5687 Technical data Max primary pressure 310 bar 4,500 psi Outlet pressure 0 1 bar 0 15 psi 0 3.5 bar 0 50 psi 0 7 bar 0 100 psi 0 10.5 bar 0 150 psi 0 17 bar 0 250 psi Outlet gauge range 2 2 bar 30 30 psi 2 7 bar 30 100 psi 2 14 bar 30 200 psi 0 28 bar 0 400 psi Connection Out = NPT ¼ female Operating temperature 40 +60 C 40 +140 F Weight 2 kg 4.4 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PCTFE

?????????????? C 106X/2B C 106/2 dual stage regulator 20 (1.38) 18 (1.24) 16 (1.1) 14 (.97) OUTLET PRESSURE - PSIG (BAR) 12 (.83) 10 (.69) 8 (.55) 6 (.41) 2000 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 4 (.27) 2 (.13) 1 (28.3) 2 (56.6) FLO W - SCFM (LPM ) 3 (85) 4 (113) 250 (17.2) 225 (15.5) 2000 PSIG INLET PRESSURE 200 (13.8) 500 PSIG INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 175 (12.0) 150 (10.3) 125 (8.6) 100 (6.9) 75 (5.2) 2000 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 2000 PSIG INLET PRESSURE 60 60 O UT L E T G AUG E OUTLET AUX. 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø 44.5 196 Ø 50 82.5 Ø 53 50 (3.4) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 60 25 (1.7) 5 (142) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 10 (283) FLO W - SCFM (LPM) 15 (425) 2000 PSIG INLET PRESSURE 20 (566) All measurements in millimeters. Drawings of other types available on request.

Components. The integrated equipment presented so far in this catalog consists of various components. This chapter is intended for constructing central gas systems or other equipment requiring information on individual components. Though it is possible to construct gas panels and points of use from this equipment, it is neither cost efficient nor advisable due to quality problems.

HiQ REDLINE R 200/1. Single stage regulator. The R 200/1 is a high pressure regulator with a high flow rate capacity. The regulator is available in brass or stainless steel for the control of both corrosive and non-corrosive gases. Product name bar psi HiQ code R 200/1, brass 0.2 3 3 40 3334 R 200/1, stainless steel, 0.2 3 3 40 3335 R 200/1, brass 0.5 6 8 85 5489 R 200/1, stainless steel, 0.5 6 8 85 5489 R 200/1, brass 2.5 14 35 200 3336 R 200/1, stainless steel 2.5 14 35 200 3337 R 200/1, brass 2.5 50 35 700 3338 R 200/1, stainless steel 2.5 50 35 700 3339 R 200/1, brass 10 200 150 3,000 3340 R 200/1, stainless steel 10 200 150 3,000 3341 Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure 0.2 3 bar 3 45 psi 0.5 6 bar 8 85 psi 2.5 14 bar 35 200 psi 2.5 50 bar 35 725 psi 10 200 bar 150 3,000 psi Outlet gauge range 1 5 bar 14.5 75 psi 1 10 bar 14.5 145 psi 0 25 bar 0 360 psi 0 80 bar 0 1,150 psi 0 315 bar 0 4,500 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.1 bar, 1.5 psi. Connections NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 1.3 kg 2.9 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

R 200/1 3 Outlet pressure, bar 4 3 2 1 3 bar* 5 bar* 7 bar* Max flow 0 1 2 3 4 5 6 7 * Inlet pressure Flow, Nm 3 /h N 2 R 200/1 6 8 7 6 5 4 3 2 1 Outlet pressure, bar 5 bar* 9 bar* Max flow 13 bar* 0 3 6 9 12 15 * Inlet pressure Flow, Nm 3 /h N 2 R 200/1 14 16 14 12 10 8 6 4 2 Outlet pressure, bar 11 bar* 21 bar* Max flow 29 bar* R 200/1 0 6 12 18 24 30 * Inlet pressure Flow, Nm 3 /h N 2 R 200/1 50 60 50 40 30 20 10 Outlet pressure, bar 41 bar* 61 bar* 101 bar* 81 bar* Max flow 0 10 20 30 40 50 60 70 80 90 * Inlet pressure Flow, Nm 3 /h N 2 ø50 R 200/1 200 Outlet pressure, bar 120 230 bar* 100 80 161 bar* 60 40 81 bar* 20 Max flow 120 140 40 19 0 10 20 30 40 50 60 70 * Inlet pressure Flow, Nm 3 /h N2 All measurements in millimeters.

HiQ REDLINE R 200/F. Single stage regulator. For the control of a broad range of specialty gases in applications where a fixed outlet pressure is required. Product name bar psi HiQ code R 200/F, brass 3 45 3348 R 200/F, stainless steel 3 45 3349 R 200/F, brass 10.5 150 3350 R 200/F, stainless steel 10.5 150 3351 Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure 3 bar 45 psi 10.5 bar 150 psi Non-adjustable Outlet gauge range 1 5 bar 14.5 75 psi 1 16 bar 14.5 230 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.1 bar, 1.5 psi. Connections NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 1.3 kg 2.9 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

R 200/F R 200/F 3 4 Outlet pressure, bar 3 8 bar* 2 1 Max flow 0 1 2 3 4 5 6 7 * Inlet pressure Flow, Nm 3 /h N 2 ø50 R 200/F 10.5 Outlet pressure, bar 14 12 10 25 bar* 120 140 40 19 8 6 4 2 Max flow 0 5 10 15 20 25 * Inlet pressure Flow, Nm 3 /h N 2 All measurements in millimeters.

HiQ REDLINE R 200/2. Two stage regulator. The R 200/2 is a high pressure regulator with the pressure reduced in two stages to fulfill the highest demands regarding stability of outlet pressure. The regulator is available in brass or stainless steel for the control of both corrosive and non-corrosive gases. Product name bar psi HiQ code R 200/2, brass 0.2 3 3 45 3342 R 200/2, stainless steel 0.2 3 3 45 3343 R 200/2, brass 0.5 6 8 85 3344 R 200/2, stainless steel 0.5 6 8 85 3345 R 200/2, brass 1 10.5 15 200 3346 R 200/2, stainless steel 1 10.5 15 200 3347 Technical data Primary pressure 7 230 bar 100 3,300 psi Outlet pressure 0.2 3 bar 3 45 psi 0.5 6 bar 8 85 psi 1 10.5 bar 15 150 psi Outlet gauge range 1 5 bar 14.5 75 psi 1 10 bar 14.5 145 psi 1 16 bar 14.5 230 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.01 bar, 0.1 psi. Connection Out = NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 3.0 kg 6.6 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

R 200/2 3 Outlet pressure, bar 4 3 8 bar* 2 1 8 bar* 8 bar* Max flow 0 1 2 3 4 5 6 7 Inlet pressure first stage, 17 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 8 bar. * Inlet pressure R 200/2 R 200/2 6 Outlet pressure, bar 8 6 4 2 17 bar* 17 bar* 17 bar* Max flow 0 2 4 6 8 10 12 14 Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure R 200/2 10.5 ø50 11 10 9 8 7 6 5 4 3 2 1 Outlet pressure, bar 17 bar* 17 bar* 17 bar* Max flow 17 bar* 40 98 199 211 0 5 10 15 20 25 30 Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure All measurements in millimeters.

HiQ REDLINE R 200hv/2. Two stage regulator. R 200hv/2 is a two-stage regulator made especially for the high demands on purity, safety and tightness that is necessary for specialty gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. Product name bar(a) psi(a) HiQ code R 200hv/2, brass 0.1 2 1.5 30 5491 R 200hv/2, stainless steel 0.1 2 1.5 30 5492 R 200hv/2, brass 0.2 3 3 45 5493 R 200hv/2, stainless steel 0.2 3 3 45 5495 Technical data Primary pressure 230 bar 3,300 psi Outlet pressure 0.1 2 bar(a) 1.5 30 psi(a) 0.2 3 bar(a) 3 45 psi(a) Outlet gauge range 1 1.5 bar 14.5 40 psi 1 5 bar 14.5 75 psi Connection Out = NPT ¼ female Operating temperature 40 +50 C 40 +122 F Weight 1.9 kg 4.2 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

R 200hv/2 R 200hv/2 2.4 2.0 Outlet pressure, bar 2 bar* 2 1.6 1.2 0.8 1 bar* 0.4 0 0 0.5 1.0 1.5 2.0 2.5 3.0 Flow, Nm 3 /h N 2 199 211 All measurements in millimeters.

HiQ REDLINE R 40. Single stage regulator. Pressure regulator intended for use as a second pressure regulating step in a central gas supply system. It is especially developed for pure gases and gas mixtures. The membrane is in Hastelloy so that diffusion into the system is minimized. Modular design and three different outlet pressure ranges offer great flexibility for point of use applications. Product name bar psi HiQ code R 40, brass 0.1 1 1.5 15 3352 R 40, stainless steel 0.1 1 1.5 15 3353 R 40, brass 0.5 6 8 85 3354 R 40, stainless steel 0.5 6 8 85 3355 R 40, brass 1 10.5 15 150 3356 R 40, stainless steel 1 10.5 15 150 3357 Technical data Max primary pressure 40 bar 550 psi Outlet pressure 0.1 1 bar 1.5 15 psi 0.5 6 bar 8 85 psi 1 10.5 bar 15 150 psi Outlet gauge range 0 2.5 bar 0 40 psi 0 6 bar 0 90 psi 0 16 bar 0 250 psi Connections G ⅜ female / G ¼ female Operating temperature 20 +70 C 4 +158 F Weight 0.8 kg 1.8 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating Kalrez

R 40 1 Outlet pressure, bar 1.0 0.9 0.8 0.7 4 bar* 0.6 0.5 0.4 4 bar* 0.3 0.2 0.1 4 bar* Max flow 0 0.5 1.0 1.5 2.0 2.5 3.0 * Inlet pressure Flow, Nm 3 /h N 2 R 40 6 R 40 6.0 Outlet pressure, bar 5.0 9 bar* 4.0 3.0 2.0 1.0 9 bar* 9 bar* Max flow 0 2.0 4.0 6.0 8.0 10 * Inlet pressure Flow, Nm 3 /h N 2 ~ 85 R 40 10.5 Outlet pressure, bar ø50 10 9 8 7 6 21 bar* 21 bar* ø42 ~ 103 5 4 3 21 bar* Max flow 2 ~ 110 0 5 10 15 20 25 * Inlet pressure Flow, Nm 3 /h N 2 All measurements in millimeters.

HiQ REDLINE R 12. Single stage regulator. Pressure regulator intended for use as a second pressure regulating step in a central gas supply system. It is especially developed for applications where it is essential with a very stable outlet pressure. Product name bar psi HiQ code R 12, brass 0.1 1 1.5 15 3358 R 12, stainless steel 0.1 1 1.5 15 3359 R 12, brass 0.2 3 3 45 3360 R 12, stainless steel 0.2 3 3 45 3361 Technical data Max primary pressure 12 bar 175 psi Outlet pressure 0.1 1 bar 1.5 15 psi 0.2 3 bar 3 45 psi Outlet gauge range 1 5 bar 0 75 psi Connections G ⅜ female / G ¼ female Operating temperature 20 +70 C 4 +158 F Weight 0.8 kg 1.8 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating Kalrez

R 12 R 12 2.5 Outlet pressure, bar 2.0 1.5 1.0 0.5 Max flow 0 0 1 2 3 4 5 6 ~ 85 Flow, Nm 3 /h N 2 ø42 ~ 103 ø50 ~ 110 All measurements in millimeters.

HiQ REDLINE R 12hv/1. Single stage regulator. Pressure regulator intended for use as a second pressure regulating step in a central gas supply system. R 12hv/1 is suited for all low vapour pressure gases of all purities and gas mixtures, especially liquified gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. Product name bar(a) psi(a) HiQ code R 12hv/1, brass 0.1 2 1.5 30 5499 R 12hv/1, stainless steel 0.1 2 1.5 30 5496 R 12hv/1, brass 0.2 3 3 45 5497 R 12hv/1, stainless steel 0.2 3 3 45 5498 Technical data Max primary pressure 12 bar 175 psi Outlet pressure 0.1 2 bar(a) 1.5 30 psi(a) 0.2 3 bar(a) 3 45 psi(a) Outlet gauge range 1 5 bar 0 75 psi Connections NPT ¼ female Operating temperature 20 +70 C 4 +158 F Weight 0.8 kg 1.8 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating Kalrez

R 12hv/1 1 R 12hv/1 1.2 Outlet pressure, bar 1.1 1.0 0.1 hysteresis open close 12 bar* 0.9 0.8 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 * Inlet pressure Flow, Nm 3 /h N 2 ~ 85 R 12hv/1 3 3.2 Outlet pressure, bar ø50 3.1 3.0 2.9 2.8 hysteresis close open 12 bar* ø42 ~ 103 2.7 2.6 0 0.1 0.2 0.3 0.4 0.5 0.6 * Inlet pressure Flow, Nm 3 /h N 2 ~ 110 All measurements in millimeters.

BASELINE R 104/1. Four-port single stage line regulator 5.0. The R 104/1 regulators are intended for secondary pressure control of noncorrosive, high purity or liquefied gases or as point of use pressure control in high purity gas distribution systems up to purities 5.0. For high purity or corrosive gases use the stainless steel version. R 104/1 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code R 104/1, brass 0 1 0 15 5688 R 104/1, brass 0 3.5 0 50 5689 R 104/1, brass 0 7 0 100 5690 R 104/1, brass 0 10.5 0 150 5691 R 104/1, brass 0 17 0 250 5692 R 104/1, brass 0 35 0 500 5693 R 104/1, stainless steel 0 1 0 15 5694 R 104/1, stainless steel 0 3.5 0 50 5695 R 104/1, stainless steel 0 7 0 100 5696 R 104/1, stainless steel 0 10.5 0 150 5697 R 104/1, stainless steel 0 17 0 250 5698 R 104/1, stainless steel 0 35 0 500 5699 R 104/1 A, brass 0 1 0 15 5700 R 104/1 A, brass 0 3.5 0 50 5701 R 104/1 A, brass 0 7 0 100 5702 R 104/1 A, brass 0 10.5 0 150 5703 R 104/1 A, brass 0 17 0 250 5704 R 104/1 A, brass 0 35 0 500 5705 R 104/1 A, stainless steel 0 1 0 15 5706 R 104/1 A, stainless steel 0 3.5 0 50 5707 R 104/1 A, stainless steel 0 7 0 100 5708 R 104/1 A, stainless steel 0 10.5 0 150 5709 R 104/1 A, stainless steel 0 17 0 250 5710 R 104/1 A, stainless steel 0 35 0 500 5711 R 104/1 B, brass 0 1 0 15 5712 R 104/1 B, brass 0 3.5 0 50 5713 R 104/1 B, brass 0 7 0 100 5714 R 104/1 B, brass 0 10.5 0 150 5715 R 104/1 B, brass 0 17 0 250 5716 R 104/1 B, brass 0 35 0 500 5717 R 104/1 B, stainless steel 0 1 0 15 5718 R 104/1 B, stainless steel 0 3.5 0 50 5719 R 104/1 B, stainless steel 0 7 0 100 5720 R 104/1 B, stainless steel 0 10.5 0 150 5721 R 104/1 B, stainless steel 0 17 0 250 5722 R 104/1 B, stainless steel 0 35 0 500 5723 Technical data Max primary pressure 210 bar 3,000 psi Outlet pressure 0 1 bar 0 15 psi 0 3.5 bar 0 50 psi 0 7 bar 0 100 psi 0 10.5 bar 0 150 psi 0 17 bar 0 250 psi 0 35 bar 0 500 psi Outlet gauge range 2 2 bar 30 30 psi 2 7 bar 30 100 psi 2 14 bar 30 200 psi 0 28 bar 0 400 psi 0 70 bar 0 1,000 psi Connection Out = NPT ¼ female Operating temperature 40 +60 C 40 +140 F Weight 0.8 kg 1.7 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PTFE

R 104/1 single stage regulator 100 (6.9) 90 (6.2) 80 (5.5) 2000 PSIG (138 BAR) INLET PRESSURE 70 (4.8) 60 (4.1) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) INLET PRESSURE R 104/1 OUTLET PRESSURE - PSIG (BAR) 50 (3.4) 40 (2.8) 30 (2.0) 20 (1.4) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) 2000 PSIG (138 BAR) INLET PRESSURE INLET PRESSURE 10 (0.7) 200 PSIG (13.8 BAR) INLET PRESSURE 5 (142) 500 PSIG (35 BAR) INLET PRESSURE 10 (283) 2000 PSIG (138 BAR) INLET PRESSURE 15 (425) 20 (566) 500 (34.5) 450 (31) 2000 PSIG (138 BAR) INLET PRESSURE 400 (27.6) 1000 PSIG (138 BAR) INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 350 (24.1) 300 (20.7) 250 (17.2) 200 (13.8) 150 (10.3) 500 PSIG (35 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 90 OUTLET O U T L E T G AU G E???????????????? 90 INLE T Ø 44 117 Ø 50 10.5 Ø 53 100 (6.9) 2000 PSIG (138 BAR) INLET PRESSURE AU X. INL E T 90 50 (3.4) 500 PSIG (35 BAR) INLET PRESSURE 5 (142) 10 (283) 15 (425) 20 (566) 25 (708) FLOW RATE SCFM (LPM) N 2 30 (850) 35 (991) 40 (1133) All measurements in millimeters. Drawings of other types available on request.

HiQ REDLINE V 40. Diaphragm valve. Valve intended for use as a shut-off-valve in a central gas supply system. It is preferably used together with pressure regulator R 12 or R 40. Equipped with click-function to enhance safety. BE is back entry version and SE is side entry version. Product name bar psi HiQ code V 40 BE, brass n.a. n.a. 3364 V 40 BE, stainless steel n.a. n.a. 3365 V 40 SE, brass n.a. n.a. 3366 V 40 SE, stainless steel n.a. n.a. 3367 Technical data Max primary pressure 40 bar 550 psi Connections Design BE In = NPT ¼ female Out = NPT ⅜ male Design SE In = NPT ⅜ female Out = NPT ⅜ male Operating temperature 30 +70 C 22 +158 F Weight 0.6 kg 1.3 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PCTFE Diaphragm Hastelloy C

V 40 BE V 40 SE Pressure loss, bar 2.0 1.8 1.6 1.4 1.2 1.0 0.8 0.6 0.4 0.2 0 0 10 bar* 20 bar* 50 bar* 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 ~ 74 ø42 50 * Inlet pressure Flow, Nm 3 /h N 2 Design V 40 BE 25 ø42 ~ 74 104 Design V 40 SE All measurements in millimeters.

HiQ REDLINE V 50. Flow valve. Diaphragm regulating valve for use in applications where a precise regulation of flow is desired. BE is back entry version and SE is side entry version. Product name bar psi HiQ code V 50 BE, brass n.a. n.a. 3368 V 50 BE, stainless steel n.a. n.a. 3369 V 50 SE, brass n.a. n.a. 3370 V 50 SE, stainless steel n.a. n.a. 3371 Technical data Max primary pressure 50 bar 700 psi Connections NPT ¼ female Operating temperature 30 +70 C 22 +158 F Weight 0.26 kg 0.57 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals Hardened stainless steel cone Diaphragm Hastelloy Elgiloy

V 50 BE Flow, Nm 3 /h N 2 1.0 0.8 0.6 0.8 bar* 0.4 bar* 0.2 bar* 0.4 0.1 bar* ~ 85 0.2 19 0 1 2 3 4 5 6 7 8 * Inlet pressure Number of handle turns ø24 All measurements in millimeters.

HiQ REDLINE V 200. Shut-off valve. Valve intended for use as a shut-off valve in a central gas supply system. Equipped with click-function to enhance safety. Product name bar psi HiQ code V 200, brass n.a. n.a. 3372 V 200, stainless steel n.a. n.a. 3373 Technical data Max primary pressure 200 bar 3,000 psi Connections NPT ¼ female Operating temperature 30 +70 C 22 +158 F Weight 0.26 kg 0.57 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PCTFE Diaphragm Hastelloy Elgiloy

V 200 Pressure loss, bar 2.0 1.8 1.6 1.4 10 bar* 20 bar* 50 bar* 1.2 1.0 0.8 0.6 0.4 0.2 100 bar* ~ 85 19 0 0 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 * Inlet pressure Flow, Nm 3 /h N 2 ø24 All measurements in millimeters.

V 1315. Needle valve. Needle valve V 1315 is designed for minute flow control of very small flows. Wetted parts are either in stainless steel or Teflon. The brass version is designed for a max. primary pressure of 200 bar and the stainless steel version of the valve up to max. 350 bar. Product name bar psi HiQ code V 1315, brass n.a. n.a. 3384 V 1315, stainless steel n.a. n.a. 3385 Technical data Max primary pressure 200/350 bar 3,000/5,000 psi Connections NPT ¼ compression fitting Operating temperature 54 +200 C 65 +400 F Material Housing Brass/Stainless steel Seals Teflon Stem Stainless steel

V 1315 13 Number of valve handle turns 18 16 14 12 10 8 6 4 2 83 0.002.004.006.008.010.012.014.016.018.020.022.024.026 C v 60 All measurements in millimeters.

Special equipment. From time to time the needs on the installation components may be very specific. Such demands can be unlimited scalability, handling of extremely high pressures or very small components. These products not fitting into our standardized equipment lines are found in this chapter. The compilation of products represents Linde s choice of innovative and high quality solutions of different needs. All products harmonize with our tradition of good engineering and high quality.

IntelliSwitch. Automatic gas management system. The fully-automatic IntelliSwitch gas switchover represents the next generation of gas management systems. The IntelliSwitch offers continuous pressure and flow control from liquid cylinder or high pressure cylinder sources that enables the end-user to select the ideal mode of supply by a simple push of a button. Proprietary software logic lowers yearly gas costs by eliminating liquid cylinder vent loss and excess residual return which makes the IntelliSwitch the perfect gas management system. IS 641 has a maximum inlet pressure of 210 bar whilst the IS 641X version has a maximum of 310 bar. The IntelliSwitch can be delivered with a number of different inlet configurations. Please contact your local Linde representative for further information. The version with internal pilot (see table below) is the standard assembly. It means that there is an internal pilot regulator that uses a very small amount of the process gas from the right bank to operate the switching mechanism. If ordered configured for external pilot, a supply of either air or nitrogen at between 4.5 to 6 bar (65 to 85 psi) must be supplied to the IntelliSwitch. There is a 1/4" bulkhead tube fitting located at the bottom of the cabinet when ordered as an external pilot. The IntelliSwitch can be delivered with a NEMA 4 enclosure (addition -N4 in the table below) designed for both indoor or outdoor use to provide a degree of protection of the internal apparatus against ingress of solid foreign objects (falling dirt and windblown dust); and to provide a degree of protection with respect to harmful effects on the equipment due to the ingress of water (rain, sleet, snow, splashing water, and hose directed water). Product name bar psi HiQ code IS 641/Internal pilot 7 100 5936 IS 641/Internal pilot 14 200 5937 IS 641/Internal pilot 28 400 5938 IS 641/External pilot 7 100 5933 IS 641/External pilot 14 200 5934 IS 641/External pilot 28 400 5935 IS 641X/Internal pilot 7 100 5942 IS 641X/Internal pilot 14 200 5943 IS 641X/Internal pilot 28 400 5944 IS 641X/External pilot 7 100 5939 IS 641X/External pilot 14 200 5940 IS 641X/External pilot 28 400 5941 IS 641-N4/Internal pilot 7 100 5964 IS 641-N4/Internal pilot 14 200 5965 IS 641-N4/Internal pilot 28 400 5966 IS 641-N4/External pilot 7 100 5961 IS 641-N4/External pilot 14 200 5962 IS 641-N4/External pilot 28 400 5963 IS 641X-N4/Internal pilot 7 100 5970 IS 641X-N4/Internal pilot 14 200 5971 IS 641X-N4/Internal pilot 28 400 5972 IS 641X-N4/External pilot 7 100 5967 IS 641X-N4/External pilot 14 200 5968 IS 641X-N4/External pilot 28 400 5969 Technical data IS 641/IS 641X Max primary pressure 210/310 bar 3,000/4,500 psi Outlet pressure 7 bar 100 psi 14 bar 200 psi 28 bar 400 psi Features Fully automatic priority assignment. Field adjustable software. On-site source selection; Liquid cylinder or high-pressure service. Low loss technology. RS 232 or 485 communication. Connections NPT ½ female Operating temperature 18 +60 C 0 +140 F Weight 30.4 kg 67 lb Material Bodies Brass barstock Housing Powder coated steel Seals Viton, Neoprene and PTFE Seating PCTFE or Viton

READY 230 PS I 16 B AR CRYOGENIC 350 PS I 24 B AR REPLACE GAS SOURCE RESET 500 PS I 34 B AR IN US E GAS 3000 PS I MAX. PSI BAR PWR REMOTE READY CRYOGENIC 230 PS I 350 PS I 16 B AR 24 B AR REPLACE GAS SOURCE 500 PS I 34 B AR BANK SELECT IN US E GAS 3000 PS I MAX. R EADY 230 PS I 16 B AR C RYOGENIC 350 PS I 24 BAR R EPLACE GAS S OURCE RESET 500 PS I 34 BAR IN US E G AS HIG H PRESSURE P SI BAR PWR R EMOTE R EADY 230 PS I 16 B AR C RYOGENIC R EPLACE 350 PS I 500 PS I 24 BAR 34 BAR GAS S OURCE S ELECT B ANK IN US E G AS HIG H PRESSURE IntelliSwitch IS 641 IntelliSwitch IS 641-N4 314 Outlet approx. 68 max 159 81 406 Outlet 289 LEFT BANK DELIVERY RIGHT BANK Front cover shown open, broken away LEFT BANK DELIVERY RIGHT BANK 365 DELIVERY PRESSURE ADJUSTMENT Inlet Inlet 79 508 DELIVERY PRESSURE ADJUSTMENT Inlet Inlet 81 All measurements in millimeters.

STABLEFLOW HCS. Hydrogen control system. The STABLEFLOW hydrogen control system continuously monitors hydrogen pressure, purity and dewpoint in the generator casing on a realtime basis, controlling impure hydrogen venting and calling for pure hydrogen injection as required. The automated control of the STABLEFLOW HCS replaces manual periodic hydrogen refill and its resulting variability from OEM specifications for hydrogen purity, pressure and dewpoint. Compliance with OEM specifications optimizes electric production efficiency and equipment life. By maintaining OEM specifications for hydrogen pressure, purity, and dewpoint, the STABLEFLOW HCS reduces windage loss and optimizes electric generating capacity. Also, it reduces air emissions and extends equipment life. Linde Gas has introduced two advanced technology systems: the HOGEN hydrogen generation system (HGS), (further information on page 176) and the STABLEFLOW hydrogen control system (HCS). Together, these systems ensure automatic and continuous measurement and feedback control of hydrogen purity and pressure for optimized generator performance. Standard features Fully automated Data logging Remote telemetry Local operator interface STABLEFLOW software control Integrated system controller Standard siting location is indors, floor mount with + 3 of level. Bottom-line benefits Hydrogen generation with the HOGEN HGS and the STABLEFLOW HCS can save substantial sums in most plants depending on their capacity. Together, these systems increase the power generating capacity while minimizing windage loss. Moreover, they ensure longer generator component life and drastically reduce handling costs. Options Linde Gas offers a wide range of options to tailor HOGEN HGS and STABLEFLOW HCS to your specific operational requirements. Please contact your local Linde Gas representative to discuss current options available to best fit your needs. Technical data Purpose STABLEFLOW hydrogen control system (HCS) precisely controls generator casing hydrogen venting in response to real-time measurements of purity and pressure. With HOGEN HGS, this system automatically purges impure hydrogen and replenishes purged gas with high purity hydrogen, optimizing generator performance. Applicability STABLEFLOW hydrogen control system is applicable to all hydrogen-cooled electric generators. Continuous measurement Dew point, hydrogen density, hydrogen pressure Inlet H 2 pressure 1.7 5.2 bar 25 75 psi Operating temperature 5 50 C 41 122 F Communications Ethernet RJ45 H 2 inlet/outlet connection ¼ compression fitting Control cabinet purge gas Instrument air, ¼ compression fitting Dimensions (W/D/H) 99/59/208 cm 39/23/82 Weight 170 kg 375 lbs Electrical specifications 200 240 VAC, 5 A single phase, 50/60 Hz Dew point sensor Dew point range -80 +20 C 0.5 ppmv min. Accuracy + 3 C (or better) + 0.015 ppmv Repeatability + 0.5 C (or better) + 0.002 ppmv Response time < 10 sec. for 63% step change in moisture content (wet-up or dry-down cycle) H 2 purity monitor Measurement techn. Vibrating element Response time < 10 sec. Linearity + 0.001 (+ 1% of set range) Repeatability + 0.001 Long term stability + 0.003/month Pressure transducer Operating pressure 0 7 bar 0 100 psi Operating temperature -30 +50 C -22 +122 F Accuracy + 0.25%, full scale

Schematic setup of HOGEN HGS and STABLEFLOW HCS at a power plant. STABLEFLOW HCS, Hydrogen Control System.

C 490/1. Six-port single stage ultra high pressure cylinder regulator. The C 490/1 ultra high pressure piston sensed regulators are intended for primary pressure control of noncorrosive gases at a maximum inlet pressure of 420 bar (6,000 psi). C 490/1 can be plain or equipped with a needle valve (type B). The C 490/1 cylinder regulators are commonly used for airplane strut charging and aerospace hydraulic systems. Other areas of usage is chemical & pharmaceutical manufacturing and research & development laboratories. Product name bar psi HiQ code C 490/1, brass 0 50 0 750 5604 C 490/1, brass 0 105 0 1,500 5605 C 490/1, brass 0 170 0 2,500 5606 C 490/1, brass 0 240 0 3,500 5607 C 490/1, brass 0 310 0 4,500 5608 C 490/1, brass 0 415 0 6,000 5609 C 490/1, stainless steel 0 50 0 750 5610 C 490/1, stainless steel 0 105 0 1,500 5611 C 490/1, stainless steel 0 170 0 2,500 5612 C 490/1, stainless steel 0 240 0 3,500 5613 C 490/1, stainless steel 0 310 0 4,500 5614 C 490/1, stainless steel 0 415 0 6,000 5615 C 490/1 B, brass 0 50 0 750 5616 C 490/1 B, brass 0 105 0 1,500 5617 C 490/1 B, brass 0 170 0 2,500 5618 C 490/1 B, brass 0 240 0 3,500 5619 C 490/1 B, brass 0 310 0 4,500 5620 C 490/1 B, brass 0 415 0 6,000 5621 C 490/1 B, stainless steel 0 50 0 750 5622 C 490/1 B, stainless steel 0 105 0 1,500 5623 C 490/1 B, stainless steel 0 170 0 2,500 5624 C 490/1 B, stainless steel 0 240 0 3,500 5625 C 490/1 B, stainless steel 0 310 0 4,500 5626 C 490/1 B, stainless steel 0 415 0 6,000 5627 Technical data Max primary pressure 420 bar 6,000 psi Outlet pressure 0 50 bar 0 750 psi 0 105 bar 0 1,500 psi 0 170 bar 0 2,500 psi 0 240 bar 0 3,500 psi 0 310 bar 0 4,500 psi 0 420 bar 0 6,000 psi Outlet gauge range 0 70 bar 0 1,000 psi 0 275 bar 0 4,000 psi 0 415 bar 0 6,000 psi 0 690 bar 0 10,000 psi Connection Out = NPT ¼ female Operating temperature 40 +60 C 40 +140 F Weight 2.5 kg 5.6 lb Material Housing Brass, Cr plated Stainless steel 316L Seals Viton Membrane Stainless steel 316L Seating Arlon

C 490/1 C 490/1 single stage regulator 183 18 Ø 63.5 Ø 53 All measurements in millimeters. Drawings of other types available on request.

R 480/1. Single stage high flow regulator for corrosive gases. The R 480/1 regulators are intended for primary pressure control of corrosive gases at high flow levels. The regulator has an internally springless and threadless design and positive shut-off seal, tied diaphragm design with positionable captured vent bonnet. Other advantages are: Excellent leak integrity (created by metal to metal diaphragm to body seal) and smooth unobstructed flow path that allows for complete purging. For other options than mentioned below please contact your local Linde representative. Product name bar psi HiQ code R 480/1, stainless steel 0 2 0 30 5945 R 480/1, stainless steel 0 4 0 60 5946 R 480/1, stainless steel 0 7 0 100 5947 R 480/1, stainless steel 0 10 0 150 5948 R 480/1, Hastelloy 0 2 0 30 5949 R 480/1, Hastelloy 0 4 0 60 5950 R 480/1, Hastelloy 0 7 0 100 5951 R 480/1, Hastelloy 0 10 0 150 5952 Technical data Max primary pressure 240 bar 3,500 psi Outlet pressure 0 2 bar 0 30 psi 0 4 bar 0 60 psi 0 7 bar 0 100 psi 0 10 bar 0 150 psi Inboard leak rate <10 9 atm cc/sec He Connection Welded tube stubbs Operating temperature 40 +180 C 40 +350 F Weight 1.5 kg 3.2 lb Material Housing Stainless steel 316L/Hastelloy Seals Stainless steel 316L/Hastelloy Diaphragm Stainless steel 316L/Hastelloy Seating Vespel

R 480/1 58 Outlet pressure PSIG (kg/cm 2 ) 80 (5.6) 70 (4.9) 60 (4.2) 50 (3.5) 40 (2.8) 30 (2.1) 20 (1.4) 10 (.7) 0 2 (57) 4 (113) 6 (168) 8 (226) 10 (283) 12 (340) 14 (396) 16 (453) 18 (509) 20 (566) ~140 152 19 OUTLET 60 INLET Inlet pressure = 100 PSIG Flow capacity C v = 0.5 Flow rate SCFM (LPM) N 2 69 All measurements in millimeters.

C 421/1. Single stage low flow cylinder regulator. The C 421/1 low flow cylinder regulator is especially suitable for situations where a very high control accuracy is needed at low flows. It can be used with gases and gas mixtures up to quality 6.0. For corrosive gases and gas mixtures with >1% corrosive components the P-model (equipped with purging device) is recommended. Product name bar psi HiQ code C 421/1 0.05 1.5 0.7 22 5953 C 421/1 P 0.05 1.5 0.7 22 5954 Technical data Max primary pressure 25 bar 3,300 psi Outlet pressure 0.05 1.5 bar 0.7 22 psi Outlet gauge range 1 3 bar 1.5 45 psi Leak rate 10 8 mbar l/s He Connection Out = ¼ -18 NPT female Operating temperature 30 +60 C 22 +140 F Weight 2.1 kg 4.6 lb Material Housing Stainless steel 316L Seals PCTFE Diaphragm Hastelloy C276 Seating PCTFE

C 421/1P Outlet pressure, bar 1.6 1.2 0.8 0.4 0 0 0.2 0.3 0.5 1 2 3 4 5 10 Inlet pressure 4 bar Flow, m 3 /h, air 125 122 ~ 115 ~ 100 185 All measurements in millimeters. Type P. Drawings of other types available on request.

C 450/1 mini. Single stage mini cylinder regulator. The C 450/1 mini cylinder regulators are intended for primary pressure control of noncorrosive gases for qualities up to 6.0. For corrosive gases or gas mixtures use the stainless steel version. The regulator has a compensated main valve for significantly improved outlet pressure accuracy similar to a dual-stage regulator. Product name bar psi HiQ code C 450/1, brass 0 1.5 0 22 5955 C 450/1, brass 0 4 0 60 5956 C 450/1, brass 0 10 0 145 5957 C 450/1, stainless steel 0 1.5 0 22 5958 C 450/1, stainless steel 0 4 0 60 5959 C 450/1, stainless steel 0 10 0 145 5960 Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure 0 1.5 bar 0 22 psi 0 4 bar 0 60 psi 1 10 bar 1.5 145 psi Outlet gauge range 1 2.5 bar 1.5 36 psi 1 6 bar 1.5 90 psi 0 15 bar 0 220 psi Leak rate 10 8 mbar l/s He Connection Out = ⅛ NPT female Operating temperature 30 +60 C 22 +140 F Weight 0.5 kg 1.1 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PCTFE Diaphragm Hastelloy C276 Seating PCTFE (option PVDF)

C 450/1 mini 0 0.2 0.4 0.6 0.8 1 2 3 4 5 Flow, m³/h, air Inlet pressure = 20 bar Inlet pressure = 9 bar ~ 110 42 ~ 55 Outlet pressure, bar 0 1 2 3 4 35 60 All measurements in millimeters.

Safety solutions. Some gases may be harmful, even if normal precautions are employed. To handle these gases it is necessary to use special equipment. In this chapter gas cabinets and specialty gas purge panels are presented. Also Monitoring systems (p. 218) and Containers can be viewed as safety equipment. Containers are a good solution when it is not possible to solve safety problems in the existing premises. (see pages 164 169). In addition to this, Linde can support you with all kinds of scrubbers, gas detection systems and personal alarms. For full portfolio, please contact your local Linde representative.

Safety solutions. Standard cabinets. Gas cabinets are used to store gas cylinders safely. A gas cabinet used for storing flammable or toxic gases should be equipped with forced ventilation. It is crucial that the cabinet is vented externally and not connected to the normal ventilation. Features Inspection window in armoured glass Lockable doors, openable 180 Two ventilation connections for optional flow direction Prepared for mounting of gas panels Adjustable racks Pre-bored holes for floor mounting Detachable hatch, prepared for tubing Painted sheet-iron or stainless steel Available for up to three cylinders Technical data Dimensions [mm] [inch] Width (1 or 2 cylinders) 720 28.4 Width (3 cylinders) 1100 43.3 Depth 500 19.7 Height 2150 84.7 Product name HiQ code 1 cylinder gas cabinet 3386 2 cylinder gas cabinet 3387 3 cylinder gas cabinet 3388

160 125 375 75 1375 2000 2150 Width 50 500 25 All measurements in millimeters.

Safety solutions. 2-valve purge gas panel. The Marathon range of manual and semi-automatic gas panels is the solution to your speciality gas source and distribution needs. From simple manual self purge panels for inert gases through to purge-able systems for hazardous gases the Marathon range offers robust, cost effective basic systems that can be enhanced for safety, purity and operation by the addition of functional modules. This gas panel is typically used to control non-reactive gases like nitrogen, etc. The gas panel works like a self-purging system, and removes the air trapped in the gas panel, after cylinder change, by isolating the regulator with the HPI valve, and flushing process gas via the HPV valve to the atmosphere. Typically used as a purge gas panel to ensure a safe and clean purge gas source for sophisticated gas panels handling toxic, flammable or hazardous gases. Features High pressure vent for purge High pressure isolation for purge Burst disk failsafe protection for overpressure Cylinder and Delivery pressure measurement Tied diaphragm regulator Springless diaphragm valves Universal mounting plate VCR and orbital welded connections to process path Change-over module-ready For ordering and further details, please contact your local Linde representative. Technical data High purity Ultra high purity Leak rate Inboard <1x10 9 sccs <1x10 9 sccs Outboard <2 ppm He <2 ppm He Particles per ft 3 <10 counts 0.1 0.3 µm <5 counts 0.3 0.5 µm 0.1 0.3 µm 0 count >0.3 µm >0.3 µm Moisture <20 ppb <20 ppb Oxygen <20 ppb <10 ppb Total hydrocarbons <10 ppb <10 ppb 316L SS electro-polished 15 µin Ra average 5 7 µin Ra average Options, functional ESO Emergency shut-off valve HPA High pressure access valve BD SWG Burst disc switch gauge EFS Excess flow switch PLI Process line isolation DEL & CYL Switch gauge upgrade Bellow valves Change-over module Options, purity CFG Pre-filter FF Final filter metal FF Final filter Teflon Del. & Cyl. pressure transducers Nanochem purification

Schematic. Options in blue. To vent Process gas out Venturi supply To vent PLI VGS VG BD SWG FF DEL CYL BD REG HPI HPV CFG ESO From gas source EFS HPA

Safety solutions. 3-valve process gas panel. The Marathon range of manual and semi-automatic gas panels is the solution to your speciality gas source and distribution needs. From simple manual self purge panels for inert gases through to purge-able systems for hazardous gases the Marathon range offers robust, cost effective basic systems that can be enhanced for safety, purity and operation by the addition of functional modules. Self-purging gas panel with a low pressure isolation valve added to allow isolation of the panel from the process line. This panel is used as a process gas panel for non hazardous gases where demands are high but not extreme. Features High pressure vent for purge High pressure isolation for purge Purge gas inlet Burst disk failsafe protection for overpressure Cylinder and Delivery pressure measurement Tied diaphragm regulator Springless diaphragm or bellow valves Universal mounting plate VCR and orbital welded connections to process path Change-over module-ready For ordering and further details, please contact your local Linde representative. Technical data High purity Ultra high purity Leak rate Inboard <1x10 9 sccs <1x10 9 sccs Outboard <2 ppm He <2 ppm He Particles per ft 3 <10 counts 0.1 0.3 µm <5 counts 0.3 0.5 µm 0.1 0.3 µm 0 count >0.3 µm >0.3 µm Moisture <20 ppb <20 ppb Oxygen <20 ppb <10 ppb Total hydrocarbons <10 ppb <10 ppb 316L SS electro-polished 15 µin Ra average 5 7 µin Ra average Options, functional ESO Emergency shut-off valve HPA High pressure access valve BD SWG Burst disc switch gauge EFS Excess flow switch PLI Process line isolation DEL & CYL Switch gauge upgrade Bellow valves Change-over module Options, purity CFG Pre-filter FF Final filter metal FF Final filter Teflon Del. & Cyl. pressure transducers Nanochem purification

Schematic. Options in blue. To vent Process gas out Venturi supply To vent PLI VGS VG BD SWG DEL BD FF REG CYL HPI HPV CFG Purge gas supply in PGI From gas source EFS ESO HPA

Safety solutions. 5-valve process gas panel. The Marathon range of manual and semi-automatic gas panels is the solution to your speciality gas source and distribution needs. From simple manual self purge panels for inert gases through to purge-able systems for hazardous gases the Marathon range offers robust, cost effective basic systems that can be enhanced for safety, purity and operation by the addition of functional modules. This panel includes low pressure vent line, allowing vacuum assisted regulator purge and process line purge which improves system start up procedure. Pneumatic emergency shut-off valve and vacuum generator are standard. Suitable for gases like SiH 4, AsH 3, HCl, PH 3. Features High pressure vent for purge Low pressure vent for purge High pressure isolation for purge Purge gas inlet Burst disk failsafe protection for overpressure Cylinder and delivery pressure measurement Tied diaphragm regulator Springless diaphragm or bellow valves Modular design VCR and orbital welded connections to process path Change-over module-ready For ordering and further details, please contact your local Linde representative. Technical data High purity Ultra high purity Leak rate Inboard <1x10 9 sccs <1x10 9 sccs Outboard <2 ppm He <2 ppm He Particles per ft 3 <10 counts 0.1 0.3 µm <5 counts 0.3 0.5 µm 0.1 0.3 µm 0 count >0.3 µm >0.3 µm Moisture <20 ppb <20 ppb Oxygen <20 ppb <10 ppb Total hydrocarbons <10 ppb <10 ppb 316L SS electro-polished 15 µin Ra average 5 7 µin Ra average Options, functional ESO Emergency shut-off valve HPA High pressure access valve BD SWG Burst disc switch gauge EFS Excess flow switch PLI Process line isolation DEL & CYL Switch gauge upgrade Bellow valves Change-over module Options, purity CFG Pre-filter FF Final filter metal FF Final filter Teflon Del. & Cyl. pressure transducers Nanochem purification

Schematic. Options in blue. Process gas out Purge gas supply in To vent Venturi supply To vent VGS VG PLI BD SWG FF EFS LPV DEL BD CYL HPV LPI REG HPI PGI CFG ESO From gas source HPA

Safety solutions. Operation monitor. Marathon operation monitors provide operational and safety enhancements for manual and semi-automatic gas panels. Speciality gas equipment operates largely unattended and unsupervised by personnel the operation monitor provides safe, cost effective supervision and failsafe shutdown if a hazardous condition is detected. The operation monitor provides at-a-glance status information and signals conditions that require operator attention (low cylinder pressure for example) Interfaces to remote monitoring and FMCS systems provide basic status and detailed operation parameters respectively. The operation monitor is available in two models. OM1 is suitable for single cylinder panels and interfaces to the full range of Marathon safety sensors. OM2 provides all of the safety and operational features of OM1 but is for double gas panels with auto-change-over. Marathon operation monitors can optionally be interfaced and configured to a full range of gas panel and peripheral sensors. In this way the level of safety and operation functions can be selected to suit the gas, environment and operational preferences. The monitors can also be delivered with a modbus FMCS link for remote monitoring. Please order a Marathon Operation Monitors data sheet from your local Linde representative for more details. Features PLC based Failsafe shutdown logic At-a-glance status indicators Audible alarms LCD operator interface Password access levels Intuitive menu-driven operation Cylinder cabinet or wall mounted Digital and analogue sensor interfaces Remote status interface Meets all relevant SEMI standards, all relevant European directives (CE) and all relevant National standards in countries of sale Manufactured under ISO9000:2001 and ISO14001 environments Technical data Dimensions, W/H/D OM1 300/220/123 OM2 600/220/123 Supply voltage 100 250 VAC Supply current 5 A Internal & external logic 24 VDC Pressure transducers 4 20 ma Cylinder scales 4 20 ma Pneumatic supply (CDA*) 6 bar 80 psi Options Control of ACV Auto-changeover Transducer pressure display Cylinder scale weight display Wall mount bracket Cylinder cabinet mounting Pendant operator interface Modbus interface to FMCS * compressed dry air

Marathon operation monitor OM1 Marathon operation monitor OM2

Safety solutions. Fully automatic. The Olympian range of fully automatic systems has, at its heart, a PLC based control system which monitors a wide range of safety features and hazard conditions and provide failsafe shutdown in the event of a serious problem. Manifold conditions are constantly monitored and the fully automatic purge sequences include critical condition testing for failsafe operation. Password security levels ensure that key features are adequately protected and alarm conditions and purge sequences are comprehensively parameterised to enable safety and efficiency to be tuned to customer specifics. The color touch screen has a full menu of active graphics providing easy to read information on all operation parameters including alarm history and trend graphs. Our gas cabinets represent the next generation of ultra-pure source gas panels, with a state of the art controller system, offering unique in-line architecture and a purge block valve designed to minimize dead space and overall internal volume. These features guarantee the optimum purge effect and a thorough decontamination of the source gas system. Features and benefits Designed specifically for the requirements of submicron device manufacturing. Intuitive design helps reduce operator errors and improves safety. Purge block valve design allows very short purge time due to small internal volume of 1.3 cm 3. Contaminated purge gas is discharged without entering flowing downstream of the purge block valve. In-line flow path virtually eliminates dead space. Modular, welded design improves reliability and reduces spare parts stocking requirements. Integrated automatic source switchover capability for critical redundancy and guaranteed uptime. Front removable components for improved servicing. Vacuum Venturi assisted purge for a quick and efficient manifold. Assembled in a clean room environment according to strict industry standards and specifications. Meet all relevant SEMI standards, European Safety Directives and are fully CE compliant. Technical data Inboard leak rate <10 9 scc/sec He Particle test 0.1 µm size 0.18 ptc/l 5 ptc/ft 3 >0.3 µm size 0 ptc/l 0 ptc/ft 3 Moisture test <10 ppb Oxygen test <10 ppb Material 316 L stainless steel (secondary remelt) Surface finish 0.18 Ra µm ave. 7 Ra µin ave. Dimensions [mm] [inch] Width (1 or 2 cylinders) 800 31.5 Width (3 cylinders) 1,200 47.2 Depth 550 21.7 Height 2,300 90.6 Certification: compliant For ordering and further details, please contact your local Linde representative.

Containers. Ready-to-use gas supply systems. A good and safe way to store gas cylinders are to use a gas container. Linde has a range of containers especially suited for this purpose which fulfill all relevant regulations and can be equipped with a range of extras, such as dividers, heating, forced ventilation and gas detectors. A gas container should always be considered when dealing with flammable or otherwise harmful gases and is a cost-effective way of complying with fire regulations. Fire-resistant bushing. Semi-automatic gas panel (selected from the equipment program). Gas detector (optional). Explosion proof globe light. Air vent. Fire-resistant bushing. Fire insulation. Integrated cabinet for gas outlet connections. Integrated cabinet for electrical connections. Heating coil in the floor (optional). Hollow sections for fork lift. External lighting with twilight relay. Roller conveyor (optional).

Containers. Ready-to-use gas supply systems. The delivery of gas cylinders and cylinder bundles/banks directly to the gas storage provides a safe and convenient solution to gas cylinder handling. At the same time safety is increased as the gas cylinders do not need to be transported and stored in the production premises. Using the Ready-To-Use gas supply system you get a continuous supply of gas to each individual workstation, which means less downtime and fewer unplanned interruptions as well as lower overall costs. Fewer and larger gas cylinders that serve more users means more effective utilization of the gas in the cylinders, which results in lower costs for the gas, cylinder rent and transportation. Delivery and purchasing routines can be centralized and made more efficient as the overall gas consumption and cylinder handling is much easier to monitor. A service agreement guarantees trouble free gas supply without unplanned production interruptions. Together with the customer we carry out a requirement analysis regarding the gas quality and operating conditions. After this, the appropriate equipment will be installed in the selected container. If, for example, a continuous gas supply without interruptions is required, then a semi automatic gas panel that automatically switches from an empty to a full cylinder is chosen. If gases with different physical properties are to be stored in the same container, the container is divided using partitions so that gases can be separated. The container is fully equipped by Linde, to include all electrical connections and piping. This means that the system can be put into operation immediately after delivery. Technical data Container model 10 foot 20 foot Measurements Length [m] (ext/int) 2.99/2.26 6.06/5.33 Width [m] (ext/int) 2.43/2.16 2.43/2.16 Height [m] (ext/int) 2.59/2.28 2.59/2.28 Electrical distribution box 16 A with two 10 A sockets. Equipped with earth-fault and circuit breakers. Lighting externally Twilight relay and separate on/off switch. Explosion proof Class EEx e 11. Ignition T3 T1 globe light internally Fire insulation on the rear wall and side walls Class A60 on the remainder Class B15 Fire bushings Type Lykab Paint system Complies with environmental Hempel class 3 Heating coil in Output ~ 9 W/m the floor* Capacity: at 10 C outdoor temperature the system maintains an indoor temperature of about +18 C. Fan for forced Type Ex-140-4C. Output 100 W. ventilation* Capacity free-blowing 532 m 3 /h. * Optional The containers are manufactured according to ISO 668, ISO 1496-1, ISO 1161 standards. All models have a three layer rust protection finish using environmentally suited water based epoxy and acrylic paint. Water drainage from the roof and drip mouldings above the doors are standard on all models. Linde s ready-to-use containers are available in three standard sizes designed according to a common basic philosophy. Continues...

20 foot container with roller conveyor. Loading of cylinder bundle.

Containers. Ready-to-use gas supply systems....continued Safety Double doors with cylinder locks. Air vents. Fire insulation on the rear wall and side walls class A60, remainder class B15. Fire resistant bushings for pipe and cable inlets on the side walls and any partitions. Separate integrated cabinets for electrical equipment and gas connections in optional side wall. Electrical distribution box 16 A with two 10 A sockets. Equipped with earth fault and circuit breakers. Internal Explosion Proof globe light. External lighting with twilight relay and separate on/off switch. Name HiQ code 10 foot container 3397 20 foot container 3398 Custom made container 3399 Handling The containers are equipped with hollow sections for lifting with a fork lift truck, which makes moving easy if requirements change. Folding ramps by the doors to simplify transportation of gas cylinders. The need to transport gas cylinders in production premises is eliminated. Handling of heavy gas cylinders is minimized. Economy Supplied ready for connection to a gas distribution system. Minimizes investment requirements. Buy or lease option. Complete overview of gas consumption and the size of the cylinder stock. Options Gas panels and other components are installed to meet your requirements. Floor heating thermostat controlled. Roller conveyors for handling of cylinder bundles/ banks (does not apply to CM container). Gas detectors for inflammable and corrosive gases. Air conditioning unit. Fan for forced ventilation (exhaust ventilation). Sprinkler. Partition with fire resistant bushings (a maximum of 2 walls in a 20 foot container). Extra passage door.

Custom made container. Explosion proof globe light. Gas detector (optional). Integrated cabinet for gas outlet connections. Integrated electrical connections cabinet.

HiQ specialty gas generators. In some cases the use of cylinder gas might be unsuitable. This might be for safety reasons or if it is difficult to transport the cylinders. Linde has a range of small and reliable gas generators to handle these situations. These gas generators produces gas on site for instant use. The main advantage with gas generators is that since the gas is produced on site, shutting of the power stops the gas production, which could be essential at power failure if the gas produced is hydrogen. Another advantage is that there are no need to store large amounts of compressed gas since there is instant access to newly produced gas. Gas generators are small and creates a flexibility in the set up of the laboratory, and simplifies rearrangements of the lab. Due to their small size, laboratory space can be saved. To ensure continuous supply, a cylinder or a second generator has to be connected to the system as backup.

HiQ specialty gas generators. The hydrogen no-maintenance series. Hydrogen is used in chromatography both as a carrier gas and as a fuel for instance for flame ionization detectors (FID) or flame photometric detectors (FPD). It is either delivered in classical gas cylinders or produced on site. On-site production ensures a continuous supply and allows for small total hydrogen volumes in the lab (<40 ml contained volume/unit). There are three models of the HiQ no-maintenance generator. Apart from the basic model there is one with remote control (NMH2 XXX-RC) and one with cascading flow (NMH2 XXX-CF) allowing from two to a maximum of 32 units to be connected in parallel. The HiQ hydrogen generator is a no-maintenance device with innovative membrane-technology. Its advanced dual-column drying system automatically removes residual moisture from the hydrogen produced. The column materials are also regenerated automatically, and in the final purification not even a desiccant cartridge is needed. For the electrolytic dissociation process, the HiQ hydrogen generator requires no caustic chemical solutions. Instead, it uses harmless deionized water to produce a reliable, continuous output of 6.0 hydrogen (>99.9999% pure). System operating status and diagnostic data appear on a user-friendly digital display. In case of an internal error, the unit is put on standby by an autoshut-off procedure. Selectable, multiple alarms alert to unwanted shifts in operating conditions such as low water level, poor water quality, low pressure (leak) and power supply conditions. Hydrogen flow and water quality are monitored by continuous LCD indication. The gas delivery pressure is indicated by LCD and can be adjusted manually via a membrane control pad. A cable interface permits remote computer monitoring of all functions. Model Description HiQ code NMH2 100 100 ml/min 5500 NMH2 160 160 ml/min 5501 NMH2 250 250 ml/min 5502 NMH2 300 300 ml/min 5995 NMH2 500 500 ml/min 5503 NMH2 600 600 ml/min 5996 NMH2 1L 1,000 ml/min 5989 NMH2 100-RC 100 ml/min 5504 NMH2 160-RC 160 ml/min 5505 NMH2 250-RC 250 ml/min 5506 NMH2 300-RC 300 ml/min 5997 NMH2 500-RC 500 ml/min 5507 NMH2 600-RC 600 ml/min 5998 NMH2 1L-RC 1,000 ml/min 5990 NMH2 250-CF 250 ml/min 5508 NMH2 300-CF 300 ml/min 5999 NMH2 500-CF 500 ml/min 5509 NMH2 600-CF 600 ml/min 6000 NMH2 1L-CF 1,000 ml/min 5991 Optional features NMH2-PCI-CC With PC interface and control cable 5510 NMH2-EXT-RC With handheld external remote control unit 5511 NMH2-H 2 O-RF With automatic water refilling option 5512 Technical data Max H 2 flow rate 0.10 1.0 l/min Delivery pressure 0.1 10.5 bar 1 155 psi H 2 purity >99.9999% (>6.0) Electrolysis cell Solid polymer membrane Safety Auto shut-off and low internal volume (<40ml) Auto-drying system No maintenance of drying cartridges (exclusive system) Water Deionized or distilled User interface Set points, system status, user parameter Display LCD display 128 x 64 pixels, set points, status, alarms Options I/O board containing: RS232C bi-directional/2 ports RS485 Cascading up to 32 units Potential free relay contacts Software for PC-control capability (requires I/O board) Dimensions (W/D/H) 23/35/43 cm 8⅝ /13⅜ /15¾ Weights NMH2 100 300 17 kg 37.5 lbs NMH2 500 1L 18 kg 40 lbs Certification: compliant Consumables/spare parts NMH2-DI-Bag Deionizer bag, replacement 5513 NMH2-RCC-10 Remote control cable (15-conductors) 10m 5514 NMH2-RCC-10 Remote control cable (15-conductors) 25m 5515 NMH2-RCC-10 Remote control cable (15-conductors) 50m 5516

HiQ hydrogen no-maintenance generator. HiQ hydrogen no-maintenance generator in principal. Drying tube Auto dryer NM system Water reservoir Pressure gauge Shut-off valve H 2 outlet Check valve Water drain port O 2 H 2 Pressure transducer Overpressure relief port Solid Polymer Electrolyte (SPE) cell

HiQ specialty gas generators. The hydrogen pure gas series. Pure gaseous hydrogen is needed in gas analyzers, plasma chambers, isolated environments, or as a fuel gas for flame tools. It is either delivered in classical gas cylinders or produced on site. On-site production ensures a continuous supply, keeping the total hydrogen volume in the lab as low as possible. There are three models of the HiQ pure gas generator. Apart from the basic model there is one with remote control (PGH2 XXX-RC) and one with cascading flow (PGH2 XXX-CF) allowing from two to a maximum of 32 units to be connected in parallel. The HiQ hydrogen generator relies on the newest electrolytic membrane technology, which is significantly cleaner than conventional hydrogen generation. This new technology reduces maintenance and cleaning to a minimum. It permits a chemical-free, trouble-free and long-term production of hydrogen simply from the electrolysis of deionized water. No free acids or alkalines are used, thus avoiding caustic impurities that might affect hydrogen quality and degrade the system. Features: LCD-based display and membrane control pad for simple operation Multiple alarms (low water level, poor water quality, low pressure, insufficient power supply) Requires deionized water instead of caustic electrolytic solutions Replaceable desiccant cartridge provides final purification step to remove moisture Cascading flow control allows multiple units to be connected for larger capacity flows (option) Cable interface permits remote computer monitoring of all functions (option) Model Description HiQ code PGH2 100 100 ml/min 5517 PGH2 160 160 ml/min 5518 PGH2 250 250 ml/min 5519 PGH2 300 300 ml/min 6001 PGH2 500 500 ml/min 5520 PGH2 600 600 ml/min 6002 PGH2 100-RC 100 ml/min 5521 PGH2 160-RC 160 ml/min 5522 PGH2 250-RC 250 ml/min 5523 PGH2 300-RC 300 ml/min 6003 PGH2 500-RC 500 ml/min 5524 PGH2 600-RC 600 ml/min 6004 PGH2 250-CF 250 ml/min 5525 PGH2 300-CF 300 ml/min 6005 PGH2 500-CF 500 ml/min 5526 PGH2 600-CF 600 ml/min 6006 Optional features PGH2-PCI-CC With PC interface and control cable 5527 PGH2-EXT-RC With handheld external remote control unit 5528 PGH2-H 2 O-RF With automatic water refilling option 5529 Technical data Max H 2 flow rate 0.10 0.60 l/min Delivery pressure 0.1 7 bar 1 100 psi H 2 purity 99.999% (5.0) Electrolysis cell Solid polymer membrane Safety Auto shut-off Water Deionized User interface Set points, system status, user parameter Display LCD display with set points, status, alarms Options I/O board containing: RS232C bi-directional/2 ports RS485 Cascading up to 32 units Potential free relay contacts Software for PC-control capability (requires I/O board) Dimensions (W/D/H) 22/33/39.5 cm 8⅔ /13 /15⁵ ₉ Weights PGH2 100 300 16.5 kg 36 lbs PGH2 500/600 18 kg 40 lbs Certification: compliant Consumables/spare parts PGH2-DI-Bag Deionizer bag, replacement 5530 PGH2-DES-Cart Desicant cartridge with fittings, replacement 5531 PGH2-RCC-10 Remote control cable (15-conductors) 10m 5532 PGH2-RCC-10 Remote control cable (15-conductors) 25m 5533 PGH2-RCC-10 Remote control cable (15-conductors) 50m 5534

HiQ hydrogen pure gas generator. HiQ hydrogen pure gas generator in principal. Drying tube Drying cartridge Water reservoir Pressure gauge Shut-off valve H 2 outlet Check valve Water drain port O 2 H 2 Pressure transducer Overpressure relief port Solid Polymer Electrolyte (SPE) cell

HiQ specialty gas generators. HOGEN HGS hydrogen generation system. In today s challenging business environment, power plant operators must strive for the most efficient operations across multiple aspects of performance. In particular they have to take into account: the fuel expense and generation capacity, safety and security, hydrogen availability, emissions reduction, and personnel productivity. Many power plants today are not running optimized. They operate out of OEM specifications for hydrogen purity, pressure and dewpoint, costing hundreds of thousands of dollars every year in excess fuel costs, lost generation revenue, emissions credits, and decreased winding life. Linde Gas has introduced two advanced technology systems: the HOGEN hydrogen generation system (HGS) and the STABLEFLOW hydrogen control system (HCS), further information on page 140. Together, these systems ensure automatic and continuous measurement and feedback control of hydrogen purity and pressure for optimized generator performance. The HOGEN HGS is a proton exchange membrane (PEM) water electrolysis system that uses electricity to separate water into hydrogen and oxygen. The hydrogen is produced at 13.8bar/200psi pressure without a compressor and at a purity of 99.9995% continuously and without operator intervention. The compact HOGEN HGS can be placed on the power plant generator deck or any other indoor non-classified plant area. Due to its unique design, the HOGEN HGS contains virtually no hydrogen, even when generating hydrogen at up to 6 Nm 3 /228 SCF per hour enough hydrogen to cool power plants as large as 1,500 MW. The HOGEN HGS provides reliable, safe, low-cost hydrogen for generator blanketing and increases safety and security by eliminating hydrogen storage, cylinder handling and routine hydrogen delivery. Standard features Fully automated, push-button start/stop Automatic fault detection and system depressurization On-board H 2 detection Emergency stop Standard siting requirements Indoor, level ± 1, 0 to 90% relative humidity non-condensing, non-hazardous/non-classified environment. Proper ventilation must be provided from a non-hazardous area. Options Linde Gas offers a wide range of options to tailor your HOGEN HGS to your specific operational requirements. Please contact your local Linde Gas representative to discuss current options available to best fit your needs. Technical data Net H 2 production rate Nm 3 /h SCF/h SLPM kg/24h 0 C, 1 bar 70 F, 1 atm 70 F, 1 atm HGS S20 0.53 20 9.4 1.14 HGS S40 1.05 40 18.8 2.27 HGS H2m 2.0 76 35.8 4.31 HGS H4m 4.0 152 71.7 8.63 HGS H6m 6.0 228 107.6 12.94 Delivery pressure HGS S 13.8 bar 200 psi HGS H 15.0 bar 218 psi H 2 purity 99.9995% (5.5) Water requirement (deionized) Pressure 1.5 4 bar 21.8 58 psi Consumption rate HGS S20 0.47 l/h 0.13 gal/h HGS S40 0.94 l/h 0.25 gal/h HGS H2m 1.83 l/h 0.50 gal/h HGS H4m 3.66 l/h 0.96 gal/h HGS H6m 5.50 l/h 1.42 gal/h Dimensions (W/D/H) HGS S 97/79/106 cm 38 /31 /42 HGS H 180/81/198 cm 71 /32 /78 Weight HGS S20 215 kg 475 lbs HGS S40 215 kg 475 lbs HGS H2m 700 kg 1500 lbs HGS H4m 747 kg 1600 lbs HGS H6m 794 kg 1700 lbs Electrical specifications HGS S 205 240 VAC, single phase, 50 or 60 Hz HGS H 380 480 VAC, 3 phase, 50 or 60 Hz Cooling HGS S Air-cooled HGS H Liquid-cooled Certification: compliant References HOGEN hydrogen generation systems are in place worldwide at power plants from 35 MW to 3,600 MW capacity. Please contact us for a current reference list.

HOGEN HGS hydrogen generators (HOGEN HGS H to the left and HGS S to the right). Schematic setup of HOGEN HGS and STABLEFLOW HCS at a power plant.

HiQ specialty gas generators. Nitrogen SIROCCO DS-PSA series. The SIROCCO high purity nitrogen gas generators works with DS-PSA technique. Including integral oil-free air compressors as standard, the generators deliver a continuous stream of 99.999%+ pure nitrogen gas with a minimal residual oxygen content without the need for secondary purification. Version 3A includes a separate and independent compressed instrument air system. The SIROCCO series of nitrogen gas generators is ideal for operation as nitrogen gas supply for all kind of laboratory and chromatography applications. SIROCCO DS-PSA nitrogen gas generators use a patented DUAL STEP pressure swing adsorption (DS-PSA) system. Pressure swing adsorption is well known and the DUAL STEP system is a new innovation which is a much more economical and much more efficient technique compared with the traditional standard PSA technique. The DS-PSA system remove oxygen, carbon dioxide and water from compressed air. The resulting stream of high purity nitrogen gas (99.999%) is ideal for laboratory applications including GC carrier gas, make-up gas, and many other applications like ICP etc. Version DS-PSA-N2-3A also produces a 3 l/min flow at a pressure of 5 bar (73 psi) of clean air for other use. The compressed air system includes a filtration and drying system and is completely separated from the N 2 part of the generator. All SIROCCO DS-PSA gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Technical data Max. N 2 flow rate (at 20 C, 1 bar) DS-PSA-3 3 l/min DS-PSA-5 5 l/min Delivery pressure, + -0.5% 5 bar 73 psi N 2 purity 99.999% Oxygen content <10 ppm Index of protection IP2x (acc. IEC 60529, rev 2.1) Temperature range 10 40 C 50 104 F Noise level <60 db(a) Display Microprocessor controlled graphic display, 128 x 64 pixels Power 230V/50Hz 110V/60Hz Power consumption 820W Dimensions (W/D/H) 48/83.5/64 cm 19/33/25.2 Weight 110 kg 242.5 lbs Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required Up to 99.999%+ pure nitrogen gas produced as standard. No need for costly downstream secondary filtration Integral oil-free air compressor guarantees continuous gas supply, independent of inhouse compressed air supply The gas generators can easily be installed in the laboratory Certification: compliant Model Description HiQ code DS-PSA-N2-3 SIROCCO DS-PSA, 3 l/min, 230V 5979 DS-PSA-N2-3A SIROCCO DS-PSA, 3 l/min, air, 230V 5980 DS-PSA-N2-5 SIROCCO DS-PSA, 5 l/min, 230V 5981 DS-PSA-N2-3/110 SIROCCO DS-PSA, 3 l/min, 110V 5982 DS-PSA-N2-3A/110 SIROCCO DS-PSA, 3 l/min, air, 110V 5983 DS-PSA-N2-5/110 SIROCCO DS-PSA, 5 l/min, 110V 5984 Maintenance DS-PSA-AK Maintenance kit 5985 DS-PSA-4000K 4000 hours maintenance kit 5986

HiQ SIROCCO DS-PSA nitrogen generator. HiQ SIROCCO DS-PSA nitrogen generator in principal. Instrument air outlet Check valve N 2 98% outlet Check valve N 2 99.999% outlet Separate air feed, version 3A only CMS 1 tube CMS 2 tube Cooling coils Air inlet compressors Compressed air filter Vacuum pump Purge air Recycle nitrogen Residual O 2 in air

HiQ specialty gas generators. BORA nitrogen mini series. The BORA mini nitrogen gas generators includes an integral oil-free air compressor as standard. The generators deliver a continuous stream of pure nitrogen gas with a low residual oxygen content without the need for secondary purification. The BORA series of mini nitrogen gas generators is ideal for operation as nitrogen gas supply for all kind of laboratory and chromatography applications. The BORA mini nitrogen gas generators use the pressure swing adsorption (PSA) system, as used in thousands of systems worldwide to remove oxygen, carbon dioxide and water from compressed air. The resulting stream of high purity nitrogen gas is ideal for applications including GC carrier, make-up gas, generally for all low flow applications. The BORA series of nitrogen gas generators is incredibly miniaturized and very silent, ideal to be placed in a little space like under or on a bench. The BORA series is the smallest sized high purity nitrogen generator worldwide. All BORA gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required 99.999%+ (99.995%+ for model B-PSA-1300) pure nitrogen gas produced as standard. No need for costly downstream secondary filtration Integral oil-free air compressor guarantees continuous gas supply, independent of inhouse compressed air supply The gas generators can easily be installed in the laboratory Technical data Max. N 2 flow rate (at 20 C, 1 bar) B-PSA-500 500 ml/min B-PSA-750 750 ml/min B-PSA-1300 1300 ml/min Delivery pressure 4 bar 58 psi N 2 purity B-PSA-500/750 99.999% B-PSA-1300 99.995% Oxygen content B-PSA-500/750 <10 ppm B-PSA-1300 <50 ppm Temperature range 10 40 C 50 104 F Noise level <50 db(a) Power 230V/50Hz 110V/60Hz Dimensions (W/D/H) 35/40/30 cm 13.8/15.7/11.8 Weight 18 kg 40 lbs Certification: compliant Model Description HiQ code B-PSA-500 BORA PSA mini, 500 ml/min, 230V 5928 B-PSA-750 BORA PSA mini, 750 ml/min, 230V 5973 B-PSA-1300 BORA PSA mini, 1300 ml/min, 230V 5929 B-PSA-500/110 BORA PSA mini, 500 ml/min, 110V 5974 B-PSA-750/110 BORA PSA mini, 750 ml/min, 110V 5975 B-PSA-1300/110 BORA PSA mini, 1300 ml/min, 110V 5976 Maintenance B-PSA-AK-500 Maintenance kit/500 ml/min 5930 B-PSA-AK-750/1300 Maintenance kit/750/1300 ml/min 5977 B-PSA-4K-500 4000 h filters kit/500 ml/min 5931 B-PSA-4K-750/1300 4000 h filters kit/750/1300 ml/min 5978 B-PSA-24K-500 24000 h maintenance kit/500 ml/min 5932 B-PSA-24K-750/1300 24000 h maintenance kit/750/1300 ml/min 5994 B-PSA-24TK-500 24000 h tubing kit/500 ml/min 5993 B-PSA-24TK-750/1300 24000 h tubing kit/750/1300 ml/min 5992

HiQ BORA nitrogen mini generator. HiQ BORA nitrogen mini generator in principal. Check valves Purge line CMS tubes Nitrogen reservoir Air inlet compressor PLC Cooling coil Compressed air filter Inlet solenoid valves Exhaust solenoid valves N 2 pressure pump and flow control N 2 outlet

HiQ specialty gas generators. ELSD nitrogen generator without compressor. The ELSD mini nitrogen gas generator deliver a continuous stream of pure nitrogen gas with a low residual oxygen content without the need for secondary purification. The ELSD mini nitrogen gas generator is ideal as source for inert gas and purge gas including ELSD systems. The ELSD nitrogen gas generators use the pressure swing adsorption (PSA) system, as used in thousands of systems worldwide to remove oxygen, carbon dioxide and water from compressed air. The ELSD nitrogen gas generators is incredibly miniaturized and very silent, ideal to be placed in a little space like under or on a bench. The ELSD gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required > 98% pure nitrogen gas produced as standard. Requires only compressed air from an external source No high pressure cylinder requirement and very little moving part for long term stable run without frequent maintenance demand. Profit from in-house compressed air supply The gas generators can easily be installed in the laboratory Technical data Max. N 2 flow rate at 20 C, 1 bar 4 l/min (up to) Delivery pressure 5 bar 73 psi N 2 purity >98% Compressed air feed specifications Pressure 7 bar 100 psi Purity ISO 8573.1, Class 1.2.1 Temperature range 10 40 C 50 104 F Noise level <48 db(a) Power 230V/50Hz 110V/60Hz Dimensions (W/D/H) 35/40/30 cm 13.8/15.7/11.8 Weight 16 kg 35.5 lbs Certification: compliant Model Description HiQ code ELSD-4000/230 ELSD PSA without compressor, 4 l/min, 230V 6014 ELSD-4000/110 ELSD PSA without compressor, 4 l/min, 110V 6015 Maintenance ELSD-8000K 8000 hours maintenance kit 6016

HiQ ELSD nitrogen generator. HiQ ELSD nitrogen generator in principal. Check valves Purge line CMS tubes Nitrogen reservoir Air inlet Compressed air filter Inlet solenoid valves N 2 outlet Exhaust solenoid valves N 2 pressure pump and flow control

HiQ specialty gas generators. Nitrogen LC/MS Plus series. The nitrogen LC/MS Plus gas generator works with PSA technique. Including integral oil-free air compressors as standard, the generator deliver a continuous stream of 99%+ pure nitrogen gas with a residual oxygen content of less than 1% at a flow rate of up to 35 liters per minute. The nitrogen LC/MS Plus gas generator is ideal for laboratory applications like all LC/MS techniques and other inert gas demanded applications. The LC/MS Plus gas generators use a pressure swing adsorption (PSA) system that removes oxygen, carbon dioxide and water from compressed air. The standard PSA technology is combined with a dual step pressure management. This allows to get high flow, high purity and high pressure all together in a very economical way without stressing the components. The nitrogen LC/MS Plus gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required Up to 99%+ pure nitrogen gas produced as standard. No need for costly downstream secondary filtration Integral oil-free air compressor guarantees continuous gas supply, independent of inhouse compressed air supply The gas generator can easily be installed in the laboratory Technical data Max. N 2 flow rate (at 20 C, 1 bar and 99% purity) 35 l/min Delivery pressure 8 bar 120 psi N 2 purity >99% Oxygen content <1% Index of protection IP2x (acc. IEC 60529, rev 2.1) Temperature range 10 40 C 50 104 F Noise level <58 db(a) Display Microprocessor controlled graphic display, 128 x 64 pixels Power 230V/50Hz 110V/60Hz Fuse 10A/230V 14A/110V Dimensions (W/D/H) 48/83.5/64 cm 19/33/25.2 Weight 110 kg 242.5 lbs Certification: compliant Model Description HiQ code LCMS-Plus-230 LC/MS N2, 35 l/min, 230V 6007 LCMS-Plus-110 LC/MS N2, 35 l/min, 110V 6008 Maintenance LCMS-Plus-4000K 4000 hours maintenance kit 5986

HiQ LC/MS Plus nitrogen generator. HiQ LC/MS Plus nitrogen generator in principal. Check valves Purge line CMS tubes Nitrogen reservoir Air inlet compressor PLC Cooling coil Compressed air filter Inlet solenoid valves Exhaust solenoid valves N 2 pressure pump and flow control N 2 outlet

HiQ specialty gas generators. The nitrogen LC/MS 4 series. Nitrogen is commonly used in laboratories for different applications. Some demand higher purities, others are less purity-dependent. Such applications are typically nebulizing gas for liquid chromatography coupled with mass spectrometry (LC/MS). These are typically used for polymer identification/determination, protein and peptide analysis/identification and in pharmaceutical research and development. Other areas of application are specific solvent evaporations and low-purity purge gas requirements. The HiQ LC/MS 4 laboratory nitrogen generator is specifically designed to deliver larger capacity flow rates required for LC/MS 4 instrument operation. The generator is a stand-alone unit that makes pure nitrogen out of ambient air. The system is built around an integral membrane system and oil-free direct drive compressors that deliver a continuous stream of pure, dry nitrogen. The system can deliver flow rates from 1 to 30 Nl/m, with purities ranging from 96% to 99.9%. For optimal floor mobility, the units are equipped with self-locking caster wheels. The built-in air compressor (stage 1) compresses the air up to 3.0 bar. The first membrane tube removes the moisture and most of the oxygen together with other gases like CO 2 (etc.). The permeate from the first membrane tube is released back into the atmosphere. The pre-cleaned air then passes on to the 2 nd and 3 rd membrane tube where nitrogen with a purity higher than 98% is separated. The permeate from membrane tubes 2 and 3, which is moisture-free and reduced in oxygen content, is collected and recycled back to the inlet of the low-pressure pump. The pure nitrogen collected after tube 3 is then boosted by a second compressor (stage 2) from 3.0 bar to 8.5 bar (45 psi to 120psi), which is the outlet pressure specification. Advantages: Technical data Max. N 2 flow rate 15 28 l/min (adjustable) Delivery pressure 8.5 bar 120 psi N 2 purity 98 99% (adjustable) Air quality Normal, clean ambient air, relative humidity < 90% Temperature range 10 35 C 50 95 F Connections G ¼ / ¼ NPT Noise level < 58 db(a) Flow capacity 10 30 Nl/m Features Flow indication Pressure gauge Built-in compressors Built-in oxygen sensor Power consumption 900W Dimensions (W/D/H) 31/90/70 cm 12.2/35.4/27.6 Weight 92.5 kg 204 lbs Certification: compliant Flow control valve allows variable flow rates and nitrogen purity levels Pressure indication provided for nitrogen supply outlet Integral oxygen sensor monitors purity Standard integral oil-free direct drive air compressor for turnkey operation Self-locking caster wheels provide mobility for installation Model Description HiQ code LCMS-N2-4 LC/MS nitrogen generator with compressors 5535 Maintenance/spare parts LCMS-4-AK Maintenance kit for LC/MS 4 5536 LCMS-4-O2S Oxygen sensor for LC/MS 4 5537

HiQ nitrogen LC/MS 4 generator. HiQ nitrogen LC/MS 4 generator in principal. Low pressure air pump Air compressor at 4 5 bar (high volume) Air inlet Recycling permeate End pressure 8 bar (small volume) LC/MS 4 generator flow/purity graph Membrane tubes Final pressure N 2 pump

HiQ specialty gas generators. The nitrogen LC/MS 0 without compressor series. Nitrogen is commonly used in laboratories for different applications. Some demand higher purities, others are less purity-dependent. Such applications are typically nebulizing gas for liquid chromatography coupled with mass spectrometry (LC/MS). Other areas of application are specific solvent evaporations and low-purity purge gas requirements. The HiQ LC/MS 0 laboratory nitrogen generator is designed to deliver larger capacity flow rates required for LC/MS instrument operation. The generator is intended for use where compressed air is available from an external source. No electrical installation is required. The system is built around an integral membrane system and can deliver flow rates from 0 to 25 Nl/min with purities ranging from 98% to 99% (the higher flow the lower purity and vice versa). The feed pressure must be within the range of 7 10 bar (100 155 psi). For achieving best results the ambient air pressure should be ~1013 mbar and the air feed temperature between 20 25 C. The generator is delivered in a wall mounting cabinet. Model Description HiQ code LCMS-N2-0-25 LC/MS N 2 generator excl. compressor, 25 l/min 5924 LCMS-N2-0-40 LC/MS N 2 generator excl. compressor, 40 l/min 6013 LCMS-N2-0-60 LC/MS N 2 generator excl. compressor, 60 l/min 5926 Technical data Max. N 2 flow rate 25; 40; 60 l/min Max. delivery pressure Inlet pressure minus 1 bar ( 15 psi) N 2 purity 98 99% (adjustable) Compressed air feed specifications Feed pressure 6 13 bar 90 190 psi Temperature range 10 40 C 50 104 F Residual oil content 0.01 mg/m 3 Dew point < 5 C < 41 F Connections G ¼ Noise level < 45 db(a) Dimensions (W/D/H) 28/19/81 cm 11/7.5/31.9 Weights LCMS-0-N2-25 22 kg 49 lbs LCMS-N2-0-40/60 35 kg 77 lbs Certification: compliant Maintenance LCMS-0-25-AK Filter kit for LCMS-N2-0-25 5925 LCMS-0-60-AK Filter kit for LCMS-N2-0-60 5927

HiQ nitrogen LC/MS 0 generator without compressor. HiQ nitrogen LC/MS 0 generator without compressor in principal. Membrane tubes Air inlet 10 bar (150 psi g) Nitrogen outlet 7 bar g (100 psi g)

HiQ specialty gas generators. The Ultra Zero Air series. Pure air is commonly used in the chromatographic world mainly as fuel for flames in detectors such as Flame Ionization Detectors (FIDs) and Flame Photometric Detectors (FPDs). The advantage with the Ultra Zero Air series is that it helps creating a truly flat baseline. The pure air can be delivered in classic gas cylinders or be produced on site from oil-free compressed air. Designed with safety and convenience in mind, this system will generate purified and hydrocarbon-free air from an existing in-house oil-free compressed air supply. The Linde ZAU Ultra Zero Air generators reduce hydro carbons, nitrogen oxides and sulphur dioxide pollutants to less than 0.1 ppm, carbon dioxide to less than 5 ppm and remove all kinds of particles. In the lab, they provide several advantages. Eliminating the need to use and store highpurity air in cylinders saves valuable laboratory floor space. The generator can also be wall-mounted, providing yet another way of saving space. Using an on-site gas generator also eliminates the need to recalibrate instruments after replacing empty cylinders with full ones. The operation of the generator requires low levels of electrical power. This complete turnkey system is engineered with the highest quality components, is easy to install, and requires only minimal annual maintenance. The ZAU Ultra Zero Air generator models utilize a 5-stage process to purify ambient air into high-purity analytical grade air. All main components are manufactured with high-grade stainless steel and installed systematically in cabinets for easy access and service. Product features: Compact size requires minimal space Wall-mountable Built-in security lock on external housing Green, yellow and red indicating lights indicate power, warm-up, ready and fault notification of low/high catalyst temperature, low/high inlet pressure, and life expectancy/expiration of catalyst A digital thermal switch automatically shuts off the power supply to the catalyst in the event that the inlet compressed air is turned off, preventing catalyst damage due to overheating Model Description HiQ code Technical data Max outlet flow 1.5; 3.0; 6.0; 15; 30 l/min Max outlet pressure 6.5 bar 94 psi Inlet air pressure range 4.5 10 bar 65 145 psi Product outlet purity Hydrocarbons < 0.1 ppm Carbon dioxide < 5 ppm Carbon monoxide < 0.1 ppm Nitrogen oxides < 0.1 ppm Sulfur oxide < 0.1 ppm Ozone < 0.1 ppm Dew point (< 2.5 ppm) < 70 C < 158 F Particles (>0.5 micron removed) 99.99% Max inlet impurities Hydrocarbons 100 ppm Carbon dioxide 500 ppm Carbon monoxide 100 ppm Nitrogen oxides 50 ppm Connections (compr. fitting) Out = ⅛ In = ¼ Outlet air temperature (ambient) +15 C +59 F Max inlet temperature +40 C +104 F Dimensions (W/D/H) 47/25/40 cm 18/10/16 Weights ZAU 1500/3000 15 kg 33 lbs ZAU 6000 21 kg 46 lbs ZAU 15000/30000 25 kg 55 lbs ZAU 1500 Ultra Zero Air generator 1,500 ml/min 5765 ZAU 3000 Ultra Zero Air generator 3,000 ml/min 5766 ZAU 6000 Ultra Zero Air generator 6,000 ml/min 5767 ZAU 15000 Ultra Zero Air generator 15,000 ml/min 5768 ZAU 30000 Ultra Zero Air generator 30,000 ml/min 5769 Certification: compliant Maintenance/options ZA-FILT Replacement ext. air filter, housing and element 5770 ZA-XCART Replacement cartridge for external air filter 5771 ZA-ICART Replacement cartridge for internal air filter 5772 ZA-ACC-6 Active carbon column for models 1.5 6 l/min 5987 ZA-ACC-30 Active carbon column for models 15 30 l/min 5988

HiQ Ultra Zero Air generator. HiQ Ultra Zero Air generator in principal. Catalytic converter 480 C Filter NO x remover Cooler Ultra Zero Air outlet Air inlet CO 2 /CO/H 2 O remover Filter

HiQ specialty gas generators. Zero Air generator with integral compressor. Pure air is commonly used in the chromatographic world mainly as fuel for flames in detectors such as Flame Ionization Detectors (FIDs) and Flame Photometric Detectors (FPDs). The pure air can be delivered in classic gas cylinders or be produced on site. Designed with safety and convenience in mind, this system will generate purified and hydrocarbon-free air without the need of connecting to an external compressor. The Linde NGC Zero Air generators reduce hydro carbon pollutants to less than 0.1ppm and remove all kinds of particles. In the lab, they provide several advantages. Eliminating the need to use and store high-purity air in cylinders saves valuable laboratory floor space. There is no need to continually buy replacement high-purity air in cylinders. Using an onsite gas generator also eliminates the need to recalibrate instruments after replacing empty cylinders with full ones. The operation of the generator requires low levels of electrical power. This complete turnkey system is engineered with the highest quality components, is easy to install, and requires only minimal annual maintenance. The NGC Zero Air generator models utilize a 3-stage process to purify ambient air into analytical grade air. All main components are manufactured with high-grade stainless steel and installed systematically in cabinets for easy access and service. Product features: Compact size requires minimal space Wall-mountable Built-in security lock on external housing Green, yellow and red indicating lights indicate power, warm-up, ready and fault notification of low/high catalyst temperature, low/high inlet pressure, and life expectancy/expiration of catalyst Technical data Max outlet flow 2.5 l/min Max outlet pressure 5 bar 73 psi Product outlet purity Hydrocarbons < 0.1 ppm Carbon monoxide < 0.1 ppm Particles (>0.5 micron removed) 99.99% Max inlet impurities Hydrocarbons 100 ppm Carbon monoxide 50 ppm Outlet connection ⅛ NPT Outlet air temperature (ambient) +15 C +59 F Max inlet temperature 40 C 104 F Dimensions (W/D/H) 47/25/40 cm 18/10/16 Weight 17 kg 37.5 lbs Certification: compliant Model Description HiQ code NGC 2500 Zero Air generator with integral compressor 6009 Maintenance NGC-AM Annual maintenance kit 6010 ZA-ACC-6 Active carbon column 5987

HiQ Zero Air generator with compressor. HiQ Zero Air generator with integral compressor in principal. Air compressor Catalytic Converter 480 C Filter Cooler Cooler Filter Zero air outlet Condensor

HiQ specialty gas generators. The Zero Air series. Pure air is commonly used in the chromatographic world mainly as fuel for flames in detectors such as Flame Ionization Detectors (FIDs) and Flame Photometric Detectors (FPDs). The pure air can be delivered in classic gas cylinders or be produced on site from oil-free compressed air. Designed with safety and convenience in mind, this system will generate purified and hydrocarbon-free air from an existing in-house oilfree compressed air supply. The Linde ZAGC Zero Air generators reduce HC pollutants to less than 0.1 ppm and remove all kinds of particles. In the lab, they provide several advantages. Eliminating the need to use and store high-purity air in cylinders saves valuable laboratory floor space. There is no need to continually buy replacement high-purity air in cylinders. Using an on-site gas generator also eliminates the need to recalibrate instruments after replacing empty cylinders with full ones. The operation of the generator requires low levels of electrical power. This complete turnkey system is engineered with the highest quality components, is easy to install, and requires only minimal annual maintenance. The ZAGC Zero Air generator models utilize a 3-stage process to purify ambient air into analytical grade air. All main components are manufactured with high-grade stainless steel and installed systematically in cabinets for easy access and service. Product features: Compact size requires minimal space Wall-mountable Built-in security lock on external housing Green, yellow and red indicating lights indicate power, warm-up, ready and fault notification of low/high catalyst temperature, low/high inlet pressure, and life expectancy/expiration of catalyst A digital thermal switch automatically shuts off the power supply to the catalyst in the event that the inlet compressed air is turned off, preventing catalyst damage due to overheating Technical data Max outlet flow 1.5; 3.0; 6.0; 15; 30 l/min Max outlet pressure 6.5 bar 94 psi Inlet air pressure range 3 10 bar 45 145 psi Product outlet purity Hydrocarbons < 0.1 ppm Carbon monoxide < 0.1 ppm Particles (>0.5 micron removed) 99.99% Max inlet impurities Hydrocarbons 100 ppm Carbon monoxide 100 ppm Connections (compr. fitting) Out = ⅛ In = ¼ Outlet air temperature (ambient) +15 C 59 F Max inlet temperature 40 C 104 F Dimensions (W/D/H) 47/25/40 cm 18/10/16 Weights ZAGC 1500/3000 13 kg 29 lbs ZAGC 6000 15 kg 33 lbs ZAGC 15000/30000 22 kg 49 lbs Certification: compliant Model Description HiQ code ZAGC 1500 Zero Air generator 1,500 ml/min 5760 ZAGC 3000 Zero Air generator 3,000 ml/min 5761 ZAGC 6000 Zero Air generator 6,000 ml/min 5762 ZAGC 15000 Zero Air generator 15,000 ml/min 5763 ZAGC 30000 Zero Air generator 30,000 ml/min 5764 Maintenance/options ZA-FILT Replacement ext. air filter, housing and element 5770 ZA-XCART Replacement cartridge for external air filter 5771 ZA-ICART Replacement cartridge for internal air filter 5772 ZA-ACC-6 Active carbon column for models 1.5 6 l/min 5987 ZA-ACC-30 Active carbon column for models 15 30 l/min 5988

HiQ Zero Air generator. HiQ Zero Air generator in principal. Catalytic Converter 480 C Filter Filter Zero air outlet Air inlet Cooler

Portable gas solutions. In today s industry, a broad range of gases and chemicals are used. Especially at the chemical, pharmaceutical and biotech customers, a wide range of products is consumed. Many of them are used as a starting point for chemical synthesis. Others are used as intermediate product bringing building blocks or might be used to catalyst in chemical reactions. Most processes and synthesis are first developed and tested on a lab scale. After proven success, up-scaling is made by a pilot scale before it is produced on industrial scale. Both for the lab scale as well as for the pilot scale, smaller amounts of gases and chemicals are used. These gases have often toxic or hazardous properties, which require detailed knowledge regarding storage, user conditions, waste handling etc., both at the customers as well as at the supplier. Normally, these products are supplied in high pressure or disposable gas cylinders. Dependent on the consumption and the requested mobility, the size of the cylinder might vary from 0.4 up to 10 liter water content. Mostly, only very small amounts of product are needed. Therefore, the smallest cylinder size available (1 litre or less) contains normally more than sufficient product. With the Linde product line of small cylinders we offer total solutions wherever light container weight or only very small quantities of gas is required. The product family: ECOCYL RSH portable calibration gas cylinder with integrated regulator ECOCYL VAH-E/VSH-E portable chemical gas cylinder with integrated flow valve Most suitable standard gases and gas mixtures are available in small cylinders from current production at short notice. To save both time and expense, they are often shipped directly from supplying plant or where and when permissible, by mail. For you to find out what applies in your market contact your local Linde representative.

ECOCYL RSH. Portable gas cylinder with integrated pressure regulator and flow valve. ECOCYL RSH is the ultimate in safety, convenience and economics in portable calibration gas containers and delivery systems. The integrated valve, regulator and flow meter is protected by a tough cowling made of polyacetal material. The refillable high capacity cylinder holds 50% more product than most disposables, making the ECOCYL RSH system an environmentally as well as economically unsurpassed alternative. The ECOCYL RSH units are suited for non-corrosive pure gases as well as gas mixtures that contain non-corrosive as well as corrosive components. The ECOCYL RSH units are not suited for pure oxygen, oxidizing gases or oxidizing gas mixtures as well as liquefied flammable gases. The ECOCYL RSH can also be delivered with a convenient shoulder strap. For full program and additional information of this supply solution, please contact your local Linde representative. Technical data Max filling pressure 150 bar 2,200 psi Outlet pressure 3.8 bar 55 psi Outlet flow (fixed) 0.25, 0.3, 0.5, 1.0, 1.5, 2.5, 8.0 LPM Outlet gauge range 0 200 bar 0 3,000 psi Outlet connection 6 and 8 mm hose connection Operating temperature 20 +70 C 4 +158 F Cylinder volume 1 l Weight (empty) 2.4 kg 5.3 lb Diameter (max) 9.5 cm 3.7 Height (overall) 44 cm 17 Material Cylinder Aluminum Housing Stainless steel and aluminum Seals Viton Piston Brass Seating PCTFE

ECOCYL RSH

ECOCYL VAH and ECOCYL VSH. Portable chemical gas cylinder with integrated flow valve. Linde has developed a unique, small, refillable cylinder equipped with an integrated cylinder valve that has direct flow regulating capabilities. The unique design of the valve allows direct accurate flow adjustment without an additional flow regulator. This special is fully integrated into the cylinder s protection cap. The result is a safe, easy and ready-to-use system. The user only needs to open the cylinder valve until the required flow has been reached. The ECOCYL VAH and ECOCYL VSH can also be delivered with a convenient shoulder strap. ECOCYL VAH is basically suited for all acid gases where the model ECOCYL VSH is suited for alkaline related gases. Both of them are suited for most remaining gases, including those with an oxidizing potential. With the ECOCYL VAH and ECOCYL VSH, Linde covers the business area of truly portable cylinders with integrated equipment, fully protected by a proper cylinder cowling. The special regulating valves as used in Linde s ECOCYL VAH and ECOCYL VSH must be tested like normal cylinder valves, according EN-ISO 10297, to comply with the transportable pressure equipment directive (TPED, European Council directive 1999/36/EC). Approved units are signed with the Greek letter Π (pi), often followed by 4 digits. For full program and additional information of this supply solution, please contact your local Linde representative. Technical data Max filling pressure 150 bar 2,200 psi Max outlet pressure 150 bar 2,200 psi Outlet flow variable and adjustable by the main valve, gas dependent Outlet connection 6 and 8 mm hose connection Operating temperature 20 +70 C 4 +158 F Cylinder volume 1 l Weight (empty) 2.9 kg 6.4 lb Diameter (max) 9.5 cm 3.7 Height (overall) 39 cm 15.4 Material Cylinder Seemless stainless steel Housing VAH Aluminum silicon bronze Housing VSH Stainless steel Seals VAH SIMRIZ VSH EPDM Needle VAH SS 316 VSH NITRONIC 50

ECOCYL VAH

Cylinder types. Gas cylinders are pressure vessels, and therefore governed by local authority rules and regulations. For full information, please contact your local Linde representative. Seamless high-pressure cylinders, of steel or aluminum, are used for compressed gases or liquefied gases under pressure whose critical temperature is TC <70 C. Cylinder bundles Cylinder bundles are larger transport units consisting of 10 to 16 high-pressure cylinders fixed in a steel frame and connected by pipes. Gas filling and withdrawal is done through one common valve. A trailer contains of a large number of firmly mounted cylinders on a coach. Welded low-pressure cylinders, of sheet steel, are used for liquefied gases under pressure whose TC 70 C when this is permitted. Welded steel casks are also available for these gases. They are clamped in a steel frame and may be transported by road. Returnable cylinders Following is a selection of different returnable cylinders that Linde Gas can provide. For precise information on what is valid for your market, contact your local Linde representative.

Cylinder types. Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 0.4 NS HD 1.7 200 001 0.4 NS LB 1.8 200 002 1.0 NS LBS 1.0 124 003 1.0 AL A01 3.03 2216 004 1.0 AL AL001 2.1 200 005 1.0 TS HD/S 2.0 200 006 1.0 TS OTC-1 2.0 200 007 1.0 AL OTM-1 1.5 200 008 1.5 NS LBR 2.41 1800 009 2.0 NS 02C 2.87 1800 010 2.0 AL AL002 3.2 200 011 2.0 TS B02 3.5 200 012 2.0 AL B02A 2.4 200 013 2.0 TS HD 5.3 200 014 2.0 AL HD/S 4.7 200 015 2.0 AL OTM-2 3.0 200 016 2.5 TS OTC-2.5 3.0 200 017 3.0 TS 003 9.5 2015 018 3.0 NS GFL-3 5.0 150 019 4.0 TS OTC-4 42.0 200 020 4.6 SG L04 12 240 021 5.0 TS 005 13.5 2015 022 5.0 AL AC5-150 3.7 150 023 5.0 NS GFL-5 8.0 150 024 5.0 NS SC5-150 7.4 150 025 5.0 TS AG5 9.0 200 026 5.0 AL AL005 7.5 200 027 5.0 TS B05 8.5 200 028 5.0 AL B05A 7.4 200 029 5.0 AL BALU05 7.0 200 030 5.0 TS OTC-5 7.0 200 031 5.0 AL OTM-5 7.0 200 032 5.0 TS ST005 8.5 200 033 5.0 TS T05 8.0 200 034 5.8 SG A07 10.0 15 035 6.0 AL 3AL2265 6.6 150 036 7.0 SG ND 4.0 21 037 7.0 NS DOT3A2015 5.0 139 038 7.0 TS 007 29 2015 039 7.0 NS IRAM2525-7 5.0 150 040 7.0 AL A07 14.43 2215 041 10.0 TS HD/A 21.0 18 042 10.0 SS ND/S 21.0 40 043 10.0 AL AL-10 14.0 140 044 10.0 NS GFL-10 13.0 150 045 10.0 NS HD/K 19.0 150 046

Material AL: aluminum NS: steel with minimum yield point of 390 N/mm 2 SG: sheet steel, welded SS: stainless steel TS: temper hardened steel Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 10.0 TS AG10 14.0 200 047 10.0 TS AL010 12.0 200 048 10.0 TS B10 17.5 200 049 10.0 AL B10A 138.0 200 050 10.0 TS BACE10 20.0 200 051 10.0 AL BALU10 13.0 200 052 10.0 TS HD 16.0 200 053 10.0 AL HD/S 11.5 200 054 10.0 SS HD/S 32.0 200 055 10.0 TS OTC-10 15.0 200 056 10.0 AL OTM-10 12.0 200 057 10.0 TS ST010 14.0 200 058 13.4 TS B13,4 17.5 200 059 14.0 SG P-6 10.4 25 060 15.0 AL B15A 16.2 200 061 16.0 NS DOT3AA2015 5.0 134 062 16.0 TS 016 53 2015 063 16.0 AL A16 30 2015 064 20.0 TS HD/A 38.0 18 065 20.0 SS ND/S 17.0 43 066 20.0 AL 3AL2015 10.6 140 067 20.0 NS GFL-20 32.0 150 068 20.0 TS AG20 33.0 200 069 20.0 AL AL020 30.0 200 070 20.0 AL AL020HO 26.0 200 071 20.0 TS B20 30.0 200 072 20.0 AL B20A 21.6 200 073 20.0 TS B20MB 30.0 200 074 20.0 AL B2ALU20 23.0 200 075 20.0 TS BACE20 37.0 200 076 20.0 TS OTC-20 27.0 200 077 20.0 AL OTM-20 24.0 200 078 20.0 TS ST020 28.0 200 079 20.0 TS T20 30.0 200 080 20.0 TS T20MB 30.0 200 081 21.3 NS 3AL2015 18.0 140 082 21.7 SG L20 17 240 083 22.0 NS AC22-150 17.6 150 084 23.0 SG DG-ETNº2 25.0 22 085 26.0 SG P-11 14.0 25 086 26.7 TS B26,6 38.0 200 087 26.7 TS OTC-26.7 25.8 200 088 27.0 SG ND 12.0 21 089 29.4 AL 3AL2015 21.6 140 090 30.6 SG P13 20.0 30 091 31.0 AL AL-31 24.0 140 092

Cylinder types. Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 31.0 AL A31 49 2015 093 40.0 SG A60 50.0 15 094 40.0 TS HD/A 60.0 19 095 40.0 NS AC40 45.0 60 096 40.0 NS HD/K 78.0 150 097 40.0 TS HD/S 48.0 150 098 40.0 NS SC40-150 71.0 150 099 40.0 NS ST040 70.0 150 100 40.0 TS B40 61.0 200 101 40.0 TS BACE40 65.0 200 102 40.0 TS GFL-40 58.0 200 103 40.0 AL HD/S 45.0 200 104 40.0 SS HD/S 81.0 200 105 40.0 TS IN40 45.0 200 106 40.0 TS IRAM2525-4 58.0 200 107 40.0 TS OTC-40 55.0 200 108 40.0 AL OTM-40 45.0 200 109 40.0 TS TW40 51.4 200 110 40.0 TS B-40 67.0 201 111 43.0 TS 043 187 3500 112 43.4 SG L40 33.6 240 113 44.0 AL E10047 54.0 150 114 44.0 NS SC44-150 74.9 150 115 44.0 NS 3AA2265 53.0 156 116 44.0 TS 044 110 2265 117 45.0 SG P-19 21.0 25 118 46.0 TS 046 300 6000 119 47.0 SS ND/S 50.0 40 120 49.0 NS 3AA2400 64.0 165 121 49.0 TS 049 143 2400 122 50.0 SG R50H 100.0 0.5 123 50.0 SG A70 75.0 15 124 50.0 SG ACET50 85.0 18 125 50.0 SG L-50 26.0 25 126 50.0 SS ND/S 31.0 43 127 50.0 NS 3AA2900 73.0 200 128 50.0 TS AG50 63.0 200 129 50.0 AL AL050 58.0 200 130 50.0 TS B50 61.0 200 131 50.0 AL B50A 49.2 200 132 50.0 TS B50MB 61.0 200 133 50.0 AL BALU50 56.0 200 134 50.0 TS BS/5045/1 60.0 200 135 50.0 TS GFL-50 68.0 200 136 50.0 TS HD 67.0 200 137 50.0 TS IRAM2525-5 63.0 200 138

Material AL: aluminum NS: steel with minimum yield point of 390 N/mm 2 SG: sheet steel, welded SS: stainless steel TS: temper hardened steel Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 50.0 TS OTC-50 65.0 200 139 50.0 AL OTM-50 57.0 200 140 50.0 TS SC50-165 65.0 200 141 50.0 TS SC50-200 65.0 200 142 50.0 TS ST050 70.0 200 143 50.0 AL B50C 33.6 250 144 50.0 TS HD/S 93.0 300 145 53.6 TS OTC-53.6 50.5 200 146 54.0 SG 054 85 480 147 56.0 SG CS56-Acet 34.0 20 148 61.0 SG 061 177 480 149 64.8 SG L60 48 240 150 67.0 TS B67 70.0 200 151 79.0 SG ND 35.0 21 152 83.0 SG P35 50.0 30 153 84.0 SG B84 50.0 30 154 102.6 SG R20H 120.0 0.5 155 107.0 SG P-45 38.0 25 156 108.0 SG L-108 50.0 25 157 110.0 SG DOT4BW240 10.0 16 158 110.0 SG 110 68 240 159 126.0 SG D126 47.0 21 160 126.0 SG 126 150 480 161 160.0 SG VGL160-11 115.0 11 162 175.0 SG R20MP 175.0 10 163 180.0 SS VGL180--11 115.0 11 164 200.0 SG DOT 4L292 127.0 20 165 400.0 TS Maxi 850.0 200 166 450.0 TS 450 1108 1800 167 454.0 SG DOT4BW240 170.0 16 168 454.0 SG 454 315 240 169 480.0 AL BL/E/S 960.0 200 170 480.0 AL BL/M/S 960.0 200 171 500.0 TS PKT-10x50L 750.0 200 172 600.0 SG CP6MP 560.0 10 173 600.0 TS BL/M 1057.0 200 174 600.0 TS PKT-12x50S 950.0 200 175 600.0 TS BL/E/S 1100.0 300 176 650.0 AL PAK13X50 1130.0 200 177 761.0 SG 761 1077 500 178 800.0 TS PAK16X50 1370.0 200 179 800.0 TS SuperMaxi 1450.0 200 180 950.0 TS F 566.0 22 181 Note that low pressure cylinders are often filled by weight and therefore the internal volume and work pressure is not an indication of filling volume.

Equipment connections, tubings and fittings. Cylinder valves & inlet connections. The purpose of the cylinder valve is to open and shut the gas cylinder, it is not meant to regulate the gas flow. The cylinder valve is normally made of brass, unless the chemical properties of the gas demands another material such as steel or stainless steel. The valve can be equipped with a dip tube for withdrawal of liquid phase from liquefied gases. For certain liquefied gases the valve is equipped with a burst disk for safety. Diaphragm valves are used for high purity gases and specialty gas mixtures with low component contents of for example reactive components. Cylinder valves for highly reactive and toxic gases are in some countries equipped with a safety valve. This kind of valve normally has an incorporated flow restrictor. Certain cylinder valves are equipped with pneumatic function to operate them, explosion safe, from a distance. To avoid gas cylinder being connected to the wrong gas supply system, the cylinder valves are equipped with different outlet threads, depending on the gas content of the cylinder. The rules deciding what threads go with what gas are governed by local authorities, and differ from country to country. On the following 4 pages some of the most common cylinder valve outlets are described. The term INT refers to internal outlet threads of the cylinder connection, if not stated the thread is external. The term LH refers to left-handed threads, if not stated the thread is right-handed. The chemical properties of the gas govern what cylinder valve material brass, steel or stainless steel is most suitable. Diaphragm Outlet thread Washer Outlet thread Diaphragm valve Washer valve

Inlet connections. Cylinder connections ABNT 245-1 AFNOR C ABNT Description HiQ inlet code ABNT 172-1 3/8-18 NSPL 043 ABNT 172-1 hand connector 3/8-18 NSPL 122 ABNT 218-1 W 21.8 x 1/14" 045 ABNT 218-1 hand connector W 21.8 x 1/14" 123 ABNT 218-2 W 21.8 x 1/14" INT 050 ABNT 218-2 hand connector W 21.8 x 1/14" INT 124 ABNT 225-2 0.885" - 14 NGO 046 ABNT 225-2 hand connector 0.885" - 14 NGO 125 ABNT 245-1 0.960" - 14 NGO 044 ABNT 245-1 hand connector 0.960" - 14 NGO 126 ABNT 245-2 0.965" - 14 NGO 049 ABNT 245-2 hand connector 0.965" - 14 NGO 127 ABNT 262-1 1.035" - 14 NGO 048 ABNT 262-1 hand connector 1.035" - 14 NGO 128 ABNT 270-9 W 24.44 x 2" 047 ABNT 270-9 hand connector W 24.44 x 2" 129 ABNT 300-12 W 27.44 x 2" 051 ABNT 300-12 hand connector W 27.44 x 2" 130 AFNOR Description HiQ inlet code NF C SI 21.7 x 1.814 055 NF C hand connector SI 21.7 x 1.814 157 NF D W 24 x 2 056 NF D hand connector W 24 x 2 158 NF E SI 21.7 x 1.814 LH 057 NF E hand connector SI 21.7 x 1.814 LH 159 NF F SI 22.94 x 1.814 INT 059 NF F hand connector SI 22.94 x 1.814 INT 160 NF G SI 26 x 1.5 INT 060 NF G hand connector SI 26 x 1.5 INT 161 NF H W 22.91 x 1.814 LH INT 061 NF H hand connector W 22.91 x 1.814 LH INT 162 NF J W 25.4 x 3.175 062 NF J hand connector W 25.4 x 3.175 163 NF K W 27 x 2 063 NF K hand connector W 27 x 2 164 NF L W 27 x 2 064 NF L hand connector W 27 x 2 165 NF M W 30 x 2 065 NF M hand connector W 30 x 2 166 NF P W 27 x 2 067 NF P hand connector W 27 x 2 167

Cylinder connections BS 341 No. 8 CGA 170 BS 341 Description HiQ inlet code BS 341 No. 2 G 5/8" LH 179 BS 341 No. 2 hand connector G 5/8" LH 180 BS 341 No. 3 G 5/8" INT 181 BS 341 No. 3 hand connector G 5/8" INT 182 BS 341 No. 4 G 5/8" LH INT 183 BS 341 No. 4 hand connector G 5/8" LH INT 184 BS 341 No. 6 G 5/8" 185 BS 341 No. 6 hand connector G 5/8" 186 BS 341 No. 7 G 5/8" LH 187 BS 341 No. 7 hand connector G 5/8" LH 188 BS 341 No. 8 W 0.860" x 14 TPI 189 BS 341 No. 8 hand connector W 0.860" x 14 TPI 190 BS 341 No. 10 G 1/2" 191 BS 341 No. 10 hand connector G 1/2" 192 BS 341 No. 12 G 1/2" 199 BS 341 No. 12 hand connector G 1/2" 200 BS 341 No. 13 W 11/16" - 20 TPI 193 BS 341 No. 13 hand connector W 11/16" - 20 TPI 194 BS 341 No. 14 G 3/8" 195 BS 341 No. 14 hand connector G 3/8" 196 BS 341 No. 15 G 3/8" LH 197 BS 341 No. 15 hand connector G 3/8" LH 198 CGA Description HiQ inlet code CGA 110 0.3125-32 UNEF INT 019 CGA 110 hand connector 0.3125-32 UNEF INT 014 CGA 170 9/16" - 18 UNF INT 201 CGA 170 hand connector 9/16" - 18 UNF INT 202 CGA 180 5/8" - 18 UNF INT 021 CGA 180 hand connector 5/8" - 18 UNF INT 020 CGA 240 3/8" - 18 NPT 024 CGA 240 hand connector 3/8" - 18 NPT 072 CGA 296 0.803" - 14 UNS INT 203 CGA 296 hand connector 0.803" - 14 UNS INT 204 CGA 300 0.825" - 14 NGO 205 CGA 300 hand connector 0.825" - 14 NGO 206 CGA 320 0.825" - 14 NGO 077 CGA 320 hand connector 0.825" - 14 NGO 028 CGA 326 0.825" - 14 NGO 026 CGA 326 hand connector 0.825" - 14 NGO 131 CGA 330 0.825" - 14 NGO LH 016 CGA 330 hand connector 0.825" - 14 NGO LH 132 CGA 346 0.825" - 14 NGO 176 CGA 346 hand connector 0.825" - 14 NGO 177 CGA 350 0.825" - 14 NGO LH 013 CGA 350 hand connector 0.825" - 14 NGO LH 133 CGA 510 0.855" - 14 NGO LH INT 002 CGA 510 hand connector 0.855" - 14 NGO LH INT 134 CGA 540 0.903" - 14 NGO 078 CGA 540 hand connector 0.903" - 14 NGO 135 CGA 580 0.965" - 14 NGO INT 052 CGA 580 hand connector 0.965" - 14 NGO INT 136 CGA 590 0.965" - 14 NGO LM INT 017 CGA 590 hand connector 0.965" - 14 NGO LM INT 137 CGA 660 1.030" - 14 NGO 018 CGA 660 hand connector 1.030" - 14 NGO 138 CGA 679 1.030" - 14 NGO LH 207 CGA 679 hand connector 1.030" - 14 NGO LH 208 CGA 705 1.125" - 14 UNS LH 178

Inlet connections. Cylinder connections DIN 477 No. 14 IRAM 2539 o DIN 477 Description HiQ inlet code DIN 477 No. 1 W 21.8 x 1/14" LH 001 DIN 477 No. 1 hand connector W 21.8 x 1/14" LH 140 DIN 477 No. 2 W 21.8 x 1/14" LH 209 DIN 477 No. 2 hand connector W 21.8 x 1/14" LH 210 DIN 477 No. 3 Yoke 095 DIN 477 No. 3 hand connector Yoke 147 DIN 477 No. 5 W 1" x 1/8" LH 003 DIN 477 No. 5 hand connector W 1" x 1/8" LH 148 DIN 477 No. 6 W 21.8 x 1/14" 004 DIN 477 No. 6 hand connector W 21.8 x 1/14" 149 DIN 477 No. 7 G 5/8" 005 DIN 477 No. 7 hand connector G 5/8" 151 DIN 477 No. 8 W 1" x 1/8" 006 DIN 477 No. 8 hand connector W 1" x 1/8" 152 DIN 477 No. 9 G 3/4" 007 DIN 477 No. 9 hand connector G 3/4" 153 DIN 477 No. 10 W 24.32 x 1/14" 008 DIN 477 No. 10 hand connector W 24.32 x 1/14" 142 DIN 477 No. 11 G 3/8" 009 DIN 477 No. 11 hand connector G 3/8" 143 DIN 477 No. 12 G 3/4" INT 010 DIN 477 No. 12 hand connector G 3/4" INT 144 DIN 477 No. 13 R 5/8" 011 DIN 477 No. 13 hand connector R 5/8" 145 DIN 477 No. 14 M 19 x 1.5 LH 012 DIN 477 No. 14 hand connector M 19 x 1.5 LH 146 DIN 477 No. 52 M 30 x 1.5 INT 211 IRAM 2539 Description HiQ inlet code IRAM 2539i 5/8" BSP - INT 053 IRAM 2539i hand connector 5/8" BSP - INT 154 IRAM 2539 C2H2 3/4" BSPx1/14" INT 096 IRAM 2539 N2O 3/8" BSPx1/14" 097 IRAM 2539 N2O hand connector 3/8" BSPx1/14" 155 IRAM 2539 o W 21.8-14 054 IRAM 2539 o hand connector W 21.8-14 156 ISO 5145 Description HiQ inlet code ISO 5145 No. 0170 M 30 x 2 212

Cylinder connections 3-MIE C NEN 3268 LU1 3 - MIE - AP7 Description HiQ inlet code MIE B M 30 x 1.75 221 MIE B hand connector M 30 x 1.75 222 MIE C W 21.7 x 1/14" 223 MIE C hand connector W 21.7 x 1/14" 224 MIE E W 21.7 x 1/14" LH 225 MIE E hand connector W 21.7 x 1/14" LH 226 MIE F G 5/8" INT 227 MIE F hand connector G 5/8" INT 228 MIE G M 26 x 1.5 INT 083 MIE G hand connector M 26 x 1.5 INT 175 MIE H G 5/8" LH INT 229 MIE H hand connector G 5/8" LH INT 230 MIE J W 1" 231 MIE J hand connector W 1" 232 MIE M M 19 x 1.5 LH 233 MIE M hand connector M 19 x 1.5 LH 234 MIE S G 5/8" 235 MIE S hand connector G 5/8" 236 MIE T W 31.75 x 1/7" 237 MIE T hand connector W 31.75 x 1/7" 238 MIE U G 3/8" 239 MIE U hand connector G 3/8" 240 NEN 3268 Description HiQ inlet code LU 0 M 19 x 1.5 LH 115 LU 0 hand connector M 19 x 1.5 LH 168 LU 1 W 21.8-1/14 LH 116 LU 1 hand connector W 21.8-1/14 LH 169 LU 4 W 1" LH 117 LU 4 hand connector W 1" LH 170 RI 2 G 5/8" INT 121 RI 2 hand connector G 5/8" INT 171 RU 1 W 21.8-1/14 118 RU 1 hand connector W 21.8-1/14 172 RU 3 W 24.32-1/14 119 RU 3 hand connector W 24.32-1/14 173 RU 4 W 1" 120 RU 4 hand connector W 1" 174 UNI 4406 UNI Description HiQ inlet code UNI 4405 W 20 x 1/14" Sin. 213 UNI 4405 hand connector W 20 x 1/14" Sin. 214 UNI 4406 W 21.7 x 1/14" 215 UNI 4406 hand connector W 21.7 x 1/14" 216 UNI 4409 W 21.7 x 1/14" 217 UNI 4409 hand connector W 21.7 x 1/14" 218 UNI 4412 W 24.5 x 1/14" 219 UNI 4412 hand connector W 24.5 x 1/14" 220

Outlet connections. Linde offers a wide range of outlet connections from the most well acknowledged manufacturers. The table below shows some of the most commonly used designs and dimensions. For special arrangements or needs, please contact your local Linde representative. Illustration showing a typical straight outlet connection (male NPT compression fitting). Outlet connections HiQ outlet code 3 mm, stainless steel 501 6 mm, stainless steel 502 8 mm, stainless steel 503 10 mm, stainless steel 504 12 mm, stainless steel 505 1/8, stainless steel 506 1/4, stainless steel 507 3/8, stainless steel 508 1/2, stainless steel 509 3 mm, brass 510 6 mm, brass 511 8 mm, brass 512 10 mm, brass 513 12 mm, brass 514 1/8, brass 515 1/4, brass 516 3/8, brass 517 1/2, brass 518

Tubings. To ensure the integrity of the gas, from the gas cylinder to the point of use, stainless steel tubing is used when installing a central gas supply system for specialty and high purity gases. Linde uses AISI 316L SS tubes according to EN 10216-5 and ASTM A 269 in three different quality classes. Quality level class 1 class 2 class 3 Surface finish Ra 0.2 µm certified Ra 0.4 µm certified Ra 1.0 µm Electro polish Yes Cleaning Plug shooting Purging Testing Plugged and packed Flushing with water 80 C 18MΩ/cm Moisture analysis, particle measurement Ends sealed with nylon film and PE caps. Packed in double plastic bags in class 10/100 clean room. Flushing with 0.5 MΩ/cm water at room temperature Detector nitrogen 5.5 with 0.003 µm filter Flushing with 0.5 MΩ/cm water at room temperature Ends protected with PE caps. Packed in plastic bags. Ends protected with PE caps. Packed in plastic bags. Fittings. For joining various parts and components to the central gas supply system Linde recommends the use of high quality fittings. For systems up to a purity of 5.5 Linde recommends tube fittings (e.g. Parker A- LOK, Swagelok or Gyrolok ). These fittings avoids any extra torque on the piping. For systems above a purity of 5.5 Linde recommends the use of metal gasket face seal fittings (e.g. VCRR), which enables a tightness equivalent to 10-9 cm 3 He/s. The seal of a metal gasket face seal is made when the gasket is compressed by two polished beads when the fitting is tightened. A metal gasket face seal can not be disassembled and reassembled without replacing the metal gasket.

Accessories. To handle gases and gas cylinders, one need from time to time some additional items. Some of these items are found in this chapter. Please contact your local Linde representative for your full local accessories program.

Centralized monitoring systems. Monitoring systems can be divided into two components: data collectors, such as contact gauges and pressure transducers, and data presenters, such as a centralized monitoring system. Data collectors can work without data presenters, but not vice versa. The alarm system works as an automatic pressure supervisor. the system is EEx(i)-classified according to EN 500 20, and consists of a central unit, an EEx(e) classified alarm box, an extension box, if necessary, and 1 8 contact gauges. Historically, contact gauges connected to a centralized monitoring system have been dominant, but the use of transducers connected to a PLC-system is becoming increasingly common. Linde has wide experience of working with contact gauges and centralized monitoring systems. The central unit is placed outside the potentially explosive zone. The unit incorporates an electronic device that indicates low pressure in the connected gas cylinders. At low pressure a buzzer signal sound and a light diode is activated. The alarm box is placed inside the potentially explosive zone. The alarm incorporates an EExe-classified sealing, with an amplifier for the intrinsic safe signal. The central unit is connected to the alarm box by a 12-connector cable. The cable supplies the signal amplifier with 24 VDC, and carries the signal from alarm and contact gauge to the central unit. There may be an extension box between the alarm box and the contact gauge, to make it possible to place several gas cylinders at different distances from the alarm box inside the potentially explosive zone. The system can be expanded by up to three extra channels. Technical data Size (W/H/D) 213/185/113 mm Material Casing ABS plastic Cover Clear polycarbonate Supply voltage 230 V, 50 Hz Supply current 0.5 A Channels 1 (expandable to max. 4) Indication lights Green Normal pressure Red Low pressure/switch-over Product name HiQ code Central monitoring system kit 3389

Contact gauges & Pressure transducers. Contact gauges are used to monitor when a pre-set pressure is reached. These can be delivered EEx-classified. Pressure transducers monitor changes in pressure and can be used in place of contact gauges necessary if the signal must be connected to a central computer or a PLC. The high output current (4 20 ma) may require the transducer to be isolated if used in an explosive environment. Product name HiQ code Technical data Contact gauge Contact gauge 3391 Pressure transducer 6012 Accuracy 2.5% of max pressure Hysteresis 2.5% of max pressure Electrical Voltage 24 V Current 500 ma Operating temperatures Ambient 25 +60 C 15 +140 F Media 25 +100 C 15 +210 F Connection G ¼ Pressure range 0 25 bar 0 400 psi 0 60 bar 0 900 psi 0 250 bar 0 3,600 psi Connection NPT ¼ Pressure range 0 16 bar 0 250 psi 0 60 bar 0 900 psi 0 250 bar 0 3,600 psi

Contact gauge Pressure transducer

Mounting bracket. Primarily for use with the BASELINE R 104/1 line regulator (page 126). Product name HiQ code Technical data Mounting bracket 6011 Material Stainless steel

Mounting bracket 50.8 47.1 120.7 12.7 25.4 All measurements in millimeters.

Wall mounting bracket & gas cylinder trolley. Linde delivers a selection of practical wall mounting brackets and cylinder trolleys for different needs. These might vary depending on your local market. Please contact your local Linde representative for more information.

Wall mounting bracket for gas cylinders Gas cylinder trolley

HiQ Gas Supply System Installations. The success of an installation project lies very much in the planning of the project. There are many details that have to fall in place to minimize the project time and make it successful. Linde have prepared some checklists to aid in planning a gas supply system installation projects. They are meant to simplify and make sure that everything is covered during an installation.

HiQ Gas Supply System Installations. Checklist. Checklist Supply Checklist Piping Checklist Miscellaneous Gas Type of gas and gas quality Pressure: Gas panel Main piping system, standard 10 15 bar In- and outlet pressure to pointof-use regulator Flow: Each point-of-use regulator Total system Storage Preferably in a separate building or container Different kinds of gases shall be separated Heating of storage area Electrical installation Checklist Equipment Point-of-use Type of regulator etc Material Inlet connection Outlet connection Safety outlet Gas panel Single or semi-automatic Material Contact gauges/pressure transducers Purging system Number of cylinders Inlet connection Outlet connection Outlet pressure Flow shut-off valve Safety outlet Tubing Quality Dimensions Number of welding fittings, reducers, elbows, tees Valves Material Main shut off valve Section shut off valve Relief valves etc Check valves Other equipment Filters Purifiers Monitoring central Gas cabinets Gas detection units Checklist Installation Installation material Tube clamps Mark tags and signs Welding gas Purge gas Pressure test gas Leak detection gas Installation items New or existing building Making holes in walls, floors and ceilings Electric installation Patch up and painting after installation Fireproof sealing of holes Need of skylift etc. Lockable storage room Safety outlet tube Pressure test Leak test Miscellaneous Inactive time Travelling cost Hotel Allowance for expenses Training Drawings and documentation Operating instructions Limit of engagement Labor management Service Guarantee

Services. Linde delivers a variety of services, both customer-specific and standardized. Below is some information on different services. The service portfolio is often based on the local demand and customer specific ideas and requirements; therefore you should contact your local Linde representative to receive all information about the full portfolio for your market and about solutions specifically designed for your needs. Please also contact your local Linde office if you have ideas on services not covered here. ebusiness and web ordering Wouldn t you like more timesaving tools to help do your job? Want to web order with real-time material availability and see your pricing? Need to know how much you spend on a blanket purchase order? How do you know if that credit was given or not? Has your company decided to place orders through a marketplace or other procurement solution? Do you know your present cylinder balance? With Linde you can do these things and many other things whenever you want. We at Linde have listened to our customers and offer them access to the features and capabilities most desired. Various ebusiness tools and systems have been implemented throughout the Linde world, to more efficiently conduct your business and provide service. In most cases, these business tools have been directly integrated with the local business systems to improve speed, accuracy and convenience. Online ordering is available on many Linde markets. Online ordering is available for customers who register for access. With registration, one or more users at each company are authorized to be the web administrator. Buyers using the web ordering get so many advantages: Pre-loaded past purchase history organized into modifiable reorder templates. Reorder in less than 1 minute from old orders or reorder template. Pre-negotiated prices and payment terms are used and shown. Material availability shown before placing order, when applicable. Add items from online catalog to an order. Delivery instructions specific to the ship-to location are shown. Automatic email confirmation with complete order details. Many Linde companies can offer a variety of ebusiness tools, to find out what is applicable for you, please contact your local Linde representative.

Services. ACCURA The new real-time ACCURA Cylinder Management system takes the benefits of cylinder monitoring even further, bringing them to you over the Internet! A new tool for cylinder gas management in your company ACCURA Cylinder Management collects cylinder gas data in a format that your company can easily manage and utilize. It s a system that can save your company thousands maybe tens of thousands of euros per year. ACCURA Cylinder Management operates via the Internet, and it s a tool designed for anyone who needs to know what types of gases they have in stock, where gas cylinders are located and also how to develop cylinder procedures. The service is planned in co-operation with the customer, and is tailored to the company s operating model. This ensures that it serves all departments - Stock, Production and Safety as well as Purchasing and Finance. Effective risk management One of the major benefits of ACCURA Cylinder Management is that it will remind and inform you. If you wish, the system will monitor uninterrupted gas availability for you. With access to real-time information for all your stock, you can plan for variations in gas consumption and ensure your processes operate without interruption. In emergency situations e.g., in the event of a fire, Cylinder Management will tell you the location of your cylinders as well as cylinder numbers. Benefits of Cylinder Management Gas cylinders are used effectively, which saves money Gas consumption budgeting and planning is improved Cost reporting and internal allocation is easier Invoice checking and processing is faster Cylinder Management will warn you of any expiring gases Clear, versatile reports Gas in stock Cylinder movement history Gas utilization Gas consumption Gas and rental costs Gas costs split per warehouse Cylinder rotation Daily rental costs Rental agreements Expiring gases Hazardous gases SECCURA Consider these questions: Have you ever experienced running out of gas because the person responsible for checking and ordering simply forgot to do so? Or failed to do it because of some misunderstanding or mix-up? If the gas you re dependent on suddenly ran out, what problems would it create for your company, and your customers? Increased production reliability a real value SECCURA automatic gas supply is a supply service that allows you to forget completely how much gas you have at any given time. As the name indicates, this service runs automatically. When a cylinder or a bundle is empty and needs changing, an automatic ordering signal is sent directly to Linde. We will see that replacements are installed. Your staff won t even have to know it has been done. Reducing unnecessary costs saving real money SECCURA automatic gas supply completely eliminates the need to check, order, and replace gas cylinders and bundles. In most cases it also eliminates the need to keep extra cylinders in stock just in case. Increased convenience a true value SECCURA automatic gas supply lightens your load by effectively removing the cause of worry and increasing your convenience. This service from Linde allows you to spend your resources where they are most needed. And leaves you free to focus your energy on production. Hardly a luxury

Increased safety an invaluable value SECCURA automatic gas supply means that our trained drivers do all the tasks involved with the changing of cylinders and bundles, including testing for leaks and changing gaskets when required. They do it every day and they do it right. Your staff is not concerned and the task does not interfere with their safety in any way. Safety audits, walkthroughs and trainings Concerned about the safety of your existing specialty gas distribution system? Wondering if your system is designed and operated in accordance with today s standards? Linde can help. Conduct safety audits and plant walkthroughs Linde can perform a complete safety assessment of your existing gas system. We will review the overall system s design, evaluate your associated operating procedures and training program, evaluate mitigation and containment systems, and review maintenance practice. We provide both recommendations for system improvements and identify areas that are out of compliance with applicable safety codes. Specialty gas safety training In order to increase safety, reduce downtime, and to help prevent unwanted releases, Linde can offer custom designed specialty gas equipment/system trainings, often including: Product safety and equipment training Operator training, including theory of operation Maintenance training Regulatory compliance/site surveys Technical support Emergency response team On-Site support Application safety training Typically with a new process application, days of assistance for start-up and training are provided. This training would be onsite for plant personnel. Typical the training covers safety, maintenance and operation. Gas analysis service Linde gas is one of the largest gas suppliers in the world. As such we have a network of highly skilled laboratories to verify and secure the quality of our own production. These can of course be utilized for gas specific analysis services. The typical assignments are either investigations of a single gaseous source e.g., a smoke stack, or periodic measurement for companies that do not have or can justify the necessary instrument park. Many local Linde markets have access to mobile laboratory units that enable analysis at customer location. When this is impossible, our skilled chemists know all about gathering representative samples and bring them back to the laboratory. Here follows a selection of available analysis methods: Time-of-flight Atmospheric Pressure Ionization Mass Spectrometer to measure down to ppt range A variety of Gas Chromatographs equipped with general (WLD, TCD, HeID) and specific detectors (FID, ECD, Argon detector, Hall detector, Helium detector and Chemo luminescent detector) Chemo luminescent analyzer for NOX Gas chromatographs with cold trap technique to measure hydrocarbons in the ppb range Laser based particle analyzer High resolution FTIR with long path gas cuvette NDIR analyzers for different gases Moisture analyzers (dew point mirror and capacitive method) Pure oxygen analyzers (electrochemical and phosphor luminescent) UV/VIS spectrometry AES (Atomic emission spectrometry) To support our training programs, we develop applicable operating and maintenance procedures and student material. Courses can be structured as class room/instructor lead, selfstudy, and on-the-job. Linde also offers the additional services:

Services. HiQ analysis certificate Linde s gas production and laboratory facilities perform professional and skillful quality control and analysis of gas mixtures. It is of vital importance that the results are correct, since they often are the base for monitoring/measuring e.g., process conditions, quality levels and safety conditions. It is also important that all the information on the analysis certificate is correct and easy to understand. Linde always follows the latest update of the ISO 6141 standard, specifying the information on an analysis certificate. The HiQ Analysis Certificate from Linde is in accordance with this standard. The HiQ Analysis Certificate always looks the same. The information is easy to locate and understand. The headings are in the appropriate language and in English, allowing the certificate to be used both in the relevant country and across borders. All gas products are quality controlled. Where applicable, an analysis certificate is included in the product. If not included, it can be requested separately. Please check with your local Linde office to find out what is applicable for the products you order. Name HiQ code HiQ Analysis certificate (Certified standard) 2921 Explanations on the HiQ Analysis Certificate 1 The date when the certificate was written, the beginning of the shelf life 2 Identification of the HiQ Certificate 3 Type of HiQ certificate e.g., Certificate of Analysis, Certificate of Conformity, etc. 4 HiQ product name and code when applicable 5 Comments on the table the unit can be given either in mole, volume or weight the uncertainty refers to the analysis of each component and is relative if an absolute uncertainty is given it is In the column Analysis result (for instance 202 ± 4 ppm) 6 Confidence level is the probability of the analysis result falling between the uncertainty limits 7 The blend tolerance of a gas mixture specifies how close to the ordered concentration the final concentration must fall 8 Following the temperature recommendation improves safety and helps to keep the gas mixture homogeneous 9 The component concentrations will remain within the limits stated in the analysis result down to the recommended minimum pressure of use 10 Use before: In a correctly handled cylinder the component concentrations will remain within the limits stated in the analysis result during the stated shelf life Reference material Calibration certificate National borders no longer define today s environment. Pollutions are monitored on regional and even global scale. This requires that the results from the monitoring systems shall not only be comparable, but also mutually acceptable. Governments use accreditation as an instrument in these regulatory issues. Also in trading of goods, a confident and trustful base is needed to qualify and quantify the value of the traded goods. Accreditation is widely accepted as a tool to address issues like competence and reliability. Calibration certificates are used as a base to facilitate easy trading. Reference material with a calibration certificate is analyzed at a laboratory that has accredited analysis methods for the components and ranges in question. Several Linde facilities have such accredited analysis methods, especially for components and ranges used for environmental surveillance. Linde laboratories are accredited as calibration laboratories. Further, several facilities are accredited as testing laboratories to facilitate analytical services. The reference materials prepared by these production facilities are acknowledged as standard reference material by e.g., CAI, COFRAC, DAR, ENAC, RVA, SWEDAC, UKAS and many others. These products are in accordance with ISO 17025. An accreditation proves that the laboratory is competent to perform a certain analysis. The competence of the laboratory is decisive for the accreditation, and to achieve an accreditation it is mandatory to have a qual-

ity system. Linde specialty gas plants are ISO 9000 certified. Please contact your local Linde office for more information on how Linde can serve you with reference material and services that are related to the ISO 17025 standard. Name HiQ code Certificate of calibration reference material (ISO 17025) 2920 Other reference material Reference materials and certified materials are defined in ISO Guide 30. A reference material (RM) is a material that is sufficiently established to be used, for example, for the calibration of an apparatus. A certified reference material (CRM) is a reference material whose property values are certified by a technically valid procedure and/or traceable to a certificate or other documentation that is issued by a certifying body. Industries such as the automotive industry are very dependent on clearing their products against local environmental legislation, for instance the rules of EPA in the US. EPA demands that calibration mixtures are traceable against National Institute for Standards and Technology (NIST). NIST and the Nederlands Meetinstituut (NMi) have a bilateral agreement on recognition of each other s mixtures that is ratified by EPA. Linde can supply you with products traceable to standards from various national certified bodies such as BAM, NMi, NPL and NIST. Most of Linde s mixtures are produced gravimetrical and are therefore traceable to the international kilo. Should this be one of your requirements and the product is not produced in this manner, traceability to the kilo can be obtained upon request. Please contact your local Linde office for more information on how Linde can provide you with reference material. Name HiQ code Certified body traceable analysis certificate (Traceable to e.g., BAM, NIST, NMi, NPL etc.) 2916 Kilogram traceable certificate (Primary standard) 2918 EPA protocol The EPA has established the EPA protocol strict guidelines for the performance of standard materials for emission measurements. In addition to the automotive industry standard product program EPA protocol mixtures, Linde can deliver EPA protocol gases for other purposes. Please contact your local Linde office for more information on how Linde can provide you with EPA protocol gases. Name HiQ code EPA protocol certificate 2919 Certificate of conformity Several processes and activities do not require individual analytical results. However, it might be important to guarantee that the product used complies with its nominal specifications. Linde can provide a certificate of conformity stating that an individual cylinder or an entire batch is meeting its specifications. Please contact your local Linde office for more information on how Linde can serve you with certificates of conformity. Name HiQ code Certificate of conformity 6322

Physical data. Physical and chemical information on pure gases. The aim throughout has been to present in a condensed form as large amount of accurate, reliable and up-to-date information on the fields of chemistry and physics for pure gases. Chemistry and physics, always closely related sciences, have been brought into more intimate relations by more recent results and research discoveries. The information contained herein can be used for a variety of tasks such as recalculation between volume and weight at a fixed temperature.

Physical data. Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) kg/l Density (20 C) kg/l Vapor pressure (20 C) bar Specific heat kj kg -1 K -1 Acetylene C 2 H 2 26.038 0.6179 0.3999 43.41 3.64 (15 C) Air, synthetic 28.96 Ammonia NH 3 17.031 0.6814 0.6091 8.56 4.4 ( 40 C) Argon Ar 39.948 1.3974 1.1 (b.p.) Arsine AsH 3 77.945 1.6205 1.3401 14.75 Boron trichloride BCl 3 117.17 1.3457 1.3291 1.32 Boron trifluoride BF 3 67.806 1.5716 1,3-Butadiene C 4 H 6 54.092 0.6508 0.6211 2.40 2.22 (15 C) n-butane C 4 H 10 58.123 20.602 0.5788 2.08 2.35 (15 C) iso-butane C 4 H 10 58.123 0.5949 0.5585 3.06 1.92 (15 C) 1-Butene C 4 H 8 56.107 0.6261 0.5944 2.57 2.25 (15 C) cis-2-butene C 4 H 8 56.107 0.6416 0.6227 1.81 iso-butene C 4 H 8 56.107 0.6274 0.5951 2.64 0.67 (15 C) trans-2-butene C 4 H 8 56.107 0.6275 0.6053 1.99 Carbon dioxide CO 2 44.01 1.1806 0.774 57.37 1.97 ( 20 C) Carbon monoxide CO 28.01 0.790 0.68 (b.p.) Carbonyl sulfide COS 60.076 1.1769 1.0068 11.06 Chlorine Cl 2 70.905 1.5622 1.4128 6.80 2.06 (b.p.) Cyanogen chloride CNCl 61.47 1.1969 1.1823 1.35 Cyclopropane C 3 H 6 42.081 0.6989 0.626 6.29 Deuterium D 2 4.032 0.1605 Diborane B 2 H 6 27.67 0.4288 Dichlorosilane SiH 2 Cl 2 101.01 1.2014 1.1773 1.52 Dimethylamine (CH 3 ) 2 NH 45.084 0.6704 0.6559 1.69 3.02 (0 C) Dimethyl ether C 2 H 6 O 46.069 0.7296 0.6633 5.09 2,2-Dimethylpropane C 5 H 12 2.59 0.6036 0.5918 1.46 Ethane C 2 H 6 30.07 0.5447 0.3385 37.70 3.79 (15 C) Ethene C 2 H 4 28.054 0.5698 Ethylene oxide C 2 H 4 O 44.053 0.8827 0.8696 1.47 Ethylamine C 2 H 5 NH 2 45.084 0.6869 0.6828 1.15 Ethyl chloride C 2 H 5 Cl 64.514 0.9064 0.8967 1.34 Fluorine F 2 37.997 1.5056 Helium He 4.003 0.124 4.01 (b.p.) Hydrogen H 2 2.016 0.0705 8.78 (b.p.) Hydrogen bromide HBr 80.912 2.1521 1.7571 21.80 0.92 (15 C) Hydrogen chloride HCl 36.461 1.1933 0.8231 42.02 1.70 (b.p.) Hydrogen fluoride HF 20.006 0.9552 0.954 1.03 Hydrogen sulphide H 2 S 34.082 0.943 0.7886 18.41 1.06 (21 C) Krypton Kr 83.8 2.4186 Methane CH 4 16.043 0.4241 3.45 (b.p.) Methylamine CH 3 NH 2 31.057 0.6946 0.6617 2.96 3.28 (-14 C) Methyl bromide CH 3 Br 94.939 1.7196 1.6755 1.84 Methyl chloride CH 3 Cl 50.487 1.0073 0.9232 4.96 1.57 (20 C) Methyl mercaptan CH 3 SH 48.109 0.8875 0.8689 1.70 1.85 (b.p.) Neon Ne 20.18 1.2039 1.85 (b.p.) Nitric oxide NO 30.006 1.2808 2.61 (b.p.) Nitrogen N 2 28.014 0.8078 2.06 (b.p.) Nitrogen dioxide NO 2 46.006 1.453 1.4552 0.96 1.55 (b.p.) Nitrogen trifluoride NF 3 71.002 1.540 Nitrous oxide N 2 O 44.013 1.2225 0.7848 51.27 1.74 (b.p.)

Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) kg/l Density (20 C) kg/l Vapor pressure (20 C) bar Specific heat kj kg -1 K -1 Octafluoropropane C 3 F 8 188.02 1.6047 1.345 7.69 0.97 (b.p.) Oxygen O 2 31.999 1.142 1.68 (b.p.) Phosgene COCl 2 98.916 1.4021 1.3743 1.59 Phosphine PH 3 33.998 0.7437 0.5071 35.17 Propadiene C 3 H 4 40.065 0.663 0.587 6.34 Propane C 3 H 8 44.097 0.583 0.5011 8.39 2.22 (b.p.) Propene C 3 H 6 42.081 0.6103 0.5112 10.25 2.57 (15 C) Propyne C 3 H 4 40.065 0.6721 0.6142 4.94 R 11 Trichlorofluoromethane CFCl 3 137.37 1.4795 1.4884 0.89 0.89 (30 C) R 12 Dichlorodifluoromethane CF 2 Cl 2 120.91 1.4858 1.3251 5.63 0.98 (30 C) R 13 Chlorotrifluoromethane CF 3 Cl 104.46 1.5229 0.9279 31.89 1.04 (-30 C) R 13 b1 Bromotrifluoromethane CF 3 Br 148.91 1.9927 1.5725 14.34 0.88 (25 C) R 14 Tetrafluoromethane CF 4 88.005 1.6067 R 21 Dichlorofluoromethane CHFCl 2 102.92 1.4057 1.3794 1.53 0.98 (b.p.) R 22 Chlorodifluoromethane CHF 2 Cl 86.468 1.4122 1.2125 8.97 1.28 (30 C) R 23 Trifluoromethane CHF 3 70.014 1.4514 0.8109 41.98 6.50 (25 C) R 114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F 4 170.92 1.5184 1.4706 1.84 1.03 (30 C) R 115 Chloropentafluoroethane C 2 ClF 5 154.47 1.5448 1.3114 8.00 1.19 (30 C) R 116 Hexafluoroethane C 2 F 6 138.01 1.5979 R 134a Tetraflouroethane C 2 H 2 F 4 102.03 1.375 1.224 5.71 1.40 (15 C) R 142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF 2 100.5 1.2002 1.1213 2.90 R 152a 1,1-Difluoroethane C 2 H 4 F 2 66.051 1.0141 0.9103 5.18 Silane SiH 4 32.117 0.5826 Silicon tetrafluoride SiF 4 104.08 Sulphur dioxide SO 2 64.065 1.4628 1.3808 3.36 Sulphur hexafluoride SF 6 146.06 1.8449 1.3744 21.61 0.67 (21 C) Trimethylamine (CH 3 ) 3 N 59.111 20.6552 0.6349 1.83 Tungsten hexafluoride WF 6 297.84 3.430 1.10 Vinyl bromide C 2 H 3 Br 106.95 1.523 1.512 1.18 0.90 (15 C) Vinyl chloride C 2 H 3 Cl 62.499 0.9658 0.9115 3.42 1.35 (20 C) Vinyl methyl ether C 3 H 6 O 58.08 0.7699 0.7508 1.74 2.14 (0 C) Xenon Xe 131.29 2.9537 0.34 (b.p.)

Physical data. Gas name Rel. spec. wgt, air = 1 (15 C, 1 bar) Density (15 C, 1 atm) kg/m 3 Gaseous state Specific heat (15 C) kj kg -1 K -1 Thermal conductivity µw cm -1 K -1 Solubility in water (at P = 1 bar) l/kg Acetylene 0.91 1.109 1.663 187 (0 C) 0.999 (20 C) Air, synthetic 1.0 1.21 1.01 255 (0 C) 0.018 Ammonia 0.59 0.728 2.071 221 (0 C) 692 (15 C) Argon 1.38 1.691 0.52 175 (0 C) 0.033 (20 C) Arsine 2.73 3.334 0.488 116 (0 C) 0.20 (20 C) Boron trichloride 4.19 5.162 0.526 86 (15 C) hydrolyzed Boron trifluoride 2.35 2.882 0.733 157 (0 C) 1,3-Butadiene 1.94 2.359 1.447 132 (0 C) 0.230 (20 C) n-butane 2.09 2.547 1.647 138 (0 C) 0.034 (20 C) iso-butane 2.08 2.537 1.611 140 (0 C) 0.032 (20 C) 1-Butene 2.01 2.449 1.489 130 (0 C) cis-2-butene 2.00 2.457 1.374 125 (15 C) iso-butene 2.01 2.448 1.553 144 (0 C) trans-2-butene 2.00 2.455 1.533 134 (15 C) Carbon dioxide 1.53 1.872 0.834 146 (0 C) 0.851 (20 C) Carbon monoxide 0.97 1.185 1.04 232 (0 C) 0.022 (20 C) Carbonyl sulfide 2.11 2.574 0.683 122 (0 C) Chlorine 2.49 3.042 0.477 80 (0 C) 2.3 (20 C) Cyanogen chloride 2.18 2.678 0.733 90 (15 C) Cyclopropane 1.48 1.812 1.27 143 (0 C) Deuterium 0.14 0.171 7.215 1,301 (0 C) Diborane 0.97 1.181 2.031 210 (0 C) Dichlorosilane 3.60 4.426 0.603 97 (15 C) hydrolyzed Dimethylamine 1.60 1.965 1.511 157 (15 C) 119 (60 C) Dimethyl ether 1.63 1.988 1.416 141 (0 C) 2,2-Dimethylpropane 2.59 3.193 1.614 140 (15 C) Ethane 1.05 1.283 1.723 180 (0 C) 0.047 (20 C) Ethene 0.98 1.194 1.496 180 (0 C) 0.120 (20 C) Ethylene oxide 1.55 1.911 1.054 121 (15 C) Ethylamine 1.61 1.572 (20 C) 162 (20 C) Ethyl chloride 2.29 2.819 0.944 108 (15 C) 1.99 (20 C) Fluorine 1.31 1.608 0.819 238 (0 C) Helium 0.14 0.169 5.193 1,460 (0 C) 0.0083 (20 C) Hydrogen 0.07 0.0852 14.242 1,606 (0 C) 0.0182 (20 C) Hydrogen bromide 2.82 3.45 0.36 79 (0 C) 467 (25 C) Hydrogen chloride 1.27 1.552 0.799 134 (0 C) 440 (20 C) Hydrogen fluoride 0.71 1.456 (20 C) Hydrogen sulphide 1.19 1.454 1.00 129 (0 C) 2.5 (20 C) Krypton 2.90 3.552 0.248 88 (0 C) 0.061 (20 C) Methane 0.55 0.68 2.201 300 (0 C) 0.033 (20 C) Methylamine 1.10 1.34 161 191 (0 C) 757 (25 C) Methyl bromide 3.34 4.106 0.439 71 (15 C) Methyl chloride 1.78 2.173 0.791 92 (0 C) 3.4 (0 C) Methyl mercaptan 1.70 2.084 1.028 127 (15 C) 11.2 (15 C) Neon 0.70 0.853 1.03 461 (0 C) 0.010 (20 C) Nitric oxide 1.04 1.27 0.999 235 (0 C) 0.046 (20 C) Nitrogen 0.97 1.185 1.04 235 (0 C) 0.015 (20 C) Nitrogen dioxide 2.75 0.815 (25 C) hydrolyzed Nitrogen trifluoride 2.46 3.015 0.75 (25 C) Nitrous oxide 1.53 1.873 0.868 155 (0 C) 0.610 (20 C)

Gas name Rel. spec. wgt, air = 1 (15 C, 1 bar) Density (15 C, 1 atm) kg/m 3 Gaseous state Specific heat (15 C) kj kg -1 K -1 Thermal conductivity µw cm -1 K -1 Solubility in water (at P = 1 bar) l/kg Octafluoropropane 6.53 8.163 0.769 100 (0 C) Oxygen 1.11 1.354 0.916 242 (0 C) 0.030 (20 C) Phosgene 3.50 4.308 0.577 83 (15 C) Phosphine 1.18 1.449 1.079 192 (0 C) 1.16 (24 C) Propadiene 1.41 1.725 1.467 136 (0 C) Propane 1.56 1.901 1.642 159 (0 C) 0.039 (20 C) Propene 1.48 1.809 1.498 150 (0 C) 0.182 (20 C) Propyne 1.42 1.728 1.487 137 (0 C) R 11 Trichlorofluoromethane 4.92 0.567 (25 C) 78 (25 C) 0.180 (25 C) R 12 Dichlorodifluoromethane 4.29 5.231 0.589 84 (0 C) 0.051 (25 C) R 13 Chlorotrifluoromethane 3.65 4.465 0.629 107 (0 C) 0.019 (25 C) R 13 b1 Bromotrifluoromethane 5.23 6.396 0.457 86 (0 C) 0.004 (25 C) R 14 Tetrafluoromethane 3.05 3.737 0.68 133 (0 C) 0.004 (25 C) R 21 Dichlorofluoromethane 3.65 4.493 0.582 81 (15 C) 2.070 (25 C) R 22 Chlorodifluoromethane 3.04 3.719 0.644 92 (0 C) 0.775 (25 C) R 23 Trifluoromethane 2.44 2.986 0.719 109 (0 C) 0.313 (25 C) R 114 1,2-Dichlorotetrafluorethane 6.12 7.532 0.673 105 (15 C) 0.017 (25 C) R 115 Chloropentafluoroethane 5.48 6.687 0.687 110 (0 C) 0.008 (25 C) R 116 Hexafluoroethane 4.84 5.912 0.755 299 (0 C) R 134a Tetraflouroethane 3.53 4.415 0.827 113 (0 C) R 142b 1-Chloro-1,1-difluoroethane 3.59 4.378 0.804 101 (0 C) R 152a 1,1-Difluoroethane 2.34 2.857 1.002 102 (0 C) Silane 1.12 1.366 1.307 insoluble Silicon tetrafluoride 3.61 4.431 0.696 Sulphur dioxide 2.26 2.759 0.617 85 (0 C) 38.2 (20 C) Sulphur hexafluoride 5.12 6.261 0.647 116 (0 C) 0.005 (25 C) Trimethylamine 2.10 2.59 1.514 143 (15 C) Tungsten hexafluoride 10.60 0.379 (25 C) Vinyl bromide 3.72 4.653 0.509 88 (0 C) Vinyl chloride 2.21 2.703 0.841 105 (0 C) Vinyl methyl ether 2.03 2.537 1.334 157 (15 C) Xenon 4.56 5.586 0.158 52 (0 C) 0.120 (20 C)

Physical data. Gas name Boiling point (1 atm) Critical point Flammability in air Temperature C Heat of vaporization kj/kg Temperature C Pressure bar Density kg/l Lower limit % volume Upper limit % volume Acetylene 84.15 634.2 35.17 61.391 0.2305 2.2 85.0 Air, synthetic 141.7 36.6 0.331 Ammonia 33.43 1,369.8 132.5 112.78 0.235 15.0 27.0 Argon 185.87 161.2 122.29 48.981 0.5356 n.a. n.a. Arsine 62.48 211.5 99.85 65.500 0.797 5.8 n.a. Boron trichloride 12.5 204.3 178.8 38.706 0.7899 n.a. n.a. Boron trifluoride 99.8 254.3 12.25 49.852 0.5486 n.a. n.a. 1,3-Butadiene 4.41 415.6 152.22 43.299 0.2449 2.0 12.0 n-butane 0.5 386 152.03 37.969 0.228 1.8 8.4 iso-butane 11.72 368.1 134.99 36.480 0.2213 1.8 8.4 1-Butene 6.25 400 146.44 40.196 0.2339 1.6 10.0 cis-2-butene 3.72 417.6 162.43 42.058 0.2398 1.7 9.7 iso-butene 6.89 395.9 144.75 39.990 0.2349 1.8 9.6 trans-2-butene 0.88 408.2 155.48 41.024 0.2356 1.7 9.7 Carbon dioxide 347.6 31.04 73.815 0.4682 n.a. n.a. Carbon monoxide 191.45 211 140.23 34.988 0.3009 12.5 74.0 Carbonyl sulfide 50.15 311.7 105.65 63.490 0.4447 12.0 29.0 Chlorine 34.03 287.9 144 77.108 0.573 n.a. n.a. Cyanogen chloride 12.85 435 175.85 59.900 0.3771 Cyclopropane 32.78 477.2 124.76 55.749 0.2585 Deuterium 249.5 293.2 234.8 16.617 0.0669 5.0 75.0 Diborane 92.5 516.8 16.65 40.530 0.1599 0.9 98.0 Dichlorosilane 8.3 249.5 175.85 44.300 0.443 4.1 98.8 Dimethylamine 6.88 590.8 164.5 53.094 0.2411 2.8 14.4 Dimethyl ether 24.84 468.1 126.95 53.702 0.271 3.4 27.0 2,2-Dimethylpropane 9.5 315.2 160.63 31.992 0.2377 1.4 7.5 Ethane 88.6 488.5 32.27 48.801 0.2033 3.0 12.4 Ethene 103.68 479.9 9.21 50.318 0.2174 3.1 32.0 Ethylene oxide 10.7 583.3 196.0 71.941 0.314 3.0 100.0 Ethylamine 16.58 606.6 183.0 56.235 0.2477 Ethyl chloride 12.27 383.6 187.2 52.689 0.3226 Fluorine 188.2 171.7 128.84 52.152 0.574 n.a. n.a. Helium 268.93 20.8 267.95 2.2750 0.0699 n.a. n.a. Hydrogen 252.76 442.8 239.97 13.130 0.0314 4.0 74.5 Hydrogen bromide 66.7 223.2 90 85.518 0.807 n.a. n.a. Hydrogen chloride 85 444.6 51.5 83.087 0.450 n.a. n.a. Hydrogen fluoride 19.52 49.7 188 64.848 0.2899 n.a. n.a. Hydrogen sulphide 60.35 554.2 100.38 89.629 0.3461 4.0 44.0 Krypton 153.35 108.4 63.8 55.020 0.9189 n.a. n.a. Methane 161.49 508.9 82.57 46.043 0.1616 5.0 15.0 Methylamine 6.33 840.7 156.9 74.575 0.2017 4.9 20.7 Methyl bromide 3.56 255.7 193.85 80.000 0.6086 10.0 16.0 Methyl chloride 24.22 426.8 143.1 66.793 0.3632 10.7 17.4 Methyl mercaptan 5.96 510.8 196.8 72.346 0.3318 4.0 22.0 Neon 246.06 84.8 228.75 26.530 0.4839 n.a. n.a. Nitric oxide 151.77 451.6 93 64.848 0.520 n.a. n.a. Nitrogen 195.8 197.9 147.05 33.944 0.3109 n.a. n.a. Nitrogen dioxide 20.85 828.5 158.2 101.33 0.5577 n.a. n.a. Nitrogen trifluoride 129 163 39.15 42.28 0.568 n.a. n.a. Nitrous oxide 88.48 390.9 36.42 72.447 0.452 n.a. n.a.

Gas name Boiling point (1 atm) Critical point Flammability in air Temperature C Heat of vaporization kj/kg Temperature C Pressure bar Density kg/l Lower limit % volume Upper limit % volume Octafluoropropane 36.75 104.8 71.9 26.8 0.6718 n.a. n.a. Oxygen 182.98 213.3 118.57 50.430 0.436 n.a. n.a. Phosgene 7.56 250.5 181.85 56.742 0.520 n.a. n.a. Phosphine 87.74 412.2 51.6 65.355 0.300 Propadiene 34.5 514.1 120 54.700 0.2473 Propane 42.04 426.3 96.67 42.492 0.2174 2.2 9.5 Propene 47.69 438.8 92.42 46.650 0.2234 2.0 10.5 Propyne 23.21 555.3 129.24 56.276 0.2443 1.7 12.0 R 11 Trichlorofluoromethane 23.82 183.1 198.05 44.076 0.5539 R 12 Dichlorodifluoromethane 29.79 170.4 111.8 41.249 0.5572 n.a. n.a. R 13 Chlorotrifluoromethane 81.41 149.4 28.81 39.460 0.5794 n.a. n.a. R 13 b1 Bromotrifluoromethane 57.89 117.7 67 39.719 0.7446 n.a. n.a. R 14 Tetrafluoromethane 128.06 132.8 45.65 37.389 0.6286 n.a. n.a. R 21 Dichlorofluoromethane 8.9 239.4 178.43 51.838 0.5251 n.a. n.a. R 22 Chlorodifluoromethane 40.83 233.5 96.15 49.710 0.5209 n.a. n.a. R 23 Trifluoromethane 82.16 237.3 25.74 48.362 0.5252 n.a. n.a. R 114 1,2-Dichlorotetrafluorethane 3.77 135.4 145.7 32.627 0.582 n.a. n.a. R 115 Chloropentafluoroethane 39.11 125.1 80 31.573 0.613 n.a. n.a. R 116 Hexafluoroethane 78.2 116.8 19.65 29.790 0.6161 n.a. n.a. R 134a Tetraflouroethane 26.0 216.6 101.15 40.64 0.5687 n.a. n.a. R 142b 1-Chloro-1,1-difluoroethane 10.01 223.5 137.05 41.239 0.4351 9.0 15.0 R 152a 1,1-Difluoroethane 25.8 329 113.45 44.988 0.3649 4.0 18.0 Silane 112.15 387.8 3.450 48.433 0.242 1.0 100 Silicon tetrafluoride 142.9 14.15 37.186 0.6308 n.a. n.a. Sulphur dioxide 10.02 385.4 157.6 78.841 0.5251 n.a. n.a. Sulphur hexafluoride 63.9 111 45.54 37.600 0.7357 n.a. n.a. Trimethylamine 2.87 396.6 160.1 40.733 0.2327 2.0 11.6 Tungsten hexafluoride 17.06 87.9 169.85 42.70 1.307 n.a. n.a. Vinyl bromide 15.8 231.1 199.85 71.8 0.593 24.9 Vinyl chloride 13.37 365.2 158.85 56.700 0.3492 4.0 22.0 Vinyl methyl ether 5.5 421.3 163.85 46.7 0.3162 2.6 39.0 Xenon 108.12 96.1 16.59 58.404 1.1126 n.a. n.a.

Physical data. Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) lb/ft 3 Density (70 F) lb/ft 3 Vapor pressure (70 F) psi Acetylene C 2 H 2 26.038 38.539 24.673 646.21 Air, synthetic 28.96 Ammonia NH 3 17.031 42.500 37.926 128.51 1.150 Argon Ar 39.948 87.158 73.351 Arsine AsH 3 77.945 101.074 83.396 219.32 Boron trichloride BCl 3 117.17 83.934 82.819 19.91 Boron trifluoride BF 3 67.806 98.024 89.022 1,3-Butadiene C 4 H 6 54.092 40.591 38.686 36.07 0.541 n-butane C 4 H 10 58.123 1,285.0 36.053 31.29 0.577 iso-butane C 4 H 10 58.123 37.105 34.780 45.81 0.576 1-Butene C 4 H 8 56.107 39.051 37.017 38.58 0.541 cis-2-butene C 4 H 8 56.107 40.018 38.794 27.26 0.540 iso-butene C 4 H 8 56.107 39.132 37.064 39.59 0.552 trans-2-butene C 4 H 8 56.107 39.138 37.706 29.94 Carbon dioxide CO 2 44.01 73.636 47.583 853.66 Carbon monoxide CO 28.01 49.274 40.831 Carbonyl sulfide COS 60.076 73.405 62.658 164.96 0.328 Chlorine Cl 2 70.905 97.437 87.990 101.64 Cyanogen chloride CNCl 61.47 74.653 73.667 20.41 0.360 Cyclopropane C 3 H 6 42.081 43.591 39.011 94.11 Deuterium D 2 4.032 10.010 62.179 Diborane B 2 H 6 27.67 26.745 82.819 Dichlorosilane SiH 2 Cl 2 101.01 74.934 73.351 22.90 0.310 Dimethylamine (CH 3 ) 2 NH 45.084 41.814 40.868 25.47 Dimethyl ether C 2 H 6 O 46.069 45.506 41.300 76.35 2,2-Dimethylpropane C 5 H 12 2.59 37.647 21.93 Ethane C 2 H 6 30.07 33.974 20.844 559.92 Ethene C 2 H 4 28.054 35.539 20.844 Ethylene oxide C 2 H 4 O 44.053 56.534 54.189 22.13 0.477 Ethylamine C 2 H 5 NH 2 45.084 55.055 42.541 17.45 Ethyl chloride C 2 H 5 Cl 64.514 42.843 Fluorine F 2 37.997 93.907 62.179 Helium He 4.003 7.734 73.351 Hydrogen H 2 2.016 4.397 76.162 Hydrogen bromide HBr 80.912 134.23 109.30 324.57 0.180 Hydrogen chloride HCl 36.461 74.428 51.028 625.37 Hydrogen fluoride HF 20.006 59.577 59.381 15.48 Hydrogen sulphide H 2 S 34.082 58.817 49.070 274.52 Krypton Kr 83.8 150.85 73.351 Methane CH 4 16.043 26.452 83.442 Methylamine CH 3 NH 2 31.057 43.323 41.218 44.63 Methyl bromide CH 3 Br 94.939 107.26 104.41 27.76 Methyl chloride CH 3 Cl 50.487 62.827 57.494 74.28 0.381 Methyl mercaptan CH 3 SH 48.109 55.355 54.150 25.67 Neon Ne 20.18 75.089 73.351 Nitric oxide NO 30.006 79.886 57.943 Nitrogen N 2 28.014 50.384 194.64 Nitrogen dioxide NO 2 46.006 90.626 90.668 14.66 Nitrogen trifluoride NF 3 71.002 96.053 49.070 Nitrous oxide N 2 O 44.013 76.250 48.457 761.88 Specific heat (70 F) BTU lb -1 F -1

Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) lb/ft 3 Density (70 F) lb/ft 3 Vapor pressure (70 F) psi Octafluoropropane C 3 F 8 188.02 100.09 83.586 115.05 Oxygen O 2 31.999 71.229 62.179 Phosgene COCl 2 98.916 87.452 85.639 24.00 Phosphine PH 3 33.998 46.386 31.441 522.11 Propadiene C 3 H 4 40.065 41.352 36.539 94.72 Propane C 3 H 8 44.097 36.363 31.175 125.24 0.630 Propene C 3 H 6 42.081 38.065 31.792 152.86 0.580 Propyne C 3 H 4 40.065 41.920 38.241 74.09 R 11 Trichlorofluoromethane CFCl 3 137.37 92.279 92.759 13.50 0.117 R 12 Dichlorodifluoromethane CF 2 Cl 2 120.91 92.672 82.478 84.23 0.231 R 13 Chlorotrifluoromethane CF 3 Cl 104.46 94.986 56.927 474.18 R 13 b1 Bromotrifluoromethane CF 3 Br 148.91 124.29 97.681 213.69 0.206 R 14 Tetrafluoromethane CF 4 88.005 100.21 56.927 R 21 Dichlorofluoromethane CHFCl 2 102.92 87.676 85.949 23.00 0.251 R 22 Chlorodifluoromethane CHF 2 Cl 86.468 88.082 75.430 134.12 0.294 R 23 Trifluoromethane CHF 3 70.014 90.527 49.324 625.58 R 114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F 4 170.92 94.706 91.599 27.43 0.155 R 115 Chloropentafluoroethane C 2 ClF 5 154.47 96.352 81.543 119.53 R 116 Hexafluoroethane C 2 F 6 138.01 99.664 81.543 R 134a Tetraflouroethane C 2 H 2 F 4 102.03 85.761 76.162 85.69 0.340 R 142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF 2 100.5 74.859 69.809 43.59 0.307 R 152a 1,1-Difluoroethane C 2 H 4 F 2 66.051 63.251 56.656 77.60 0.391 Silane SiH 4 32.117 36.338 31.441 Silicon tetrafluoride SiF 4 104.08 Sulphur dioxide SO 2 64.065 86.004 50.67 Sulphur hexafluoride SF 6 146.06 85.116 321.70 Trimethylamine (CH 3 ) 3 N 59.111 39.548 27.52 0.553 Tungsten hexafluoride WF 6 297.84 3.430 1.10 Vinyl bromide C 2 H 3 Br 106.95 94.220 17.74 Vinyl chloride C 2 H 3 Cl 62.499 56.785 51.26 0.324 Vinyl methyl ether C 3 H 6 O 58.08 46.780 26.27 Xenon Xe 131.29 73.351 Specific heat (70 F) BTU lb -1 F -1

Physical data. Gaseous state Gas name Rel. spec. wgt, air = 1 (59 F, 14.5 psi) Density (70 F) lb/ft 3 Specific heat (70 F) BTU lb -1 F -1 Thermal conductivity BTU h -1 ft -1 F -1 Solubility in water ft 3 /lb (at F) Acetylene 0.91 0.068 0.401 0.0121 0.0160 (68 F) Air, synthetic 1.0 0.075 0.239 0.0003 (68 F) Ammonia 0.59 0.044 0.497 0.0141 11.0947 (68 F) Argon 1.38 0.103 0.124 0.0107 0.0005 (68 F) Arsine 2.73 0.204 0.117 0.0074 0.0032 (68 F) Boron trichloride 4.19 0.315 0.127 0.0051 Boron trifluoride 2.35 0.176 0.177 0.0094 1,3-Butadiene 1.94 0.144 0.352 0.0088 0.0037 (68 F) n-butane 2.09 0.155 0.400 0.0092 0.0005 (68 F) iso-butane 2.08 0.155 0.392 0.0093 0.0005 (68 F) 1-Butene 2.01 0.149 0.361 0.0085 cis-2-butene 2.00 0.150 0.333 0.0076 iso-butene 2.01 0.149 0.376 0.0095 trans-2-butene 2.00 0.150 0.371 0.0081 Carbon dioxide 1.53 0.114 0.201 0.0093 0.0136 (68 F) Carbon monoxide 0.97 0.072 0.248 0.0143 0.0004 (68 F) Carbonyl sulfide 2.11 0.157 0.164 0.0077 Chlorine 2.49 0.186 0.114 0.0051 0.0369 (68 F) Cyanogen chloride 2.18 0.163 0.176 0.0053 Cyclopropane 1.48 0.111 0.311 0.0094 Deuterium 0.14 0.010 1.723 0.0791 Diborane 0.97 0.072 0.494 0.0137 Dichlorosilane 3.60 0.217 0.145 0.0058 Dimethylamine 1.60 0.120 0.366 0.0094 1.9079 (140 F) Dimethyl ether 1.63 0.121 0.343 0.0094 2,2-Dimethylpropane 2.59 0.195 0.394 0.0084 Ethane 1.05 0.078 0.418 0.0119 0.0008 (68 F) Ethene 0.98 0.073 0.362 0.0117 0.0019 (68 F) Ethylene oxide 1.55 0.117 0.257 0.0072 Ethylamine 1.61 0.122 0.379 0.0096 Ethyl chloride 2.29 0.0319 (68 F) Fluorine 1.31 0.098 0.196 0.0148 Helium 0.14 0.010 1.240 0.0882 0.0001 (68 F) Hydrogen 0.07 0.005 3.406 0.0983 0.0003 (68 F) Hydrogen bromide 2.82 0.211 0.086 0.0050 7.4873 (77 F) Hydrogen chloride 1.27 0.095 0.191 0.0083 7.0545 (68 F) Hydrogen fluoride 0.71 0.053 0.348 Hydrogen sulphide 1.19 0.089 0.239 0.0082 0.0401 (68 F) Krypton 2.90 0.217 0.059 0.0054 0.0010 (68 F) Methane 0.55 0.042 0.529 0.0191 0.0005 (68 F) Methylamine 1.10 0.082 0.389 0.0124 12.1369 (77 F) Methyl bromide 3.34 0.251 0.106 0.0042 Methyl chloride 1.78 0.133 0.191 0.0060 0.0545 (32 F) Methyl mercaptan 1.70 0.127 0.248 0.0076 0.1796 (59 F) Neon 0.70 0.052 0.246 0.0281 0.0002 (68 F) Nitric oxide 1.04 0.078 0.239 0.0145 0.0007 (68 F) Nitrogen 0.97 0.072 0.248 0.0144 0.0002 (68 F) Nitrogen dioxide 2.75 0.121 0.195 Nitrogen trifluoride 2.46 0.184 0.178 0.0122 Nitrous oxide 1.53 0.114 0.209 0.0099 0.0098 (68 F)

Gaseous state Gas name Rel. spec. wgt, air = 1 (59 F, 14.5 psi) Density (70 F) lb/ft 3 Specific heat (70 F) BTU lb -1 F -1 Thermal conductivity BTU h -1 ft -1 F -1 Solubility in water ft 3 /lb (at F) Octafluoropropane 6.53 0.498 0.186 0.0066 Oxygen 1.11 0.083 0.219 0.0150 0.0005 (68 F) Phosgene 3.50 0.263 0.139 0.0049 Phosphine 1.18 0.089 0.260 0.0121 0.0186 (75 F) Propadiene 1.41 0.105 0.355 Propane 1.56 0.116 0.399 0.0104 0.0006 (68 F) Propene 1.48 0.111 0.364 0.0099 0.0029 (68 F) Propyne 1.42 0.106 0.359 0.0091 R 11 Trichlorofluoromethane 4.92 0.135 0.0045 0.0029 (77 F) R 12 Dichlorodifluoromethane 4.29 0.319 0.142 0.0054 0.0008 (77 F) R 13 Chlorotrifluoromethane 3.65 0.273 0.152 0.0069 0.0003 (77 F) R 13 b1 Bromotrifluoromethane 5.23 0.391 0.110 0.0056 0.0001 (77 F)) R 14 Tetrafluoromethane 3.05 0.228 0.165 0.0085 0.0001 (77 F) R 21 Dichlorofluoromethane 3.65 0.274 0.140 0.0048 0.0332 (77 F) R 22 Chlorodifluoromethane 3.04 0.227 0.156 0.0060 0.0124 (77 F) R 23 Trifluoromethane 2.44 0.182 0.174 0.0069 0.0050 (77 F) R 114 1,2-Dichlorotetrafluorethane 6.12 0.459 0.162 0.0063 0.0003 (77 F) R 115 Chloropentafluoroethane 5.48 0.408 0.166 0.0071 0.0001 (77 F) R 116 Hexafluoroethane 4.84 0.361 0.183 0.0197 R 134a Tetraflouroethane 3.53 0.270 0.200 0.0074 R 142b 1-Chloro-1,1-difluoroethane 3.59 0.267 0.194 0.0066 R 152a 1,1-Difluoroethane 2.34 0.174 0.243 0.0066 Silane 1.12 1.115 0.083 0.316 Silicon tetrafluoride 3.61 0.271 0.168 Sulphur dioxide 2.26 0.169 0.148 0.0054 0.6125 (68 F) Sulphur hexafluoride 5.12 0.382 0.157 0.0076 0.0001 (77 F) Trimethylamine 2.10 0.158 0.367 0.0086 Tungsten hexafluoride 10.60 Vinyl bromide 3.72 0.284 0.123 0.0051 Vinyl chloride 2.21 0.165 0.204 0.0068 Vinyl methyl ether 2.03 0.155 0.0094 Xenon 4.56 0.341 0.038 0.0032 0.0019 (68 F)

Physical data. Gas name Boiling point (14.5 psi) Critical point Flammability in air Temperature F Heat of vaporization 70 F BTU/lb Temperature F Pressure psi(a) Density lb/ft 3 Lower limit % volume Upper limit % volume Acetylene 119.45 126.391 95.33 890.42 14.39 2.2 85.0 Air, synthetic 317.81 221.24 547.38 19.54 Ammonia 28.15 508.275 270.52 1,635.77 14.67 15.0 27.0 Argon 302.55 188.10 710.43 33.44 n.a. n.a. Arsine 80.44 70.307 211.75 950.02 49.75 5.8 n.a. Boron trichloride 54.52 85.871 353.86 561.40 49.31 n.a. n.a. Boron trifluoride 147.62 9.97 723.06 34.24 n.a. n.a. 1,3-Butadiene 24.08 167.210 306.02 628.01 15.29 2.0 12.0 n-butane 31.12 156.668 305.67 550.71 14.23 1.8 8.4 iso-butane 10.92 143.318 275.00 529.11 13.81 1.8 8.4 1-Butene 20.77 159.146 295.61 583.01 14.60 1.6 10.0 cis-2-butene 38.72 171.736 324.39 610.01 14.97 1.7 9.7 iso-butene 19.62 157.215 292.57 580.02 14.66 1.8 9.6 trans-2-butene 33.60 166.781 311.88 595.02 14.71 1.7 9.7 Carbon dioxide 69.81 61.891 87.89 1,070.62 29.23 n.a. n.a. Carbon monoxide 312.59 220.39 507.47 18.78 12.5 74.0 Carbonyl sulfide 58.25 107.332 222.19 920.87 27.76 12.0 29.0 Chlorine 29.23 108.285 291.22 1,118.38 35.77 n.a. n.a. Cyanogen chloride 55.20 183.806 348.55 868.80 23.54 Cyclopropane 26.98 176.402 256.59 808.59 16.14 Deuterium 417.07 390.62 241.01 4.18 5.0 75.0 Diborane 134.48 61.99 587.85 9.98 0.9 98.0 Dichlorosilane 46.96 104.154 348.55 642.53 27.66 4.1 98.8 Dimethylamine 44.40 244.023 328.12 770.08 15.05 2.8 14.4 Dimethyl ether 12.69 177.401 260.53 778.90 16.92 3.4 27.0 2,2-Dimethylpropane 49.12 131.442 1.4 7.5 Ethane 127.46 86.369 90.11 707.81 12.69 3.0 12.4 Ethene 154.60 48.60 729.82 13.57 3.1 32.0 Ethylene oxide 51.28 245.385 384.82 1043.44 19.60 3.0 100.0 Ethylamine 61.86 257.945 361.42 815.64 15.46 Ethyl chloride Fluorine 306.74 199.89 756.42 35.83 n.a. n.a. Helium 452.05 450.29 33.00 4.36 n.a. n.a. Hydrogen 422.95 399.93 190.44 1.96 4.0 74.5 Hydrogen bromide 88.04 69.029 194.02 1,240.36 50.38 n.a. n.a. Hydrogen chloride 120.98 113.120 124.72 1,205.10 28.09 n.a. n.a. Hydrogen fluoride 67.16 370.42 940.56 18.10 n.a. n.a. Hydrogen sulphide 76.61 182.314 212.70 1,299.99 21.60 4.0 44.0 Krypton 244.01 82.82 798.02 57.36 n.a. n.a. Methane 258.66 116.61 667.81 10.09 5.0 15.0 Methylamine 20.63 335.510 314.44 1,081.64 12.59 4.9 20.7 Methyl bromide 38.43 106.708 380.95 1,160.33 37.99 10.0 16.0 Methyl chloride 11.58 164.406 289.60 968.77 22.67 10.7 17.4 Methyl mercaptan 42.75 212.839 386.26 1,049.31 20.71 4.0 22.0 Neon 410.89 379.73 384.79 30.21 n.a. n.a. Nitric oxide 241.17 135.38 940.56 32.46 n.a. n.a. Nitrogen 320.42 232.67 492.33 19.41 n.a. n.a. Nitrogen dioxide 69.55 316.78 1,469.70 34.82 n.a. n.a. Nitrogen trifluoride 200.29 38.72 657.02 37.33 n.a. n.a. Nitrous oxide 127.24 70.666 97.58 1,050.78 28.22 n.a. n.a.

Boiling point (14.5 psi) Critical point Flammability in air Gas name Temperature F Heat of vaporization 70 F BTU/lb Temperature F Pressure psi(a) Density lb/ft 3 Lower limit % volume Upper limit % volume Octafluoropropane 34.13 33.672 161.44 388.72 39.26 n.a. n.a. Oxygen 297.34 181.41 731.44 27.22 n.a. n.a. Phosgene 45.63 104.449 359.35 822.99 32.46 n.a. n.a. Phosphine 125.91 116.744 124.90 947.92 18.73 Propadiene 30.08 186.405 248.02 793.37 15.44 Propane 43.65 146.960 206.03 616.31 13.57 2.2 9.5 Propene 53.82 147.470 198.38 676.62 13.94 2.0 10.5 Propyne 9.76 208.082 264.65 816.23 15.25 1.7 12.0 R 11 Trichlorofluoromethane 74.90 79.208 388.51 639.28 34.58 R 12 Dichlorodifluoromethane 21.60 61.154 233.26 598.28 34.78 n.a. n.a. R 13 Chlorotrifluoromethane 114.52 24.064 83.88 572.33 36.17 n.a. n.a. R 13 b1 Bromotrifluoromethane 72.18 35.406 152.62 576.09 46.48 n.a. n.a. R 14 Tetrafluoromethane 198.49 50.15 542.29 39.24 n.a. n.a. R 21 Dichlorofluoromethane 48.04 100.250 353.19 751.86 32.78 n.a. n.a. R 22 Chlorodifluoromethane 41.47 79.594 205.09 721.00 32.52 n.a. n.a. R 23 Trifluoromethane 115.87 33.395 78.35 701.45 32.79 n.a. n.a. R 114 1,2-Dichlorotetrafluorethane 38.81 55.491 294.28 473.23 36.33 n.a. n.a. R 115 Chloropentafluoroethane 38.38 41.375 176.02 457.94 38.27 n.a. n.a. R 116 Hexafluoroethane 108.74 67.39 432.08 38.46 n.a. n.a. R 134a Tetraflouroethane 14.78 78.666 214.09 589.45 31.69 n.a. n.a. R 142b 1-Chloro-1,1-difluoroethane 14.00 87.570 278.71 598.13 27.16 9.0 15.0 R 152a 1,1-Difluoroethane 14.42 121.954 236.23 652.51 22.78 4.0 18.0 Silane 169.85 25.81 702.48 15.11 1.0 100 Silicon tetrafluoride 139.25 6.55 539.35 39.38 n.a. n.a. Sulphur dioxide 13.98 152.612 315.70 1,143.52 32.78 n.a. n.a. Sulphur hexafluoride 83.00 28.302 113.99 545.35 45.93 n.a. n.a. Trimethylamine 37.19 162.632 320.20 590.80 14.53 2.0 11.6 Tungsten hexafluoride n.a. n.a. Vinyl bromide 60.46 98.433 391.75 1,041.39 33.38 24.9 Vinyl chloride 7.95 140.958 317.95 822.38 21.80 4.0 22.0 Vinyl methyl ether 41.92 174.163 326.95 677.34 17.27 2.6 39.0 Xenon 162.60 61.88 847.10 69.46 n.a. n.a.

Conversion tables. Dew point Moisture Dew point Moisture Dew point Moisture C F vpm mg/m 3 C F vpm mg/m 3 20.0 4.0 1,030 790 55.0 67.0 20.6 15.7 21.0 5.8 940 710 56.0 68.8 18.2 13.8 22.0 7.6 860 640 57.0 70.6 15.9 11.1 23.0 9.4 765 580 58.0 72.4 13.9 10.6 24.0 11.2 697 527 59.0 74.2 12.1 9.2 25.0 13.0 625 478 60.0 76.0 10.6 8.0 26.0 14.8 553 430 61.0 77.8 9.2 7.0 27.0 16.6 517 390 62.0 79.6 8.0 6.2 28.0 18.4 467 352 63.0 81.4 6.98 5.3 29.0 20.2 426 318 64.0 83.2 6.08 4.6 30.0 22.0 380 288 65.0 85.0 5.28 4.0 31.0 23.8 342 260 66.0 86.8 4.58 3.5 32.0 25.6 309 232 67.0 88.6 3.96 3.0 33.0 27.4 276 210 68.0 90.4 3.40 2.6 34.0 29.2 249 188 69.0 92.2 2.94 2.2 35.0 31.0 222 168 70.0 94.0 2.53 1.9 36.0 32.8 200 151 71.0 95.8 2.17 1.7 37.0 34.6 179 135 72.0 97.6 1.87 1.4 38.0 36.4 162 122 73.0 99.4 1.61 1.2 39.0 38.2 144 109 74.0 101.2 1.37 1.0 40.0 40.0 128 97 75.0 103.0 1.17 0.9 41.0 41.8 114 86 76.0 104.8 1.01 0.8 42.0 43.6 102 77 77.0 106.6 0.86 0.7 43.0 45.4 90 68.5 78.0 108.4 0.73 0.6 44.0 47.2 80 61.0 79.0 110.2 0.62 0.5 45.0 49.0 71.9 54.1 80.0 112.0 0.52 0.4 46.0 50.8 63.5 48.0 81.0 113.8 0.50 0.34 47.0 52.6 56.2 42.5 82.0 115.6 0.38 0.29 48.0 54.4 49.9 37.8 83.0 117.4 0.32 0.24 49.0 56.2 44.0 33.3 84.0 119.2 0.26 0.19 50.0 58.0 39.0 29.5 85.0 121.0 0.22 0.17 51.0 59.8 34.2 26.0 86.0 122.8 0.19 0.14 52.0 61.6 30.4 23.0 87.0 124.6 0.16 0.12 53.0 63.4 26.7 20.3 88.0 126.4 0.11 0.10 54.0 65.2 23.4 17.8 89.0 128.2 0.11 0.08

Pressure units (1 bar = 14.5 psi) psi bar kpa 1 0.07 7 2 0.14 14 5 0.34 34 10 0.69 69 20 1.38 138 30 2.07 207 50 3.45 345 100 6.89 690 300 20.68 2,068 500 34.47 3,447 1,000 68.95 6,895 2,000 137.90 13,790 4,000 275.79 27,579 bar psi kpa 0.1 1.45 10 0.5 7.25 50 1 14.50 100 2 29.00 200 5 72.52 500 10 145.03 1,000 20 290.06 2,000 50 725.15 5,000 100 1,450.30 10,000 200 2,900.60 20,000 300 4,350.90 30,000 400 5,801.20 40,000 Gas Mass Liquid 1 m 3 m 3 gas (+15 C, 1013 mbar) kg litre liquid (boiling point, 1013 mbar) Acetylene 1.0 1.11 Argon 1.0 1.69 1.21 Helium 1.0 0.169 1.35 Hydrogen 1.0 0.085 1.20 Carbon dioxide 1.0 1.87 2.29 Nitrogen 1.0 1.19 1.47 Oxygen 1.0 1.36 1.19 Propane 1.0 1.90 3.28 1 kg Acetylene 0.902 1.0 Argon 0.591 1.0 0.717 Helium 5.91 1.0 7.98 Hydrogen 11.74 1.0 14.10 Carbon dioxide 0.534 1.0 1.22 Nitrogen 0.843 1.0 1.24 Oxygen 0.738 1.0 0.876 Propane 0.525 1.0 1.72 1 litre liquid Acetylene Argon 0.825 1.39 1.0 Helium 0.741 0.125 1.0 Hydrogen 0.832 0.071 1.0 Carbon dioxide 0.436 0.818 1.0 Nitrogen 0.681 0.807 1.0 Oxygen 0.842 1.14 1.0 Propane 0.305 0.582 1.0 Tightness Leakage cm 3 /sec. (helium) time for leakage of 1 cm 3 helium at 1 atm 1 10 1 10.0 seconds 1 10 2 1.5 minutes 1 10 3 15.0 minutes 1 10 4 3 hours 1 10 5 30 hours 1 10 6 12 days 1 10 7 4 months 1 10 8 3 years 1 10 9 30 years 1 10 10 300 years 1 10 11 3,000 years 1 10 12 30,000 years ppm (part per million) percentage 1 ppm = 0.0001% 10 ppm = 0.001% 100 ppm = 0.01% 1,000 ppm = 0.1% 10,000 ppm = 1.0% 100,000 ppm = 10.0% 1,000,000 ppm = 100.0%

Material compatibility. Gas name Chemical formula Aluminum Buna N Brass Butyl rubber Carbon steel Copper Kel-F Monel Neoprene Nylon Polyethene PVC Stainless steel Teflon Viton Acetylene C 2 H 2 2 Air, synthetic Ammonia NH 3 1 Argon Ar Arsine AsH 3 Boron trichloride BCl 3 Boron trifluoride BF 3 1 1 1 1 1,3-Butadiene C 4 H 6 n-butane C 4 H 10 iso-butane C 4 H 10 1-Butene C 4 H 8 cis-2-butene C 4 H 8 iso-butene C 4 H 8 trans-2-butene C 4 H 8 Carbon dioxide CO 2 Carbon monoxide CO 4 Carbonyl sulfide COS 1 1 1 1 1 1 Chlorine Cl 2 Chlorine trifluoride ClF 3 12 10 12 10 10 Cyanogen CNCN Cyanogen chloride CNCl Cyclopropane C 3 H 6 Deuterium D 2 Diborane B 2 H 6 Dichlorosilane SiH 2 Cl 2 10 7 11 Dimethylamine (CH 3 ) 2 NH Dimethyl ether C 2 H 6 O 2,2-Dimethylpropane C 5 H 12 Ethane C 2 H 6 Ethene C 2 H 4 Ethylene oxide C 2 H 4 O Ethylamine C 2 H 5 NH 2 Ethyl chloride C 2 H 5 Cl 1 1 1 1 1 1 Fluorine F 2 Germane GeH 4 Helium He Hydrogen H 2 Hydrogen bromide HBr 1 1 5 1 Hydrogen chloride HCl 1 1 10 8 7 1 11 Hydrogen fluoride HF 3 9 10 3 7 11 Hydrogen selenide HSe Hydrogen sulfide H 2 S 1 1 10 1 11 Krypton Kr Methane CH 4 Methylamine CH 3 NH 2 Methyl bromide CH 3 Br 6 1 1 1 Methyl chloride CH 3 Cl 6 1 1 1 Methyl fluoride CH 3 F Methyl mercaptan CH 3 SH Neon Ne

Gas name Chemical formula Aluminum Buna N Brass Butyl rubber Carbon steel Copper Kel-F Monel Neoprene Nylon Polyethene PVC Stainless steel Teflon Viton Nitric oxide NO 1 1 1 1 Nitrogen N 2 Nitrogen dioxide NO 2 1 1 Nitrogen trifluoride NF 3 10 12 10 10 Nitrous oxide N 2 O Octafluoropropane C 3 F 8 Oxygen O 2 Phosgene COCl 2 1 1 7 1 Phosphine PH 3 Propane C 3 H 8 Propene C 3 H 6 Propyne C 3 H 4 R 11 Trichlorofluoromethane CFCl 3 R 12 Dichlorodifluoromethane CF 2 Cl 2 R 13 Chlorotrifluoromethane CF 3 Cl R 13 b1 Bromotrifluoromethane CF 3 Br R 14 Tetrafluoromethane CF 4 R 21 Dichlorofluoromethane CHFCl 2 R 22 Chlorodifluoromethane CHF 2 Cl R 23 Trifluoromethane CHF 3 R 114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F 4 R 115 Chloropentafluoroethane C 2 ClF5 R 116 Hexafluoroethane C 2 F6 R 142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF 2 R 152a 1,1-Difluoroethane C 2 H 4 F 2 7 Silane SiH 4 Silicon tetrafluoride SiF 4 9 1 10 3 7 11 Sulphur dioxide SO 2 1 1 1 10 1 1 11 Sulphur hexafluoride SF 6 Trimethylamine (CH 3 ) 3 N Tungsten hexafluoride WF 6 12 10 12 10 10 Vinyl bromide C 2 H 3 Br 1 Vinyl chloride C 2 H 3 Cl 1 1 1 1 1 1 Vinyl methyl ether C 3 H 6 O Xenon Xe Legend 1 Avoid in presence of moisture 6 Possible forming of spontaneously 10 <180 C (360 F) Good 2 <65% Cu flammable compounds 11 <250 C (480 F) Fair 3 Avoid in presence of oxygen 7 <50 C (120 F) 12 <400 C (750 F) Avoid 4 Up to 100 bar (1,450 psi) 8 <100 C (210 F) Data missing 5 In absence of oxygen 9 <150 C (300 F)

Index. A Accessories 217 centralized monitoring systems 218 contact gauges 220 gas cylinder trolley 224 mounting bracket 222 pressure transducers 220 wall mounting bracket 224 ACCURA cylinder management system 232 acetylene 72, 238, 252 air, synthetic 72, 238, 252 AISI 316L 215 alarms 12, 151 aluminum 252 ammonia 72, 238, 252 analysis certificate 234 analysis service 233 application safety training 233 argon 72, 238, 252 arsine 72, 238, 252 ASTM A 269 215 automatic gas supply 232 B BASELINE 6 C 106/1 102 C 106/2 106 C 106X/1 104 C 106X/2 108 R 104/1 126 boron trichloride 72, 238, 252 boron trifluoride 72, 238, 252 brass 252 Buna N 252 1,3-butadiene 72, 238, 252 n-butane 72, 238, 252 iso-butane 72, 238, 252 1-butene 72, 238, 252 cis-2-butene 72, 238, 252 iso-butene 72, 238, 252 trans-2-butene 72, 238, 252 butyl rubber 252 C carbon steel 252 carbon dioxide 72, 238, 252 carbon monoxide 72, 238, 252 carbonyl sulfide 72, 238, 252 central gas supply 9 certificate of conformity 235 chlorine 72, 238, 252 chlorine trifluoride 72, 252 CleanLine 6 B 25 bench/suspended mounting 86 I 25 inset design 82 P 25 panel mounting 80 W 25 wall mounting 84 compatibility 252 Components 111 R 104/1 126 R 12 122 R 12hv/1 124 R 200/1 112 R 200/2 116 R 200/F 114 R 200hv/2 118 R 40 120 R 480/1 144 V 1315 134 V 200 132 V 40 128 V 50 130 connections 7, 209, 228 contact gauges 220 containers 165 contents 3 conversion tables 250 copper 11, 252 cyanogen 72, 252 cyanogen chloride 72, 238, 252 cyclopropane 72, 238, 252 cylinder bundles 203 Cylinder connections ABNT 210 AFNOR 210 BS 341 211 CGA 211 DIN 477 212 IRAM 2539 212 ISO 5145 212 MIE 213 NEN 3268 213 UNI 213 cylinder management 232 Cylinder regulators BASELINE C 106/1 102 C 106/2 106 C 106X/1 104 C 106X/2 108 HiQ REDLINE C 12hv/1 70 C 200/1 64 C 200/2 66 C 200hv/2 68 Special cylinder regulators C 421/1 146 C 450/1 mini 148 C 490/1 142 cylinder trolley 224 cylinder types 203 cylinder valves 209 D detection 12 deuterium 72, 238, 252 dew point 250 diaphragm valve 209 diborane 72, 238, 252 dichlorosilane 72, 238, 252 dimethylamine 72, 238, 252 dimethyl ether 72, 238, 252 2,2-dimethylpropane 72, 238, 252 documentation 13 E ebusiness 231 ECOCYL RSH 198 ECOCYL VAH/VSH 200 EN 10216-5 215 EPA protocol 235 ethane 72, 238, 252 ethene 72, 238, 252 ethylamine 72, 238, 252 ethyl chloride 72, 238, 252 ethylene oxide 72, 238, 252 F fittings 209, 215 Gyrolok 215 Parker A-LOK 215 Swagelok 215 flow meter 98 fluorine 72, 238, 252 G gas cabinets 12, 152 gas detector 165 Gas panels double gas panel D 204 38 purge gas panels 2-valve purge gas panel 154

Index. 3-valve process gas panel 156 5-valve process gas panel 158 semi-automatic gas panels A 208 44 A 209 48 single gas panels S 200 16 S 201 20 S 202 26 S 203 32 gauge pressure 6 general symbols 6 germane 72, 252 gravimetrical production 235 H helium 74, 238, 252 high purity 11 HiQ Analysis certificate 234 HiQ codes 7 HiQ Gas Supply System Installations 227 HiQ REDLINE 6 central gas supply 9 components 111 cylinder regulators 63 gas panels 15 points of use 53 the right choice 72 HOGEN HGS, hydrogen generator 176 hydrogen 74, 238, 252 hydrogen bromide 74, 238, 252 hydrogen chloride 74, 238, 252 hydrogen fluoride 74, 238, 252 hydrogen selenide 252 hydrogen sulfide 74, 252 hydrogen sulphide 238 I inlet connections 209 installations - checklist 228 integrated flow valve 197 integrated regulator 197 K Kel-F 252 krypton 74, 238, 252 L leakage 251 M material compatibility 252 methane 74, 238, 252 methylamine 74, 238, 252 methyl bromide 74, 238, 252 methyl chloride 74, 238, 252 methyl fluoride 74, 252 methyl mercaptan 74, 238, 252 Monel 252 monitoring systems 218 mounting bracket (for BASELINE R 104/1) 222 N natural gas 74 neon 74, 238, 252 Neoprene 252 NIST 235 nitric oxide 74, 238, 253 nitrogen 74, 238, 253 nitrogen dioxide 74, 238, 253 nitrogen trifluoride 74, 238, 253 nitrous oxide 74, 238, 253 Nylon 252 O octafluoropropane 74, 239, 253 on-line ordering 231 operating economy 10 operation monitor 160 origami 1 outlet connections 214 oxygen 74, 239, 253 P phosgene 74, 239, 253 phosphine 74, 239, 253 physical data 237 pipe systems 12 Points of use CleanLine B 25 bench/suspended mounting 86 I 25 inset design 82 P 25 panel mounting 80 W 25 wall mounting 84 HiQ REDLINE B 40 bench design 56 I 40X inset design 60 L 40 fume cupboard design 58 W 40 wall design 54 Quick Connect connection points 90 flow meter 98 outlets 94 regulator 96 polyethene 252 Portable gas solutions 197 ECOCYL RSH 198 ECOCYL VAH/VSH 200 preface 5 pressure transducers 220 pressure units 251 propadiene 239 propane 74, 239, 253 propene 74, 239, 253 propyne 74, 239, 253 purge time 11 PVC 252 Q Quick Connect 6 connection points 90 flow meter 98 outlets 94 pressure regulator 96 R R 11, trichlorofluoromethane 74, 239, 253 R 12, dichlorodifluoromethane 74, 239, 253 R 13 b1, bromotrifluoromethane 74, 239, 253 R 13, chlorotrifluoromethane 74, 239, 253 R 14, tetrafluoromethane 74, 239, 253 R 21, dichlorofluoromethane 74, 239, 253 R 22, chlorodifluoromethane 74, 239, 253 R 23, trifluoromethane74, 239, 253 R 32, difluoromethane 76 R 114, 1,2-dichlorotetrafluorethane 76, 239, 253 R 115, chloropentafluoroethane 76, 239, 253 R 116, hexafluoroethane 76, 239, 253 R 134a, tetraflouroethane 239 R 142b, 1-chloro-1,1- difluoroethane 76, 239, 253 R 152a, 1,1-difluoroethane 76, 239, 253 reference material 234 returnable cylinders 203 roller conveyor 165 S safety 10 safety audits 233 Safety solutions 151 2-valve purge gas panel 154 3-valve process gas panel 156 5-valve process gas panel 158 containers 165 fully automatic 162 monitoring systems 218 operation monitor 160 standard cabinets 152 safety training 233 SECCURA automatic gas supply 232 service agreement 10 Services 231 silane 76, 239, 253 silicon tetrafluoride 76, 239, 253 Single stage cylinder regulators C 106/1 102 C 106X/1 104 C 12hv/1 70 C 200/1 64 C 421/1 146 C 450/1 mini 148 C 490/1 142 Special equipment C 421/1 146 C 450/1 mini 148 C 490/1 142 IntelliSwitch 138 R 480/1 144 STABLEFLOW HCS 140 Specialty gas generators 171 hydrogen generation system, HOGEN HGS 176 hydrogen no-maintenance 172 hydrogen pure gas 174 nitrogen (BORA mini) 180 nitrogen (ELSD generator) 182 nitrogen LC/MS 0 188

nitrogen LC/MS 4 186 nitrogen LC/MS Plus 184 nitrogen SIROCCO DS-PSA 178 Ultra Zero Air generator 190 Zero Air generator 192 specialty gas safety training 233 STABLEFLOW HCS 140 stainless steel 11, 252 standard purity 11 STP 6 sulphur dioxide 76, 239, 253 sulphur hexafluoride 76, 239, 253 system design 11 T Teflon 252 tightness 251 timesaving tools 231 traceabilty 235 training 233 trimethylamine 76, 239, 253 trolley (for gas cylinders) 224 tubings 209, 215 tungsten hexafluoride 76, 239, 253 turnkey deliveries 10 Two stage cylinder regulators C 106/2 106 C 106X/2 108 C 200/2 66 C 200hv/2 68 V vinyl bromide 76, 239, 253 vinyl chloride 76, 239, 253 vinyl methyl ether 76, 239, 253 Viton 252 W walkthroughs 233 wall mounting bracket 224 washer valve 209 web ordering 231 working environment 10 X xenon 76, 239, 253

Getting ahead through innovation. With its innovative concepts, Linde Gas is playing a pioneering role in the global market. As a technology leader, it is our task to constantly raise the bar. Traditionally driven by entrepreneurship, we are working steadily on new high-quality products and innovative processes. Linde Gas offers more. We create added value, clearly discernible competitive advantages, and greater profitability. Each concept is tailored specifically to meet our customers requirements offering standardized as well as customized solutions. This applies to all industries and all companies regardless of their size. If you want to keep pace with tomorrow s competition, you need a partner by your side for whom top quality, process optimization, and enhanced productivity are part of daily business. However, we define partnership not merely as being there for you but being with you. After all, joint activities form the core of commercial success. Linde Gas ideas become solutions. 15 $/15 12345678 0507 1.1 xy Linde AG Linde Gas Division, Seitnerstrasse 70, DE-82049 Pullach, Germany Phone +49.89.7446-0, Fax +49.89.7446-1230, www.linde-gas.com