Maury Device C naracterization Systems

Maury Device C naracterization Systems RF Device Characterization Systems Maury Microwave Has the Most Complete Selection of Load Pull Solutions! We Are Your Complete Measurement & Modeling Solutions Partner! In This Volume: RF Device Characterization Methods Accurate de-embedded performance evaluation of the power, intermodulation distortion, adjacent channel power, noise and network (S-parameter) characteristics of packaged or on-wafer devices under various conditions of impedance matching is the foundation of successful design, manufacture, and use of RF and microwave devices. Maury device characterization systems support the best industry-recognized test and measurement methods. Pitfalls To Avoid When Purchasing A Device Characterization System An automated device characterization system can greatly simplify test and measurement operations and quickly provide reliable empirically-based data for design and modeling of new products. But finding the right system is not simple. There are mistakes to be avoided if you are to maximize return on investment, achieve your test and measurement goals, and get your products to market. Here is some valuable advice from the experts at Maury. Device Characterization Software (IVCAD, ATSv5 and AMTSv2) Maury IVCAD software is the newest and most advanced measurement and modeling software in the market. It supports multiple load pull techniques, performs noise parameter, DC-IV and pulsed-iv measurements, and incorporates sophisticated device modeling tools. Maury's ATS software (ATSv5) includes a comprehensive set of upgrades, improvements, and additions to the classic ATS test and measurement tools. Maury's Automated Mobile Test System software (AMTSv2) is designed specifically to automate the testing of mobile phones in transmit and receive modes, for output power and sensitivity. It now includes support for GSM, WCDMA and CDMA2000. Load Pull and Noise Parameter Systems Maury offers fully integrated, automated tuner-based systems configured to operate from 0.25 to110 GHz. These complete turnkey systems can be customized to support Basic (power, gain and PAE) and Advanced Load Pull characterization (modulation, optimal ACPR, COP, and Harmonic LP). Maury Noise Parameter systems are available in electromechanical and solid state versions that can be customized to perform on-wafer or in-fixture noise parameter characterization at frequencies from 0.25 to 110 GI-Iz. Tuners, Controllers And Hubs Maury USB-controlled automated tuners and hubs are described in detail, with their respective specifications and applications. Accessories Maury offers a number of accessories to support your test bench needs, including automated tuner controllers, noise receiver modules, diplexers and triplexers, pre-matching probe mounts, manual tuners, and automated sliding shorts. Advanced Device Characterization Systems Maury now otters Mixed-Signal Active Load Pull systems, and the AMCAD Engineering PIV/PLP family of Pulsed IV systems. MAURY MICROWAVE CORPORATION 1 RF Device Characterization Systems

Systiarns You Have Load Pull Needs - Have You Covered! Maury Microwave Has the Most Complete Selection of Load Pull Solutions MAURY's Mixed-Signal Active Load Pull Allows Wideband Modulated Impedance Control for Base Station PAs Active and Hybrid Load Pull Using PNA-X Simplifies Harmonic Tuning with Gamma = 1 rl ser... 40 - a Niiii *13-2S Pulsed-Bias Pulsed-RF Harmonic Load Pull for GaN and Wide Band-Gap Devices N /- I X-Parameter Modeling for First-Pass Advanced Amplifier Design at over 200W1 Ultra-Fast Noise Parameter Method Gives More Accurate Results in Less Than 1/100th the Time to 110 GHz! Stability and Conformance Testing of Mobile Phones for GSM, CDMA, WCDMA... 0..., ;lir" Advanced Integration of On-Wafer Load Pull and Noise Parameters to 110 GHz USB and TCP-1P Tuners for Do-lt-Yourself Programing Using DLL or Direct ASCII Commands The Most Accurate and Repeatable Manual Tuners for Simple Tuning Requirements Maury Microwave - Your Complete Measurement & Modeling Solutions Partner On the Web at MAURYMW.0011/1 MAURY MICRO WAVE con p, c,r AT ion, 2900 Inland Empire Blvd., Ontario, California 91764 USA Tel: 909-987-4715 Fax: 909-987-1112 Email: maury@maurymw.com Agilent Technologies Port^:r

Contents Maury Device Characterization Solutions. RF Device Characterization Systemis Model Index 4-5 Introductory Information Pitfalls to Avoid When Purchasing An Automated Tuner System 6-7 General Information 8 About Maury Microwave 9 Maury's Strategic Alliances 10 Maury Microwave's ISO 9001:2008 Documentation 11 Calibration and Repair Services 12 Maury Automated Tuner Systems 13 RF Device Characterization Methods 14-15 Software Solutions IVCAD Advanced Measurement & Modeling Software MT930 Series - IVCAD Software Suite Overview 16 MT930A - IVCAD Basic Application 17 MT930B - IVCAD Visualization Suite 17 MT930C - IVCAD Vector-Receiver Load Pull 18-19 MT930D - IVCAD Traditional Load Pull 20 MT930E - IVCAD IV Curves for Load Pull 20 MT930F - IVCAD Basic S-Parameters 21 MT930G - IVCAD Time-Domain Waveforms 21 MT930H - IVCAD Active Load Pull 22 MT930J - IVCAD Pulsed IV Curves 23 MT930K - IVCAD Pulsed S-Parameters 23 MT930L - IVCAD Scripting Language 23 MT930M1 - IVCAD Linear Model Extraction 24 o tv1t930m2 - IVCAD Non-linear Model Extraction 25 MT930M3 - IVCAD Electro-thermal Model Extraction 26 MT993N - IVCAD Database Analysis 26 o MT930P - IVCAD Measurement Toolbox 16 ATSv5 Automated Tuner System Software iv11-993 Series SNPW - ATSv5 Automated Tuner System Software Overview 27 MT993A - Power Characterization Application Software 28 Noise Characterization Application Software 30 MT993B01 - Ultra-Fast Noise Parameter Measurement Option 31 MT993C - Combines MT993A and MT993B 27-28. 30 MT993D - Intermod Distortion (IMD), Adjacent Channel Power (ACP), and Error Vector Magnitude (EVM) 32 MT993D03 - Enhanced Time-Domain and X-Parameters Load Pull Application Software 33 MT993D04 - Active Load Pull 34 MT993E - Programmers Edition 36 MT993F - System Control Option 35 o MT993G - DC IV Curve Option 35 MT993N - Harmonic Source/Load Pull Option (Supports Triplexer/Diplexer and Cascaded Tuner Techniques) 35 MT993J - Fixture Characterization Option 35 MT993N06 - Tuner Characterization Option 20 MT993V01 - Tuner Interpolation DLL Option 36 MT993VO4 - Tuner Movement DLL Option 36 MT993R - Tuner Automation Environment 36 tv1t993 DLL Library 36 MAURY MICROWAVE CORPORATION =Cr AMTSv2 Automated Mobile Test System Software MT910 Series - Automated Mobile Phone Testing 37 MT910 - Mobile Phone Tester 38 MT910A - GSM Standard 38 MT910B - WCDMA Standard 38 MT910C - CDMA2000 Standard 38 Automated Tuners General Information 39 High-Gamma Automated Tuners (HGT" 1 40 High-Power Automated Tuners 42 7mm Automated Tuners 44 3.5mm Automated Tuners 46 2.4mm Automated Tuners 48 Millimeter-Wave Automated Tuners 50 Multi-Harmonic Automated Tuners 52 Accessories Automated Sliding Shorts Automated Sliding Shorts - MT999 Series 54 Pre-Matching Probe Mounts Pre-matching Probe Mounts - MT902A Series 56 Noise Receiver Modules Series Noise Receiver Modules - MT7553 Series 58 Triplexers & Diplexers Precision Low Loss Coaxial Triplexers - 9677( ) Series 60 Precision Low Loss Coaxial Diplexers - 9677D Series 61 Load Pull Test Fixtures MT964 Series Low-loss Test Fixtures for Power Applications 62 Manual Tuners General Information 64 Coaxial Stub Tuners 65 Coaxial Slide Screw Tuners - Wide Matching Range 66 Coaxial Slide Screw Tuners - Standard Matching Range 68 Waveguide Slide Screw Tuners - Standard Matching Range 69 Advanced Device Characterization Systems RF Device Characterization Systems Integration 70 Integrated Load Pull and Noise Measurement Systems 71 Mixed-Signal Active Load Pull Systems o MT2000 Series Mixed-Signal Active Load Pull Systems. 72 Pulsed IV Systems AMCAD Engineering's PIV/PLP Systems Family 75-79 3 RF Device Characterization Systems

RF Dev - Characterization Systems Model Index SOFTWARE PRODUCTS MT910 AMTSv2 - Automated Mobile Phone Tester 37-38 ti1t910a AMTSv2 - GSM Standard 38 MT910B AMTSv2 - WCDMA Standard 38 MT910C AMTSv2 - CD61A2000 Standard 38 AUTOMATED TUNERS ii11975a Millimeter Wave Automated Tuner (33-50 Gilt) 39, 40-41 MT977A Millimeter Wave Automated Tuner (50-75 GHz) 39, 42-43 MT978A Millimeter Wave Automated Tuner (60-90 GHz) 39, 44.45 MT979A Millimeter Wave Automated Tuner 39, 46.47 MT981AU11 High-Power Automated Tuner (0.25-2.5 Gift) 39, 42-43 MT930 NCAD - Advanced Measurement & Modeling Software 16 MT930A NCAD - Basic Application 17 MT930B NCAD - Visualization Suite 17 MT9300 (WAD - Vector-Receiver Load Pull 18-19 MT930D IVCAD - Traditional Load Pull 20 MT930E NCAD - IV Curves for Load Pull 20 MT930F NCAD - Basic S-Parameters 21 MT930G NCAD - Time-Domain Waveforms 21 MT930t1 NCAD - Active Load Pull 22 MT930J NCAD - Pulsed R! Curves 23 MT930K IVCAX - Pulsed S-Parameters 23 MT930L NCAD - Scripting Language 23 MT930M1 NCAD - Linear Model Extraction 24 MT930M2 NCAD - Non-linear Model Extraction 24 MT930 M3 (CAD - Electro-thermal Model Extraction 26 MT930N NCAD - Database Analysis 26 MT930P NCAD - Measurement Toolbox 16 ti1t981buxx High-Power Automated Tuners 39. 42-43 MT981BU10 High-Power Automated Tuner (0.4-4.0 GHz) 39, 42-43 MT981BU15 High-Power Automated Tuner (0.4-2.5 GHz) 39, 42-43 MT981BU16 High-Power Automated Tuner (0.4-2.5 GHz) 39, 42-43 MT981EU10 High-Power Automated Tuner (0.8-8.0 GHz) 39, 42-43 PAT981HU13 High-Gamma v l Automated Tuner (0.8-8.0 GHz) 39, 40-41 MT981HU23 High-Gamma TV Automated Tuner (0.8-8.0 GHz) 39, 40-41 MT981HU33 High-Gamma TV Automated Tuner (0.8-8.0 GHz) 39, 40-41 fr1t981htlxx High-Gamma TM Automated Tuners (HGT"il) 39, 40-41 MI9815 1/(110 High-Power Automated Tuner (0.4-2.5 GHz) 39, 42-43 MT982AUO2 7mm Automated Tuner (1.8-18.0 GHz) 39, 44-45 MT982BUO1 7mm Automated Tuner (0.8-18.0 GHz) 39, 44.45 MT982EU 7mm Automated Tuner (0.8-8.0 GHz) 39, 44-45 PAT982EU30 7mm Automated Tuner (0.8-8.0 GHz) 39, 44-45 MT982xU 7mm Automated Tuners 39, 44-45 tilt983a01 3.5mm Automated Tuner (4-26.5 GHz) 39, 46.47 MT984AU01 2.4mm Automated Tuner (8-50 GHz) 39, 48.50 MT982M01 Multi-Harmonic Automated Tuner (600 MHz -26 GHz) 39.52-53 MT993 ATSv5 Automated Tuner System Software 27 MT993A ATSv5 Power Measurement Software 28-29 MT993B ATSv5 Noise Parameter Measurement Software 30 MT993B01 ATSv5 - Ultra-Fast Noise Parameter Measurement Option 31 MT993C ATSv5 - Power & Noise Software Suite 27, 28, 30 Mt993D ATSv5 - IMD, ACP and EVM Option 32 MT993D03 ATSv5 - Entranced Time-Domain & X-Parameter Load Pull Option 33 fat993d04 ATSv5 - Active Load Pull 34 MT993E ATSv5 - Programmers Edition 36 MT993F ATSv5 - System Control Option 35 MT993G ATSv5 - DC IV Curve Option 35 MT993H ATSv5 - Harmonic Source/Load Pull Option 35 MT993J ATSv5 - Fixture Characterization Option 35 MT993N06 ATSv5 - Tuner Characterization Option 36 MT993R ATSv5 - Tuner Automation Environment 36 MT993401 ATSv5 - Tuner Interpolation DLL Option 36 MT993VO4 ATSv5 - Tuner Movement DLL Option 36 MANUAL TUNERS; STUB TUNERS 1719A Coaxial Double-Stub Tuner (SMA 0.4-1 GHz) 65 17196 Coaxial Double-Stub Tuner (SMA 0.8-4 GHz) 65 17190 Coaxial Double-Stub Tuner (SMA 4-18 GHz) 65 1778A Coaxial Double-Stub Tuner (Type N 0.4-1 GHz) 65 17788 Coaxial Double-Stub Tuner (Type N 0.8-4 GHz) 65 1778C Coaxial Double-Stub Tuner (Type N 2-12 GHz) 65 1778D Coaxial Double-Stub Tuner (Type N 4-18 GHz) 65 1778E Coaxial Double-Stub Tuner (Type N 2-18 GHz) 65 1778G Coaxial Double-Stub Tuner (Type N 0.2-0.5 GHz) 65 1819A Coaxial Triple-Stub Tuner (SMA 0.4-1 GHz) 65 18198 Coaxial Triple-Stub Tuner (SW 0.8-4 GHz) 65 18190 Coaxial Triple-Stub Tuner (SMA 2-18 Mit) 65 1819D Coaxial Triple-Stub Tuner (SMA 4-18 GHz) 65 1878A Coaxial Triple-Stub Tuner (Type N 0.4-1 GHz) 65 18788 Coaxial Triple-Stub Tuner (Type N 0.8-4 GHz) 65 1878C Coaxial Triple-Stub Tuner (Type N 2-12 GHz) 65 MAURY MICROWAVE CORPORATION 4 RF Device Characterization Systems

RF Device Characterization Systehiiii: MANUAL TUNERS; STUB TUNERS (continued) 1878D Coaxial Triple-Stub Tuner (Type N 4-18 GHz) 65 1878G Coaxial Triple-Stub Tuner (Type N 0.2-0.5 GHz) 65 261281 Coaxial Triple-Stub Tuner (7mm 0.4-1 Gtiz) 65 261282 Coaxial Triple-Stub Tuner (7mm 0.8-4 GHz) 65 261283 Coaxial Triple-Stub Tuner (7mm 2-12 GHz) 65 261284 Coaxial Triple-Stub Tuner (7mm 4-18 GHz) 65 2612C1 Coaxial Double-Stub Tuner (7mm 0.4-1 GHz) 65 2612C2 Coaxial Double-Stub Tuner (7mm 0.8-4 GHz) 65 261203 Coaxial Double-Stub Tuner (7mm 2-18 Gtiz) 65 2612C4 Coaxial Double-Stub Tuner (7mm 4-18 Gtiz) 65 2612C7 Coaxial Double-Stub Tuner (7mm 0.2-0.5 GHz) 65 MANUAL TUNERS; COAXIAL SLIDE SCREW TUNERS 1643C Coaxial Slide Screw Tuner (Type N 0.9-12.4 GHz) 68 1643D Coaxial Slide Screw Tuner (Type N 1.8-18 Gtiz) 68 1643D1 Coaxial Slide Screw Tuner (Type N 1.8-18 GHz) 66 1643N Coaxial Slide Screw Tuner (Type N 0.8-8 GHz) 66 1643P Coaxial Slide Screw Tuner (Type N 0.8-18 GHz) 66 24408 Coaxial Slide Screw Tuner (14mm 0.8-8 Gtiz) 66 2440C Coaxial Slide Screw Tuner (14mm 0.4-4 GHz) 66 2640C Coaxial Slide Screw Tuner (7mm 0.9-12.4 GHz) 68 2640D Coaxial Slide Screw Tuner (7mm 1.8-18 GHz) 68 2640D1 Coaxial Slide Screw Tuner (7mm 1.8-18 Gtiz) 66 2640N Coaxial Slide Screw Tuner 7mm 0.8-8 GHz) 66 2640P Coaxial Slide Screw Tuner (7mm 0.8-18 GHz) 66 27408 Coaxial Slide Screw Tuner (7-16 0.8-8 GHz) 66 2740C Coaxial Slide Screw Tuner (7-16 0.4-4 Gtiz) 66 7941A Coaxial Slide Screw Tuner (2.4mm 12-50 GI-1z) 66 80418 Coaxial Slide Screw Tuner (3.5mm 12-26.5 GHz) 68 8041 C Coaxial Slide Screw Tuner (3.5mm 12-34 GHz) 66 8045C Coaxial Slide Screw Tuner (3.5mm 0.9-12.4 GHz) 68 8045D Coaxial Slide Screw Tuner (3.5mm 1.8-18 GHz) 68 8045D1 Coaxial Slide Screw Tuner (3.5mm 1.8-18 Gtiz) 66 8045N Coaxial Slide Screw Tuner (3.5mm 0.8-8 GHz) 66 8045P Coaxial Slide Screw Tuner (3.5mm 0.8-18 Gtiz) 66 MANUAL TUNERS; WAVEGUIDE SLIDE SCREW TUNERS X353 Waveguide Slide Screw Tuner (ViR90 8.2-12.4 Gtiz) 69 X353 Waveguide Slide Screw Tuner (V/R62 12.5-18 GHz) 69 ACCESSORIES MT7553 Noise Receiver Module (10 MHz - 110 Gtiz) 58-59 MT7553B Noise Receiver Module (10 MHz - 50 GHz) 58-59 MT7553B01 Noise Receiver Module (10 MHz - 50 GHz) 58-59 MT7553M10 Noise Receiver Module (75-110 GHz) 58-59 MT7553M12 Noise Receiver Module (60-90 GHz) 58-59 MT7553M15 Noise Receiver Module (50-75 Gtiz) 58-59, 71 MT964A1 7mm Load Pull Test Fixture (100 MHz - 18 Gtiz) 62-63 MT964A2 3.5mm Load Pull Test Fixture (100 MHz - 18 GHz) 62-63 MT964B1 7mm Load Pull Test Fixture (800 MHz - 18 GHz) 62-63 MT964B2 3.5mm Load Pull Test Fixture (800 MHz - 18 Gtiz) 62-63 MT986A ATS Tuner Controller (GPIB) 36 t,1t986b ATS Tuner Controller (GPIB) 36 MT986C ATS Tuner Controller (GPIB) 36 MT10208 ATS Power Distribution Hub 36, 40-41, 42-43, 48-49 MT1020C ATS Power Distribution Hub 36, 46-47, 51-52, 54-55 MT1020D ATS Desktop Switching Power Supply 40-41, 42-43, 48-49 MT902A1 Basic Pre-Matching Probe Mount (DC-50 GHz)) 56-57 MT902A2 High-Freq. Pre-Matching Probe Mount (21.5-50 GHz) 56-57 MT902A3 Low-Freq. Pre-Matching Probe Mount (8-21.5 GHz) 56-57 MT902A5 Basic Pre-Matching Probe Mount (DC-50 GHz)) 56-57 MT902A6 High-Freq. Pre-Matching Probe Mount (21.5-50 GHz) 56-57 MT902A7 Low-Freq. Pre-Matching Probe Mount (8-21.5 Gtiz) 56-57 MT999A Automated Sliding Short (0.8-7.5 GHz) 54-55 MT999B Automated Sliding Short (3.0-18 GHz) 54-55 9677x Precision Low Loss Coaxial Triplexers 60 9677Dxx Precision Low Loss Coaxial Diplexers 61 RF DEVICE CHARACTERIZATION SYSTEM INTEGRATION MT900 Probe Station Integration 70 ADVANCED RF DEVICE CHARACTERIZATION SYSTEMS MT2000A Mixed-Signal Active Load Pull System (400 MHz - 18 GHz). 72-74 MT2000B Mixed-Signal Active Load Pull System (400 MHz - 18 GHz).. 72-74 MT2000C Mixed-Signal Active Load Pull System (1-26 GHz) 72-74 MT2000D Mixed-Signal Active Load Pull System (1-26 GHz) 72-74 AMCAD ENGINEERING PULSED IV SYSTEMS PIV AMCAD Pulsed IV Systems 75-79 PLP AMCAD Pulsed IV Systems 75-79 X353 Waveguide Slide Screw Tuner (V/R42 18-26.5 GHz) 69 X353 Waveguide Slide Screw Tuner (V/R28 26.5-40 GHz) 69 X353 Waveguide Slide Screw Tuner (V/R22 33-50 Gtiz) 69 MAURY MICROWAVE CORPORATION 5 RF Device Characterization Systems

ev cie CI; aracter z SyStioniii - Pitfalls 'o Avoid When Purchasing Athomated Tuner System What Really Matters in Choosing a Tuner-Based Measurement and Characterization System? How do you choose between the various passive solid-state and passive-mechanical systems on the market today. What about active-injection systems? What really matters in choosing an automated tuner system? The answer depends on your application requirements and measurement goals. Tuner characteristics are very important, but their relative priority depends on how well specific tuner attributes meet the needs of your measurement and characterization applications. For example, while passivemechanical tuner systems can be used for both noise and power characterization, a passive solid-state system - due to its smaller module size and higher-speeds - might be a better choice for high speed on-water lot-tracking of low-noise CMOS processes. Similarly, a passive-mechanical tuner system is necessary for very high power applications, roughly anything over 1 ohm or so. Active-injection systems are primarily found in mm-wave applications where cabling and wafer-probe losses are high. Assuming you know which system architecture best meets your needs, what distinguishes one manufacturer's products from another's? What are the pitfalls to look out for when choosing a system? Pitfall #1. Avoid choosing a tuner-based system that doesn't score high on repeatability. Because passive tuner-based systems rely on a priori characterization of tuner impedances, the ability to repeat tuner impedance states is critically important in ensuring the accuracy and meaningfulness of device characterization data. Use of inaccurate impedance data in matching network synthesis or model verification will lead to differences in measured or simulated performance with respect to performance reported by the automated tuner system. A good system, like the Maury passive-mechanical tuner systems in this catalog, typically exhibit better than -60 db and -70 db repeatability to 50 GHz. Since this exceeds VNA calibration uncertainty by a wide margin, Maury's automated tuners are essentially transparent in terms of repeatability. When considering a tuner's repeatability, don't be fooled by "creative" specifications. Maury tuner repeatability is determined by measuring the actual "worst case" error between any two measurements at the same impedance position for more than 13,000 impedance positions over the entire frequency range and full matching range of the tuner. Compare that to other manufacturers who advertise the "average" repeatability of their tuners. Any tuner's average repeatability error vector can be made to look better than its worst case error vector. Relying on the average can provide a misleading, and inaccurate picture of the tuner's performance. Pitfall #2. Avoid choosing a tuner-based system that lacks sufficient impedance range and distribution. Impedance range, often called matching range or mismatch range, refers to the impedance range a tuner can present. This is a critical characteristic for high-power applications, where sub 1 ohm impedances are often encountered. Impedance distribution refers to coverage of impedance points over the Smith chart and the distribution of those points within that region. Pitfall #3. Avoid choosing a tuner-based system with slow tuning speed. Tuning speed refers to the time it takes a tuner to move from one impedance state to the next. This is a critical characteristic when making measurements, such as collecting lot-tracking data for a low-noise process. Total measurement time, at each impedance, is a function of measurement equipment and the type of measurements being made, plus the inherent tuning speed. Pitfall #4. Avoid choosing a tuner-based system with insufficient power capability. Power capability refers to both the maximum rms and peak power that can be delivered to a tuner without any appreciable change in tuner impedance or any damage to the tuner. A high tuner insertion loss results in heating of tuner elements, which can perturb the calibrated impedance seen by the deviceunder-test (DUT). An improperly designed tuner, along with certain classes of RF connectors, can exhibit corona discharge or arcing, resulting in damage to the tuner or the DUT. Pitfall #5. Avoid choosing a tuner-based system with insufficient resolution. Tuner resolution refers to the number of impedance points that can be synthesized by the tuner. Solid-state tuner systems are usually composed of two individual cascaded tuners, each with a few hundred points, resulting in over 500,000 tuning points. Passive-mechanical tuner systems typically exhibit 10,000 points using one tuner. This can be expanded to millions of points using cascaded tuners or interpolation. How much resolution is enough? It depends. Consider a typical transistor used as a final-stage for a 3.2 V GSM PA. The load impedance needed for this transistor to deliver 35 dl3m is about 2 ohms. Normal manufacturing targets for supply voltage change over battery charge-time require an impedance resolution, DIG', of about 0.009. Even in the extreme case of uniform coverage in the gamma-domain, this tuning resolution requires only 50,000 impedance states, which can easily be achieved using Maury passive solid-state or passive-mechanical tuners. MAURY MICROWAVE CORPORATION 6 RF Device Characterization Systems

%.. RP Device Characterization Systems Pitfall #6. Avoid choosing a tuner-based system with insufficient bandwidth. Tuner bandwidth usually refers both to the frequency range of the tuner and to its instantaneous bandwidth. Tuner frequency range refers to the bandwidth over which the tuner is able to present its specified impedances. Both passive solid-state and passive-mechanical usually exhibit at least a decade of operating range. Instantaneous bandwidth refers to the modulation envelope within which impedance remains constant. This is an important parameter for wideband modulation formats such as WCDMA. Maury passive-mechanical tuners are based on a slab transmission line loaded by a pair of shunt sliding-shorts, or probes. A precision stepper motor controls the distance of the probes from the center conductor, and another stepper motor controls distance of the probe assembly from the load. One probe operates at the low end of the tuner's frequency range, and the other at the upper end. The paired probes provide overlapping high and low coverage to increase the tuner's operating bandwidth to over a decade. The physical resolution of the probe assembly coupled with advanced interpolation algorithms, enable users to synthesize millions of impedance points across the tuner's full bandwidth. Pitfall #7. Don't overlook the importance of tuner size and case of integration. Tuner size can be very important in certain applications, as is the potential difficulty or complexity of their integration into a test setup. These factors are more often a concern when the setup is on a probe station and the application(s) are to be done on-wafer and at high speed. In such an environment, in situ calibration is normally used, and acoustic vibrations may be a concern. Most passive-mechanical tuners require special mounting plates, and/or probe extensions to accommodate their physical dimensions. Pitfall #8. Avoid choosing a tuner-based system whose manufacturer offers insufficient after-sale support. After-sale support is as critical in the device characterization field as it is anywhere. Unfortunately, not all manufacturers are as prepared, or as good, at supporting their products as they are at selling them. Low price always seems good at the time of purchase, but may be hiding a high cost to be paid in time lost while waiting for support. Be sure to satisfy yourself that the company behind your tuner-based system has the commitment to customer support that you are entitled to. Conclusion The factors impacting your choice of tuner-based measurement systems are mostly determined by the requirements of your applications. Once you know what system architecture best suits your needs, choosing the right tuner system depends a great deal on what you know about who makes it and how they address the issues of bandwidth, repeatability, tuner speed, impedance range and distribution, power capability, and tuner size and ease of integration. No two systems are exactly alike, because the applications they serve are almost always unique. Hopefully, the information in this article will help you in making what is always a complicated choice. When you're ready, Maury's team of system integration specialists is here to help you build a device characterization system that is tailored to your needs an that will provide you with the highest level of Confidence in Measurement. MAURY MICROWAVE CORPORATION 7 RF Device Characterization Systems

Device CharSeterizatIon Systems General [Information How To Order Maury Products Orders may be placed directly with the factory or in care of your nearest Maury sales representative. For orders originating outside the United States, we recommend placing the order through your local Maury sales representative. Maury maintains an extensive network of sales representatives throughout the world. To find your local Maury sales representative use the interactive index on our web site at maurymw.com/srx.htm. Pricing and Quotations Prices for Maury products are those prevailing when an order is placed except when the price is established by formal quotation. Maury Microwave reserves the right to change prices at any time without notice. Price and availability of products with custom or special features must be verified by a valid, formal factory quotation. Maury quotations are valid for a maximum of 30 days. Extensions beyond 30 days can be granted only by the factory. Terms of Sale Domestic terms are net 30 clays from the date of invoice for customers with established credit F.O.B. Ontario, California. Please refer to Maury Form 228 for complete terms and conditions. For International sales, please refer to Maury Form 250. Sales to Canada are covered by Maury Form 251. These forms are available on request, or may be found on our web site in PDF format. Shipment All shipments are at the buyer's expense. Shipments are normally made using methods and carriers specified by the customer. In the absence of specific instructions, Maury will ship at our discretion by the most advantageous method. All shipments are F.O.B. the Maury factory in Ontario, California (U.S.A.) and, unless otherwise specified, will be insured at full value at the customer's expense. Shipments are packed to provide ample safety margin against transit damage, and there is no charge for regular packing requirements. Additional charges apply to MIL- SPEC preservation, packaging, packing and marking. Product and Specifications Changes The information, illustrations and specifications contained in this catalog were current at the time of publication. Maury Microwave is continually striving to upgrade and improve our product offering and therefore, reserves the right to change specifications, designs and models without notice and without incurring any obligation to incorporate new features on products previously sold. Because products are changed or improved with time, please consult your local Maury representative, or our Sales Department, for current pricing and product information before placing orders. Product Selection Maury representatives and sales office personnel are well qualified to provide assistance in product selection, and current pricing and availability. Our factory applications engineers are ready to assist you with any technical or applications questions you may have. Service and Support Warranty Maury Microwave is highly confident that our products will perform to the high levels that our customers have come to expect. As an expression of that confidence, our products are warranted as noted in the abbreviated warranty statements below. (For a complete statement of the hardware warranty, please see Form 228, Terms and Conditions of Sales. For a complete statement of the software warranty, please see Form 273, Maury License Agreement.) Maury Microwave hardware products are warranted against defects in material and workmanship for a period of one year after delivery to the original purchaser. If a Maury manufactured hardware product is returned to the factory with transportation prepaid and it is determined by Maury that the product is defective and under warranty, Maury will service the product, including repair or replacement of any defective parts thereof. This constitutes Maury's entire obligation under this warranty. Maury warrants that, for a period of ninety (90) days following purchase, software products, including firmware for use with and properly installed on a Maury designated hardware product, will operate substantially in accordance with published specifications, and that the media on which the product is supplied is free from defects in material and workmanship. Maury's sole obligation under this warrant}, is to repair or replace a nonconforming product andor media, provided Maury is notified of nonconformance during the warranty period. Maury does riot warrant that the operation of the product shall he uninterrupted or error-free, nor that the product will meet the needs of your specific application. The warranty does not apply to defects arising from unauthorized modifications, misuse or improper maintenance of the product. Warranty service is available at our facility in Ontario, California. Service Returns Repair and calibration services are available for Maury products for as long as replacement parts are available. On sonic instruments, support services may be available for up to ten years. Quality Profile Maury Microwave Corporation enjoys a well-earned reputation for excellent, technically advanced products that are reliable, meet specifications, arid provide a quality appearance. Maintaining and improving this reputation requires adherence to strict quality standards that are set forth in a formal Quality Department Manual. This manual is distributed to all Maury managers, inspectors, and technicians. The Quality Manual can he reviewed by our customers at our facility in Ontario, California. Our inspection and calibration systems are in accord with MIL-I- 45208A and MIL-STD-45662A, respectively. Our overall quality system has been approved through in-house surveys by many of our customers including the U.S. Government. Our laboratory is ANSI/NCSL Z540-1 compliant with traceability to NISI. MAURY MICROWAVE CORPORATION IS AN 1 SO 9001:2000/AS9100:2004 REGISTERED COMPANY. MAURY MICROWAVE CORPORATION 8 RF Device Characterization Systems

RF Device Characterization Elysterne About Maury Microwave Corporate Profile Maury and Associates was founded by Mario A. Maury, in Montclair, California on October 15, 1957. With the help of his sons, Mario A. Maury, Jr. and Marc A. Maury, the company earned a solid reputation in the microwave test, measurement and calibration industry. Today, after more than 53 years we serve our customers as Maury Microwave Corporation. We are proud of our company and the products we make, we are dedicated to the pursuit of quality, and we are committed to providing the very best in customer service. Markets Served Maury Microwave serves all areas of the RF and microwave industry, producing a comprehensive line of automated tuners, microwave components and accessories that operate from DC to 110 GHz. Our offering includes a wide range of test and measurement products that are used extensively by the wireless communication industry for power and noise characterization of transistors and amplifiers. Our precision calibration standards are used for test and measurement applications and production testing. Maury also produces system components for ground based and airborne applications such as communications, RV/ ECM systems, and radar. Manufacturing Technologies Our factory is equipped with the latest 7-axis CNC machines and can handle high volume production as well as high precision small-quantity manufacturing. We maintain a state-of-the-art microwave laboratory using the latest test equipment and vector network analyzers to support our test and calibration operations. Our in-house manufacturing and testing capabilities allow us to provide custom products tailored to our customers' specific requirements. Business Alliances As a leader in the RI' and microwave calibration and measurement field, Maury has long been recognized for the accuracy, repeatability, and stability of our products. Agilent Technologies acknowledged this in September, 2001 by inviting Maury Microwave to become a Channel Partner for device characterization solutions. The ongoing success of that relationship led to Maury's current recognition as an Agilent Global Solutions Partner. We also enjoy close business ties with Cascade Microtech of Beaverton, Oregon and Inter-Continental Microwave of Chandler, Arizona. Technical Services Our extensive knowledge and experience with calibration and measurement requirements provides the expertise necessary for producing high quality products. Maury Calibration and Repair Services are available for every product we make, and are performed in a temperature-controlled environment with the latest in measurement and verification equipment. Products & Technologies Maury makes RF and microwave devices that cover a range from DC to 110 GHz, primarily addressing test and measurement applications. Coaxial components are available to 67 GHz in most popular line sizes and we also manufacture waveguide components from WR650 to WR10. Maury's extensive line of VNA calibration kits also supports Agilent's PNA and ENA series, as well as Rohde and Schwarz DI series and Anritsu 37000 series network analyzers. Also, new digital connector gage kits are now available in 3.5mm/2/92mm and 2.4mm/1.85mm combination models. Facilities Located in the City of Ontario, California, about 40 miles due east of Los Angeles and just north of the San Bernardino Freeway (Interstate 10), our 96,000 square foot facility is within minutes of the Ontario International Airport (ONT). Here, we make the best microwave products in the market. MAURY MICROWAVE CORPORATION 9 RF Device Characterization Systems

-,- - ev ce impactor zet on.. sterns ivilaury's Strategic Alliances In The Test & Measurement Industry Working Together To Provide The Right Solutions For Your Applications Agilent Technolgies, Inc. AMCAD Engineering * o cl*.0 0 0. Agilent Technologies I Global Solutions Partner Agilent's electronic measurement products provide standard and customized electronic measurement instruments and systems, monitoring, management and optimization tools for communications networks and services, software design tools and related services that are used in the design, development, manufacture, installation, deployment and operation of electronics equipment and communications networks and services. Agilent RF & Microwave test equipment allow Maurv's Engineering Experts to provide customer needs with high precision and advanced services (pulsed IV/ RE measurements, Load-Pull characterization CW and pulsed, two-tones, etc.), and are used to support the R&D engineers developing new characterization techniques. Moreover, as Agilent's solutions partner Maury works closely with Agilent on the development of new applications for the PNA-X which take advantage of its advanced features and extend and enhance its capabilities into high-power, high-speed and 50 ohm environments. AMCAD Engineering 0, Advanced Modeling for Computer-Aided Design AMCAD is a provider of new RF & Microwave solutions. Founded in 2004 with Headquarters and Lab in Limoges, France, its founders have brought together a multi-disciplinary and high skilled team. Core Activities: Development and provision of solutions and tools for semiconductor professionals, with emphasis on Component Measurements and Modeling, Circuit Design and Systems Behavioural Modeling. AMCAD Products include Advanced Pulsed IV / RF systems and IVCAD data management software. AMCAD's Pulsed IV/RF System is an advanced components characterization system that is essential to semiconductor technology development, device reliability and lifetime testing, and semiconductor device modeling. Its key features include 10A-240V pulse generation, pulse widths down to 200ns, high precision current and voltage measurement, synchronized S2P capabilities to 40G1-iz, and self-heating and trapping phenomena characterization; all of which makes it the idea system for modeling a wide range of devices. Anteverta Microwave nteverta microwave Anteverta microwave provides pioneering solutions in the fields of device characterization and high performance power amplifier design. We seek to offer the industrial and R&D world with system solutions addressing the most demanding needs in terms of speed, accuracy and multifunctional capabilities. Anteverta microwave was launched in March 2010 as a spin-off from the Delft University of Technology in The Netherlands. Anteverta microwave was born as the development of a decade of successful research in the fields of large signal device characterization and high efficiency/linearity PA design. In May 2010 Anteverta microwave licensed its products to Maury Microwave Corporation to merge its innovative side with the strengths of the most reliable provider of non-linear characterization systems. IVIAURY MICROWAVE CORPORATION 10 RE Device Characterization Systems

;RF Dev cterization Systems Maury Microwave Corporation IISO 9001:2008 AS9100:2004 Rev B Documentation Maury is registered as an ISO 9001:2008/AS9100:2004 Rev B compliant company for Design, Manufacturing and Servicing of Microwave Based Measuring and Testing Equipment for the Aerospace, Defense and Wireless Telecom Industries. EAGLE Registrations Inc. II I VICE INTEGRITY VALUE 40 N. Main StleeL Sul* 24101 Da?anti OH 45423 NSA yr./ esq'avglstratord can Certificate No. 3867 (Revised 8/2/2010-2 Copies1 8/2/2010 through 1/15/2012 Certificate of Registration This is to certify that the Quality Management System of taiir MICROWAVE CORPORATION 2900 Inland Empire Boulevard, Ontario, California 91764 USA Has been assessed by EAGLE Registrations Inc. and conforms with the following standard: ISO 9001:2008 with AS9100:2004 Rev B This assessment was performed in accordance with the requirements of AS9104A. EAGLE Registrations Inc. is accredited under the aerospace Registrar Management Program Scope of Registration Design Manufacturing and Servicing of Microwave. Based Measuring and Testing Equipment for the Aerospace, Defense and Wireless Telecom Industries. Operatio s Director MAURY MICROWAVE CORPORATION 11 RF Device Characterization Systems

F1F Device Characterization Systems Calibration and Repair Services Calibration Services At Maury Microwave, our commitment to quality doesn't end with the sale of a product. In our state-of-the-art microwave laboratory, we offer both ANSI/NCSL Z540-1 (MIL-STD- 45662A) calibration and commercial level calibration services for every product we produce. Our laboratory is ANSI/NCSL Z540-1 ISO 10012-1 compliant with traceability to NIST (National Institute of Standards and Technology). Each Maury Microwave product is shipped with a certificate of conformance which assures that it has been tested and found to be within operational tolerances. As these products are used, changes can occur which may result in an out of tolerance condition. Periodic calibrations are therefore recommended to maintain functional integrity. We are happy to perform the calibrations you need at a reasonable cost. Please contact our Calibration and Repair Measurement Services Department to obtain quotations for the specific calibration services you require. Quoted prices will cover the cost of all applicable measurements and include written calibration reports documenting the mechanical and electrical data. If parts are out of tolerance, the cost of repair or replacement will be quoted for your approval prior to the start of any additional work. It is recommended that the following items he placed on a 12-month re-calibration cycle: Calibration Kits Verification Kits Coaxial Components for Laboratory Use Waveguide Components for Laboratory Use Automated Tuner Systems Noise Calibration Systems (Cryogenic, Thermal and Ambient Terminations) Mechanical Products Torque Wrenches Connector Gages Repair Services We recommend annual re-calibration and refurbishment of your Maury products to ensure continuous measurement accuracy. Because we are the original equipment manufacturer and users of Maury products, we understand the critical performance criteria of your measurement equipment. Therefore, we will always give you an honest evaluation of each and every Maury part when repairs are required. We will also provide you with options and our best recommendation for optimum performance. Annual re-calibration and servicing guarantees: Accuracy and Confidence in your Network Analyzer Measurements Precision Connector Mating Verification of Critical Mechanical and Electrical Specifications All Interfaces meet "As New" Mechanical Specifications to Ensure Predictable S-Parameter Performance Prolonged Life of Both Maury Measurement Standards and Your Network Analyzers Confidence That Your Maury Product Will Be As Precise As When First Delivered Refurbishment Done Right and Done Here In Our Factory Guaranteed Genuine Maury Parts and Quality We Design It, We Build It, We Calibrate It, We Repair It. Benefits of Maury Calibration and Repair: Calibration and Repairs Performed Directly By The OEM (No Middleman Delays or Mark-Ups!) Complete Confidence In Your Measurements Protects Your Costly Network Analyzer Investment Maintains Your ANSI/ISO Compliance and NIST Traceability MAURY MICROWAVE CORPORATION 12 RF Device Characterization Systems

Maury Automated Tuner Systems RP Device Characterization Systems Introduction The Maury Automated Tuner System (ATS) is a fast broadband, automated impedance control system that permits the introduction of a wide range of known source and load impedances into device measurement systems to determine a variety of device parameters under actual operating conditions. The ATS is primarily used for accurate de-embedded performance evaluation of the power, intermodulation distortion, adjacent channel power, noise and network (S-parameter) characteristics of packaged or on-wafer devices under variable impedance matching conditions. The major system elements consist of automated electromechanical slide screw tuners or solid state tuner modules; a power source or power distribution hub; and PCbased measurement software. These components are integrated into test bench setups that may include a variety of system elements and components including additional tuners, VNA, PNA, ENA, or LSNA, a wafer probe station, noise figure meters, noise sources, power meters, bias tees, noise receiver modules, diplexers, triplexers and a wide range of cables, connectors, and adapters. All Maury ATS hardware is designed to integrate smoothly into any test bench setup. ATS Complete Systems ATS complete systems are configured to meet user-specified application requirements, but generally consist of at least two tuners, ATS Automated Tuner System software, a tuner controller or power distribution hub, a serialized hardware key (which allows the software to run on a PC), and an instruction manual. The tuner models shown in this catalog may also be used in any automated or manual application requiring impedance matching of a microwave circuit element or to establish specific impedances at a terminal interface. Maury will also work with you to configure a fully integrated device characterization system, built around a complete ATS system, which can include any VNA, PNA, ENA, probe station, bias supply, etc. that your applications require. If you prefer, we can provide your integrated systems as a turn-key package, ready for installation at your location. Maury tuners are also sold in GPIB-compatible and (in most cases) USB-compatible versions. Future product development will be incorporated into the USB-compatible versions, and GPIB-compatible versions will continue to be produced for as long as they are needed to supply customers requiring replacement or additions to their Maury legacy systems. The solid state systems in this catalog are manufactured by Maury under license from Agilent Technologies using technology originally developed by ATN Microwave. Maury also provides warranty support for ATN legacy systems. (See page 75.) Training and Installation Maury holds periodic, two-day training seminars at the factory in Ontario, California. Purchasers of complete systems may send two attendees to one of these seminars (transportation and housing at the customers's expense). Each seminar includes comprehensive, hands-on training in ATS theory and operation for all applications and measurement modes. After delivery, and when all support equipment is in place, a Maury engineer will travel to the purchaser's site to install and ensure proper operation of the ATS. MAURY MICROWAVE CORPORATION 13 RF Device Characterization Systems

Device Characteirizatioti Systems FT Device Characterization Methods Why Do We Make Automated Tuner Measurements? RF and microwave transistors are used to amplify three signal components; voltage, current and power. To understand and predict the performance of a given transistor it is necessary to use a common parameter to define (or characterize) these three signal components. That common parameter is impedance. Automated tuner measurements enable rapid and accurate characterization of deembedded transistor linearity, and power added efficiency (PAE), with respect to impedance. Application of automated tuner measurements is diverse, from extraction of noise parameters to adjacent channel power ratio (ACPR) characterization optimization of power LDMOS transistors, to mismatch ruggedness characterization of handset PAs. What is Automated Tuner-Based Characterization? Tuner-based characterization refers to applications which establish transistor performance by varying source and load impedance. Automated tuner-based characterization refers specifically to introducing a known impedance into a network in a precisely controlled fashion. Tuner-based measurements are an integral part of the characterization and design process. By varying source and load impedance, along with frequency and bias, automated tuner-based characterization rapidly and accurately establishes conditions under which optimum performance can be obtained. Automated tuner measurements are also an integral part of linear and nonlinear model verification and semiconductor process tracking. Commonly used tuner-based characterization architectures can be distinguished from each other by the fashion in which impedance is synthesized. Measurement and characterization requirements and goals will constrain which type of architecture is most suitable. Impedance range, tuning speed, power handling capability, tuning resolution, tuner bandwidth, and tuner size are important considerations in choosing what type of tuner architecture to choose. Passive solid-state, passive-mechanical, and active-injection are the three basic architectures for synthesizing arbitrary impedances. Passive solid-state and passive-mechanical are the most common, while active-injection is used primarily in mm-wave applications where cabling and wafer-probe losses are high. Applications in which performance can be extrapolated over a broad range of impedances from a small number of impedances, (e.g., determining minimum noise figure) can be done easily and quickly using Maury's solid-state tuners and ATSv5 software. Requirements for high-power characterization (1 Q or greater) place different demands on the tuner architecture. The ability to synthesize impedances in the neighborhood of 1 ohm is necessary to establish the conditions under which optimum power, gain, PAE, and linearity can be established. Maury's passive-mechanical tuners, with dynamic pre-matching or distributed pre-matching networks, provide a repeatable and accurate solution for synthesizing sub 1 Q impedances over a broad range of frequencies. Basics of Automated Tuner-Based Measurement Scattering Parameters, or S-parameters, describe the scattering and reflection of traveling waves when one or more devices are inserted into a transmission line. S-parameters are used to characterize high frequency networks, where simpler methods are not applicable. S-parameters, often called Complex Scattering Parameters, are measured as a function of frequency, and, as such, they completely describe the behavior of a device under linear conditions within a given microwave frequency range. Each parameter is typically characterized by magnitude, decibel and phase. Maury's ATSv4 software is designed to simplify and automate the process of s-parameter measurement. Thermal Noise, commonly referred to as noise, greatly affects the performance of linear microwave and RF systems. The Complete Noise Figure of a device may be determined by performing a set of basic noise measurements to find the minimum noise figure (Ernin), optimum complex reflection coefficient (Copt), and noise resistance (Rn), at a variety of userselected source impedances. To find Emin, Gopt, and Rn, the simple noise figure must be measured at a variety of source impedances. Since Gopt is complex, this makes a total of four scalar parameters. In principle, this means that only four measurements are required. However, in practice, it is much more effective to measure more points, and use a "least means square's" mathematical technique to extract the parameters from pre-determined data. The ATSv5 software requires a minimum of six positions, but more may be used. Noise Characterization also requires the parameters of the device-under-test (DUT) to be separated from the parameters of the measuring system to which the DUT is connected. To do this, the system must be calibrated to learn the system parameters. The noise contribution of the system (often called the second stage since it follows the DUT) will vary with its source impedance. Therefore, the complete noise and gain parameters of the system must be known to determine the system noise contribution when a particular DUT is connected. Maury's ATSv5 software is designed to find the complete set of noise parameters consisting of Emin, Gopt, and Rn. Gopt is the source reflection coefficient which corresponds to Emin. Rn is a scale factor which shows how fast F changes with Cs. (The software actually displays rn, which is Rn normalized to 50 Q.) Basic Power applications are used to determine the optimum load and source termination conditions for optimizing device performance. These applications include power output, transducer gain, power gain, PAE, and up to other functions. MAURY MICROWAVE CORPORATION 14 RF Device Characterization Systems

RF. DeviceCharacterization Systems Measurement modes include load-pull and source-pull, single input power measurements at selected impedances, and swept power measurements at selected impedances. Load Pull consists of varying or "pulling" the load impedance seen by a DUT while measuring the DUT's performance. Source Pull is the same as load pull except that the source impedance is changed instead of the load impedance. As a design tool, load pull/source pull is used to measure a DUT under actual operating conditions. The application is based on measuring the performance of a transistor at various source and/or load impedances, and fitting contours in the gamma-domain to the resultant data. Measurements may also be made under various bias and frequency conditions. Several parameters can be superimposed over each other on a Smith chart and trade-offs in performance established. From this analysis, optimal source and load impedances are determined. Load-pull can be classified by the method in which source and load impedances are synthesized. Since the complex ratio of the reflected to incident wave on an arbitrary impedance completely characterizes the impedance, along with a known reference impedance, it is convenient to classify load-pull by how the reflected wave is generated. Passive-mechanical systems are capable of presenting approximately 50:1 VSWR, with respect to 50 Q, and are capable of working in very high power environments. Repeatability is better than -60 db. For high-power applications, e.g., > 100 W, the primary limitation of passive-mechanical systems is self-heating of the transmission line within the tuner, with the resultant thermally induced expansion perturbing the line impedance. Harmonic Load Pull consists of tuning the source and/or load impedance at a harmonic frequency (F2 or F3) while measuring device performance at the fundamental (FO). Harmonic load pull can especially affect efficiency and linearity. The effect of harmonic tuning depends strongly on the fundamental load pull tuning as well as the device type, operating point, drive power, and other factors. High isolation between the fundamental and harmonic tuning is critical since the purpose of harmonic tuning is to separate the effects of tuning FO, F2, and F3. Maury has adopted the di/triplexer method of harmonic tuning due to its superior isolation, resulting in nonexistent fundamental impedance pulling. Isolation far exceeds the ability to even measure it using conventional \INA methods. The accuracy expected from using a high-performance calibration method, like TRL, is maintained, with the Maury di/triplexer harmonic tuning method. Due to advances in harmonic tuning algorithms and the implementation of new software features Maury's method of cascading tuners for harmonic load pull has become a viable and recommended option that overcomes any and all issues related to tuning isolation. Using this method it is possible for two or three tuners to be cascaded externally to achieve extremely high magnitudes of reflection (VSWR in the order of 100:1-200:1, 1>0.98) as well as control multiple impedances at multiple frequencies (wideband harmonic tuning). Due to the use of calibrated and interpolated data for all tuners, we are able to achieve an overall system-level accuracy of greater than 40-80dB at highest F's. The results achieved with Maury's cascaded tuning method for harmonic load pull are unmatched in the industry. Cascading tuners gives the flexibility to upgrade existing systems, allows greater variety in the usage of tuners (independent singlefrequency tuning on multiple workstations), and offers a more wideband harmonic solution than any other method. Advanced Applications including Intermodulation Distortion, ACPR, Pulsed Power Measurements (i.e., GSM/EDGE/GPRS, etc.), are also supported by Maury ATS tuners and software. The New Frontier... Beyond 50 Ohm The trend in modem communications applications is towards higher power drive levels and more complex modulation schemes. These large-signal conditions cause devices and components to exhibit nonlinear behavior, significantly degrading system level performance. As designers measure, model, and design devices or systems that operate under large-signal conditions, many design iterations are necessary. Design verification has become a large portion of the overall development time. Accurate and efficient measurements, which truly characterize nonlinear devices, are needed to get insight in the operation of devices, components and subsystems. Such measurements also help to create and improve nonlinear device models. Current tools, such as vector network analyzers, spectrum analyzers, digitizing scopes, microwave transition analyzers and load-pull measurement systems, each analyze only certain aspects of a nonlinear behavior. They do not provide fully calibrated characterization under large signal conditions. Maury and Agilent have teamed together to address these needs and have developed a number of breakthrough methods that combine the capabilities of Agilent's PNA-X test sets (with X-parameter and NVNA options) together with Maury ATS v5.01 software to apply load pull with NVNA X-parameters to produce an enhanced time-domain measurement system with 26 GI-1z of bandwidth. The enhanced X-parameter data can be immediately and directly loaded into non-linear simulators and used as PHD component models that can be used with great confidence. Another breakthrough method that combines Maury's ATS software with Agilent's PNA-X NVNA to make ultra-high speed noise parameter measurements. This method utilizes a very simple setup that takes advantage of the built-in noise receiver and fast sweep capability of the analyzer, and typically speeds up the calibration and measurement time by 200x to 400x; making it practical to sweep a much larger frequency set. The resulting much higher speed allows users to do full in-situ calibration (thus minimizing errors) and measure large frequency sets to obtain a better view of scatter and cyclical errors, which allows the use of smoothing with greater confidence. The higher frequency density also enhances accuracy by reducing shifts due to aliasing. Further details are included in the discussion of the Maury MT993B01 and MT993D03 software options shown on pages 31 and 33 in this catalog, respectively. MAURY MICROWAVE CORPORATION 15 RF Device Characterization Systems

RF Device Characterization Systeme 1/0 D Advanced Measurement IA Modeling Software 9 I! M17 24.12.1 c.e. teams c sipto - oit O Low et P.?eV! IdaMifIq!II8..'1. two, II r., P.. (Va.,/.3 W Mt r.i n n n.* TT*. ot7i.! C.041 I 2- - 2 2232 12X. 111ftworme MLMle.w It Powered by 10 Po AM CAD Engineering Aer:,ce,114+dr:,-.9 Co- c A01 Ots;m ri? IV1T930 Series Maury IVCAD Software Completes the Cycle from Pulsed-IV and S-Parameters, to Harmonic Load Pull, to Compact Transistor Models! Introduction IVCAD advanced measurement and modeling software, offered by Maury Microwave and AMCAD Engineering supports multiple load pull techniques including traditional load pull using external instrumentation, VNA-based load pull, active load pull and hybrid load pull. It performs noise parameter measurements, DC-IV and pulsed-iv measurements and incorporates device modeling tools. Its modern visualization capabilities give users a greater ability to view, plot and graph measurement data in an intuitive manner. IVCAD Software Suite Models o MT930A IVCAD Basic Application o MT930B IVCAD Visualization Suite o MT930C IVCAD Vector-Receiver Load Pull o MT930D IVCAD Traditional Load Pull o MT930E IVCAD IV Curves for Load Pull o MT930F IVCAD Basic S-Parameters o MT930G IVCAD Time-Domain Waveforms MT930H IVCAD Active Load Pull o MT930J IVCAD Pulsed IV Curves o MT930K IVCAD Pulsed S-Parameters o MT930L IVCAD Scripting Language MT930M1 IVCAD Linear Model Extraction o MT930M2 IVCAD Non-linear Model Extraction o MT930M3 IVCAD Electro-thermal Model Extraction o MT930N IVCAD Database Analysis o MT930P IVCAD Measurement Toolbox MAURY MICROWAVE CORPORATION 16 RF Device Characterization Systems

Denikiie CharEiCterization Elysterins MT930A IVCAD Basic Application IVCAD Base Application is needed to operate any of the following IVCAD measurement, modeling and visualization modules. MT930B IVCAD Visualization Suite IVCAD offers a modern and intuitive visualization package for I\! S-Parameters and Load Pull data. 5-parameters can be viewed in standard and custom formats Stability circles are optionally plotted on source and load Basic load pull visualization allows the plotting of power sweeps or impedance curves with capability of filtering measurement results. Extended load pull visualization plots power sweeps and impedance contours simultaneously, where contours are redrawn as the user-defined input/output/source power is changed. Multiple parameters, including frequency, can be viewed on the same Smith Chart. Graphing can be performed in 2D or 3D. Advanced filtering allows multiple definitions to be entered in order to limit the measured impedances to those that meet specific criteria. Using the (lockable window functionalities, it's possible to create custom IVCAD environments. Visualization is compatible with Maury Microwave and Focus Microwaves load pull data formats. Eik4, Ft,c7. -te ex 0 re V2 (V)/ Time (us) ;Ylaljr, ON :2 r40 r4 rm. 75 tor. O.."... t. mt..rori _c2,. Ire vb... v IA n 4 Al N.I., n 0. W.Mtkm.PotIttv..1. 1 isims - TIrnt Os/ P 414.14100P. M 134 Ow 5::t tt ms 1.j 2:.. -._ 0: ; ; ; ; a.e P. 2 Y. ; ; Vd5 r.) `,..1.0 Visualization of S-Parameters, IV Curves. Pulse Shape and 3D Load Pull Contour In Tr'.0 14 V In-., IrE3=22 n n n t i 1. ; 2 2 2 2 2 1 ; ; titatt.. 10 ft...ow., II Visualization of Advanced Sweep Plan Load Pull ',1n11111MIll MAURY MICROWAVE CORPORATION 17 RF Device Characterization Systems

,,, - RF Device, CharacterizatIon Systems MT930C IVCAD Vector-Receiver Load Pull Key Features: Real-Time Contouring of Measured Data a Ha. war n n n.1111.1 111.. n n Interactive Bias Control Full Vector Parameters Including CW or Pulsed IMeasurements Time Domain Waveform Reconstruct ion Model Validation Export Data to MDIF la 111 Vector-Receiver Load Pull Setup Editor smear wawa.. IVCAD offers a modern, efficient methodology for load pull measurements, with low-loss couplers between the tuners and DUT of the setup, instead of the traditional placement behind the tuners. Connecting the couplers to a VNA allows real-time measurement of a- and b-waves at the DUT reference plane, presenting vector information not normally made available. IVCAD measures the actual impedances presented to the DUT without assumptions of pre-characterized tuner positioning or losses. Extremely accurate transistor's input impedance derived from the a- and b-waves results in properly-defined input power, power added efficiency and true power gain measurements. Output powers at each frequency, fundamental and multiple harmonics, are made available, as are multi-tone carrier and intermodulation powers. ri Ts. Vows rap -.. IS n G.. r. us." us.. UN.123 " " 1[5. 1% amir* 1[11.31 - i -- _ wa YrN S."'" 'In -331:on 1-imeae l (22.,G1* 7.662Q.2 I Gt. a ram 'Ira la :JAm 8 fro mov sows my CIS 1 ow...6 1 62 rs 1 ia I Ms Ilia I n L 714. RV,66L., art ow reaw a= war= a ail sar.111. nnnjwaseesetrseinaow P ZAN. ) Impedance Sweep at Fixed Power Advanced Sweep Plan by performing power sweeps at multiple impedances, sufficient data is gathered that target parameters can be changed post-measurement without the need for additional measurement iterations. The same data set can be used to plot selected parameters at a constant input power, parameters at a constant output power, parameters at constant compression level. This process greatly reduces total measurement time by gathering sufficient data first-pass, and shifting capabilities towards data visualization and analysis. IVIAURY MICROWAVE CORPORATION 18 RF Device Characterization Systems

RF Device Characterization System* Opp fie I.. 39111IMMI9M11. MIAMI' 110. Cann Nets OP so I -, kw.- 1.. 1 et.3 j tt Owes si,.00". 171 Nir2 fat I gh- ear, ns we. Temp. li A' Power Sweep at Multiple Impedances aik 01.4 [rm.. 10,,..1, Source Impedance Matching - Large signal input impedance can be found by measuring DUT a- and b-waves at the DUT reference plane. A patent-pending technique simulates source matching, without varying the source impedance. Even under extremely mismatched conditions this "virtual source matching" is highly reliable, provided the DUT is sufficiently unilateral (S21- >S12+50dB). Simulated source contours are drawn, and trade-offs between maximum gain, efficiency and other parameters can be viewed in real-time without multiple source-load measurement iterations. Direct computation of the input VSWR versus source power and source impedance is also enabled. loft limo V& E:11.111111.11.11.11E I, 1.0m.n U v en r.e...v.... a.eon R F._to 10 I c ee te... Its. t t; Ea_is!. Source Impedance Matching - Virtual Source Pull I I - rid,141!. n$.1. n. eitosa...,/ MAURY MICROWAVE CORPORATION 19 RF Device Characterization Systems

RF Device Characterization Systems, MT930D IVCAD Traditional Load Pull IVCAD offers traditional load pull methodology consisting needed to measure ACPR, EVM, CCDF and other modulated of power meters for absolute power readings de-embedded parameters. to the DUT reference plane, and spectrum analyzers for With traditional load pull, a vector network analyzer is only harmonic content and multitone intermodulation parameters. used to calibrate/characterize the system and is not used for Traditional load pull is also used for modulated signals where actual measurements. a vector signal generator and vector spectrum analyzer are Release date: Summer 2011 MT930E IVCAD IV Curves MT930E is an add-on module for MT930C and MT930D which enables basic DC-IV curves to be generated for a list of drain and gate voltages. 0.55 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0.0.01104614_, #+i 141441-1+1444 Vgs = -2.1 V Vgs = -1.8 V -0- Vgs = -1.5 V Vgs = -1.2 V Vgs = -0.9 V Vgs = -0.6 V - Vgs - -0.3 V Vgs - -0.0 V CW IV Curves Under Load Pull Conditions O O O O 9 O O 9 (.0 C't CN Vds (V) (",1 MAURY MICROWAVE CORPORATION 20 RF Device Characterization Systems

RF Device Characterization Systems MT930F IVCAD S-Parameters MT930F is an add-on module for MT930C and MT930D, which enables CW S-Parameters to be read from a Vector Network Analyzer (VNA) and saved in SO' format. rrg Graph 3 Graph 3 Pledsfr4r1 Custm - FAt,s rtc;-!:n tes - Smith Graph 3 1 0 X. NGraph3 it ederrst4 Carstcm Fite, s - Pict!: - Maximum gain (db) 4 0 X PZIP-611.4-rjOCOltI). [0 883, 110.151 4.613 + 34.713i ohm 28.0. 26.0. _ -B- S(1,1) -& S(2,2) (70-24.0. 11 Ts 22.0. CID E E 20.0. -8- Maximum gain (db) [0.392. -160.841 22 34-6.7921 ohms 18.0. 16.0' Fmax Line equation f(x) = -0.449.20 log(x) «25.477 jai:(40.i'=(0141(&rt (0 899, -139.911 3.012-18.185i ohms 14.0. I. 0 4 41 4, 41 (C! C. Cq 0 O 0 0 0 C 4 c! Le. re Frequency (GHz) t ant(%) c,-y lanics) I I.3CV.e,S) Gr.ph 3 E.. Graph 3 Pat:Waled - Cu tons - Flea - Propaties - 0 X. 4' k:20. Graph 3 ri Graph 3 PreStinerl Custom - Ras Acped.es O 0 0 X. 4. Polar Real / Imaginary Magnitude (db) / Frequency 0.8 24.0. --30 25 06. 0.4 22.0. 20 0. 18 0. 30 75 --31 25 --31.75 02' 0 0-0 2 CgW:1-0 863. 0 2021 [0 886. 159 8'] 0 160 14 12 0. 10.0- --32.25 903-32.75 :=1 --33 25 --33.75-0.4A 8.0 -.34 25-0.6' W 0 6 0 Ia? O In o sn o us 0 us o O r, CA cn 4.41 --34.75 Real [S] (GHz) t/ oxve(s) innv(s) I oa.t':1' I t!]1'i MT930G IVCAD Time Domain Waveforms MT930G is an add-on module for MT930C Vector-Receiver Load Pull which enables time-domain waveform reconstruction in conjunction with appropriate hardware. With the collected data, a- and b-waves, voltage and current waveforms, and load lines can be displayed for each measured impedance de-embedded to the device reference plane. Currently supported instruments include Agilent PNA-X with NvNA op t ion, and vm SWAP. Release date: Spring 2011. MAURY MICROWAVE CORPORATION 21 RF Device Characterization Systems

(MOW: rapper_, - art' stems MT930H IVCAD Active Load Pull MT9301-1 is an add-on module for MT93OC Vector -Receiver Load Pull which enables active load pull in conjunction with internal and external sources for fundamental and harmonic load pull measurements. Considering our DUT as a two-port device shown below, F, is nothing more than a,/b 2, or the ratio between the reflected- and forward-traveling waves. A generalized form of the formula can be written as r,,(f)=. - a (f ) "' Port a, S2, b, S Sn Port 2 yq b, S,, a2 Two-port Scattering Parameter Model A closer examination of the formula F,=a-Jb, reveals that there is no limitation on separating the sources of a, and b,. It is obvious that b, is the wave coming from the device, of which we have no direct control; however a, need not be a reflected version of I), but can be a new signal entirely! Active Load Pull Active injection load pull, more commonly referred to as active load pull, relies on external sources to inject a signal into the output of the DUT, thereby creating a,. Because a 2 is no longer limited to a fraction of the original reflected signal, as is the case with the traditional passive mechanical tuner, external amplifiers may be used to increase a, nearly indefinitely so that F can achieve unity (1,>1 is theoretically possible but has no practical consideration). The simple active tuning chain consists of a signal source, a variable phase shifter and a variable gain stage, shown in the diagram below. Common signal generators that have built-in amplitude and phase control of the injected signal and are ideal for active load pull. Harmonic load pull, or tuning impedances at multiple frequencies simultaneously, becomes simple when using active load pull techniques. A multiplexer can be used to merge multiple active tuning paths, one per frequency, so that is satisfied. Any loses inherent to multiplexers are easily overcome by the amplifiers used in each active tuning chain. Hybrid Passive-Active Load Pull Both traditional passive mechanical tuner systems and active injection load pull systems have their advantages and disadvantages. While mechanical tuners are simple, less expensive and can handle high power, there is no physical way to overcome the losses involved with the system that limit achievable F,. While active load pull systems are extremely quick, capable of F,=1 and easily integrated for harmonic measurements on-wafer, highpower setups require more-expensive band-limited amplifiers. It is possible to obtain the advantages of both systems while minimizing the disadvantages, using a technique referred to as hybrid load pull. Hybrid load pull refers to a combination of active and passive tuning in the same system. Traditional passive mechanical tuners can be used to reflect high power at the fundamental frequency allowing a much smaller active injection signal, using much smaller amplifiers, to overcome losses and achieve F,=-1. Additionally, since the powers at harmonic frequencies are often well below the power of the fundamental signal, less-expensive wideband amplifiers may be used with active tuning to accomplish active harmonic load pull with F,,=1. In both cases, only a low power is required for active tuning. DUT Bias T rload Open-Loop Active Tuning Block Diagram MAURY MICROWAVE CORPORATION 22 RF Device Characterization Systems

RF Device Charapterization Systems MT930J IVCAD Pulsed IV Curves MT930J is a stand-alone module for advanced Pulsed IV measurements using dedicated pulsing hardware (e.g., AMCAD's AMBILT system). Current-voltage (IV) measurements are used to describe the relationship between the input and output currents and voltages of a device. Standard GaN Field Effect Transistors (FETs) are characterized by measuring the output current as a function of output voltage for swept input voltages. Because GaN devices tend to self-heat and are susceptible to trapping effects, it is important to pulse voltages between a quiescent and hot value and define appropriate pulse-widths. By pulsing the voltage, a lower average power will be delivered to the device thereby reducing self-heating. Such a measurement allows for nearisothermal performance. IVCAD enables the visualization of trapping phenomena, gate lag and drain lag, on GaN transistors. It is a simple task to view trapping effects as a function of varying quiescent bias. IVCAD has implemented full wafer control by interfacing with Cascade Nucleus software. Key Features: Easy Data Management Cohesion Between Pulsed IV and Corresponding Pulsed S-Parameter Data (Requires MT930K) Automated Probe Station Control Import/Export Data to/from ICCAP, ADS, Microwave Office V WAD elm sum. ycn, rh 0 WO litaier Gm. - OA V r..vort 11 1111 11 Tr-tr_e ve.e. C3.1 10...v., PJ mor O.1 rcedro,k24 rex Fi sm 000 Ottis 11.1V.M. 'N. Vt. 21V Y.. G... C.1.1 C.a e., P 07., -grs-11;-2, 5!.5 055 05 Crp., p.ta Cr ra.-. ea a zce% ox I..dear cu.* 'vs to C fl.," --;eum.e.,110c:51 c..-l*,..fts c ;1, twde-..-114 6 ri! 1.1.E; [1.6 re C.dent. Aa, our 9. 277 pn.extiet ao 111 11.1 (I *** ;! 3 ; = ; Id (A) 'Ids = 9 377 V 478, 0, {ion j '00 44. 9,111 A471:471-11 (0 511 i n (0 511-2: - I I LI C 569 ' 1: 11 7 ' TfiD-1.1. u (060 623),fttuhut gi(0 623, 063 C igat e s IA misdoing's 46 I 03 :.s 2 03 0 25 02 0 15 005 00-105 ent.0l) I E r, Vds (V) o o Cn "4!I:1,--. 1 Pulsed IV Data From Different Quiescent Points (OV/OV: -7V/OV; -7V/50V) MT930K IVCAD Pulsed S-Parameters MT930L IVCAD Scripting Language MT930K is an add-on module to MT930J which enables synchronized Pulsed S-Parameter measurement in conjunction with Pulsed IV. MT930L is an add-on module to MT930C/D/J/K which enables complex test sequencing through a dedicated scripting language. Release date: Fall 2011. MAURY MICROWAVE CORPORATION 23 RF Device Characterization Systems

; j Device Cho oterization Systems MT930M1 IVCAD Linear Model Extraction MT930M1 is an add-on module to M -19301 and MT930K for Linear Model Extraction using dedicated pulsing hardware (eg., AMCAD's AMBILT system). Linear Model Extraction is used to determine the extrinsic parameters (parasitic elements) of a HT. Linear modeling compares measured data to default model data. The model is manually tuned or automatically optimized by varying the values of Rg, Lg, Cpg, Rd, td, Cpd, Rs, Ls. To verify the linear model behavior, it is essential to compare intrinsic elements through a multi-bias extraction. The resulting linear model can be used with MT930M2 to generate a Non- Linear Model or directly exported to ADS. 6=eitiLi -..431.61 F O X ti,ear IET mxtelrq Lilew = 0070.7..W1 NEWT_ EMIT KEW: vp.4 I 0,: n) -01.4 )2:71 30E, IE..4 52 300 344 11 10 13 a 40 si ei 4 = = = 2 12 1 2 2 2 31 1 2 2. Z 111E111' 113:1F yr. ZE.,5 ): Eve PA,:!s. Z 0:44 IEEE'.st I 6. 11111111r7 VrA M." 00 407 40' 401 1 000..00.00..00000. :: r: 2 11 4 71. 1 I.7i aaaaaaaa s0 C. - 1; t Lt3b Ve I F3 sm. j 10 /17 Linear Model Comparing Measured And Optimized Data KM) U. Toads Yews Hsi ai Oetpaeonae model I to" 6 UVO,T4AteaW 0 ES 00 01i 0 S 025 03 02.0 02 210 005 00 co.*: dotssuc Vt. scipare It), OA0J NY! «ipil Output current model - default 11:3;,,zr-Knt m,1-0 c,c5 ono."949?152p5. =79.t+2 I 00-10 CC-13 2 fe-1: 00-1, 0-E-12 000 CE-15 0 211 '' I 2.1 is 1 1.,- n0 I I t..; stm: I id SeeD3 1 :We f3bool ce. 10 Issnir 2-141 2 OS 2 0ls m 0= 0.0a, = v:00.4 005 I O. -,11.1rare.a,"-e,Er(177-.7:Ort."Vt rr11,1=0.n a a a a o o 2 2 3 2 3 I 8 471 243,1. sty: nr 1" If 000 1 e 5r. CO 10 b20v0 00,1 20 O o c.o 06' oc. C a a. 9. a VA (d) Yds (31) FO X (1012,1/IN 000 Multi-Bias Extraction Comparison Between Measured And Modeled Data IVIAURY MICROWAVE CORPORATION 24 RF Device Characterization Systems

RE Device Chaiiacterization Systems MT930M2 IVCAD Non-linear Model Extraction MT930M2 is an add-on module to MT930MI for Non-Linear Model Extraction. The extrinsic parameters measured through linear modeling (MT930M 1) are used to extract intrinsic parameters. Capacitance Model Extraction A capacitance curve comparing Cgd as a function of Intrinsic Vgd is plotted showing both measured and modeled data. As with the linear model extraction, the model is manually tuned or automatically optimized by varying the capacitance model parameters. Cgs versus Vgs is tuned or optimized in the same manner. Diode Parameter Extraction An IV curve comparing Ig as a function of Vds is plotted showing both measured and modeled data. The model is manually tuned or automatically optimized by varying the diode model parameters. Current Source Extraction An IV curve comparing Id as a function of Vds is plotted showing both measured and modeled data. The model is manually tuned or automatically optimized by varying the current source model parameters. Confitgrratioo Cm-rren Oitrie 0017tation Foiriety psereeers!mit cutrxt (Ilea roiicf) (Irrty redd) ants coder) e X 0.5 Id (A)/Vds (V) 0.4 Z0.3 V 02 0.1 0.0 ri - 7 td - -A A k A A n a- a la M-4 7 _ 7 7- ---7- - -7-7-- 7 7 7 0 : X 0 0 q q q 0 0 Q Q 013 6 6.. 0 0... 0 0 CD 0 " OJ fl ft N Vds A to - V V 0 fl Q 0 0 G 0 0 0 0 0 of 0 2 trl 1D Cgs capadtor model P X, Tiring -I Treperatrerndd ID Cos eapacitrx model, defeat _ 1D Cgs capacitor model, default Measurement vs model tr, ID Cod capacitor model Tiring El I Oa-ewe tre rode! Medd:. 10 Cod capeo nod, devil I ID Cgd capacitor model, default Measurement vs model P 0 X 20E-12 F5E-12 1.0E-12 e's t; A,1! n-n '7 '7 '7 '7 '7 O r. 4 8 8 8 G o G o eigooq000.qoack P P o Intrinsic Vgs intiins:c you Capacitance Model Extraction Showing Excellent Match Between Measured And Modeled Data MAURY MICROWAVE CORPORATION 25 RF Device Characterization Systems

:RF Device Charactet4zeitliiii'Systems O toc40 ly teas Ve..1 i ;110 Clepot anent =Nal i Tn va. rad, ftd*4 eeaue Output current modal - default Wasurmint vs =KM 055 05 04 0i 0 03 O'25 02 015 005 70 hsap-mr, SA. C.06 o ea R X X R X R :4 X X Vd5 0 S Current Source Extraction Showing Excellent Match Between Measured And Modeled Data AS 4-.5,..f.11 F7, p. R; P.. Cr., C :C.; A 4i T 054 lath 4N:4A I 5,h P.3, a ccis,7 _cara t C, it I Lxtrinsics 1=1 Diodes Ci Capacitances CurrentSource Nrnl ET" hr,-271 AMCAD Model Implementation MT930M3 IVCAD Electro-thermal Model Extraction MT930M3 is an add-on module to MT930M2 for Electrothermal Model Extraction. Electro-thermal Model Extraction is used to determine the thermal behavior of a HT, taking into account ambient temperature and self-heating effects. MT930N IVCAD Database Analysis mt930n is an add-on module to MT9308 for advanced database analysis and filtering. Data obtained from multiple measurement platforms (pulsed IV, pulsed S-Parameters, load pull...) can become overwhelming and difficult for some users to manage. Database analysis and filtering offers a solution to sort through multiple dimensions of data and select only those that are of interest to the user. Release date: Fall 2011. MAURY MICROWAVE CORPORATION 26 RF Device Characterization Systems

RF Device Cherecterizetion Systems All Automated Tuner System Software MT993 Series Introduction The Maury Automated Tuner System Software (ATSv5) is the easiest-to-use, yet most advanced, and most powerful device characterization software in the world. It brings together a comprehensive suite of software tools that greatly simplifies device characterization applications. The advanced development of this software has made it a must-have part of any modern test and measurement lab. For a growing community of RF and Microwave engineers and designers, ATS software has truly become the brain behind their device characterization operations. What ATSv5 Software Can Do For You Maury ATSv5 makes it possible to accurately measure power, gain, efficiency, IMD, ACPR, EVM, harmonics, noise parameters and many other characteristics of a device under test (DUT). Measured data from the ATSv5 software can be imported with ease into Agilent's ADS software environment for simulation of device models or PAIL NA designs. Optionally, using ATSv5 with the Maury DLL library gives users the accuracy and repeatability of the Maury ATS hardware with the flexibility to write their own custom test and measurement applications. ATSv5 builds upon the legendary reliability and robustness of ATSv4 which was the most comprehensive upgrade and improvement to ATS since the Windows"' release in 2000. The central features include an all new and significantly improved GUI API for direct tuner control (eliminating the need for the legacy tuner controller object) and the availability of a comprehensive DLL kit. But perhaps the most exciting feature of ATSv5 is the addition of a powerful new method of cascaded harmonic load pull that eliminates the need for diplexers/triplexers. In addition, this release of ATS has undergone extensive QA testing, including comprehensive regression analysis for algorithmic integrity evaluation, a rigorous automated analysis to identify, document and correct defects, and live hardware evaluation in Maury's device characterization laboratory. ATSv5 is designed to run under Microsoft Windows"' XP, and Windows TM 7. Support and Upgrades The Maury ATS is continually being improved and upgraded. At least one formal software upgrade is produced each year. A software support agreement is available to ensure that your system remains current with the latest features and improvements in measurement capability. 41kiiZ 001 ATSv5 Software Suite Models MT993A Power Parameters, Power Measurement Mode, Swept Power Display, Load/Source Pull Contour Display MT993B Noise Parameters, Interactive Noise Measurement Mode, Swept Noise Display, Noise Statistics Display MT993B01 Ultra-Fast Noise Characterization Using PNA-X MT993C Combines MT993A and MT993B MT993D Intermod Distortion (IMD), Adjacent Channel Power (ACP), and Error Vector Magnitude (EVM) MT993D03 PNA-X NVNA (Load Pull + NVNA + X-Parameters) MT993D04 Active Load Pull MT993E Programmers Edition MT993F System Control Option MT993G DC IV Curve Option MT993H Harmonic Source/Load Pull Option (Supports Triplexer/Diplexer and Cascaded Tuner Techniques) MT993J Fixture Characterization Option MT993N06 Tuner Characterization Option MT993V01 Tuner Interpolation dll Option MT993VO4 Tuner Movement dll Option MAURY MICROWAVE CORPORATION 27 RF Device Characterization Systems

RF Device Ctiaratiterizatttel -stems MT993A - Power Characterization Application Software General The MT993A power characterization application software is designed to operate with the Maury Automated Tuner System (ATS) to determine the optimum load and source termination conditions for improving device performance. This software is provided as part of an ATS system specified for power characterization; either separately as model MT993A, or combined with the MT99313 noise characterization software as model MT993C. Power Parameters In large signal amplifier design, power output is a complex function of the input power level, terminating impedances, and DC bias conditions. A load pull bench, operating with the Maury power application software can provide fast accurate measurements of power output, transducer gain, power gain, power-added efficiency and measured input and output voltages and currents. The program also permits display of up to 10 harmonic source and load impedances simultaneously. A unique feature of the Maury software allows the user to define up to 35 user functions. These functions can be used to develop specific output parameters (e.g., simple efficiency, VSWR), or to control instruments (e.g., to control the turn-on/ turn-off sequence of a high power signal source). The program also has a built-in general purpose S-parameter measurement program that allows for fixed or swept bias conditions. The software provides for both data and graphical hard copy outputs. Power Measurement Mode This is a single frequency display that permits the user to select the measured device parameters at a single input power or over a range of powers at any available source or load impedance. The frequency and impedances for load or source pull and sweep plan measurements can also be selected from this display. This is an active measurement screen which allows the operator to move the source and/or load tuners to any available position, and measure all active parameters. If the S-parameter option is exercised, stability circles S11' and S22* are also displayed. Swept Power Display Up to five of the measured parameters can be simultaneously displayed versus available input power. A mouse or cursor key controlled marker provides for readouts at measured or interpolated points. Graphics scales are user-controlled. All measured parameters are tabulated below the plots and are available for printout. Load/Source Pull Contour Display This single frequency display plots constant measured parameter contours on the impedance plane and the impedance(s) for maximum or minimum values. Contours of up to three parameters can be simultaneously displayed. The number of contours displayed, as well as the increment between contours, are user controlled. Output data at any tuner position can also be user controlled. The contour data can be converted to spreadsheet format with a single keystroke. 0 Snpw - [prematch.cfg].di airiyirieeretre-rmftsernie 3 11 Fle Edt View Setup Calibrate Measurements Fxbre Characterization Window Help TTest VIEW VIEW VIEW SP LP PSWP SRC LOAD INSTM OPTNS FILES CW AND AND CAL FILE FILE FILE TUNR TUNR CNFIG DIR FILE CW Power Block Diagram <S> 2 1 1 2 1 2 Label. Typical setup for performing simultaneous load pull and source pull measurements. MAURY MICROWAVE CORPORATION 28 RF Device Characterization Systems

r,l7r. Sat V_41.1111 RF Device Characterization Elytitionfa. sm. Tc.rar iwna obibo e3a ah lllll Leal Pall rce Cala _ lla ere_la. C.0, 134 12,.. C.C.Ct flamm_311.. 0.1C134...,3. 3 C..tit 5 ac.11./e. Cl-artec. aa Ca n t0.111 0.l.la..35 I l C3 111 1..03 C.31 3..CCa 3: 31 acataar y. 3.C3 21. 171,3.311 Z7 I, ',ace Clf Typical load pull contour display. c. rraid tt, a 2 CCe 11.16 11.05 %a ra.s, Cf:: 31.1C 2.:17.12 37,1 C.C2 30.113.11 2: >IS Flax.. S.O0 an ".. 4130 3..5.55 Cat l 1. Ir C.5...ate -!Ill, -tc.21 (1:41:-.:3at - G.<511/ Cll." _ n C.1.74-111.51... C.C...V.1.10 ttlat.-c 11.a,...41 flzal_11, n 5,11. -C.. Ilea. 3.. 7.C/. 1.< 1.71.1.1 ItC111_512. - 1.1111a,C3,1 /la CC" Cs 1ff C, l'.'371 C.351 1.t....553 t.111 f.i.c. 1.CC3 3..., C.111 //.31, 3.CC1 4.1. r.....1. 1,1,1 3.C. ',SI, 351 1,C1.1 Il.ttt 3../ 1.CC 1.131 1.1...t:: 3..3 1.CC 1.331 f.345 lt.:cc :7.1. 3.C. 7.C: 1,331..., 13.1. 17.CC1 3.t. D.C1 /1.331 1..131 44..1 IC.1,1 3.e. 13.3. C...: 13.1,1 1C.C., 3.<" 11.0C 13.1,3,..1. CC.I. 1..3 1.C.1...1 C... 15 1,. 3..3 /2.551 I..: 14.3. 1..3 11.C1 13.,/ 2.," 7.1..1,1, 3.l. 1Z.CC 11.f. 1.1. 3.11,..11. VCC3 kra.res,1 Typical swept power display. MAURY MICROWAVE CORPORATION 29 RF Device Characterization Systems

RF Deivicei,Characterization SYstems MT993k1 - Noise Characterization Application Software General The MI99313 noise characterization application software is designed to operate with ATS tuners and determine the noise parameters of a linear device, module or sub-assembly. The program is provided as part of an ATS system specified for noise characterization separately as model MT99313, or combined with the power characterization software as model MT993C. Noise Parameters Good noise performance is a critical element of most receiving systems. Knowledge of the noise parameters which define the noise performance of a device can be an invaluable aid to the receiver/amplifier designer by saving hours of design time and reducing, or even eliminating "cot-and-try" iterations. An ATS system, operating with the Maury noise application software, can provide fast accurate measurements of minimum noise figure, optimum source reflection coefficient, and equivalent noise resistance. The program will also provide the gain parameters of the device and has a built-in general purpose S-parameter measurement program. All measurements can be de-embedded to the device input and output planes. The software provides for both data and graphical hard copy outputs. Interactive Measurement Mode This is a single frequency display that permits the user to: a) measure the device noise parameters; b) measure noise figure and gain at any available source impedance; c) select the noise parameter measurement method; and, d) select the impedances used in the noise parameter determination or let the software determine these automatically. Constant noise figure and gain circles can also he plotted on the source impedance Smith chart. An advanced sweep plan is available to define fullyautomated, multi-frequency, multi-bias noise characterization projects. Swept Noise Display The measured parameters can be simultaneously displayed versus frequency and bias. A mouse or cursor key controlled marker provides for readouts at measured or interpolated points. Data smoothing (1st or 2nd order) is available, and graphics scales are user-controlled. Noise parameters as well as maximum gain, associated gain and stability factor (k) are tabulated and available for printout below the plots. Noise Statistics Display This is a statistics window screen which shows agreement between the noise parameter solution and individual points. The noise parameter solution is also displayed so the effect of changing options can be immediately seen. This display may be toggled between calibration and DUT measurement data so the effect of calibration options can be seen on the measured DUT data. ts Snpw. [C:Ipnaxnoise.cfg) Fie Eck Veri Setup Calbrete Veasarements Ftxture Characterization Venda++ Help T1 MEW SP FILE VIEW LP ALE VIEW PSWP FILE 1.C.6E Ti NSTIA )PINS AND CNFIG FILES AND DIR SNP System Block Diagram Label Demo mode setup 1 2!I.-W... I = :. Ti 111,,41 1 4M MI.,.". Typical setup for performing noise characterization measurements. Typical swept noise display. MAURY MICROWAVE CORPORATION 30 RF Device Characterization Systems

ce C!mat r zation Systafrisi IIVIT9931301 - High Speed Noise Parameter Measurement Option General The MT9931301 high speed noise parameter measurement option (patent pending) operates with the MT99313 noise characterization application software and Agilent's PNA-X to take advantage of the built-in noise receiver and fast sweep capability of the analyzer. This typically speeds up the calibration and measurement time by 200X - 400X; making it practical to sweep a much larger frequency set. Typical test bench setups are simplified (as shown in the photograph below), which reduces the number of cables and connections, thus helping to stabilize the setup. This setup produces data that is smoother and has less scatter than traditional methods of noise measurement. The fast measurement speed eliminates temperature drift, and using a VNA with an internal noise receiver simplifies the setup and makes it much more stable and consistent. Benefits and Features The N1T993B01 option includes two key features that contribute to the breakthrough speed improvement: 1) The ATS tuner is characterized with one set of states (physical tuner positions) that are selected to give a reasonable impedance spread over the frequency band of interest; and 2) the noise power measurement is swept over the frequency range at each state, so that the tuner only moves to each position once; thereby minimizing tuner movement. The much higher speed makes it practical to always do a full in-situ calibration to minimize errors, and to measure more frequencies to get a better view of scatter and cyclical errors, and to be able to use smoothing with more confidence. The higher frequency density also enhances accuracy by reducing shifts due to aliasing. Typical setup for performing high speed noise parameter measurements.... Lacaselet. vs nn.,..1 80. 0.7. L..: 41... 81 III ra.-8/ OA> C.8 t 3 1. n I,. I. s....-30 1,411 Measured noise parameter data using MT993B01 (no smoothing). MAURY MICROWAVE CORPORATION 31 RF Device Characterization Systems

I Kr993D ilnternaod Distortion (HMO) and Adjacent Channel Power (ACP) Application Software General The MT993D IMD/ACP application software requires the MT993A power characterization application software or MT993C power and noise characterization application software to operate with the Maury automated tuner system (ATS). IMD/ACP Parameters When two signals are simultaneously present, device nonlinearity can cause frequency mixing. Odd order mixing (e.g., the fundamental of one signal mixing with the second harmonic of the other) results in a pair of mixing products which straddle the original pair and are displaced by the separation between the two tones. The magnitude of these products is a measure of the device non-linearity. An ATS, operating with the Maury power and IMD/ACP application software, can provide fast, accurate measurements of the power parameters and the additional functions: 3rd through 7th order IMD power, carrier power, UI ratio, intercept point, and first and second upper and lower adjacent channel power. Adjacent channel power usually refers to the "spill-over" of a signal - typically, digitally modulated - into the adjacent or next adjacent communications channel. Knowledge of the magnitude of these products and other related parameters, as well as the termination conditions for minimizing or maximizing them, can be of significant help to the amplifier and system designer. i.:. Ete,. :e. g.rntl 4.1.50 CAlbi.Scn Imo icge V.V. Mai. 2 d 3 Harkel 4 MI 000000 MHz a =2 4 ) DJ I. 15, 1 207 733.1X014,20) IS, 2 i 0 CO 2100.303 CO, :0 CO I DO OD MO I00 I I o, -41,411N i 1,fej yj 51-.Ler,!.:,5-6:, Eep ALI AI M.%,4 14 ei,t 5 1 PN',4 L.._1 733 50:660 1 7i :.11 33:8 cm.. "1, 711 1 193d3 NMI 1 1,3 cf3 II MillIMIN 113111111EM -10 C.I, 67.1, tie:x.-41 Ste 7331031,711 4.4o 9230:0741..e: Cri :,6 1 C' Ftc..1 P.. S, P...C9 d t IA 111 $2 Ctrittot 2.14e ea tai ti. 5 E41.3e 114z 01111 14 d8.37.3 37.3-63:2 410-rirk,snn -:1.9 1 01 -"No,I-W-.9e4,40411./7. 1 504 :see 1441-1,ArAA,..ve/A* RMS Results irs.1 1-Isat 1st 3.1 aki it etk 'Vs.' ::rtfc. 3.1b3 til: >.[.n.:c -C7.77-72.01-7.11 41, / 14.44 IV: ff.:: 7: : 4 67.42 72.17 3.41303 1,-A-60.41 'or. 2 1.6,4 lit 1;u...23 is ($32 pts) Typical IMD measurement data. Typical ACP measurement data. MAURY MICROWAVE CORPORATION 32 RF Device Characterization Systems

RF Device CharacterIZatliin.13ystems MT993D03 - Enhanced IThrie-Domain and X-Parameters _oad D'uH Application Software General The MT993D03 enhanced time-domain and X-parameter application software is an automated application for combining a nonlinear vector network analyzer (NVNA) with load pull measurements to extend the measurement and extraction of X-parameters over the entire Smith Chart. The augmented X-parameter data include magnitude and phase as nonlinear functions of power, bias, and load, at each harmonic generated by the device and measured by the NVNA. The X-parameters can be immediately used in a nonlinear simulator for complex microwave circuit analysis and design. This capability extends the applicability of measurement-based X-parameters to highly mismatched environments, such as high-power and multistage amplifiers, and power transistors designed to work far from 50 ohnis. It provides a powerful and general technologyindependent alternative, with improved accuracy and speed, to traditional large-signal device models which are slow to develop and typically extrapolate large-signal operation from small-signal and DC measurements. Load Pull with X-Parameters Combining load pull with NVNA measurements of X-parameters and the PI ID framework provides a simple and direct way to develop a large signal model for analysis of complex power amplifier circuits. The load pull measurement creates an X-parameter file which can be loaded directly into a non-linear simulator to be used as the Pt-ID component. The data can be used immediately for analysis of complex power amplifier circuits. The load-dependent X-parameters enable full waveforms to be predicted - calibrated to the device terminals - even under high degrees of compression, and over all impedance environments. The user selects an impedance range of interest, possibly over the entire Smith chart, then uses the PI-ID model as a circuit element in a non-linear analysis. Because it is based on measurement at the actual operating conditions of the device this model can be used with great confidence. The load pull X-parameter measurement can include a complete sweep plan. Stimulus variables can include impedance, power drive, bias, and frequency. This can extend the applicability of the PI-ID model over a much wider range of validity - over the range of actual applications for many highpower and multi-stage PA designs. This process is a major simplification over past practice. It provides the simplicity of using load pull and NVNA data directly for simple power amplifier design, but with the ability to analyze complex circuits that require a large signal model. It is not limited to characterizing a single device, but applies equally to modeling an amplifier section. The entire process is independent of the device technology. Extracting full loaddependent X-parameters at multiple harmonics is significantly more automated and repeatable than extracting a standard "compact" transistor model. This makes it ideal for use with new technologies and new amplifier realizations before any detailed physics-based compact models or accurate circuit-level models are available. j4a "me! System Configuration Compared to a typical scalar load pull system, the combination of MT993D03 enhanced time-domain and X-parameter application software and a nonlinear network analyzer, like the Agilent PNA-X with NVNA and X-Parameter options, results in a simplified setup with fewer components, an easier use model, and faster measurements. The centerpiece of the measurement setup is the PNA-X with NVNA and X-parameter options. The MT993D03 software can run directly on the analyzer for maximum interoperability and speed, eliminating the need for a dedicated measurement computer, and serves as a time domain measurement system with 26 GI-Iz of bandwidth. All couplers, bias tees, and RF sources are included in the PNA-X, so connecting the system is simple. The USB-controlled tuner plugs directly into the analyzer, and the DC instruments are controlled through the built-in GPIB interface. Since both the NVNA firmware and MT993D03 software have built-in support for external instrument control through GPIB, bias sweeps are easy to set up and measurement synchronization is automatically handled. The user interface is primarily handled through Maury's ATS software, with the NVNA firmware used for calibration and made available for advanced settings (configuring internal switches and attenuators, utilizing advanced features of the PNA-X such as pulse modulation or triggering, etc.). Measurement configuration through the GUI is similar to standard load pull configuration, but uses a simpler block diagram with the NVNA replacing several instruments. The measurement parameter "X-Params" is available when the NVNA is included in the setup. When it is not selected, timedomain load pull measurements (load dependent waveforms) are taken. When "X-Params" is selected, the X-parameters of the DUT are also measured as a function of load and any swept bias conditions. The resulting X-parameters are written to a single file at the end of the measurement and are immediately ready to be imported into ADS and used in simulation arid design. MAURY MICROWAVE CORPORATION 33 RF Device Characterization Systems

RF Device 'Chef eaterizatian Systeme M 993D04 - Active Load Pull General Considering our DUT as a two-port device shown in Figure 1, F, is nothing more than alb or the ratio between the reflected- and forward-traveling waves. A generalized form of the formula can be written as (/). 0,. (f,) b c b,.i1 b, Port 1 Port 2 b, 12 2 Two-port Scattering Parameter Model A closer examination of the formula Fi =a,/b, reveals that there is no limitation on separating the sources of a, and b,. It is obvious that b, is the wave coming from the device, of which we have no direct control; however a, need not be a reflected version of b, but can be a new signal entirely! Active Load Pull Active injection load pull, more commonly referred to as active load pull, relies on external sources to inject a signal into the output of the DUT, thereby creating a,. Because a, is no longer limited to a fraction of the original reflected signal, as is the case with the traditional passive mechanical tuner, external amplifiers may be used to increase a, nearly indefinitely so that F, can achieve unity (F L >1 is theoretically possible but has no practical consideration). The simple active tuning chain consists of a signal source, a variable phase shifter and a variable gain stage, shown in Figure 2. Common signal generators, such as the Agilent ESG, PSG or MXG, have built-in amplitude and phase control of the injected signal and are ideal for active load pull. Harmonic load pull, or tuning impedances at multiple frequencies simultaneously, becomes simple when using active load pull techniques. A multiplexer can be used to merge multiple active tuning paths, one per frequency, so a (f ) that r (f )= h.' is satisfied. Any loses inherent to n multiplexers are easily overcome by the amplifiers used in each active tuning chain. Hybrid Passive-Active Load Pull Both traditional passive mechanical tuner systems and active injection load pull systems have their advantages and disadvantages. While mechanical tuners are simple, less expensive and can handle high power, there is no physical way to overcome the losses involved with the system that limit achievable While active load pull systems are extremely quick, capable of F r =1 and easily integrated for harmonic measurements on-wafer, high-power setups require moreexpensive band-limited amplifiers. It is possible to obtain the advantages of both systems while minimizing the disadvantages, using a technique referred to as hybrid load pull. Hybrid load pull refers to a combination of active and passive tuning in the same system. Traditional passive mechanical tuners can be used to reflect high power at the fundamental frequency allowing a much smaller active injection signal, using much smaller amplifiers, to overcome losses and achieve I-L =1. Additionally, since the powers at harmonic frequencies are often well below the power of the fundamental signal, less-expensive wideband amplifiers may be used with active tuning to accomplish active harmonic load pull with F, i=1. In both cases, only a low power is required for active tuning. -1.= 31=. MAURY MICROWAVE CORPORATION 34 RE Device Characterization Systems

RF Device Characterization Bysterns Optional Software Features System Control Option (MT993F) MT993F is an option that extends the capability of the MT993A or MT993C power measurement application software to provide automated switching between noise, power, Intermod Distortion (IMD), Adjacent Channel Power (ACP), DC I-V curves, and S-parameter measurements from a single setup. A special S-parameters, noise, and power (SNP) calibration is also possible with this option. A further advantage of this option is that the RF switching reduces system cost by allowing sharing of equipment. This can save the cost of up to two RF sources. DC I-V Curve Option (MT993G) MT993G is an option that extends the capability of MT993A, MT99313 or MT993C power measurement application software to provide for automatic measurement and display of device DC current-voltage curves. For FET devices, the measurement display is a family of output current versus output voltage curves with input voltage as the parameter. For bipolar devices, the measured display is a family of output current versus output voltage curves with input current as the parameter. A maximum dissipation value can be entered which will cause each sweep to terminate when that condition is reached. Harmonic Source/Load Pull Option (MT993H) MT993H is an option that extends the capability of the MT993A or MT993C power measurement application software to allow load/source pull measurements to be clone independently at the fundamental, 2nd harmonic, and 3rd harmonic frequencies. Harmonic load pull is achieved by using a diplexer/triplexer to separate tuned frequencies, or by cascading tuners in-series and using advanced algorithms to set tuner positions. Harmonic tuning will generally improve power-added efficiency (PAE) for compressed amplifiers and lower error-vector magnitude (EVM) for modulated signals. Fixture Characterization Option (MT993J) MT993J is a standalone option that enables the S-Parameters of a test fixture or probe setup to be determined from two network analyzer calibrations. First, a 2-port calibration at the coaxial cable reference plane (or similar) is performed; second, a 2-port calibration at the DUI reference plane is performed. The resulting calibrations are mathematically compared and two separate S-Parameter files, each one representing a fixture half, are generated., Snpw ICAProgram Filei.W.surylATS5101MaCcfel He (di Vex 12 Selo Catrate Meesseeteres faire Chwactertntm Wridox Het. nest V EW I V EW FILES CW P LP 1! ns A:10 AND GL F LE c:zan C FILE,,LE SNP System Block Diagram CW Lax! Duno moda setup Typical setup for performing SNP measurements MAURY MICROWAVE CORPORATION 35 RF Device Characterization Systems

RF Device Ch a acterizations stems MT993 DLL Library - User Functions 81 Custom llnstrument Drivers General A unique feature of the Maury ATS software is the availability of the instrument driver source code. Users can write their own function for a specified measurement routine and the software will carry out what is involved in that function. Similarly, when faced with the need to use a non-supported piece of equipment, the user can open and copy the file for a similar instrument and modify the copied version (under a different file name) for the specific non-supported instrument. ATS software is written with Microsoft Visual C++, so some familiarity with C programming is helpful, and a Microsoft Visual C++ compiler is required. Tuner Movement dll (MT993VO4) The Tuner Movement (III, MT993VO4, can be used for tuner initiation, setup and control with options for interpolation and de-embedding. It is also available with Interpolation as MT993V01. The Tuner Movement Dynamic link Library (c111) can be used to control: All Maury USB Tuners MT986A, MT986B, & MT986C tuner controllers MT1020B & MT1020C Hubs Solid State NP, LP Mainframe Controllers This library contains over 26 functions providing basic tuner control with an option for tuner impedance interpolation. The package has been designed to provide an easy way of controlling Maury tuners from within another proprietary software application. This library package comes as a self-extracting, executable file that can be installed on Windows 98, 2000, and XP equipped PCs. Included in the install package are programming examples for Visual Basic, Agilent VEE and LabView, and a sample executable program. All drivers are provide for the Maury Controllers and National Instruments GPIB cards. Tuner Characterization dll (MT993N06) The Tuner Characterization dll, MT993N06, provides the ability to characterize tuners without the need for external control, through the SNPW GUI. The tuner characterization files generated with this option are in the format used by the Maury Tuner Movement dll and the SNPW software. SNPW Programmers Edition (MT993E) Over 250 functions are available to be called by third party software, enabling users to do step-and-repeat measurements. Most other measurements available through the main software GUI are available to be called. Interactive mode allow users to write specialized tests without the need to develop all of the code necessary for calibration and setup. Users need only to start the interactive mode, setup the system through the SNPW GUI and then call the desired functions through the executive software. Tuner Automation Environment dll (MT993R) This package bundles together the Tuner Movement dll imt993vo4) with the Interpolation dll (MT993V011and Tuner Characterization GUI (MT993N06). Software Package Uses Models Tuner Movement dll Tuner Movement dll with Interpolation Tuner Characterization dll (External Control) Tuner Characterization SNPW GUI SNPW Programmers Edition Tuner Automation Environment Table of Products, Features & Options. Controls Tuner Movement Interpolation Between Tuner Points & Deembeding Characterize Tuners Through The Interface Characterize Tuners Through The SNPW GUI Depending On Key Options, Most SNPW Functions Are Available Bundled Package MT993VO4 MT993VO4 with VO1 MT993E with MT993N06 MT993N06 SNPW Measurement Options with MT993E MT993R (MT993V01, MT993VO4 & MT993N06) IVIAURY MICROWAVE CORPORATION 36 RF Device Characterization Systems

RF Device Characterization Systeme, AMTSv2 Automated Mobile Test System Software MT910 Series Now with Support for GSM, WCDMA & CDMA2000 Introduction Mobile phones must guarantee proper functioning in non-ideal real-world environments, such as a lost or damaged antenna, usage in a tunnel or locker, being held close to the body or in a pocket surrounded by coins, etc. Each of these scenarios can be regarded as non-ideal from an RF standpoint, meaning non-5052. We are able to use a single tuner to vary the VSWR magnitude and phase seen by the antenna port of the phone and test its performance in transmit and receive mode. The Maury Automated Mobile Test System Software (AMTSv2) is a standalone application designed specifically to automate the testing of mobile phones in transmit and receive modes, for output power and sensitivity respectively, as a function of \ISM magnitude and phase. What AMTSv2 Can Do For You AMTSv2 offers a simple, fast and cost-effective solution tailored for mobile phone testing outside of the 50Q environment. This solution automates mobile phone testing in TX/RX modes over a multitude of channels/frequencies, battery voltages and power levels. It works by combining: Maury's MT910 Series Automated Mobile Testing System software to - control the system; - de-embed VSWR and power levels to DUT reference; - control variable DC supply to mimic battery voltages; and - automate measurements; a Maury MT98x Automated Tuner, which sets non-50q impedance; and Agilent's or Rohde Schwarz's Wireless Communications Test Set, which (acting as a base station) sets active channel and power levels, and measures power and bit-error-rate. By analyzing the test results obtained using this solution you can learn: What level of antenna mismatch is acceptable, based on real-life testing against your VSWR requirements If your mobile phone meets the minimum performance requirements under pre-defined VSWR and voltage conditions If your phone's performance degrades after a large VSWR sweep plan If thermal stability issues exist If your phone's design is acceptable as is, or if some components need to be redesigned If specific performance problems result from batch manufacturing These are just a few of the ways you can use Maury MT910 AMTS software and ATS tuners to extend your mobile phone testing capability beyond the 5052 environment. Available Models Model Description (See details on page 2 of 2) MT910' MT910A MT910B Mobile Phone Tester GSM Standard WCDMA Standard MT910C CDMA2000 Standard ' MT910 requires at least one standard (MT910A, MT910B, or MT910C). MAURY MICROWAVE CORPORATION 37 RF Device Characterization Systems

_ 'RF Device Characterization Systems MT910: Mobile Phone Tester Transmit Load Pull The goal of load pull in the phone's transmit mode is to measure the output power as a function of VSWR magnitude and phase. A Wireless Communication Test Set is used in signaling mode to establish a call with a mobile phone, specify a channel/frequency (e.g., ARFCN 128 is 824 MHz uplink and 869 MHz downlink for GSA 850), set the power control level (e.g., PCL 5 is 33 dbm at GSM850) and measure the power delivered from the phone at given VSWK magnitude and phase. Receive Load Pull The goal of load pull in RX mode is the sensitivity-measurement of the phone; at what power level will a user-specified bit-error rate (BER) be achieved, as a function of VSWR magnitude and phase. A Wireless Communication Test Set is used in signaling mode to establish a call with a mobile phone, specify a channel/frequency, and send a lowpower burst (in the order of -105 to -110 dbm) to the phone and measure the resulting BER. Maury MT910 series software will vary the burst-power until the required BER is achieved. Manual Testing Simple manual testing is achieved by entering single values of channel/frequency, battery voltage, VSWR magnitude and phase. Test Automation The measurement routine is automated thanks to the use of an advanced graphic test sequencer which allows the user to enter a list of channels/frequencies, battery voltages, VSWR magnitudes and phases. Compatible Instruments Agilent 8960, R&S CMU200, R&S CMW500 (under development). MT910A: GSM Standard Adds GSM Standard to MT910 Mobile Phone Tester Supported Technology: GSM 850,900,1800,1900. Measurements Supported: TX power - Transmit Power Modulation - Frequency Error & Phase Error (RMS & PEAK) Spectrum - due to Modulation 12:3 frequencies) - due to Switching 19 frequencies] Sensitivity (search algorithm \v/adjustable start level) - 2.439% RBER MT910B: WCDMA Standard Adds WCDMA Standard to MT910 Mobile Phone Tester Supported Technology: WCDMA Bands I, II, V VI, VIII Measurements Supported: TX power - Transmit Power Modulation - Freq Error, MAG Error, Phase Error, EVM (Avg) Spectrum - ACI.R at 5 and 10 MHz I + and - Sensitivity (search algorithm w/adjustable start level) - 0.1% BER MT910C: CDMA2000 Standard Adds CDMA2000 Standard to MT910 Mobile Phone Tester Supported Technology: CDMA2000 BCO, BC1 Measurements Supported: TX power -Transmit Power Modulation - Carrier Frequency Error, Waveform Quality Spectrum - ACP at 870, 885, 900 & 1,980 MKz I + and - Sensitivity (search algorithm \v/adjustable start level) - 0.5% FER with Confidence Level >95% Mauly Mob* Phone Tester. Ccr19.Tatxel,..srwl Test I SetTexxe Dsintxn I Test beaten I WI Ccrb!ref., trent, I Oweet/Ftest.exey!.rd I,I.W450 CALI. I Ox tc 1 j TX Ltiri Px Cn-s-S-1 Fret [S35.40 J [E.H.4) Text.10) Lmt 1.7.4:19 Sestrei Gtxtnel is set k.nel rx Ft t7 r R%F,c.T Gar %re mot, nnellt1 r r C. Maury MT910 series Automated Mobile Testing System Software MAURY MICROWAVE CORPORATION 38 RF Device Characterization Systems

RF,.Device Characterization Systems Automated Tuners General Information Applications and Benefits The MT97x and MT98x series automated tuners are precision instruments that are optimized for a broad class of in-fixture and on-wafer applications, and may be used in any automated or manual application requiring the ability to match the impedance of a microwave circuit element or to establish specific impedances at a terminal interface. The tuner design is based on the slide screw concept using the inherently broadband slab-line transmission structure. Each unit has two non-contacting probes deliver high VSWR with superb accuracy and reliability over a wide frequency range. These probes can be fully retracted leaving a low-loss, well-matched transmission line, which is a significant benefit in power related applications where two-port tuners capable of handling large amounts of power are required. As integral components of Maury Device Characterization Solutions, these PC-based tuners are controlled using Maury's family of Device Characterization Software tools, including the ATS Version 5 (or later) interactive environment and the DLLbased measurement automation environment. High-Gamma Tuners TM (MT981HU series Maury USB controlled High-Gamma Tuner models deliver ultrahigh VSWR with superb accuracy and reliability. See page 40. High-Power Tuners (MT981AU/I3U/EU/WU series) These are USB controlled tuner models that are optimized for high power in-fixture and on-wafer applications. See page 42. 7mm Tuners (MT982AU/I3U/EU series) These US13 controlled 7mm Tuner models provide broad frequency coverage and ease of use for in-fixture and on-wafer applications. See page 44. 3.5mm Tuners (MT983A01 series) These GP1B interfaced 3.5mm Tuner models are optimized for C-Rand, X-Band, Ku-Band, and K-Band noise and power applications. See page 46. 2.4mm (50 GHz) Tuners (MT984AU01 series) These USB controlled 2.4mm (50 GHz) tuners are ideal for microwave and mm-wave noise and power applications from 8 to 50 Ghz. See page 48. Millimeter Wave Tuners (MT975A/7A/8A/9A series) These US13 controlled mm-wave tuner models offer high matching range and ultra-low vibration and are ideal for WR22 to WR10 noise and power applications. See page 50. Automated Sliding Loads (MT999 series) These automated sliding loads are optimized for use with Maury MT981/MT982 series tuners in applications where harmonic load-pull or tuning measurements with a high mismatch is required. See page 54. Multi-Harmonic Automated Tuners (MT98x series) The 101-9821\101 series two-carriage automated tuners are optimized for a broad class of in-fixture and on-wafer applications requiring simultaneous high-gamma and multiplefrequency tuning. See page 52. IVIAURY MICROWAVE CORPORATION 39 RF Device Characterization Systems

F Device Ch High-Gamma Automated Tuner TM (HGTM) 800 MHz TO 8 GHz Features o Specified Frequency Range is 0.8 to 6.5 GHz; Operational from 0.8 to 8.0 GHz 0 Sub 1S2 In-Fixture and On-Wafer Load-Pull for GSM/EDGE, WCDMA, WiFi, and WiMax 0 Ultra-High Matching Range for GaN, GaAs, LDMOS, and Deep Submicron CMOS Characterization O Simultaneous Ultra-High Matching and Low Vibration for On-Wafer Applications O USB Interface for Simple, Fast, Reliable Control 0 DLL Environment for Automated Applications Applications and Benefits Overview The HGT" series automated tuners are optimized for high power in-fixture and on-water applications requiring sub 1 Q impedance and low vibration simultaneously. Based on Maury's FIGT"' technology (US and international patents pending), these high-performance tuners evolve beyond obsolete and outdated multi-probe pre-matching technology to deliver ultrahigh VSWR with superb accuracy and reliability. An integral component of Maury Device Characterization Solutions, these PC-based USB-interface automated tuners are controlled using either Maury's Device Characterization Software suite WS Version 5 or later) or Maury's DLL environment. ATS software is an integrated device characterization suite providing frontend and back-end device characterization tools for power and noise characterization. The Da environment enables direct interface with common programming tools such as Agilent VEE 1", NI Labview"', MS Visual Basic & C/C++, and Mathworks MATLAB I ". With a tuning resolution in excess of a million impedance points and accuracy better than -40 db over MT981 13 7nini High-Gamma Tuner." I U.S. Patent No. 7,589,601 B2 I 0 Industry's Highest Accuracy Means Your Designs Work Right the First Time 0 Industry's Best Calibration Frees Your Time for Design the entire Smith Chart, Maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include load-pull using CW, GSWEDGE, CDMA, WCDMA, WiMax, and Will stimulus for mobile and infrastructure terminal design, RADAR design, and Sat-Corn design, arid source-pull for deep sub-micron CMOS low noise characterization. Custom Semillex cable and Cascade- Microtech probe kits are available for optimized low loss onwafer applications. Controller For optimum performance, the MTIO208 ATS Power Distribution Hub can be used to control up to four (4) MT981 HU series tuners. Additionally, the MTIO20D Desktop Switching Power Supply can be used to provide power to a single MT9811-1U series tuner. H gh-gamma Tunerw and HGT") are trademarks of Maury Microwave Corp. All other trademarks are the property of their respective owners. 3 See Maury Data Sheet 4T-070A. MAURY MICROWAVE CORPORATION 40 RF Device Characterization Systems

RF Device Cher Bystemeir Specifications Recommended Accessories Frequency Range See Available Models Table 2698C2 7mm (3/4-in. hex) torque wrench VSWR Matching Range..See Available Models Table 2498T1 14mm 11-in. hex) torque wrench Step Size (Probes) 62.5 microinches1 2698K1 7-16 (1-1/16-in. hex) torque wrench Step Size (Carriage) 786 microinches1 80225 3.5mm (0 to 7min ultra-low-loss adapter Connectors 7mm2, 1 4mrn 3 or 7-1 6 4 8022T 3.5mm (m) to 7mm ultra-low-loss adapter Accessories Provided One MT' 020D controller, one USB cable and one operating manual. Available Models Model MT981HU13 MT981HU23 MT981HU33 Frequency Matchit g Range Power Range, Capability 6 (GHz) Minimum Typical' 0.8-6.5 100:1 200:1 6.5-8.0-60:1 0.8-6.5 100:1 200:1 250 W CW 6.5-8.0-60:1 2.5 kw PEP 0.8-6.5 100:1 200:1 6.5-8.0-60:1 Dimensions - Inches (mm) Model MT981HUxx ATS High Gamma Automated Tuner A028D 7mrn connector gage kit A024 14mm connector gage kit A041A 7-16 connector gage kit Vector Repeatability (Minimum) AGt (Typical). 7 VSWR (Maximum), Insertion Loss' (Maximum) Dimensions 12.0" (30.5cm) x 10.0" (25.4cm) x 17.4' (44.3cm) -40 db8 +0.3 db 1.05:18 0.3 de 15.9' (40.3cm) 17.0' (43.2cm) Dimensions are shown in inches and ((I'm] 10.00 [254.0] 7.61 [193.4] 7.14 [181.3] 14.82 [376.4] 0.58 [14.7] 7-16 Connectors 12.14 308.3] Max DUT Port 4.8 121.9 2.9 73.0 IT 14mm (GR900) Connectors 9.37 [237.9] 2.00 [50.8] 10.25 [260.4] 15.86 [402.8] IMatino Surtaces1 I Based on 1/2 stepping the drive motors. 5 Defined as the minimum VSWR 20% of the peak VSWR. 2 Precision 7mm per Maury data sheet 5E-060. 6 Power at maximum VSWR. 3 Precision 14mm (GR900 equivalent). 7 With probes fully retracted. 4 Precision 7-16 per Maury data sheet 5E-066. 8 0.8 to 6.5 GI-Iz only. 0 141 47 2.4.52] 7mm Connectors MAURY MICROWAVE CORPORATION 41 RF Device Characterization Systems

evicts -terization High-Power Automated Tuners 0.25 TO 8.0 GHz Features 0 Optimized for GSM/EDGE, WCDMA, WiFi and WiMax In-Fixture and On-Wafer Applications 0 High matching Range for GaN, GaAs, LDMOS, and Si Characterization uriv064v??. iikpfa /TO "Vic MT981 BU1 0 High-Power Automated Tuner 0 Simultaneous High Matching and Low Vibration for On- Wafer Applications USB Interface for Simple, Fast, and Reliable Control 0 DLL Environment for Automated Applications 0 Industry's Highest Accuracy Means Your Designs Work Right the First Time 0 Industry's Best Calibration Frees Your Time for Design Applications and Benefits Overview The MT98 1 series automated tuners are optimized for high power in-fixture and on-wafer applications requiring low impedance and low vibration simultaneously. Based on Maury's proven non-contacting probe technology, these high-performance tuners evolve beyond outdated contacting probe technology to deliver high VSWR with superb accuracy and reliability. An integral component of Maury's Device Characterization Solutions, these PC-based USB-interface automated tuners are controlled using Maury's family of Device Characterization Software tools including the ATS Version 5 (or later) interactive environment and the DLLbased measurement automation environment. The ATS interactive environment is an integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. The Da environment enables direct interface with common programming tools such as Agilent VEE'", NI Labview 1", MS Visual Basic & C/C++, and Mathworks MATLAB I". With a tuning resolution in excess of a million impedance points and accuracy better than -50 db over the entire Smith Chart, Maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include loadpull using CW, GSM/EDGE, CDMA, WCDMA, WiMax, and WiFi stimulus for mobile and infrastructure terminal design, RADAR design, and Sat-Com design. Controller For optimum performance, the MT102013 ATS Power Distribution Flub can be used to control up to four (4) MT981 xl1 series tuners. Additionally, the MT 1 020D Desktop Switching Power Supply can be used to provide power to a single MT98 lx1j series tuner. See Maury Data Sheet 4T-071A. MAURY MICROWAVE CORPORATION 42 PP Device Characterization Systems

r-- _ RF Device Characterization Systems Specifications Frequency Range See Available Models Table VSWR Matching Range See Available Models Table Step Size (Probes) 62.5 microinches1 Step Size (Carriage) Connectors* Available Models Model Frequency Range (GHz ) Matching Range Minimum Typical3 786 microinchesi Precision 7mm2 Power 4 Capability Accessories Provided One MT1020D controller, one USI3 cable and one operating manual. Recommended Accessories 2698C2 7mm (3/4-in. hex) torque wrench A028D 7mm connector gage kit 8022S 7mm to 3.5mm (1) precision adapter 8022T 7mm to 3.5mm (m) precision adapter Vector Repeatability (Minimum) AGt (Typical) 5 VSWR (Maximum) Insertion Loss5 (Maximum) Dimensions 12.0" (30.5cm) x 10.0" (25.4cm) x MT981AU11 0.25-2.5 15:1 40:1 36.9" (93.6cni) MT981BU10 0.40-4.0 15:1 50:1 23.0" (58.6cm) MT981BU15 0.40-2.5 30:1 60:1 23.0" (58.6cm) 0.40-0.5 30:1 60:1 250 W CW -50 db ±0.1 db 1.05:1 0.3 db MT981BU16 0.50-2.2 40:1 60:1 2.5 kw PEP 23.0" (58.6cm) 2.20-2.5 30:1 60:1 MT981EU10 0.80-8.0 15:1 50:1 15.9" (40.3cm) MT981WU10 0.60-6.0 15:1 40:1 23.0" (58.6cm) MT981 Dimensions - 10.0 See Available Models Table 10.31 to 12.02 3.02 to 4.73 1 Based on 1/2 stepping the drive motors. 4 Power rated at maximum VSWR. 2 Precision 7mm per Maury data sheet 5E-060. 5 With probes fully retracted. 3 Defined as the maximum VSWR within 20% of the peak VSWR. * Also available in 14mm and/or 7-16 upon request. IVIAURY MICROWAVE CORPORATION 43 RF Device Characterization Systems

7mrn AuWmated Tuners 0.8 To 18 GHz Features 0 Optimized for GSM, WCDMA, WiFi, WiMax, X-Band, Ku-Band, and CW/Pulsed Microwave Applications 0 High matching Range for GaN, InP, InGaP, GaAs, LDMOS, Si, and CMOS Device Characterization 0 Simultaneous High Matching and Low Vibration for On-Wafer Applications USB Interface for Simple, Fast, and Reliable Control 0 DLL Environment for Automated Applications MT982EU30 7mm Automated Tuner 0 Industry's Highest Accuracy Means Your Designs Work Right the First Time Industry's Best Calibration Frees Your Time for Design Applications and Benefits Overview The MT982 series automated tuners are optimized for a broad class of in-fixture and on-wafer applications requiring flexibility, broad frequency coverage and ease of use. Based on Maury's proven non-contacting probe technology, these high-performance toilers evolve beyond outdated contacting probe technology to deliver high VSWR with superb accuracy and reliability. An integral component of Maury's Device Characterization Solutions, these PC-based USB-interface automated tuners are controlled using Maury's family of Device Characterization Software tools including the ATS Version 5 (or later) interactive environment and the DLLbased measurement automation environment. The ATS interactive environment is an integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. The Dl.t. environment enables direct interface with common programming tools such as Agilent VEE Tm, NI Labview im, MS Visual Basic & C/C++, and N4athworks MATI.A13 1 ". With a tuning resolution in excess of a million impedance points and accuracy better than -40 db over the entire Smith Chart, Maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include loadpull using CW, GSWEDGE, CDN1A, WCDNIA, \ViMax, WiBro, and WiFi stimulus for mobile and infrastructure terminal design, X-band and Ku-band design, Sat-Con y design, and source-pull for CMOS and GaAs low noise characterization. Controller For optimum performance, the MT102013ATS Power Distribution Flub can be used to control up to four (4) MT982 series tuners. Additionally, the MT1020D Desktop Switching Power Supply can be used to provide power to a single MT982 series tuner. Trademarks shown above are the property of their respective owners. See Maury Data Sheet 4T-072. MAURY MICROWAVE CORPORATION 44 RF Device Characterization Systems

RF iiiaricacterization Specifications Frequency Range See Available Models Table VSWR Matching Range See Available Models Table Step Size (Probes) 62.5 microinches1 Step Size (Carriage) 355 microinches1 Connectors Precision 7mm2 Accessories Provided One MT1020D controller, one USB cable and one operating manual. Recommended Accessories 2698C2 7mm (3/4-in. hex) torque wrench A028D 7mm connector gage kit 8022S 7mm to 3.5min (1) precision adapter 8022T 7mm to 3.5mm (m) precision adapter Available Models Model Frequency Range (GHz) Matching Range Minimum Typical 3 Power 4 Capability Vector Repeatability (Minimum) AGt (Typical) 5 VSWR (Maximum) Insertion Loss 5 (Maximum) Dimensions 9.0" (22.9cm) x 7.7" (19.6cm) x MT982EU 0.8-8.0 15:1 40:1 0.4 db 13.7' (34.8cm) MT982BUO1 0.8-18.0 10:1 30:1 0.5 db 50 W CW - MT982AUO2 1.8-18.0 15:1 40:1 0.5 kw PEP -40 db -±0.3 db 1.05:1 9.3' (23.6cm) MT982EU30 0.8-2.0 30:1 60:1 0.4 db 2.0-8.0 15:1 40:1 13.7' (34.8cm) Dimensions (Inches) 5.38 [136.5) o- 5.53 [140.5) -I.- -.58 [14.7) 6.92 [175.7) 7.69 [195.2) Front View 1 Based on 1/2 stepping the drive motors. 2 Precision 7mm per Maury data sheet 5E-060. 3 Defined as the maximum VSWR within 20% of the peak VSWR. 7mm Connectors 13.70 (348.0) - (Mating Surfaces) Side View 4 Power rated at maximum VSWR. 5 With probes fully retracted. MAURY MICROWAVE CORPORATION 45 RF Device Characterization Systems

- evice.,char. c erizatio. S st 3.5mm Automated Tuners 4.0 TO 26.5 GHz Features Optimized for C-Band, X-Band, Ku-Band, K-Band Noise and Power Applications O Simultaneous High-Matching and Ultra-Low Vibration for On-Wafer Applications O Ideal for Broad-Band Noise parameter Extraction and Noise and Large-Signal Nonlinear Model Verification o DLL Environment for Automated Applications MT983A01 3.5mm Automated Tuner Applications and Benefits Overview The MT9813A0 I automated tuners are optimized for a broad class of in-fixture and on-waver applications requiring flexibility, broad frequency coverage and ease of use. Based on Maury's proven non-contacting probe technology, these high-performance tuners evolve beyond outdated contacting probe technology to deliver high VSWR with superb accuracy and reliability. An integral component of Maury's Device Characterization Solutions, these PC-based automated tuners are controlled using Maury's family of Device Characterization Software tools including the Maury ATS version 5 (or later) interactive environment and the DLL-based measurement automation environment. The ATS interactive environment is and integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. The DLL environment enables direct interface with common programming tools such as Agilent VEE i ' ', NI Labviewl ", MS Visual Basic & C/C++, and Mathworks N4ATLAB im. With a tuning resolution in excess of a million impedance points and accuracy better than -40 db over the entire Smith Chart, maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include load-pull for C1.11 and pulsed or modulated C-band, X-band, Ku-band, K-band design. Controller For optimum performance, the MT1020C ATS Controller is designed to provide a USB interface to non-usb tuners and can be used to control up to two (2) tuners simultaneously. Alternatively, the legacy MT986 GPIB-programmable ATS controller may also be used. See Maury Data Sheet 4T-075. MAURY MICROWAVE CORPORATION 46 RF Device Characterization Systems

Specifications Frequency Range VSWR Matching Range Step Size (Probes) Step Size (Carriage) See Available Models Table See Available Models Table 62.5 microinches1 355 microinchest RF Devide Characterization Systems Accessories Provided One (1) each MT9 32C12 tuner control cable and one (1) operating manual. Recommended Accessories MT 1020C 2698F1 USB controller power huh 3/4-in. hex torque wrench Connectors NMD3.5mm male2 A050A 3.5mm connector gage kit MT900 Probe station integration Available Models Model Frequency Range (GHz) Matching Range Minimum 3 Typical Power Capability 4 Vector Repeatability (Minimum) AGt (Typical) VSViR5 (Maximum) Insertion 5 Loss (Maximum) Dimensions AT983A01 4.0 26.5 10:1 15:1 lowcw 100 W PEP 40 db ±0.2 db 1.10:1 0.6 db 7. 7 ' x 7.8' x 9.0' (19 5cm x 19.9cm x 22.8cm) Dimensions - Inches and (mm) 5.38 [136.5] 6.56 [166.7] 8.97 [227.9] Max 3.25 1.55 7.69 [195.2] 7.83 [198.8] (Mating Surfaces) Based on 1/2 stepping the drive motors. 4 Power rated at maximum VSWR. 2 NMD3.5mm male per Maury data sheet 5E-084. 5 With probes fully retracted. 3 Defined as the maximum VSWR within 20% of the peak VSWR. r-717=717.1...c. MAURY MICROWAVE CORPORATION 47 RF Device Characterization Systems

2.4rnm /Automated Tuners 8 To 50 GHz Features O Optimized for X-Band, Ku-Band, K-Band, Ka-Band, Microwave and mm-wave Noise and Power Applications o High matching Range for GaN, InP, InGaP, GaAs, LDMOS, Si, and CMOS Device Characterization O Simultaneous High Matching and Ultra-Low Vibration for On-Wafer Applications USB Interface for Simple, Fast, and Reliable Control MT984AU01 2.4mm 50 GHz Automated Tuner OOptimized for mm-wave Power and Noise Applications OIdeal for Broad-Band Noise Parameter Extraction and Noise and large-signal Nonlinear Model Verification 0 DLL Environment for Automated Applications Applications and Benefits Overview The MT984AU01 automated tuners are optimized for a broad class of microwave and millimeter-wave applications requiring flexibility, broad frequency coverage and ease of use. Based on Maury's proven non-contacting probe technology, these high-performance tuners evolve beyond outdated contacting probe technology to deliver high VSWR with superb accuracy and reliability. An integral component of Maury's Device Characterization Solutions, these PC-based USB-interface automated tuners are controlled using Maury's family of Device Characterization Software tools including the ATS Version 5 (or later) interactive environment and the DLL-based measurement automation environment. The ATS interactive environment is an integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. The DLL environment enables direct interface with common programming tools such as Agilent VEE R', NI Labview im, MS Visual Basic & C/C++, and Mathworks MATLAB T". With a tuning resolution in excess of a million impedance points and accuracy better than -40 db over the entire Smith Chart, Maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include load-pull for CW and pulsed or modulated X-band, Ku-band, Ka-band design and Sat-Cone design, and source pull for CMOS and GaAs low noise characterization to 50 GI-Iz. Available in 2.,1111111 connector. Controller For optimum performance, the MT1020B ATS Power Distribution Flub can be used to control up to four (4) MT984 series tuners. Additionally, the MT1020D Desktop Switching Power Supply can be used to provide power to a single MT984 series tuner. See Maury Data Sheet 4T-073. MAURY MICROWAVE CORPORATION 48 RF Device Characterization Systems

RF DeviCa Characterization E3yeterna, Specifications Frequency Range See Available Models Table VSWR Matching Range See Available Models Table Step Size (Probes) 31 microinches1 Step Size (Carriage) 50 microinches1 Connectors Precision 2.4mm (female and male)2 Accessories Provided One MT1020D controller, one USB cable and one operating manual. Recommended Accessories 8799A1 2.4mm (5/16-in. hex) torque wrench A048A 2.4mm/1.85mm digital connector gage kit MT900 Probe station integration Available Models Model Frequency Range (GHz) Matching Range Minimum Typical3 Power Capability4 Vector Repeatability (Minimum) L\Gt (Typical) VSWR' (Maximum) Insertion Loss5 (Maximum) Dimensions MT984AU01 8.0 50.0 10:1 20:1 10 W CW 100 W PEP 40 db ±0.2 db 1.15:1 0.65 db 7.1' x 9.8' x 5.2' (19.0cm x 24.9cm x 13.2cm) Dimensions (Inches) 4.60 [116.8] 6.931176.01 4.851 23.21 7.13 ( 81.11 Max.87 [22.21 3.15 80.1 L_ n _J L_ n._j 1.55 39.3 Side View 5.20 (132.1) (Mating Surfaces) 2.4mm Connectors 1 Based on 1/2 stepping the drive motors. 2 Precision 2.4mm per Maury data sheet 5E 064. 4 Power rated at maximum VSWR. 5 With probes fully retracted. 3 Defined as the maximum VSWR within 20% of the peak VSWR. MAURY MICROWAVE CORPORATION 49 RF Device Characterization Systems

RF Device Characterization. S sterns Millimeter-Wave Automated Tuners 33 TO 110 GHz Features FU.S. Patent No. 5,910,754 1 0 Optimized for WR22 to WR10 Millimeter-Wave Noise and Power Applications OHigh matching Range for GaN, InP, InGaP, GaAs, LDMOS, Si, and CMOS and BiCOMOS Device Characterization o Simultaneous High Matching and Ultra- Low Vibration for High-Power On-Wafer Applications o Ideal for mm Wave Noise Parameter Extraction and Noise and Large-Signal Nonlinear Model Verification o DLL Environment for Automated Applications Applications and Benefits Overview The MT97x series of automated tuners are optimized for a broad class of microwave and mm-wave applications requiring flexibility, broad frequency coverage and ease of use. Based on Maury's patented ultra-high matching range technology, these waveguide high-performance tuners deliver high VS\'VR with superb accuracy and reliability. An integral component of Maury's Device Characterization Solutions, these PC-based automated tuners are controlled using Maury's family of Device Characterization Software tools including the ATS Version 4 (or later) interactive environment and the DLL-based measurement automation environment. The ATS interactive environment is an integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. The DU environment enables direct interface with common programming tools such as Agilent VEE".', NI Labview''', MS Visual Basic & C/C++, and Mathworks MATLAB'". With a tuning resolution in excess of a million impedance points and accuracy better than -50 db over the entire Smith Chart, Maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include load-pull for CVV, and pulsed or modulated WR22 to WR10 mm-wave applications such as onwafer load-pull for Collision Avoidance RADAR, high-capacity WLANAVPANAVMAN networks, military applications, low noise characterization and mm-wave noise and power model verification. MT979A WR10 Automated Tuner MT979A WR10 Automated Tuner with Cover Removed See Maury Data Sheet 4T-074. MAURY MICROWAVE CORPORATION 50 RF Device Characterization Systems

RF Device 'Characterization Systems, Specifications Frequency Range See Available Models Table VSWR Matching Range See Available Models Table Accessories Provided One (1) each MT982C12 tuner control cable and one (1) operating manual. Step Size (Probes) Step Size (Carriage) Flanges 0.5 Illicronsi 0.5 microns2 MPF10, N1PF12, MPF15, or MPF222 Recommended Accessories MT1020C USB controller power hub MT900 Probe station integration Available Models Model Frequency Range (GHz) Matchin g Range Minimum Typical 3 Power,, c apability- Vector Repeatability (Minimum) AGt (Typical) VSWR5 (Maximum) Insertion Loss5 (Maximum) Dissipative Loss5 (Maximum) MT975A 33.0 50.0 30:1 40:1 1.04:1 0.45 db MT977A 50.0 75.0 20 W CW 50 db ±0.1 db MT978A 60.0 90.0 20:1 35:1 200 W PEP 1.06:1 0.65 db 7dB MT979A 75.0 110.0 Dimensions (Inches) for MT977A, MT978A & MT979A Tuners 2.215 POWER CONNECTOR o 1.388 5. 3 0.675 1 S A o 4.95 sr)i 8-320C-28 THOS. 8 PLCS. 1.585 L0.250 Dimensions (Inches) for MT975A Tuners 1.188L. 2.2151 POKER CONNECTOR e 8-32UNC-28 THOS. 8 P,CS. A 0.800 i-- 1.600 1.120-1 -- 3.320 ---, I 1.585 0.125 Based on 1/2 stepping the drive motors. 4 Power rated at maximum VSWR. 2 Maury Precision Flanges (MPF) equiv. to IEEE WR10, WR12, WR15. 5 With probes fully retracted. WR19 or WR22 sizes. 6 At maximum VSWR. 3 Defined as the maximum VSWR within 20% of the peak VSWR. MAURY MICROWAVE CORPORATION 51 RF Device Characterization Systems

_ - Device Characterization Systeirs Multi-Clarmonic Automated Tuners 600 MHz to 26 GHz Features Optimized for Two-Frequency Harmonic Load Pull Simultaneous High-Gamma and Harmonic Tuning Designed for Harmonic-Sensitive Applications Including GaAs and GaN Industry's Highest Accuracy Means Your Designs Work Right the First Time Industry's Best Calibration Frees Your Time for Design Applications and Benefits Overview The MT98xM series two-carriage automated tuners are optimized for a broad class of in-fixture and on-wafer applications requiring simultaneous high-gamma and multiplefrequency tuning. Based on Maury's proven non-contacting probe technology, these high-performance tuners evolve beyond outdated contacting probe technology to deliver high VSWR with superb accuracy and reliability. An integral component of Maury's Device Characterization Solutions, these PC-based automated tuners are controlled using Maury's family of Device Characterization Software tools including the ATS Version 5 (or later) interactive environment and the DLL-based measurement automation environment. The ATS interactive environment is an integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. With a tuning resolution in excess of a million impedance points and accuracy better than -40 db over the entire Smith Chart, Maury automated tuners give you the device characterization answers you need with the accuracy necessary to make engineering decisions with confidence. Typical applications include load-pull using CW and pulsed harmonic load pull for GaAs and GaN characterization, 2G/3G/4G base stations and mobile handsets, wireless connectivity (WiMax, WiBro, WLAN), Sat-Cone, and other US/C/X/Ku/K-bands applications. See Maury Data Sheet 4T-077. MAURY MICROWAVE CORPORATION 52 RF Device Characterization Systems

RF Device Characterization Systems Available Models Model Frequency Range (GHz) 1 Single Frequency Tuning (Minimum) Matching Range Two Frequency Tur ing Fmin Fmax Fmin Frnax MT982M01 1.8-18.0 100:1 40:1 10:1-100:1 10:1-100:1 Power Capability 2 50 W CW 0.5 kw PEP Vector Repeatability (min) Insertion Loss 3 (Max) Connectors 1-40 db 0.4 db 7mm Dimensions 9.0' (22.9cm) x 7.T (19.6cm) x 13.7' (34.8cm) 1 Including fundamental and harmonic frequencies. 3 With probes fully retracted. 2 Power at maximum VSWR. Precision 7mm per Maury data sheet 5E-060. Dimensions - Inches [Cm] 10.61 [269.5] 6.69 [169.8] 7.69 195.2] 11.61 [294.9] 7_ 5.38 (136.5) 3.25 [82.5i 1.55 39.4 7.69 (195.2) 13.70 [348.0] (Mating Surfaces) MAURY MICROWAVE CORPORATION 53 RF Device Characterization Systems

- F Device C, System s Automated Sliding Shorts 0.4 TO 18.0 GHz Features O Optimized for Low-Cost Harmonic Load-Pull Measurement o 50:1 Minimum Matching Range MT999A Automated Sliding Short o DLL Environment for Automated Applications Applications and Benefits Overview The MT999 series automated sliding shorts are optimized for use with Maury MT981/MT982 series tuners in applications where harmonic load-pull or tuning measurements with a high mismatch is required. When used with the appropriate triplexer or diplexer, the MT999A/B/D sliding shorts provide the capability to make the most accurate and reliable harmonic measurements possible. These easy-to-use high-performance tuners deliver a very high mismatch with superb accuracy and reliability over a broad frequency range. The MT999 series automated sliding shorts are designed for use with Maury's family of Device Characterization Software tools including the Maury ATS version 5 (or later) interactive environment and the DLL-based measurement automation environment. The ATS interactive environment is and integrated device characterization environment providing comprehensive calibration and device characterization tools for power and noise optimization. The DLL environment enables direct interface with common programming tools such as Agilent VEE R', NI Labview l ", MS Visual Basic & C/C++, and Mathworks MATLABR'. Controller MT999B Automated Sliding Short For optimum performance, the MT1020C ATS Controller is designed to provide a USB interface to non-usb sliding shorts and can be used to control up to two (2) sliding shorts simultaneously. Alternatively, the legacy MT986 ( -MBprogrammable ATS controller may also be used. See Maury Data Sheet 4T-076 MAURY MICROWAVE CORPORATION 54 RF Device Characterization Systems

7." vice Ct eriaave-,itati gin System:E Specifications Accessories Provided Frequency Range See Available Models Table One (1) each MT982C1 2 tuner control cable and one (1) operating manual. VSWR Matching Range See Available Models Table MT999A Step Size (Carriage) MT999B Step Size (Carriage) Connectors Available Models 625 microinches1 Recommended Accessories MT 1 020C USE3 controller power hub 208.75 microinches1 2698C2 3/4-in. hex torque wrench Precision 7mm 2A028D 7mm connector gage kit Model Frequency Range (GHz) Minimum Matching Range Typical Power Capability Vector Repeatability (Minimum) Dimensions MT999A 0.8 7.5 MT999B 3.0 18.0 50:1 90.1 10WCW 100W PEP 40 db 6.75' x 4.36' x 16.35' (17.1cm x 11.1cm x 41.5cm) 6.75' x 4.36' x 10.49' (17.1cm x 11.1cm x 26.6cm) MT999D 0.4 4.0 35 db 6.75' x 4.36' x 23.85' (17.1cm x 11.1cm x 60.58cm) Dimensions for MT999A/B/D - Inches 4.36 2.65 3.28 1.58 5.75 16.35 (MT999A) 10.49 (MT99913) 23.85 (MT999D) 1 Based on 1/2 stepping the drive motors. 2 Precision 7mm male per Maury data sheet 5E 060. 7,4CM=OMMICEMEIE,- - IVIAURY MICROWAVE CORPORATION 55 RF Device Characterization Systems

RF. Device CharaCiteilzation Systems Pre-Matching Probe Mounts IVIT902A Series Features On-Wafer Broadband Pre-Matching Low Loss Wafer Probe Mount O 8.0 to 50.0 GHz O Ultra High Stability Design General The MT902A series of pre-matching probe mounts are highly stable, low loss water probe mounts used in on-wafer device characterization applications. By extending a water probe away from the tuner body, these mounts create additional clearance for proper probe alignment. The ultra-high stability inherent in their design eliminates the possibility of undesired movement during operation. MT902A2 Pre-Matching Probe Mount on a MT989AU01 50 GHz Automated Tuner. This launch configuration is also used on MT902A1 and MT902A3. Specifications Frequency Range VSWR Range Insertion Loss Power Handling Connectors Weight 8.0 to 50.0 GFIz 10.1 minimum 0.36d B1/0.45(1132 10W CW, 0.5 kw peak 2.4mm 2.7 oz. Available Models MT902A5 Basic Probe Mount on a MT984A01 50 GHz Automated Tuner. This launch configuration is also used on MT902A6 and MT902A7. Model Description Frequency Range (GHz) Matching Range Recommended For Use With Probe Stations MT902A1 Basic probe mount DC 50.0 NA Cascade Summit 9000 MT902A2 High frequency pre-matching probe mount 21.5 50.0 10:1 Cascade M150 MT902A3 Low frequency pre-matching probe mount 8.0 21.5 10:1 Cascade RF1 MT902A5 Basic probe mount DC 50.0 NA Cascade 11K MT902A6 High frequency pre-matching probe mount 21.5 50.0 10:1 Cascade 12K MT902A7 Low frequency pre-matching probe mount 8.0 21.5 10:1 Cascade S300 1 MT902A1/2/3 at 50 GHz with probe retracted. 2 MT902A5/6/7 at 50 GHz with probe retracted. See Maury Data Sheet 2G-035D. MAURY MICROWAVE CORPORATION 56 RF Device Characterization Systems

:evice Characterization Byeiterna Dimensions (Inches) IV1T902A1, MT902A2 & MT902A3 1.19 Recommended Launch Configuration for Cascade Summit 9000, M150 & RF1 Probe Stations 2.15 2.4mm (FEMALE) 0 1r it. 0 8 0 8 2.00 2.615 SUPPORT BRACKET MT902A5, MT902A6 & MT902A7 Recommended Launch Configuration for Cascade 11K, 12K & S300 Probe Stations 1.19 2.4mm (FEMALE) 2.00 2.640 SUPPORT BRACKET 76- MAURY MICROWAVE CORPORATION 57 RF Device Characterization Systems

Ovice Character!zation eitetris Noise Receiver ivoduies R/17553 Series 10 MHz to 110 GHz Features* Expanding the Capabilities of Noise Figure Analyzers for Ultra-Wideband Noise Parameter Measurements o Instantaneous Ultra-Wideband Measurements from 10 MHz to 50 GHz 0 Banded Measurements from 50-75 GHz, 60-90 GHz, and 75-110 GHz O Automates Noise Parameter Measurement Systems O Replaces External Banded Components Integrated Downconverter, Bias Tees, Low-Noise Amplifier, and Switches MT7553M with Controller o Low Noise Figure Introduction Noise Parameter measurements are typically performed using a Vector Network Analyzer (VNA) to measure the S-Parameters of an amplifier, and a Noise Figure Analyzer (NFA) to measure the noise figure or noise power of an amplifier. While traditional NFAs are commonly available 01) to 26.5 G1-1z, many amplifier designers wish to test their amplifiers past this frequency limit. The MT7553 series of Noise Receiver Modules enable engineers to take ultra-wideband noise parameter measurements by extending the frequency limit of the NFA to 50, 75, 90 or 110 GHz. MT7553B 50 GHz Noise Receiver Module The MT7553B is much more than a simple downconverter, it is the backbone of 50 GHz noise parameter measurement system. A downconverter accepts an input signal (commonly referred to as RF signal) at Ft and mixes it with local oscillator signal F2, resulting in an intermediate frequency (IF) of Fl- F2, a frequency able to he directly measured by a NFA. The Noise Receiver Module consists of a downconverter including integrated mixer and local oscillator, as well as integrated bias networks to power the device under test, integrated RF * See Available Models tab'e en page 47. switches to switch between VNA and NFA paths, and integrated low-noise amplifier (WA) to improve receiver noise figure. In essence, the MT7553 replaces the entire output block, or receiver module, of our noise parameter measurement system and is designed for easy on-wafer integration. Simply connect the VNA, NFA and bias supplies to the proper module ports, and begin taking measurements. For the first time ever, fully automated frequency-swept noise parameters can be measured between 10 MHz and 50 GHz on-water without disconnecting or changing a single component or cable, with extremely fast and accurate results. MT7553B01 50 GHz PNA-X Noise Receiver Module The MI75531301 has been tailored for Agilent Technologies' new "one-box" solution, the PNA-X. Because the Noise Parameter and S-Parameter ports on the PNA-X are one and the same, the MT7553B01 uses a transfer switch to internally combine both pathways into one external port, easily connected to the PNA-X. See Maury Microwave article reprint 5A-042 for the speed and accuracy benefits of using the PNA-X over traditional methods. See Maury Data Sheet 4T-085. MAURY MICROWAVE CORPORATION 58 RF Device Characterization Systems

RF Device Characterization: yateme MT7553M Millimeter Wave Noise Receiver Module The MT7553M is designed for full millimeter-wave noise parameter measurements within the TE10 waveguide band of operation. The MT7553M downconverts noise power densities from the frequency of interest to the NFA bandwidth using a double-side band swept LO technique. The MT7553M is available between 50-75 GI-1z MR15), 60-90 GHz (WR12) and 75-110 GI-1z (WR10). Available Models Input Frequency Output Frequency Bias RF VNA/NFA Noise Figure Model LO Mixer LNA Connector (System) (NFA) Tee Switch Ports Typ Max MT7553B 0.01 50.0 GHz 0.01 26.5 GHz Internal Internal Internal Internal Internal Separate 15 20 2.4mm MT7553B01 0.01 50.0 GHz 0.01 26.5 GHz Internal Internal Internal Internal Internal Combined 15 20 2.4mm MT7553M15 50.0 75.0 GHz 0.01 26.5 GHz Internal Internal Internal External External Separate 12 12 WR15 MT7553M12 60.0 90.0 GHz 0.01 26.5 GHz Internal Internal Internal External External Separate 12 12 WR12 MT7553M10 75.0 110.0 GHz 0.01 26.5 GHz Internal Internal Internal External External Separate 12 12 WR10 MT7553B in a typical on-wafer setup for making noise parameter measurements. MAURY MICROWAVE CORPORATION 59 RF Device Characterization Systems

araete ization stems Precision Low Loss Coaxial Triplexers 9677 Series Description The Maury Microwave 9677 series is a family of precision low loss triplexers designed to serve as networks for separating harmonically related signals in automated device characterization applications such as harmonic load pull measurement. The 9677( ) triplexer is composed of one low pass filter and two bandpass filters with a common input port and three separate output ports (Fo, 2Fo and 3Fo). These bands arc harmonically related. A direct current path exists between the COMMON and Fo ports, which allows DC bias for the DUT. Frequency specifications for the filters in the 9677 standard models are detailed in the Available Models below. Triplexers with filters for other frequencies (tailored to user specifications) can be provided as custom ordered models. Please contact our Sales Department for more information. Typical Dimensions (Inches) 2nd Harmonic Automated Tuner 9677A Precision Low Loss Coaxial Triplexer 9677( ) Triplexer 2.00 4.00 1--- Bias Tee 2.00 Note: Actual size varies per model, depending on connector types and frequencies used. -4-2.50 Available Models Model Series 3.50 PJA C CO.TP, 1.00 // 1.51 0.75-2.26 3rd Harmonic Automated Tuner Center Frequency (MHz)' Bandiiir dth for Insert. Loss (MHz) Minimum Re;ection (db)2 In-Band Fo 2Fo 3Fo Fo 2Fo 3Fo Fo 2Fo 3Fo P. Ji,c3 I Fundamental Automated Tuner Typical Harmonic Load Pull Block Diagram VSWR3 (Max) Insertion Loss4 Max/Goal (db) Average Power (Min) Fo Input Connectors 9677A() 900 1800 2700 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 7mm 96778() 2140 4280 6420 200 400 600 40 40 40 1.5:1 04 / 0.2 100 W 7mm 7mm 7mm 7mm 9677C() 1960 3920 5880 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 9677E() 1900 3800 5700 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 7mm 9677F( 2100 4200 6300 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 967701 2000 4000 6000 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 9677H( 455 910 1365 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm 3.5mm 9677J() 1800 3600 5400 200 400 600 40 40 40 1.5:1 0.4 10.2 100W 7mm 7mm 7mm 7mm 9677KO 2300 4600 6900 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 9677L() 2500 5000 7500 200 400 600 40 40 40 1.5:1 0.4/0.2 100W 7mm 7mm 7mm 7mm 9677M() 2700 5400 8100 200 400 600 40 40 40 1.5:1 0.4 / 02 100W 7mm 7mm 7mm 7mm 9677N() 2900 5800 8700 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 96770)) 2450 4900 7350 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100W 7mm 7mm 7mm 7mm 9677R( 5250 10500 15750 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 7mm 967711 5800 11600 17400 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100W 7mm 3.5mm 3.5mm 3.5mm 9677104 1500 3000 4500 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 9677T05 400 800 1200 100 200 300 30 30 30 1.5:1 0.4/0.2 100W 3.5mm 3.5mm 3.5mm 3.5mm 9677T06 1845 3690 5535 270 540 810 40 40 40 1.5:1 0.45/0.2 100W 7mm 7mm 7mm 7mm 9677107 1885 3770 5655 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm 1 For insertion loss. 3 DC through the bandwidth for insertion loss. For 9677T06 only, the maximum db is 0.4 at 2 Fo at harmonic bands; 2Fo at Fo and 3Fo: 3Fo at 2Fo. 4 Within the bandwidth for insertion loss. Fo and 2Fo, but is 0.45 at 3Fo. Fo Output 2Fo Output 3Fo Output MAURY MICROWAVE CORPORATION 60 R F Device Characterization Systems

Precision Low Loss Coaxial Diplexers 9677 Series RF Device Characterization Systems Description The 9677D( ) diplexer is composed of one lowpass filter and one bandpass or highpass filter with a common input port (COMMON) with two separate output ports, Fo and 2Fo. These filters are harmonically related. A direct current path exists between the COMMON and Fo ports. This path allows DC bias for the DUT. Frequency specifications for the filters in the 9677D( ) standard models are detailed in the Available Models below. Diplexers with filters for other frequencies (tailored to user specifications) can be provided as custom ordered models. Please contact our Sales Department for more information. Typical Dimensions (Inches) 9677D21 Precision Low Loss Coaxial Diiplexer 3.50 - - 1.00 1.750.- 1.255 2nd Harmonic Automated Tuner 9677D( ) Diplexer DUT Bias Tee Note: Actual size varies per model, depending on connector types and frequencies used. Fundamental Automated Tuner Typical Harmonic Load Pull Block Diagram Available Models Model Series Center Frequency (MHz) ) Bandwidth for Insert. Loss (MHz) Unimum Re;ection (d B) 2 In Band VSV/R3 Fo 2Fo Fo 2Fo Fo 2Fo (Max) Insertion Loss4 ),(ax / Goal (db) Average PUNer (Min) Fo Input Connectors 967701 10100 20200 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 7mm 967702 2100 4200 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 967703 910 1820 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 967704 1800 3600 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 967705 943 1885 200 400 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm 967706 1960 3920 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 967707 910 1820 200 400 40 40 1.5:1 0.4 / 0.2 100 V/ 3.5mm 3.5mm 3.5mm 967708 1900 3800 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm 967709 943 1885 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm 9677010 1960 3920 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm 9677011 2100 4200 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm 9677012 838.5 1673 25 50 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm 9677013 900 1800 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 9677014 1900 3800 200 400 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm 9677015 2000 4000 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 9677016 8450 16900 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 3.5mm 9677D17 10000 20000 200 400 40 40 1.5:1 0.4 / 0.2 100W 3.5mm 3.5mm 3.5mm 9677D18 2400 4800 200 400 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm 9677019 2000 4000 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 3.5mm 9677D20 10000 20000 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 3.5mm 9677024 1257.5 2515.0 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 3.5mm Fo Output 2Fo Output 1 For insertion loss. 2 Fo at harmonic bands; 2Fo at Fo bands. 3 DC through the bandwidth for insertion loss. 4 Within the bandwidth for insertion loss. -3,17 : 6 11 MAURY MICROWAVE CORPORATION 61 RF Device Characterization Systems

auk: ion Byer:Oirsi AfilT964 Load Pull Test Fixtures Low-loss Test Fixtures For Load Pull and Other Power Applications Features Low Insertion Loss for High VSWR Tuning 0 Multiple Connector Configurations 0 50,S2 and Transformers Available Heatsinks and Fans Available 0 Water Cooling Available MT964A1 7mm Load Pull Test Fixture MT964B1 7mm Load Pull Test Fixture Accessories Provided TRL Calibration Kit 0 One Device Insert Optional Accessories 0 Water Cooling Additional Device Inserts Available Models Model Frequency Range Impedance Connector Power Handlingl M1964A1 0.1-18.0 GHz 50 12 7mm 250 W CW MT984A2 0.1-18.0 GHz 50 SI 3.5mm 250 W CW MT964B1 0.8-18.0 GHz 10-12 S2 7mm 250 W CW M196482 0.8-18.0 GHz 10-12 S2 3.5mm 250 W CV/ 1 Proper heat dissipation of DUT is required. MAURY MICROWAVE CORPORATION 62 RF Device Characterization Systems

RF Device Characterization systenr4 Typical S21 Performance of MT964A 1 Magnitude (db) / Frequency 00 -o 05 IBEO:ozczoatfzurro% 0 1-0,15-02 -0- Frequency (6Hz), Magnitude (db) (S), Undefined, Undefined -02$ -03 x 1.0, Y: -00331 c.1 035-04 -045-0 5 055-0.6-065 -01.075-0 8,11,CB:DEBRB93nzz-, -.LtX1*151-1.1 8.0. Y: -0394-065 -0 9-095..?? 'I_ 14 9, 1 n1.0551 P 141 q 1? 00 1./ 0)110 P 1)0)1)01)0 1.1 0)1)0170q q 00 0C)0q 1,1 o o Cl C) CI VI 0 In IrD N. to 0 0 Cl CI Cl C) V' V 0 0 0 ID C. N. CI OD Frequency (Gilz) Typical S11 Performance of MT964B2 mcn 1/!..1 Ir! [0678,176 461 969.4 tea ar.s -F10616,-177 921 1 1,6$3-0,6F/4 orrms (ir:orr: -;'. (0724.-155 421 8 323 10 159i cird. IVIAURY MICROWAVE CORPORATION 63 RF Device Characterization Systems

4:110is-V(6e Characterization Systems. Manual Tuners General Information Manual tuners are used both in the laboratory and as system components to either establish or transform impedances for a number of applications. They can be used to establish optimum source or load terminations for device characterization, normalize a source or load for precision laboratory measurements or calibrations (noise, power, etc.), and can act as a matching transformer between a mismatched source and a mismatched load. Maury produces several types of coaxial manual tuners in two categories; slide screw tuners and stub tuners. Waveguide slide screw tuners are available in standard matching ranges only. Coaxial Stub Tuners Maury stub tuners are basic laboratory tools used for matching load impedances to provide for maximum power transfer between a generator and a load, and for introducing a mismatch into an otherwise matched system. Typical applications include power and attenuation measurements, tuned reflectometer systems and providing a DC return for single-ended mixers and detectors. Maury stub tuners are available in double- and triple-stub configurations with frequency ranges extending from 0.2 to 18.0 Gliz. Coaxial Slide Screw Tuners Maury coaxial slide screw tuners are particularly well suited for use in establishing impedances for device characterization, or for any other application requiring a precisely repeatable mismatch condition. Calibrated position indicators on these tuners make it possible to repeat a specific matching condition with a high degree of accuracy. Their design allows the reflection magnitude and phase to be set independently. Slide screw tuners are also easy to use due to the almost independent electrical results of the mechanical motions. These tuners employ a slab-line transmission structure which defines their frequency range, with dual probes for enhanced matching characteristics. The probes are micrometer driven and work with a vernier readout of carriage position (except for the 3.5mm and 2.4mm units which have micrometer driven carriages). Position locks are provided on both the probe micrometers and the carriage mechanism. Units with sexed connectors have a female connector on one end and a male on the other. The inter-stub spacing determines the range of impedances that can be matched and the ease of tuning. Triple-stub tuners are more convenient to use since tuning sensitivity is relatively independent of stub spacing. Waveguide Slide Screw Tuners Maury also offers manual tuners designed with slotted waveguide sections arid movable carriages supporting micrometer driven probes that extend down into the waveguide. They are valuable tools for optimizing a mismatched load and/or source for maximum power transfer, or for establishing a specific source or load termination condition for device characterization. They differ from coaxial slide screw tuners in that reflection phase is set by the position of a single probe along the waveguide, instead of the dual probes and slab line/center conductor assembly of coaxial models. Magnitude is still set by the probe penetration depth, which can be controlled to 0.001- inch resolution and can be locked down to prevent movement after adjustment. The carriage is held in constant tension to provide smooth movement and to eliminate the need for a position lock. Key Literature: Maury data sheet 2G-008, 2G-030, 20-035. 2G-035A, 2G-035B. 2G-035C and 3A-353. MAURY MICROWAVE CORPORATION 64 RF Device Characterization Systems

RF Device Characterization Systems Coaxial Stub Tuners Description Maury stub tuners are basic laboratory tools used for matching load impedances to provide for maximum power transfer between a generator and a load, and for introducing a mismatch into an otherwise matched system. Typical applications include power and attenuation measurements, tuned refiectometer systems and providing a DC return for single-ended mixers and detectors. Maury stub tuners are available in double- and triple-stub configurations with frequency ranges extending from 0.2 to 18.0 Stub tuners work as impedance transformers to introduce a variable shunt susceptance into a coaxial transmission line. They consist of one or more short-circuited, variable length lines (stubs) connected at right angles to the primary transmission line. To provide all possible shunt susceptances, each stub must be movable over 1/2 wavelength at the lowest frequency of operation; therefore, the lower frequency limit of a tuner is determined by the frequency at which the maximum stub travel equals 1/2 wavelength. The upper frequency limit for a stub tuner is established by its connectors. The inter-stub spacing of multiple-stub tuners determines the range of impedances that can be matched and the ease of tuning. Triple-stub tuners are more convenient to use since tuning sensitivity is relatively independent of stub spacing. Available Models Stub Configuration Double-Stub Triple-Stub Frequency Range (GHz) 0.2 0.4 0.8 2.0 2.0 4.0 0.2 0.4 0.8 2.0 4.0 0.5 1.0 4.0 12.0 18.0 18.0 0.5 1.0 4.0 18.0 18.0 Model (By Connector Type) Stub Travel Stub Spacing Type N 7mm SMA Inches (CM) Inches (CM) 1778G 261287-30.00 (76.2) 4.60 (11.7) 1778A 2612B1 1719A 15.00 (38.1) 4.60 (11.7) 1778B 261262 1719B 7.50 (19.1) 2.00 ( 5 1) 1778C 2612B3 1719C 3.00 ( 7.6) 0.75 ( 1.9) 1778E 3.00 ( 7.6) 0.50 ( 1.3) 1778D 261284 1719D 1.75 ( 4.4) 0.50 ( 1.3) 1878G 1878A 1878B 1878C 1878 D 2612C7 2612C1 2612C2 2612C3 2612C4 1819A 1819B 1819C 1819D 30.00 15.00 7.50 3.00 1.75 (76.2) (38.1) (19.1) ( 7.6) ( 4.4) 4.60 4.60 1.00 0.75 0.75 (11.7) (11.7) ( 2.5) ( 1.9) ( 1.9) 2.00 ( 5.1) 2.00 ( 5.1) 0.75 ( 1.9) 0.50 ( 1.3) / 0.50 ( 1.3) IVIAURY MICROWAVE CORPORATION 65 RF Device Characterization Systems

HO Device okereciiiiiiettaii?efi iii4iiiie Coaxial Slide Screw Tuners - Wide Matching Range Features 8045N Slab-line Transmission Structure Dual Probes for Improved Matching LCD Readout for Carriage Position Description Maury wide matching range slide screw tuners feature a slab-line transmission structure with dual micrometer-driven probes that provide precise control of the mismatch magnitude. Models operating up to 18 GHz are equipped with a digital I.CD readout to indicate carriage position (phase). Higher frequency models are equipped with a micrometer driven carriage mechanism which is also employed in the standard matching range models (see page 52). The positional repeatability and high matching range of these tuners make them ideally suited for use in device Available Models 2740C 2740B 7941A characterization applications where there is a critical need to establish impedances near the outer edge of the Smith chart and to reproduce electrical characteristics as a function of mechanical position. They are designed to serve as a matching network for reducing reflections caused by mismatches present in a transmission line, or to introduce a controlled mismatch into an otherwise matched transmission line. The models listed below are optimized for operation over wider matching ranges than the standard matching range models. Model Frequency Range (GHz) Connector Type VSWR Matching Range Maximum Loss (Probes Retracted) Probe Crossover Frequency 1 Power Handling (Ave/Peak Watts) Dimension Dimension Inches (CM) Inches (CM) 7941A 12.0-50.0 2.4mm 2 10:1 1.0 db 21.5 GHz 15/150 0.417 (1.059) 4.62 (11.735) 8041C 12.0-34.0 3.5mm 10:1 0.7 db 16.0 GHz 15/150 0.417 (1.059) 4.95 (12.573) 8045D1 3.5mm 25/250 3.4 (8.636) 8.94 (22.708) 2640D1 1.8-18.0 7mm 4 12:1 0.4 db 5.5 GHz 50/500 3.4 (8.636) 8.88 (22.555) 1643D1 Type N 5 50/500 3.4 (8.636) 8.92 (22.657) 8045P 3.5mm 25/250 7.8 (19.812) 13.34 (33.884) 2640P 0.8-18.0 7mm 4 10:1 0.6 db 4.6 GHz 50/500 7.8 (19.812) 13.28 (33.731) 1643P Type N 5 50/500 7.8 (19.812) 13.32 (33.833) 1643N 0.8-2.5 Type N 5 25:1 0.5 db 2.8 GHz 50/500 7.8 (19.812) 13.32 (33.833) 2.5-8.0 18:1 0.8-2.5 4 25:1 2640N 7mm 0.5 db 2.8 GHz 50/500 7.8 (19.812) 13.28 (33.731) 2.5-8.0 18:1 0.8-2.5 3 25:1 8045N 3.5mm 2.5-8.0 18:1 0.5 db 2.8 GHz 25/250 7.8 (19.812) 13.28 (33.731) 2740B 7-16 6 7.88 (20.015) 14.48 (36.779) 2440B 0.8-8.0 7 14mm 35:1 0.1 db 2.8 GHz 200/2000 7.88 (20.015) 13.07 (33.198) 2740C 7-16 6 14.95 (37.973) 22.76 (57.810) 0.4-4.0 7 25:1 0.1 db 1.4 GHz 200/2000 2440C 14mm 14.95 (37.973) 21.35 (54.229) 1 Within Wiin rated matching range. 2 Precision 2.4mm per Maury data sheet 5E-064. 3 Precision 3.5mm per Maury data sheet 5E-062. 4 Precision 7mm per Maury data sheet 5E-060. Precision type N per Maury data sheet 5E-049. 6 Precision 7-16 per Maury data sheet 5E-066. Precision 14mm (GR900) per Maury data sheet 5E-068. = MAURY MICROWAVE CORPORATION 66 RF Device Characterization Systems

Coaxial Slide Screw Tuners - Wide fivilatching Range Functional Description The dual probe structure in Maury coaxial slide screw tuners is designed so that one probe (the low frequency probe) covers the range from the lowest frequency to the crossover frequency listed in the Available Models table on page 50. The second probe (the high frequency probe) covers the range from the crossover frequency to the tuner's maximum rated frequency. The optimum crossover frequency varies from tuner to tuner. As each micrometer-driven probe is introduced into the slabline transmission structure it induces a mismatch in its frequency range. The magnitude of this impedance mismatch is determined by the probe position (depth); the closer the probe approaches the center conductor, the greater the magnitude. The phase of the impedance mismatch is determined by the carriage position. The probes operate independently of each other with little or no interaction. Each probe will meet its specifications over its rated frequency range, and typically has considerably higher matching capability in the middle of its band. Figure 1 shows responses that are typical of those seen in a low frequency /high frequency pair of probes. cc 50 cn 40 0.?3 30 0 0 0 20 10 Typical Low Frequency -- Probe Response Typical High Frequency -Probe Response 0 Lower Frequency Limit Crossover Frequency FREQUENCY (GHz) Upper Frequency Limit Figure 1. Typical responses seen in low frequency and high frequency probes as they are used in Maury coaxial slide screw tuners. Typical Dimensions H A' Travel O O 'B' Models with LCD readouts for carriage position Models with micrometer-driven carriage blocks Figure 2. Typical dimensions for Maury coaxial slide screw tuners. See the Available Models table on page 138 for model-specific dimensions at the -A- and -B" references. MAURY MICROWAVE CORPORATION 67 RF Device Characterization Systems

RF Device Characterization Systems Coaxia0 Slide Screw Tuners - Standard Ma ching Range Description Maury slide screw tuners are particularly well suited for use in establishing impedances for device characterization, or for any other application requiring a precisely repeatable mismatch condition The calibrated position indicators on these tuners make it possible to repeat a specific matching condition with a high degree of accuracy. These tuners are also designed to allow the reflection magnitude and phase to be set independently. Slide screw tuners are also easy to use due to the almost independent electrical results of the mechanical motions. Maury produces two categories of coaxial slide screw tuners; standard matching range (minimum 6:1 equivalent VSWR) and wide matching range (up to 25:1 nominal VSWR). Both types employ a slab-line transmission structure which defines their frequency range, with probes designed to be very close to 1/4X in the linear dimension at the mid-band of each range. Each tuner has two probes for enhanced matching characteristics. Units with sexed connectors have a female connector on one end and a male on the other. Typical Dimensions Maury standard matching range tuners are provided with micrometer driven probes and vernier readout of carriage position (except for the 3.5mm units which have micrometer driven carriages). Position locks are provided on both the probe micrometers and the carriage mechanism. Typical Performance tpo 0.42 221 B 4.48 Extended w IL _1 IL w cc 0 0.96 LL w 2 zh. 1.0 0 z 0 0.5 F L F0 F H 20 < (/) > 9 6 4 3 2 0 JO m w Fri Available Models FREQUENCY RANGE Model Frequency Range (GHz) Connector Type VSWR Matching Range Maximum Loss (Probes Retracted) Probe Crossover Frequency Power Handling (Ave/Peak Watts) Dimension "A" Dimension "B" Inches (CM) Inches (CM)? 6:1 0.4 db 5.5 GHz 80418 12.0-26.5 3.5mm 2 > 10:1 0.7 db 16.0 GHz 25/250 0.52 (1.321) 2.90, (7.400) 8045D 3.5mm 2 251250 2640D 1.8-18.0 7mm 3 50/500 3.40 (8.636) 7.50 (19.100) 1643D Type N 4 50/500 8045C 2640C 1643C 0.9-12.4 3.5mm 2 7mm 3 Type N 4 > 6:1 0.6 db 4.6 GHz 25!250 50/500 50/500 7.80 (19.812) 10.50 (26.700) 1 Within rated matching range. 3 Precision 7mm per Maury data sheet 5E-060. 2 Precision 3.5mm per Maury data sheet 5E-062. 4 Precision type N per Maury data sheet 5E-049. MAURY MICROWAVE CORPORATION 68 RF Device Characterization Systems

RF Device CharecterAZiiiiiini Waveguide Slide Screw Tuners - Standard Matching Range Features Slotted Waveguide Transmission Structure O Single Micrometer-Driven Probe O Can Be Locked Down To Prevent Movement After Adjustment Description Maury offers manual tuners that feature slotted waveguide sections and movable carriages supporting micrometer driven probes that extend down into the waveguide. They are valuable tools for optimizing a mismatched load and/or source for maximum power transfer, or for establishing a specific source or lad termination condition for device characterization. As is the case with the coaxial slide screw tuners, in these waveguide models magnitude is set by the probe penetration depth, which is controllable to 0.001-inch resolution and can be locked down to prevent movement after adjustment. The carriage is held in constant tension to provide smooth movement and to eliminate the need for a position lock. They differ from coaxial slide screw tuners in that the reflection phase is set by the position of a single probe along the waveguide, instead of dual probes and slabline/center conductor assembly of coaxial models. Available Models Frequency Range (GH2 ) Matching Range (Correctable to <1,02) Model EIA WR Number Equivalent Flange Overall Body Length Ind es (CM) 8.2 12.5 18.0 26.5 33.0 12.4 VSWR 20:1 X353 90 UG39/U 6.( 0 (15.2) 18.0 VSWR 5 20:1 P353 62 UG419/U 6.( 0 (15.2) 26.5 VSWR 5 20:1 K353 42 UG5951U 4.; 8 (11.1) 40.0 VSWR 5 20:1 U353 28 UG599/U 4.; 8 (11.1) 50.0 VSWR 5 20:1 J353A 22 UG383/U 4. n 5 (12.1) Key Literature: Maury data sheet and 3A-353. MAURY MICROWAVE CORPORATION 69 RF Device Characterization Systems

RF Device Characterization Systems RF Device Characterization System!Integration Fully Integrated Coaxial and Millimeter-Wave Device Characterization Systems, 250 MHz to 110 GHz Features Power and noise parameter measurements O Packaged and On-Wafer measurements O Modulated, pulsed and CW signals O Automated in-situ calibration O Fewer connections O Reliable and fast RF switching O Saves time and money O Turnkey systems available - Works "out of the box" Description Maury's mission is to meet its customers' device characterization needs regardless of the level of complexity. Maury has and continues to provide solutions covering the entire measurement spectrum; from the simplest stand-alone tuner to fully integrated turnkey systems. Integrated systems are offered between 250 MI-1z and 110 GHz, in-fixture and on-wafer, and are capable of measuring the following: S-Pa ra meters X-Parameters DC-IV and Pulsed-IV measurements Power Measurements: Pout, Pin-delivered, Gain, Compression, Efficiency, Harmonic Powers... Multi-Tone Measurements: IMD, T01... Modulated Measurements: ACPR, EVM, CCDF... Noise Parameters: Nhnin, opt, Rn, Noise and Gain contours Time-domain Analysis: A-B waves, I-V waves, load lines... Thermal Microscopic load pull Maury will integrate these features into an easily assembled and calibrated system that is straightforward to use, saving time as well as money. Furthermore, the results will display greater accuracy and repeatability. Less time and less money means a more profitable design cycle. MT900N Series Fully Integrated 2.4mm 50 GHz LSNA Measurement System. In-situ Calibration The power of a Maury integrated system begins with its proprietary in-situ calibration method, which allows for a complete system-level calibration without disconnecting any of the core system components. The majority of calibration and measurement errors occur for the following reasons; multiple VNA calibrations with improper reference-plane shifting, probes that are connected/disconnected multiple times or measured on their own, and multiple small measurement errors that cascade into very large errors. Unlike the above situations, in-situ calibration requires only one single connection, makes use of highly-repeatable and reliable RF switches and automates the calibration procedure through the use of a graphic wizard. Overall system level verification procedures built into the ATS software result in average deltagt values of less than 0.2dB at all magnitudes and phases, when performing an in-situ calibration. Turnkey Measurement Systems Maury works very closely with instrument and component manufacturers to offer complete turnkey noise parameters as well as large-signal test systems for both on-wafer and packaged device measurements. Recognized as the global leader in microwave and millimeter-wave tuners and DC systems, Maury has partnered with numerous multinational companies who are also leaders in their respective fields. Examples include Agilent Technologies for RF Instruments (Network Analyzers, Spectrum Analyzers, Power meters, Power supplies), Cascade Microtech (on-wafer probe stations, probes and positioners), Intercontinental Microwave (test fixtures and jigs), Quantum Focus Instruments (Thermal IR cameras), Auriga Measurement Systems (Pulsed IV), as well as component and cabling manufacturers. Turnkey measurement systems are available for sign-off and acceptance at Maury's corporate office. MAURY MICROWAVE CORPORATION 70 RF Device Characterization Systems

FiF4 oillos'obarkii100wittjori MT900N15 Fully Integrated Millimeter-wave Noise Parameter, Power and Intermod Measurement System. MT900N15 Integrated Load Pull and Noise Measurement System The MT900N15 system (pictured above) offers an excellent example of Maury's integration efforts. MT900N15 is a 60-90 GHz turnkey Device Characterization System fully integrated for on-wafer s-parameter, noise parameter, and large-signal power measurements, mounted on a Cascade Microtech S300 automated probe station. It is fully automated through GPII3 and LAN communication, and includes a millimeter-wave Agilent PNA network analyzer, spectrum analyzer, power meter, and noise figure analyzer in conjunction with a Maury Microwave MT7553M15 noise receiver module, two Maury MT978A 60-90 G1-1z automated tuners and MT993 ATS software. Specific customer needs and specifications can be addressed through customization. Further information is available from our Sales Department. MT900N Series Fully Integrated Real-Time IR Load Pull System. 3 Key Literature: Application Note 5A 039. MAURY MICROWAVE CORPORATION 71 RF Device Characterization Systems

RF Device Characterization Systems Mixed-Signal Active Load Pull System 00000 0.1 10.14.04 111m1 01 A. n 10.1 11111.0 11 41 0 as 4.1 01.14.4.0. lbw, 0n0 01 }0 0.3 74 141 41111.111413,30 0-0*.1060rt. 01-1,7 3 30 I: 31 X 13 NN r 01 0 01. 011-1.1.0 P.. 1 04413a r n tr. rot 0. 04 3 I.6+ /1 001 010 140 14 NI 0,0 0.4 11. 1 1 r, 404 01 113 31 313 X MS X 0..1 MO LD. 12.4 1 1 3 3 3 <30,./ v., 0 w.ikw MCI r.tivxn a-1, h.arso -4 214 A.1 1.3 Key Features (Typical Performance) Broadband system concept (e.g. 0.4-18.0 GHz) wtywanteverta-mw.com Powered by r\\-/- snrever-ra O Reconfigurable hardware; single-ended, differential and number of controlled harmonics High speed and dynamic range O Embedded measurement of (Pulsed/Isothermal) DC parameters Single tone "Real-time" measurement speed >1,000 power and load states per minute O Multi-dimensional parameter sweeps (Pulsed/Isothermal) High Power testing Measurement of calibrated Voltage and Current waveforms Device protection included O Waveform reconstruction Modulated signals Wideband modulated signals (e.g. multi-carrier WCDMA) up to 120 MHz (240 MHz Available) O Modulated Signal Library Included Losses and delay of cables, probes etc. are eliminated Upload the s-parameters of any "virtual matching networks" and get a one-to-one agreement with your board design (also for linearity) o Device testing with digital predistortion C.S401.4=1._ MAURY MICROWAVE CORPORATION 72 RF Device Characterization Systems

, r - RF 'Device Characterization aysterns General Description This novel mixed-signal load pull system is designed to handle realistic wideband complex modulated signals with a high dynamic range and provide user defined reflection coefficients vs. frequency at the DUT reference planes. The system concept is based on: IQ signal generation, synthesized with fully synchronized arbitrary waveform generators (AWG) Wideband ND converters to measure the wideband reflection coefficient b ai,n,ea Software 1 [sn(fn) iteration asl naln S2, b2d 00 10? 110. DUT 0--4-04 b 1 n 82.n Software iteration Wideband Generation/Detection Figure 1 Principle of the Mixed-Signal Load Pull setup as a Signal-Flow diagram The maximum modulation bandwidth is set by the bandwidth of the AWG and IQ modulators. Currently more than 120 MHz of controlled bandwidth Total number of measurement points in every controlled band is >40,000 points A. 2.) J.4 1;70-St:1 2125 213 2155 214 2145 215 2155 425 425 427 42a 422 43 431 Figure 2. Output spectrum of the DUT at f o and 21 0 tested with multi-carrier WCDMA (with and without delay compensation). "Real-Time" Load Pull Synchronization between signal generation and detection facilitates ultra-fast measurements. Independently fully controlled multidimensional Load Pull parameters sweep 5,760 measurement points in less than 5 minutes: 90 fundamental load states, swept load and source harmonic termination, 16 power levels. 1.5 iy 1.0 n 0.5 a 0 E -0.5-1.0-1.5 RF Signal - Input Drive 1.5 Power 1 Power 2 m1111111111 I ed 1.0 I 0 n 0.5 Q 0 E -0.5 ll111111111111111111-1.0 0 5 10 15 20 25 30 Time (ps) 1-1.50 RF Signal - Output Load Load 1 Load 2 Load 3 I I I Load 4-5 10 15 20 25 30 Time (ps) Figure 3. Injection signals as used in the 'real-time" multi-dimensional parameter sweeps. MAURY MICROWAVE CORPORATION 73 RF Device Characterization Systems

It.]/II 1-1"-/-1P1 High Power/On-Wafer Configuration The active loops are fully re-configurable (e.g., the same hardware would also support source-pull at 10 and load-pull at 1 0, 21, and 31, or true differential source and load pull at fd. See 111 in the diagram below. The proprietary algorithm (patent pending) results in low requirements on the loop amplifiers, so linearity is no longer a problem in this regard, while their P,it should be just slightly larger than the power generated by the device under test (DUT). See 121 in the diagram below. IF signals a t, a 2, b,, b2. 0 0 0 0 0 0 0 0 0 C. 0 0 I D g (0)1 g I Ili 1. 111 U O o o O O i?!???5! iod 1.???0 Fit Source and load IQ signals ICI To DC To DC Bas T S'as f Te I On-wafer config. Wth ea.0...4. I V I V low inductance BiasTee Model System RF Bandwidth (GHz) Active Load Band No. 1 (GHz) To DC t To DC l+gh poker c, Test Fixture., 1 I1 E a. 7..-4 I V I V High power fixture v.ith internal bias decoup!ing Specifications Suggested Reading System RI: Bandwidth Active Load Band No. 1 Active Load Band No. 2 Modulation Bandwidth Typical Detection Dynamic Range Active Load Dynamic Range Minimum Pulse Width Available Models Active Load Band No. 2 (GHz) MT2000A 0.4-18.0 0.4-6.0 0.4-6.0 MT2000B 0.4-18.0 0.4-18.0 0.4-18.0 MT2000C 1.0-26.0 1.0-18.0 2.0-26.0 MT2000D 1.0-26.0 2.0-26.0 2.0-26.0 * 240 MHz Option Available See Available Models Table 5A-044 - Active Harmonic Load Pull with Realistic Wideband Communications Signals. See Available Models Table 5A-045 - Active Harmonic Load-Pull for On-1,Wer Out-of- See Available Models Table Band Device Linearity Optimization. 120 MHz * 5A-046 - A Mixed-Signal Approach for High-Speed Fully Controlled Multidimensional Load Pull Rirameters Sweep. 80 db 5A-047 - Base-Band Impedance Control and Calibration for 60 db On-Wafer Linearity Measurements. 100 nsec 5A-048 - A Mixed-Signal Load Pull System for Base-Station Applications. Modulation Bandwidth (MHz)* Typical Detection Dynamic Range (db) Typical Active Load Dynamic Range (db) Minin Pulse I (ns1 120 80 60 10 0 tum iidth c) MAURY MICROWAVE CORPORATION 74 RF Device Characterization Systems

Pulsed N Systems AMCAD Engineering's PIV/PLP Family of Pulsed IV Systems AMCAD Engineering has created professional, industryproven pulsing technology for both standalone IV-testing as well as pulsed-bias load pull applications. Systems come fully equipped with a common 19" rack mountable mainframe controller that includes five integrated power supplies, output (drain/collector) and input (gate/base) remote pulser heads. Pulser heads are interchangeable and available in a range of models designed to fulfil PIV and Load Pull requirements. These include 120V/30A and 250V/10A models. Each pulser head has its own embedded and integrated measurement unit. RF Device Characterization Systems, nuillimmilliliquilinthinillillipminnui /MACAU Enguneering Advanced Modeling for Computer-Aided Design Key Features 0 250V/10A or 120V/30A pulse generation 0 Pulse width down to 200ns 0 Embedded measurement unit providing wide bandwidth & highly accurate simultaneous current and voltage measurements: - Equivalent to 50Msample/s & 10 MHz bandwidth scope for pulse shape monitoring - Fast averaging function providing 16 bit resolution & 0.1% typical measurement accuracy - Very Fast Acquisition of a Complete Power Sweep to Speed Load Pull Test Benches o Synchronized pulsed S-parameter measurements o Embedded fast short-circuit current breaker protects both pulser heads (drain and gate) in the event of a DUT breakdown o Automatic pulser head calibration procedure OPulse and measurement clocks are available in both stand-alone or external-triggered mode ORemote control: GPIB or LAN OResistive network set provides for new device safe characterization These systems are specific Bilt systems dedicated to pulse operations, jointly developed by AMCAD Engineering and itest Corporation. MAURY MICROWAVE CORPORATION 75 RF Device Characterization Systems

< -. F Device - Chareoterizati 111111111111111V1111111111111111111111111111111111 0 1111fi1111111101111111111111111 II VOLTAGE HIGH VOLTAGE LOW 110 V 55.E V TtS; kr 0 OA 0 as.p.ismpa/ t, IIPtit4-AUCAO 0 f` L L Inwpieniammeasuld. 1111:c1 N. ww.flittmiiiiffitemwtmin AMCAD 0!test Bilt System model BN106-AMCAD pulse I-V measurement system. Two Probe System Vds High Drain Pulse Length Linear Drop I f Gate Pulse Length Vgs High Vds Low Vgs Low Power DC Source I J Vds High n e Id LJ Vgs Storage Switch Capacitors Vds Low Gnd Vds Drain Probe Dedicated performance for PIV and Load Pull applications: P1V LOAD PULL Drain Voltage Switching between Vds High and Vds Low. Switching between Vds High and Ground. Timing Pulser Head Size Measurement Fastest settling time for power pulse down to 200ns. Small dimensions, easy to connect. Accurate level monitoring and pulse shape monitoring. Smallest voltage drop for power pulse > 100ps. Large storage capacitors inside the probe. External synchronization available for fast and complete power sweep plot. AMC/MD Engineering 5, Advanced Modeling for Computer-Aided Design MAURY MICROWAVE CORPORATION 76 RF Device Characterization Systems

RIF Deviciei ah.i3raciterization -Vete rs. Gate Probe Topology: Fast linear regulator. PARAMETER CONDITIONS MINIMUM MAXIMUM Gate Pulsed Head Opening Area Switched Voltage No Load 15V +15V Voltage Accuracy Typical 0.05% Switched Current Source or Sink 200mA +200mA Output Impedance 10 R Duty Cycle Including DC 0% 100% Rise & Fall Time At 95% 6Ons 8Ons Pulse Width 200ns Current Breaker Response Time 12Ons Drain Probe - lopology:, Itcning rower JUpply. AM221 PIV 10A AM222 PIV 30A AM231 LP 10A AM232 LP 30A PARAMETER CONDITIONS MIN MAX MIN MAX MIN MAX MIN MAX High Level Switched Voltage No Current 0.OV 250V 0.OV 120V 0.OV 120V 0.0V 120V Low Level Switched Voltage No Current 0.OV 120V 0.OV 120V 0.0V 120V 0.OV 120V Voltage Accuracy Typical 0.05% 0.05% 0.05% 0.05% Switched Current 10A 30A 10A 30A RMS Current DC or Pulsed 3A 4A 4A 4A Output Impedance 0.552 0.1552 0.08(2 0.0552 Voltage Stability Pulse Width Leading to a 1V Drop at 10A 5ps lops 6Ops 60ps Pulsed Power 2kW 2kW 1.2kW 3kW Avera I e Pulsed Power 50W 50W 50W 50W Duty Cycle 0% 100% 0% 100% 0% 100% 0% 100% Rise Time 95% at Maximum Current 4Ons 7Ons 9Ons 13Ons 70ns 110ns 13Ons 170ns Pulse Width At Maximum Current 200ns 400ns 500ns 500ns Current Breaker Response Time 7Ons 4Ons 4Ons 4Ons A I AM221 PIV 10A 30A AM222 PIV 30A 10A Pulse>a Are 1ps 5A- Pulse > 200ns 1 Area 1A - DC\ Area ---} 100 V 250 V 10A 4A 3 Pu!se Area 50 V 00 V 10A AM231 Load Pull 10A AM232 Load Pull 30A \ 5A 1A DC Pif,se Area 50V 120V AVEIC AD Eilighaeeffing vi Advanced Modeling for Computer-Aided Design MAURY MICROWAVE CORPORATION 77 RF Device Characterization Systems

FiF Device Charecterizitstion Systems Pulse Timing The switching working point is defined according to four programmable signals: Gate Switch, Drain Switch, RF Switch and Sample Clock. Time Ref. Pulse Period Gate Switch Drain Switch RF Switch -N. Sample Clock (When Enabled) Acquisition & Memorizatiqn Time 2Ops Monitored Signal Sampling Period PARAMETER CONDITIONS SPECIFICATION MINIMUM MAXIMUM Time Resolution Any Outputs, Sampler, Duration and Delays 2Ons Time Jitter Using Exterenal Synchronization Inputs ±2ns Pulse Frequency According to Power and Analog Limits 50Hz 500kHz Pulse Width According to Power and Analog Limits 200ns 1 ms Sample Frequency 50kHz Additional Specifications Time reference is available using both internal master clock and external signal. Measurement sampler clock is available using internal sequencer or external signal. The complemented level is available independently for each output. Continuous Signals Capability Although the system is primarily designed for pulsed testing, it is able to operate in continuous mode: Larger pulses are available using on/off continuous mode with a time resolution of 1ms. Pulsed or continuous operation modes are available independently for each output. AIMICAD Engineering Advanced Modeling for Computer-Aided Design MAURY MICROWAVE CORPORATION 78 RE Device Characterization Systems

._ evioe CharacterizatiOn Systemb' Sampling Measurement Sampler Performances Thanks to a programmable measurement sampler, several acquisition modes are available, providing different levels of accuracy and speed: Pulse Shape Monitoring: Embedded Scope Onto Each Probe TYPICAL ABSOLUTE ACCURACY BANDWIDTH MAXIMUM SAMPLING RATE RIPPLE MEASUREMENT WINDOW 1.0% During a Transition 0.1% Within a Pulse 10 MHz 50 MHz 0.2% 250 Samples Accurate Working Point Measurement Within a Pulse Using Fast Averaging Function TYPICAL ABSOLUTE MINIMUM SETTLING TIME RESOLUTION RIPPLE ACCURACY WITHIN THE PULSE 16 Bits 0.1% 200ns 0.003% Power Sweep Monitoring: Accurate Working Point Measurement for Each Step of the Sweep RESOLUTION TYPICAL ABSOLUTE ACCURACY MINIMUM SETTLING TIME WITHIN THE PULSE RIPPLE TOTAL STEP TIME INCLUDING SETTLING & MEASUREMENT 16 Bits 0.1% 200ns 0.2% 100ms Step Time : 100ms Sweep Monitoring Siamese Sweep, One Sample Per Step Pulse Shape Monitoring Measurement Window 200ns 200ns w, Dra n Current Sampler Crock In any case, the tour inputs (Vg, Ig, Vd, Id) are sampled at the same time, and the data buffers can be read at once. Guaranteed Absolute Accuracy Versus Ranges: The gate probe uses bipolar ranges, while the two drain probes use only positive ranges. For the purpose of increasing small amplitude accuracy, a one-tenth range is available at any time, without switching the outputs. GATE PULSER HEAD DRAIN 10A PIV PULSER HEAD DRAIN 30A PIV PULSER HEAD VOLTAGE CURRENT VOLTAGE CURRENT VOLTAGE CURRENT RANGE ±15V -±20mA ±0.2A 25V 250V 1A 10A 12V 120V 3A 30A ACCURACY 30mV 40pA 400pA 50mV 500mV 2mA 20mA 25mV 250mV 6mA 120mA?lb\ AIMICAD Engineering Advanced Modeling for Computer-Aided Design MAURY MICROWAVE CORPORATION 79 RE Device Characterization Systems

RF Device = ems Some Tuners Just Work Better Than Others Maury Tuners Work Better Because They Are Built Better! Maury Technology Makes The Difference: 1. Optical Limit Switches at Both Ends of Each Movement for Optimum Accuracy and Repeatability 2. Non-Contacting Mismatch Probes never Touch the Center Conductor for Increased Reliability and Longevity 3. Precision Machined Connectors and a Wide Range of Precision Low Loss Adapters Makes Setup Easy 4. Precision Machined Slablines (Developed by Maury's Material Science Division) ensure Repeatability and Increase Accuracy 5. High Peak Power Breakdown Protection Provides Increased Reliability and Stability 6. High DC Current Rating 7. USB Interface For Control MAURY MICROWAVE CORPORATION 80 RF Device Characterization Systems