1. Introduction to Solution-Deposited Inorganic Electronics 1 Robert H. Reuss and Babu R. Chalamala

Transcription

1 CONTENTS Preface Contributors xiii xvii 1. Introduction to Solution-Deposited Inorganic Electronics 1 Robert H. Reuss and Babu R. Chalamala 1.1 Background and Motivation Electronics Technologies Commercial Macroelectronic Technology Macroelectronics Potential Importance of Solution Processing Application Challenges: TFT Devices and Circuits TFT Device Fundamentals Next-Generation TFTs Technology for RF TFTs Exploratory TFT Concepts Technology Computer Aided Design for TFTs Application Challenges: Optoelectronics Photovoltaics Transparent Conductive Oxides Transparent Transistors Light-Emitting Diodes Solid-State Lighting Si-Based Integrated Emitters Application Challenges: Power Sources, Sensors, and Actuators Conclusions 26 References Chemical Solution Deposition Basic Principles 33 Robert W. Schwartz and Manoj Narayanan 2.1 Introduction Substrate Surface Preparation 34 v

2 vi CONTENTS 2.3 Starting Reagents and Solvents Background Starting Reagents Solvents Precursor Solution Preparation and Characteristics Background Sol-Gel Processes Chelate Processes MOD Solution Synthesis Solution Preparation Summary Other Processing Routes Film Formation Behavior Background Spin Coating Dip Coating Spray Coating Stamping and Microcontact Printing Structural Evolution: Film Formation, Densification, and Crystallization Background Film Formation Densification and Crystallization Summary 65 References Solution Processing of Chalcogenide Semiconductors via Dimensional Reduction 77 David B. Mitzi 3.1 Introduction Dimensional Reduction Hydrazine Precursor Route SnSe 2 x S x Films In 2 Se 3 Films CuInTe 2, CuInSe 2, and Cu(Ga 1 x In x )Se 2 Films Cu 2 S Precursor KSb 5 S 8 Films Other Metal Chalcogenide Systems Similar Approaches without Hydrazine Future Prospects 103 References 104

3 CONTENTS vii 4. Oxide Dielectric Films for Active Electronics 109 Douglas A. Keszler, Jeremy T. Anderson, and Stephen T. Meyers 4.1 Introduction Gate Dielectric Materials Selection Producing High-Quality Films from Solution HafSOx Thin-Film Dielectrics AlPO Thin-Film Dielectric Compositionally Graded and Laminated Structures Summary and Perspective 126 References Liquid Silicon Materials 131 Masahiro Furusawa and Hideki Tanaka 5.1 Introduction Liquid Silicon Material Forming Silicon Films from the Liquid Silicon Materials Fabrication of a TFT Using a Solution-Processed Silicon Film Fabrication of TFT Using Inkjet-Printed Silicon Film Forming SiO 2 Films from the Liquid Silicon Materials LTPS Fabrication Using Solution-Processed SiO 2 Films Forming Doped Silicon Films Conclusions 153 Acknowledgments 153 References Spray CVD of Single-Source Precursors for Chalcopyrite I III VI 2 Thin-Film Materials 157 Aloysius F. Hepp, Kulbinder K. Banger, Michael H.-C. Jin, Jerry D. Harris, Jeremiah S. McNatt, and John E. Dickman 6.1 Introduction Single-Source Precursor Studies Background Chemical Synthesis of SSPs Thermal Analysis and Characterization of SSPs Preparation of I III VI 2 Powders from SSPs Spray or Atmosphere-Assisted CVD Processing AACVD Reactor Design Preliminary Thin-Film Deposition Studies Impact of Reactor Design on CuInS 2 Film Growth Atmospheric Pressure Hot-Wall Reactor Parametric Study Parametric Study Approach 181

4 viii CONTENTS Variation of Deposition Temperature Variation of Susceptor Location and Precursor Concentration Postdeposition Annealing Photoluminescence Studies Fabrication and Testing of CIS Solar Cells Cell Fabrication at GRC Cross-Fabrication of Solar Cells Solar Cell Characterization Concluding Remarks Summary Outlook and Future Work 192 Acknowledgments 193 References Chemical Bath Deposition, Electrodeposition, and Electroless Deposition of Semiconductors, Superconductors, and Oxide Materials 199 Raghu Bhattacharya 7.1 Introduction Chemical Bath Deposition CdS Deposition ZnS(O,OH) Deposition Cd 1 x Zn x S Deposition Other Systems Deposition of CIGS by Electrodeposition and Electroless Deposition Electrodeposition of CIGS Electroless Deposition of CIGS Electrodeposition of Oxide Superconductors Electrodeposition of Tl Bi Sr Ba Ca Cu O Electrodeposition of Bi Sr Ca Cu O Electrodeposition of Cerium Oxide Films Electrodeposition of Gd 2 Zr 2 O References Successive Ionic Layer Adsorption and Reaction (SILAR) and Related Sequential Solution-Phase Deposition Techniques 239 Seppo Lindroos and Markku Leskelä 8.1 Introduction SILAR Basic Principles of SILAR Advantages and Disadvantages of SILAR 241

5 CONTENTS ix SILAR Deposition Equipment Mechanism of Film Growth in SILAR Materials Grown by SILAR Oxide Films Chalcogenide Films Films of Metals and Other Materials ILGAR Basic Principles of ILGAR Materials Grown by ILGAR ECALE Basic Principles of ECALE Materials Grown by ECALE Other Sequential Solution-Phase Deposition Techniques 270 References Evaporation-Induced Self-Assembly for the Preparation of Porous Metal Oxide Films 283 Bernd Smarsly and Dina Fattakhova-Rohlfing 9.1 Introduction The EISA Process Characterization of Self-Assembled Films Positron Annihilation Lifetime Spectroscopy (PALS) Gas Physisorption Small-Angle X-Ray Scattering (SAXS) Generation of Mesoporous Crystalline Metal Oxide Films Via Evaporation-Induced Self-Assembly Electronic Applications Mesoporous Films with Insulating Framework Mesoporous Films with a Semiconducting Framework Mesoporous Films in Dye-Sensitized Solar Cells Conclusions 306 References Engineered Nanomaterials as Soluble Precursors for Inorganic Films 313 Dmitri V. Talapin 10.1 Introduction Synthesis of Inorganic Nanomaterials Nanoparticles as Soluble Building Blocks for Inorganic Films 318

6 x CONTENTS Sintering Metal and Semiconductor Nanoparticles into Continuous Polycrystalline Films Electronic Materials Based on Nanoparticle Assemblies Multicomponent Nanoparticle Assemblies Films and Arrays of Inorganic Nanowires Applications Using Networks and Arrays of Carbon Nanotubes Concluding Remarks 339 Acknowledgments 340 References Functional Structures Assembled from Nanoscale Building Blocks 349 Yu Huang 11.1 Introduction Building Blocks: Synthesis and Properties Hierarchical Assembly of Nanowires Fluidic Flow-Directed Assembly Langmuir Blodgett Technique-Assisted NW Assembly Nanowire Electronics and Optoelectronics Crossed Nanowire Devices Nanoscale Logic Gates and Computational Circuits Nanoscale Optoelectronics Nanowire Thin-Film Electronics Concept and Performance p-si Nanowire Thin-Film Transistors High-Speed Integrated Si NW-TFT Circuits D Integrated Functional Electronic System Summary and Perspective 372 References Patterning Techniques for Solution Deposition 379 Paul Brazis, Daniel Gamota, Jie Zhang, and John Szczech 12.1 Introduction Opportunities for Printable Inorganic verses Organic Materials Systems Printing and the Microelectronics Industry Present and Future Printed Electronics Value Chain 386

7 CONTENTS xi 12.5 Electrically Functional Inks Printing Technologies Contact Printing Noncontact Printing Ink Jet Functional Inks for Ink Jet Structure of a Printed Transistor Patterning Techniques for Solution Deposition: Technology Diffusion Standards Awareness Roadmapping for Supply Chain Development Quality Control/Assurance Conclusions 400 References Transfer Printing Techniques and Inorganic Single-Crystalline Materials for Flexible and Stretchable Electronics 407 Jong-Hyun Ahn, Matthew A. Meitl, Aflred J. Baca, Dahl-Young Khang, Hoon-Sik Kim, and John A. Rogers 13.1 Introduction Inorganic Single-Crystalline Semiconductor Materials for Flexible Electronics Transfer Printing Using an Elastomer Stamp Surface Chemistry Thin-Film Adhesives Kinetic Effects Stress Concentration and Fracture Carrier Films and Carbon Nanotubes Machines for Transfer Printing Flexible Thin-Film Transistors that Use µ s-sc on Plastic Integrated Circuits on Plastic Two-Dimensional Integration Three-Dimensional and Heterogeneous Integration μs-sc Electronics on Rubber Conclusion 441 References Future Directions for Solution-Based Processing of Inorganic Materials 449 M. F. A. M. van Hest and D. S. Ginley 14.1 Introduction Materials 450

8 xii CONTENTS Semiconductors Oxides Metals Deposition Approaches Next Generation of Applications New Solar Cells: Quantum Dot (QD) Structures and Multiple Exciton Generation (MEG) Organic Inorganic Hybrids Non Linear Optics D-Structures Catalysis/Artificial Photosynthesis Conclusions 465 References 465 Index 471