Product Datasheet: Radak and OLED Furnaces Radak Furnace Product Datasheet

Transcription

1 Rev 2.2 Product Datasheet: Radak Furnace Product Datasheet

2 Radak evaporation furnaces have been in production for over 30 years. Radak furnaces are a flexible, robust, reliable, and affordable solution for a wide range of deposition needs. By selecting the proper combination of crucible, crucible liner, thermocouple type, and other furnace options, Radaks are an ideal source for applications ranging from low temperature organics (OLEDs) to salts and metals used in thin film battery and solar cell production. Operating features Crucible configuration results in repeatable and reliable deposition. Accurately control temperatures to 1500 C. Internally mounted thermocouple monitors source temperature without exposure to deposition materials. Rapid source material change with no cross contamination. Easy access to crucible for cleaning and source replenishment. Thermally shielded to minimize chamber heating. Easily controlled using low voltage power supply. Easy installation for new system design or retrofitting existing systems. Can be run in clusters for co deposition. Compatible with commercially available deposition rate controllers. Distributes coating evenly and maximizes source material utilization by directing vapor flux to the substrate. Select the right Radak model based on source material capacity and temperature range: Page 2 of 11

3 Models: Radak I Radak II Radak III Radak IV Capacity 1cc 10cc 100cc 1500cc Range ( C) With use of internal radiation baffle Installation The furnace is mounted in your vacuum system using the mounting boss on the base of the furnace. Power is connected to the furnace through copper (standard) or stainless (optional) power bosses. Temperature readings are obtained from the thermocouple through a ceramic thermocouple connector and lead wire (supplied). You will need a 40 Amp power feedthrough and thermocouple feedthrough. Because feedthroughs, shutters, and mount configurations depend on the geometry and ports available in your vacuum system, Luxel does not supply a standard mounting flange. Luxel engineers can assist with specifying the hardware appropriate for your system and our shop is available to manufacture custom hardware as needed. Operation Each furnace is supplied with one alumina (standard) or quartz (optional) crucible. Source material is placed inside the crucible or a crucible with an optional crucible liner (as required for material compatibility). The loaded crucible is then inserted into the furnace and held in place with the twist lock cover. Source material can be replenished by removing the crucible or adding more directly to an already installed crucible. Once the vacuum chamber is evacuated, the source is heated as required for conditioning and deposition by applying power to the furnace. Furnace temperature is monitored via a type K or type C thermocouple supporting the crucible. Heater coil and radiation baffle design promote even source material heating. Slightly more power is applied near the top of the crucible to minimize buildup on the crucible lip during deposition. The radiation baffle can be easily removed if required for faster temperature control for depositions below about 600 C. Page 3 of 11

4 Standard Furnace Configurations Description TC Baffle Power Terminals Spring TC Plug Vapor Shield Crucible Order Code: RADAK I Furnace, Standard C or K Type Yes Copper External Horizontal Molybdenum Alumina C ( K) OLED I Furnace, Standard K Type No Copper External Horizontal Molybdenum Alumina K O OLED I Furnace, for Selenium K Type No Stainless Steel External Horizontal Stainless Steel Coated SS K SE RADAK II Furnace, Standard C or K Type Yes Copper External Horizontal Molybdenum Alumina C ( K) OLED II Furnace, Standard K Type No Copper External Horizontal Molybdenum Alumina K O OLED II Furnace, for Selenium K Type Yes Stainless Steel External Horizontal Stainless Steel Coated SS K SE RADAK III Furnace, Standard C or K Type Yes Copper External Horizontal Molybdenum Alumina C ( K) OLED III Furnace, Standard K Type No Copper External Horizontal Molybdenum Alumina K O OLED III Furnace, for Selenium K Type Yes Stainless Steel External Horizontal Stainless Steel Coated SS K SE RADAK IV Furnace, Standard K Type Yes Copper External Horizontal Stainless Steel Call Internal Radiation Baffle may be purchased separately if your deposition needs change. Thermocouple type may also be changed upon return to Luxel Vertical TC plug orientation is available with use of an optional L bracket. Furnaces may be customized in any configuration, see product datasheet for details To customize a furnace with a non standard configuration, please use the order code below, or call us with your custom requirements. Custom Order Code: Base Model# Thermocouple Radiation Baffle Power Terminals Spring TC Plug Vapor Shield Crucible Included ( C) Type C ( R) RADAK ( Cu) Copper ( E) External ( H) Horizontal ( Mo) Molybdenum ( AA) Alumina ( K) Type K ( O) OLED ( SS) Stainless ( V) Vertical ( SS) Stainless ( QZ) Quartz ( W) Water Cooling ( XCu) Extended Cu ( Ta) Tantanlum ( CSS) Coated SS ( XSS) Extended SS ( SMo) Screw on Moly ( OG) Organic ( SSS) Screw on SS ( PBN) PBN Example order code for standard Radak II: Example order code for customized Selenium compatible Radak III: C R Cu E H Mo AA K R XSS E V SSS CSS Page 4 of 11

5 RADAK vs. OLED The only difference between the OLED and standard Radak furnace is the internal radiation shielding. To reach higher temperatures efficiently and minimize heat load to the deposition chamber, Radak furnaces are fitted with a multi layer refractory metal shield dubbed the radiation baffle. Because of the radiation baffles efficient reduction of radiant heat loss, temperature control of the furnace becomes progressively more difficult as the temperature setpoint is reduced below 500 C. To deposit materials below C, such as OLED source material, we recommend removing the radiation baffle to facilitate more rapid cooling and better temperature control. Intended for use below 600 C, the OLED furnace is shipped without a radiation baffle. The chart below shows the difference in cool down rate between the Radak and OLED furnaces. Custom Furnace Options Luxel welcomes custom furnace orders. We can modify our evaporators to fit your system with options such as: Custom power terminal geometries for easy hookup in any system configuration. Horizontally or vertically mounted ceramic thermocouple plug. Conflat flange assembly with furnace pre connected to power and thermocouple feedthrus, shutter optional. Specify flange size. Water cooled jacket option for Radak II, speed up your cool down / process time dramatically. Larger evaporators built to order with custom capacities and in situ temperature monitoring, call to discuss your application. Page 5 of 11

6 Page 6 of 11

7 Page 7 of 11

8 Page 8 of 11

9 Page 9 of 11

10 Page 10 of 11

11 Page 11 of 11