Equipment & gas distribution systems. HiQ. Specialty gas program.

Transcription

1 Equipment & gas distribution systems. HiQ. Specialty gas program.

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3 HiQ equipment and gases Contact your Linde local sales representative for ordering any of the specialty gas catalogues: Automotive Biotech, chemical, petrochemical & pharmaceutical Indoor & outdoor environment Manufacturing For more information about the HiQ Specialty Gas products, equipment and services program from Linde, please visit our homepage at: You will find this site most useful in your everyday work with specialty gases. Apart from the complete program of Specialty Gas products and equipment from Linde we have also included extensive information and supporting on-line tools. origami [origami] (jap., from ori folding' and kami 'paper'), the art of folding paper to create figures and artistic decoration. Existed in Japan already at the 9 Th century, when paper become a common material. Figures can be all from very simple to artistic and complex. They have been used both in ceremonies and as toys, pedagogical examples, wrappings, lamp screens, etc. Source: Encyclopedia Britannica ACCURA is a registered trademark of the Linde Group. HiQ REDLINE is a registered trademark of the Linde Group. BASELINE is a trademark of the Linde Group. ECOCYL is a registered trademark of the Linde Group. HiQ is a registered trademark of the Linde Group. Linde minican is a trademark of the Linde Group. SECCURA is a trademark of the Linde Group. BUNA is a registered trademark of Bayer AG. CleanLine is a trademark of BROEN A/S. ELGILOY is a registered trademark of Elgiloy Limited Partnership. HASTELLOY is a registered trademark of Haynes International, Inc. HOGEN is a registered trademark of Distributed Energy Systems Corp. IntelliSwitch is a trademark of CONCOA. KALREZ is a registered trademark of E.I. DuPont de Nemours & Co., Inc. KEL-F is a registered trademark of 3M. MONEL is a registered trademark of Inco Alloys International. Nanochem is a registered trademark of Matheson Tri-Gas, Inc. NEOPRENE is a registered trademark of E.I. DuPont de Nemours & Co., Inc. NITRONIC is a registered tradename of Armco, Inc. NYLON is a registered trademark of E.I. DuPont de Nemours & Co., Inc. SIMRIZ is a registered trademark of Freudenberg-NOK. STABLEFLOW is a trademark of Distributed Energy Systems Corp. SWAGELOK is a registered trademark of Swagelok Company. TEFLON is a registered trademark of E.I. DuPont de Nemours & Co., Inc. VCR is a registered trademark of Swagelok Company. VESPEL is a registered trademark of E.I. DuPont de Nemours & Co., Inc. VITON is a registered trademark of E.I. DuPont de Nemours & Co., Inc.

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5 Table of contents. Preface 5 Central gas supply 9 HiQ REDLINE Gas panels 15 HiQ REDLINE Points of use 53 HiQ REDLINE Cylinder regulators 63 The right HiQ REDLINE choice 72 CleanLine 79 Quick Connect 89 BASELINE 101 Components 111 Special equipment 137 IntelliSwitch Automatic gas management system 138 STABLEFLOW HCS Hydrogen control system 140 Ultra high pressure cylinder regulator 142 High flow regulator for corrosive gases 144 Low flow cylinder regulator 146 Mini cylinder regulator 148 Safety solutions 151 Standard cabinets valve purge gas panel valve process gas panel valve process gas panel 158 Operation monitor 160 Fully automatic 162 Containers 165 HiQ specialty gas generators 171 Portable gas solutions 197 Cylinder types 203 Equipment connections, tubings and fittings 209 Inlet connections 210 Outlet connections 214 Fittings 215 Tubings 215 Accessories 217 Centralized monitoring systems 218 Contact gauges & Pressure transducers 220 Mounting bracket 222 Wall mounting bracket & gas cylinder trolley 224 HiQ Gas Supply System Installations 227 Services 231 Physical data 237 Conversion tables 250 Material compatibility 252 Index 255

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7 Preface. In order to simplify everyday work, Linde has created the HiQ Specialty Gas product program. This contains different sections for different industrial areas, to focus the amount of information and concentrate on routine use. Also, it is intended to meet the increasing demands on quality and new applications. This section deals with the hardware need for gas distribution ranging from cylinders to large gas installations.

8 Preface. One of the most critical points when using gas for analysis and high tech production, is to maintain the integrity of the gas between cylinder and instrument or reactor. The quality of the gas is often not better than the quality of the distribution system. Therefore, it is very important to design and plan the gas supply system carefully. The equipment in this catalog is divided in different series, the HiQ REDLINE portfolio, the CleanLine points of use and the Quick Connect points of use for laboratory use, and the BASELINE regulators for use in chemical applications that use gases of lower purity. At the end of this catalog are some useful checklists for when planning and carrying through central gas supply system installations. If nothing else is stated the pressure is gauge pressure at STP (Standard Temperature and Pressure; K and 101,325 Pa). n.a. stands for not applicable, e.g., pressure rating for a point of use that does not contain any pressure restricting components. Linde reserve the right to make alterations to specifications, quantities, etc., for production or other reason, subsequent to publication. The information contained herein has been prepared by qualified experts within Linde. While we believe that the information is General symbols Group green central gas supply system equipment for inert and non-reactive gases used as carrier gas or likewise, where gas integrity is non-crucial at cylinder change. Group blue central gas supply system equipment, with own gas purge, for inert and nonreactive gases and gas mixtures where gas integrity is important at cylinder change. Group orange central gas supply system equipment, with purge gas (nitrogen or likewise) purging, for toxic and reactive gases and gas mixtures, where gas integrity and safety is important at cylinder change.

9 accurate within the limits of the analytical methods employed and is complete to the extent of the specific analyses performed, we make no warranty or representation as to the suitability of the use of the information for any particular purposes. The information is offered with the understanding that any use of the information is at the sole discretion and risk of the user. In any case Linde s liability arising out of the use of the information contained herein shall be limited by the fee established for providing such information. The HiQ codes work like this; A full code is 10 digits long (xxxxyyyzzz). For Hardware the first four defines the Equipment (xxxx), the following three the Equipment Outlet (yyy) and the last three the Equipment Inlet (zzz). When Outlet and/or Inlet are undefined these are zeros (000). For gases the first four digits define the Gas product (xxxx), the following three the Cylinder (yyy) and the last three the Cylinder Valve (zzz). Equipment matching a specific gas shall have the same three last figures (zzz) where Cylinder Valve connection and Equipment Inlet connection follow the same standard. pn 2 = 0.78 bar(a) pn 2 = 0 bar(a) Ar 10 bar The driving force in diffusion is the difference in concentration, here expressed as partial pressures.

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11 Central gas supply. The system that gives you control over the gas supply. Due to their special properties, specialty gases place particular demands on components for distribution, control and monitoring. Either because the applications require that the gases shall maintain their high purity throughout the point of use, or because their chemical and physical properties require special design of the central gas supply system.

12 Central gas supply. The advantages of a HiQ REDLINE central gas supply system are among others these: Increased safety The risk of accidents is reduced, as there is no need to handle gas cylinders inside the work place. Only low-pressure equipment and small gas quantities are present in the work place. Gas cylinders are collected under one roof, which facilitates removal from labs and work areas. The handling of high-pressure cylinders and the connection of toxic gases should be carried out by trained staff. If a problem with leaking gas should occur, ventilation is essential. This is especially important while handling inflammable and toxic gases, and is simplified by the central approach. Improved operating economy A continuous gas supply to each work station means less wasted time and fewer unplanned disruptions for changing gas cylinders. Fewer and larger gas cylinders which together supply all users, means more effective emptying of the cylinders which in turn give lower costs for gas and cylinder rental as well as transport charges. In addition the store monitoring and purchasing can be centralized and rationalized. Better working environment The work place can be designed more appropriately. Heavy gas cylinders containing toxic gases under high pressure can involve great risks. Outlets positioned at every work station are convenient and easy to use. Turnkey deliveries Together with the customer we carry out a requirement analysis. Thereafter, planning and installation takes place. A service agreement guarantees a troublefree gas supply without unplanned operating stoppages. Quality requirements govern the choice of material The gas to be distributed and the level of contamination that can be accepted in the gas determine the choice of component material in a gas supply system. The inner surface finish of components is of great importance to the final purity of the gas at the point of use. A better surface finish will make the pipe system easier to clean and reduce the risk of particles being released into the gas stream.

13 ppm = Constant flow 10 l/h 2 = 5 x pressurized/decompression P 3 bar 3 = 7 x pressurized/decompression P 3 bar 4 = 10 x pressurized/decompression P 3 bar O2 content in the purging gas h The figure illustrates the relation between purge time, purging method and the purity realized with regard to the oxygen content in a gas system. Copper Copper has been used within gas supply technology for a long time and is still an option when using industrial grade gas. Make sure only to use cleaned copper tubing. Stainless steel Over the past years, stainless steel has become the number one choice of material for pure gas applications. This is primarily because the material is easy to clean and can be supplied with a very good surface finish. The increasing use of chemically reactive gases and the great demands made on purity have also contributed towards this trend. Welding methods have been developed which provide advantages with assembly in confined areas and which make it possible to join stainless steel systems while still maintaining a level of cleanliness and finish. Stainless steel is also chosen purely for aesthetic reasons or where the environment is aggressive and can give rise to corrosion. As a general guide the selection of components for a gas supply system is always based on the chosen gas quality. Standard purity specialty gases (Equivalent to 2.5 [99.5%] to 6.0 [ %]) Component: Stainless steel or brass depending on the gas to be used. Threaded connectors, type NPT or G. Piping: Washed stainless steel. Connection: Orbital welding compression couplings, designed to clamp onto the pipe. The coupling requires the pipe to have a good degree of roundness (stainless steel) and gives a seal equivalent to 10 6 bar cm 3 /s. High purity specialty gases (Equivalent to 6.0 [ ] or higher) Component: Stainless steel or brass depending on the gas to be used. Threaded connectors, type NPT or G. Piping: Washed stainless steel. Connection: VCR couplings, welded onto the pipes and valves. Using a pointed profile that, under a great pressure from two sides, is pressed into metallic packing seals the couplings. The coupling gives a seal equivalent to bar cm 3 /s. System design and start-up System design can be broken down into three stages: Determine the maximum contamination level for the gas. Select the components to be used for the gas supply system. Design, assemble and commission the system. Linde has extensive know-how within the gas industry and experience of gas media and applications everything from component selection,

14 Central gas supply. via system design to installation and start-up as well as all technical documentation. Linde acts as advisor and consultant together with the user in order to assess the requirements and conditions of the project in question. It is extremely important to look at the system in its entirety, both from an economic and safety point of view. Highlighted below are some of the areas that greatly affect the whole system. Distribution and storage Arrange if possible a storage area for the gas cylinders in a separate building. Connected gas cylinders are placed in a separate area, preferably in adjacent to the access area. Avoid transporting gas cylinders indoors. The gases are stored (separately) according to fixed directives depending on their physical characteristics. Ventilation is provided based on safety requirements regarding the amount and type of gas used. Gas cabinets and pipe systems Separate gas cabinets should be considered for corrosive gases and toxic gases. When using extremely dangerous gases there is a possibility of flow control and emergency stop functions. Gas pipes should be run in such a manner that the risk of mechanical damage is eliminated and that, as far as possible, through areas where any leaking gas causes as little damage as possible. Detection and alarms The need of detection is assessed. Regard should be taken to future requirements concerning types of gas and suitable flexibility to avoid unnecessary costs at a later stage. The possibility of an auto-stop if a leak is indicated. This can be achieved using detection equipment. The need of an alarm to an operating centre and/or an evacuation alarm within a certain area is defined. Linde has well-trained assembly teams with vast experience of specialty gas installations.

15 Each team has a supervisor who is responsible for the completion of the project and at the same time functions as an on-site contact person. Pipe and components are delivered sealed and well packed to the assembly area. To maintain the purity requirements and to produce a tight gas system, automatic computer controlled pipe welding equipment is used. All welding is carried out using internal and external shield-gas purging, which results in clean and bright joints. A complete system is purged clean and analyzed to determine the humidity and oxygen content. To guarantee that a system is tight, we carry out a helium leak detection test. A certificate of tightness is drawn up. Before a gas supply system can be regarded as completed and is handed over for start-up it is documented. A complete set of documentation comprises: Layout documents (show the entire supply systems design and positions in respective buildings). Technical information covering all components. Spare part lists. Pressure testing protocols. Analysis certificates where applicable. Tightness certificates where applicable. Operating and servicing instructions. Pressure testing according to applicable standards is carried out and a protocol is established. System specifications including equipment lists.

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17 HiQ REDLINE Gas panels. The starting point. Gas panels are used in central gas supply systems for reducing the high primary pressure in the cylinders to more manageable secondary pressures and is the place where the cylinders are changed, etc. It can be considered the heart of the central gas system. Linde has three types of gas panels: Single, double and semi-automatic. Single panels handle one cylinder or bundle at a time. When the cylinder/bundle is empty it has to be changed. Double panels handle two cylinders or bundles (or a combination) at a time. When the cylinder or bundle is empty, switchover has to be done manually. Semi-automatic panels handle two cylinders/bundles at a time. When the pressure at one side (the primary side) reaches a pre-set value the manifold switches to the other side. This means that it is possible to change the gas cylinders without interrupting the gas flow. After the cylinders at the primary side are changed the handle is turned, thus changing the secondary side (delivering the gas) to the new primary side. It is possible to create a fully automatic manifold, with either electric or pneumatic valves, but since the cylinders have to be changed anyway the cost is rarely justified. Note: Gas panels are not supplied with cylinder connections. For information on available cylinder connections, please contact your local Linde representative. Group green equipment for inert and nonreactive gases used as carrier gas or likewise, where gas integrity is non-crucial at cylinder change. S 200 Group blue equipment, with own gas purge, for inert and non-reactive gases and gas mixtures where gas integrity is important at cylinder change. S 201 S 202 D 204 A 208 Group orange equipment, with purge gas (nitrogen or likewise) purging, for toxic and reactive gases and gas mixtures, where gas integrity and safety is important at cylinder change. S 203 A 209

18 HiQ REDLINE Gas panels S 200. Single gas panel. Single stage gas supply panel designed for pure gases and mixtures. Description Gas panel S 200 is designed for single cylinders or bundles. It is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and a shut-off valve for the process gas. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure bar 8 85 psi bar psi bar psi bar 145 3,000 psi Outlet gauge range 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,400 psi bar 0 4,500 psi Operating temperature C F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

19 Downstream pressure, bar To process 9 10 bar* 6 3 Max flow * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ All measurements in millimeters. Drawings of other types available on request.

20 Gas panels S 200. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 200 S200 short flexihose and 1 cylinder S 200 long flexihose and 2 cylinders B B B B 200 3, SS SS SS SS 200 3, B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 200 coil and 1 cylinder S 200 short flexihose and 2 cylinders S 200 long flexihose and 4 cylinders B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 200 coil and 2 cylinders S 200 short flexihose and 4 cylinders S 200C contact gauge B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B C B C B C B C 200 3, SS C SS C SS C SS C 200 3, S 200 coil and 4 cylinders S 200 long flexihose and 1 cylinder B C B C B C B C , SS C SS C SS C SS C , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH ,

21 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 200C contact gauge, coil and 1 cylinder S 200C contact gauge, short flexihose and 1 cylinder S 200C contact gauge,long flexihose and 1 cylinder B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 200C contact gauge, coil and 2 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 200C contact gauge, coil and 4 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 200C contact gauge, short flexihose and 2 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 200C contact gauge, short flexihose and 4 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 200C contact gauge, long flexihose and 2 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 200C contact gauge, long flexihose and 4 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH ,

22 HiQ REDLINE Gas panels S 201. Single gas panel. Single stage gas supply panel with internal gas purging, designed for high purity gases and mixtures (including flammable). Description Gas panel S 201 is designed for single cylinders or bundles. It is equipped with internal gas purging to avoid contaminants entering the process line after changing the cylinders. It is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas and for the purge gas. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure bar 8 85 psi bar psi bar psi bar 145 3,000 psi Outlet gauge range 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,400 psi bar 0 4,500 psi Operating temperature C F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet NPT 1/4 female Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

23 Downstream pressure, bar To process To ventilation 9 10 bar* Max flow * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ All measurements in millimeters. Model R. Drawings of other types available on request.

24 Gas panels S 201. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 201 S 201 short flexihose and 1 cylinder S 201 long flexihose and 2 cylinder B B B B 200 3, SS SS SS SS 200 3, B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 201 coil and 1 cylinder S 201 short flexihose and 2 cylinders S 201 long flexihose and 4 cylinders B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 201 coil and 2 cylinders S 201 short flexihose and 4 cylinders S 201/R residual gas outlet B C B C B C B C , SS C SS C SS C SS C , S 201 coil and 4 cylinders B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , S 201 long flexihose and 1 cylinder B R B R B R B R 200 3, SS R SS R SS R SS R 200 3, SS R C , B C B C B C B C , SS C SS C SS C SS C , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH ,

25 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 201/R residual gas outlet, coil and 1 cylinder S 201/R residual gas outlet, short flexihose and 1 cylinder S 201/R residual gas outlet, long flexihose and 1 cylinder B R C B R C B R C B R C , SS R C SS R C SS R C S 201/R residual gas outlet, coil and 2 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 201/R residual gas outlet, coil and 4 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 201/R residual gas outlet, short flexihose and 2 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 201/R residual gas outlet, short flexihose and 4 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 201/R residual gas outlet, long flexihose and 2 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 201/R residual gas outlet, long flexihose and 4 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH ,

26 Gas panels S 201. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 201/C contact gauge B C B C B C B C 200 3, SS C SS C SS C SS C 200 3, S 201/C contact gauge, coil and 1 cylinder B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 201/C contact gauge, coil and 2 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 201/C contact gauge, coil and 4 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 201/C contact gauge, short flexihose and 1 cylinder B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 201/C contact gauge, short flexihose and 2 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 201/C contact gauge, short flexihose and 4 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 201/C contact gauge, long flexihose and 1 cylinder B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 201/C contact gauge, long flexihose and 2 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 201/C contact gauge, long flexihose and 4 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH ,

27 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code S 201/RC residual gas outlet, contact gauge B RC B RC B RC B RC 200 3, SS RC SS RC SS RC SS RC 200 3, S 201/RC residual gas outlet, contact gauge, coil and 1 cylinder B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , S 201/RC residual gas outlet, contact gauge, coil and 2 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , S 201/RC residual gas outlet, contact gauge, coil and 4 cylinders B RC C B RC C B RC C Specifications bar psi HiQ code B RC C , SS RC C SS RC C SS RC C SS RC C , S 201/RC residual gas outlet, contact gauge, short flexihose and 1 cylinder B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , S 201/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , S 201/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , Specifications bar psi HiQ code S 201/RC residual gas outlet, contact gauge, long flexihose and 1 cylinder B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , S 201/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , S 201/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH ,

28 HiQ REDLINE Gas panels S 202. Single gas panel. Single stage gas supply panel with internal gas purging, designed for pure gases and mixtures. Description Gas panel S 202 is designed for single cylinders or bundles. It is equipped with internal gas purging to avoid contaminants entering the process line after changing the cylinders. It is is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas at high and low pressure ends and for the purging gas. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure bar 8 85 psi bar psi bar psi bar 145 3,000 psi Outlet gauge range 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,400 psi bar 0 4,500 psi Operating temperature C F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet NPT 1/4 female Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

29 Downstream pressure, bar To process To ventilation 9 10 bar* Max flow * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ All measurements in millimeters. Model R. Drawings of other types available on request.

30 Gas panels S 202. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202 S 202 short flexihose and 1 cylinder S 202 long flexihose and 2 cylinders B B B B 200 3, SS SS SS SS 200 3, B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 202 coil and 1 cylinder S 202 short flexihose and 2 cylinders S 202 long flexihose and 4 cylinders B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 202 coil and 2 cylinders S 202 short flexihose and 4 cylinders S 202/R residual gas outlet B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B R B R B R B R 200 3, SS R SS R SS R SS R 200 3, S 202 coil and 4 cylinders S 202 long flexihose and 1 cylinder B C B C B C B C , SS C SS C SS C SS C , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH ,

31 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202/R residual gas outlet, coil and 1 cylinder B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 202/R residual gas outlet, coil and 2 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 202/R residual gas outlet, coil and 4 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 202/R residual gas outlet, short flexihose and 1 cylinder B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 202/R residual gas outlet, short flexihose and 2 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 202/R residual gas outlet, short flexihose and 4 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 202/R residual gas outlet, long flexihose and 1 cylinder B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 202/R residual gas outlet, long flexihose and 2 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 202/R residual gas outlet, long flexihose and 4 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 202/C contact gauge B C B C B C B C 200 3, SS C SS C SS C SS C 200 3,

32 Gas panels S 202. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202/C contact gauge, coil and 1 cylinder B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 202/C contact gauge, coil and 2 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 202/C contact gauge, coil and 4 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 202/C contact gauge, short flexihose and 1 cylinder B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 202/C contact gauge, short flexihose and 2 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 202/C contact gauge, short flexihose and 4 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 202/C contact gauge, long flexihose and 1 cylinder B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 202/C contact gauge, long flexihose and 2 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 202/C contact gauge, long flexihose and 4 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 202/RC residual gas outlet,contact gauge B RC B RC B RC B RC 200 3, SS RC SS RC SS RC SS RC 200 3,

33 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 202/RC residual gas outlet, contact gauge, coil and 1 cylinder S 202/RC residual gas outlet, contact gauge, short flexihose and 1 cylinder S 202/RC residual gas outlet, contact gauge, long flexihose and 1 cylinder B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , S 202/RC residual gas outlet, contact gauge, coil and 2 cylinders S 202/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders S 202/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , S 202/RC residual gas outlet, contact gauge, coil and 4 cylinders S 202/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders S 202/RC residual gas outlet, contact gauge, long flexihose and 4 cylinder B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH ,

34 HiQ REDLINE Gas panels S 203. Single gas panel. Single stage gas supply panel with external gas purging, designed for reactive, toxic and corrosive gases. Description Gas panel S 203 is designed for single cylinders or bundles. It is equipped with external gas purging to allow purging of the high pressure side before disconnecting cylinders. It is is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas at high and low pressure ends and for the purging gas. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure bar 8 85 psi bar psi bar psi bar 145 3,000 psi Outlet gauge range 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,400 psi bar 0 4,500 psi Operating temperature C F Connection 1, 2 or 4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas inlet Tube fitting 6 mm Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

35 Downstream pressure, bar Purge gas inlet To process To ventilation 9 10 bar* 6 3 Max flow * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ All measurements in millimeters. Model R. Drawings of other types available on request.

36 Gas panels S 203. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203 S 203 short flexihose and 1 cylinder S 203 long flexihose and 2 cylinders B B B B 200 3, SS SS SS SS 200 3, B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 203 coil and 1 cylinder S 203 short flexihose and 2 cylinders S 203 long flexihose and 4 cylinders B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , S 203 coil and 2 cylinders S 203 short flexihose and 4 cylinders S 203/R residual gas outlet B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B R B R B R B R 200 3, SS R SS R SS R SS R 200 3, S 203 coil and 4 cylinders S 203 long flexihose and 1 cylinder B C B C B C B C , SS C SS C SS C SS C , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH ,

37 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203/R residual gas outlet, coil and 1 cylinder B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 203/R residual gas outlet, coil and 2 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 203/R residual gas outlet, coil and 4 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , S 203/R residual gas outlet, short flexihose and 1 cylinder B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 203/R residual gas outlet, short flexihose and 2 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 203/R residual gas outlet, short flexihose and 4 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , S 203/R residual gas outlet, long flexihose and 1 cylinder B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 203/R residual gas outlet, long flexihose and 2 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 203/R residual gas outlet, long flexihose and 4 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , S 203/C contact gauge B C B C B C B C 200 3, SS C SS C SS C SS C 200 3,

38 Gas panels S 203. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203/C contact gauge, coil and 1 cylinder B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 203/C contact gauge, coil and 2 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 203/C contact gauge, coil and 4 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , S 203/C contact gauge, short flexihose and 1 cylinder B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 203/C contact gauge, short flexihose and 2 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 203/C contact gauge, short flexihose and 4 cylinders B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , S 203/C contact gauge, long flexihose and 1 cylinder B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 203/C contact gauge, long flexihose and 2 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 203/C contact gauge, long flexihose and 4 cylinders B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , S 203/RC residual gas outlet, contact gauge B RC B RC B RC B RC 200 3, SS RC SS RC SS RC SS RC 200 3,

39 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code S 203/RC residual gas outlet, contact gauge, coil and 1 cylinder S 203/RC residual gas outlet, contact gauge, short flexihose and 1 cylinder S 203/RC residual gas outlet, contact gauge, long flexihose and 1 cylinder B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , S 203/RC residual gas outlet, contact gauge, coil and 2 cylinders S 203/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders S 203/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , S 203/RC residual gas outlet, contact gauge, coil and 4 cylinders S 203/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders S 203/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH ,

40 HiQ REDLINE Gas panels D 204. Double gas panel. Single stage gas supply panel with internal gas purging, designed for high purity gases and mixtures (including flammable), with connection for 2x1 cylinder. Description Gas panel D 204 is designed for double cylinders or bundles. It is equipped with internal gas purging to avoid contaminants entering the process line after changing the cylinders. It is is mounted on a stainless steel console and consists of a pressure regulator, inlet and outlet pressure gauges, a relief valve and shut-off valves for the process gas at the high pressure end and for the purging gas. The gas supply is uninterrupted during cylinder change. Switch-over is done manually. The panel can also be equipped with a contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure bar 8 85 psi bar psi bar psi bar 145 3,000 psi Outlet gauge range 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,400 psi bar 0 4,500 psi Operating temperature C F Connection 2x1, 2x2 or 2x4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy

41 Downstream pressure, bar To process To ventilation 9 10 bar* Max flow * Set pressure Flow, Nm 3 /h N 2 Process gas inlet ~ All measurements in millimeters. Model R. Drawings of other types available on request.

42 Gas panels D 204. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code D 204 D 204 short flexihose and 2 cylinders D 204 long flexihose and 4 cylinders B B B B 200 3, SS SS SS SS 200 3, B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , D 204 coil and 2 cylinders D 204 short flexihose and 4 cylinders D 204 long flexihose and 8 cylinders B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , D 204 coil and 4 cylinders D 204 short flexihose and 8 cylinders D 204/R residual gas outlet B C B C B C B C , SS C SS C SS C SS C , B SH B SH B SH B SH , SS SH SS SH SS SH SS SH , B R B R B R B R 200 3, SS R SS R SS R SS R 200 3, D 204 coil and 8 cylinders B C B C B C B C , SS C SS C SS C SS C , D 204 long flexihose and 2 cylinders B LH B LH B LH B LH , SS LH SS LH SS LH SS LH , D 204/R residual gas outlet, coil and 2 cylinders B R C B R C B R C B R C ,

43 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code SS R C SS R C SS R C SS R C , D 204/R residual gas outlet, coil and 4 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , D 204/R residual gas outlet, coil and 8 cylinders B R C B R C B R C B R C , SS R C SS R C SS R C SS R C , D 204/R residual gas outlet, short flexihose and 2 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , D 204/R residual gas outlet, short flexihose and 4 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , D 204/R residual gas outlet, short flexihose and 8 cylinders B R SH B R SH B R SH B R SH , SS R SH SS R SH SS R SH SS R SH , D 204/R residual gas outlet, long flexihose and 2 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , D 204/R residual gas outlet, long flexihose and 4 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , D 204/R residual gas outlet, long flexihose and 8 cylinders B R LH B R LH B R LH B R LH , SS R LH SS R LH SS R LH SS R LH , D 204/C contact gauge B C B C B C B C 200 3, SS C SS C SS C SS C 200 3, D 204/C contact gauge, coil and 2 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C ,

44 Gas panels D 204. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code D 204/C contact gauge, coil and 4 cylinders D 204/C contact gauge, short flexihose and 4 cylinders D 204/C contact gauge, long flexihose and 4 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , D 204/C contact gauge, coil and 8 cylinders D 204/C contact gauge, short flexihose and 8 cylinders D 204/C contact gauge, long flexihose and 8 cylinders B C C B C C B C C B C C , SS C C SS C C SS C C SS C C , B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , D 204/C contact gauge, short flexihose and 2 cylinders D 204/C contact gauge, long flexihose and 2 cylinders D 204/RC residual gas outlet, contact gauge B C SH B C SH B C SH B C SH , SS C SH SS C SH SS C SH SS C SH , B C LH B C LH B C LH B C LH , SS C LH SS C LH SS C LH SS C LH , B RC B RC B RC B RC 200 3, SS RC SS RC SS RC SS RC 200 3,

45 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code D 204/RC residual gas outlet, contact gauge, coil and 2 cylinders D 204/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders D 204/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , D 204/RC residual gas outlet, contact gauge, coil and 4 cylinders D 204/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders D 204/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH , D 204/RC residual gas outlet, contact gauge, coil and 8 cylinders D 204/RC residual gas outlet, contact gauge, short flexihose and 8 cylinders D 204/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC C B RC C B RC C B RC C , SS RC C SS RC C SS RC C SS RC C , B RC SH B RC SH B RC SH B RC SH , SS RC SH SS RC SH SS RC SH SS RC SH , B RC LH B RC LH B RC LH B RC LH , SS RC LH SS RC LH SS RC LH SS RC LH ,

46 HiQ REDLINE Gas panels A 208. Semi-automatic gas panel. Single stage, semi-automatic gas supply panel with internal gas purging, designed for high purity gases and mixtures. Description Gas panel A 208 is a semi-automatic gas panel designed for uninterrupted gas supply. Switch-over between the two connected cylinders or bundles occurs when the pressure of one side (the primary side) falls below a pre-set pressure level. This is achieved by two integrated regulators (factory-set to slightly different delivery pressure levels) which are connected at their outlet ports. Semi-automatic supply panels should be connected to an alarm so that the cylinders will be switched on time. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 14 +3/ 3 bar / 45 psi 50 +8/ 10 bar / 145 psi Operating temperature C F Connection 2x1 to 2x4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Highlights Continuous supply of pure gases Automatic switch over without auxiliary power Positive indication of active cylinder Process-gas purging system High flow capacity Compact design

47 Downstream pressure, bar To ventilation To process bar* bar** Max flow * Set pressure operating side ** Set pressure backup Flow, Nm 3 /h N 2 Process gas inlet Process gas inlet ~ All measurements in millimeters. R model. Drawings of other types available on request.

48 Gas panels A 208. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 208 B B SS SS A 208 coil and 2 cylinders B C B C SS C SS C A 208 coil and 4 cylinders B C B C SS C SS C A 208 coil and 8 cylinders B C B C SS C SS C A 208 short flexihose and 2 cylinders B SH B SH SS SH SS SH SS LH SS LH A 208 long flexihose and 4 cylinders B LH B LH SS LH SS LH A 208 long flexihose and 8 cylinders B LH B LH SS LH SS LH A 208/R residual gas outlet B R B R SS R SS R A 208/R residual gas outlet, coil and 2 cylinders B R C B R C SS R C SS R C A 208/R residual gas outlet, coil and 4 cylinders SS R SH SS R SH A 208/R residual gas outlet, short flexihose and 4 cylinders B R SH B R SH SS R SH SS R SH A 208/R residual gas outlet, short flexihose and 8 cylinders B R SH B R SH SS R SH SS R SH A 208/R residual gas outlet, long flexihose and 2 cylinders B R LH B R LH SS R LH SS R LH A 208/R residual gas outlet, long flexihose and 4 cylinders B R LH B R LH SS R LH SS R LH A 208 short flexihose and 4 cylinders B SH B SH SS SH SS SH A 208 short flexihose and 8 cylinders B SH B SH SS SH SS SH A 208 long flexihose and 2 cylinders B R C B R C SS R C SS R C A 208/R residual gas outlet, coil and 8 cylinders B R C B R C SS R C SS R C A 208/R residual gas outlet, short flexihose and 2 cylinders A 208/R residual gas outlet, long flexihose and 8 cylinders B R LH B R LH SS R LH SS R LH A 208/C contact gauge B C B C SS C SS C B LH B LH B R SH B R SH

49 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 208/C contact gauge, coil and 2 cylinders SS C LH SS C LH A 208/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders B C C B C C SS C C SS C C A 208/C contact gauge, coil and 4 cylinders A 208/C contact gauge, long flexihose and 4 cylinders B C LH B C LH SS C LH SS C LH B RC SH B RC SH SS RC SH SS RC SH A 208/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders B C C B C C SS C C SS C C A 208/C contact gauge, coil and 8 cylinders A 208/C contact gauge, long flexihose and 8 cylinders B C LH B C LH SS C LH SS C LH B RC SH B RC SH SS RC SH SS RC SH A 208/RC residual gas outlet, contact gauge, short flexihose and 8 cylinders B C C B C C SS C C SS C C A 208/C contact gauge, short flexihose and 2 cylinders A 208/RC residual gas outlet, contact gauge B RC B RC SS RC SS RC B RC SH B RC SH SS RC SH SS RC SH A 208/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B C SH B C SH SS C SH SS C SH A 208/C contact gauge, short flexihose and 4 cylinders A 208/RC residual gas outlet, contact gauge, coil and 2 cylinders B RC C B RC C SS RC C SS RC C B RC LH B RC LH SS RC LH SS RC LH A 208/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B C SH B C SH SS C SH SS C SH A 208/C contact gauge, short flexihose and 8 cylinders A 208/RC residual gas outlet, contact gauge, coil and 4 cylinders B RC C B RC C SS RC C SS RC C B RC LH B RC LH SS RC LH SS RC LH A 208/RC residual gas outlet, contact gauge,long flexihose and 8 cylinders B C SH B C SH SS C SH SS C SH A 208/C contact gauge, long flexihose and 2 cylinders A 208/RC residual gas outlet, contact gauge, coil and 8 cylinders B RC C B RC C SS RC C SS RC C B RC LH B RC LH SS RC LH SS RC LH B C LH B C LH

50 HiQ REDLINE Gas panels A 209. Semi-automatic gas panel. Single stage, semi-automatic gas supply panel with external gas purging, designed for reactive, toxic and corrosive gases. Description Gas panel A 209 is a semi-automatic gas panel designed for uninterrupted gas supply. Switch-over between the two connected cylinders or bundles occurs when the pressure of one side (the primary side) falls below a pre-set pressure level. This is achieved by two integrated regulators (factory-set to slightly different delivery pressure levels) which are connected at their outlet ports. Semi-automatic supply panels should be connected to an alarm so that the cylinders will be switched on time. The panel can also be equipped with contact gauge (/C models) for automatic surveillance. When applicable the panel can be ordered with residual gas line (/R models) connecting the relief valve with the purge outlet. Technical data Inlet primary pressure 230 bar 3,300 psi Outlet pressure 14 +3/ 3 bar / 45 psi 50 +8/ 10 bar / 145 psi Operating temperature C F Connection 2x1 to 2x4 cylinders Process gas in NPT 1/4 female Process gas out NPT 1/4 female Purge gas inlet NPT 1/4 female Purge gas outlet Tube fitting 6 mm Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Highlights Continuous supply of pure gases Automatic switch over without auxiliary power Positive indication of active cylinder Process-gas purging system High flow capacity Compact design

51 Downstream pressure, bar To ventilation To process bar* Purge gas inlet Purge gas inlet bar** Max flow * Set pressure operating side ** Set pressure backup Flow, Nm 3 /h N 2 Process gas inlet Process gas inlet ~ ~ All measurements in millimeters. R model. Drawings of other types available on request.

52 Gas panels A 209. Product names and codes. Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 209 B B SS SS A 209 coil and 2 cylinders B C B C SS C SS C A 209 coil and 4 cylinders B C B C SS C SS C A 209 coil and 8 cylinders B C B C SS C SS C A 209 short flexihose and 2 cylinders B SH B SH SS SH SS SH SS LH SS LH A 209 long flexihose and 4 cylinders B LH B LH SS LH SS LH A 209 long flexihose and 8 cylinders B LH B LH SS LH SS LH A 209/R residual gas outlet B R B R SS R SS R A 209/R residual gas outlet, coil and 2 cylinders B R C B R C SS R C SS R C A 209/R residual gas outlet, coil and 4 cylinders SS R SH SS R SH A 209/R residual gas outlet, short flexihose and 4 cylinders B R SH B R SH SS R SH SS R SH A 209/R residual gas outlet, short flexihose and 8 cylinders B R SH B R SH SS R SH SS R SH A 209/R residual gas outlet, long flexihose and 2 cylinders B R LH B R LH SS R LH SS R LH A 209/R residual gas outlet, long flexihose and 4 cylinders B R LH B R LH SS R LH SS R LH A 209 short flexihose and 4 cylinders B SH B SH SS SH SS SH A 209 short flexihose and 8 cylinders B SH B SH SS SH SS SH A 209 long flexihose and 2 cylinders B R C B R C SS R C SS R C A 209/R residual gas outlet, coil and 8 cylinders B R C B R C SS R C SS R C A 209/R residual gas outlet, short flexihose and 2 cylinders A 209/R residual gas outlet, long flexihose and 8 cylinders B R LH B R LH SS R LH SS R LH A 209/C contact gauge B C B C SS C SS C B LH B LH B R SH B R SH

53 B = Brass SS = Stainless steel Cx = Coil and number of cylinders SHx = Short flexihose and number of cylinders LHx = Long flexihose and number of cylinders C = Contact gauge R = Residual gas outlet RC = Residual gas outlet and contact gauge Specifications bar psi HiQ code Specifications bar psi HiQ code Specifications bar psi HiQ code A 209/C contact gauge, coil and 2 cylinders SS C LH SS C LH A 209/RC residual gas outlet, contact gauge, short flexihose and 2 cylinders B C C B C C SS C C SS C C A 209/C contact gauge, coil and 4 cylinders A 209/C contact gauge, long flexihose and 4 cylinders B C LH B C LH SS C LH SS C LH B RC SH B RC SH SS RC SH SS RC SH A 209/RC residual gas outlet, contact gauge, short flexihose and 4 cylinders B C C B C C SS C C SS C C A 209/C contact gauge, coil and 8 cylinders B C C B C C SS C C SS C C A 209/C contact gauge, short flexihose and 2 cylinders B C SH B C SH SS C SH SS C SH A 209/C contact gauge, short flexihose and 4 cylinders B C SH B C SH SS C SH SS C SH A 209/C contact gauge, short flexihose and 8 cylinders B C SH B C SH SS C SH SS C SH A 209/C contact gauge, long flexihose and 2 cylinders A 209/C contact gauge, long flexihose and 8 cylinders B C LH B C LH SS C LH SS C LH A 209/RC residual gas outlet, contact gauge B RC B RC SS RC SS RC A 209/RC residual gas outlet, contact gauge, coil and 2 cylinders B RC C B RC C SS RC C SS RC C A 209/RC residual gas outlet, contact gauge, coil and 4 cylinders B RC C B RC C SS RC C SS RC C A 209/RC residual gas outlet, contact gauge, coil and 8 cylinders B RC C B RC C SS RC C SS RC C B RC SH B RC SH SS RC SH SS RC SH A 209/RC residual gas outlet, contact gauge, short flexihose and 8 cylinders B RC SH B RC SH SS RC SH SS RC SH A 209/RC residual gas outlet, contact gauge, long flexihose and 2 cylinders B RC LH B RC LH SS RC LH SS RC LH A 209/RC residual gas outlet, contact gauge, long flexihose and 4 cylinders B RC LH B RC LH SS RC LH SS RC LH A 209/RC residual gas outlet, contact gauge, long flexihose and 8 cylinders B RC LH B RC LH SS RC LH SS RC LH B C LH B C LH

54

55 HiQ REDLINE Points of use. Where all the action is. The point of use is the second stage of a central gas supply system. Together with the gas panel it guarantees a very stable outlet pressure and handles any pressure changes that may be caused in the system. When used together with a semi-automatic gas manifold it handles the pressure changes that are due to the changes from secondary to primary side. The HiQ REDLINE system is a modular system which allows maximum freedom. Each point of use can be individually equipped or stripped by the functions shut-off, pressure regulation and flow regulation. In this way, the point of use at the work place can be updated at any point to fit the present needs. Note: HiQ REDLINE points of use are delivered with 6 or 12 mm tube fitting inlet connection and 6 mm tube fitting outlet connection. Green group Use nickel- and chromium plated brass equipment. Blue group Use nickel- and chromium plated brass or stainless steel equipment. Orange group Use stainless steel equipment. Please see page 11 for detailed information about the groups.

56 HiQ REDLINE Points of use W 40. Wall design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for wall-mounting with external gas supply line. Design F is a version with fixed pressure and flow meter. Product name bar psi HiQ code W 40 A, brass n.a. n.a W 40 A, stainless steel n.a. n.a W 40 B, brass W 40 B, brass W 40 B, brass W 40 B, stainless steel W 40 B, stainless steel W 40 B, stainless steel W 40 C, brass W 40 C, brass W 40 C, brass W 40 C, stainless steel W 40 C, stainless steel W 40 C, stainless steel W 40 F, brass W 40 F, stainless steel Technical data Max primary pressure 40 bar 550 psi Secondary pressure bar psi bar 8 85 psi bar psi Pressure gauge scale bar psi 1 10 bar psi 1 18 bar psi Max flow (nitrogen) 2 Nm 3 /h 700 SCFH 6 Nm 3 /h 2,100 SCFH 11 Nm 3 /h 3,850 SCFH Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature C F

57 Design A Design B Design C All measurements in millimeters. W40 C in the drawing is extra equipped.

58 HiQ REDLINE Points of use B 40. Bench design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for mounting on a bench e.g. a laboratory desk, with a gas supply line from below through the table stand. Design F is a version with fixed pressure and flow meter. Product name bar psi HiQ code B 40 A, brass n.a. n.a B 40 A, stainless steel n.a. n.a B 40 B, brass B 40 B, brass B 40 B, brass B 40 B, stainless steel B 40 B, stainless steel B 40 B, stainless steel B 40 C, brass B 40 C, brass B 40 C, brass B 40 C, stainless steel B 40 C, stainless steel B 40 C, stainless steel B 40 F, brass B 40 F, stainless steel Technical data Max primary pressure 40 bar 550 psi Secondary pressure bar psi bar 8 85 psi bar psi Pressure gauge scale bar psi 1 10 bar psi 1 18 bar psi Max flow (nitrogen) 2 Nm 3 /h 700 SCFH 6 Nm 3 /h 2,100 SCFH 11 Nm 3 /h 3,850 SCFH Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature C F

59 Design A 58 ø 50 Design B ~ 53 ~ ø 50 Design C 160 ~ 154 ~ ø 50 All measurements in millimeters.

60 HiQ REDLINE Points of use L 40. Fume cupboard design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for mounting with gas supply line hidden behind a wall. Design F is a version with fixed pressure and flow meter. Product name bar psi HiQ code L 40 A, brass n.a. n.a L 40 A, stainless steel n.a. n.a L 40 B, brass L 40 B, brass L 40 B, brass L 40 B, stainless steel L 40 B, stainless steel L 40 B, stainless steel L 40 C, brass L 40 C, brass L 40 C, brass L 40 C, stainless steel L 40 C, stainless steel L 40 C, stainless steel L 40 F, brass L 40 F, stainless steel Technical data Max primary pressure 40 bar 550 psi Secondary pressure bar psi bar 8 85 psi bar psi Pressure gauge scale bar psi 1 10 bar psi 1 18 bar psi Max flow (nitrogen) 2 Nm 3 /h 700 SCFH 6 Nm 3 /h 2,100 SCFH 11 Nm 3 /h 3,850 SCFH Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature C F

61 Design A ~ 73 ~ 58 Design B ~ 53 ~ 159 Design C ~ 53 ~ 110 ~ 159 xxxxxx xxxxxx xxxxxx xxxxxx All measurements in millimeters.

62 HiQ REDLINE Points of use I 40X. Inset design. The point of use is especially developed for wall, bench or panel mounting, for inert, flammable and corrosive gases and gas mixtures. I 40 X is delivered with shut-off valve, regulator and needle valve. The n-version is without shut-off valve and s-version without needle valve. I 40 sn is a version with shut-off valve, gauge & needle valve and the I 40 Xlh is an analysis version with shut-off valve, regulator & needle valve low hysteresis. Product name bar psi HiQ code I 40 X, brass I 40 X, brass I 40 X, brass I 40 X, stainless steel I 40 X, stainless steel I 40 X, stainless steel I 40 Xn, brass I 40 Xn, brass I 40 Xn, brass I 40 Xn, stainless steel I 40 Xn, stainless steel I 40 Xn, stainless steel I 40 Xs, brass I 40 Xs, brass I 40 Xs, brass I 40 Xs, stainless steel I 40 Xs, stainless steel I 40 Xs, stainless steel I 40 sn, brass I 40 sn, brass I 40 sn, brass I 40 sn, stainless steel I 40 sn, stainless steel I 40 sn, stainless steel I 40 Xlh, brass I 40 Xlh, stainless steel Technical data Max primary pressure 40 bar 550 psi Secondary pressure bar psi bar 8 60 psi bar psi Pressure gauge scale bar 0 40 psi 0 6 bar 0 90 psi psi 0 16 bar psi psi Material Brass, Ni/Cr plated Stainless steel 316L Operating temperature C F

63 I 40 X 85 I 40 X 4 Outlet pressure, bar Max flow Flow, Nm 3 /h N ~ 53 I 40 X 10.5 Outlet pressure, bar Max flow Flow, Nm 3 /h N 2 All measurements in millimeters.

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65 HiQ REDLINE Cylinder regulators. When mobility and flexibility is the key. Cylinder regulators are used to reduce the high pressure in the gas cylinder to a more manageable pressure in the simplest of gas delivery systems. The cylinder regulator is equipped with a cylinder connection, a high pressure gauge to monitor the content of the cylinder and a low pressure gauge to monitor the adjustable secondary pressure. If there is a need for flow adjustments, the cylinder regulator is equipped with a needle valve, otherwise it is equipped with a shut-off valve. Cylinder regulators are used when central gas systems are not applicable. Such a case is mobile calibrations for environmental applications when maximum mobility is a prerequisite.

66 HiQ REDLINE Cylinder regulators C 200/1. Single stage regulator. C 200/1 is a single stage cylinder regulator, especially suitable for specialty gases where demands on purity, tightness and safety are high. A single stage regulator is preferred where the primary pressure is fairly constant (e.g. for gases in liquid phase). C 200/1 can be plain or equipped with a shut-off valve (type A), a needle valve (type B) or equipped for purging of the high pressure side (type P) or cross-purge (type XP). Product name bar psi HiQ code C 200/1, brass C 200/1, brass C 200/1, brass C 200/1, brass C 200/1, brass , C 200/1, stainless steel C 200/1, stainless steel C 200/1, stainless steel C 200/1, stainless steel C 200/1, stainless steel , C 200/1 A, brass C 200/1 A, brass C 200/1 A, brass C 200/1 A, brass C 200/1 A, brass , C 200/1 A, stainless steel C 200/1 A, stainless steel C 200/1 A, stainless steel C 200/1 A, stainless steel C 200/1 A, stainless steel , C 200/1 B, brass C 200/1 B, brass C 200/1 B, brass C 200/1 B, stainless steel C 200/1 B, stainless steel C 200/1 B, stainless steel C 200/1 P, brass C 200/1 P, brass C 200/1 P, brass C 200/1 P, brass C 200/1 P, brass , C 200/1 P, stainless steel C 200/1 P, stainless steel C 200/1 P, stainless steel C 200/1 P, stainless steel C 200/1 P, stainless steel , C 200/1 XP, brass C 200/1 XP, brass C 200/1 XP, brass C 200/1 XP, brass C 200/1 XP, brass , C 200/1 XP, stainless steel C 200/1 XP, stainless steel C 200/1 XP, stainless steel C 200/1 XP, stainless steel C 200/1 XP, stainless steel , Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure bar 3 45 psi bar 8 85 psi bar psi bar psi bar 150 3,000 psi Outlet gauge range 1 5 bar psi 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,150 psi bar 0 4,500 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.1 bar, 1.5 psi. Connection Out = NPT ¼ female Operating temperature C F Weight 1.3 kg 2.9 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

67 C 200/1 3 Outlet pressure, bar bar* bar* 5 bar* Max flow C200/ * Inlet pressure Flow, Nm 3 /h N 2 C 200/ Outlet pressure, bar 5 bar* 9 bar* Max flow 13 bar* * Inlet pressure Flow, Nm 3 /h N 2 C200/1A C 200/ Outlet pressure, bar 11 bar* 21 bar* Max flow 29 bar* * Inlet pressure Flow, Nm 3 /h N 2 C200/1P C 200/1 50 Outlet pressure, bar bar* bar* 81 bar* 61 bar* Max flow * Inlet pressure Flow, Nm 3 /h N 2 C200/1XP C 200/1 200 Outlet pressure, bar bar* bar* bar* 20 Max flow * Inlet pressure Flow, Nm 3 /h N2 All measurements in millimeters. Type P. Drawings of other types available on request.

68 HiQ REDLINE Cylinder regulators C 200/2. Two stage regulator. C 200/2 is a two-stage regulator made especially for the high demands on purity, safety and tightness that is necessary for specialty gases. Two stage regulators are preferred when a very stable secondary pressure is necessary and the primary pressure varies. C 200/2 can be plain or equipped with a shut-off valve (type A), a needle valve (type B) or equipped for purging of the high pressure side (type P). Product name bar psi HiQ code C 200/2, brass C 200/2, brass C 200/2, brass C 200/2, stainless steel C 200/2, stainless steel C 200/2, stainless steel C 200/2 A, brass C 200/2 A, brass C 200/2 A, brass C 200/2 A, stainless steel C 200/2 A, stainless steel C 200/2 A, stainless steel C 200/2 B, brass C 200/2 B, brass C 200/2 B, brass C 200/2 B, stainless steel C 200/2 B, stainless steel C 200/2 B, stainless steel C 200/2 P, brass C 200/2 P, brass C 200/2 P, brass C 200/2 P, stainless steel C 200/2 P, stainless steel C 200/2 P, stainless steel Technical data Primary pressure bar 100 3,300 psi Outlet pressure bar 3 45 psi bar 8 85 psi 1 10 bar psi Outlet gauge range 1 5 bar psi 1 10 bar psi 1 18 bar psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.01 bar, 0.1 psi. Connection Out = NPT ¼ female Operating temperature C F Weight 3.0 kg 6.6 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

69 C200/2 C 200/2 3 Outlet pressure, bar bar* bar* 8 bar* Max flow C200/2B Inlet pressure first stage, 17 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 8 bar. * Inlet pressure C 200/2 6 Outlet pressure, bar bar* 17 bar* bar* Max flow C200/2P Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure C 200/ Outlet pressure, bar 17 bar* 17 bar* 17 bar* Max flow 17 bar* Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure All measurements in millimeters. Type A. Drawings of other types available on request.

70 HiQ REDLINE Cylinder regulators C 200hv/2. Two stage regulator. C 200hv/2 is a two-stage regulator made especially for the high demands on purity, safety and tightness that is necessary for specialty gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. C 200hv/2 can be plain or equipped with a shut-off valve (type A), a needle valve (type B). Product name bar(a) psi(a) HiQ code C 200hv/2, brass C 200hv/2, brass C 200hv/2, stainless steel C 200hv/2, stainless steel C 200hv/2 A, brass C 200hv/2 A, brass C 200hv/2 A, stainless steel C 200hv/2 A, stainless steel C 200hv/2 B, brass C 200hv/2 B, brass C 200hv/2 B, stainless steel C 200hv/2 B, stainless steel Technical data Primary pressure 230 bar 3,300 psi Outlet pressure bar(a) psi(a) bar(a) 3 45 psi(a) Outlet gauge range bar psi 1 5 bar psi Connection Out = NPT ¼ female Operating temperature C F Weight 1.9 kg 4.2 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

71 C200hv/2 C200hv/2B C 200hv/ Outlet pressure, bar 2 bar* bar* Flow, Nm 3 /h N All measurements in millimeters. Type A. Drawings of other types available on request.

72 HiQ REDLINE Cylinder regulators C 12hv/1. Single stage regulator. C 12hv/1 is a single stage cylinder regulator, especially suitable for specialty gases where demands on purity, tightness and safety are high. C 12hv/1 is suited for all low vapour pressure gases of all purities and gas mixtures, especially liquified gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. C 12hv/1 can be plain or equipped with a shut-off valve (type A), a needle valve (type B). Product name bar(a) psi(a) HiQ code C 12hv/1, brass C 12hv/1, brass C 12hv/1, stainless steel C 12hv/1, stainless steel C 12hv/1 A, brass C 12hv/1 A, brass C 12hv/1 A, stainless steel C 12hv/1 A, stainless steel C 12hv/1 B, brass C 12hv/1 B, brass C 12hv/1 B, stainless steel C 12hv/1 B, stainless steel Technical data Primary pressure 12 bar 175 psi Outlet pressure bar(a) psi(a) bar(a) 3 45 psi(a) Outlet gauge range bar psi 1 5 bar psi Max flow (nitrogen) 5.8 Nm 3 /h 84 SCFH Connection Out = NPT ¼ female Operating temperature C F Weight 1.5 kg 3.3 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

73 C12hv/1 C12hv/1A C 12hv/ Outlet pressure, bar Max flow Flow, Nm 3 /h N All measurements in millimeters. Type A. Drawings of other types available on request.

74 The right HiQ REDLINE choice Gas name Chemical formula Gas panels Points of use S200 S201 S202 S203 D204 A208 A209 W40 B40 L40 I40X Acetylene C 2 H 2 3) Air, synthetic Ammonia NH 3 5) Argon Ar Arsine AsH 3 Boron trichloride BCl 3 Boron trifluoride BF 3 1,3-Butadiene C 4 H 6 n-butane C 4 H 10 iso-butane C 4 H 10 1-Butene C 4 H 8 cis-2-butene C 4 H 8 trans-2-butene C 4 H 8 iso-butene C 4 H 8 Carbon dioxide CO 2 Carbon monoxide CO Carbonyl sulfide COS Chlorine Cl 2 Chlorine trifluoride ClF 3 Cyanogen CNCN Cyanogen chloride CNCl Cyclopropane C 3 H 6 Deuterium D 2 Diborane B 2 H 6 Dichlorosilane SiH 2 Cl 2 Dimethylamine (CH 3 ) 2 NH Dimethyl ether C 2 H 6 O 2,2-Dimethylpropane C 5 H 12 Ethane C 2 H 6 Ethene C 2 H 4 Ethylamine C 2 H 5 NH 2 Ethyl chloride C 2 H 5 Cl Ethylene oxide C 2 H 4 O Fluorine 6) F 2 Germane GeH 4

75 Cylinder regulators PoU Typical filling pressure at C200/1 C200/2 1) C200hv/2 C12hv1 Valve 2) 15 C [bar] Typical filling pressure at 70 F [psig] Safety Material recommendation Gas name F+ Brass 4) Acetylene 200 2,400 Brass Air, synthetic 5) 5) T, C, N SS Ammonia 150/200 2,640 A Brass Argon F+, T+, N SS Arsine T+, C SS Boron trichloride 60 1,600 T+, C SS Boron trifluoride 2 22 F+, Carc2, Muta2 Brass 1,3-Butadiene F+ Brass n-butane F+ Brass iso-butane F+ Brass 1-Butene F+ Brass cis-2-butene F+ Brass trans-2-butene F+ Brass iso-butene A Brass Carbon dioxide 100/150/200 1,660/2,000 F+, T,Tera1 Brass Carbon monoxide F+, T SS Carbonyl sulfide T, Xi, N SS Chlorine C+, N SS Chlorine trifluoride 5 55 F+, T+ SS Cyanogen T+ SS Cyanogen chloride 6 68 F+ Brass Cyclopropane 100 1,740 F+ Brass Deuterium F+, T+ SS Diborane F+, T,C SS Dichlorosilane F+, Xn, Xi SS Dimethylamine F+ Brass Dimethyl ether F+ Brass 2,2-Dimethylpropane F+ Brass Ethane 76 1,200 F+ Brass Ethene F+, Xi SS Ethylamine F+ SS Ethyl chloride F+,T,Xi, Muta2,Carc2 SS Ethylene oxide T+, C SS Fluorine 6) F+, T+ Brass Germane

76 The right HiQ REDLINE choice Gas name Chemical formula Gas panels Points of use S200 S201 S202 S203 D204 A208 A209 W40 B40 L40 I40X Helium He Hydrogen H 2 Hydrogen bromide HBr Hydrogen chloride HCl Hydrogen fluoride HF Hydrogen sulfide H 2 S Krypton Kr Methane CH 4 Methylamine CH 3 NH 2 Methyl bromide CH 3 Br Methyl chloride CH 3 Cl Methyl fluoride CH 3 F Methyl mercaptan CH 3 SH Natural gas n.a. Neon Ne Nitric oxide NO Nitrogen N 2 Nitrogen dioxide NO 2 Nitrogen trifluoride NF 3 Nitrous oxide N 2 O Octafluoropropane C 3 F 8 Oxygen O 2 Phosgene COCl 2 Phosphine PH 3 Propane C 3 H 8 Propene C 3 H 6 Propyne C 3 H 4 R 11 Trichlorofluoromethane CFCl 3 R 12 Dichlorodifluoromethane CF 2 Cl 2 R 13 Chlorotrifluoromethane CF 3 Cl R 13 b1 Bromotrifluoromethane CF 3 Br R 14 Tetrafluoromethane CF 4 R 21 Dichlorofluoromethane CHFCl 2 R 22 Chlorodifluoromethane CHF 2 Cl R 23 Trifluoromethane CHF 3

77 Cylinder regulators PoU Typical filling pressure at C200/1 C200/2 1) C200hv/2 C12hv1 Valve 2) 15 C [bar] Typical filling pressure at 70 F [psig] Safety Material recommendation Gas name 200 2,640 A Brass Helium 100/200 2,000/2,400 F+ Brass Hydrogen C SS Hydrogen bromide T, C SS Hydrogen chloride T+,C SS Hydrogen fluoride F+,T+,N SS Hydrogen sulfide 130 1,900 A Brass Krypton 100/150/200 2,000/2,400 F+ Brass Methane F+, Xn, Xi SS Methylamine T, Xi,N SS Methyl bromide F+, Carc3, Xn SS Methyl chloride F+ Brass Methyl fluoride F+, T+ SS Methyl mercaptan ,309 F+ Brass Natural gas 100/200 2,000/2,400 A Brass Neon 30/ T+,C SS Nitric oxide 150/200 2,000/2,640 A Brass Nitrogen T+,C SS Nitrogen dioxide 19 1,450 O, Xn SS Nitrogen trifluoride O Brass Nitrous oxide A Brass Octafluoropropane 150/200 2,000/2,640 O Brass Oxygen T+ SS Phosgene F+, T+ SS Phosphine F+ Brass Propane F+ Brass Propene F+ Brass Propyne N Brass R 11 Trichlorofluoromethane N Brass R 12 Dichlorodifluoromethane N Brass R 13 Chlorotrifluoromethane N Brass R 13 b1 Bromotrifluoromethane 127 2,000 A Brass R 14 Tetrafluoromethane N Brass R 21 Dichlorofluoromethane N Brass R 22 Chlorodifluoromethane A Brass R 23 Trifluoromethane

78 The right HiQ REDLINE choice Gas name Chemical formula Gas panels Points of use S200 S201 S202 S203 D204 A208 A209 W40 B40 L40 I40X R 32 Difluoromethane CH 2 F 2 R114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F 4 R115 Chloropentafluoroethane C 2 ClF 5 R116 Hexafluoroethane C 2 F 6 R142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF 2 R152a 1,1-Difluoroethane C 2 H 4 F 2 Silane SiH 4 Silicon tetrafluoride SiF 4 Sulphur dioxide SO 2 Sulphur hexafluoride SF 6 Trimethylamine (CH 3 ) 3 N Tungsten hexafluoride WF 6 Vinyl bromide Vinyl chloride Vinyl methyl ether C 2 H 3 Br C 2 H 3 Cl C 3 H 6 O Xenon Xe Footnotes 1. Min. 7 bar primary pressure 2. Max. 50 bar primary pressure 3. W40 B Ac 4. Brass with <65% copper 5. Ammonia relief valve 6. Mixtures <10% F 2 Safety A = Asphyxiant C = Corrosive Carc1/2/3 = Carcinogenic category 1 3 F = Flammable F+ = Extremely flammable Muta1/2/3 = Mutagenic category 1 3 N = Environmentally harmful O = Oxidizing T = Toxic T+ = Very toxic Tera1/2/3 = Teratogenic category 1 3 Xn = Harmful Xi = Irritating Note! For toxic, harmful/irritating or flammable gas, Linde recommends that the ventilation line shall end at a safe place outside the building or that it is connected to separate ventilation. Note! Gas panels aimed for flammable use shall have a non-return valve before the regulator. Note! Halocarbons damage the ozone layer of the atmosphere. Hence the use of halocarbons is restricted and in some cases prohibited by local legislation. If a halocarbon can be substituted with an environmentally less harmful substance, this shall be done. 4 = Standard equipment, all other requirements are special, please contact your local supplier.

79 Cylinder regulators PoU Typical filling pressure at C200/1 C200/2 1) C200hv/2 C12hv1 Valve 2) 15 C [bar] Typical filling pressure at 70 F [psig] Safety Material recommendation Gas name F+ Brass R 32 Difluoromethane N Brass R114 1,2-Dichlorotetrafluorethane N Brass R115 Chloropentafluoroethane A Brass R116 Hexafluoroethane F+,N Brass R142b 1-Chloro-1,1-difluoroethane F+ Brass R152a 1,1-Difluoroethane ,205 F+ SS Silane 69 1,000 T, C SS Silicon tetrafluoride T,C SS Sulfur dioxide A Brass Sulfur hexafluoride F+, Xn, Xi SS Trimethylamine T SS Tungsten hexafluoride 1 6 F+,Carc1 SS Vinyl bromide F+,Carc1 SS Vinyl chloride F+ Brass Vinyl methyl ether A Brass Xenon

80

81 CleanLine. Points of use 6.0. CleanLine is a series of points of use equipment and components for purities up to 6.0 ( % pure). Features: Unique design by Christian Bjørn (the famous Danish designer) Combined pressure regulator, shut-off and flow regulating valves Space saving design Easy and quick to mount Easy-grip handle Full metallic diaphragms in shut-off valve, pressure regulator and flow regulating valve Built-in manometer with bar/psi scale

82 CleanLine Points of use P 25. Panel mounting. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for panel mounting. There are six different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code P 25 s n.a. n.a P 25 f n.a. n.a P 25 r bar 0 25 psi 5775 P 25 r 0 4 bar 0 60 psi 5776 P 25 r 0 10 bar psi 5777 P 25 sr bar 0 25 psi 5778 P 25 sr 0 4 bar 0 60 psi 5779 P 25 sr 0 10 bar psi 5780 P 25 rf bar 0 25 psi 5781 P 25 rf 0 4 bar 0 60 psi 5782 P 25 rf 0 10 bar psi 5783 P 25 srf bar 0 25 psi 5784 P 25 srf 0 4 bar 0 60 psi 5785 P 25 srf 0 10 bar psi 5786 Product name Model Outlet code CL-S, brass CleanLine straight outlet,npt ¼ female 554 CL-S, stainless steel CleanLine straight outlet,npt ¼ female 555 CL-45, brass CleanLine 45 outlet,npt ¼ female 556 CL-45, stainless steel CleanLine 45 outlet,npt ¼ female 557 Technical data Max primary pressure 25 bar 360 psi Secondary pressure bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar psi Pressure gauge scale bar psi 1 6 bar psi 1 12 bar psi Operating temperature C F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE

83 P 25 srf Typical flow curve for type srf Outlet pressure [bar] Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar CleanLine outlets 1/4" NPT 1/2" NPSM 1/4" NPT 1/2" NPT 33 1/2" NPSM 1/4" NPT 1/2" NPT 1/4" NPT Design P srf Flow valve Stop valve Max 16 Type Dimensions [mm] B C D sr srf r rf D B C 79 Pressure regulator Panel All measurements in millimeters. Drawings of type s and f available on request.

84 CleanLine Points of use I 25. Inset design. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for wall mounting with built-in pipework. Model I 25X is equipped with internal inlet and external outlet. There are eight different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code I 25 s n.a. n.a I 25 f n.a. n.a I 25 r bar 0 25 psi 5789 I 25 r 0 4 bar 0 60 psi 5790 I 25 r 0 10 bar psi 5791 I 25 sr bar 0 25 psi 5792 I 25 sr 0 4 bar 0 60 psi 5793 I 25 sr 0 10 bar psi 5794 I 25 rf bar 0 25 psi 5795 I 25 rf 0 4 bar 0 60 psi 5796 I 25 rf 0 10 bar psi 5797 I 25 srf bar 0 25 psi 5798 I 25 srf 0 4 bar 0 60 psi 5799 I 25 srf 0 10 bar psi 5800 I 25X rf bar 0 25 psi 5801 I 25X rf 0 4 bar 0 60 psi 5802 I 25X rf 0 10 bar psi 5803 I 25X srf bar 0 25 psi 5804 I 25X srf 0 4 bar 0 60 psi 5805 I 25X srf 0 10 bar psi 5806 Technical data Max primary pressure 25 bar 360 psi Secondary pressure bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar psi Pressure gauge scale bar psi 1 6 bar psi 1 12 bar psi Operating temperature C F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE Product name Model Outlet code CL-S, brass CleanLine straight outlet,npt ¼ female 554 CL-S, stainless steel CleanLine straight outlet,npt ¼ female 555 CL-45, brass CleanLine 45 outlet,npt ¼ female 556 CL-45, stainless steel CleanLine 45 outlet,npt ¼ female 557

85 79 I 25 srf Typical flow curve for type srf Outlet pressure [bar] Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar CleanLine outlets 1/4" NPT 1/2" NPSM 1/4" NPT 1/2" NPT 33 Design I srf Max 52 Flow valve Stop valve OUT Ø52 *Ø20 Ø65 1/2" NPSM 1/4" NPT 1/2" NPT 1/4" NPT *Ø 21 *27 Panel IN Pressure regulator *Max dimensions of the tube fittings All measurements in millimeters. Other drawings available on request.

86 CleanLine Points of use W 25. Wall mounting. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for wall mounting with exposed pipework. There are six different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code W 25 s n.a. n.a W 25 f n.a. n.a W 25 r bar 0 25 psi 5809 W 25 r 0 4 bar 0 60 psi 5810 W 25 r 0 10 bar psi 5811 W 25 sr bar 0 25 psi 5812 W 25 sr 0 4 bar 0 60 psi 5813 W 25 sr 0 10 bar psi 5814 W 25 rf bar 0 25 psi 5815 W 25 rf 0 4 bar 0 60 psi 5816 W 25 rf 0 10 bar psi 5817 W 25 srf bar 0 25 psi 5818 W 25 srf 0 4 bar 0 60 psi 5819 W 25 srf 0 10 bar psi 5820 Technical data Max primary pressure 25 bar 360 psi Secondary pressure bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar psi Pressure gauge scale bar psi 1 6 bar psi 1 12 bar psi Operating temperature C F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE

87 W 25 srf Typical flow curve for type srf. Outlet pressure [bar] Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar Design W srf E Flow valve Stop valve Wall Type Dimensions [mm] B C D E sr srf r rf Ø 52 D B C 79 Pressure regulator 33 All measurements in millimeters. Drawings of type s and f available on request.

88 CleanLine Points of use B 25. Bench/suspended mounting. The point of use is especially developed for specialty gases with high demands of purity, tightness and safety. The point of use is intended for mounting on a bench or in the ceiling. There are six different models available where s stands for shut-off valve, r for pressure regulator and f for flow regulating valve. Product name bar psi HiQ code B 25 s n.a. n.a B 25 f n.a. n.a B 25 r bar 0 25 psi 5823 B 25 r 0 4 bar 0 60 psi 5824 B 25 r 0 10 bar psi 5825 B 25 sr bar 0 25 psi 5826 B 25 sr 0 4 bar 0 60 psi 5827 B 25 sr 0 10 bar psi 5828 B 25 rf bar 0 25 psi 5829 B 25 rf 0 4 bar 0 60 psi 5830 B 25 rf 0 10 bar psi 5831 B 25 srf bar 0 25 psi 5832 B 25 srf 0 4 bar 0 60 psi 5833 B 25 srf 0 10 bar psi 5834 Technical data Max primary pressure 25 bar 360 psi Secondary pressure bar 0 25 psi 0 4 bar 0 60 psi 0 10 bar psi Pressure gauge scale bar psi 1 6 bar psi 1 12 bar psi Operating temperature C F Connections NPT ¼ female Material Housing Brass (visible parts chemical Ni-plated) Diaphragms Stop valve Hastelloy Regulator Elgiloy Flow valve Haynes Seating PTFE

89 B 25 srf Typical flow curve for type srf. Outlet pressure [bar] Flow rate [l/min] Gas: Air Inlet pressure 20 bar Outlet pressure 10 bar Design B srf Ceiling A Ø52 Max. 32 Type Dimensions [mm] A B C D sr srf r rf Flow valve Pressure regulator Stop valve D Table B C 4 Ø22 Max. 32 All measurements in millimeters. Other drawings available on request.

90

91 Quick Connect. Points of use and outlets 5.0. Quick Connect offers a set of point of use equipment that combines flexibility with high quality and safety. Advantages for the end user: Flexible and compact design increases size of working area. Reduces downtime. Innovative and compact design. Combined flow valve and Quick Connect. Key system protects against undesired mix of media, 11 keys are available. Clear media indication. Possibility of attaching additional equipment: flow meters, pressure regulators, etc. Non return valve in outlets protects against contamination of equipment. Valve locked with no plug inserted. Gasket that seals between outlet and Quick Connect, replaceable without disassembling the Quick Connect. Advantages for the architect & furniture producer: Increased flexibility in laboratory design. Last minute determination of media possible. Number of fittings can be reduced due to the flexibility of the Quick Connect. Advantages for the fitter: Simple and rational installation. 6 different methods of installation. Last minute change of media possible (Prior to start of use). Possibility to install additional Quick Connect in the laboratory, using a model for exposed piping. Technical data Max primary pressure 10 bar 145 psi Connections NPT ¼ female Operating temperature C F Material External Nickel plated brass, Stainless steel, EPDM rubber Media wetted parts Stainless steel, brass, PVDF Seals Viton Quick Connect equipment and accessories are delivered with labeling for different media according to standard EN13792:2002 or American recommendations. We also provide 3 versions that are not specified. Note: Equipment labeled for a specific media is delivered with a unique connection key to avoid undesired mix. When the option Not specified or customer specified labeling is desired, please contact your local Linde representative for further information. Standard Media Air Vacuum Oxygen Nitrogen Carbon dioxide Hydrogen Argon Helium Not specified Not specified Not specified EN13792:2002 American recommendation

92 Quick Connect Points of use. Connection points. Quick Connect connection points are delivered in four different versions: inset design (I), panel mounted with concealed piping (BE) and panel mounted with exposed piping (SE). For bench mounted/suspended mounting (B) see next spread. The wall bracket (WB) is intended for use with the SE models when front side mounting is desired of the Quick Connect connection points. For technical data see page 89. Media labeling according to standard EN13792:2002 Product name Media HiQ code QC W I air 5835 QC W I vacuum 5836 QC W I oxygen 5837 QC W I nitrogen 5838 QC W I carbon dioxide 5839 QC W I hydrogen 5840 QC W I argon 5841 QC W I helium 5842 QC W I not specified 5843 QC W I not specified 5844 QC W I not specified 5845 QC W BE air 5846 QC W BE vacuum 5847 QC W BE oxygen 5848 QC W BE nitrogen 5849 QC W BE carbon dioxide 5850 QC W BE hydrogen 5851 QC W BE argon 5852 QC W BE helium 5853 QC W BE not specified 5854 QC W BE not specified 5855 QC W BE not specified 5856 QC W SE air 5857 QC W SE vacuum 5858 QC W SE oxygen 5859 QC W SE nitrogen 5860 QC W SE carbon dioxide 5861 QC W SE hydrogen 5862 QC W SE argon 5863 QC W SE helium 5864 QC W SE not specified 5865 QC W SE not specified 5866 QC W SE not specified 5867 QC WB (wall bracket) all media 5868 Media labeling according to American recommendations Product name Media HiQ code QC W I air 5869 QC W I vacuum 5870 QC W I oxygen 5871 QC W I nitrogen 5872 QC W I carbon dioxide 5873 QC W I hydrogen 5874 QC W I argon 5875 QC W I helium 5876 QC W I not specified 5877 QC W I not specified 5878 QC W I not specified 5879 QC W BE air 5880 QC W BE vacuum 5881 QC W BE oxygen 5882 QC W BE nitrogen 5883 QC W BE carbon dioxide 5884 QC W BE hydrogen 5885 QC W BE argon 5886 QC W BE helium 5887 QC W BE not specified 5888 QC W BE not specified 5889 QC W BE not specified 5890 QC W SE air 5891 QC W SE vacuum 5892 QC W SE oxygen 5893 QC W SE nitrogen 5894 QC W SE carbon dioxide 5895 QC W SE hydrogen 5896 QC W SE argon 5897 QC W SE helium 5898 QC W SE not specified 5899 QC W SE not specified 5900 QC W SE not specified 5901 QC WB (wall bracket) all media 5868

93 Built in (QC-W I) Ø75 Ø72 Mounting hole Ø57 Panel Max 30 Ø25 Ø51 Back side mounted (QC-W BE and SE) QC-W I Center inlet (Exposed piping) Ø75 Mounting hole Outer diameter quick connect Ø52 Ø Panel Max 12 Ø25 Front side mounted (QC-W BE and SE) 12.5 Center inlet (Exposed piping) Mounting holes (Shown from the backside) 34 Outer diameter quick connect Ø º 52 Wall bracket (for QC-W SE) M3 X 0.5 Thread depth min. 6mm 29.5 Center inlet (Exposed piping) Ø23 12 Ø6 (2 Pcs.) 16 QC-W BE Ø52 Ø52 Ø20 Ø30 Wall/panel 68 All measurements in millimeters. Flow regulation curve Flow [l/min] Inlet pressure bar psi QC-W SE

94 Quick Connect Points of use. Connection points. For bench mounted or suspended mounting. Technical data see page 89. Media labeling according to standard EN13792:2002 Product name Media HiQ code QC B air 5902 QC B vacuum 5903 QC B oxygen 5904 QC B nitrogen 5905 QC B carbon dioxide 5906 QC B hydrogen 5907 QC B argon 5908 QC B helium 5909 QC B not specified 5910 QC B not specified 5911 QC B not specified 5912 Media labeling according to American recommendations Product name Media HiQ code QC B air 5913 QC B vacuum 5914 QC B oxygen 5915 QC B nitrogen 5916 QC B carbon dioxide 5917 QC B hydrogen 5918 QC B argon 5919 QC B helium 5920 QC B not specified 5921 QC B not specified 5922 QC B not specified 5923

95 Bench mounted Max Ø52 5 Ø22 QC-B Table/ceiling Mounting hole Contour Column Flow [l/min] Flow regulation curve Inlet pressure bar psi All measurements in millimeters.

96 Quick Connect Outlets. Quick Connect outlets are delivered in four different versions: 90 outlet with serrated hose nozzle (ON), 90 outlet with ¼ NPT female (OF), straight outlet with ¼ NPT male (OS) and a 1.5 m stainless steel wire braded PTFE hose. The hose is equipped with ¼ NPSM female connection in one end and ¼ NPT male in the other end (OHM). One version with ¼ NPSM female in both ends (OHF) also available. The hose plugs in to Quick Connect via the straight outlet (OS). Other lengths of hoses on request. Models ON, OF and OS includes a non-return valve. For technical data see page 89. Media labeling according to standard EN13792:2002 Product name Media Outlet code QC ON air 521 QC ON vacuum 522 QC ON oxygen 523 QC ON nitrogen 524 QC ON carbon dioxide 525 QC ON hydrogen 526 QC ON argon 527 QC ON helium 528 QC ON not specified 529 QC ON not specified 530 QC ON not specified 531 QC OF air 532 QC OF vacuum 533 QC OF oxygen 534 QC OF nitrogen 535 QC OF carbon dioxide 536 QC OF hydrogen 537 QC OF argon 538 QC OF helium 539 QC OF not specified 540 QC OF not specified 541 QC OF not specified 542 QC OS air 543 QC OS vacuum 544 QC OS oxygen 545 QC OS nitrogen 546 QC OS carbon dioxide 547 QC OS hydrogen 548 QC OS argon 549 QC OS helium 550 QC OS not specified 551 QC OS not specified 552 QC OS not specified 553 QC OHM all media 564 QC OHF all media 565 Media labeling according to American recommendations Product name Media Outlet code QC ON air 607 QC ON vacuum 608 QC ON oxygen 609 QC ON nitrogen 610 QC ON carbon dioxide 611 QC ON hydrogen 612 QC ON argon 613 QC ON helium 614 QC ON not specified 615 QC ON not specified 616 QC ON not specified 617 QC OF air 618 QC OF vacuum 619 QC OF oxygen 620 QC OF nitrogen 621 QC OF carbon dioxide 622 QC OF hydrogen 623 QC OF argon 624 QC OF helium 625 QC OF not specified 626 QC OF not specified 627 QC OF not specified 628 QC OS air 629 QC OS vacuum 630 QC OS oxygen 631 QC OS nitrogen 632 QC OS carbon dioxide 633 QC OS hydrogen 634 QC OS argon 635 QC OS helium 636 QC OS not specified 637 QC OS not specified 638 QC OS not specified 639 QC OHM all media 564 QC OHF all media 565

97 90 with serrated hose nozzle Ø Ø10 QC-ON 90 with ¼ NPT female 49 Ø22 39 QC-OF Straight outlet with ¼ NPT male 18 5 QC-OS Hose outlet with ¼ NPT male All measurements in millimeters. QC-OH

98 Quick Connect Outlets. Regulator. Quick Connect pressure regulator is used when pressure control is needed at the point of use. The Quick Connect pressure regulator is delivered in two pressure intervals and it is provided with a scale expressed in bar or psi. The regulator is delivered with a non-return valve. For other combinations than mentioned below (e.g. scale expressed in kpa or media labeling according to EN standard with scale in psi) please contact your local Linde representative. For technical data see page 89. Media labeling according to standard EN13792:2002 Product Pressure range/ Media Outlet name scale in bar code QC OR 0 5 air 566 QC OR 0 10 air 567 QC OR 0 5 oxygen 568 QC OR 0 10 oxygen 569 QC OR 0 5 nitrogen 570 QC OR 0 10 nitrogen 571 QC OR 0 5 carbon dioxide 572 QC OR 0 10 carbon dioxide 573 QC OR 0 5 hydrogen 574 QC OR 0 10 hydrogen 575 QC OR 0 5 argon 576 QC OR 0 10 argon 577 QC OR 0 5 helium 578 QC OR 0 10 helium 579 QC OR 0 5 not specified 580 QC OR 0 10 not specified 581 QC OR 0 5 not specified 582 QC OR 0 10 not specified 583 QC OR 0 5 not specified 584 QC OR 0 10 not specified 585 Media labeling according to American recommendations Product Pressure range/ Media Outlet name scale in psi code QC OR 0 75 air 652 QC OR air 653 QC OR 0 75 oxygen 654 QC OR oxygen 655 QC OR 0 75 nitrogen 656 QC OR nitrogen 657 QC OR 0 75 carbon dioxide 658 QC OR carbon dioxide 659 QC OR 0 75 hydrogen 660 QC OR hydrogen 661 QC OR 0 75 argon 662 QC OR argon 663 QC OR 0 75 helium 664 QC OR helium 665 QC OR 0 75 not specified 666 QC OR not specified 667 QC OR 0 75 not specified 668 QC OR not specified 669 QC OR 0 75 not specified 670 QC OR not specified 671

99 QC-OR Ø42 48 Ø39 40 All measurements in millimeters.

100 Quick Connect Outlets. Flow meter. Quick Connect flow meter is used when indication of flow is needed at the point of use. The Quick Connect flow meter is delivered in three flow intervals and is provided with a scale expressed in l/min. The flow meter is delivered with a non-return valve. For other media than mentioned below please contact your local Linde representative. For technical data see page 89. Media labeling according to standard EN13792:2002 Product Flow range, Media Outlet name l/min code QC OFM 0 6 air 586 QC OFM 0 15 air 587 QC OFM 0 30 air 588 QC OFM 0 6 oxygen 589 QC OFM 0 15 oxygen 590 QC OFM 0 30 oxygen 591 QC OFM 0 6 nitrogen 592 QC OFM 0 15 nitrogen 593 QC OFM 0 30 nitrogen 594 QC OFM 0 6 carbon dioxide 595 QC OFM 0 15 carbon dioxide 596 QC OFM 0 30 carbon dioxide 597 QC OFM 0 6 hydrogen 598 QC OFM 0 15 hydrogen 599 QC OFM 0 30 hydrogen 600 QC OFM 0 6 argon 601 QC OFM 0 15 argon 602 QC OFM 0 30 argon 603 QC OFM 0 6 helium 604 QC OFM 0 15 helium 605 QC OFM 0 30 helium 606 Media labeling according to American recommendations Product Flow range, Media Outlet name l/min code QC OFM 0 6 air 672 QC OFM 0 15 air 673 QC OFM 0 30 air 674 QC OFM 0 6 oxygen 675 QC OFM 0 15 oxygen 676 QC OFM 0 30 oxygen 677 QC OFM 0 6 nitrogen 678 QC OFM 0 15 nitrogen 679 QC OFM 0 30 nitrogen 680 QC OFM 0 6 carbon dioxide 681 QC OFM 0 15 carbon dioxide 682 QC OFM 0 30 carbon dioxide 683 QC OFM 0 6 hydrogen 684 QC OFM 0 15 hydrogen 685 QC OFM 0 30 hydrogen 686 QC OFM 0 6 argon 687 QC OFM 0 15 argon 688 QC OFM 0 30 argon 689 QC OFM 0 6 helium 690 QC OFM 0 15 helium 691 QC OFM 0 30 helium 692

101 QC-OFM 130 Ø29 77 Ø30 Ø25 Ø All measurements in millimeters.

102

103 BASELINE. Cylinder regulators 5.0 Regulators are used to reduce the high pressure in the gas cylinder to a more manageable pressure in the simplest of gas delivery systems. The cylinder regulator is equipped with a cylinder connection, a high pressure gauge to monitor the content of the cylinder and a low pressure gauge to monitor the adjustable secondary pressure. If there is a need for flow adjustments the cylinder regulator is equipped with a needle valve, otherwise it is equipped with a shut-off valve. BASELINE cylinder regulators are the entry point into the world of specialty gas equipment. They are meant for more stable operation than industrial equipment can provide, at a competitive price. Typical applications are gas and liquid chromatography, carrier gases, zero and span calibration gases, high purity chamber pressurization, liquified hydrocarbon gas control and control of cryogenic gases.

104 BASELINE C 106/1. Six-port single stage cylinder regulator. The C 106/1 cylinder regulators are intended for primary pressure control of noncorrosive, high purity or liquefied gases or for applications where minor fluctuations in outlet pressure due to diminishing inlet supply can be tolerated. For ultra high purity or corrosive gases use the stainless steel version. C 106/1 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi Outlet code C 106/1, brass C 106/1, brass C 106/1, brass C 106/1, brass C 106/1, brass C 106/1, brass C 106/1, stainless steel C 106/1, stainless steel C 106/1, stainless steel C 106/1, stainless steel C 106/1, stainless steel C 106/1, stainless steel C 106/1 A, brass C 106/1 A, brass C 106/1 A, brass C 106/1 A, brass C 106/1 A, brass C 106/1 A, brass C 106/1 A, stainless steel C 106/1 A, stainless steel C 106/1 A, stainless steel C 106/1 A, stainless steel C 106/1 A, stainless steel C 106/1 A, stainless steel C 106/1 B, brass C 106/1 B, brass C 106/1 B, brass C 106/1 B, brass C 106/1 B, brass C 106/1 B, brass C 106/1 B, stainless steel C 106/1 B, stainless steel C 106/1 B, stainless steel C 106/1 B, stainless steel C 106/1 B, stainless steel C 106/1 B, stainless steel Technical data Max primary pressure 210 bar 3,000 psi Outlet pressure 0 1 bar 0 15 psi bar 0 50 psi 0 7 bar psi bar psi 0 17 bar psi 0 35 bar psi Outlet gauge range 2 2 bar psi 2 7 bar psi 2 14 bar psi 0 28 bar psi 0 70 bar 0 1,000 psi Connection Out = NPT ¼ female Operating temperature C F Weight 1.4 kg 3.1 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PTFE

105 ??? C 106/1B C 106/1 single stage regulator 100 (6.9) 90 (6.2) 80 (5.5) 2000 PSIG (138 BAR) INLET PRESSURE 70 (4.8) 500 PSIG (35 BAR) INLET PRESSURE 60 (4.1) 200 PSIG (13.8 BAR) INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 50 (3.4) 40 (2.8) 30 (2.0) 20 (1.4) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) 2000 PSIG (138 BAR) INLET PRESSURE INLET PRESSURE 10 (0.7) 200 PSIG (13.8 BAR) INLET PRESSURE 5 (142) 500 PSIG (35 BAR) INLET PRESSURE 10 (283) 2000 PSIG (138 BAR) INLET PRESSURE 15 (425) 20 (566) 500 (34.5) 450 (31) 2000 PSIG (138 BAR) INLET PRESSURE 400 (27.6) 1000 PSIG (138 BAR) INLET PRESSURE 350 (24.1) 300 (20.7) OUTLET PRESSURE - PSIG (BAR) 250 (17.2) 200 (13.8) 150 (10.3) 100 (6.9) 50 (3.4) 500 PSIG (35 BAR) INLET PRESSURE 500 PSIG (35 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE OUTLE T G AUG E OUTLET AUX. OUTLE T??????????? 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø 44 Ø 50 Ø 53 5 (142) 10 (283) 15 (425) 20 (566) 25 (708) FLOW RATE SCFM (LPM) N 2 30 (850) 35 (991) 40 (1133) All measurements in millimeters. Drawings of other types available on request.

106 BASELINE C 106X/1. Six-port single stage extra high pressure cylinder regulator. The C 106X/1 high pressure cylinder regulators are intended for primary pressure control of noncorrosive, high purity or liquefied gases or for applications where minor fluctuations in outlet pressure due to diminishing inlet supply can be tolerated. For ultra high purity or corrosive gases use the stainless steel version. C 106X/1 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code C 106X/1, brass C 106X/1, brass C 106X/1, brass C 106X/1, brass C 106X/1, brass C 106X/1, stainless steel C 106X/1, stainless steel C 106X/1, stainless steel C 106X/1, stainless steel C 106X/1, stainless steel C 106X/1 A, brass C 106X/1 A, brass C 106X/1 A, brass C 106X/1 A, brass C 106X/1 A, brass C 106X/1 A, stainless steel C 106X/1 A, stainless steel C 106X/1 A, stainless steel C 106X/1 A, stainless steel C 106X/1 A, stainless steel C 106X/1 B, brass C 106X/1 B, brass C 106X/1 B, brass C 106X/1 B, brass C 106X/1 B, brass C 106X/1 B, stainless steel C 106X/1 B, stainless steel C 106X/1 B, stainless steel C 106X/1 B, stainless steel C 106X/1 B, stainless steel Technical data Max primary pressure 310 bar 4,500 psi Outlet pressure bar 0 50 psi 0 7 bar psi bar psi 0 17 bar psi 0 35 bar psi Outlet gauge range 2 7 bar psi 2 14 bar psi 0 28 bar psi 0 70 bar 0 1,000 psi Connection Out = NPT ¼ female Operating temperature C F Weight 1.4 kg 3.1 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PCTFE

107 ??? C 106X/1B C 106/1 single stage regulator 100 (6.9) 90 (6.2) 80 (5.5) 2000 PSIG (138 BAR) INLET PRESSURE 70 (4.8) 500 PSIG (35 BAR) INLET PRESSURE 60 (4.1) 200 PSIG (13.8 BAR) INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 50 (3.4) 40 (2.8) 30 (2.0) 20 (1.4) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) 2000 PSIG (138 BAR) INLET PRESSURE INLET PRESSURE 10 (0.7) 200 PSIG (13.8 BAR) INLET PRESSURE 5 (142) 500 PSIG (35 BAR) INLET PRESSURE 10 (283) 2000 PSIG (138 BAR) INLET PRESSURE 15 (425) 20 (566) 500 (34.5) 450 (31) 2000 PSIG (138 BAR) INLET PRESSURE 400 (27.6) 1000 PSIG (138 BAR) INLET PRESSURE 350 (24.1) 300 (20.7) OUTLET PRESSURE - PSIG (BAR) 250 (17.2) 200 (13.8) 150 (10.3) 100 (6.9) 50 (3.4) 500 PSIG (35 BAR) INLET PRESSURE 500 PSIG (35 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE OUTLE T G AUG E OUTLET AUX. OUTLE T??????????? 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø 44 Ø 50 Ø 53 5 (142) 10 (283) 15 (425) 20 (566) 25 (708) FLOW RATE SCFM (LPM) N 2 30 (850) 35 (991) 40 (1133) All measurements in millimeters. Drawings of other types available on request.

108 BASELINE C 106/2. Six-port two stage cylinder regulator. The C 106/2 cylinder regulators are are intended for primary pressure control of noncorrosive, high purity or liquefied gases for applications requiring constant pressure control and delivery regardless of supply pressure variations. For ultra high purity or corrosive gases use the stainless steel version. C 106/2 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code C 106/2, brass C 106/2, brass C 106/2, brass C 106/2, brass C 106/2, brass C 106/2, stainless steel C 106/2, stainless steel C 106/2, stainless steel C 106/2, stainless steel C 106/2, stainless steel C 106/2 A, brass C 106/2 A, brass C 106/2 A, brass C 106/2 A, brass C 106/2 A, brass C 106/2 A, stainless steel C 106/2 A, stainless steel C 106/2 A, stainless steel C 106/2 A, stainless steel C 106/2 A, stainless steel C 106/2 B, brass C 106/2 B, brass C 106/2 B, brass C 106/2 B, brass C 106/2 B, brass C 106/2 B, stainless steel C 106/2 B, stainless steel C 106/2 B, stainless steel C 106/2 B, stainless steel C 106/2 B, stainless steel Technical data Max primary pressure 210 bar 3,000 psi Outlet pressure 0 1 bar 0 15 psi bar 0 50 psi 0 7 bar psi bar psi 0 17 bar psi Outlet gauge range 2 2 bar psi 2 7 bar psi 2 14 bar psi 0 28 bar psi Connection Out = NPT ¼ female Operating temperature C F Weight 2 kg 4.4 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PTFE

109 ?????????????? C 106/2B C 106/2 dual stage regulator 20 (1.38) 18 (1.24) 16 (1.1) 14 (.97) OUTLET PRESSURE - PSIG (BAR) 12 (.83) 10 (.69) 8 (.55) 6 (.41) 2000 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 4 (.27) 2 (.13) 1 (28.3) 2 (56.6) FLO W - SCFM (LPM ) 3 (85) 4 (113) 250 (17.2) 225 (15.5) 2000 PSIG INLET PRESSURE 200 (13.8) 500 PSIG INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 175 (12.0) 150 (10.3) 125 (8.6) 100 (6.9) 75 (5.2) 2000 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 2000 PSIG INLET PRESSURE O UT L E T G AUG E OUTLET AUX. 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø Ø Ø (3.4) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE (1.7) 5 (142) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 10 (283) FLO W - SCFM (LPM) 15 (425) 2000 PSIG INLET PRESSURE 20 (566) All measurements in millimeters. Drawings of other types available on request.

110 BASELINE C 106X/2. Six-port two stage extra high pressure cylinder regulator. The C 106X/2 high pressure cylinder regulators are are intended for primary pressure control of noncorrosive, high purity or liquefied gases for applications requiring constant pressure control and delivery regardless of supply pressure variations. For ultra high purity or corrosive gases use the stainless steel version. C 106X/2 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code C 106X/2, brass C 106X/2, brass C 106X/2, brass C 106X/2, brass C 106X/2, brass C 106X/2, stainless steel C 106X/2, stainless steel C 106X/2, stainless steel C 106X/2, stainless steel C 106X/2, stainless steel C 106X/2 A, brass C 106X/2 A, brass C 106X/2 A, brass C 106X/2 A, brass C 106X/2 A, brass C 106X/2 A, stainless steel C 106X/2 A, stainless steel C 106X/2 A, stainless steel C 106X/2 A, stainless steel C 106X/2 A, stainless steel C 106X/2 B, brass C 106X/2 B, brass C 106X/2 B, brass C 106X/2 B, brass C 106X/2 B, brass C 106X/2 B, stainless steel C 106X/2 B, stainless steel C 106X/2 B, stainless steel C 106X/2 B, stainless steel C 106X/2 B, stainless steel Technical data Max primary pressure 310 bar 4,500 psi Outlet pressure 0 1 bar 0 15 psi bar 0 50 psi 0 7 bar psi bar psi 0 17 bar psi Outlet gauge range 2 2 bar psi 2 7 bar psi 2 14 bar psi 0 28 bar psi Connection Out = NPT ¼ female Operating temperature C F Weight 2 kg 4.4 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PCTFE

111 ?????????????? C 106X/2B C 106/2 dual stage regulator 20 (1.38) 18 (1.24) 16 (1.1) 14 (.97) OUTLET PRESSURE - PSIG (BAR) 12 (.83) 10 (.69) 8 (.55) 6 (.41) 2000 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 4 (.27) 2 (.13) 1 (28.3) 2 (56.6) FLO W - SCFM (LPM ) 3 (85) 4 (113) 250 (17.2) 225 (15.5) 2000 PSIG INLET PRESSURE 200 (13.8) 500 PSIG INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 175 (12.0) 150 (10.3) 125 (8.6) 100 (6.9) 75 (5.2) 2000 PSIG INLET PRESSURE 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 2000 PSIG INLET PRESSURE O UT L E T G AUG E OUTLET AUX. 60 INL E T G AUG E?? AUX. INL E T 60 INLE T 60 Ø Ø Ø (3.4) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE (1.7) 5 (142) 200 PSIG INLET PRESSURE 500 PSIG INLET PRESSURE 10 (283) FLO W - SCFM (LPM) 15 (425) 2000 PSIG INLET PRESSURE 20 (566) All measurements in millimeters. Drawings of other types available on request.

112

113 Components. The integrated equipment presented so far in this catalog consists of various components. This chapter is intended for constructing central gas systems or other equipment requiring information on individual components. Though it is possible to construct gas panels and points of use from this equipment, it is neither cost efficient nor advisable due to quality problems.

114 HiQ REDLINE R 200/1. Single stage regulator. The R 200/1 is a high pressure regulator with a high flow rate capacity. The regulator is available in brass or stainless steel for the control of both corrosive and non-corrosive gases. Product name bar psi HiQ code R 200/1, brass R 200/1, stainless steel, R 200/1, brass R 200/1, stainless steel, R 200/1, brass R 200/1, stainless steel R 200/1, brass R 200/1, stainless steel R 200/1, brass , R 200/1, stainless steel , Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure bar 3 45 psi bar 8 85 psi bar psi bar psi bar 150 3,000 psi Outlet gauge range 1 5 bar psi 1 10 bar psi 0 25 bar psi 0 80 bar 0 1,150 psi bar 0 4,500 psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.1 bar, 1.5 psi. Connections NPT ¼ female Operating temperature C F Weight 1.3 kg 2.9 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

115 R 200/1 3 Outlet pressure, bar bar* 5 bar* 7 bar* Max flow * Inlet pressure Flow, Nm 3 /h N 2 R 200/ Outlet pressure, bar 5 bar* 9 bar* Max flow 13 bar* * Inlet pressure Flow, Nm 3 /h N 2 R 200/ Outlet pressure, bar 11 bar* 21 bar* Max flow 29 bar* R 200/ * Inlet pressure Flow, Nm 3 /h N 2 R 200/ Outlet pressure, bar 41 bar* 61 bar* 101 bar* 81 bar* Max flow * Inlet pressure Flow, Nm 3 /h N 2 ø50 R 200/1 200 Outlet pressure, bar bar* bar* bar* 20 Max flow * Inlet pressure Flow, Nm 3 /h N2 All measurements in millimeters.

116 HiQ REDLINE R 200/F. Single stage regulator. For the control of a broad range of specialty gases in applications where a fixed outlet pressure is required. Product name bar psi HiQ code R 200/F, brass R 200/F, stainless steel R 200/F, brass R 200/F, stainless steel Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure 3 bar 45 psi 10.5 bar 150 psi Non-adjustable Outlet gauge range 1 5 bar psi 1 16 bar psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.1 bar, 1.5 psi. Connections NPT ¼ female Operating temperature C F Weight 1.3 kg 2.9 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

117 R 200/F R 200/F 3 4 Outlet pressure, bar 3 8 bar* 2 1 Max flow * Inlet pressure Flow, Nm 3 /h N 2 ø50 R 200/F 10.5 Outlet pressure, bar bar* Max flow * Inlet pressure Flow, Nm 3 /h N 2 All measurements in millimeters.

118 HiQ REDLINE R 200/2. Two stage regulator. The R 200/2 is a high pressure regulator with the pressure reduced in two stages to fulfill the highest demands regarding stability of outlet pressure. The regulator is available in brass or stainless steel for the control of both corrosive and non-corrosive gases. Product name bar psi HiQ code R 200/2, brass R 200/2, stainless steel R 200/2, brass R 200/2, stainless steel R 200/2, brass R 200/2, stainless steel Technical data Primary pressure bar 100 3,300 psi Outlet pressure bar 3 45 psi bar 8 85 psi bar psi Outlet gauge range 1 5 bar psi 1 10 bar psi 1 16 bar psi Stability When the inlet pressure drops by 10 bar, 145 psi the outlet pressure rises by less than 0.01 bar, 0.1 psi. Connection Out = NPT ¼ female Operating temperature C F Weight 3.0 kg 6.6 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

119 R 200/2 3 Outlet pressure, bar bar* bar* 8 bar* Max flow Inlet pressure first stage, 17 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 8 bar. * Inlet pressure R 200/2 R 200/2 6 Outlet pressure, bar bar* 17 bar* 17 bar* Max flow Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure R 200/ ø Outlet pressure, bar 17 bar* 17 bar* 17 bar* Max flow 17 bar* Inlet pressure first stage, 35 bar. Flow, Nm 3 /h N 2 Outlet pressure first stage, 17 bar. * Inlet pressure All measurements in millimeters.

120 HiQ REDLINE R 200hv/2. Two stage regulator. R 200hv/2 is a two-stage regulator made especially for the high demands on purity, safety and tightness that is necessary for specialty gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. Product name bar(a) psi(a) HiQ code R 200hv/2, brass R 200hv/2, stainless steel R 200hv/2, brass R 200hv/2, stainless steel Technical data Primary pressure 230 bar 3,300 psi Outlet pressure bar(a) psi(a) bar(a) 3 45 psi(a) Outlet gauge range bar psi 1 5 bar psi Connection Out = NPT ¼ female Operating temperature C F Weight 1.9 kg 4.2 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating PCTFE

121 R 200hv/2 R 200hv/ Outlet pressure, bar 2 bar* bar* Flow, Nm 3 /h N All measurements in millimeters.

122 HiQ REDLINE R 40. Single stage regulator. Pressure regulator intended for use as a second pressure regulating step in a central gas supply system. It is especially developed for pure gases and gas mixtures. The membrane is in Hastelloy so that diffusion into the system is minimized. Modular design and three different outlet pressure ranges offer great flexibility for point of use applications. Product name bar psi HiQ code R 40, brass R 40, stainless steel R 40, brass R 40, stainless steel R 40, brass R 40, stainless steel Technical data Max primary pressure 40 bar 550 psi Outlet pressure bar psi bar 8 85 psi bar psi Outlet gauge range bar 0 40 psi 0 6 bar 0 90 psi 0 16 bar psi Connections G ⅜ female / G ¼ female Operating temperature C F Weight 0.8 kg 1.8 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating Kalrez

123 R 40 1 Outlet pressure, bar bar* bar* bar* Max flow * Inlet pressure Flow, Nm 3 /h N 2 R 40 6 R Outlet pressure, bar bar* bar* 9 bar* Max flow * Inlet pressure Flow, Nm 3 /h N 2 ~ 85 R Outlet pressure, bar ø bar* 21 bar* ø42 ~ bar* Max flow 2 ~ * Inlet pressure Flow, Nm 3 /h N 2 All measurements in millimeters.

124 HiQ REDLINE R 12. Single stage regulator. Pressure regulator intended for use as a second pressure regulating step in a central gas supply system. It is especially developed for applications where it is essential with a very stable outlet pressure. Product name bar psi HiQ code R 12, brass R 12, stainless steel R 12, brass R 12, stainless steel Technical data Max primary pressure 12 bar 175 psi Outlet pressure bar psi bar 3 45 psi Outlet gauge range 1 5 bar 0 75 psi Connections G ⅜ female / G ¼ female Operating temperature C F Weight 0.8 kg 1.8 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating Kalrez

125 R 12 R Outlet pressure, bar Max flow ~ 85 Flow, Nm 3 /h N 2 ø42 ~ 103 ø50 ~ 110 All measurements in millimeters.

126 HiQ REDLINE R 12hv/1. Single stage regulator. Pressure regulator intended for use as a second pressure regulating step in a central gas supply system. R 12hv/1 is suited for all low vapour pressure gases of all purities and gas mixtures, especially liquified gases. The regulator is designed to reduce inlet pressure to very low outlet pressures and be able to regulate low pressures very precise. The regulator also have vacuum dosing capability down to 0.1 bar abs. Product name bar(a) psi(a) HiQ code R 12hv/1, brass R 12hv/1, stainless steel R 12hv/1, brass R 12hv/1, stainless steel Technical data Max primary pressure 12 bar 175 psi Outlet pressure bar(a) psi(a) bar(a) 3 45 psi(a) Outlet gauge range 1 5 bar 0 75 psi Connections NPT ¼ female Operating temperature C F Weight 0.8 kg 1.8 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PVDF PCTFE Membrane Hastelloy Seating Kalrez

127 R 12hv/1 1 R 12hv/1 1.2 Outlet pressure, bar hysteresis open close 12 bar* * Inlet pressure Flow, Nm 3 /h N 2 ~ 85 R 12hv/ Outlet pressure, bar ø hysteresis close open 12 bar* ø42 ~ * Inlet pressure Flow, Nm 3 /h N 2 ~ 110 All measurements in millimeters.

128 BASELINE R 104/1. Four-port single stage line regulator 5.0. The R 104/1 regulators are intended for secondary pressure control of noncorrosive, high purity or liquefied gases or as point of use pressure control in high purity gas distribution systems up to purities 5.0. For high purity or corrosive gases use the stainless steel version. R 104/1 can be plain or equipped with a diaphragm valve (type A) or a needle valve (type B). Product name bar psi HiQ code R 104/1, brass R 104/1, brass R 104/1, brass R 104/1, brass R 104/1, brass R 104/1, brass R 104/1, stainless steel R 104/1, stainless steel R 104/1, stainless steel R 104/1, stainless steel R 104/1, stainless steel R 104/1, stainless steel R 104/1 A, brass R 104/1 A, brass R 104/1 A, brass R 104/1 A, brass R 104/1 A, brass R 104/1 A, brass R 104/1 A, stainless steel R 104/1 A, stainless steel R 104/1 A, stainless steel R 104/1 A, stainless steel R 104/1 A, stainless steel R 104/1 A, stainless steel R 104/1 B, brass R 104/1 B, brass R 104/1 B, brass R 104/1 B, brass R 104/1 B, brass R 104/1 B, brass R 104/1 B, stainless steel R 104/1 B, stainless steel R 104/1 B, stainless steel R 104/1 B, stainless steel R 104/1 B, stainless steel R 104/1 B, stainless steel Technical data Max primary pressure 210 bar 3,000 psi Outlet pressure 0 1 bar 0 15 psi bar 0 50 psi 0 7 bar psi bar psi 0 17 bar psi 0 35 bar psi Outlet gauge range 2 2 bar psi 2 7 bar psi 2 14 bar psi 0 28 bar psi 0 70 bar 0 1,000 psi Connection Out = NPT ¼ female Operating temperature C F Weight 0.8 kg 1.7 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PTFE Membrane Stainless steel 316L Seating PTFE

129 R 104/1 single stage regulator 100 (6.9) 90 (6.2) 80 (5.5) 2000 PSIG (138 BAR) INLET PRESSURE 70 (4.8) 60 (4.1) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) INLET PRESSURE R 104/1 OUTLET PRESSURE - PSIG (BAR) 50 (3.4) 40 (2.8) 30 (2.0) 20 (1.4) 200 PSIG (13.8 BAR) INLET PRESSURE 500 PSIG (35 BAR) 2000 PSIG (138 BAR) INLET PRESSURE INLET PRESSURE 10 (0.7) 200 PSIG (13.8 BAR) INLET PRESSURE 5 (142) 500 PSIG (35 BAR) INLET PRESSURE 10 (283) 2000 PSIG (138 BAR) INLET PRESSURE 15 (425) 20 (566) 500 (34.5) 450 (31) 2000 PSIG (138 BAR) INLET PRESSURE 400 (27.6) 1000 PSIG (138 BAR) INLET PRESSURE OUTLET PRESSURE - PSIG (BAR) 350 (24.1) 300 (20.7) 250 (17.2) 200 (13.8) 150 (10.3) 500 PSIG (35 BAR) INLET PRESSURE 2000 PSIG (138 BAR) INLET PRESSURE 90 OUTLET O U T L E T G AU G E???????????????? 90 INLE T Ø Ø Ø (6.9) 2000 PSIG (138 BAR) INLET PRESSURE AU X. INL E T (3.4) 500 PSIG (35 BAR) INLET PRESSURE 5 (142) 10 (283) 15 (425) 20 (566) 25 (708) FLOW RATE SCFM (LPM) N 2 30 (850) 35 (991) 40 (1133) All measurements in millimeters. Drawings of other types available on request.

130 HiQ REDLINE V 40. Diaphragm valve. Valve intended for use as a shut-off-valve in a central gas supply system. It is preferably used together with pressure regulator R 12 or R 40. Equipped with click-function to enhance safety. BE is back entry version and SE is side entry version. Product name bar psi HiQ code V 40 BE, brass n.a. n.a V 40 BE, stainless steel n.a. n.a V 40 SE, brass n.a. n.a V 40 SE, stainless steel n.a. n.a Technical data Max primary pressure 40 bar 550 psi Connections Design BE In = NPT ¼ female Out = NPT ⅜ male Design SE In = NPT ⅜ female Out = NPT ⅜ male Operating temperature C F Weight 0.6 kg 1.3 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PCTFE Diaphragm Hastelloy C

131 V 40 BE V 40 SE Pressure loss, bar bar* 20 bar* 50 bar* ~ 74 ø42 50 * Inlet pressure Flow, Nm 3 /h N 2 Design V 40 BE 25 ø42 ~ Design V 40 SE All measurements in millimeters.

132 HiQ REDLINE V 50. Flow valve. Diaphragm regulating valve for use in applications where a precise regulation of flow is desired. BE is back entry version and SE is side entry version. Product name bar psi HiQ code V 50 BE, brass n.a. n.a V 50 BE, stainless steel n.a. n.a V 50 SE, brass n.a. n.a V 50 SE, stainless steel n.a. n.a Technical data Max primary pressure 50 bar 700 psi Connections NPT ¼ female Operating temperature C F Weight 0.26 kg 0.57 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals Hardened stainless steel cone Diaphragm Hastelloy Elgiloy

133 V 50 BE Flow, Nm 3 /h N bar* 0.4 bar* 0.2 bar* bar* ~ * Inlet pressure Number of handle turns ø24 All measurements in millimeters.

134 HiQ REDLINE V 200. Shut-off valve. Valve intended for use as a shut-off valve in a central gas supply system. Equipped with click-function to enhance safety. Product name bar psi HiQ code V 200, brass n.a. n.a V 200, stainless steel n.a. n.a Technical data Max primary pressure 200 bar 3,000 psi Connections NPT ¼ female Operating temperature C F Weight 0.26 kg 0.57 lb Material Housing Brass, Ni/Cr plated Stainless steel 316L Seals PCTFE Diaphragm Hastelloy Elgiloy

135 V 200 Pressure loss, bar bar* 20 bar* 50 bar* bar* ~ * Inlet pressure Flow, Nm 3 /h N 2 ø24 All measurements in millimeters.

136 V Needle valve. Needle valve V 1315 is designed for minute flow control of very small flows. Wetted parts are either in stainless steel or Teflon. The brass version is designed for a max. primary pressure of 200 bar and the stainless steel version of the valve up to max. 350 bar. Product name bar psi HiQ code V 1315, brass n.a. n.a V 1315, stainless steel n.a. n.a Technical data Max primary pressure 200/350 bar 3,000/5,000 psi Connections NPT ¼ compression fitting Operating temperature C F Material Housing Brass/Stainless steel Seals Teflon Stem Stainless steel

137 V Number of valve handle turns C v 60 All measurements in millimeters.

138

139 Special equipment. From time to time the needs on the installation components may be very specific. Such demands can be unlimited scalability, handling of extremely high pressures or very small components. These products not fitting into our standardized equipment lines are found in this chapter. The compilation of products represents Linde s choice of innovative and high quality solutions of different needs. All products harmonize with our tradition of good engineering and high quality.

140 IntelliSwitch. Automatic gas management system. The fully-automatic IntelliSwitch gas switchover represents the next generation of gas management systems. The IntelliSwitch offers continuous pressure and flow control from liquid cylinder or high pressure cylinder sources that enables the end-user to select the ideal mode of supply by a simple push of a button. Proprietary software logic lowers yearly gas costs by eliminating liquid cylinder vent loss and excess residual return which makes the IntelliSwitch the perfect gas management system. IS 641 has a maximum inlet pressure of 210 bar whilst the IS 641X version has a maximum of 310 bar. The IntelliSwitch can be delivered with a number of different inlet configurations. Please contact your local Linde representative for further information. The version with internal pilot (see table below) is the standard assembly. It means that there is an internal pilot regulator that uses a very small amount of the process gas from the right bank to operate the switching mechanism. If ordered configured for external pilot, a supply of either air or nitrogen at between 4.5 to 6 bar (65 to 85 psi) must be supplied to the IntelliSwitch. There is a 1/4" bulkhead tube fitting located at the bottom of the cabinet when ordered as an external pilot. The IntelliSwitch can be delivered with a NEMA 4 enclosure (addition -N4 in the table below) designed for both indoor or outdoor use to provide a degree of protection of the internal apparatus against ingress of solid foreign objects (falling dirt and windblown dust); and to provide a degree of protection with respect to harmful effects on the equipment due to the ingress of water (rain, sleet, snow, splashing water, and hose directed water). Product name bar psi HiQ code IS 641/Internal pilot IS 641/Internal pilot IS 641/Internal pilot IS 641/External pilot IS 641/External pilot IS 641/External pilot IS 641X/Internal pilot IS 641X/Internal pilot IS 641X/Internal pilot IS 641X/External pilot IS 641X/External pilot IS 641X/External pilot IS 641-N4/Internal pilot IS 641-N4/Internal pilot IS 641-N4/Internal pilot IS 641-N4/External pilot IS 641-N4/External pilot IS 641-N4/External pilot IS 641X-N4/Internal pilot IS 641X-N4/Internal pilot IS 641X-N4/Internal pilot IS 641X-N4/External pilot IS 641X-N4/External pilot IS 641X-N4/External pilot Technical data IS 641/IS 641X Max primary pressure 210/310 bar 3,000/4,500 psi Outlet pressure 7 bar 100 psi 14 bar 200 psi 28 bar 400 psi Features Fully automatic priority assignment. Field adjustable software. On-site source selection; Liquid cylinder or high-pressure service. Low loss technology. RS 232 or 485 communication. Connections NPT ½ female Operating temperature C F Weight 30.4 kg 67 lb Material Bodies Brass barstock Housing Powder coated steel Seals Viton, Neoprene and PTFE Seating PCTFE or Viton

141 READY 230 PS I 16 B AR CRYOGENIC 350 PS I 24 B AR REPLACE GAS SOURCE RESET 500 PS I 34 B AR IN US E GAS 3000 PS I MAX. PSI BAR PWR REMOTE READY CRYOGENIC 230 PS I 350 PS I 16 B AR 24 B AR REPLACE GAS SOURCE 500 PS I 34 B AR BANK SELECT IN US E GAS 3000 PS I MAX. R EADY 230 PS I 16 B AR C RYOGENIC 350 PS I 24 BAR R EPLACE GAS S OURCE RESET 500 PS I 34 BAR IN US E G AS HIG H PRESSURE P SI BAR PWR R EMOTE R EADY 230 PS I 16 B AR C RYOGENIC R EPLACE 350 PS I 500 PS I 24 BAR 34 BAR GAS S OURCE S ELECT B ANK IN US E G AS HIG H PRESSURE IntelliSwitch IS 641 IntelliSwitch IS 641-N4 314 Outlet approx. 68 max Outlet 289 LEFT BANK DELIVERY RIGHT BANK Front cover shown open, broken away LEFT BANK DELIVERY RIGHT BANK 365 DELIVERY PRESSURE ADJUSTMENT Inlet Inlet DELIVERY PRESSURE ADJUSTMENT Inlet Inlet 81 All measurements in millimeters.

142 STABLEFLOW HCS. Hydrogen control system. The STABLEFLOW hydrogen control system continuously monitors hydrogen pressure, purity and dewpoint in the generator casing on a realtime basis, controlling impure hydrogen venting and calling for pure hydrogen injection as required. The automated control of the STABLEFLOW HCS replaces manual periodic hydrogen refill and its resulting variability from OEM specifications for hydrogen purity, pressure and dewpoint. Compliance with OEM specifications optimizes electric production efficiency and equipment life. By maintaining OEM specifications for hydrogen pressure, purity, and dewpoint, the STABLEFLOW HCS reduces windage loss and optimizes electric generating capacity. Also, it reduces air emissions and extends equipment life. Linde Gas has introduced two advanced technology systems: the HOGEN hydrogen generation system (HGS), (further information on page 176) and the STABLEFLOW hydrogen control system (HCS). Together, these systems ensure automatic and continuous measurement and feedback control of hydrogen purity and pressure for optimized generator performance. Standard features Fully automated Data logging Remote telemetry Local operator interface STABLEFLOW software control Integrated system controller Standard siting location is indors, floor mount with + 3 of level. Bottom-line benefits Hydrogen generation with the HOGEN HGS and the STABLEFLOW HCS can save substantial sums in most plants depending on their capacity. Together, these systems increase the power generating capacity while minimizing windage loss. Moreover, they ensure longer generator component life and drastically reduce handling costs. Options Linde Gas offers a wide range of options to tailor HOGEN HGS and STABLEFLOW HCS to your specific operational requirements. Please contact your local Linde Gas representative to discuss current options available to best fit your needs. Technical data Purpose STABLEFLOW hydrogen control system (HCS) precisely controls generator casing hydrogen venting in response to real-time measurements of purity and pressure. With HOGEN HGS, this system automatically purges impure hydrogen and replenishes purged gas with high purity hydrogen, optimizing generator performance. Applicability STABLEFLOW hydrogen control system is applicable to all hydrogen-cooled electric generators. Continuous measurement Dew point, hydrogen density, hydrogen pressure Inlet H 2 pressure bar psi Operating temperature 5 50 C F Communications Ethernet RJ45 H 2 inlet/outlet connection ¼ compression fitting Control cabinet purge gas Instrument air, ¼ compression fitting Dimensions (W/D/H) 99/59/208 cm 39/23/82 Weight 170 kg 375 lbs Electrical specifications VAC, 5 A single phase, 50/60 Hz Dew point sensor Dew point range C 0.5 ppmv min. Accuracy + 3 C (or better) ppmv Repeatability C (or better) ppmv Response time < 10 sec. for 63% step change in moisture content (wet-up or dry-down cycle) H 2 purity monitor Measurement techn. Vibrating element Response time < 10 sec. Linearity (+ 1% of set range) Repeatability Long term stability /month Pressure transducer Operating pressure 0 7 bar psi Operating temperature C F Accuracy %, full scale

143 Schematic setup of HOGEN HGS and STABLEFLOW HCS at a power plant. STABLEFLOW HCS, Hydrogen Control System.

144 C 490/1. Six-port single stage ultra high pressure cylinder regulator. The C 490/1 ultra high pressure piston sensed regulators are intended for primary pressure control of noncorrosive gases at a maximum inlet pressure of 420 bar (6,000 psi). C 490/1 can be plain or equipped with a needle valve (type B). The C 490/1 cylinder regulators are commonly used for airplane strut charging and aerospace hydraulic systems. Other areas of usage is chemical & pharmaceutical manufacturing and research & development laboratories. Product name bar psi HiQ code C 490/1, brass C 490/1, brass , C 490/1, brass , C 490/1, brass , C 490/1, brass , C 490/1, brass , C 490/1, stainless steel C 490/1, stainless steel , C 490/1, stainless steel , C 490/1, stainless steel , C 490/1, stainless steel , C 490/1, stainless steel , C 490/1 B, brass C 490/1 B, brass , C 490/1 B, brass , C 490/1 B, brass , C 490/1 B, brass , C 490/1 B, brass , C 490/1 B, stainless steel C 490/1 B, stainless steel , C 490/1 B, stainless steel , C 490/1 B, stainless steel , C 490/1 B, stainless steel , C 490/1 B, stainless steel , Technical data Max primary pressure 420 bar 6,000 psi Outlet pressure 0 50 bar psi bar 0 1,500 psi bar 0 2,500 psi bar 0 3,500 psi bar 0 4,500 psi bar 0 6,000 psi Outlet gauge range 0 70 bar 0 1,000 psi bar 0 4,000 psi bar 0 6,000 psi bar 0 10,000 psi Connection Out = NPT ¼ female Operating temperature C F Weight 2.5 kg 5.6 lb Material Housing Brass, Cr plated Stainless steel 316L Seals Viton Membrane Stainless steel 316L Seating Arlon

145 C 490/1 C 490/1 single stage regulator Ø 63.5 Ø 53 All measurements in millimeters. Drawings of other types available on request.

146 R 480/1. Single stage high flow regulator for corrosive gases. The R 480/1 regulators are intended for primary pressure control of corrosive gases at high flow levels. The regulator has an internally springless and threadless design and positive shut-off seal, tied diaphragm design with positionable captured vent bonnet. Other advantages are: Excellent leak integrity (created by metal to metal diaphragm to body seal) and smooth unobstructed flow path that allows for complete purging. For other options than mentioned below please contact your local Linde representative. Product name bar psi HiQ code R 480/1, stainless steel R 480/1, stainless steel R 480/1, stainless steel R 480/1, stainless steel R 480/1, Hastelloy R 480/1, Hastelloy R 480/1, Hastelloy R 480/1, Hastelloy Technical data Max primary pressure 240 bar 3,500 psi Outlet pressure 0 2 bar 0 30 psi 0 4 bar 0 60 psi 0 7 bar psi 0 10 bar psi Inboard leak rate <10 9 atm cc/sec He Connection Welded tube stubbs Operating temperature C F Weight 1.5 kg 3.2 lb Material Housing Stainless steel 316L/Hastelloy Seals Stainless steel 316L/Hastelloy Diaphragm Stainless steel 316L/Hastelloy Seating Vespel

147 R 480/1 58 Outlet pressure PSIG (kg/cm 2 ) 80 (5.6) 70 (4.9) 60 (4.2) 50 (3.5) 40 (2.8) 30 (2.1) 20 (1.4) 10 (.7) 0 2 (57) 4 (113) 6 (168) 8 (226) 10 (283) 12 (340) 14 (396) 16 (453) 18 (509) 20 (566) ~ OUTLET 60 INLET Inlet pressure = 100 PSIG Flow capacity C v = 0.5 Flow rate SCFM (LPM) N 2 69 All measurements in millimeters.

148 C 421/1. Single stage low flow cylinder regulator. The C 421/1 low flow cylinder regulator is especially suitable for situations where a very high control accuracy is needed at low flows. It can be used with gases and gas mixtures up to quality 6.0. For corrosive gases and gas mixtures with >1% corrosive components the P-model (equipped with purging device) is recommended. Product name bar psi HiQ code C 421/ C 421/1 P Technical data Max primary pressure 25 bar 3,300 psi Outlet pressure bar psi Outlet gauge range 1 3 bar psi Leak rate 10 8 mbar l/s He Connection Out = ¼ -18 NPT female Operating temperature C F Weight 2.1 kg 4.6 lb Material Housing Stainless steel 316L Seals PCTFE Diaphragm Hastelloy C276 Seating PCTFE

149 C 421/1P Outlet pressure, bar Inlet pressure 4 bar Flow, m 3 /h, air ~ 115 ~ All measurements in millimeters. Type P. Drawings of other types available on request.

150 C 450/1 mini. Single stage mini cylinder regulator. The C 450/1 mini cylinder regulators are intended for primary pressure control of noncorrosive gases for qualities up to 6.0. For corrosive gases or gas mixtures use the stainless steel version. The regulator has a compensated main valve for significantly improved outlet pressure accuracy similar to a dual-stage regulator. Product name bar psi HiQ code C 450/1, brass C 450/1, brass C 450/1, brass C 450/1, stainless steel C 450/1, stainless steel C 450/1, stainless steel Technical data Max primary pressure 230 bar 3,300 psi Outlet pressure bar 0 22 psi 0 4 bar 0 60 psi 1 10 bar psi Outlet gauge range bar psi 1 6 bar psi 0 15 bar psi Leak rate 10 8 mbar l/s He Connection Out = ⅛ NPT female Operating temperature C F Weight 0.5 kg 1.1 lb Material Housing Brass, Cr plated Stainless steel 316L Seals PCTFE Diaphragm Hastelloy C276 Seating PCTFE (option PVDF)

151 C 450/1 mini Flow, m³/h, air Inlet pressure = 20 bar Inlet pressure = 9 bar ~ ~ 55 Outlet pressure, bar All measurements in millimeters.

152

153 Safety solutions. Some gases may be harmful, even if normal precautions are employed. To handle these gases it is necessary to use special equipment. In this chapter gas cabinets and specialty gas purge panels are presented. Also Monitoring systems (p. 218) and Containers can be viewed as safety equipment. Containers are a good solution when it is not possible to solve safety problems in the existing premises. (see pages ). In addition to this, Linde can support you with all kinds of scrubbers, gas detection systems and personal alarms. For full portfolio, please contact your local Linde representative.

154 Safety solutions. Standard cabinets. Gas cabinets are used to store gas cylinders safely. A gas cabinet used for storing flammable or toxic gases should be equipped with forced ventilation. It is crucial that the cabinet is vented externally and not connected to the normal ventilation. Features Inspection window in armoured glass Lockable doors, openable 180 Two ventilation connections for optional flow direction Prepared for mounting of gas panels Adjustable racks Pre-bored holes for floor mounting Detachable hatch, prepared for tubing Painted sheet-iron or stainless steel Available for up to three cylinders Technical data Dimensions [mm] [inch] Width (1 or 2 cylinders) Width (3 cylinders) Depth Height Product name HiQ code 1 cylinder gas cabinet cylinder gas cabinet cylinder gas cabinet 3388

155 Width All measurements in millimeters.

156 Safety solutions. 2-valve purge gas panel. The Marathon range of manual and semi-automatic gas panels is the solution to your speciality gas source and distribution needs. From simple manual self purge panels for inert gases through to purge-able systems for hazardous gases the Marathon range offers robust, cost effective basic systems that can be enhanced for safety, purity and operation by the addition of functional modules. This gas panel is typically used to control non-reactive gases like nitrogen, etc. The gas panel works like a self-purging system, and removes the air trapped in the gas panel, after cylinder change, by isolating the regulator with the HPI valve, and flushing process gas via the HPV valve to the atmosphere. Typically used as a purge gas panel to ensure a safe and clean purge gas source for sophisticated gas panels handling toxic, flammable or hazardous gases. Features High pressure vent for purge High pressure isolation for purge Burst disk failsafe protection for overpressure Cylinder and Delivery pressure measurement Tied diaphragm regulator Springless diaphragm valves Universal mounting plate VCR and orbital welded connections to process path Change-over module-ready For ordering and further details, please contact your local Linde representative. Technical data High purity Ultra high purity Leak rate Inboard <1x10 9 sccs <1x10 9 sccs Outboard <2 ppm He <2 ppm He Particles per ft 3 <10 counts µm <5 counts µm µm 0 count >0.3 µm >0.3 µm Moisture <20 ppb <20 ppb Oxygen <20 ppb <10 ppb Total hydrocarbons <10 ppb <10 ppb 316L SS electro-polished 15 µin Ra average 5 7 µin Ra average Options, functional ESO Emergency shut-off valve HPA High pressure access valve BD SWG Burst disc switch gauge EFS Excess flow switch PLI Process line isolation DEL & CYL Switch gauge upgrade Bellow valves Change-over module Options, purity CFG Pre-filter FF Final filter metal FF Final filter Teflon Del. & Cyl. pressure transducers Nanochem purification

157 Schematic. Options in blue. To vent Process gas out Venturi supply To vent PLI VGS VG BD SWG FF DEL CYL BD REG HPI HPV CFG ESO From gas source EFS HPA

158 Safety solutions. 3-valve process gas panel. The Marathon range of manual and semi-automatic gas panels is the solution to your speciality gas source and distribution needs. From simple manual self purge panels for inert gases through to purge-able systems for hazardous gases the Marathon range offers robust, cost effective basic systems that can be enhanced for safety, purity and operation by the addition of functional modules. Self-purging gas panel with a low pressure isolation valve added to allow isolation of the panel from the process line. This panel is used as a process gas panel for non hazardous gases where demands are high but not extreme. Features High pressure vent for purge High pressure isolation for purge Purge gas inlet Burst disk failsafe protection for overpressure Cylinder and Delivery pressure measurement Tied diaphragm regulator Springless diaphragm or bellow valves Universal mounting plate VCR and orbital welded connections to process path Change-over module-ready For ordering and further details, please contact your local Linde representative. Technical data High purity Ultra high purity Leak rate Inboard <1x10 9 sccs <1x10 9 sccs Outboard <2 ppm He <2 ppm He Particles per ft 3 <10 counts µm <5 counts µm µm 0 count >0.3 µm >0.3 µm Moisture <20 ppb <20 ppb Oxygen <20 ppb <10 ppb Total hydrocarbons <10 ppb <10 ppb 316L SS electro-polished 15 µin Ra average 5 7 µin Ra average Options, functional ESO Emergency shut-off valve HPA High pressure access valve BD SWG Burst disc switch gauge EFS Excess flow switch PLI Process line isolation DEL & CYL Switch gauge upgrade Bellow valves Change-over module Options, purity CFG Pre-filter FF Final filter metal FF Final filter Teflon Del. & Cyl. pressure transducers Nanochem purification

159 Schematic. Options in blue. To vent Process gas out Venturi supply To vent PLI VGS VG BD SWG DEL BD FF REG CYL HPI HPV CFG Purge gas supply in PGI From gas source EFS ESO HPA

160 Safety solutions. 5-valve process gas panel. The Marathon range of manual and semi-automatic gas panels is the solution to your speciality gas source and distribution needs. From simple manual self purge panels for inert gases through to purge-able systems for hazardous gases the Marathon range offers robust, cost effective basic systems that can be enhanced for safety, purity and operation by the addition of functional modules. This panel includes low pressure vent line, allowing vacuum assisted regulator purge and process line purge which improves system start up procedure. Pneumatic emergency shut-off valve and vacuum generator are standard. Suitable for gases like SiH 4, AsH 3, HCl, PH 3. Features High pressure vent for purge Low pressure vent for purge High pressure isolation for purge Purge gas inlet Burst disk failsafe protection for overpressure Cylinder and delivery pressure measurement Tied diaphragm regulator Springless diaphragm or bellow valves Modular design VCR and orbital welded connections to process path Change-over module-ready For ordering and further details, please contact your local Linde representative. Technical data High purity Ultra high purity Leak rate Inboard <1x10 9 sccs <1x10 9 sccs Outboard <2 ppm He <2 ppm He Particles per ft 3 <10 counts µm <5 counts µm µm 0 count >0.3 µm >0.3 µm Moisture <20 ppb <20 ppb Oxygen <20 ppb <10 ppb Total hydrocarbons <10 ppb <10 ppb 316L SS electro-polished 15 µin Ra average 5 7 µin Ra average Options, functional ESO Emergency shut-off valve HPA High pressure access valve BD SWG Burst disc switch gauge EFS Excess flow switch PLI Process line isolation DEL & CYL Switch gauge upgrade Bellow valves Change-over module Options, purity CFG Pre-filter FF Final filter metal FF Final filter Teflon Del. & Cyl. pressure transducers Nanochem purification

161 Schematic. Options in blue. Process gas out Purge gas supply in To vent Venturi supply To vent VGS VG PLI BD SWG FF EFS LPV DEL BD CYL HPV LPI REG HPI PGI CFG ESO From gas source HPA

162 Safety solutions. Operation monitor. Marathon operation monitors provide operational and safety enhancements for manual and semi-automatic gas panels. Speciality gas equipment operates largely unattended and unsupervised by personnel the operation monitor provides safe, cost effective supervision and failsafe shutdown if a hazardous condition is detected. The operation monitor provides at-a-glance status information and signals conditions that require operator attention (low cylinder pressure for example) Interfaces to remote monitoring and FMCS systems provide basic status and detailed operation parameters respectively. The operation monitor is available in two models. OM1 is suitable for single cylinder panels and interfaces to the full range of Marathon safety sensors. OM2 provides all of the safety and operational features of OM1 but is for double gas panels with auto-change-over. Marathon operation monitors can optionally be interfaced and configured to a full range of gas panel and peripheral sensors. In this way the level of safety and operation functions can be selected to suit the gas, environment and operational preferences. The monitors can also be delivered with a modbus FMCS link for remote monitoring. Please order a Marathon Operation Monitors data sheet from your local Linde representative for more details. Features PLC based Failsafe shutdown logic At-a-glance status indicators Audible alarms LCD operator interface Password access levels Intuitive menu-driven operation Cylinder cabinet or wall mounted Digital and analogue sensor interfaces Remote status interface Meets all relevant SEMI standards, all relevant European directives (CE) and all relevant National standards in countries of sale Manufactured under ISO9000:2001 and ISO14001 environments Technical data Dimensions, W/H/D OM1 300/220/123 OM2 600/220/123 Supply voltage VAC Supply current 5 A Internal & external logic 24 VDC Pressure transducers 4 20 ma Cylinder scales 4 20 ma Pneumatic supply (CDA*) 6 bar 80 psi Options Control of ACV Auto-changeover Transducer pressure display Cylinder scale weight display Wall mount bracket Cylinder cabinet mounting Pendant operator interface Modbus interface to FMCS * compressed dry air

163 Marathon operation monitor OM1 Marathon operation monitor OM2

164 Safety solutions. Fully automatic. The Olympian range of fully automatic systems has, at its heart, a PLC based control system which monitors a wide range of safety features and hazard conditions and provide failsafe shutdown in the event of a serious problem. Manifold conditions are constantly monitored and the fully automatic purge sequences include critical condition testing for failsafe operation. Password security levels ensure that key features are adequately protected and alarm conditions and purge sequences are comprehensively parameterised to enable safety and efficiency to be tuned to customer specifics. The color touch screen has a full menu of active graphics providing easy to read information on all operation parameters including alarm history and trend graphs. Our gas cabinets represent the next generation of ultra-pure source gas panels, with a state of the art controller system, offering unique in-line architecture and a purge block valve designed to minimize dead space and overall internal volume. These features guarantee the optimum purge effect and a thorough decontamination of the source gas system. Features and benefits Designed specifically for the requirements of submicron device manufacturing. Intuitive design helps reduce operator errors and improves safety. Purge block valve design allows very short purge time due to small internal volume of 1.3 cm 3. Contaminated purge gas is discharged without entering flowing downstream of the purge block valve. In-line flow path virtually eliminates dead space. Modular, welded design improves reliability and reduces spare parts stocking requirements. Integrated automatic source switchover capability for critical redundancy and guaranteed uptime. Front removable components for improved servicing. Vacuum Venturi assisted purge for a quick and efficient manifold. Assembled in a clean room environment according to strict industry standards and specifications. Meet all relevant SEMI standards, European Safety Directives and are fully CE compliant. Technical data Inboard leak rate <10 9 scc/sec He Particle test 0.1 µm size 0.18 ptc/l 5 ptc/ft 3 >0.3 µm size 0 ptc/l 0 ptc/ft 3 Moisture test <10 ppb Oxygen test <10 ppb Material 316 L stainless steel (secondary remelt) Surface finish 0.18 Ra µm ave. 7 Ra µin ave. Dimensions [mm] [inch] Width (1 or 2 cylinders) Width (3 cylinders) 1, Depth Height 2, Certification: compliant For ordering and further details, please contact your local Linde representative.

165

166

167 Containers. Ready-to-use gas supply systems. A good and safe way to store gas cylinders are to use a gas container. Linde has a range of containers especially suited for this purpose which fulfill all relevant regulations and can be equipped with a range of extras, such as dividers, heating, forced ventilation and gas detectors. A gas container should always be considered when dealing with flammable or otherwise harmful gases and is a cost-effective way of complying with fire regulations. Fire-resistant bushing. Semi-automatic gas panel (selected from the equipment program). Gas detector (optional). Explosion proof globe light. Air vent. Fire-resistant bushing. Fire insulation. Integrated cabinet for gas outlet connections. Integrated cabinet for electrical connections. Heating coil in the floor (optional). Hollow sections for fork lift. External lighting with twilight relay. Roller conveyor (optional).

168 Containers. Ready-to-use gas supply systems. The delivery of gas cylinders and cylinder bundles/banks directly to the gas storage provides a safe and convenient solution to gas cylinder handling. At the same time safety is increased as the gas cylinders do not need to be transported and stored in the production premises. Using the Ready-To-Use gas supply system you get a continuous supply of gas to each individual workstation, which means less downtime and fewer unplanned interruptions as well as lower overall costs. Fewer and larger gas cylinders that serve more users means more effective utilization of the gas in the cylinders, which results in lower costs for the gas, cylinder rent and transportation. Delivery and purchasing routines can be centralized and made more efficient as the overall gas consumption and cylinder handling is much easier to monitor. A service agreement guarantees trouble free gas supply without unplanned production interruptions. Together with the customer we carry out a requirement analysis regarding the gas quality and operating conditions. After this, the appropriate equipment will be installed in the selected container. If, for example, a continuous gas supply without interruptions is required, then a semi automatic gas panel that automatically switches from an empty to a full cylinder is chosen. If gases with different physical properties are to be stored in the same container, the container is divided using partitions so that gases can be separated. The container is fully equipped by Linde, to include all electrical connections and piping. This means that the system can be put into operation immediately after delivery. Technical data Container model 10 foot 20 foot Measurements Length [m] (ext/int) 2.99/ /5.33 Width [m] (ext/int) 2.43/ /2.16 Height [m] (ext/int) 2.59/ /2.28 Electrical distribution box 16 A with two 10 A sockets. Equipped with earth-fault and circuit breakers. Lighting externally Twilight relay and separate on/off switch. Explosion proof Class EEx e 11. Ignition T3 T1 globe light internally Fire insulation on the rear wall and side walls Class A60 on the remainder Class B15 Fire bushings Type Lykab Paint system Complies with environmental Hempel class 3 Heating coil in Output ~ 9 W/m the floor* Capacity: at 10 C outdoor temperature the system maintains an indoor temperature of about +18 C. Fan for forced Type Ex-140-4C. Output 100 W. ventilation* Capacity free-blowing 532 m 3 /h. * Optional The containers are manufactured according to ISO 668, ISO , ISO 1161 standards. All models have a three layer rust protection finish using environmentally suited water based epoxy and acrylic paint. Water drainage from the roof and drip mouldings above the doors are standard on all models. Linde s ready-to-use containers are available in three standard sizes designed according to a common basic philosophy. Continues...

169 20 foot container with roller conveyor. Loading of cylinder bundle.

170 Containers. Ready-to-use gas supply systems....continued Safety Double doors with cylinder locks. Air vents. Fire insulation on the rear wall and side walls class A60, remainder class B15. Fire resistant bushings for pipe and cable inlets on the side walls and any partitions. Separate integrated cabinets for electrical equipment and gas connections in optional side wall. Electrical distribution box 16 A with two 10 A sockets. Equipped with earth fault and circuit breakers. Internal Explosion Proof globe light. External lighting with twilight relay and separate on/off switch. Name HiQ code 10 foot container foot container 3398 Custom made container 3399 Handling The containers are equipped with hollow sections for lifting with a fork lift truck, which makes moving easy if requirements change. Folding ramps by the doors to simplify transportation of gas cylinders. The need to transport gas cylinders in production premises is eliminated. Handling of heavy gas cylinders is minimized. Economy Supplied ready for connection to a gas distribution system. Minimizes investment requirements. Buy or lease option. Complete overview of gas consumption and the size of the cylinder stock. Options Gas panels and other components are installed to meet your requirements. Floor heating thermostat controlled. Roller conveyors for handling of cylinder bundles/ banks (does not apply to CM container). Gas detectors for inflammable and corrosive gases. Air conditioning unit. Fan for forced ventilation (exhaust ventilation). Sprinkler. Partition with fire resistant bushings (a maximum of 2 walls in a 20 foot container). Extra passage door.

171 Custom made container. Explosion proof globe light. Gas detector (optional). Integrated cabinet for gas outlet connections. Integrated electrical connections cabinet.

172

173 HiQ specialty gas generators. In some cases the use of cylinder gas might be unsuitable. This might be for safety reasons or if it is difficult to transport the cylinders. Linde has a range of small and reliable gas generators to handle these situations. These gas generators produces gas on site for instant use. The main advantage with gas generators is that since the gas is produced on site, shutting of the power stops the gas production, which could be essential at power failure if the gas produced is hydrogen. Another advantage is that there are no need to store large amounts of compressed gas since there is instant access to newly produced gas. Gas generators are small and creates a flexibility in the set up of the laboratory, and simplifies rearrangements of the lab. Due to their small size, laboratory space can be saved. To ensure continuous supply, a cylinder or a second generator has to be connected to the system as backup.

174 HiQ specialty gas generators. The hydrogen no-maintenance series. Hydrogen is used in chromatography both as a carrier gas and as a fuel for instance for flame ionization detectors (FID) or flame photometric detectors (FPD). It is either delivered in classical gas cylinders or produced on site. On-site production ensures a continuous supply and allows for small total hydrogen volumes in the lab (<40 ml contained volume/unit). There are three models of the HiQ no-maintenance generator. Apart from the basic model there is one with remote control (NMH2 XXX-RC) and one with cascading flow (NMH2 XXX-CF) allowing from two to a maximum of 32 units to be connected in parallel. The HiQ hydrogen generator is a no-maintenance device with innovative membrane-technology. Its advanced dual-column drying system automatically removes residual moisture from the hydrogen produced. The column materials are also regenerated automatically, and in the final purification not even a desiccant cartridge is needed. For the electrolytic dissociation process, the HiQ hydrogen generator requires no caustic chemical solutions. Instead, it uses harmless deionized water to produce a reliable, continuous output of 6.0 hydrogen (> % pure). System operating status and diagnostic data appear on a user-friendly digital display. In case of an internal error, the unit is put on standby by an autoshut-off procedure. Selectable, multiple alarms alert to unwanted shifts in operating conditions such as low water level, poor water quality, low pressure (leak) and power supply conditions. Hydrogen flow and water quality are monitored by continuous LCD indication. The gas delivery pressure is indicated by LCD and can be adjusted manually via a membrane control pad. A cable interface permits remote computer monitoring of all functions. Model Description HiQ code NMH ml/min 5500 NMH ml/min 5501 NMH ml/min 5502 NMH ml/min 5995 NMH ml/min 5503 NMH ml/min 5996 NMH2 1L 1,000 ml/min 5989 NMH2 100-RC 100 ml/min 5504 NMH2 160-RC 160 ml/min 5505 NMH2 250-RC 250 ml/min 5506 NMH2 300-RC 300 ml/min 5997 NMH2 500-RC 500 ml/min 5507 NMH2 600-RC 600 ml/min 5998 NMH2 1L-RC 1,000 ml/min 5990 NMH2 250-CF 250 ml/min 5508 NMH2 300-CF 300 ml/min 5999 NMH2 500-CF 500 ml/min 5509 NMH2 600-CF 600 ml/min 6000 NMH2 1L-CF 1,000 ml/min 5991 Optional features NMH2-PCI-CC With PC interface and control cable 5510 NMH2-EXT-RC With handheld external remote control unit 5511 NMH2-H 2 O-RF With automatic water refilling option 5512 Technical data Max H 2 flow rate l/min Delivery pressure bar psi H 2 purity > % (>6.0) Electrolysis cell Solid polymer membrane Safety Auto shut-off and low internal volume (<40ml) Auto-drying system No maintenance of drying cartridges (exclusive system) Water Deionized or distilled User interface Set points, system status, user parameter Display LCD display 128 x 64 pixels, set points, status, alarms Options I/O board containing: RS232C bi-directional/2 ports RS485 Cascading up to 32 units Potential free relay contacts Software for PC-control capability (requires I/O board) Dimensions (W/D/H) 23/35/43 cm 8⅝ /13⅜ /15¾ Weights NMH kg 37.5 lbs NMH L 18 kg 40 lbs Certification: compliant Consumables/spare parts NMH2-DI-Bag Deionizer bag, replacement 5513 NMH2-RCC-10 Remote control cable (15-conductors) 10m 5514 NMH2-RCC-10 Remote control cable (15-conductors) 25m 5515 NMH2-RCC-10 Remote control cable (15-conductors) 50m 5516

175 HiQ hydrogen no-maintenance generator. HiQ hydrogen no-maintenance generator in principal. Drying tube Auto dryer NM system Water reservoir Pressure gauge Shut-off valve H 2 outlet Check valve Water drain port O 2 H 2 Pressure transducer Overpressure relief port Solid Polymer Electrolyte (SPE) cell

176 HiQ specialty gas generators. The hydrogen pure gas series. Pure gaseous hydrogen is needed in gas analyzers, plasma chambers, isolated environments, or as a fuel gas for flame tools. It is either delivered in classical gas cylinders or produced on site. On-site production ensures a continuous supply, keeping the total hydrogen volume in the lab as low as possible. There are three models of the HiQ pure gas generator. Apart from the basic model there is one with remote control (PGH2 XXX-RC) and one with cascading flow (PGH2 XXX-CF) allowing from two to a maximum of 32 units to be connected in parallel. The HiQ hydrogen generator relies on the newest electrolytic membrane technology, which is significantly cleaner than conventional hydrogen generation. This new technology reduces maintenance and cleaning to a minimum. It permits a chemical-free, trouble-free and long-term production of hydrogen simply from the electrolysis of deionized water. No free acids or alkalines are used, thus avoiding caustic impurities that might affect hydrogen quality and degrade the system. Features: LCD-based display and membrane control pad for simple operation Multiple alarms (low water level, poor water quality, low pressure, insufficient power supply) Requires deionized water instead of caustic electrolytic solutions Replaceable desiccant cartridge provides final purification step to remove moisture Cascading flow control allows multiple units to be connected for larger capacity flows (option) Cable interface permits remote computer monitoring of all functions (option) Model Description HiQ code PGH ml/min 5517 PGH ml/min 5518 PGH ml/min 5519 PGH ml/min 6001 PGH ml/min 5520 PGH ml/min 6002 PGH2 100-RC 100 ml/min 5521 PGH2 160-RC 160 ml/min 5522 PGH2 250-RC 250 ml/min 5523 PGH2 300-RC 300 ml/min 6003 PGH2 500-RC 500 ml/min 5524 PGH2 600-RC 600 ml/min 6004 PGH2 250-CF 250 ml/min 5525 PGH2 300-CF 300 ml/min 6005 PGH2 500-CF 500 ml/min 5526 PGH2 600-CF 600 ml/min 6006 Optional features PGH2-PCI-CC With PC interface and control cable 5527 PGH2-EXT-RC With handheld external remote control unit 5528 PGH2-H 2 O-RF With automatic water refilling option 5529 Technical data Max H 2 flow rate l/min Delivery pressure bar psi H 2 purity % (5.0) Electrolysis cell Solid polymer membrane Safety Auto shut-off Water Deionized User interface Set points, system status, user parameter Display LCD display with set points, status, alarms Options I/O board containing: RS232C bi-directional/2 ports RS485 Cascading up to 32 units Potential free relay contacts Software for PC-control capability (requires I/O board) Dimensions (W/D/H) 22/33/39.5 cm 8⅔ /13 /15⁵ ₉ Weights PGH kg 36 lbs PGH2 500/ kg 40 lbs Certification: compliant Consumables/spare parts PGH2-DI-Bag Deionizer bag, replacement 5530 PGH2-DES-Cart Desicant cartridge with fittings, replacement 5531 PGH2-RCC-10 Remote control cable (15-conductors) 10m 5532 PGH2-RCC-10 Remote control cable (15-conductors) 25m 5533 PGH2-RCC-10 Remote control cable (15-conductors) 50m 5534

177 HiQ hydrogen pure gas generator. HiQ hydrogen pure gas generator in principal. Drying tube Drying cartridge Water reservoir Pressure gauge Shut-off valve H 2 outlet Check valve Water drain port O 2 H 2 Pressure transducer Overpressure relief port Solid Polymer Electrolyte (SPE) cell

178 HiQ specialty gas generators. HOGEN HGS hydrogen generation system. In today s challenging business environment, power plant operators must strive for the most efficient operations across multiple aspects of performance. In particular they have to take into account: the fuel expense and generation capacity, safety and security, hydrogen availability, emissions reduction, and personnel productivity. Many power plants today are not running optimized. They operate out of OEM specifications for hydrogen purity, pressure and dewpoint, costing hundreds of thousands of dollars every year in excess fuel costs, lost generation revenue, emissions credits, and decreased winding life. Linde Gas has introduced two advanced technology systems: the HOGEN hydrogen generation system (HGS) and the STABLEFLOW hydrogen control system (HCS), further information on page 140. Together, these systems ensure automatic and continuous measurement and feedback control of hydrogen purity and pressure for optimized generator performance. The HOGEN HGS is a proton exchange membrane (PEM) water electrolysis system that uses electricity to separate water into hydrogen and oxygen. The hydrogen is produced at 13.8bar/200psi pressure without a compressor and at a purity of % continuously and without operator intervention. The compact HOGEN HGS can be placed on the power plant generator deck or any other indoor non-classified plant area. Due to its unique design, the HOGEN HGS contains virtually no hydrogen, even when generating hydrogen at up to 6 Nm 3 /228 SCF per hour enough hydrogen to cool power plants as large as 1,500 MW. The HOGEN HGS provides reliable, safe, low-cost hydrogen for generator blanketing and increases safety and security by eliminating hydrogen storage, cylinder handling and routine hydrogen delivery. Standard features Fully automated, push-button start/stop Automatic fault detection and system depressurization On-board H 2 detection Emergency stop Standard siting requirements Indoor, level ± 1, 0 to 90% relative humidity non-condensing, non-hazardous/non-classified environment. Proper ventilation must be provided from a non-hazardous area. Options Linde Gas offers a wide range of options to tailor your HOGEN HGS to your specific operational requirements. Please contact your local Linde Gas representative to discuss current options available to best fit your needs. Technical data Net H 2 production rate Nm 3 /h SCF/h SLPM kg/24h 0 C, 1 bar 70 F, 1 atm 70 F, 1 atm HGS S HGS S HGS H2m HGS H4m HGS H6m Delivery pressure HGS S 13.8 bar 200 psi HGS H 15.0 bar 218 psi H 2 purity % (5.5) Water requirement (deionized) Pressure bar psi Consumption rate HGS S l/h 0.13 gal/h HGS S l/h 0.25 gal/h HGS H2m 1.83 l/h 0.50 gal/h HGS H4m 3.66 l/h 0.96 gal/h HGS H6m 5.50 l/h 1.42 gal/h Dimensions (W/D/H) HGS S 97/79/106 cm 38 /31 /42 HGS H 180/81/198 cm 71 /32 /78 Weight HGS S kg 475 lbs HGS S kg 475 lbs HGS H2m 700 kg 1500 lbs HGS H4m 747 kg 1600 lbs HGS H6m 794 kg 1700 lbs Electrical specifications HGS S VAC, single phase, 50 or 60 Hz HGS H VAC, 3 phase, 50 or 60 Hz Cooling HGS S Air-cooled HGS H Liquid-cooled Certification: compliant References HOGEN hydrogen generation systems are in place worldwide at power plants from 35 MW to 3,600 MW capacity. Please contact us for a current reference list.

179 HOGEN HGS hydrogen generators (HOGEN HGS H to the left and HGS S to the right). Schematic setup of HOGEN HGS and STABLEFLOW HCS at a power plant.

180 HiQ specialty gas generators. Nitrogen SIROCCO DS-PSA series. The SIROCCO high purity nitrogen gas generators works with DS-PSA technique. Including integral oil-free air compressors as standard, the generators deliver a continuous stream of %+ pure nitrogen gas with a minimal residual oxygen content without the need for secondary purification. Version 3A includes a separate and independent compressed instrument air system. The SIROCCO series of nitrogen gas generators is ideal for operation as nitrogen gas supply for all kind of laboratory and chromatography applications. SIROCCO DS-PSA nitrogen gas generators use a patented DUAL STEP pressure swing adsorption (DS-PSA) system. Pressure swing adsorption is well known and the DUAL STEP system is a new innovation which is a much more economical and much more efficient technique compared with the traditional standard PSA technique. The DS-PSA system remove oxygen, carbon dioxide and water from compressed air. The resulting stream of high purity nitrogen gas (99.999%) is ideal for laboratory applications including GC carrier gas, make-up gas, and many other applications like ICP etc. Version DS-PSA-N2-3A also produces a 3 l/min flow at a pressure of 5 bar (73 psi) of clean air for other use. The compressed air system includes a filtration and drying system and is completely separated from the N 2 part of the generator. All SIROCCO DS-PSA gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Technical data Max. N 2 flow rate (at 20 C, 1 bar) DS-PSA-3 3 l/min DS-PSA-5 5 l/min Delivery pressure, % 5 bar 73 psi N 2 purity % Oxygen content <10 ppm Index of protection IP2x (acc. IEC 60529, rev 2.1) Temperature range C F Noise level <60 db(a) Display Microprocessor controlled graphic display, 128 x 64 pixels Power 230V/50Hz 110V/60Hz Power consumption 820W Dimensions (W/D/H) 48/83.5/64 cm 19/33/25.2 Weight 110 kg lbs Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required Up to %+ pure nitrogen gas produced as standard. No need for costly downstream secondary filtration Integral oil-free air compressor guarantees continuous gas supply, independent of inhouse compressed air supply The gas generators can easily be installed in the laboratory Certification: compliant Model Description HiQ code DS-PSA-N2-3 SIROCCO DS-PSA, 3 l/min, 230V 5979 DS-PSA-N2-3A SIROCCO DS-PSA, 3 l/min, air, 230V 5980 DS-PSA-N2-5 SIROCCO DS-PSA, 5 l/min, 230V 5981 DS-PSA-N2-3/110 SIROCCO DS-PSA, 3 l/min, 110V 5982 DS-PSA-N2-3A/110 SIROCCO DS-PSA, 3 l/min, air, 110V 5983 DS-PSA-N2-5/110 SIROCCO DS-PSA, 5 l/min, 110V 5984 Maintenance DS-PSA-AK Maintenance kit 5985 DS-PSA-4000K 4000 hours maintenance kit 5986

181 HiQ SIROCCO DS-PSA nitrogen generator. HiQ SIROCCO DS-PSA nitrogen generator in principal. Instrument air outlet Check valve N 2 98% outlet Check valve N % outlet Separate air feed, version 3A only CMS 1 tube CMS 2 tube Cooling coils Air inlet compressors Compressed air filter Vacuum pump Purge air Recycle nitrogen Residual O 2 in air

182 HiQ specialty gas generators. BORA nitrogen mini series. The BORA mini nitrogen gas generators includes an integral oil-free air compressor as standard. The generators deliver a continuous stream of pure nitrogen gas with a low residual oxygen content without the need for secondary purification. The BORA series of mini nitrogen gas generators is ideal for operation as nitrogen gas supply for all kind of laboratory and chromatography applications. The BORA mini nitrogen gas generators use the pressure swing adsorption (PSA) system, as used in thousands of systems worldwide to remove oxygen, carbon dioxide and water from compressed air. The resulting stream of high purity nitrogen gas is ideal for applications including GC carrier, make-up gas, generally for all low flow applications. The BORA series of nitrogen gas generators is incredibly miniaturized and very silent, ideal to be placed in a little space like under or on a bench. The BORA series is the smallest sized high purity nitrogen generator worldwide. All BORA gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required %+ (99.995%+ for model B-PSA-1300) pure nitrogen gas produced as standard. No need for costly downstream secondary filtration Integral oil-free air compressor guarantees continuous gas supply, independent of inhouse compressed air supply The gas generators can easily be installed in the laboratory Technical data Max. N 2 flow rate (at 20 C, 1 bar) B-PSA ml/min B-PSA ml/min B-PSA ml/min Delivery pressure 4 bar 58 psi N 2 purity B-PSA-500/ % B-PSA % Oxygen content B-PSA-500/750 <10 ppm B-PSA-1300 <50 ppm Temperature range C F Noise level <50 db(a) Power 230V/50Hz 110V/60Hz Dimensions (W/D/H) 35/40/30 cm 13.8/15.7/11.8 Weight 18 kg 40 lbs Certification: compliant Model Description HiQ code B-PSA-500 BORA PSA mini, 500 ml/min, 230V 5928 B-PSA-750 BORA PSA mini, 750 ml/min, 230V 5973 B-PSA-1300 BORA PSA mini, 1300 ml/min, 230V 5929 B-PSA-500/110 BORA PSA mini, 500 ml/min, 110V 5974 B-PSA-750/110 BORA PSA mini, 750 ml/min, 110V 5975 B-PSA-1300/110 BORA PSA mini, 1300 ml/min, 110V 5976 Maintenance B-PSA-AK-500 Maintenance kit/500 ml/min 5930 B-PSA-AK-750/1300 Maintenance kit/750/1300 ml/min 5977 B-PSA-4K h filters kit/500 ml/min 5931 B-PSA-4K-750/ h filters kit/750/1300 ml/min 5978 B-PSA-24K h maintenance kit/500 ml/min 5932 B-PSA-24K-750/ h maintenance kit/750/1300 ml/min 5994 B-PSA-24TK h tubing kit/500 ml/min 5993 B-PSA-24TK-750/ h tubing kit/750/1300 ml/min 5992

183 HiQ BORA nitrogen mini generator. HiQ BORA nitrogen mini generator in principal. Check valves Purge line CMS tubes Nitrogen reservoir Air inlet compressor PLC Cooling coil Compressed air filter Inlet solenoid valves Exhaust solenoid valves N 2 pressure pump and flow control N 2 outlet

184 HiQ specialty gas generators. ELSD nitrogen generator without compressor. The ELSD mini nitrogen gas generator deliver a continuous stream of pure nitrogen gas with a low residual oxygen content without the need for secondary purification. The ELSD mini nitrogen gas generator is ideal as source for inert gas and purge gas including ELSD systems. The ELSD nitrogen gas generators use the pressure swing adsorption (PSA) system, as used in thousands of systems worldwide to remove oxygen, carbon dioxide and water from compressed air. The ELSD nitrogen gas generators is incredibly miniaturized and very silent, ideal to be placed in a little space like under or on a bench. The ELSD gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required > 98% pure nitrogen gas produced as standard. Requires only compressed air from an external source No high pressure cylinder requirement and very little moving part for long term stable run without frequent maintenance demand. Profit from in-house compressed air supply The gas generators can easily be installed in the laboratory Technical data Max. N 2 flow rate at 20 C, 1 bar 4 l/min (up to) Delivery pressure 5 bar 73 psi N 2 purity >98% Compressed air feed specifications Pressure 7 bar 100 psi Purity ISO , Class Temperature range C F Noise level <48 db(a) Power 230V/50Hz 110V/60Hz Dimensions (W/D/H) 35/40/30 cm 13.8/15.7/11.8 Weight 16 kg 35.5 lbs Certification: compliant Model Description HiQ code ELSD-4000/230 ELSD PSA without compressor, 4 l/min, 230V 6014 ELSD-4000/110 ELSD PSA without compressor, 4 l/min, 110V 6015 Maintenance ELSD-8000K 8000 hours maintenance kit 6016

185 HiQ ELSD nitrogen generator. HiQ ELSD nitrogen generator in principal. Check valves Purge line CMS tubes Nitrogen reservoir Air inlet Compressed air filter Inlet solenoid valves N 2 outlet Exhaust solenoid valves N 2 pressure pump and flow control

186 HiQ specialty gas generators. Nitrogen LC/MS Plus series. The nitrogen LC/MS Plus gas generator works with PSA technique. Including integral oil-free air compressors as standard, the generator deliver a continuous stream of 99%+ pure nitrogen gas with a residual oxygen content of less than 1% at a flow rate of up to 35 liters per minute. The nitrogen LC/MS Plus gas generator is ideal for laboratory applications like all LC/MS techniques and other inert gas demanded applications. The LC/MS Plus gas generators use a pressure swing adsorption (PSA) system that removes oxygen, carbon dioxide and water from compressed air. The standard PSA technology is combined with a dual step pressure management. This allows to get high flow, high purity and high pressure all together in a very economical way without stressing the components. The nitrogen LC/MS Plus gas generators are designed and manufactured within a rigorous ISO9001 quality system. Advantages: Nitrogen produced at low pressure and ambient temperature removes the need for high pressure cylinders or liquid dewars A constant, uninterrupted gas supply of guaranteed purity eliminates interruptions of analyses to change cylinders and reduces the amount of instrument re-calibrations required Up to 99%+ pure nitrogen gas produced as standard. No need for costly downstream secondary filtration Integral oil-free air compressor guarantees continuous gas supply, independent of inhouse compressed air supply The gas generator can easily be installed in the laboratory Technical data Max. N 2 flow rate (at 20 C, 1 bar and 99% purity) 35 l/min Delivery pressure 8 bar 120 psi N 2 purity >99% Oxygen content <1% Index of protection IP2x (acc. IEC 60529, rev 2.1) Temperature range C F Noise level <58 db(a) Display Microprocessor controlled graphic display, 128 x 64 pixels Power 230V/50Hz 110V/60Hz Fuse 10A/230V 14A/110V Dimensions (W/D/H) 48/83.5/64 cm 19/33/25.2 Weight 110 kg lbs Certification: compliant Model Description HiQ code LCMS-Plus-230 LC/MS N2, 35 l/min, 230V 6007 LCMS-Plus-110 LC/MS N2, 35 l/min, 110V 6008 Maintenance LCMS-Plus-4000K 4000 hours maintenance kit 5986

187 HiQ LC/MS Plus nitrogen generator. HiQ LC/MS Plus nitrogen generator in principal. Check valves Purge line CMS tubes Nitrogen reservoir Air inlet compressor PLC Cooling coil Compressed air filter Inlet solenoid valves Exhaust solenoid valves N 2 pressure pump and flow control N 2 outlet

188 HiQ specialty gas generators. The nitrogen LC/MS 4 series. Nitrogen is commonly used in laboratories for different applications. Some demand higher purities, others are less purity-dependent. Such applications are typically nebulizing gas for liquid chromatography coupled with mass spectrometry (LC/MS). These are typically used for polymer identification/determination, protein and peptide analysis/identification and in pharmaceutical research and development. Other areas of application are specific solvent evaporations and low-purity purge gas requirements. The HiQ LC/MS 4 laboratory nitrogen generator is specifically designed to deliver larger capacity flow rates required for LC/MS 4 instrument operation. The generator is a stand-alone unit that makes pure nitrogen out of ambient air. The system is built around an integral membrane system and oil-free direct drive compressors that deliver a continuous stream of pure, dry nitrogen. The system can deliver flow rates from 1 to 30 Nl/m, with purities ranging from 96% to 99.9%. For optimal floor mobility, the units are equipped with self-locking caster wheels. The built-in air compressor (stage 1) compresses the air up to 3.0 bar. The first membrane tube removes the moisture and most of the oxygen together with other gases like CO 2 (etc.). The permeate from the first membrane tube is released back into the atmosphere. The pre-cleaned air then passes on to the 2 nd and 3 rd membrane tube where nitrogen with a purity higher than 98% is separated. The permeate from membrane tubes 2 and 3, which is moisture-free and reduced in oxygen content, is collected and recycled back to the inlet of the low-pressure pump. The pure nitrogen collected after tube 3 is then boosted by a second compressor (stage 2) from 3.0 bar to 8.5 bar (45 psi to 120psi), which is the outlet pressure specification. Advantages: Technical data Max. N 2 flow rate l/min (adjustable) Delivery pressure 8.5 bar 120 psi N 2 purity 98 99% (adjustable) Air quality Normal, clean ambient air, relative humidity < 90% Temperature range C F Connections G ¼ / ¼ NPT Noise level < 58 db(a) Flow capacity Nl/m Features Flow indication Pressure gauge Built-in compressors Built-in oxygen sensor Power consumption 900W Dimensions (W/D/H) 31/90/70 cm 12.2/35.4/27.6 Weight 92.5 kg 204 lbs Certification: compliant Flow control valve allows variable flow rates and nitrogen purity levels Pressure indication provided for nitrogen supply outlet Integral oxygen sensor monitors purity Standard integral oil-free direct drive air compressor for turnkey operation Self-locking caster wheels provide mobility for installation Model Description HiQ code LCMS-N2-4 LC/MS nitrogen generator with compressors 5535 Maintenance/spare parts LCMS-4-AK Maintenance kit for LC/MS LCMS-4-O2S Oxygen sensor for LC/MS

189 HiQ nitrogen LC/MS 4 generator. HiQ nitrogen LC/MS 4 generator in principal. Low pressure air pump Air compressor at 4 5 bar (high volume) Air inlet Recycling permeate End pressure 8 bar (small volume) LC/MS 4 generator flow/purity graph Membrane tubes Final pressure N 2 pump

190 HiQ specialty gas generators. The nitrogen LC/MS 0 without compressor series. Nitrogen is commonly used in laboratories for different applications. Some demand higher purities, others are less purity-dependent. Such applications are typically nebulizing gas for liquid chromatography coupled with mass spectrometry (LC/MS). Other areas of application are specific solvent evaporations and low-purity purge gas requirements. The HiQ LC/MS 0 laboratory nitrogen generator is designed to deliver larger capacity flow rates required for LC/MS instrument operation. The generator is intended for use where compressed air is available from an external source. No electrical installation is required. The system is built around an integral membrane system and can deliver flow rates from 0 to 25 Nl/min with purities ranging from 98% to 99% (the higher flow the lower purity and vice versa). The feed pressure must be within the range of 7 10 bar ( psi). For achieving best results the ambient air pressure should be ~1013 mbar and the air feed temperature between C. The generator is delivered in a wall mounting cabinet. Model Description HiQ code LCMS-N LC/MS N 2 generator excl. compressor, 25 l/min 5924 LCMS-N LC/MS N 2 generator excl. compressor, 40 l/min 6013 LCMS-N LC/MS N 2 generator excl. compressor, 60 l/min 5926 Technical data Max. N 2 flow rate 25; 40; 60 l/min Max. delivery pressure Inlet pressure minus 1 bar ( 15 psi) N 2 purity 98 99% (adjustable) Compressed air feed specifications Feed pressure 6 13 bar psi Temperature range C F Residual oil content 0.01 mg/m 3 Dew point < 5 C < 41 F Connections G ¼ Noise level < 45 db(a) Dimensions (W/D/H) 28/19/81 cm 11/7.5/31.9 Weights LCMS-0-N kg 49 lbs LCMS-N2-0-40/60 35 kg 77 lbs Certification: compliant Maintenance LCMS-0-25-AK Filter kit for LCMS-N LCMS-0-60-AK Filter kit for LCMS-N

191 HiQ nitrogen LC/MS 0 generator without compressor. HiQ nitrogen LC/MS 0 generator without compressor in principal. Membrane tubes Air inlet 10 bar (150 psi g) Nitrogen outlet 7 bar g (100 psi g)

192 HiQ specialty gas generators. The Ultra Zero Air series. Pure air is commonly used in the chromatographic world mainly as fuel for flames in detectors such as Flame Ionization Detectors (FIDs) and Flame Photometric Detectors (FPDs). The advantage with the Ultra Zero Air series is that it helps creating a truly flat baseline. The pure air can be delivered in classic gas cylinders or be produced on site from oil-free compressed air. Designed with safety and convenience in mind, this system will generate purified and hydrocarbon-free air from an existing in-house oil-free compressed air supply. The Linde ZAU Ultra Zero Air generators reduce hydro carbons, nitrogen oxides and sulphur dioxide pollutants to less than 0.1 ppm, carbon dioxide to less than 5 ppm and remove all kinds of particles. In the lab, they provide several advantages. Eliminating the need to use and store highpurity air in cylinders saves valuable laboratory floor space. The generator can also be wall-mounted, providing yet another way of saving space. Using an on-site gas generator also eliminates the need to recalibrate instruments after replacing empty cylinders with full ones. The operation of the generator requires low levels of electrical power. This complete turnkey system is engineered with the highest quality components, is easy to install, and requires only minimal annual maintenance. The ZAU Ultra Zero Air generator models utilize a 5-stage process to purify ambient air into high-purity analytical grade air. All main components are manufactured with high-grade stainless steel and installed systematically in cabinets for easy access and service. Product features: Compact size requires minimal space Wall-mountable Built-in security lock on external housing Green, yellow and red indicating lights indicate power, warm-up, ready and fault notification of low/high catalyst temperature, low/high inlet pressure, and life expectancy/expiration of catalyst A digital thermal switch automatically shuts off the power supply to the catalyst in the event that the inlet compressed air is turned off, preventing catalyst damage due to overheating Model Description HiQ code Technical data Max outlet flow 1.5; 3.0; 6.0; 15; 30 l/min Max outlet pressure 6.5 bar 94 psi Inlet air pressure range bar psi Product outlet purity Hydrocarbons < 0.1 ppm Carbon dioxide < 5 ppm Carbon monoxide < 0.1 ppm Nitrogen oxides < 0.1 ppm Sulfur oxide < 0.1 ppm Ozone < 0.1 ppm Dew point (< 2.5 ppm) < 70 C < 158 F Particles (>0.5 micron removed) 99.99% Max inlet impurities Hydrocarbons 100 ppm Carbon dioxide 500 ppm Carbon monoxide 100 ppm Nitrogen oxides 50 ppm Connections (compr. fitting) Out = ⅛ In = ¼ Outlet air temperature (ambient) +15 C +59 F Max inlet temperature +40 C +104 F Dimensions (W/D/H) 47/25/40 cm 18/10/16 Weights ZAU 1500/ kg 33 lbs ZAU kg 46 lbs ZAU 15000/ kg 55 lbs ZAU 1500 Ultra Zero Air generator 1,500 ml/min 5765 ZAU 3000 Ultra Zero Air generator 3,000 ml/min 5766 ZAU 6000 Ultra Zero Air generator 6,000 ml/min 5767 ZAU Ultra Zero Air generator 15,000 ml/min 5768 ZAU Ultra Zero Air generator 30,000 ml/min 5769 Certification: compliant Maintenance/options ZA-FILT Replacement ext. air filter, housing and element 5770 ZA-XCART Replacement cartridge for external air filter 5771 ZA-ICART Replacement cartridge for internal air filter 5772 ZA-ACC-6 Active carbon column for models l/min 5987 ZA-ACC-30 Active carbon column for models l/min 5988

193 HiQ Ultra Zero Air generator. HiQ Ultra Zero Air generator in principal. Catalytic converter 480 C Filter NO x remover Cooler Ultra Zero Air outlet Air inlet CO 2 /CO/H 2 O remover Filter

194 HiQ specialty gas generators. Zero Air generator with integral compressor. Pure air is commonly used in the chromatographic world mainly as fuel for flames in detectors such as Flame Ionization Detectors (FIDs) and Flame Photometric Detectors (FPDs). The pure air can be delivered in classic gas cylinders or be produced on site. Designed with safety and convenience in mind, this system will generate purified and hydrocarbon-free air without the need of connecting to an external compressor. The Linde NGC Zero Air generators reduce hydro carbon pollutants to less than 0.1ppm and remove all kinds of particles. In the lab, they provide several advantages. Eliminating the need to use and store high-purity air in cylinders saves valuable laboratory floor space. There is no need to continually buy replacement high-purity air in cylinders. Using an onsite gas generator also eliminates the need to recalibrate instruments after replacing empty cylinders with full ones. The operation of the generator requires low levels of electrical power. This complete turnkey system is engineered with the highest quality components, is easy to install, and requires only minimal annual maintenance. The NGC Zero Air generator models utilize a 3-stage process to purify ambient air into analytical grade air. All main components are manufactured with high-grade stainless steel and installed systematically in cabinets for easy access and service. Product features: Compact size requires minimal space Wall-mountable Built-in security lock on external housing Green, yellow and red indicating lights indicate power, warm-up, ready and fault notification of low/high catalyst temperature, low/high inlet pressure, and life expectancy/expiration of catalyst Technical data Max outlet flow 2.5 l/min Max outlet pressure 5 bar 73 psi Product outlet purity Hydrocarbons < 0.1 ppm Carbon monoxide < 0.1 ppm Particles (>0.5 micron removed) 99.99% Max inlet impurities Hydrocarbons 100 ppm Carbon monoxide 50 ppm Outlet connection ⅛ NPT Outlet air temperature (ambient) +15 C +59 F Max inlet temperature 40 C 104 F Dimensions (W/D/H) 47/25/40 cm 18/10/16 Weight 17 kg 37.5 lbs Certification: compliant Model Description HiQ code NGC 2500 Zero Air generator with integral compressor 6009 Maintenance NGC-AM Annual maintenance kit 6010 ZA-ACC-6 Active carbon column 5987

195 HiQ Zero Air generator with compressor. HiQ Zero Air generator with integral compressor in principal. Air compressor Catalytic Converter 480 C Filter Cooler Cooler Filter Zero air outlet Condensor

196 HiQ specialty gas generators. The Zero Air series. Pure air is commonly used in the chromatographic world mainly as fuel for flames in detectors such as Flame Ionization Detectors (FIDs) and Flame Photometric Detectors (FPDs). The pure air can be delivered in classic gas cylinders or be produced on site from oil-free compressed air. Designed with safety and convenience in mind, this system will generate purified and hydrocarbon-free air from an existing in-house oilfree compressed air supply. The Linde ZAGC Zero Air generators reduce HC pollutants to less than 0.1 ppm and remove all kinds of particles. In the lab, they provide several advantages. Eliminating the need to use and store high-purity air in cylinders saves valuable laboratory floor space. There is no need to continually buy replacement high-purity air in cylinders. Using an on-site gas generator also eliminates the need to recalibrate instruments after replacing empty cylinders with full ones. The operation of the generator requires low levels of electrical power. This complete turnkey system is engineered with the highest quality components, is easy to install, and requires only minimal annual maintenance. The ZAGC Zero Air generator models utilize a 3-stage process to purify ambient air into analytical grade air. All main components are manufactured with high-grade stainless steel and installed systematically in cabinets for easy access and service. Product features: Compact size requires minimal space Wall-mountable Built-in security lock on external housing Green, yellow and red indicating lights indicate power, warm-up, ready and fault notification of low/high catalyst temperature, low/high inlet pressure, and life expectancy/expiration of catalyst A digital thermal switch automatically shuts off the power supply to the catalyst in the event that the inlet compressed air is turned off, preventing catalyst damage due to overheating Technical data Max outlet flow 1.5; 3.0; 6.0; 15; 30 l/min Max outlet pressure 6.5 bar 94 psi Inlet air pressure range 3 10 bar psi Product outlet purity Hydrocarbons < 0.1 ppm Carbon monoxide < 0.1 ppm Particles (>0.5 micron removed) 99.99% Max inlet impurities Hydrocarbons 100 ppm Carbon monoxide 100 ppm Connections (compr. fitting) Out = ⅛ In = ¼ Outlet air temperature (ambient) +15 C 59 F Max inlet temperature 40 C 104 F Dimensions (W/D/H) 47/25/40 cm 18/10/16 Weights ZAGC 1500/ kg 29 lbs ZAGC kg 33 lbs ZAGC 15000/ kg 49 lbs Certification: compliant Model Description HiQ code ZAGC 1500 Zero Air generator 1,500 ml/min 5760 ZAGC 3000 Zero Air generator 3,000 ml/min 5761 ZAGC 6000 Zero Air generator 6,000 ml/min 5762 ZAGC Zero Air generator 15,000 ml/min 5763 ZAGC Zero Air generator 30,000 ml/min 5764 Maintenance/options ZA-FILT Replacement ext. air filter, housing and element 5770 ZA-XCART Replacement cartridge for external air filter 5771 ZA-ICART Replacement cartridge for internal air filter 5772 ZA-ACC-6 Active carbon column for models l/min 5987 ZA-ACC-30 Active carbon column for models l/min 5988

197 HiQ Zero Air generator. HiQ Zero Air generator in principal. Catalytic Converter 480 C Filter Filter Zero air outlet Air inlet Cooler

198

199 Portable gas solutions. In today s industry, a broad range of gases and chemicals are used. Especially at the chemical, pharmaceutical and biotech customers, a wide range of products is consumed. Many of them are used as a starting point for chemical synthesis. Others are used as intermediate product bringing building blocks or might be used to catalyst in chemical reactions. Most processes and synthesis are first developed and tested on a lab scale. After proven success, up-scaling is made by a pilot scale before it is produced on industrial scale. Both for the lab scale as well as for the pilot scale, smaller amounts of gases and chemicals are used. These gases have often toxic or hazardous properties, which require detailed knowledge regarding storage, user conditions, waste handling etc., both at the customers as well as at the supplier. Normally, these products are supplied in high pressure or disposable gas cylinders. Dependent on the consumption and the requested mobility, the size of the cylinder might vary from 0.4 up to 10 liter water content. Mostly, only very small amounts of product are needed. Therefore, the smallest cylinder size available (1 litre or less) contains normally more than sufficient product. With the Linde product line of small cylinders we offer total solutions wherever light container weight or only very small quantities of gas is required. The product family: ECOCYL RSH portable calibration gas cylinder with integrated regulator ECOCYL VAH-E/VSH-E portable chemical gas cylinder with integrated flow valve Most suitable standard gases and gas mixtures are available in small cylinders from current production at short notice. To save both time and expense, they are often shipped directly from supplying plant or where and when permissible, by mail. For you to find out what applies in your market contact your local Linde representative.

200 ECOCYL RSH. Portable gas cylinder with integrated pressure regulator and flow valve. ECOCYL RSH is the ultimate in safety, convenience and economics in portable calibration gas containers and delivery systems. The integrated valve, regulator and flow meter is protected by a tough cowling made of polyacetal material. The refillable high capacity cylinder holds 50% more product than most disposables, making the ECOCYL RSH system an environmentally as well as economically unsurpassed alternative. The ECOCYL RSH units are suited for non-corrosive pure gases as well as gas mixtures that contain non-corrosive as well as corrosive components. The ECOCYL RSH units are not suited for pure oxygen, oxidizing gases or oxidizing gas mixtures as well as liquefied flammable gases. The ECOCYL RSH can also be delivered with a convenient shoulder strap. For full program and additional information of this supply solution, please contact your local Linde representative. Technical data Max filling pressure 150 bar 2,200 psi Outlet pressure 3.8 bar 55 psi Outlet flow (fixed) 0.25, 0.3, 0.5, 1.0, 1.5, 2.5, 8.0 LPM Outlet gauge range bar 0 3,000 psi Outlet connection 6 and 8 mm hose connection Operating temperature C F Cylinder volume 1 l Weight (empty) 2.4 kg 5.3 lb Diameter (max) 9.5 cm 3.7 Height (overall) 44 cm 17 Material Cylinder Aluminum Housing Stainless steel and aluminum Seals Viton Piston Brass Seating PCTFE

201 ECOCYL RSH

202 ECOCYL VAH and ECOCYL VSH. Portable chemical gas cylinder with integrated flow valve. Linde has developed a unique, small, refillable cylinder equipped with an integrated cylinder valve that has direct flow regulating capabilities. The unique design of the valve allows direct accurate flow adjustment without an additional flow regulator. This special is fully integrated into the cylinder s protection cap. The result is a safe, easy and ready-to-use system. The user only needs to open the cylinder valve until the required flow has been reached. The ECOCYL VAH and ECOCYL VSH can also be delivered with a convenient shoulder strap. ECOCYL VAH is basically suited for all acid gases where the model ECOCYL VSH is suited for alkaline related gases. Both of them are suited for most remaining gases, including those with an oxidizing potential. With the ECOCYL VAH and ECOCYL VSH, Linde covers the business area of truly portable cylinders with integrated equipment, fully protected by a proper cylinder cowling. The special regulating valves as used in Linde s ECOCYL VAH and ECOCYL VSH must be tested like normal cylinder valves, according EN-ISO 10297, to comply with the transportable pressure equipment directive (TPED, European Council directive 1999/36/EC). Approved units are signed with the Greek letter Π (pi), often followed by 4 digits. For full program and additional information of this supply solution, please contact your local Linde representative. Technical data Max filling pressure 150 bar 2,200 psi Max outlet pressure 150 bar 2,200 psi Outlet flow variable and adjustable by the main valve, gas dependent Outlet connection 6 and 8 mm hose connection Operating temperature C F Cylinder volume 1 l Weight (empty) 2.9 kg 6.4 lb Diameter (max) 9.5 cm 3.7 Height (overall) 39 cm 15.4 Material Cylinder Seemless stainless steel Housing VAH Aluminum silicon bronze Housing VSH Stainless steel Seals VAH SIMRIZ VSH EPDM Needle VAH SS 316 VSH NITRONIC 50

203 ECOCYL VAH

204

205 Cylinder types. Gas cylinders are pressure vessels, and therefore governed by local authority rules and regulations. For full information, please contact your local Linde representative. Seamless high-pressure cylinders, of steel or aluminum, are used for compressed gases or liquefied gases under pressure whose critical temperature is TC <70 C. Cylinder bundles Cylinder bundles are larger transport units consisting of 10 to 16 high-pressure cylinders fixed in a steel frame and connected by pipes. Gas filling and withdrawal is done through one common valve. A trailer contains of a large number of firmly mounted cylinders on a coach. Welded low-pressure cylinders, of sheet steel, are used for liquefied gases under pressure whose TC 70 C when this is permitted. Welded steel casks are also available for these gases. They are clamped in a steel frame and may be transported by road. Returnable cylinders Following is a selection of different returnable cylinders that Linde Gas can provide. For precise information on what is valid for your market, contact your local Linde representative.

206 Cylinder types. Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 0.4 NS HD NS LB NS LBS AL A AL AL TS HD/S TS OTC AL OTM NS LBR NS 02C AL AL TS B AL B02A TS HD AL HD/S AL OTM TS OTC TS NS GFL TS OTC SG L TS AL AC NS GFL NS SC TS AG AL AL TS B AL B05A AL BALU TS OTC AL OTM TS ST TS T SG A AL 3AL SG ND NS DOT3A TS NS IRAM AL A TS HD/A SS ND/S AL AL NS GFL NS HD/K

207 Material AL: aluminum NS: steel with minimum yield point of 390 N/mm 2 SG: sheet steel, welded SS: stainless steel TS: temper hardened steel Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 10.0 TS AG TS AL TS B AL B10A TS BACE AL BALU TS HD AL HD/S SS HD/S TS OTC AL OTM TS ST TS B13, SG P AL B15A NS DOT3AA TS AL A TS HD/A SS ND/S AL 3AL NS GFL TS AG AL AL AL AL020HO TS B AL B20A TS B20MB AL B2ALU TS BACE TS OTC AL OTM TS ST TS T TS T20MB NS 3AL SG L NS AC SG DG-ETNº SG P TS B26, TS OTC SG ND AL 3AL SG P AL AL

208 Cylinder types. Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 31.0 AL A SG A TS HD/A NS AC NS HD/K TS HD/S NS SC NS ST TS B TS BACE TS GFL AL HD/S SS HD/S TS IN TS IRAM TS OTC AL OTM TS TW TS B TS SG L AL E NS SC NS 3AA TS SG P TS SS ND/S NS 3AA TS SG R50H SG A SG ACET SG L SS ND/S NS 3AA TS AG AL AL TS B AL B50A TS B50MB AL BALU TS BS/5045/ TS GFL TS HD TS IRAM

209 Material AL: aluminum NS: steel with minimum yield point of 390 N/mm 2 SG: sheet steel, welded SS: stainless steel TS: temper hardened steel Int. volume Tare weight Pressure rating Material Type litre kg lb bar(a) psi(g) HiQ code 50.0 TS OTC AL OTM TS SC TS SC TS ST AL B50C TS HD/S TS OTC SG SG CS56-Acet SG SG L TS B SG ND SG P SG B SG R20H SG P SG L SG DOT4BW SG SG D SG SG VGL SG R20MP SS VGL SG DOT 4L TS Maxi TS SG DOT4BW SG AL BL/E/S AL BL/M/S TS PKT-10x50L SG CP6MP TS BL/M TS PKT-12x50S TS BL/E/S AL PAK13X SG TS PAK16X TS SuperMaxi TS F Note that low pressure cylinders are often filled by weight and therefore the internal volume and work pressure is not an indication of filling volume.

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211 Equipment connections, tubings and fittings. Cylinder valves & inlet connections. The purpose of the cylinder valve is to open and shut the gas cylinder, it is not meant to regulate the gas flow. The cylinder valve is normally made of brass, unless the chemical properties of the gas demands another material such as steel or stainless steel. The valve can be equipped with a dip tube for withdrawal of liquid phase from liquefied gases. For certain liquefied gases the valve is equipped with a burst disk for safety. Diaphragm valves are used for high purity gases and specialty gas mixtures with low component contents of for example reactive components. Cylinder valves for highly reactive and toxic gases are in some countries equipped with a safety valve. This kind of valve normally has an incorporated flow restrictor. Certain cylinder valves are equipped with pneumatic function to operate them, explosion safe, from a distance. To avoid gas cylinder being connected to the wrong gas supply system, the cylinder valves are equipped with different outlet threads, depending on the gas content of the cylinder. The rules deciding what threads go with what gas are governed by local authorities, and differ from country to country. On the following 4 pages some of the most common cylinder valve outlets are described. The term INT refers to internal outlet threads of the cylinder connection, if not stated the thread is external. The term LH refers to left-handed threads, if not stated the thread is right-handed. The chemical properties of the gas govern what cylinder valve material brass, steel or stainless steel is most suitable. Diaphragm Outlet thread Washer Outlet thread Diaphragm valve Washer valve

212 Inlet connections. Cylinder connections ABNT AFNOR C ABNT Description HiQ inlet code ABNT /8-18 NSPL 043 ABNT hand connector 3/8-18 NSPL 122 ABNT W 21.8 x 1/14" 045 ABNT hand connector W 21.8 x 1/14" 123 ABNT W 21.8 x 1/14" INT 050 ABNT hand connector W 21.8 x 1/14" INT 124 ABNT " - 14 NGO 046 ABNT hand connector 0.885" - 14 NGO 125 ABNT " - 14 NGO 044 ABNT hand connector 0.960" - 14 NGO 126 ABNT " - 14 NGO 049 ABNT hand connector 0.965" - 14 NGO 127 ABNT " - 14 NGO 048 ABNT hand connector 1.035" - 14 NGO 128 ABNT W x 2" 047 ABNT hand connector W x 2" 129 ABNT W x 2" 051 ABNT hand connector W x 2" 130 AFNOR Description HiQ inlet code NF C SI 21.7 x NF C hand connector SI 21.7 x NF D W 24 x NF D hand connector W 24 x NF E SI 21.7 x LH 057 NF E hand connector SI 21.7 x LH 159 NF F SI x INT 059 NF F hand connector SI x INT 160 NF G SI 26 x 1.5 INT 060 NF G hand connector SI 26 x 1.5 INT 161 NF H W x LH INT 061 NF H hand connector W x LH INT 162 NF J W 25.4 x NF J hand connector W 25.4 x NF K W 27 x NF K hand connector W 27 x NF L W 27 x NF L hand connector W 27 x NF M W 30 x NF M hand connector W 30 x NF P W 27 x NF P hand connector W 27 x 2 167

213 Cylinder connections BS 341 No. 8 CGA 170 BS 341 Description HiQ inlet code BS 341 No. 2 G 5/8" LH 179 BS 341 No. 2 hand connector G 5/8" LH 180 BS 341 No. 3 G 5/8" INT 181 BS 341 No. 3 hand connector G 5/8" INT 182 BS 341 No. 4 G 5/8" LH INT 183 BS 341 No. 4 hand connector G 5/8" LH INT 184 BS 341 No. 6 G 5/8" 185 BS 341 No. 6 hand connector G 5/8" 186 BS 341 No. 7 G 5/8" LH 187 BS 341 No. 7 hand connector G 5/8" LH 188 BS 341 No. 8 W 0.860" x 14 TPI 189 BS 341 No. 8 hand connector W 0.860" x 14 TPI 190 BS 341 No. 10 G 1/2" 191 BS 341 No. 10 hand connector G 1/2" 192 BS 341 No. 12 G 1/2" 199 BS 341 No. 12 hand connector G 1/2" 200 BS 341 No. 13 W 11/16" - 20 TPI 193 BS 341 No. 13 hand connector W 11/16" - 20 TPI 194 BS 341 No. 14 G 3/8" 195 BS 341 No. 14 hand connector G 3/8" 196 BS 341 No. 15 G 3/8" LH 197 BS 341 No. 15 hand connector G 3/8" LH 198 CGA Description HiQ inlet code CGA UNEF INT 019 CGA 110 hand connector UNEF INT 014 CGA 170 9/16" - 18 UNF INT 201 CGA 170 hand connector 9/16" - 18 UNF INT 202 CGA 180 5/8" - 18 UNF INT 021 CGA 180 hand connector 5/8" - 18 UNF INT 020 CGA 240 3/8" - 18 NPT 024 CGA 240 hand connector 3/8" - 18 NPT 072 CGA " - 14 UNS INT 203 CGA 296 hand connector 0.803" - 14 UNS INT 204 CGA " - 14 NGO 205 CGA 300 hand connector 0.825" - 14 NGO 206 CGA " - 14 NGO 077 CGA 320 hand connector 0.825" - 14 NGO 028 CGA " - 14 NGO 026 CGA 326 hand connector 0.825" - 14 NGO 131 CGA " - 14 NGO LH 016 CGA 330 hand connector 0.825" - 14 NGO LH 132 CGA " - 14 NGO 176 CGA 346 hand connector 0.825" - 14 NGO 177 CGA " - 14 NGO LH 013 CGA 350 hand connector 0.825" - 14 NGO LH 133 CGA " - 14 NGO LH INT 002 CGA 510 hand connector 0.855" - 14 NGO LH INT 134 CGA " - 14 NGO 078 CGA 540 hand connector 0.903" - 14 NGO 135 CGA " - 14 NGO INT 052 CGA 580 hand connector 0.965" - 14 NGO INT 136 CGA " - 14 NGO LM INT 017 CGA 590 hand connector 0.965" - 14 NGO LM INT 137 CGA " - 14 NGO 018 CGA 660 hand connector 1.030" - 14 NGO 138 CGA " - 14 NGO LH 207 CGA 679 hand connector 1.030" - 14 NGO LH 208 CGA " - 14 UNS LH 178

214 Inlet connections. Cylinder connections DIN 477 No. 14 IRAM 2539 o DIN 477 Description HiQ inlet code DIN 477 No. 1 W 21.8 x 1/14" LH 001 DIN 477 No. 1 hand connector W 21.8 x 1/14" LH 140 DIN 477 No. 2 W 21.8 x 1/14" LH 209 DIN 477 No. 2 hand connector W 21.8 x 1/14" LH 210 DIN 477 No. 3 Yoke 095 DIN 477 No. 3 hand connector Yoke 147 DIN 477 No. 5 W 1" x 1/8" LH 003 DIN 477 No. 5 hand connector W 1" x 1/8" LH 148 DIN 477 No. 6 W 21.8 x 1/14" 004 DIN 477 No. 6 hand connector W 21.8 x 1/14" 149 DIN 477 No. 7 G 5/8" 005 DIN 477 No. 7 hand connector G 5/8" 151 DIN 477 No. 8 W 1" x 1/8" 006 DIN 477 No. 8 hand connector W 1" x 1/8" 152 DIN 477 No. 9 G 3/4" 007 DIN 477 No. 9 hand connector G 3/4" 153 DIN 477 No. 10 W x 1/14" 008 DIN 477 No. 10 hand connector W x 1/14" 142 DIN 477 No. 11 G 3/8" 009 DIN 477 No. 11 hand connector G 3/8" 143 DIN 477 No. 12 G 3/4" INT 010 DIN 477 No. 12 hand connector G 3/4" INT 144 DIN 477 No. 13 R 5/8" 011 DIN 477 No. 13 hand connector R 5/8" 145 DIN 477 No. 14 M 19 x 1.5 LH 012 DIN 477 No. 14 hand connector M 19 x 1.5 LH 146 DIN 477 No. 52 M 30 x 1.5 INT 211 IRAM 2539 Description HiQ inlet code IRAM 2539i 5/8" BSP - INT 053 IRAM 2539i hand connector 5/8" BSP - INT 154 IRAM 2539 C2H2 3/4" BSPx1/14" INT 096 IRAM 2539 N2O 3/8" BSPx1/14" 097 IRAM 2539 N2O hand connector 3/8" BSPx1/14" 155 IRAM 2539 o W IRAM 2539 o hand connector W ISO 5145 Description HiQ inlet code ISO 5145 No M 30 x 2 212

215 Cylinder connections 3-MIE C NEN 3268 LU1 3 - MIE - AP7 Description HiQ inlet code MIE B M 30 x MIE B hand connector M 30 x MIE C W 21.7 x 1/14" 223 MIE C hand connector W 21.7 x 1/14" 224 MIE E W 21.7 x 1/14" LH 225 MIE E hand connector W 21.7 x 1/14" LH 226 MIE F G 5/8" INT 227 MIE F hand connector G 5/8" INT 228 MIE G M 26 x 1.5 INT 083 MIE G hand connector M 26 x 1.5 INT 175 MIE H G 5/8" LH INT 229 MIE H hand connector G 5/8" LH INT 230 MIE J W 1" 231 MIE J hand connector W 1" 232 MIE M M 19 x 1.5 LH 233 MIE M hand connector M 19 x 1.5 LH 234 MIE S G 5/8" 235 MIE S hand connector G 5/8" 236 MIE T W x 1/7" 237 MIE T hand connector W x 1/7" 238 MIE U G 3/8" 239 MIE U hand connector G 3/8" 240 NEN 3268 Description HiQ inlet code LU 0 M 19 x 1.5 LH 115 LU 0 hand connector M 19 x 1.5 LH 168 LU 1 W /14 LH 116 LU 1 hand connector W /14 LH 169 LU 4 W 1" LH 117 LU 4 hand connector W 1" LH 170 RI 2 G 5/8" INT 121 RI 2 hand connector G 5/8" INT 171 RU 1 W / RU 1 hand connector W / RU 3 W / RU 3 hand connector W / RU 4 W 1" 120 RU 4 hand connector W 1" 174 UNI 4406 UNI Description HiQ inlet code UNI 4405 W 20 x 1/14" Sin. 213 UNI 4405 hand connector W 20 x 1/14" Sin. 214 UNI 4406 W 21.7 x 1/14" 215 UNI 4406 hand connector W 21.7 x 1/14" 216 UNI 4409 W 21.7 x 1/14" 217 UNI 4409 hand connector W 21.7 x 1/14" 218 UNI 4412 W 24.5 x 1/14" 219 UNI 4412 hand connector W 24.5 x 1/14" 220

216 Outlet connections. Linde offers a wide range of outlet connections from the most well acknowledged manufacturers. The table below shows some of the most commonly used designs and dimensions. For special arrangements or needs, please contact your local Linde representative. Illustration showing a typical straight outlet connection (male NPT compression fitting). Outlet connections HiQ outlet code 3 mm, stainless steel mm, stainless steel mm, stainless steel mm, stainless steel mm, stainless steel 505 1/8, stainless steel 506 1/4, stainless steel 507 3/8, stainless steel 508 1/2, stainless steel mm, brass mm, brass mm, brass mm, brass mm, brass 514 1/8, brass 515 1/4, brass 516 3/8, brass 517 1/2, brass 518

217 Tubings. To ensure the integrity of the gas, from the gas cylinder to the point of use, stainless steel tubing is used when installing a central gas supply system for specialty and high purity gases. Linde uses AISI 316L SS tubes according to EN and ASTM A 269 in three different quality classes. Quality level class 1 class 2 class 3 Surface finish Ra 0.2 µm certified Ra 0.4 µm certified Ra 1.0 µm Electro polish Yes Cleaning Plug shooting Purging Testing Plugged and packed Flushing with water 80 C 18MΩ/cm Moisture analysis, particle measurement Ends sealed with nylon film and PE caps. Packed in double plastic bags in class 10/100 clean room. Flushing with 0.5 MΩ/cm water at room temperature Detector nitrogen 5.5 with µm filter Flushing with 0.5 MΩ/cm water at room temperature Ends protected with PE caps. Packed in plastic bags. Ends protected with PE caps. Packed in plastic bags. Fittings. For joining various parts and components to the central gas supply system Linde recommends the use of high quality fittings. For systems up to a purity of 5.5 Linde recommends tube fittings (e.g. Parker A- LOK, Swagelok or Gyrolok ). These fittings avoids any extra torque on the piping. For systems above a purity of 5.5 Linde recommends the use of metal gasket face seal fittings (e.g. VCRR), which enables a tightness equivalent to 10-9 cm 3 He/s. The seal of a metal gasket face seal is made when the gasket is compressed by two polished beads when the fitting is tightened. A metal gasket face seal can not be disassembled and reassembled without replacing the metal gasket.

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219 Accessories. To handle gases and gas cylinders, one need from time to time some additional items. Some of these items are found in this chapter. Please contact your local Linde representative for your full local accessories program.

220 Centralized monitoring systems. Monitoring systems can be divided into two components: data collectors, such as contact gauges and pressure transducers, and data presenters, such as a centralized monitoring system. Data collectors can work without data presenters, but not vice versa. The alarm system works as an automatic pressure supervisor. the system is EEx(i)-classified according to EN , and consists of a central unit, an EEx(e) classified alarm box, an extension box, if necessary, and 1 8 contact gauges. Historically, contact gauges connected to a centralized monitoring system have been dominant, but the use of transducers connected to a PLC-system is becoming increasingly common. Linde has wide experience of working with contact gauges and centralized monitoring systems. The central unit is placed outside the potentially explosive zone. The unit incorporates an electronic device that indicates low pressure in the connected gas cylinders. At low pressure a buzzer signal sound and a light diode is activated. The alarm box is placed inside the potentially explosive zone. The alarm incorporates an EExe-classified sealing, with an amplifier for the intrinsic safe signal. The central unit is connected to the alarm box by a 12-connector cable. The cable supplies the signal amplifier with 24 VDC, and carries the signal from alarm and contact gauge to the central unit. There may be an extension box between the alarm box and the contact gauge, to make it possible to place several gas cylinders at different distances from the alarm box inside the potentially explosive zone. The system can be expanded by up to three extra channels. Technical data Size (W/H/D) 213/185/113 mm Material Casing ABS plastic Cover Clear polycarbonate Supply voltage 230 V, 50 Hz Supply current 0.5 A Channels 1 (expandable to max. 4) Indication lights Green Normal pressure Red Low pressure/switch-over Product name HiQ code Central monitoring system kit 3389

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222 Contact gauges & Pressure transducers. Contact gauges are used to monitor when a pre-set pressure is reached. These can be delivered EEx-classified. Pressure transducers monitor changes in pressure and can be used in place of contact gauges necessary if the signal must be connected to a central computer or a PLC. The high output current (4 20 ma) may require the transducer to be isolated if used in an explosive environment. Product name HiQ code Technical data Contact gauge Contact gauge 3391 Pressure transducer 6012 Accuracy 2.5% of max pressure Hysteresis 2.5% of max pressure Electrical Voltage 24 V Current 500 ma Operating temperatures Ambient C F Media C F Connection G ¼ Pressure range 0 25 bar psi 0 60 bar psi bar 0 3,600 psi Connection NPT ¼ Pressure range 0 16 bar psi 0 60 bar psi bar 0 3,600 psi

223 Contact gauge Pressure transducer

224 Mounting bracket. Primarily for use with the BASELINE R 104/1 line regulator (page 126). Product name HiQ code Technical data Mounting bracket 6011 Material Stainless steel

225 Mounting bracket All measurements in millimeters.

226 Wall mounting bracket & gas cylinder trolley. Linde delivers a selection of practical wall mounting brackets and cylinder trolleys for different needs. These might vary depending on your local market. Please contact your local Linde representative for more information.

227 Wall mounting bracket for gas cylinders Gas cylinder trolley

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229 HiQ Gas Supply System Installations. The success of an installation project lies very much in the planning of the project. There are many details that have to fall in place to minimize the project time and make it successful. Linde have prepared some checklists to aid in planning a gas supply system installation projects. They are meant to simplify and make sure that everything is covered during an installation.

230 HiQ Gas Supply System Installations. Checklist. Checklist Supply Checklist Piping Checklist Miscellaneous Gas Type of gas and gas quality Pressure: Gas panel Main piping system, standard bar In- and outlet pressure to pointof-use regulator Flow: Each point-of-use regulator Total system Storage Preferably in a separate building or container Different kinds of gases shall be separated Heating of storage area Electrical installation Checklist Equipment Point-of-use Type of regulator etc Material Inlet connection Outlet connection Safety outlet Gas panel Single or semi-automatic Material Contact gauges/pressure transducers Purging system Number of cylinders Inlet connection Outlet connection Outlet pressure Flow shut-off valve Safety outlet Tubing Quality Dimensions Number of welding fittings, reducers, elbows, tees Valves Material Main shut off valve Section shut off valve Relief valves etc Check valves Other equipment Filters Purifiers Monitoring central Gas cabinets Gas detection units Checklist Installation Installation material Tube clamps Mark tags and signs Welding gas Purge gas Pressure test gas Leak detection gas Installation items New or existing building Making holes in walls, floors and ceilings Electric installation Patch up and painting after installation Fireproof sealing of holes Need of skylift etc. Lockable storage room Safety outlet tube Pressure test Leak test Miscellaneous Inactive time Travelling cost Hotel Allowance for expenses Training Drawings and documentation Operating instructions Limit of engagement Labor management Service Guarantee

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233 Services. Linde delivers a variety of services, both customer-specific and standardized. Below is some information on different services. The service portfolio is often based on the local demand and customer specific ideas and requirements; therefore you should contact your local Linde representative to receive all information about the full portfolio for your market and about solutions specifically designed for your needs. Please also contact your local Linde office if you have ideas on services not covered here. ebusiness and web ordering Wouldn t you like more timesaving tools to help do your job? Want to web order with real-time material availability and see your pricing? Need to know how much you spend on a blanket purchase order? How do you know if that credit was given or not? Has your company decided to place orders through a marketplace or other procurement solution? Do you know your present cylinder balance? With Linde you can do these things and many other things whenever you want. We at Linde have listened to our customers and offer them access to the features and capabilities most desired. Various ebusiness tools and systems have been implemented throughout the Linde world, to more efficiently conduct your business and provide service. In most cases, these business tools have been directly integrated with the local business systems to improve speed, accuracy and convenience. Online ordering is available on many Linde markets. Online ordering is available for customers who register for access. With registration, one or more users at each company are authorized to be the web administrator. Buyers using the web ordering get so many advantages: Pre-loaded past purchase history organized into modifiable reorder templates. Reorder in less than 1 minute from old orders or reorder template. Pre-negotiated prices and payment terms are used and shown. Material availability shown before placing order, when applicable. Add items from online catalog to an order. Delivery instructions specific to the ship-to location are shown. Automatic confirmation with complete order details. Many Linde companies can offer a variety of ebusiness tools, to find out what is applicable for you, please contact your local Linde representative.

234 Services. ACCURA The new real-time ACCURA Cylinder Management system takes the benefits of cylinder monitoring even further, bringing them to you over the Internet! A new tool for cylinder gas management in your company ACCURA Cylinder Management collects cylinder gas data in a format that your company can easily manage and utilize. It s a system that can save your company thousands maybe tens of thousands of euros per year. ACCURA Cylinder Management operates via the Internet, and it s a tool designed for anyone who needs to know what types of gases they have in stock, where gas cylinders are located and also how to develop cylinder procedures. The service is planned in co-operation with the customer, and is tailored to the company s operating model. This ensures that it serves all departments - Stock, Production and Safety as well as Purchasing and Finance. Effective risk management One of the major benefits of ACCURA Cylinder Management is that it will remind and inform you. If you wish, the system will monitor uninterrupted gas availability for you. With access to real-time information for all your stock, you can plan for variations in gas consumption and ensure your processes operate without interruption. In emergency situations e.g., in the event of a fire, Cylinder Management will tell you the location of your cylinders as well as cylinder numbers. Benefits of Cylinder Management Gas cylinders are used effectively, which saves money Gas consumption budgeting and planning is improved Cost reporting and internal allocation is easier Invoice checking and processing is faster Cylinder Management will warn you of any expiring gases Clear, versatile reports Gas in stock Cylinder movement history Gas utilization Gas consumption Gas and rental costs Gas costs split per warehouse Cylinder rotation Daily rental costs Rental agreements Expiring gases Hazardous gases SECCURA Consider these questions: Have you ever experienced running out of gas because the person responsible for checking and ordering simply forgot to do so? Or failed to do it because of some misunderstanding or mix-up? If the gas you re dependent on suddenly ran out, what problems would it create for your company, and your customers? Increased production reliability a real value SECCURA automatic gas supply is a supply service that allows you to forget completely how much gas you have at any given time. As the name indicates, this service runs automatically. When a cylinder or a bundle is empty and needs changing, an automatic ordering signal is sent directly to Linde. We will see that replacements are installed. Your staff won t even have to know it has been done. Reducing unnecessary costs saving real money SECCURA automatic gas supply completely eliminates the need to check, order, and replace gas cylinders and bundles. In most cases it also eliminates the need to keep extra cylinders in stock just in case. Increased convenience a true value SECCURA automatic gas supply lightens your load by effectively removing the cause of worry and increasing your convenience. This service from Linde allows you to spend your resources where they are most needed. And leaves you free to focus your energy on production. Hardly a luxury

235 Increased safety an invaluable value SECCURA automatic gas supply means that our trained drivers do all the tasks involved with the changing of cylinders and bundles, including testing for leaks and changing gaskets when required. They do it every day and they do it right. Your staff is not concerned and the task does not interfere with their safety in any way. Safety audits, walkthroughs and trainings Concerned about the safety of your existing specialty gas distribution system? Wondering if your system is designed and operated in accordance with today s standards? Linde can help. Conduct safety audits and plant walkthroughs Linde can perform a complete safety assessment of your existing gas system. We will review the overall system s design, evaluate your associated operating procedures and training program, evaluate mitigation and containment systems, and review maintenance practice. We provide both recommendations for system improvements and identify areas that are out of compliance with applicable safety codes. Specialty gas safety training In order to increase safety, reduce downtime, and to help prevent unwanted releases, Linde can offer custom designed specialty gas equipment/system trainings, often including: Product safety and equipment training Operator training, including theory of operation Maintenance training Regulatory compliance/site surveys Technical support Emergency response team On-Site support Application safety training Typically with a new process application, days of assistance for start-up and training are provided. This training would be onsite for plant personnel. Typical the training covers safety, maintenance and operation. Gas analysis service Linde gas is one of the largest gas suppliers in the world. As such we have a network of highly skilled laboratories to verify and secure the quality of our own production. These can of course be utilized for gas specific analysis services. The typical assignments are either investigations of a single gaseous source e.g., a smoke stack, or periodic measurement for companies that do not have or can justify the necessary instrument park. Many local Linde markets have access to mobile laboratory units that enable analysis at customer location. When this is impossible, our skilled chemists know all about gathering representative samples and bring them back to the laboratory. Here follows a selection of available analysis methods: Time-of-flight Atmospheric Pressure Ionization Mass Spectrometer to measure down to ppt range A variety of Gas Chromatographs equipped with general (WLD, TCD, HeID) and specific detectors (FID, ECD, Argon detector, Hall detector, Helium detector and Chemo luminescent detector) Chemo luminescent analyzer for NOX Gas chromatographs with cold trap technique to measure hydrocarbons in the ppb range Laser based particle analyzer High resolution FTIR with long path gas cuvette NDIR analyzers for different gases Moisture analyzers (dew point mirror and capacitive method) Pure oxygen analyzers (electrochemical and phosphor luminescent) UV/VIS spectrometry AES (Atomic emission spectrometry) To support our training programs, we develop applicable operating and maintenance procedures and student material. Courses can be structured as class room/instructor lead, selfstudy, and on-the-job. Linde also offers the additional services:

236 Services. HiQ analysis certificate Linde s gas production and laboratory facilities perform professional and skillful quality control and analysis of gas mixtures. It is of vital importance that the results are correct, since they often are the base for monitoring/measuring e.g., process conditions, quality levels and safety conditions. It is also important that all the information on the analysis certificate is correct and easy to understand. Linde always follows the latest update of the ISO 6141 standard, specifying the information on an analysis certificate. The HiQ Analysis Certificate from Linde is in accordance with this standard. The HiQ Analysis Certificate always looks the same. The information is easy to locate and understand. The headings are in the appropriate language and in English, allowing the certificate to be used both in the relevant country and across borders. All gas products are quality controlled. Where applicable, an analysis certificate is included in the product. If not included, it can be requested separately. Please check with your local Linde office to find out what is applicable for the products you order. Name HiQ code HiQ Analysis certificate (Certified standard) 2921 Explanations on the HiQ Analysis Certificate 1 The date when the certificate was written, the beginning of the shelf life 2 Identification of the HiQ Certificate 3 Type of HiQ certificate e.g., Certificate of Analysis, Certificate of Conformity, etc. 4 HiQ product name and code when applicable 5 Comments on the table the unit can be given either in mole, volume or weight the uncertainty refers to the analysis of each component and is relative if an absolute uncertainty is given it is In the column Analysis result (for instance 202 ± 4 ppm) 6 Confidence level is the probability of the analysis result falling between the uncertainty limits 7 The blend tolerance of a gas mixture specifies how close to the ordered concentration the final concentration must fall 8 Following the temperature recommendation improves safety and helps to keep the gas mixture homogeneous 9 The component concentrations will remain within the limits stated in the analysis result down to the recommended minimum pressure of use 10 Use before: In a correctly handled cylinder the component concentrations will remain within the limits stated in the analysis result during the stated shelf life Reference material Calibration certificate National borders no longer define today s environment. Pollutions are monitored on regional and even global scale. This requires that the results from the monitoring systems shall not only be comparable, but also mutually acceptable. Governments use accreditation as an instrument in these regulatory issues. Also in trading of goods, a confident and trustful base is needed to qualify and quantify the value of the traded goods. Accreditation is widely accepted as a tool to address issues like competence and reliability. Calibration certificates are used as a base to facilitate easy trading. Reference material with a calibration certificate is analyzed at a laboratory that has accredited analysis methods for the components and ranges in question. Several Linde facilities have such accredited analysis methods, especially for components and ranges used for environmental surveillance. Linde laboratories are accredited as calibration laboratories. Further, several facilities are accredited as testing laboratories to facilitate analytical services. The reference materials prepared by these production facilities are acknowledged as standard reference material by e.g., CAI, COFRAC, DAR, ENAC, RVA, SWEDAC, UKAS and many others. These products are in accordance with ISO An accreditation proves that the laboratory is competent to perform a certain analysis. The competence of the laboratory is decisive for the accreditation, and to achieve an accreditation it is mandatory to have a qual-

237 ity system. Linde specialty gas plants are ISO 9000 certified. Please contact your local Linde office for more information on how Linde can serve you with reference material and services that are related to the ISO standard. Name HiQ code Certificate of calibration reference material (ISO 17025) 2920 Other reference material Reference materials and certified materials are defined in ISO Guide 30. A reference material (RM) is a material that is sufficiently established to be used, for example, for the calibration of an apparatus. A certified reference material (CRM) is a reference material whose property values are certified by a technically valid procedure and/or traceable to a certificate or other documentation that is issued by a certifying body. Industries such as the automotive industry are very dependent on clearing their products against local environmental legislation, for instance the rules of EPA in the US. EPA demands that calibration mixtures are traceable against National Institute for Standards and Technology (NIST). NIST and the Nederlands Meetinstituut (NMi) have a bilateral agreement on recognition of each other s mixtures that is ratified by EPA. Linde can supply you with products traceable to standards from various national certified bodies such as BAM, NMi, NPL and NIST. Most of Linde s mixtures are produced gravimetrical and are therefore traceable to the international kilo. Should this be one of your requirements and the product is not produced in this manner, traceability to the kilo can be obtained upon request. Please contact your local Linde office for more information on how Linde can provide you with reference material. Name HiQ code Certified body traceable analysis certificate (Traceable to e.g., BAM, NIST, NMi, NPL etc.) 2916 Kilogram traceable certificate (Primary standard) 2918 EPA protocol The EPA has established the EPA protocol strict guidelines for the performance of standard materials for emission measurements. In addition to the automotive industry standard product program EPA protocol mixtures, Linde can deliver EPA protocol gases for other purposes. Please contact your local Linde office for more information on how Linde can provide you with EPA protocol gases. Name HiQ code EPA protocol certificate 2919 Certificate of conformity Several processes and activities do not require individual analytical results. However, it might be important to guarantee that the product used complies with its nominal specifications. Linde can provide a certificate of conformity stating that an individual cylinder or an entire batch is meeting its specifications. Please contact your local Linde office for more information on how Linde can serve you with certificates of conformity. Name HiQ code Certificate of conformity 6322

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239 Physical data. Physical and chemical information on pure gases. The aim throughout has been to present in a condensed form as large amount of accurate, reliable and up-to-date information on the fields of chemistry and physics for pure gases. Chemistry and physics, always closely related sciences, have been brought into more intimate relations by more recent results and research discoveries. The information contained herein can be used for a variety of tasks such as recalculation between volume and weight at a fixed temperature.

240 Physical data. Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) kg/l Density (20 C) kg/l Vapor pressure (20 C) bar Specific heat kj kg -1 K -1 Acetylene C 2 H (15 C) Air, synthetic Ammonia NH ( 40 C) Argon Ar (b.p.) Arsine AsH Boron trichloride BCl Boron trifluoride BF ,3-Butadiene C 4 H (15 C) n-butane C 4 H (15 C) iso-butane C 4 H (15 C) 1-Butene C 4 H (15 C) cis-2-butene C 4 H iso-butene C 4 H (15 C) trans-2-butene C 4 H Carbon dioxide CO ( 20 C) Carbon monoxide CO (b.p.) Carbonyl sulfide COS Chlorine Cl (b.p.) Cyanogen chloride CNCl Cyclopropane C 3 H Deuterium D Diborane B 2 H Dichlorosilane SiH 2 Cl Dimethylamine (CH 3 ) 2 NH (0 C) Dimethyl ether C 2 H 6 O ,2-Dimethylpropane C 5 H Ethane C 2 H (15 C) Ethene C 2 H Ethylene oxide C 2 H 4 O Ethylamine C 2 H 5 NH Ethyl chloride C 2 H 5 Cl Fluorine F Helium He (b.p.) Hydrogen H (b.p.) Hydrogen bromide HBr (15 C) Hydrogen chloride HCl (b.p.) Hydrogen fluoride HF Hydrogen sulphide H 2 S (21 C) Krypton Kr Methane CH (b.p.) Methylamine CH 3 NH (-14 C) Methyl bromide CH 3 Br Methyl chloride CH 3 Cl (20 C) Methyl mercaptan CH 3 SH (b.p.) Neon Ne (b.p.) Nitric oxide NO (b.p.) Nitrogen N (b.p.) Nitrogen dioxide NO (b.p.) Nitrogen trifluoride NF Nitrous oxide N 2 O (b.p.)

241 Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) kg/l Density (20 C) kg/l Vapor pressure (20 C) bar Specific heat kj kg -1 K -1 Octafluoropropane C 3 F (b.p.) Oxygen O (b.p.) Phosgene COCl Phosphine PH Propadiene C 3 H Propane C 3 H (b.p.) Propene C 3 H (15 C) Propyne C 3 H R 11 Trichlorofluoromethane CFCl (30 C) R 12 Dichlorodifluoromethane CF 2 Cl (30 C) R 13 Chlorotrifluoromethane CF 3 Cl (-30 C) R 13 b1 Bromotrifluoromethane CF 3 Br (25 C) R 14 Tetrafluoromethane CF R 21 Dichlorofluoromethane CHFCl (b.p.) R 22 Chlorodifluoromethane CHF 2 Cl (30 C) R 23 Trifluoromethane CHF (25 C) R 114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F (30 C) R 115 Chloropentafluoroethane C 2 ClF (30 C) R 116 Hexafluoroethane C 2 F R 134a Tetraflouroethane C 2 H 2 F (15 C) R 142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF R 152a 1,1-Difluoroethane C 2 H 4 F Silane SiH Silicon tetrafluoride SiF Sulphur dioxide SO Sulphur hexafluoride SF (21 C) Trimethylamine (CH 3 ) 3 N Tungsten hexafluoride WF Vinyl bromide C 2 H 3 Br (15 C) Vinyl chloride C 2 H 3 Cl (20 C) Vinyl methyl ether C 3 H 6 O (0 C) Xenon Xe (b.p.)

242 Physical data. Gas name Rel. spec. wgt, air = 1 (15 C, 1 bar) Density (15 C, 1 atm) kg/m 3 Gaseous state Specific heat (15 C) kj kg -1 K -1 Thermal conductivity µw cm -1 K -1 Solubility in water (at P = 1 bar) l/kg Acetylene (0 C) (20 C) Air, synthetic (0 C) Ammonia (0 C) 692 (15 C) Argon (0 C) (20 C) Arsine (0 C) 0.20 (20 C) Boron trichloride (15 C) hydrolyzed Boron trifluoride (0 C) 1,3-Butadiene (0 C) (20 C) n-butane (0 C) (20 C) iso-butane (0 C) (20 C) 1-Butene (0 C) cis-2-butene (15 C) iso-butene (0 C) trans-2-butene (15 C) Carbon dioxide (0 C) (20 C) Carbon monoxide (0 C) (20 C) Carbonyl sulfide (0 C) Chlorine (0 C) 2.3 (20 C) Cyanogen chloride (15 C) Cyclopropane (0 C) Deuterium ,301 (0 C) Diborane (0 C) Dichlorosilane (15 C) hydrolyzed Dimethylamine (15 C) 119 (60 C) Dimethyl ether (0 C) 2,2-Dimethylpropane (15 C) Ethane (0 C) (20 C) Ethene (0 C) (20 C) Ethylene oxide (15 C) Ethylamine (20 C) 162 (20 C) Ethyl chloride (15 C) 1.99 (20 C) Fluorine (0 C) Helium ,460 (0 C) (20 C) Hydrogen ,606 (0 C) (20 C) Hydrogen bromide (0 C) 467 (25 C) Hydrogen chloride (0 C) 440 (20 C) Hydrogen fluoride (20 C) Hydrogen sulphide (0 C) 2.5 (20 C) Krypton (0 C) (20 C) Methane (0 C) (20 C) Methylamine (0 C) 757 (25 C) Methyl bromide (15 C) Methyl chloride (0 C) 3.4 (0 C) Methyl mercaptan (15 C) 11.2 (15 C) Neon (0 C) (20 C) Nitric oxide (0 C) (20 C) Nitrogen (0 C) (20 C) Nitrogen dioxide (25 C) hydrolyzed Nitrogen trifluoride (25 C) Nitrous oxide (0 C) (20 C)

243 Gas name Rel. spec. wgt, air = 1 (15 C, 1 bar) Density (15 C, 1 atm) kg/m 3 Gaseous state Specific heat (15 C) kj kg -1 K -1 Thermal conductivity µw cm -1 K -1 Solubility in water (at P = 1 bar) l/kg Octafluoropropane (0 C) Oxygen (0 C) (20 C) Phosgene (15 C) Phosphine (0 C) 1.16 (24 C) Propadiene (0 C) Propane (0 C) (20 C) Propene (0 C) (20 C) Propyne (0 C) R 11 Trichlorofluoromethane (25 C) 78 (25 C) (25 C) R 12 Dichlorodifluoromethane (0 C) (25 C) R 13 Chlorotrifluoromethane (0 C) (25 C) R 13 b1 Bromotrifluoromethane (0 C) (25 C) R 14 Tetrafluoromethane (0 C) (25 C) R 21 Dichlorofluoromethane (15 C) (25 C) R 22 Chlorodifluoromethane (0 C) (25 C) R 23 Trifluoromethane (0 C) (25 C) R 114 1,2-Dichlorotetrafluorethane (15 C) (25 C) R 115 Chloropentafluoroethane (0 C) (25 C) R 116 Hexafluoroethane (0 C) R 134a Tetraflouroethane (0 C) R 142b 1-Chloro-1,1-difluoroethane (0 C) R 152a 1,1-Difluoroethane (0 C) Silane insoluble Silicon tetrafluoride Sulphur dioxide (0 C) 38.2 (20 C) Sulphur hexafluoride (0 C) (25 C) Trimethylamine (15 C) Tungsten hexafluoride (25 C) Vinyl bromide (0 C) Vinyl chloride (0 C) Vinyl methyl ether (15 C) Xenon (0 C) (20 C)

244 Physical data. Gas name Boiling point (1 atm) Critical point Flammability in air Temperature C Heat of vaporization kj/kg Temperature C Pressure bar Density kg/l Lower limit % volume Upper limit % volume Acetylene Air, synthetic Ammonia , Argon n.a. n.a. Arsine n.a. Boron trichloride n.a. n.a. Boron trifluoride n.a. n.a. 1,3-Butadiene n-butane iso-butane Butene cis-2-butene iso-butene trans-2-butene Carbon dioxide n.a. n.a. Carbon monoxide Carbonyl sulfide Chlorine n.a. n.a. Cyanogen chloride Cyclopropane Deuterium Diborane Dichlorosilane Dimethylamine Dimethyl ether ,2-Dimethylpropane Ethane Ethene Ethylene oxide Ethylamine Ethyl chloride Fluorine n.a. n.a. Helium n.a. n.a. Hydrogen Hydrogen bromide n.a. n.a. Hydrogen chloride n.a. n.a. Hydrogen fluoride n.a. n.a. Hydrogen sulphide Krypton n.a. n.a. Methane Methylamine Methyl bromide Methyl chloride Methyl mercaptan Neon n.a. n.a. Nitric oxide n.a. n.a. Nitrogen n.a. n.a. Nitrogen dioxide n.a. n.a. Nitrogen trifluoride n.a. n.a. Nitrous oxide n.a. n.a.

245 Gas name Boiling point (1 atm) Critical point Flammability in air Temperature C Heat of vaporization kj/kg Temperature C Pressure bar Density kg/l Lower limit % volume Upper limit % volume Octafluoropropane n.a. n.a. Oxygen n.a. n.a. Phosgene n.a. n.a. Phosphine Propadiene Propane Propene Propyne R 11 Trichlorofluoromethane R 12 Dichlorodifluoromethane n.a. n.a. R 13 Chlorotrifluoromethane n.a. n.a. R 13 b1 Bromotrifluoromethane n.a. n.a. R 14 Tetrafluoromethane n.a. n.a. R 21 Dichlorofluoromethane n.a. n.a. R 22 Chlorodifluoromethane n.a. n.a. R 23 Trifluoromethane n.a. n.a. R 114 1,2-Dichlorotetrafluorethane n.a. n.a. R 115 Chloropentafluoroethane n.a. n.a. R 116 Hexafluoroethane n.a. n.a. R 134a Tetraflouroethane n.a. n.a. R 142b 1-Chloro-1,1-difluoroethane R 152a 1,1-Difluoroethane Silane Silicon tetrafluoride n.a. n.a. Sulphur dioxide n.a. n.a. Sulphur hexafluoride n.a. n.a. Trimethylamine Tungsten hexafluoride n.a. n.a. Vinyl bromide Vinyl chloride Vinyl methyl ether Xenon n.a. n.a.

246 Physical data. Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) lb/ft 3 Density (70 F) lb/ft 3 Vapor pressure (70 F) psi Acetylene C 2 H Air, synthetic Ammonia NH Argon Ar Arsine AsH Boron trichloride BCl Boron trifluoride BF ,3-Butadiene C 4 H n-butane C 4 H , iso-butane C 4 H Butene C 4 H cis-2-butene C 4 H iso-butene C 4 H trans-2-butene C 4 H Carbon dioxide CO Carbon monoxide CO Carbonyl sulfide COS Chlorine Cl Cyanogen chloride CNCl Cyclopropane C 3 H Deuterium D Diborane B 2 H Dichlorosilane SiH 2 Cl Dimethylamine (CH 3 ) 2 NH Dimethyl ether C 2 H 6 O ,2-Dimethylpropane C 5 H Ethane C 2 H Ethene C 2 H Ethylene oxide C 2 H 4 O Ethylamine C 2 H 5 NH Ethyl chloride C 2 H 5 Cl Fluorine F Helium He Hydrogen H Hydrogen bromide HBr Hydrogen chloride HCl Hydrogen fluoride HF Hydrogen sulphide H 2 S Krypton Kr Methane CH Methylamine CH 3 NH Methyl bromide CH 3 Br Methyl chloride CH 3 Cl Methyl mercaptan CH 3 SH Neon Ne Nitric oxide NO Nitrogen N Nitrogen dioxide NO Nitrogen trifluoride NF Nitrous oxide N 2 O Specific heat (70 F) BTU lb -1 F -1

247 Gas name Chemical formula Molecular weight g/mol Liquid state Density (at b.p. 1 atm) lb/ft 3 Density (70 F) lb/ft 3 Vapor pressure (70 F) psi Octafluoropropane C 3 F Oxygen O Phosgene COCl Phosphine PH Propadiene C 3 H Propane C 3 H Propene C 3 H Propyne C 3 H R 11 Trichlorofluoromethane CFCl R 12 Dichlorodifluoromethane CF 2 Cl R 13 Chlorotrifluoromethane CF 3 Cl R 13 b1 Bromotrifluoromethane CF 3 Br R 14 Tetrafluoromethane CF R 21 Dichlorofluoromethane CHFCl R 22 Chlorodifluoromethane CHF 2 Cl R 23 Trifluoromethane CHF R 114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F R 115 Chloropentafluoroethane C 2 ClF R 116 Hexafluoroethane C 2 F R 134a Tetraflouroethane C 2 H 2 F R 142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF R 152a 1,1-Difluoroethane C 2 H 4 F Silane SiH Silicon tetrafluoride SiF Sulphur dioxide SO Sulphur hexafluoride SF Trimethylamine (CH 3 ) 3 N Tungsten hexafluoride WF Vinyl bromide C 2 H 3 Br Vinyl chloride C 2 H 3 Cl Vinyl methyl ether C 3 H 6 O Xenon Xe Specific heat (70 F) BTU lb -1 F -1

248 Physical data. Gaseous state Gas name Rel. spec. wgt, air = 1 (59 F, 14.5 psi) Density (70 F) lb/ft 3 Specific heat (70 F) BTU lb -1 F -1 Thermal conductivity BTU h -1 ft -1 F -1 Solubility in water ft 3 /lb (at F) Acetylene (68 F) Air, synthetic (68 F) Ammonia (68 F) Argon (68 F) Arsine (68 F) Boron trichloride Boron trifluoride ,3-Butadiene (68 F) n-butane (68 F) iso-butane (68 F) 1-Butene cis-2-butene iso-butene trans-2-butene Carbon dioxide (68 F) Carbon monoxide (68 F) Carbonyl sulfide Chlorine (68 F) Cyanogen chloride Cyclopropane Deuterium Diborane Dichlorosilane Dimethylamine (140 F) Dimethyl ether ,2-Dimethylpropane Ethane (68 F) Ethene (68 F) Ethylene oxide Ethylamine Ethyl chloride (68 F) Fluorine Helium (68 F) Hydrogen (68 F) Hydrogen bromide (77 F) Hydrogen chloride (68 F) Hydrogen fluoride Hydrogen sulphide (68 F) Krypton (68 F) Methane (68 F) Methylamine (77 F) Methyl bromide Methyl chloride (32 F) Methyl mercaptan (59 F) Neon (68 F) Nitric oxide (68 F) Nitrogen (68 F) Nitrogen dioxide Nitrogen trifluoride Nitrous oxide (68 F)

249 Gaseous state Gas name Rel. spec. wgt, air = 1 (59 F, 14.5 psi) Density (70 F) lb/ft 3 Specific heat (70 F) BTU lb -1 F -1 Thermal conductivity BTU h -1 ft -1 F -1 Solubility in water ft 3 /lb (at F) Octafluoropropane Oxygen (68 F) Phosgene Phosphine (75 F) Propadiene Propane (68 F) Propene (68 F) Propyne R 11 Trichlorofluoromethane (77 F) R 12 Dichlorodifluoromethane (77 F) R 13 Chlorotrifluoromethane (77 F) R 13 b1 Bromotrifluoromethane (77 F)) R 14 Tetrafluoromethane (77 F) R 21 Dichlorofluoromethane (77 F) R 22 Chlorodifluoromethane (77 F) R 23 Trifluoromethane (77 F) R 114 1,2-Dichlorotetrafluorethane (77 F) R 115 Chloropentafluoroethane (77 F) R 116 Hexafluoroethane R 134a Tetraflouroethane R 142b 1-Chloro-1,1-difluoroethane R 152a 1,1-Difluoroethane Silane Silicon tetrafluoride Sulphur dioxide (68 F) Sulphur hexafluoride (77 F) Trimethylamine Tungsten hexafluoride Vinyl bromide Vinyl chloride Vinyl methyl ether Xenon (68 F)

250 Physical data. Gas name Boiling point (14.5 psi) Critical point Flammability in air Temperature F Heat of vaporization 70 F BTU/lb Temperature F Pressure psi(a) Density lb/ft 3 Lower limit % volume Upper limit % volume Acetylene Air, synthetic Ammonia , Argon n.a. n.a. Arsine n.a. Boron trichloride n.a. n.a. Boron trifluoride n.a. n.a. 1,3-Butadiene n-butane iso-butane Butene cis-2-butene iso-butene trans-2-butene Carbon dioxide , n.a. n.a. Carbon monoxide Carbonyl sulfide Chlorine , n.a. n.a. Cyanogen chloride Cyclopropane Deuterium Diborane Dichlorosilane Dimethylamine Dimethyl ether ,2-Dimethylpropane Ethane Ethene Ethylene oxide Ethylamine Ethyl chloride Fluorine n.a. n.a. Helium n.a. n.a. Hydrogen Hydrogen bromide , n.a. n.a. Hydrogen chloride , n.a. n.a. Hydrogen fluoride n.a. n.a. Hydrogen sulphide , Krypton n.a. n.a. Methane Methylamine , Methyl bromide , Methyl chloride Methyl mercaptan , Neon n.a. n.a. Nitric oxide n.a. n.a. Nitrogen n.a. n.a. Nitrogen dioxide , n.a. n.a. Nitrogen trifluoride n.a. n.a. Nitrous oxide , n.a. n.a.

251 Boiling point (14.5 psi) Critical point Flammability in air Gas name Temperature F Heat of vaporization 70 F BTU/lb Temperature F Pressure psi(a) Density lb/ft 3 Lower limit % volume Upper limit % volume Octafluoropropane n.a. n.a. Oxygen n.a. n.a. Phosgene n.a. n.a. Phosphine Propadiene Propane Propene Propyne R 11 Trichlorofluoromethane R 12 Dichlorodifluoromethane n.a. n.a. R 13 Chlorotrifluoromethane n.a. n.a. R 13 b1 Bromotrifluoromethane n.a. n.a. R 14 Tetrafluoromethane n.a. n.a. R 21 Dichlorofluoromethane n.a. n.a. R 22 Chlorodifluoromethane n.a. n.a. R 23 Trifluoromethane n.a. n.a. R 114 1,2-Dichlorotetrafluorethane n.a. n.a. R 115 Chloropentafluoroethane n.a. n.a. R 116 Hexafluoroethane n.a. n.a. R 134a Tetraflouroethane n.a. n.a. R 142b 1-Chloro-1,1-difluoroethane R 152a 1,1-Difluoroethane Silane Silicon tetrafluoride n.a. n.a. Sulphur dioxide , n.a. n.a. Sulphur hexafluoride n.a. n.a. Trimethylamine Tungsten hexafluoride n.a. n.a. Vinyl bromide , Vinyl chloride Vinyl methyl ether Xenon n.a. n.a.

252 Conversion tables. Dew point Moisture Dew point Moisture Dew point Moisture C F vpm mg/m 3 C F vpm mg/m ,

253 Pressure units (1 bar = 14.5 psi) psi bar kpa , ,447 1, ,895 2, ,790 4, ,579 bar psi kpa , , , , , , , , , , ,000 Gas Mass Liquid 1 m 3 m 3 gas (+15 C, 1013 mbar) kg litre liquid (boiling point, 1013 mbar) Acetylene Argon Helium Hydrogen Carbon dioxide Nitrogen Oxygen Propane kg Acetylene Argon Helium Hydrogen Carbon dioxide Nitrogen Oxygen Propane litre liquid Acetylene Argon Helium Hydrogen Carbon dioxide Nitrogen Oxygen Propane Tightness Leakage cm 3 /sec. (helium) time for leakage of 1 cm 3 helium at 1 atm seconds minutes minutes hours hours days months years years years ,000 years ,000 years ppm (part per million) percentage 1 ppm = % 10 ppm = 0.001% 100 ppm = 0.01% 1,000 ppm = 0.1% 10,000 ppm = 1.0% 100,000 ppm = 10.0% 1,000,000 ppm = 100.0%

254 Material compatibility. Gas name Chemical formula Aluminum Buna N Brass Butyl rubber Carbon steel Copper Kel-F Monel Neoprene Nylon Polyethene PVC Stainless steel Teflon Viton Acetylene C 2 H 2 2 Air, synthetic Ammonia NH 3 1 Argon Ar Arsine AsH 3 Boron trichloride BCl 3 Boron trifluoride BF ,3-Butadiene C 4 H 6 n-butane C 4 H 10 iso-butane C 4 H 10 1-Butene C 4 H 8 cis-2-butene C 4 H 8 iso-butene C 4 H 8 trans-2-butene C 4 H 8 Carbon dioxide CO 2 Carbon monoxide CO 4 Carbonyl sulfide COS Chlorine Cl 2 Chlorine trifluoride ClF Cyanogen CNCN Cyanogen chloride CNCl Cyclopropane C 3 H 6 Deuterium D 2 Diborane B 2 H 6 Dichlorosilane SiH 2 Cl Dimethylamine (CH 3 ) 2 NH Dimethyl ether C 2 H 6 O 2,2-Dimethylpropane C 5 H 12 Ethane C 2 H 6 Ethene C 2 H 4 Ethylene oxide C 2 H 4 O Ethylamine C 2 H 5 NH 2 Ethyl chloride C 2 H 5 Cl Fluorine F 2 Germane GeH 4 Helium He Hydrogen H 2 Hydrogen bromide HBr Hydrogen chloride HCl Hydrogen fluoride HF Hydrogen selenide HSe Hydrogen sulfide H 2 S Krypton Kr Methane CH 4 Methylamine CH 3 NH 2 Methyl bromide CH 3 Br Methyl chloride CH 3 Cl Methyl fluoride CH 3 F Methyl mercaptan CH 3 SH Neon Ne

255 Gas name Chemical formula Aluminum Buna N Brass Butyl rubber Carbon steel Copper Kel-F Monel Neoprene Nylon Polyethene PVC Stainless steel Teflon Viton Nitric oxide NO Nitrogen N 2 Nitrogen dioxide NO Nitrogen trifluoride NF Nitrous oxide N 2 O Octafluoropropane C 3 F 8 Oxygen O 2 Phosgene COCl Phosphine PH 3 Propane C 3 H 8 Propene C 3 H 6 Propyne C 3 H 4 R 11 Trichlorofluoromethane CFCl 3 R 12 Dichlorodifluoromethane CF 2 Cl 2 R 13 Chlorotrifluoromethane CF 3 Cl R 13 b1 Bromotrifluoromethane CF 3 Br R 14 Tetrafluoromethane CF 4 R 21 Dichlorofluoromethane CHFCl 2 R 22 Chlorodifluoromethane CHF 2 Cl R 23 Trifluoromethane CHF 3 R 114 1,2-Dichlorotetrafluorethane C 2 Cl 2 F 4 R 115 Chloropentafluoroethane C 2 ClF5 R 116 Hexafluoroethane C 2 F6 R 142b 1-Chloro-1,1-difluoroethane C 2 H 3 ClF 2 R 152a 1,1-Difluoroethane C 2 H 4 F 2 7 Silane SiH 4 Silicon tetrafluoride SiF Sulphur dioxide SO Sulphur hexafluoride SF 6 Trimethylamine (CH 3 ) 3 N Tungsten hexafluoride WF Vinyl bromide C 2 H 3 Br 1 Vinyl chloride C 2 H 3 Cl Vinyl methyl ether C 3 H 6 O Xenon Xe Legend 1 Avoid in presence of moisture 6 Possible forming of spontaneously 10 <180 C (360 F) Good 2 <65% Cu flammable compounds 11 <250 C (480 F) Fair 3 Avoid in presence of oxygen 7 <50 C (120 F) 12 <400 C (750 F) Avoid 4 Up to 100 bar (1,450 psi) 8 <100 C (210 F) Data missing 5 In absence of oxygen 9 <150 C (300 F)

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257 Index. A Accessories 217 centralized monitoring systems 218 contact gauges 220 gas cylinder trolley 224 mounting bracket 222 pressure transducers 220 wall mounting bracket 224 ACCURA cylinder management system 232 acetylene 72, 238, 252 air, synthetic 72, 238, 252 AISI 316L 215 alarms 12, 151 aluminum 252 ammonia 72, 238, 252 analysis certificate 234 analysis service 233 application safety training 233 argon 72, 238, 252 arsine 72, 238, 252 ASTM A automatic gas supply 232 B BASELINE 6 C 106/1 102 C 106/2 106 C 106X/1 104 C 106X/2 108 R 104/1 126 boron trichloride 72, 238, 252 boron trifluoride 72, 238, 252 brass 252 Buna N 252 1,3-butadiene 72, 238, 252 n-butane 72, 238, 252 iso-butane 72, 238, butene 72, 238, 252 cis-2-butene 72, 238, 252 iso-butene 72, 238, 252 trans-2-butene 72, 238, 252 butyl rubber 252 C carbon steel 252 carbon dioxide 72, 238, 252 carbon monoxide 72, 238, 252 carbonyl sulfide 72, 238, 252 central gas supply 9 certificate of conformity 235 chlorine 72, 238, 252 chlorine trifluoride 72, 252 CleanLine 6 B 25 bench/suspended mounting 86 I 25 inset design 82 P 25 panel mounting 80 W 25 wall mounting 84 compatibility 252 Components 111 R 104/1 126 R R 12hv/1 124 R 200/1 112 R 200/2 116 R 200/F 114 R 200hv/2 118 R R 480/1 144 V V V V connections 7, 209, 228 contact gauges 220 containers 165 contents 3 conversion tables 250 copper 11, 252 cyanogen 72, 252 cyanogen chloride 72, 238, 252 cyclopropane 72, 238, 252 cylinder bundles 203 Cylinder connections ABNT 210 AFNOR 210 BS CGA 211 DIN IRAM ISO MIE 213 NEN UNI 213 cylinder management 232 Cylinder regulators BASELINE C 106/1 102 C 106/2 106 C 106X/1 104 C 106X/2 108 HiQ REDLINE C 12hv/1 70 C 200/1 64 C 200/2 66 C 200hv/2 68 Special cylinder regulators C 421/1 146 C 450/1 mini 148 C 490/1 142 cylinder trolley 224 cylinder types 203 cylinder valves 209 D detection 12 deuterium 72, 238, 252 dew point 250 diaphragm valve 209 diborane 72, 238, 252 dichlorosilane 72, 238, 252 dimethylamine 72, 238, 252 dimethyl ether 72, 238, 252 2,2-dimethylpropane 72, 238, 252 documentation 13 E ebusiness 231 ECOCYL RSH 198 ECOCYL VAH/VSH 200 EN EPA protocol 235 ethane 72, 238, 252 ethene 72, 238, 252 ethylamine 72, 238, 252 ethyl chloride 72, 238, 252 ethylene oxide 72, 238, 252 F fittings 209, 215 Gyrolok 215 Parker A-LOK 215 Swagelok 215 flow meter 98 fluorine 72, 238, 252 G gas cabinets 12, 152 gas detector 165 Gas panels double gas panel D purge gas panels 2-valve purge gas panel 154

258 Index. 3-valve process gas panel valve process gas panel 158 semi-automatic gas panels A A single gas panels S S S S gauge pressure 6 general symbols 6 germane 72, 252 gravimetrical production 235 H helium 74, 238, 252 high purity 11 HiQ Analysis certificate 234 HiQ codes 7 HiQ Gas Supply System Installations 227 HiQ REDLINE 6 central gas supply 9 components 111 cylinder regulators 63 gas panels 15 points of use 53 the right choice 72 HOGEN HGS, hydrogen generator 176 hydrogen 74, 238, 252 hydrogen bromide 74, 238, 252 hydrogen chloride 74, 238, 252 hydrogen fluoride 74, 238, 252 hydrogen selenide 252 hydrogen sulfide 74, 252 hydrogen sulphide 238 I inlet connections 209 installations - checklist 228 integrated flow valve 197 integrated regulator 197 K Kel-F 252 krypton 74, 238, 252 L leakage 251 M material compatibility 252 methane 74, 238, 252 methylamine 74, 238, 252 methyl bromide 74, 238, 252 methyl chloride 74, 238, 252 methyl fluoride 74, 252 methyl mercaptan 74, 238, 252 Monel 252 monitoring systems 218 mounting bracket (for BASELINE R 104/1) 222 N natural gas 74 neon 74, 238, 252 Neoprene 252 NIST 235 nitric oxide 74, 238, 253 nitrogen 74, 238, 253 nitrogen dioxide 74, 238, 253 nitrogen trifluoride 74, 238, 253 nitrous oxide 74, 238, 253 Nylon 252 O octafluoropropane 74, 239, 253 on-line ordering 231 operating economy 10 operation monitor 160 origami 1 outlet connections 214 oxygen 74, 239, 253 P phosgene 74, 239, 253 phosphine 74, 239, 253 physical data 237 pipe systems 12 Points of use CleanLine B 25 bench/suspended mounting 86 I 25 inset design 82 P 25 panel mounting 80 W 25 wall mounting 84 HiQ REDLINE B 40 bench design 56 I 40X inset design 60 L 40 fume cupboard design 58 W 40 wall design 54 Quick Connect connection points 90 flow meter 98 outlets 94 regulator 96 polyethene 252 Portable gas solutions 197 ECOCYL RSH 198 ECOCYL VAH/VSH 200 preface 5 pressure transducers 220 pressure units 251 propadiene 239 propane 74, 239, 253 propene 74, 239, 253 propyne 74, 239, 253 purge time 11 PVC 252 Q Quick Connect 6 connection points 90 flow meter 98 outlets 94 pressure regulator 96 R R 11, trichlorofluoromethane 74, 239, 253 R 12, dichlorodifluoromethane 74, 239, 253 R 13 b1, bromotrifluoromethane 74, 239, 253 R 13, chlorotrifluoromethane 74, 239, 253 R 14, tetrafluoromethane 74, 239, 253 R 21, dichlorofluoromethane 74, 239, 253 R 22, chlorodifluoromethane 74, 239, 253 R 23, trifluoromethane74, 239, 253 R 32, difluoromethane 76 R 114, 1,2-dichlorotetrafluorethane 76, 239, 253 R 115, chloropentafluoroethane 76, 239, 253 R 116, hexafluoroethane 76, 239, 253 R 134a, tetraflouroethane 239 R 142b, 1-chloro-1,1- difluoroethane 76, 239, 253 R 152a, 1,1-difluoroethane 76, 239, 253 reference material 234 returnable cylinders 203 roller conveyor 165 S safety 10 safety audits 233 Safety solutions valve purge gas panel valve process gas panel valve process gas panel 158 containers 165 fully automatic 162 monitoring systems 218 operation monitor 160 standard cabinets 152 safety training 233 SECCURA automatic gas supply 232 service agreement 10 Services 231 silane 76, 239, 253 silicon tetrafluoride 76, 239, 253 Single stage cylinder regulators C 106/1 102 C 106X/1 104 C 12hv/1 70 C 200/1 64 C 421/1 146 C 450/1 mini 148 C 490/1 142 Special equipment C 421/1 146 C 450/1 mini 148 C 490/1 142 IntelliSwitch 138 R 480/1 144 STABLEFLOW HCS 140 Specialty gas generators 171 hydrogen generation system, HOGEN HGS 176 hydrogen no-maintenance 172 hydrogen pure gas 174 nitrogen (BORA mini) 180 nitrogen (ELSD generator) 182 nitrogen LC/MS 0 188

259 nitrogen LC/MS nitrogen LC/MS Plus 184 nitrogen SIROCCO DS-PSA 178 Ultra Zero Air generator 190 Zero Air generator 192 specialty gas safety training 233 STABLEFLOW HCS 140 stainless steel 11, 252 standard purity 11 STP 6 sulphur dioxide 76, 239, 253 sulphur hexafluoride 76, 239, 253 system design 11 T Teflon 252 tightness 251 timesaving tools 231 traceabilty 235 training 233 trimethylamine 76, 239, 253 trolley (for gas cylinders) 224 tubings 209, 215 tungsten hexafluoride 76, 239, 253 turnkey deliveries 10 Two stage cylinder regulators C 106/2 106 C 106X/2 108 C 200/2 66 C 200hv/2 68 V vinyl bromide 76, 239, 253 vinyl chloride 76, 239, 253 vinyl methyl ether 76, 239, 253 Viton 252 W walkthroughs 233 wall mounting bracket 224 washer valve 209 web ordering 231 working environment 10 X xenon 76, 239, 253

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262 Getting ahead through innovation. With its innovative concepts, Linde Gas is playing a pioneering role in the global market. As a technology leader, it is our task to constantly raise the bar. Traditionally driven by entrepreneurship, we are working steadily on new high-quality products and innovative processes. Linde Gas offers more. We create added value, clearly discernible competitive advantages, and greater profitability. Each concept is tailored specifically to meet our customers requirements offering standardized as well as customized solutions. This applies to all industries and all companies regardless of their size. If you want to keep pace with tomorrow s competition, you need a partner by your side for whom top quality, process optimization, and enhanced productivity are part of daily business. However, we define partnership not merely as being there for you but being with you. After all, joint activities form the core of commercial success. Linde Gas ideas become solutions. 15 $/ xy Linde AG Linde Gas Division, Seitnerstrasse 70, DE Pullach, Germany Phone , Fax ,