Dual Beam FIB/FEG Microscope

Transcription

1 INVITATION FOR TENDER FOR SUPPLY OF EQUIPMENT Sealed tender offers are invited in two separate sealed covers (Technical and Commercial offers) from eligible manufacturers/suppliers or their direct Indian agents for the supply of the following equipment. Dual Beam FIB/FEG Microscope Please send offers, ALONG WITH DESCRIPTIVE CATALOGUE/ BROCHURE. The validity of the bid should be at least four months (120 days) or more from the date of the opening of this tender. Please ensure that your quotation reaches not later than (Extended) at 15:00 hrs at the following address: Dr. C. Jacob Professor, Materials Science Centre, Indian Institute of Technology Kharagpur, Pin , West Bengal, India Earnest money of Rs. 1,00,000/- is to be deposited in the form of Account payee Demand Draft in favour of IIT Kharagpur, payable at Kharagpur, India. Any bid which is not accompanied with an EMD shall be summarily rejected. Earnest money deposited will be forfeited if the tenderer withdraws or amends its tender or impairs or derogates from the tender in any respect within the period of validity of its tender. No interest will be paid on the earnest money of the unsuccessful bidders. Tender Reference IIT/SRIC/ATDC/ARS/CJ/ /EQ/1, Dated: Price of Tender Document NIL Last Date and Time for submitting the tender document (Extended), 15:00 Hrs (Indian time) Time and Date of Opening of Bids (Extended), 16:00 Hrs (Indian time) Materials Science Centre, Place of Opening tender offers Indian Institute of Technology Kharagpur , West Bengal, India Address of Communication As stated above Contact Telephone Numbers cjacob@matsc.iitkgp.ernet.in 1/9

2 Detailed Specifications for Dual Beam FIB/FEG Microscope The desired system should have both electron (Schottky field emission gun) and ion beam (gallium) sources, capable enough for the conventional electron microscopy study along with advanced nanomanipulation using focused ion beam with full control on patterning and designing 3D structures. The system should have all the necessary components, hardware, and software to meet the required specifications. Three main requirements that the system must fulfill are (I) Microscopy and Composition Analysis: The system should be capable of performing high resolution surface morphology analysis of both conductive and nonconductive samples including metallic, ceramic, semiconductor and polymer. A suitable X-ray detector for the elemental analysis and mapping should be included. (II) Focused Ion Beam: Ion beam source for the TEM sample preparation and AFM tip fabrication, ion beam etching for 3D patterning and deposition of selected materials for nanomanipulation and nanofabrication. (III) Advanced Options: The system should have enough options/spaces for the advanced tools including but not limited to SPM, SIMS, Nanomanipulator, EBL/IBL, etc. The detailed specifications are given below: A. Resolution A1) FESEM resolution with in-lens detector: 1.5 nm or better at 15 kv; 3.0 nm or better at 1 kv A2) FESEM resolution with SE (E-T) detector: 1.2 nm or better at 30 kv; 1.5 nm or better at 15 kv; 2.0 nm or better at 1 kv A3) FIB column resolution: < 3 nm at 30 kv with probe currents of 1 pa B. Electron Source, Column, and Optics C. Ion Gun, Column, and Optics B1) Electron Gun: Schottky field emitter with a lifetime of min. 12 months B2) Accelerating voltage: 0.2 kv to 30 kv B3) Magnification: From 30 X to 10,00,000 X B4) Probe current: From 5 pa to 100 na B5) Provision for beam deceleration/gentle beam/ similar technologies and suitable detectors B6) Scan modes (please specify) and scan speed: 20 ns/pixel to 1 ms/pixel B7) Specimen current measurement over the whole range C1) Ion Gun: Liquid gallium metal with a minimum life time of 2500 µah. C2) Accelerating voltage: 1.0 kv to 30 kv C3) Magnification: From 300 X to 5,00,000 X C4) Probe current: From 1 pa to 50 na C5) Electrostatic beam blanker In-built vibration isolation for the microscope is necessary D. Detectors D1) Everhart-Thornley (E-T) secondary electron detector D2) Annular in-lens/ in column SE detector with automatic contrast/brightness adjustment D3) Secondary ion detector for the simultaneous detection and imaging using both SE and SI. D4) Motorized Retractable back-scattered detector. 2/9

3 E. EDX E1) A liquid N 2 -free SDD type EDS detector with a crystal area 80 mm 2 capable of detecting all elements with an atomic number 4 (Be) or more. Detection from Be to U, Quantification from B to U The detector should also perform with <1eV change in peak resolution and position with count rates ranging between ,000 cps. E2) EDS resolution: 127 ev or better for Mn Kα E3) Automatic software controlled motorized system to insert and retract EDS detector. E4) Software for the elemental quantification analysis, spectra imaging, and mapping. Line and multi-point analysis. Standard calibration sample must be provided for the time-to-time monitoring of elemental analysis. User interactive qualitative and standardless/ standards based quantification with K, L, M, N line database. Real time elemental mapping with auto elemental identification, quantification based on ZAF/PhiZAF/Phi Rho Z algorithm. Should have quantification algorithm for uneven surfaces and under all conditions. Pile up correction and background noise reduction, simultaneous imaging and analysis should be possible. F. Specimen Chamber and Stage G. Gas Injection System for Materials Deposition and Etching F1) Internal dimensions: Length 300mm; Width 300mm; Height 270 mm (or equivalent diameter) F2) Door dimensions: Width 300 mm; Height 300 mm F3) Specimen height: 50 mm F4) 5-axis/6-axis motorized stage (either Piezo-driven or better system) with precision 2.0 µm over the whole range; eucentric/compucentric F5) Motorized specimen stage movements: X = 120 mm; Y = 120 mm; Z = 50 mm; Rotation endless. Tilt: 0 to 60 F6) Ports: 18 ports F7) Multi-specimen carousel and specimen holder. It must at least hold/mount 7 samples of each diameter of 1 mm or more. F8) The stage movement should have option to be carried out by both mouse click/drag and conventional joystick/track ball. G1) Five or more gas injectors (with automated arm) for nanofabrication, TEM sample preparation and ion beam etching. The gases should be changed without breaking the vacuum. Automatic temperature control. G2) Metal and oxide deposition: Pt, W, C, and SiO 2 G3) Gas-assisted (H 2 O and XeF 2 ) etching of metals insulators G4) Charge neutralization: Provision of charge neutralization for insulators. H. Vacuum System H1) Oil-free ion getter pumps for gun H2) Turbo pump, rotary pump, oil-free scroll pumps, pneumatic valves and necessary pressure gauges. H3) Automatic venting of chamber by N 2. H4) Low pressure mode must be available I. Plasma Cleaner Specify pressure range of operation (20W power or better) J. SIMS Specify depth resolution, lateral resolution, mass range and resolution K. SPM Specify scan ranges in x, y and z, resolution of instrument for contact mode scan for all three axes, modes of operation/characterization included, stage positioning accuracy, number and type of tips supplied L. EBL and IBL Necessary hardware including electron beam blanker, ion beam blanker and software for drawing/ pattern generation to be included. 3/9

4 M. Nanomanipulator Kleindiek Nano Workstation SY-NW-000 with the following additional modules: i) Four point electrical characterization: PL-M4PP ii) Low current measurement tip: PL-4LCMK iii) Safe tip approach: AD-STA iv) Five nos. micro four point probes: M4PP (probe spacing will be specified when order is placed) N. Control Panel and System Control -Five-axis joystick and knobs for stage adjustment along with separate keyboard control panel. - Latest computer hardware and licensed software - Monitors 24 LED - System should allow complete control of the system and sub-systems, deposition/etching, generating patterns. - Multiple image resolutions - Image display: Split screen for simultaneous display of results from multiple detectors with scale bar, date and time, vacuum etc. -Image processing: Auto focus and stigmator, auto brightness, auto contrast, pseudo coloring, motile annotations, point-to-point and line width measurement and storing. Image should be saved at least in JPEG, TIFF, BMP format. Video recording to movie format (AVI) O. Analysis chamber Chamber should be equipped with an IR-CCD camera or any suitable Camera device to view the sample & stage inside the analysis chamber. P. Calibration Standard samples to check system calibration, magnification etc. standards should be supplied along with the system Q. Specimen kit Necessary specimen kit for sample preparation with sufficient no. of stubs ( 100 nos.), etc. should be provided. Suitable holder(s) for crosssectional analysis of samples and for larger samples must also be included. Carbon tape for sample mounting (2m) to be included. Any other consumables or accessories required. R. Software - Sequential milling and viewing series of slide images - For reconstruction, visualization and analysis of 3D FIB nanotomography - Software for uploading complex patterns prepared by user using CAD and BIT images - Software for writing shapes, patterns in nano/micro dimensions and their execution by FIB Original licensed software for the comprehensive operation of the microscope, computer, motorized stage / stage control, CCD camera and vacuum control. Software for acquiring the images. Software used for reduction of noise & improvement in contrast with drift correction during image acquisition and processing should be provided. The software should be embedded in the microscope control. For off-line analysis suitable interfacing, if required, should be provided for another computer for one-way transmission of data for further analysis, or export. Data formats (ACSII, TIFF, JPEG, BMP, etc.) (Backup software and updates must be provided on media for future use any time after the end of warranty period). There should be adequate software support user programming of various activities and motions inside system in appropriate modes. 4/9

5 S. Future Upgradeability T. Computer and printer U. Chiller and Compressor The specimen chamber should be large and compatible to accommodate other detectors such as EBSD, WDS and CLD for future requirements (all these must be field installable) without any additional interfacing accessories Latest compatible branded high speed computer with licensed software Servicing facility for computer related problems should be provided. Specify computer speed, processor, RAM. Specify graphics card Branded chiller and compressor (as required for your system) must be supplied to support the quoted system for smooth operation. Brand should be mentioned. V. UPS 10 kva or more with at least 1 h backup W. Sputter coater Suitable for FESEM sample imaging with Turbo pump and Au/Pd target X. Consumables, Spares and Tools - The system should be supplied with all the accessories and consumables to run for at least five years - More precisely, 3 additional Schottky electron source module, apertures, objective caps, gaskets, seals, O-ring, fuses etc. (The Schottky electron source module should be supplied without any additional cost as and when they are required) Y. Warranty Warranty Three years + AMC for additional 2 years Z. Installation & training Prices Delivery Time Additional terms Additional Detectors EDS Calibration standards Haptics interface capability Installation, Commissioning and On-Site Training to selected users The FESEM must preferably have provision for on-line diagnosis of faults. To be quoted as CIF Kolkata Within six months of order being placed Compliance statement: With soft copy - point wise according to our document User List: Provide user list with contact (address and Phone) details where the quoted model has been installed in last 3 years. Original documents supporting the specifications should be provided. Service response time must be <48 hours. OPTIONAL ITEMS: i) Low voltage BSE detector ii) EBSD iii) EBIC iv) STEM bright field and dark field detector v) WDX detector vi) CL imaging vii) CL spectroscopy viii) Any other detectors (Preferably from NIST) 1 No s with 36 element standard materials suitable for use with either WDS or EDS systems. The materials should be mounted on a 1" or 1.25" diameter stub with a Faraday cup for Beam Current measurements. The elements are: Be, B, BN, C, Mg, Al, Si, SiO 2, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, As, Ge, Zr, Nb, Mo, Rh, Pd, Ag, CdS, InP, Sn, Sb, Ta W, Os, Pt, Au, Bi, U. Traceable High Resolution Multichannel Au Particle Standard Sample System should have interface for additional pointing and control devices like haptic interface. 5/9

6 GENERAL TERMS & CONDITIONS PLEASE SPECIFICALLY INDICATE THE FOLLOWING POINTS IN YOUR QUOTATIONS AND COMPLY THE TERMS AS MENTIONED HEREUNDER:- 1. TENDER ARE INVITED COMPLYING THE REQUIREMENT FOR TENDER AS DETAILED IN THE TENDER SPECIFICATION TO BE SUBMITTED IN THE COMPANY S / FIRM S LETTERHEAD NEATLY PRINTED / TYPED DULY SIGNED BY AUTHORIZED PERSON WITH THE SEAL OF THE BIDDERS. ALL ENVELOPS CONTAINING THE TENDER SHOULD BE PROPERLY SEALED. SEPARATE ENVELOPS SHOULD BE USED FOR TECHNICAL AND PRICE BID AND INDICATION TO THEIR EFFECT MAY PLEASE BE SUPERSCRIBED ON THE ENVELOP. THE FOLLOWING DOCUMENTS ARE REQUIRED FROM THE INDIAN AGENTS OF FOREIGN FIRMS: 1.1 FOREIGN PRINCIPAL'S PROFORMA INVOICE INDICATING THE COMMISSION PAYABLE TO THE INDIAN AGENT AND NATURE OF AFTER SALES SERVICE TO BE RENDERED BY THE INDIAN AGENT. 1.2 COPY OF THE AGENCY AGREEMENT WITH THE FOREIGN PRINCIPAL INDICATING THE NATURE OF AFTER SALES SERVICES, PRECISE RELATIONSHIP BETWEEN THEM AND THEIR MUTUAL INTEREST IN THE BUSINESS. 1.3 PLEASE ENCLOSE THE DOCUMENT(S) RELATED TO THE ENLISTMENT OF THE INDIAN AGENT WITH DIRECTOR GENERAL OF SUPPLIES & DISPOSALS (DGS & R) UNDER THE COMPULSORY REGISTRATION SCHEME OF MINISTRY OF FINANCE. 2. TECHNICAL CATALOGUE/LEAFLET SHOULD BE ENCLOSED WITHOUT FAIL. PROVIDE COMPLIANCE STATEMENT WITH RESPECT TO THE TECHNICAL SPECIFICATIONS MENTIONED ABOVE. 3. PLEASE CONFIRM WHETHER YOU ARE AUTHORISED TO QUOTE ON BEHALF OF YOUR PRINCIPALS AND IF SO, PLEASE ENCLOSE A COPY OF SUCH AUTHORISATION WITH YOUR QUOTATION. 4. PRICE BIDS FOR FOREIGN FIRMS: PRICES ARE TO BE QUOTED ON EX-WORKS DULY PACKED OR ON FCA/FOB INTERNATIONAL PORT BASIS AND ALSO INCLUDING AGENCY COMMISSION PAYABLE TO YOUR INDIAN AGENTS, IF ANY SHOWING CLEARLY THE FOLLOWING BREAK UP:- I) EX-WORKS PRICE II) PACKING & FORWARDING III) FREIGHT IV) ANY OTHER RELEVANT EXPENSES. V) TAXES PAYABLE BY THE INSTITUTE INSURANCE WILL BE PAID BY OUR INSTITUTE SEPARATELY AND SHOULD NOT FORM PART OF THE QUOTED PRICE. PRICE BIDS FOR INDIAN FIRMS: PRICES ARE TO BE QUOTED ON F.O.R., IIT KHARAGPUR, ON DOOR DELIVERY BASIS CLEARLY SHOWING THE BREAK UP. 5. PERIOD OF VALIDITY: BIDS SHALL REMAIN VALID FOR ACCEPTANCE FOR A PERIOD OF 120 DAYS FROM THE DATE OF OPENING. 6. INDIAN AGENTS ADDRESS AND PERCENTAGE OF AGENCY COMMISSION INCLUDED IN ABOVE F.O.B./EX-WORKS PRICE. (THIS WILL BE PAID TO THE INDIAN AGENTS IN INDIAN RUPEES ONLY AND NOT IN FE). PLEASE ENCLOSE COPY OF AGENCY AGREEMENT ENTERED INTO WITH YOUR PRINCIPALS INDICATING THE NATURE OF AFTER SALES SERVICES OF INDIAN AGENTS, PRECISE RELATIONSHIP & MUTUAL INTEREST IN THE BUSINESS. 6/9

7 7. MEASUREMENTS/WEIGHT: NETT/GROSS OF THE CONSIGNMENT. IN CASE OF AN ORDER, YOU SHALL USE AIR WORTHY PACKAGE (AS APPLICABLE) DULY CERTIFIED WITH DOCUMENTS PLYTO SANITARY CERTIFICATE (AS PER QUARANTINE ORDER 2003). 8. SCOPE OF SUPPLY: SHOULD INCLUDE FREE INSTALLATION AND COMMISSIONING 9. PAYMENT TERMS FOR FOREIGN FIRMS A) 100% PAYMENT THROUGH SIGHTDRAFT/FORIGN DEMAND DRAFT/LC (EXCEPTIONAL CASES)/SWIFT TELE TRANSFER AFTER RECEIPT OF STORE IN GOOD ORDER AND CONDITION. B) BANK CHARGES ON LC/SD (WITHIN INDIA APPLICANT ACCOUNT AND OUTSIDE INDIA TO BENEFICIARY ACCOUNT). PAYMENT TERMS FOR INDIAN FIRMS A) 100% PAYMENT THROUGH CROSSED ACCOUNT PAYEE CHEQUE / ELECTRONIC TRANSFER AFTER RECEIPT OF STORE IN GOOD ORDER AND CONDITION. B) ENSURE MENTIONING i) BANK DETAILS OF THE BENEFICIARY AND PAN NUMBER ii) FULL NAME AND ADDRESS OF THE BENEFICIARY ON WHOM ORDER HAS TO BE PLACED 10. WHETHER ANY EXPORT LICENCE IS REQUIRED FROM YOUR GOVERNMENT, IF SO, PLEASE CONFIRM WITH DETAILS. 11. COUNTRY OF ORIGIN OF THE GOODS IS TO BE MENTIONED. 12. THE INSTITUTE SHALL PROVIDE THE CONCESSIONAL CUSTOMS DUTY AND EXCISE DUTY EXEMPTION CERTIFICATE AS PER GOVT. NOTIFICATION NO. 51/96 CUSTOMS DATED: AND CENTRAL EXCISE DUTY EXCEMPTION IN TERMS OF GOVT. NOTOFICATION NO. 10/97 CENTRAL EXCISE DATED: AS AMENDED FROM TIME TO TIME. 13. LIQUIDATED DAMAGES: THE STORES SHOULD BE DELIVERED / DISPATCHED TO DESTINATION AND READY FOR OPERATION NOT LATER THAN THE DELIVERY DATE SPECIFIED. IT THE SUPPLIER FAILS TO DELIVER ANY OR ALL THE STORES OR PERFORM THE SERVICE BY THE SPECIFIED DATE, LIQUIDATED DAMAGES AT 1% PER MONTH OR PART THEREOF IN RESPECT OF THE VALUE OF STORES WILL BE DEDUCTED FROM THE CONTRACT PRICE SUBJECT TO A MAXIMUM OF 5%. ALTERNATIVELY, THE ORDER WILL BE CANCELLED AND THE UNDELIVERED STORES PURCHASED FROM ELSEWHERE AT THE RISK AND EXPENSE OF SUPPLIER. 14. PATENT RIGHTS: THE SUPPLIER SHALL INDEMNIFY THE PURCHASE AGAINST ALL THIRD PARTY CLAIMS OF INFRINGEMENT OF PATENT, TRADEMARK OR INDUSTRIAL DESIGN RIGHTS ARISING FROM USE OF THE GOODS OR ANY PART THEREOF IN INDIA. 15. ONLY THOSE BIDDERS WHO S BIDS HAVE BEEN TECHNICALLY FOUND ACCEPTABLE WILL ONLY BE INVITED FOR PARTICIPATION IN THE PRICE BID. 16. THOSE BIDDERS WHO DO NOT RECEIVE ANY COMMUNICATION FOR PARTICIPATION IN PRICE BID OPENING MEETING MAY PRESUME THAT THEIR BID HAS NOT BEEN ACCEPTED BY THE INSTITUTE. 17. CONDITIONAL OFFER WILL NOT BE ACCEPTED. 18. LATE TENDERS I.E. TENDER RECEIVED AFTER THE DUE DATE AND TIME OF SUBMISSION AS MENTIONED ABOVE SHALL NOT BE ACCEPTED. 7/9

8 19. BIDDERS TO ENCLOSE THE FOLLOWING DOCUMENTS:- A) CURRENT INCOME TAX AND SALES TAX CLEARANCE CERTIFICATES AND PAN NO. C) BANKER S SOLVENCY CERTIFICATE C) SUMMARY OF AUDITED STATEMENT OF ACCOUNTS FOR THE LAST THREE YEARS TO BE ENCLOSED AND FINANCIAL HIGHLIGHTS AND THE KEY PERFORMANCE DURING THE LAST THREE QUARTERS TO BE ENCLOSED AS PER FORMAT:- COMPANY S KEY PERFORMANCE DESCRIPTION JAN. TO MARCH APRIL TO JUNE JULY TO SEPT. GROSS REVENUE PROFIT BEFORE TAX PROFIT AFTER TAX RETURN ON INVESTED CAPITAL (ROIC) D) CUSTOMER SATISFACTION CERTIFICATE FROM ONE SUCH ORGANIZATION IS TO BE ATTACHED WITH THE TECHNICAL BID AND PRICE BID. E) NAME AND ADDRESS OF MINIMUM THREE CLIENTS TO WHOM SUCH EQUIPMENT HAVE BEEN SUPPLIED SHOULD BE MENTIONED. 20. WARRANTY / GUARANTEE: THIS COMPREHENSIVE WARRANTY / GUARANTEE SHALL REMAIN VALID FOR 36 MONTHS AFTER THE GOODS (OR ANY PORTION THEREOF AS THE CASE MAY BE) HAVE BEEN DELIVERED AND COMMISSIONED TO THE FINAL DESTINATION. 21. THE INSTITUTE DOES NOT BIND ITSELF TO OFFER ANY EXPLANATION TO THOSE BIDDERS WHO S TECHNICAL BID HAS NOT BEEN FOUND ACCEPTABLE BY THE EVALUATION COMMITTEE OF THE INSTITUTE. 22. ALL TENDERS (UNLESS OTHERWISE SPECIFIED) ARE TO BE SUBMITTED / HANDED OVER TO DR. C. JACOB, MATERIALS SCIENCE CENTRE, INDIAN INSTITUTE OF TECHNOLOGY, KHARAGPUR AND ACKNOWLEDGEMENT TO BE OBTAINED. 8/9

9 IMPORTANT 1. IIT Kharagpur authority may accept or reject any or all the bids in part or in full without assigning any reason and does not bind itself to accept the lowest bid. The Institute at its discretion may change the quantity / upgrade the criteria / drop any item or part thereof at any time before placing the Purchase Order. 2. Promptly make arrangements for repair and / or replacement of any damaged item (s) irrespective of settlement of claim. 3. In case of any dispute, the decision of the Institute authority shall be final and binding on the bidders. 4. For any query pertaining to this bid document correspondence may be addressed to Dr. C. Jacob, at the address mentioned above. LAST DATE FOR SUBMISSION OF SEALED BIDS: (Extended) 1) Please Note that the Institute remains closed during Saturdays & Sundays and all specified government holidays. 2) Fax, Tender will not be accepted. 3) The General Terms and Conditions as stated above relate to supply of stores / equipment /assets etc. and for specific service other terms and conditions of the Institute will apply /9