Schedule of Tender. For. Optical Microscope

Transcription

1 Schedule of Tender For Optical Microscope Central Manufacturing Technology Institute Tumkur Road, Bangalore INDIA Page 1 of 13

2 Central Manufacturing Technology Institute Tumkur Road, Bangalore Optical Microscope Schedule of Tender (To be filled in by the tenderer and returned and duly signed along with enclosure to the Schedule of Tender) 1. Name of Purchaser Central Manufacturing Technology Institute Tumkur Road, Bangalore Place of delivery Central Manufacturing Technology Institute Tumkur Road, Bangalore Delivery of Machine Required Within 12 Weeks after placing the purchase order 4. Date of receipt of the Tender On or before 30 th November Earnest Money Deposit Rs. 25,000/- as EMD is payable by Demand Draft drawn in favor of Central Manufacturing Technology Institute, payable at Bangalore. Rs. 1145/- to be paid as tender fees by demand draft drawn in favor of Central Manufacturing Technology Institute to be submitted along with the tender. 6. Validity of the tender Tender should be valid for a period of not less than 3 months from the date of offer and unless otherwise specified by the tenderer, the tender shall be treated as valid even thereafter. 7. Technical details/ Requirements for which the tender is invited. a. As per specification enclosed. b. All details that are required in the specification must be included in the offer. Incomplete tenders are liable to be rejected. c. Wherever numerical values are specified, tenderer shall respond with numerical values that actually correspond to the product. Any additional features/ details pertaining to the product should be enclosed separately. d. The equipment will be finally accepted based on the compliance of the equipment with the Acceptance Criteria. The final Acceptance Criteria will be based on mutual agreement and will be finalized at the time of placing the order. Hence, the bidder has to go through the Acceptance Criteria and convey their acceptance unambiguously. They may also suggest a suitable method of verification if the proposed method is not acceptable to the bidder. 8. Price offered a. The quotation should be furnished in TWO parts in different sealed covers in the following manner. b. The first part should contain complete technical details of the item offered along with name and address of the manufacturer, full name and address of the authorised agent, guaranteed delivery period and 2 sets of the latest catalogues. This part should not contain the price details. The EMD as indicated should also be enclosed along with the technical details. The cover should be sealed and superscribed with Tender Enquiry Reference and Date and Technical Bid for Optical Microscope c. The second part should contain the Price and other commercial terms. The price should be quoted F-O-R, Bangalore. The cover should be sealed and superscribed with Tender Enquiry Reference and Date and Price and Commercial Bid for Optical Microscope d. Both these covers should be put together in an outer Page 2 of 13

3 9. Payment Terms To be indicated cover sealed and superscribed with Tender Enquiry Reference and Date and Optical Microscope e. Break up cost for optional features and optional equipment/ accessories are to be clearly indicated. 10. Transit Insurance To be arranged by the supplier from supplier s warehouse to the place of delivery and to be billed at actuals. 11. Notes a. Late offers will not be entertained or accepted. b. All the items in the tender Specifications are to be filled in. In complete Tender Specifications may not be considered. c. The Director of the Institute reserves the right to reject any tender / all tenders without assigning any reason. d. In case of unsuccessful tender, the EMD will be refunded only after finalisation of contract. e. In case of the tenderer whose offer is accepted, the EMD will be refunded only after receipt, inspection and acceptance of the equipment at CMTI, treating it as a security deposit. f. If the supplier fails to fulfill the terms of purchase order or when the purchaser is satisfied that it is not in the interest of the purchaser to persist with the defaulting supplier, the EMD stands forfeited. Further the purchaser is at liberty to place the order on another supplier at the risk and cost of original supplier. 12. General Terms and Conditions Latest software release version to be given at the time of installation. All software provided should be licensed to CMTI. Maintenance, Enhancement, automatic up-gradation, and Support for 1 year for all software User manuals, all necessary training and training material to be provided. Original Software to be supplied on CD-ROM / DVD-ROM media. Installation commissioning testing training and proving all the features and functions of the system supplied should be the responsibility of the vendor. All Hardware/Software should be IPV6 compliant. Page 3 of 13

4 Technical Specifications of Optical Microscope Page 4 of 13

5 Technical Specifications of Optical Microscope Optical Microscope is required in MEMS packaging process for inspection, process control and defect analysis. It is required for applications like investigating the presence of any residues during the etching process, defects like cracks, scratches etc and for investigating connections after the bonding process. Sl. No Parameter/ CMTI Requirement Remarks 1 Make 2 Model 3 Optical System Microscope should have infinity corrected optical system with chromatic aberration and field curvature compensation. 4 Microscope Frame 4.a Configuration Upright Optical Microscope 4.b Contrast Techniques 4.c Illumination 4.d 4.e 4.f Observation Mode Selection Specimen weight Breath and sneeze guard Observation Tube Revolving nosepiece Fluorescence filter turret 8 XY Stage Reflected light: Bright-field, Dark-field, DIC, Polarization, Fluorescence Transmitted Light: Bright-field, Polarization Reflected light illumination: LED illumination Transmitted light illumination: LED illumination External Metal Halide or 100W mercury arc lamp for fluorescence microscopy Metal Halide or Mercury light source should be isolated from the microscope body through appropriate light guides Motorized aperture diaphragm with minimum of 5 stops. Motorized Maximum of 5 kg Breath and sneeze guard to be provided Trinocular ergo tube with image erection. Switching positions (eyepiece/ camera): 0/100 & 100/0 Motorized 6-fold nosepiece with automatic objective magnification detection. Magnification information to be displayed on screen in the software. Motorized fluorescence filter turret with 6 or more filter cube positions and motorized shutter. Fluorescence light beam path should be corrected for any aberrations to give uniform illumination. Manual XY inspection stage to comply with 6 wafer, 200 * 200 mm travel range, with adjustment handle, for reflected and transmitted light illumination. Page 5 of 13

6 9 Focus drive 10 Stage Inserts Motorized focus Maximum specimen height: 10 mm Stroke of the drive to accommodate the maximum specimen height and working distances of all objective lenses. Software for auto-focusing Resolution: <=10 nm Z-drive to be tested and test reports to be provided. & 360 rotatable manual wafer chuck for 6 wafer Mask holder for 6 wafer Glass insert plate 11 Objective lenses Magnification NA Immersion Contrast Techniques 11.a 2.5X >=0.06 Dry Bright field 11.b 5X >=0.13 Dry 11.c 10X >=0.25 Dry 11.d 20X >=0.45 Dry 11.e 50X >=0.8 Dry 11.f 100X >=0.9 Dry Reflected light: BF, DF, DIC, polarization, fluorescence Transmitted light: BF, Polarization 12 Eyepiece Magnification 10X 13 Microscope Inserts 13.a Filters Daylight filter- to turn the illumination light into daylight Yellow filter contrast filter for observation of semiconductor wafers Light intensity adjustment filter - to adjust the brightness between BF and DF. the transmittance options available Any other filter required for effective operation of all contrast techniques & & Sl. No Excitation Wavelength (nm) Emission Wavelength (nm) 1 BP LP b Fluorescence filter cubes 2 BP LP BP 436/10 LP BP LP BP LP BP 560/40 BP 630/75 13.c DIC High resolution DIC prism/s with motorized turret suitable for all objectives that are provided. 13.d Polarization Graduated 360 rotatable polarizer slider and graduated 360 rotatable analyzer along with lambda plate for color contrast in both reflected and transmitted modes. Page 6 of 13

7 14 Camera Attachment 14.a Resolution 5 MP 14.b Sensor type CCD Color sensor suitable for all contrast techniques. Spectral sensitivity of the sensor may please be specified. Optical 14.c C-Mount Interface 14.d C-mount adapter lens 15 Software Adapter lens of suitable magnification may be provided. Additional 1X C-mount adapter Software to have control of Observation Mode Z focus Objective lens selection Intensity control of all the lamps Aperture stop Hardware auto focusing DIC prism adjustment Should support basic microscope operations like live image preview and image capture. Auto-focusing module Extended focus module for calculation of a sharp image from several focus planes Image stitching module Image processing module Online measurement Interactive measurement - Complete menu of interactive measurement functions included in the software may please be specified. 3D imaging and 3D measurement module to generate the 3d image from z-stack data and perform interactive measurements like height measurements on 3D views Report generation module 16 Computer Configuration of computer required for operating the microscope to be specified and provided Calibration tools Handset for tactile control Safety standards Calibration tools, which are traceable to international standards, with fixtures (if necessary) to calibrate the microscope should be provided. Calibration certificates to be provided Traceability certificates to be quoted as optional. Ergonomically designed handset control for motorized functions of the microscope like objective lens selection, auto focusing, light intensity control of all the lamps, DIC prism adjustment, Z stage control etc. Compliance with SEMI S2 and S8, CE, ROHS, EMC Compliance. Certificates for compliance to safety standards to be quoted as optional. & & & specify & Page 7 of 13

8 20 Precautions Necessary precautions that are to be taken prior and during the operation 21 Dimension (W*L*H) mm 22 Weight In kg 23 Power Supply 24 Clean room compliance Please indicate the clean room class compliance of the microscope 25 Accessories Necessary accessories for normal operation of the equipment are to be indicated and provided. 26 Spares 27 Training Vendors to provide training for at least 2 people on operation and maintenance at CMTI during installation. 28 Users list Provide a list of users for the quoted model in India with full contact details Warranty Inclusive of parts and labor Documents/ Manuals 31 Acceptance The complete system and its associated hardware / software should have a standard warranty for a minimum of 12 months from the date of installation, commissioning and acceptance of the system at CMTI. Supplier modification(s) / Software upgrades should be intimated and the same should be made available free of cost during the warranty period. & & quote 12 months extended warranty to be quoted as optional. Operation Manual Maintenance Manual Inspection Software Manual Spare parts list with source of supply and prices Manuals of bought-out items, if any, incorporated in the system Details regarding the safety measures adopted in the system 1 set of hard copy and 1 set of soft copy in English The capabilities of the microscope, part accuracies must be proved by supplier as per CMTI's acceptance criteria, at CMTI after installation. 32 Installation Installation and commissioning at CMTI should be done by OEM/ authorized personnel. 33 Certificates Calibration certificate (for calibration tools) and test reports (for motorized Z-Drive) must be provided 34 Service Support The supplier should support the system minimum for 10 years (post warranty, with all spares and services). Exact lifecycle of the offered unit has to be specified. Page 8 of 13

9 Acceptance Criteria Page 9 of 13

10 Acceptance Criteria for Optical Microscope Sl.No 1 Parameter& Items Optical System Specification Microscope should have infinity corrected optical system with chromatic aberration and field curvature compensation. 2 Configuration Upright optical microscope Testing Method Functional verification /Supporting Document Physical verification 3 Contrast Techniques 4 Illumination Observation 5 Mode Selection Sample 6 Weight Handling Breath and 7 sneeze guard 8 Observation Tube 9 Revolving nosepiece 10 Fluorescence filter turret 11 XY Stage 12 Focus drive Reflected light: Bright-field, Dark-field, DIC, Polarization, Fluorescence Transmitted Light: Bright-field, Polarization Reflected light illumination: LED illumination Transmitted light illumination: LED illumination External Metal Halide or 100W mercury arc lamp for fluorescence microscopy Metal halide or Mercury light source should be isolated from the microscope body through appropriate light guides Motorized aperture diaphragm with minimum of 5 stops. Motorized Maximum of 5 kg Breath and sneeze guard to be provided Trinocular ergo tube with image erection. Switching positions (eyepiece/ camera): 0/100 & 100/0 Motorized 6-fold nosepiece with automatic objective magnification detection. Magnification information to be displayed on screen in the software. Motorized fluorescence filter turret with 6 or more filter cube positions and motorized shutter. Fluorescence light beam path should be corrected for any aberrations to give uniform illumination. Manual XY inspection stage to comply with 6 wafer, 200 * 200 mm travel range, with adjustment handle, for reflected and transmitted light illumination Motorized focus Maximum specimen height: 10 mm Stroke of the drive to accommodate the maximum specimen height and working distances of all objective lenses. Software for auto-focusing Resolution: <=10 nm Z-drive to be tested and test reports to be provided Functional verification Functional verification Physical verification Functional verification /Supporting Document Physical verification Functional verification/ supporting document Page 10 of 13

11 13 Stage Inserts X objective lens 10X objective lens 20X objective lens 50X objective lens 100X objective lens 2.5X objective lens Eyepiece Magnification 21 Filters DIC Fluorescence filter cubes 24 Polarization Camera Resolution Camera sensor type Optical Interface C-mount adapter 360 rotatable manual wafer chuck for 6 wafer Mask holder for 6 wafer Glass insert plate >=0.13NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.25NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and Transmitted light (BF, Polarization) >=0.45 NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.8 NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.9 NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.06 NA, suitable for bright field 10X Daylight filter- to turn the illumination light into daylight Yellow filter contrast filter for observation of semiconductor wafers Light intensity adjustment filter - to adjust the brightness between BF and DF Any other filter required for effective operation of all contrast techniques Sl. No Excitation Wavelength (nm) Emission Wavelength (nm) 1 BP LP BP LP BP 436/10 LP BP LP BP LP 590 Functional verification/ Supporting document to prove the resolvable feature sizes. 6 BP 560/40 BP 630/75 High resolution DIC prism/s with motorized turret suitable for all objectives that are provided. Graduated 360 rotatable polarizer slider and graduated 360 rotatable analyzer along with lambda plate for color contrast in both reflected and transmitted modes. 5 MP CCD Color sensor suitable for all contrast techniques C-Mount Adapter lens of suitable magnification may be provided. Additional 1X C-mount adapter Page 11 of 13

12 29 Software 30 Computer 31 Calibration tools Software to have control of Observation Mode Z focus Objective magnification Intensity control of all the lamps Aperture stop Hardware auto focusing DIC prism adjustment Should support basic microscope operations like live image preview and image capture. Auto-focusing module Extended focus module for calculation of a sharp image from several focus planes Image stitching module Image processing module Online measurement Interactive measurement - Complete menu of interactive measurement functions included in the software may please be specified. 3D imaging and 3D measurement module to generate the 3d image from z-stack data and perform interactive measurements like height measurements on 3D views Report generation module Configuration of computer required for operating the microscope to be specified and provided. Calibration tools, which are traceable to international standards, with fixtures (if necessary) to calibrate the microscope should be provided. Calibration certificates to be provided Traceability certificates to be quoted as optional. Physical and functional Verification Physical verification Supporting certificates Supporting certificates Handset for tactile control Safety standards 34 Precautions 35 Accessories 36 Training Ergonomically designed handset control for motorized functions of the microscope like objective lens selection, auto focusing, light intensity control of all the lamps, DIC prism adjustment, Z stage control etc. Compliance with SEMI S2 and S8, CE, ROHS, EMC Compliance. Certificates for compliance to safety standards to be quoted as optional. Necessary precautions that are to be taken prior and during the operation Necessary accessories for normal operation of the equipment are to be indicated and provided. Supporting document Supporting document Physical verification Vendors to provide training for at least 2 people on operation and maintenance at CMTI during installation. 37 Users list Provide a list of users for the quoted model in India with full contact details. Supporting document Page 12 of 13

13 38 39 Warranty Inclusive of parts and labor Documents/ Manuals 40 Acceptance 41 Installation 42 Certificates The complete system and its associated hardware / software should have a standard warranty for a minimum of 12 months from the date of installation, commissioning and acceptance of the system at CMTI. Supplier modification(s) / Software upgrades shall be intimated and same will be made available free of cost during the warranty period. 12 months additional warranty to be indicated as optional. Operation Manual Maintenance Manual Inspection Software Manual Spare parts list with source of supply and prices Manuals of bought-out items, if any, incorporated in the system Details regarding the safety measures adopted in the system 1 set of hard copy and 1 set of soft copy in English The capabilities of the microscope, part accuracies must be proved by supplier as per CMTI's acceptance criteria, at CMTI after installation. Calibration certificate (for calibration tools) and test reports (for motorized Z-Drive) must be provided Warranty Certificate Physical verification. Complete features and functionality has to be demonstrated Installation and commissioning should be done by OEM/ authorized personnel Calibration certificates and test reports Note: 1 The equipment will be finally accepted based on the compliance of the equipment with the Acceptance Criteria. The final Acceptance Criteria will be based on mutual agreement and will be finalized at the time of placing the order. Hence, the bidder has to go through the Acceptance Criteria and convey their acceptance unambiguously. They may also suggest a suitable method of verification if the proposed method is not acceptable to the bidder. Page 13 of 13