Modern measurement and calibration systems ensure the precision for the fabrication of high-technology products

Transcription

1 SIOS Meßtechnik GmbH Am Vogelherd 46 D Ilmenau Germany Tel.: +49 (0) Fax: +49 (0) Modern measurement and calibration systems ensure the precision for the fabrication of high-technology products Peter Grundschok - Sales Manager Precisiebeurs 2014

2 SIOS Meßtechnik GmbH ILMENAU Foundation of the SIOS Meßtechnik GmbH by Prof. G. Jäger and employees of TU Ilmenau First activities in the Technology Park Ilmenau Beginning of the production in the own manufacturing facility located in Ilmenau s Am Vogelherd 46 Complete establishment of the company in Ilmenau s Technology Park Am Vogelherd Completion of a new building for modern production and management Extension of the SIOS building New SIOS production building

3 ILMENAU CITY

4 THE COMPANY MANUFACTURES LASER AND OPTICAL FIBRE TECHNOLOGY - Stabilized HeNe lasers - Optical fibre connections LASERINTERFEROMETRIC SINGLE AND MULTI COORDINATE MEASUREMENT - Optical fibre-coupled miniature interferometers both with plane mirror and with corner cube prism for precision length measurement - Precision gauging probes LASERINTERFEROMETRIC VIBRATIONAL AND ANGULAR MEASUREMENT - Laserinterferometric vibrometers - Double interferometers for simultaneous length and angular measurements MEASURING AND TESTING RIGS - Gauge block calibration system - Thickness measuring system - Optical-interference testing rig for applanation tonometers FORCE MEASUREMENT AND WEIGHING TECHNIQUE - Dynamic and precision weighing technique - Weighing technique for equipment - Components for comparator scales NANOPOSITIONING AND NANOMEASURING MACHINES

5 STANDARD PRODUCTS STABILIZED HeNe-LASER SL Series COUPLING INTO FIBEROPTICS Custom-tailored units for coupling laser beams into single-mode or multimode (polarization-insensitive/ polarizationpreserving) optical fibers SL 02 SL 04 SL 03 TECHNICAL DATA Frequency stability Frequency-stabilized or amplitude-stabilized mode (SL 03/1 and SL 04) High coupling efficiencies (> 50 %) Available with either factory-fitted fiberoptic connectors (DIN, E2000, etc.) on their loose ends or with fiber pigtails

6 MICHELSON INTERFEROMETER TYPES Interferometer with cube corner reflector Interferometer with plane mirror reflector

7 A SCHEMATIC MICHELSON INTERFEROMETER HeNe-laser Reference reflector Singlemode fibre cable Collimator Measurement reflector Multimode fibre cable DC Photo diode Signal processing digital / analog

8 Interferometer Concepts SIOS fiber coupled interferometer Fiber coupled interferometer Other Interferometers Interferometer with reflector He-Ne-Laser Data processing unit He-Ne-Laser Compact measuring arrangements are possible Modular system design Stabilized or unstabilized laser in device Easy to adjust in any direction All heterodyne interferometers have this arrangement Laser source has to be placed at visible distance to the interferometer optics Compact measuring arrangements are not possible Tilted interferometer setups are difficult to adjust

9 STANDARD PRODUCTS MINIATURE RETROREFLECTOR INTERFEROMETER MI Series Complete interferometer setup Standard configuration model MI 5000 Modular data processing unit TECHNICAL DATA Interferometer (Alu, Stainless Steel, Invar) Air pressure and humidity sensor Air temperature sensor Measuring range 5 m Resolution Uncertainty 0.1 nm L = L

10 MI 5000 Interferometer Calibration in PTB Exemplarily uncertainty of MI 5000 U L nm L 2 Systematic error 120 nm/m

11 STANDARD PRODUCTS MINIATURE RETROREFLECTOR INTERFEROMETER MI Series NEW Compact version of MI 5000 for service and on site use MI 5000 K Optionally with transportation system case

12 STANDARD PRODUCTS MINIATURE RETROREFLECTOR INTERFEROMETER MI Series Calibration of machine axes MI sensor head PT100 Temperature sensor Magnetic holder Magnetic holder Adjustable mount Retroreflector Retroreflector Magnetic holder Horizontal measurement

13 CUSTOMER APPLICATION HARDNESS TESTING MI Series ADVANTAGE High precise measurement of the Force / Path characteristics

14 VARIANTS WITH PLANE MIRROR OVERVIEW SP series single beam length measuring SP-D series double beam Interferometer for length - and ancle measuring SP-TR series triple beam Interferometer for simultaneous length - and Pitch - and Yaw ancle measuring Ancle measuring range ± 2 Ancle measuring range ± 2 Resolution 0,1 0,001 Resolution 0,002 Measuring range Resolution up to 2 m 20 pm

15 SPECIAL APPLICATION SP 2000 Calibration of three-axes parallel kinematics machines Working spindle Mirror with adjusting mount SIOS Sensor Workspace SOURCE / USER TU Wien, Labor für Produktionstechnik IFT

16 SPECIAL APPLICATION SP 2000 Calibration of three-axes parallel kinematics machines SETUP COMPARISION NEW Miniature plane-mirror interferometer, SP-Series TRADITIONAL Retroreflektor Interferometer SOURCE / USER TU Wien, Labor für Produktionstechnik IFT

17 SPECIAL APPLICATION SP 2000 Calibration of three-axes parallel kinematics machines SIOS Miniature plane-mirror interferometer SUORCE USER TU- Wien, Labor für Produktionstechnik IFT

18 The LaserTRACER Interferometer with µm resolution (1) Patented reference sphere (2) with form deviation < µm on a stable pillar (3) Environmental compensation for temperature, pressure, humidity Etalon AG Length measurement uncertainty: U 95 = 0.2 µm µm/m

19 Application examples Etalon AG

20 STANDARD PRODUCTS TRIPLE-BEAM PLANE-MIRROR INTERFEROMETER SP-TR Series NEW Triple-cat s eye reflector Increase of angular measuring range up to ± 12.5 TECHNICAL DATA Length measuring ranges, each channel Length resolution Pitch and yaw measuring ranges Angular resolution at 0.1 nm length resolution Max. translation range 2,000 mm 0.1 nm ± 2 arcmin arcsec 800 mm/s

21 APPLICATION SP-DS, SP-TR INTERFEROMETERS Correction of Abbe-error by simultaneous length and angle measurements Interferometer, one beam Interferometer, two beams

22 APPLICATION SP-DS, SP-TR INTERFEROMETERS Correction of Abbe-error by simultaneous length and angle measurements Cutting edge technology of SP interferometers Position deviations Only one measuring beam allows an exact definition of the measuring point Multi-axis interferometers allows angular and displacement measurements Abbe errors compensation is possible pitch angle yaw angle Interferometer Target Corrected position deviations

23 CUSTOMER APPLICATION FOR CLOSED LOOP CONTROL Plane-Mirror Interferometer SP Series Planar table Travel range Measuring resolution Measuring resolution Phi z Ø 100 mm 0,02 nm 0,8 nrad Achieved 2D servo error (RMS) 0,4 nm Design and performance evaluation of an interferometric controlled planar nanopositioning system, S Hesse et al 2012 Meas. Sci. Technol. 23

24 NEW PRODUCTS Long Range Triple Beam Interferometer Integrated PSD Diode for alignment of the axis NEW SP Series Deflecting mirror Reflector unit Sensor head Length measurement 15 m Pich - and Yaw ancle measuring range ± 5 Max. object speed 600 mm/s Beam distance 50mm

25 COSINE - ERROR IN THE APPLICATION Direction alignment error l cos1 lm [1 cos( f)] lm - Measuring displacement f - Angle Example 1 Visible beam shift at target Movement distance Angle Error 0.5 mm 500 mm 3.4 arcmin (1 mrad) 0.25 nm Example 2 Visible beam shift at target Movement distance Angle Error 1 mm 50 mm 68 arcmin (20 mrad) 100 nm

26 ADJUSTMENT AID OF THE SP NEW Special adjustment aid by PSD sensor connected with Hollow-reflector ADVANTAGE New industrial design Easy handling Special calibration soft ware program according to DW standard and DGQ 344

27 CALIBRATION SOFT WARE SP NEW

28 CALIBRATION SOFT WARE SP NEW

29 STANDARD PRODUCTS DIFFERENTIAL INTERFEROMETER WITH PLANE MIRROR REFLEKTOR Interferometer with external reference beam SP-DI Series Measuring mirror 1 - s s 2 + Measuring mirror 2 TECHNICAL SPECIFICATION Symmetrical construction Highest long-term stability Death path compensation Beam separation ~ 20 mm Resolution < 0.1 nm Temperature sensitivity < 20 nm/k The result of measurement is the difference between displacements measured by each beam At least one beam must be reflected from a surface of high reflectance

30 CUSTOMER APPLICATION DILATOMETER Dilatometer for measuring of the thermal expansion coefficient SP-DI Series SOURE / CUSTOMER Linseis Meßgeräte GmbH

31 SPECIAL APPLICATION IN VACUUM MINIATURE PLANE-MIRROR INTERFEROMETERS SP Series with external reference beam for vacuum up to 10-6 mbar nonlinearity < 1 nm moving target for clean room conditions ready on request reference mirror / surface SP-DS sensor head xy table SP-TR sensor head SP sensor head

32 STANDARD PRODUCTS MICROSCOPE WITH ADAPTED VIBROMETER High resolution frequency analysis of vibrating micro objects Amplitude resolution Wavelength Scan field range in x-y-direction Manual travelling range in z-direction 20 pm nm 50 mm x 50 mm 270 mm Microscope magnification 10 x 50 x Visual field size 650 µm x 500 µm 130 µm x 100 µm Laser beam diameter < 10 µm < 2 µm Working distance ~ 35 mm ~ 10 mm

33 STANDARD PRODUCTS MICROSCOPE WITH ADAPTED VIBROMETER NA Series High resolution frequency analysis of vibrating micro objects APPLICATIONS 25 pm Thermal movement of a AFM-cantilever without any excitation Please note the amplitude of just 25 pm!

34 COMPLETE SYSTEMS LASER-INTERFEOMETRIC GAUGING PROBE LM Series Measuring range 20 mm / 50 mm Resolution 0.1 nm

35 COMPLETE SYSTEMS WAFER THICKNESS MEASURING STATION High-precision station for measuring semiconductor wafers or other objects with plane-parallel geometries and diameters ranging up to 300 mm THICKNESS MEASUREMENT OF OPTICAL LENSES Uncertainty 50 nm Uncertainty 10 nm

36 COMPLETE SYSTEMS NANOPOSITIONING AND NANOMEASURING MACHINE Three-dimensional coordinate measuring machine NMM-1 TECHNICAL DATA Measuring and positioning range 25 mm x 25 mm x 5 mm Resolution Driving principle 0.1 nm electromagnetic Driving speed, except in measurement mode X, Y axis 2 mm/s Z axis 50 mm/s Probe sensors external analog interface for customized probe sensor system is

37 COMPLETE SYSTEMS NANOPOSITIONING AND NANOMEASURING MACHINE Three-dimensional coordinate measuring machine NMM-1 y-interferometer z Pitch and yaw angular sensor ' z Roll and yaw angular sensor Measurement beam of y-axis Intersection of measurement beams and contact point of surface-sensing probe x ' x z-interferometer ' y y Measurement beam of z-axis x-interferometer Measurement beam of x-axis

38 AVAILABLE PROBE - SYSTEMS NMM-1 Probe systems Fix-Focus-Sensor Atomic Force Microscope White Light Sensor 3D-Micro Probe 1D Sensors Imaging sensor Tactile 3D sensor

39 NMM-1 WITH AFM Step height calibration Measurement results of the metrological system PTB calibration result NMM + Laser Focus Sensor 294,48 nm 0,17 nm (k=2) NMM + AFM contact mode NMM + AFM non contact mode 295,39 nm 1,1nm (k=2) 295,04 nm 1,0 nm (k=2) 294,2 nm U=2 nm (k=2)

40 THANK YOU VERY MUCH FOR YOUR ATTENTION! IF YOU HAVE QUESTIONS... Please visit us on booth 97 TE LINTELO SYSTEMS BV 15