representing HEATER SYSTEMS for Science and Semiconductor application
& Advanced Heater Systems + maintenance friendly + excellent life time + cost saving
In Cooperation with Presenting Today ADVANCED HEATER SYSTEMS with up to 450 C line operation
1- Requirements for heater application Anlagen- und Komponententechnik GmbH Dresden Benefits from heating Reduction of particles Greater process yield Better run-to-run repeatability Increased uptime More throughput Reduced PM effort fewer pump rebuilds, less line cleaning Increased pump lifetime
B - Special Features of Heater Jackets differences in heater construction Anlagen- und Komponententechnik GmbH Dresden exists 3 big construction groups & some mixtures between fibre free Insulated heater Silicon foam heater Glass fibre / mineral wool insulated heater Construction causes differences in quality features
A key advantage! HEMI Heater Jackets Less particle! Special Glass fibre free insulation NOMEX multi layer sandwich construction Insulation: 4-layer META-Aramide fibres Thickness: 26mm ( 4x6mm ).Maximum jacket temp: 200 degr. C. Thermal conductivity: 200 degr.c : 0,055 W/mk Less outgassing!
2 - Special construction of HEMI Heater JAckets is creating Anlagen- und Komponententechnik GmbH Dresden HEMI MAIN FEATURES A) full CLEANROOM COMPATIBLE Very Low Particle Load for max. yield lowest cross contamination B) 200 C TEMPERATURE CAPABILITY C) extended lifetime (keeps the budget fair) Long time stable & proper construction D) High Energy efficiency
HEMI Heater Jackets d high energy efficiency construction Anlagen- und Komponententechnik GmbH Dresden Ø POWER CONSUMPTION vs. TEMP. Cycled medium power [ W ] at reference section 1600 1400 1200 1000 800 600 400 200 0 reference heater B reference heater A HEMI-Heating Jacket 0 50 100 150 200 Object temperature [ C ]
HEMI Heater Jackets d high energy efficiency construction Compare 2 different products in your fab Anlagen- und Komponententechnik GmbH Dresden CONNECTED POWER
HEMI Heater Jackets d high energy efficiency construction POWER CONSUMPTION AT 1 TOOL Anlagen- und Komponententechnik GmbH Dresden exhaust line + forvacuum line in total per heated tool 1.0 : 2.6 kw plus 2.8 : 7.3 kw = 3.8 kw or 9.9 kw :
POWER CONSUMPTION in 1 fab 3.8 : 9.9 kw per heated chamber ~ 15.000 MWh saving in 5 years. Connected heater load per fab 244 : 634 kw = 390 kw difference in power supply 2.900 MWh saving p.a. No. Heated tool chambers tool-chamber 1 CVH01-A 2 CVH01-B 3 CVH01-C 4 CVP01-A 5 CVP01-B 6 EMT01-A 7 EMT01-B 8 EMT01-C 9 EMT01-D 10 FHT -01 11 FNT -01 12 FPY -01 13 CVL 01-A 14 CVL 01-B 15 CVW 01-A 16 CVW 01-B 17 CVW 01-C 18 CVB 01-A 19 CVB 01-B 20 CVB 01-C 21 EPY 01-A 22 EPY 01-B 23 EPY 01-C in 1 fab No. tool-chamber 24 CVB 02-A 25 CVB 02-B 26 CVB 02-C 27 CVW 02-A 28 CVW 02-B 29 CVW 02-C 30 EMT 02-A 31 EMT 02-B 32 EMT 03-A 33 EMT 03-B 34 FNT 02 35 FHT 02 36 FPY -02 37 CVL 02-A 38 CVL 02-B 39 EPY 02-A 40 EPY 02-B 41 EPY 02-C 42 FNT 03 43 FHT 03 44 EPY 03-A 45 EPY 03-B No. Anlagen- und Komponententechnik GmbH Dresden tool-chamber 46 CVP 02-A 47 CVP 02-B 48 EMT 04-A 49 EMT 04-B 50 EMT 05-A 51 EMT 05-B 52 CVW 03-A 53 CVW 03-B 54 CVW 03-C 55 CVP 21-A 56 CVP 21-B 57 EPY 04-A 58 EPY 04-B 59 EPY 05-A 60 EPY 05-B 61 EMT 42-A 62 EMT 42-B 63 FNT 04 64 OCR-EOX 22-A total 64 chamber
D high energy efficiency construction LOW CONNECTING POWER LOW THERMAL LOSSES TO INSTALLATION AREA LOW RUNNING COSTS Energy cost saving construction
- Special construction of HEMI Heater Jackets 100 90 Touch protection limit Silicon rubber jacket 80 HEMI-Heating Jacket 70 The 60 higher You heat - The longer you free (from cleaning) Jacket surface temperature [ C ] B Process Flexibility and Object Temp. 50 40 30 20 10 0 UVV limit For harsh proceses 0 25 50 75 100 125 150 175 200 Object temperature [ C ]
APPLICATION NOTES
The full range of vacuum heater application throttle valves possible up to DN from 500 DN 100..250 one hand Isolation valve valve from arrays DN 25 We are serving not only simple tube heater... heater - but all types of special components required in a real process installation (hook up)) ( incl. metal flex lines, bellows, valves,..) incl. functional elements from many manufacturers Jalapeno valves
from one hand Anlagen- und Komponententechnik GmbH Dresden full range of gas supply heater Pressure Regulator heater ( CO2, N2O,...) Gas supply line heater (BCl 3, DCS, C 4 F 8,...) MFC heater Gas cylinder heater (NH 3, CO 2, N 2 O,...)
heater for ALD gas supply (R & D ) Heater jackets for gas components up to 230
UHV supply heater (R & D ) DN500 vacuum system with 12.000 L/s cryo pumps
heater for Solar Cell manufacturing Complete DN150 vacuum system with 450 C temperature range
XHV Physics & Analytics
pipe trace heater systems Thermo Regulating devices Customized Monitoring systems
Central fab controller Anlagen- und Komponententechnik GmbH Dresden
Semi central fab controller
Semi central fab controller -Group Anlagen- und Komponententechnik GmbH Dresden
Signalisation & Monitoring systems with increasing steps of function control TOTAL PROCESS MONITORING INDIVIDUAL JACKET CONTROL HIGH / LOW DEVIATION CONTROL CONTROL DESK SIGNALISATION
HEMI HEATING pipe trace heater system MAIN FEATURES 200 C TEMPERATURE CLEANROOM COMPATIBLE LOW PARTICLE LOAD IN CONFORMITY WITH UVV LOW COO STATUS INDICATION TOTAL PROCESS MONITORING INDIVIDUAL JACKET CONTROL HIGH / LOW DEVIATION CONTROL CONTROL DESK SIGNALISATION FLEXIBLE FIT TOTAL COVERING NO COLD SPOTS STABLE CONSTRUCTION LOW CONNECTING POWER LOW THERMAL LOSSES
& Advanced Heater Systems + cost saving + maintenance friendly + full range of heater solution
heater systems thank you for your attention end