Samsung Galaxy S4 Display Process Analysis 1891 Robertson Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: 613-829-0414 www.chipworks.com
Display Process Analysis Some of the information in this report may be covered by patents, mask, and/or copyright protection. This report should not be taken as an inducement to infringe on these rights. Chipworks Inc. 2013 all rights reserved. Chipworks and the Chipworks logo are registered trademarks of Chipworks Inc. This report is provided exclusively for the use of the purchasing organization. It can be freely copied and distributed within the purchasing organization, conditional upon the accompanying Chipworks accreditation remaining attached. Distribution of the entire report outside of the purchasing organization is strictly forbidden. The use of portions of the document for the support of the purchasing organization s corporate interest (e.g., licensing or marketing activities) is permitted, as defined by the fair use provisions of the copyright act. Accreditation to Chipworks must be attached to any portion of the reproduced information. CWR-1305-801 25010CYRKSDW Revision 1.0 Published: July 2, 2013
Display Process Analysis Table of Contents 1 Overview 1.1 List of Figures 1.2 List of Tables 1.3 Company Profiles 1.4 Introduction 1.5 Device Summary 2 Device Overview 2.1 Downstream Product 2.2 Display Module Features Cross-Sectional Analysis 3 Touch Screen Panel Analysis 3.1 Touch Screen Panel Plan-View Analysis 4 AMOLED Panel Analysis 4.1 AMOLED Panel Overview and Features 4.2 AMOLED Array Cross-Sectional Analysis Process Analysis 4.3 AMOLED Pixel Overview, Schematic, and Planar Analysis 4.4 AMOLED Array Cross-Sectional Analysis Pixels 5 Critical Dimensions 5.1 Display Module Dimension 5.2 Dimensions 6 References 7 Statement of Measurement Uncertainty and Scope Variation About Chipworks
Overview 1-1 1 Overview 1.1 List of Figures 2 Device Overview 2.1.1 Samsung Galaxy S4 Front Plan View 2.1.2 Samsung Galaxy S4 Back Tilt View 2.1.3 Samsung Galaxy S4 Display PenTile Sub-Pixels in Operation A 2.1.4 Samsung Galaxy S4 Display PenTile Sub-Pixels in Operation B 2.1.5 Samsung Galaxy S4 Back Plate Removed 2.1.6 Samsung Galaxy S4 Display Removed Tilt View 2.1.7 Samsung Galaxy S4 Display Back Side Plan View 2.1.8 Samsung Galaxy S4 Display Ribbon Cable Markings and Touch Screen Controller 2.1.9 Display Module Panel Top Corner Overview 2.1.10 Display Module Panel Top Corner in Detail 2.1.11 TSP Mask Markings 2.1.12 Interlayer Alignment Structures 2.1.13 Process Monitor Markings 2.1.14 AMOLED Panel Markings 2.1.15 AMOLED Panel 2D Matrix Marking 2.1.16 AMOLED Panel Test Structures 2.1.17 Section Map of Analysis 2.2.1 Display Module Stack Overview Diagram 2.2.2 Overview Cross Section of the Module SEM 2.2.3 Polymer Layers Underneath the Cover Glass SEM 2.2.4 Polymer Layers Between the Cover Glass and TSP Glass Optical 2.2.5 Polymer Layers Between the Cover Glass and TSP Glass SEM 2.2.6 Overview of the TSP Sensor and AMOLED Glass Assembly 2.2.7 Overview of Glass Frit Seal Between the TSP and AMOLED Glass 2.2.8 Details of Glass Frit Seal Between the TSP and AMOLED Glass 2.2.9 Gap Between the TSP Glass and AMOLED Glass 2.2.10 Polymer Layers Beneath the AMOLED Glass Optical 3 Touch Screen Panel Analysis 3.1.1 Bottom Left Corner 3.1.2 Bottom Right Corner 3.1.3 Sense Grid ITO Connected to Bus on Left Edge 3.1.4 Sense Grid ITO Connected to Bus on the Left Edge Detail 3.1.5 Details of Peripheral Interconnect to Sense Grid 3.1.6 Bus Lines Along the Right Edge Detail 3.1.7 Sense Grid and Narrow Busses Along Bottom Edge 3.1.8 Sense Grid and Wide Busses Along Bottom Edge 3.1.9 Sense Grid Junction 3.1.10 Sense Grid Cross-Connects 3.1.11 Overview of a Small Grid Island and Cross-Connect Strap 3.1.12 Minimum Width ITO Patch and Minimum Width Metal 2 3.1.13 Gap in ITO Strips Within Sense Grid
Overview 1-2 3.1.14 Chevrons Pattern in ITO 4 AMOLED Panel Analysis 4.1.1 Diagram of a Typical Top-Emission Panel 4.1.2 AMOLED Panel 4.1.3 Top Left Corner of AMOLED Array 4.1.4 Top Right Corner of AMOLED Array 4.1.5 AMOLED Array Overview of Short Edge and Vias to OLED Cathode 4.1.6 AMOLED Array Detail of Shield Over Row Busses 4.1.7 Vias to OLED Cathode Detail 4.1.8 AMOLED Array Bottom Left Corner 4.1.9 AMOLED Array RGB Sub-Pixels Overview 4.1.10 AMOLED Array RGB Sub-Pixels Detail 4.2.1 Basic Conceptual Diagram of an OLED Cross Section 4.2.2 General Structure of Region A 4.2.3 General Structure of Region B 4.2.4 Overcoat SEM 4.2.5 Pixel Definition Layers Between Pixels SEM 4.2.6 Passivation Layers Overview SEM 4.2.7 Passivation Layers Detail SEM 4.2.8 IMD 2 and IMD 1 TEM 4.2.9 PMD TEM 4.2.10 Isolation Under Polysilicon TEM 4.2.11 Metal 5 TEM 4.2.12 Metal 4 TEM 4.2.13 Metal 3 TEM 4.2.14 Metal 3 Cap TEM 4.2.15 Metal 3 Barrier TEM 4.2.16 Metal 2 and Metal 1 SEM 4.2.17 Metal 2 and Metal 1 TEM 4.2.18 Metal 1 Edge 4.2.19 Via 4 SEM 4.2.20 Via 3 (Type A) SEM 4.2.21 Via 3 (Type B) SEM 4.2.22 Al-Lined Trench Beside Via 3 Detail SEM 4.2.23 Via 2 SEM 4.2.24 Metal 1 Gate Contact SEM 4.2.25 Contact to Source/Drain of Polysilicon SEM 4.2.26 Contact to Source/Drain of Polysilicon TEM 4.2.27 Metal 4 Anode Connection to Source/Drain of Polysilicon TEM 4.2.28 Metal 3 Connection to Source/Drain of Polysilicon TEM 4.2.29 Poly Over Isolation TEM 4.2.30 MIM Capacitor with Top Plate Contact Overview SEM 4.2.31 MIM Capacitor Plates and Top Plate Contact Details SEM 4.2.32 MIM Capacitor Bottom Plate Contact SEM 4.2.33 TFT Overview SEM
Overview 1-3 4.2.34 TFT Detail TEM 4.3.1 AMOLED Pixel Schematic 4.3.2 AMOLED Green Pixel Schematic 4.3.3 AMOLED Array Pixels in Operation PenTile Unit Cell 4.3.4 AMOLED Array Pixels in Operation Sub-Pixel Pitch 4.3.5 AMOLED Array Pixels in Operation Sub-Pixels Detail 4.3.6 AMOLED Pixels at Metal 4 4.3.7 AMOLED Pixels at Metal 4 and Via 3 4.3.8 AMOLED Pixels at Metal 3 and Via 3 4.3.9 AMOLED Pixels at Metal 2 and Via 1 4.3.10 AMOLED Pixels at the Metal 2 Capacitor Plate and Metal 1 Lines 4.3.11 AMOLED Pixels at the Bottom Metal 1 Capacitor Plate 4.3.12 AMOLED Pixels at Polysilicon 4.3.13 AMOLED Pixels Viewed from the Back Side of the AMOLED Panel 4.3.14 AMOLED Array Bottom Long Edge Overview of Column Drive Circuits 4.3.15 AMOLED Array Bottom Long Edge Detail of Pixel Array to Column Drive Circuit Transition 4.3.16 AMOLED Array Bottom Long Edge Column Drive TFTs 4.3.17 AMOLED Array Top Long Edge 4.3.18 AMOLED Array Short Edge 4.4.1 Guide to Locations of Cross Sections of AMOLED Pixels 4.4.2 Blue Pixel Overview SEM Cross Section A 4.4.3 Blue Pixel Edge SEM Cross Section A 4.4.4 Non-Emitting Region Near Blue Pixel Edge in Detail SEM Cross Section A 4.4.5 Blue Pixel Emissive Layer SEM Cross Section B 4.4.6 Blue Pixel Edge Detail TEM 4.4.7 Red Pixel Edge in Detail SEM Cross Section B 4.4.8 Red Pixel Emissive Layer SEM Cross Section B 4.4.9 Red Pixel Edge in Detail TEM Cross Section 4.4.10 Green Pixel Overview SEM Cross Section C 4.4.11 Green Pixel Edge in Detail SEM Cross Section C 4.4.12 Green Pixel Overview SEM Cross Section 4.4.13 Green Pixel Edge in Detail TEM Cross Section
Overview 1-4 1.2 List of Tables 1 Overview 1.4.1 Samsung Super Modules Summary 2010 to Present 1.4.2 Device Identification 1.5.1 Samsung Galaxy S4 Device Summary 1.5.2 Samsung Galaxy S4 Touch Screen Panel Summary 1.5.3 Samsung Galaxy S4 AMOLED Panel Summary 2 Device Overview 2.2.1 Summary of Main Layers in the Display Module 3 Touch Screen Panel Analysis 3.1.1 Touch Screen Panel Horizontal Dimensions 4 AMOLED Panel Analysis 4.1.1 AMOLED Panel Horizontal Dimensions 4.2.1 AMOLED Panel Vertical Dimensions 4.3.1 AMOLED Pixel Horizontal Dimensions 4.4.1 AMOLED Array Layers Summary 5 Critical Dimensions 5.1.1 Summary of Main Layers in the Display Module 5.1.2 Touch Screen Panel Horizontal Dimensions 5.2.1 AMOLED Panel Horizontal Dimensions 5.2.2 AMOLED Panel Vertical Dimensions 5.2.3 AMOLED Pixel Horizontal Dimensions 5.2.4 AMOLED Array Layers Summary
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