HOQ GENERAL PRODUCT DESCRIPTION

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HOQ 310 1. GENERAL PRODUCT DESCRIPTION Heraeus HOQ (Heraeus Optical Quality) fused quartz material is economically priced and has been developed especially for applications in the technical optics field, such as inspection and illumination windows, cover plates, etc. HOQ material is manufactured by fusion of natural quartz crystals. Compared with typical optical glasses it provides a unique combination of attractive properties: Excellent optical transmission from the UV into the IR spectral region Outstanding high temperature resistance Extremely low coefficient of thermal expansion Superior temperature shock resistance Excellent chemical resistance Outstanding chemical purity These properties - combined with low bubble content and an attractive price - make HOQ fused quartz a preferred material for lower precision optical components in a hostile environment, e.g., high temperature and/or thermal shock loads, pressure loads, chemically aggressive environment, etc. HOQ 310 exhibits a significantly reduced bubble content. With the naked eye and daylight illumination, bubbles are scarcely observable (Bubble class 3 as per DIN 58927). HOQ 310 is delivered in an annealed state without internal stress. This is particularly important for applications as a pressure vacuum window, or if high mechanical loads are to be expected.

POL-O/419M-E 2. TECHNICAL DATA During manufacture, HOQ, like all other Heraeus quartz glass grades, undergo a multi-step process control and quality inspection. As a result, the material properties can be kept consistent within relatively narrow limits. 2.1 Optical Properties 2.1.1 Spectral Transmission The transmission (including Fresnel reflection losses at two uncoated surfaces) for a 10 mm path length is shown in the figure. 2.1.2 Refractive Index n C ( = 656.3 nm) n ( = 587.6 nm) d n F ( = 486.1 nm) n g ( = 435.8 nm) 1.45646 1.45856 1.46324 1.46681 2.1.3 Dispersion Abbe-Constant v d = n d - 1 = 67.6 ± 0.5 F - n C n F - n C Principal Dispersion n 0.00678 2.1.4 OH Content OH Content (with OH = 77.5 liter at 2.72 µm) 30 ppm Mol cm Accordingly, there are weak infrared absorption bands around 1.39 µm, 2.2 µm, and 2.72 µm. 2.1.5 Birefringence The birefringence remaining in an optical element is caused by mechanical internal stresses. It depends up to a great extent on the shape and size of the element.

POL-O/419M-E Residual Strain HOQ 310 Photoelastic Stress Constant 10 nm/cm 10-20 nm/cm across 80% of dia. at the rim area 3.61 ± 0.05 nm/(cm bar) HOQ is delivered annealed and free of stresses. When pieces of stress-free fused quartz are being worked in the raw state, cutting stresses often occur along edges and at corners; these disappear again during subsequent fine working or by light etching with hydrofluoric acid. 2.2 Thermal Properties 2.2.1 Viscosity The viscosity of fused quartz decreases very steadily with increasing temperature. The characteristic temperatures are solely defined by viscosity. Annealing point (lg = 13.0) *) Strain point (lg = 14.5) *) Maximum temperature (continuous) Maximum temperature (limited life) ca. 1220 C ca. 1125 C ca. 1150 C ca. 1300 C *) Viscosity in dpa s 2.2.2 Coefficient of Thermal Expansion Mean linear CTE in various intervals T ( C) (K -1 ) 0...100 0.51 10-6 0...200 0.58 10-6 0...300 0.59 10-6 0...600 0.54 10-6 0...900 0.48 10-6 -50...0 0.27 10-6 The extremely low coefficient of thermal expansion (CTE) results in an

POL-0/419M-E excellent thermal shock resistance, much superior to that of ordinary glasses or ceramics. 2.2.3 Heat Conductivity T ( C) (K m) (W/ 20 1.38 100 1.46 200 1.55 300 1.67 400 1.84 950 2.68 2.2.4 Mean Specific Heat C p T ( C) (kg K)) C p (J/ 0...100 772 0...500 964 0...900 1052 2.3 Mechanical Properties The following data are valid for room temperature Density g/cm 3 2.20 Young s modulus (at 20 C) N/mm 2 7.25 10 4 N/mm 2 7.95 10 4 (at 1000 C) Poisson s ratio -- 0.17 1150 Tensile Strength N/mm 2 approx. 50 Knoop hardness (1 N load) N/mm 2 5800...6200

POL-0/419M-E The real world tensile strength is almost entirely determined by the surface quality of a piece. The tensile strength value listed above is a typical average value for a round disk with mechanically polished main faces and fine ground circumference. For strength calculations a sufficiently high safety factor must be included. 2.4 Chemical Properties 2.4.1 Chemical Resistance Fused quartz is outstandingly resistant to water, salt solutions, acids, and alkaline solutions. 2.4.2 Impurities Hydrolytic resistance as per DIN 12 111 1. Hydrolysis class: Base discharge < 0.01 mg Na 2 O 2 g Grains Resistance to acids as per DIN 12 116 1. Acid class: Weight loss < 0.1 mg/dm 2 surface area Resistance to alkaline solutions as per DIN 52 322 1. Alkaline solution class: Weight loss approx. 50 mg/dm 2 surface area Typical trace impurities in fused quartz HOQ 310 (in weight ppm) Al 10...22 K 0.1...0.5 As 0.002 Li 0.5...1 Au 0.0001 Mg 0.1...0.2 Ca 0.2...1 Na 0.1...2 Cr 0.06 Sb 0.0002 Cu 0.02 OH 30 Fe 0.1...0.3

POL-0/419M-E 3. SHAPES AND DIMENSIONS 3.1 Formed Ingots Grade Circular Cross-Section Rectangular Cross- Section HOQ 310 25 to 250 mm diameter not available 3.2 Cut and Ground Disks Upon request 3.3 Disks with Commercial Polish Upon request