CAPACITIVE SENSORS Position Displacement High Speed High Resolution

Precise Noncontact Sensors and Experts to Help You Use Them CAPACITIVE SENSORS Position Displacement High Speed High Resolution Off-The-Shelf and Customized Solutions Lion Precision Established 1958 ISO 9001:8 St. Paul, MN USA

A Capacitive Sensor System Driver Excitation voltage (AC) Signal processing Calibration Output voltage/data Electric Field (AC) Probe Target Driver Selections Elite Series (CPL490, CPL190/290) Best performance; adjustments and indicators CPL230, CPL3 No user adjustments or indicators CPA Precision Analog Proximity Adjustable gain and zero, Indicators Setpoint output Capacitive Sensors Probe Selections Range Dependent on Mounting Cylindrical: 3 mm, 5 mm, 8 mm, 3/8 18 mm Rectangular: mm, 45 mm Basics When two conductive surfaces are near each other, there is an electrical property called capacitance that exists between them. The amount of capacitance depends on the distance and material between the two conductors. A capacitive sensor uses an electric field to measure changes of capacitance between the probe surface and a conductive target surface. Conductive Targets If the material between the two conductive surfaces remains constant, any change in capacitance is due to a change in the distance between them. Capacitive sensors are calibrated to produce a repeatable output for a given change in distance between the probe and the target. This technique works over small ranges ( - 12 mm) with resolutions as low as 0.05. Nonconductive Targets Capacitance also depends on the material between the probe and a conductive target surface. If the distance between the probe and a target surface is fixed, capacitive sensors can measure changes in the material between them. This technique is traditionally used to detect changes in thickness, density, or volume of material, but could also detect changes in material composition. Maximizing Accuracy Accuracy at the high resolutions of capacitive sensors may be greatly affected by the enviroent and measurement setup. Probes must be positioned in a stable mechanical system in a stable enviroent. Even small changes in temperature cause expansions of the target that are detectable by high-resolution capacitive sensors. These are not sensing errors; the displacements are real. Resolution Resolution is a measurement system s smallest possible measurement. Resolution is essentially a measurement of electrical noise present at the sensor output. Capacitive sensor resolution is a function of the bandwidth of the system. The lower the bandwidth, the better the resolution. When comparing specifications, be sure you know the bandwidth at which the resolution is specified. See the complete capacitive sensor tutorial TechNote and a detailed article on sensor resolution at: www.lionprecision.com; click on Technical Library. 2 Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Driver Comparison CPL490 page 6 Elite Series (page 5) CPL190/290 page 8 CPL230 page 12 CPL3 page CPA page 16 Typical specifications. *Dependent on probe and range Typical Resolution* (% F.S. rms) @ 15 khz 0.0007% 0.003% 0.004% 0.004% 0.03% @ midrange Nonlinearity* 0.2% 0.2% 0.5% 0.5% Nonlinear Dual Range (Sensitivity) CPL290 User Adjustments Adjustable Gain Adjustable Offset Range Indicator Setpoint/Switched Output Channels per Package 1-3 1-8 1-6 1 1 Selectable Bandwidth (internal dip-switch) 1,, 15, khz 0.1, 1,, 15 khz 0.1, 1,, 15 khz 0.1, 1,, 15 khz Maximum Bandwidth khz 15 khz 15 khz 15 khz 15 khz Customization Available Options Specifications listed on the following pages are for probes with standard 2 meter cables. Listed specifications do not apply when customization is included. Performance of customized product will depend on specific customizations. Probe Vacuum Compatibility (to -6 Torr); Probe High-Vacuum Compatibility (below -6 Torr) Options requiring custom calibration and deviation from listed specifications: Custom Ranges Nonflat or Undersized Target Shape Custom Cable Length Probe Extension Cables (2 m, 3 m, 4 m; must be calibrated and used with extension cable attached) Accessories DIN Rail Power Supply CPA In:-240 VAC -60 Hz Out: to 15 VDC @2 A EPS Power Supply Elite Series 1-, 2-, 3-Slot Enclosures; CPL230; CPL3 In:-240 VAC -60 Hz Out:±15 VDC @2.5 A Probe Adapters for fitting 3, 5, and 8 mm diameter probes into 3/8" holes. Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 3

Complete Technical Detail www.lionprecision.com The Lion Precision website provides a high level of technical detail about our products and capacitive sensing in general. Our Capacitive Sensing Theory of Operation TechNote is viewed thousands of times a month. The TechNote enables you to better understand the sensing technology, what pitfalls to avoid, and how to maximize the effectiveness of your measurement. The website provides other detailed TechNotes with insight into the specific operation of our sensors and answers your questions about an entire range of issues. All of the product manuals are available from the website as well as information about the company, its history, vision, and way of doing business. Custom Sensor Design Custom probes and electronics for your specific application More than half of our orders are customized in some way. Special enclosures. Custom probe shapes. Technology combinations. Custom calibration ranges. Vacuum compatible probes. 4 Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Elite Series Our Top Performing Capacitive Sensor System Elite Series sensors combine high performance, easy DAQ interface, and the flexibility of custom configurations. 1-8 Sensors in a single system Rear-panel 68-pin connector configured for National Instruments DAQ devices Support modules available: Temperature Sensors, Signal Processing/Display Export License Because of high resolutions, export of the Elite Series to some countries requires an export license. Enclosures Intelligent Enclosures Enclosures provide power and drive signals. Extra slots can be included for future expansion. Direct connect to National Instruments DAQ hardware Input power: -240 VAC /60 Hz 1-, 2-, 3-, 6-, 8-slot Options Mounting flanges on 1-, 2-, and 3-slot Tip-up handle on 6- and 8-slot 1-, 2-, and 3-slot enclosures include an external power supply. Each 6- and 8-slot enclosure includes internal power supply and standard IEC line-power cord. Elite Series Modules Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 5

Elite Series Sensor Modules CPL490 Picometer Sensor Module Highest resolution, widest bandwidth available Highest resolution Widest bandwidth ( khz) Five-element range indicator Zero adjust Zero adjust disable Front-panel BNC analog output Differential output to National Instruments 68-pin connector Uses 2nd Generation Probes Specifications Resolution 1 : Bandwidth: Linearity: Max Drift 2 : Front-Panel BNC: National Inst. Rear Conn.: 0.0004% @1 khz 0.0007% @ 15 khz 0.002% @ khz Selectable: 1,, 15, khz <0.2% F.S. 0.02-0.04% F.S./ C ± V, 0 Ω, ma max ± V, 0 Ω, Differential Operating Temp: 15-40 C Multiple Sensors: Up to 3 Contact Lion Precision for more than 3 1 Dependent on probe, range, and bandwidth. See next page for details. 2 Dependent on probe and range. See next page for details. Export License Because of high resolutions, export of the Elite Series to some countries requires an export license. Ranges/Probes Table (Next Page) Range is determined by the probe diameter. The larger the diameter, the larger the range. The CPL490 uses 2nd Generation Probes. Ranges and performance specifications are on the next page. Listed specifications assume a 2 meter probe cable; flat measurement area diameter at least 1.3 times larger than the diameter; and no customizations. 6 Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Elite Series 2nd Generation Probes Probes for use with the CPL490 Capacitive Sensor Modules The CPL490 uses 2nd Generation Capacitive Probes which include electronics in the probe housing. The probes are mounted by the 8 mm diameter probe body extending from the larger housing. Two models are available differing only in the sensing area diameter and associated measurement ranges: 2G-C8-0.5: 0.5 mm sensing area 2G-C8-1.2: 1.2 mm sensing area mm inch 0-0-0.4 Heat Shrink Strain Relief 15 0.6 17 0.67 Clamp Mounting Diameter 8.00/7.97 0.315/0.3 0.16 6.0 0.24 0.5 mm 1.2 mm 15 0.6 67 2.64 5.1 0. 51 1 133 5.25 Cable 2 m ±25 mm CPL490 Measurement Ranges/Resolutions Range is determined by the sensing area diameter. The larger the diameter, the larger the range. Flat target surface must be 1.3 times larger than the sensing area diameter. NEAR GAP TARGET TARGET RANGE Diameter mm (Probe Model) Range Type Measurement Range Range Near Gap 1 khz Resolution 1 @ Bandwidth khz 15 khz khz Probe Maximum Drift % F.S./ C 0.4 0.05 0.002 0.07 0.003 0.09 0.004 0.26 0.0 0.04 0.5 (2G-C8-0.5) 25 0.17 0.007 0.27 0.011 0.35 0.0 0.040 0.02 0.38 0.015 0 0.031 0.039 3.3 0. 0.03 25 0.15 0.006 0. 0.008 0.22 0.009 0.63 0.025 0.02 1.2 (2G-C8-1.2) 0.33 0.013 0.40 0.016 0.52 0.021 0.065 0.02 8.0 0.68 0.027 0.040 1.3 0.0 3.8 0.15 0.02 1 Resolution values are RMS. Peak-to-peak values are typically 8- times greater than the RMS values. In high EMI conditions ( V/m) output DC level may shift and noise may rise to 0.5 VRMS (2.5% resolution). Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 7

Elite Series Sensor Modules CPL190 CPL290 Sub-Nanometer Sensor Modules Single Range Dual Range The CPL190 has one range (sensitivity); the CPL290 has two ranges. High resolution Five-element range indicator Coarse/ zero adjusts Zero adjust disable Front-panel BNC analog output Differential output to National Instruments 68-pin connector Specifications Resolution 1 : Bandwidth: Linearity 2 : Max Drift: 0.0005% @ Hz 0.003% @ 15 khz Selectable: Hz, 1,, 15 khz <0.2% F.S. typical 0.04% F.S./ C Operating Temp: 4- C Front-Panel BNC: National Inst. Rear Conn.: ± V, 0 Ω, ma max ± V, 0 Ω, Differential 1 Dependent on probe, range, and bandwidth. See next page for details. 2 Dependent on probe and range. See next page for details. Export License Because of high resolutions, export of the Elite Series to some countries requires an export license. Ranges/Probes Table (Next Page) The CPL190/CPL290 uses Probes. Probe ranges and performance specifications are on the next page. Range is determined by the probe diameter. The larger the diameter, the larger the range. Listed specifications assume a 2 meter probe cable; flat measurement area diameter at least 1.3 times larger than the diameter; and no customizations. Probe mechanical details are on page 18. Different probe body styles/sizes are available for each. 8 Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Elite Series Probes and Ranges for use with the CPL190 and CPL290 Capacitive Sensor Modules NEAR GAP TARGET TARGET RANGE Shape Size in mm C = Cylindrical C: Diameter R = Rectangular R: Longest Side Body Style Blank = Long S = Short R = Right Angle Measurement Range Resolution 1 @ Bandwidth Available Body Sizes Diameter mm Range Type Range Near Gap Hz 1 khz khz 15 khz Linearity % F.S. Models Body Styles 0.5 0.4 60 2.4 0.06 0.003 0.012 0.0 0. 0.004 0.0 0.040 0.40 0.016 0.12 0. 0.0 0.16 0.25 0.25 0.25 C3S C3R R 25 75 0. 0.008 0.0 0.0 0.040 1.2 0.0 3.5 0. 1.5 0. 0.15 0.15 C3S C3R R Ultrafine 0.4.0 0.0 75 0.05 0.002 0. 0.008 0.030 1.5 0.08 0.003 0.0 0.040 0.12 0.15 0.006 0.60 0.024 0.16 8.0 0.32 0.25 0.0 0.040 0. 0.40 0.15 0.15 0. 0.15 R C8S C8R C8 3.2 0.0 1.0 0.25 0.0 0. 0.4 0.016 0.12 15 0.40 0.032 6.0 0 1.6 0.052 0.40 30 1.2 0. 0.15 0. C8S C8R C8 0.0 0.0 225 9.0 0 0.3 0.012 2.5 0.0 7.0 0.40 0.4 0.016 0.12 0.60 0.040 7.0 0.24 0 1.3 0.40 30 1.2 0. 0.15 0. C9.5S C9.5R C9.5 R 0 0 0 30 1.2 35 40 1.6 13 3 0 30 1.2 40 1.6 60 2.4 C18 00 3000 1 75 130 5.2 1 6.0 19 0 6000 00 3000 1 90 3.6 70 2.8 1 4.8 90 3.6 160 6.4 1 7.2 R45 21 00 300 10 0 00 00 75 130 5.2 1 7.2 130 5.2 230 9.2 1 6.0 C25 1 Resolution values are RMS. Peak-to-peak values are typically 8- times greater than the RMS values. In high EMI conditions ( V/m) output DC level may shift and noise may rise to 0.2 VRMS (1% resolution). Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 9

Elite Series Support Modules MM190 Meter Module Signal Processing and Five-Digit Display Module Two-channel summing and peak-capture functions Five-digit display: Metric or inch units Summing: A, B, A+B, A B of any two channels in the system Peak-capture functions: Max, Min, TIR, Tracking TIR (Self-resetting TIR) Analog output of conditioned signal through BNC Differential analog output of conditioned signal through National Instruments 68-pin connector Display accuracy: 0.1% Specifications BNC Output Scaling Error: Internal Scaling Error: 0.2% Difference Error: 0.2% Summing Error: 0.2% -% Max. Tracking TIR Error Relative to Frequency: (not recommended below Hz) Hz: -1% Hz: ±0.3% 1 khz: ±1.5% 5 khz: ±% TIR Error Relative to Input Frequency: Peak Droop: BNC Output Impedance: DC: -1% 1 khz: ±1.3% 5 khz: ±% 1 mv/15 seconds 1 Ω Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Elite Series TMP190 Temperature Module Seven-Channel Temperature Sensor Used in conjunction Lion Precision Sindle Error Analyzer V8 or higher software to read temperature sensors and encoder/index inputs. Seven thermistors included Index and encoder inputs for SEA +5 V and +15 V encoder/prox power Single-ended or differential encoder input Encoder and index state indicators Specifications Accuracy*: ±1.8 F @ 40-1 F ± C @ 4-82 C Output Voltage: ± VDC Measuring Range: 40-1 F 4-82 C Sensor Interchangeability Error: ±0.2 F ±0.1 C *In high EMI enviroents ( V/m) temperature measurement may shift as much as 4 C. Magnetic Mount Thermistor 0.25" (6.4 mm) ' (3 m) 0.5" (12.7 mm) Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 11

CPL230 Compact, Multi-Channel Sensor Up to six channels ± V differential output ±5 V single-ended output No user adjustments Small Size, high-density package OEM and embedded applications Separate power and signal connectors Specifications Resolution 1 : 0.0007% @ Hz 0.004% @ 15 khz Bandwidth: Linearity 2 : Selectable: Hz, 1,, 15 khz <0.5% F.S. typical inch mm 0.19, r: 0.1 4.8, r: 2.5 9 3.9 Probe Drift: 0.04% F.S./ C Operating Temp: 4- C Output: Input Power 3 : ± V Differential ±5 V Single-Ended ±15 VDC, 0 ma max 3.55 90.2 0.16 4.1 x4 0.55 13.9 0 0.9 22.9 x5 3 2.4 3.23 8 0.06 1.5 0 1 Dependent on probe, range, and bandwidth. See next page for details. 2 Dependent on probe and range. See next page for details. 0 12.7 1.15 29.2 2.66 67.6 7.97 2.4 3 External power supply included (p. 3). Export License Because of high resolutions, export of the CPL230 to some countries requires an export license. 2.15 54.6 0.73 18.5 0 0 0.44 11.2 9 45.5 8.03 8.47 215.1 Ranges/Probes Table (Next Page) The CPL230 uses Probes. Probe ranges and performance specifications are on the next page. Range is determined by the probe diameter. The larger the diameter, the larger the range. Listed specifications assume a 2 meter probe cable; flat measurement area diameter at least 1.3 times larger than the diameter; and no customizations. Probe mechanical details are on page 18. Different probe body styles/sizes are available for each. 12 Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

CPL230 Probes for use with the CPL230 Capacitive Sensor NEAR GAP TARGET TARGET RANGE Shape Size in mm C = Cylindrical C: Diameter R = Rectangular R: Longest Side Body Style Blank = Long S = Short R = Right Angle Measurement Range Resolution 1 @ Bandwidth Available Body Sizes Diameter mm Range Type Range Near Gap Hz 1 khz khz 15 khz Linearity % F.S. Models Body Styles 0.5 0.4 60 2.4 0.08 0.004 0.42 0.017 0.70 0.030 0. 0.006 0.70 0.028 0.022 0.17 7.0 0.70 0.028 0.22 C3S C3R R 25 75 0.011 0.70 0.030 0.70 0.030 0.070 4.9 0. 2.1 0.0 7.0 C3S C3R R Ultrafine 0.4.0 0.0 75 0.07 0.003 0.011 1.1 0.04 2.1 0.0 0.11 0.004 0.42 0.0 0.17 0.21 0.008 4 0.034 0.22 11 0.45 0.35 0.0 0.056 7.0 R C8S C8R C8 3.2 0.0 1.0 0.35 0.0 2.8 0. 0.39 0.022 0.17 21 0.045 8.4 0.39 28 1.1 2.2 0.073 42 C8S C8R C8 0.0 0.0 225 9.0 0 0.42 0.017 3.5 0.11 9.8 0.022 0.17 4 1.1 9.8 0.34 28 1.1 1.8 0.0 42 C9.5S C9.5R C9.5 R 0 0 28 1.1 42 49 56 2.2 13 3 0 42 56 2.2 70 2.8 84 3.4 C18 00 3000 1 0 1 7.3 2 8.4 19 0 6000 00 3000 1 70 2.8 130 3.9 170 6.7 2 9.0 0 R45 21 00 300 10 0 00 00 1 7.3 0 1 7.3 3 13 2 8.4 3 C25 1 Resolution values are RMS. Peak-to-peak values are typically 8- times greater than the RMS values. In high EMI conditions ( V/m), output DC level may shift and noise may rise to 0.25 VRMS (1.3% resolution). Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 13

CPL3 Compact, Single-Channel Sensor ± V single-ended BNC output ± V differential D-Sub output No user adjustments Small size, high-density package OEM and embedded applications Specifications Resolution 1 : 0.0007% @ Hz 0.004% @ 15 khz Bandwidth: Linearity 2 : Probe Drift: Selectable: Hz, 1,, 15 khz <0.5% F.S. typical 0.04% F.S./ C mm inch 54 2.13 59 2.32 Operating Temp: 4- C Output: ± V Differential ± V Single-Ended BNC Input Power 3 : ±15 VDC, 1 ma max 1 Dependent on probe, range, and bandwidth. See next page for details. 8 5 2 Dependent on probe and range. See next page for details. 3 External power supply included (p. 3). Export License Because of high resolutions, export of the CPL3 to some countries requires an export license. mm inch 1 4.49 124 4.88 Optional mounting flange is available Ranges/Probes Table (Next Page) 0.22 The CPL3 uses Probes. Probe ranges and performance specifications are on the next page. Range is determined by the probe diameter. The larger the diameter, the larger the range. Listed specifications assume a 2 meter probe cable; flat measurement area diameter at least 1.3 times larger than the diameter; and no customizations. Probe mechanical details are on page 18. Different probe body styles/sizes are available for each. Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

CPL3 Probes for use with the CPL3 Capacitive Sensor NEAR GAP TARGET TARGET RANGE Shape Size in mm C = Cylindrical C: Diameter R = Rectangular R: Longest Side Body Style Blank = Long S = Short R = Right Angle Measurement Range Resolution 1 @ Bandwidth Available Body Sizes Diameter mm Range Type Range Near Gap Hz 1 khz khz 15 khz Linearity % F.S. Models Body Styles 0.5 0.4 60 2.4 0.08 0.004 0.42 0.017 0.70 0.030 0. 0.006 0.70 0.028 0.022 0.17 7.0 0.70 0.028 0.22 C3S C3R R 25 75 0.011 0.70 0.030 0.70 0.030 0.070 4.9 0. 2.1 0.0 7.0 C3S C3R R Ultrafine 0.4.0 0.0 75 0.07 0.003 0.011 1.1 0.04 2.1 0.0 0.11 0.004 0.42 0.0 0.17 0.21 0.008 4 0.034 0.22 11 0.45 0.35 0.0 0.056 7.0 R C8S C8R C8 3.2 0.0 1.0 0.35 0.0 2.8 0. 0.39 0.022 0.17 21 0.045 8.4 0.39 28 1.1 2.2 0.073 42 C8S C8R C8 0.0 0.0 225 9.0 0 0.42 0.017 3.5 0.11 9.8 0.022 0.17 4 1.1 9.8 0.34 28 1.1 1.8 0.0 42 C9.5S C9.5R C9.5 R 0 0 28 1.1 42 49 56 2.2 13 3 0 42 56 2.2 70 2.8 84 3.4 C18 00 3000 1 0 1 7.3 2 8.4 19 0 6000 00 3000 1 70 2.8 130 3.9 170 6.7 2 9.0 0 R45 21 00 300 10 0 00 00 1 7.3 0 1 7.3 3 13 2 8.4 3 C25 1 Resolution values are RMS. Peak-to-peak values are typically 8- times greater than the RMS values. In high EMI conditions ( V/m), output DC level may shift and noise may rise to 0.25 VRMS (1.3% resolution). Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 15

CPA Precision Analog Proximity Switch Lower Cost 0- V nonlinear analog output Setpoint/Switched output Adjustable gain and zero Five-element range indicator Remote gain and zero adjustment connections DIN rail case Multiple channel sync Specifications Resolution 1 : Bandwidth: Linearity: Maximum Drift: Analog Output: Setpoint: CPA: 0.03% RMS @ 15 khz CPAe: 0.3 RMS or higher @ 15 khz 15 khz Nonlinear (see website for typical output curve) Driver: 0.2% F.S./ C Probe: 0.05% F.S./ C 0- V, 0 Ω, 15 ma max. Fixed at 5 V (mid-range) mm (inch) Setpoint Output: Operating Temp.: 4- C Solid state switch closure 30 VAC/60 VDC max On state: 2.5 Ω, ma max Off state leakage: µa max (3.9) Input Power 2 : 15-24 VDC, 2.5 W 1 Typical at midpoint. Dependent on probe, range, and bandwidth. See next page for details. 2 External power supply not included available as accessory (p.3). Export License 35mm DIN Rail Mount Because of high resolutions, export of the CPA to some countries requires an export license. The CPAe has different resolution specifications and can ship without an export license. Ranges/Probes Table (Next Page) 23 (0.9) 112 (4.4) The CPA uses Probes. Probe ranges and performance specifications are on the next page. Range is determined by the probe diameter. The larger the diameter, the larger the range. Listed specifications assume a 2 meter probe cable; flat measurement area diameter at least 1.3 times larger than the diameter; and no customizations. Probe mechanical details are on page 18. Different probe body styles/sizes are available for each. 16 Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Probes for use with the CPA & CPAe Capacitive Sensor CPA NEAR GAP TARGET RANGE TARGET Shape Size in mm C = Cylindrical C: Diameter R = Rectangular R: Longest Side Body Style Blank = Long S = Short R = Right Angle Diameter mm Range Type Measurement Range Midpoint Resolution 1 @ 15 khz Available Body Sizes Range Near Gap CPA CPAe Models Body Styles 0.5 60 2.4 55 2.5 400 16 400 16 C3S C3R R 55 2.5 400 16 C3S C3R R.0 0.0 40 1.6 55 2.5 400 16 400 16 R C8S C8R C8 3.2 0.0 1.0 85 3.5 130 400 16 C8S 400 16 C8R C8 0.0 0 90.0 0 0 5.5 170 7.0 400 16 C9.5S C9.5R 0 32 C9.5 R 13 3 00 0 3000 1 0 40 1600 63 0 40 1600 63 C18 19 0 6000 00 3000 1 0 30 1 43 0 30 1 43 R45 21 00 300 10 0 00 00 1 47 1600 63 1 47 1600 63 C25 1 RMS measurement at mid-range at 15 khz except where noted. P-P measurements are typically 8- times higher. The CPAe does not require an export license. Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 17

Probes cable length: 2 meters. Operating and storage temperature range: 4- C. Available as vacuum compatible. Probes are not electrically damaged by contact with the sensing tip. Range is determined by the probe diameter the larger the diameter, the larger the range. To hold specifications, flat target surface diameter must be 1.3 times larger than sensing area diameter. Measurement Ranges and other performance specifications are dependent on the selected driver model. Different probe body styles/sizes are available for each sensing area diameter. Probe Model Numbers Probe model numbers are a combination of the Body Model number and Diameter in mm (e.g. - or R45-19). Shape Size in mm C = Cylindrical C: Diameter R = Rectangular R: Longest Side Body Style Blank = Long S = Short R = Right Angle Size/Shape Body Model Mechanical Diameter (mm) Measurement Ranges (by Driver Model) CPL190, CPL290 CPL230, CPL3 CPA 3 mm +0/-0.03 mm 0.118 +0/-0.001 0.5,, 0.4,,,, C3S 3 mm Cylindrical C3R 0.04 17 mm 0.67 3 mm +0/-0.03 mm 0.118 +0/-0.001 5 mm 0. 0.5 25,,,, 0.4,,,, 0.04 1 0.43 3 mm 0.12 25,, mm 0.16" 0/4.97 mm 0.1965/0.1955" 0.5,, 0.4,,,, 0.04" 27 mm 6" 25,,,,, 0 0.4,,.0,.0, 0.0,.0 5 mm Cylindrical mm 0.16" 0.04" 0/4.97 mm 0.1965/0.1955" mm 0.55" 0.5,, 0.4,, 25,,,,, 0 0.4,,.0,.0,,, 0.0,.0 mm 0.16" 0/4.97 mm 0.1965/0.1955" 0.5,, 0.4,,,, R 0.04" mm 0.55" 25,,,,, 0 0.4,,.0,.0, 0.0,.0.0mm 0.787" mm Rectangle R 1.8mm Ø 3.2mm Ø 1.8mm mm 0.197".0mm 0.787", 0, 0,.0,.0 0, 0.0,.0 18 16.0mm 0.630" Lion Precision 563 Shoreview Park Road St. Paul, MN 55126 USA 0-229-6544 651-484-6544 Capacitive Sensors

Size/Shape Body Model Mechanical Diameter (mm) Measurement Ranges (by Driver Model) CPL190, CPL290 CPL230, CPL3 CPA 6.0 mm 8.00/7.97 mm 0.24" 0.315/0.3",,, 0 0.4,,.0,.0, 0.0,.0 C8 0.04" 39 mm 1.54" 3.2, 0, 1,.0,.0 0, 1.0,.0 8 mm Cylindrical C8S 6.0 mm 0.24" 0.04" 17 mm 0.67" 8.00/7.97 mm 0.315/0.3" 3.2,,, 0 0.4,,.0,.0, 0, 1,.0,.0, 0.0,.0 0, 1.0,.0 C8R 6.0 mm 0.24" 0.04" 17 mm 0.67" 8.00/7.97 mm 0.315/0.3" 3.2,,, 0 0.4,,.0,.0, 0, 1,.0,.0, 0.0,.0 0, 1.0,.0 8.0 mm 0.32" 9.53/9. mm 0.375/0.374" C9.5 0.04" 39 mm 1.54", 0, 0,.0,.0 0, 0.0,.0 9.5 mm (3/8") Cylindrical C9.5S 8.0 mm 0.32" 0.04" 8.0 mm 0.32" 17 mm 0.67" 9.53/9. mm 0.375/0.374" 9.53/9. mm 0.375/0.374", 0, 0,.0,.0 0, 0.0,.0 C9.5R 0.04" 17 mm 0.67", 0, 0,.0,.0 0, 0.0,.0 18 mm Cylindrical C18 15.8 mm 0.62 8 mm 0.31 17.91 ± 0.025 mm 0.705 ± 0.001" 35 mm 1.38 13 0, 3, 00,, 3, 00, 25 mm Cylindrical C25 2 mm 0.99 8 mm 0.31 17.91 ± 0.025 mm 0.705 ± 0.001" 35 mm 1.38 21 00, 10 300, 0 00, 10 300, 0 45 mm (5") Rectangular R45 5" 44.5 mm 1.5" 38. 0.5" 12.7 mm 2.25" 57.2 mm 0.75" 19. 2.5" 63.5 mm M4x.07 4x 19 0, 6000, 0, 6000, Capacitive Sensors www.lionprecision.com www.lionprecision.cn.com www.lionprecision.jp 19

563 Shoreview Park Rd. St. Paul, MN 55126 USA www.lionprecision.com www.lionprecision.cn.com Phone 651-484-6544 Fax 651-484-6824 info@lionprecision.com www.lionprecision.jp Typical Applications Position, Displacement Thickness Runout, Eccentricity Deformation Part Sorting Vibration Commitment to Service Lion Precision s commitment to service is unsurpassed in the industry. We partner with our customers to ensure their success by providing optimized sensing solutions. Contact us today and let us solve your difficult measurement problems. LL02-0021 04/28/16 16 Lion Precision All Rights Reserved All specifications subject to change without notice.