PRESSURE REGULATOR AND VALVE SELECTION GUIDE Technical Bulletin #8F Scope: This document is a reference guide to help customers determine an appropriate AP Tech valve and regulator to be used in process gas systems. For information and specifications related to the specific model, please refer to the catalog data sheet. Valve and Recommendations for Gas Cabinets and Gas 8 Technology Way. Napa, CA 948. (0 9-0. Fax (0 9-0 www.aptech-online.com
General Notes and Definitions : Pressure regulator closest to the gas source cylinder or vessel (first regulator in the system Valve: upstream (inlet side of the source regulator : Any regulator downstream (outlet side of the source regulator Valve: Any valve downstream (outlet side of the source regulator Valve Recommendation: Valve model recommendations limited for sake of brevity. Different models with same basic size and rating may also be used. Example: 0, and may be used in place of. /: Two stage regulation required, two regulators in series GENERAL NOTES : Red indicates heating required, refer to PN Conditions: Standard conditions of temperature and pressure Inlet Pressure Assumption: psig ( bar or vapor pressure of liquified gas 0 psig ( bar unless low vapor pressure gas pressure for non-liquified gas assumed at worst case for an empty cylinder assumed to be typical usage, specific operating conditions may require different selection Caution: Read and understand definitions prior to utilizing the guide s recommendations. Caution: Product selection is the sole responsibility of the user, regardless of any recommendations or suggestions made by the factory, such as this Technical Bulletin. The user shall make selections based upon their own analysis and testing with regard to function, material compatibility and product ratings. Proper installation, operation and maintenance are also required to assure safe, trouble free performance. Caution: One may achieve higher or lower flow capacities than stipulated in this guide due to the parameters and conditions of a specific application and system design. Caution: Please consult the factory for recommendations beyond the scope of this document or if any doubt exists. Process Gas Flow (slpm AP, AZ or AK Flow (slpm Flow (slpm Flow (slpm AP, AZ or AK AP, AZ or AK AP, AZ or AK Acetylene* ( Air Ammonia (NH Argon (Ar 8 4 4 00 0 00 000 000 0 4 000 4 0 8 0 00 4 00 4 00 4 00 4 00 0 0 0 0 0 0 0 00 S* * * S HR S HF S S HF HR 9 9 0 0 0 0 0 0 00 0 0 0 0 00 HF HF 0S HF HF 0S HF HF 0S FC S HF HF 0S FC S Example: 00 means AP, AZ and AK 00 * psig maximum source regulator outlet pressure
Process Gas Process Gas Arsine (AsH Arsine Mixtures (Nitrogen Balance Boron Trichloride (BCl Boron Trichloride Mix (Nitrogen Balance Boron Trifluoride (BF Boron Trifluoride (BF Butadiene ( H Butane (normal ( H Butene- ( H 8 Carbon Dioxide (CO Carbon Monoxide (CO Carbonyl Fluoride (CO Chlorine (Cl ChlorineTrifluoride (ClF Diborane Mixtures (Nitrogen Balance Dichlorosilane (Si Cl Flow (slpm Flow (slpm Flow (slpm Flow (slpm AP, AZ Flow or AK AP, AZ or AK Flow Flow AP, AZ AK Flow AP, AZ AK (slpm (slpm (slpm S (slpm HF 4 9 4 8 000 4 8 000 000 4 000 4 4 4 4 0 000 00 8 0 00 000 000 4 4 8 000 4 DISTRIBUTION DISTRIBUTION VALVE VALVE GUIDELINE GUIDELINE 4 4 4 0 4 0 4 4 4 4 4 00 0 0 0 SOURCE SOURCE REGULATOR REGULATOR GUIDELINE GUIDELINE 0 S DISTRIBUTION DISTRIBUTION REGULATOR REGULATOR GUIDELINE GUIDELINE TSA 0.4 S S S S 0T S 0T S S VS S VS & HF VS 0 8 0 00 0S VS & S VS 4 4 4 00 4 4 4 0 S S SH H H HF 0 TSA 0. 00S 00S TSA HF SH TSA HF HF HF HF HF HF HF HF 0S FC S HF HF H H HF H H HF 0S H FC S TSA HF 0S TSA Example: 00 means AP, AZ and AK 00 * psig maximum source regulator outlet pressure
Process Gas Flow (slpm Flow (slpm Flow (slpm Flow (slpm Diethyltelluride (Te( H 0 8 000 4 S HF Difluoroethylene ( 0 000 0 4 S HF Dimethylsilane ( SiH 8 Disilane (Si H Ethylene ( H 4 Fluorine ( 4 4 00 4 4 000 48 4 00 4 4 0 0 Consult Consult Factory Factory S TSA S Consult Factory TSA HF Consult Factory Fluorine Mixtures (%, 0 psig (Nitrogen Balance Germane (GeH 4 Germane Mixtures (Nitrogen Balance Halocarbon (CCl Halocarbon B (CBr Halocarbon (CClF Halocarbon B (CBrF Halocarbon 4 (CF 4 Halocarbon (CHCl F 8 000 8 4 8 000 4 4 0 0 0 000 4 000 4 4 4 4 4 4 4 0 4 4 0 4 0 00 4 SH TSA S S S A 0. 0 S S HF HR 0 0 0 0 TSA 0. 0. H H HF TSA HF HF S TSA HF HF HF HF 0 FC S S 0S TSA Halocarbon (CHF 000 4 4 S HF Example: 00 means AP, AZ and AK 00
Process Gas Flow (slpm Flow (slpm Flow (slpm Flow (slpm Halocarbon (C Halocarbon 4 (CClF4 000 0 4 0 4 4 S TSA 0. HF S TSA Halocarbon (CClF Halocarbon (CF Halocarbon (CHF Halocarbon 4A (CHF4 Halocarbon R8 (CF8 Halocarbon C8 (C4F8 Helium (He Hexafluoropropane (CHF 4 0 00 000 4 4 0 00 4 4 000 4 4 0 4 00 0 4 4 00 4 4 4 4 00 4 0 00 S S HF S S S S HF HR 4 TSA 0 0 0 HF HF HF 0 FC S HF HF HF S TSA HF HF 0 FC S TSA TSA Hexafluoropropylene (CF Hydrogen ( Hydrogen Bromide (HBr 4 0 000 000 000 4 00 0 000 9 4 00 4 0 0 0 0 S S HF 00S HR SH H 0 0 0 000 0 HF HF HF 0S FC S H H HF H Example: 00 means AP, AZ and AK 00
Process Gas Hydrogen Chloride (HCl Hydrogen Chloride Mixtures (Nitrogen Balance Hydrogen Fluoride (HF Hydrogen Selenide ( Se Hydrogen Selenide Mixtures (Nitrogen Balance Hydrogen Sulfide ( S Krypton (Kr Methane (CH 4 Methanol (CH OH Methyl Bromide (CH Br Methyl Chloride (CH Cl Methysilane (CH SiH Methyl Fluoride (CH F Neon (Ne Nitrogen (N Flow (slpm 0 00 000 000 4 4 8 000 000 000 4 000 9 0 4 4 4 0 4 0 4 000 000 000 0 00 Flow (slpm 8 4 00 4 4 9 4 4 4 4 4 4 4 4 4 0 4 0 4 Flow (slpm 0 00 S SH H SH & SH HF 0S & 9S SH H Flow (slpm 8 8 00 0 0 00 4 4 00 H H HF H H HF 0S H FC S H H HF TSA TSA S S S S S S TSA S 0 HF HF HF HF HF HF TSA TSA 00 0 00 S HR S HF 00 HR TSA 0 00 00 0 00 HF HF HF HF HF 0S FC S Example: 00 means AP, AZ and AK 00
Process Gas Flow (slpm Flow (slpm Flow (slpm Flow (slpm Nitrogen Trifluoride (NF Nitric Oxide (NO Nitrous Oxide (N O Octafluorocyclopentene (C 0 00 0 000 000 000VS VS 00VS VS VS VS 4 0 0 4 00 4 4 00 4 0 00 0 0 00 S 00S HR 0 & 9 S S VS VS VS VS HF S VS & VS HF 0S VS & S VS 0 0 8 8 TSA 0. HF 0 S HF 0S FC S HF HF HF 0S FC S S TSA Oxygen (O Perfluoropropane* (C Perfluorobutadiene ( F Phosphine (PH 0 0 000 4 4 000 00 4 00 4 4 4 4 00 S HF HR S 0 0 0 00 4 TSA 0. S HF HF 0S FC S HF S TSA HF Phosphine Mixtures (Nitrogen Balance 8 000 4 S HF Phosphorous Pentafluoride (PF 9 4 000 9 4 00 S HF Propane (C H 8 4 4 4 S HF Propene (C H 8 4 4 S HF Example: 00 means AP, AZ and AK 00 *Same as Halocarbon R8
Process Gas Silane (SiH 4 Silane Mixtures (Nitrogen Balance Silicon Tetrachloride (SiCl 4 Silicon Tetrafluoride (SiF 4 Sulfur Dioxide (SO Sulfur Hexafluoride (SF Sulfur Tetrafluoride (SF 4 Trichlorosilane (SiHCl Trimethylsilane ((CH SiH Tungsten Hexafluoride (WF Xenon (Xe Flow (slpm 0 0 4 S Flow (slpm 000 4 00 0 0 S 00S HF S & HF 0 0 0 00 HF HF 0S FC S 8 000 4 4 4 9 000 4 000 0 0 0 4 4 4 4 8 0 4 4 0 4 4 0 00 4 0 4 0 4 000 Flow (slpm S TSA 0. 0 4 Flow (slpm S TSA S HF S S HF S TSA HF TSA 0 TSA 0. TSA 0. TSA 0. HF HF 0S FC S HF S TSA S TSA SH TSA HF Example: 00 means AP, AZ and AK 00 Alphabetical Listing by Gas Formula BF Boron Trifluoride Ar Argon AsH Arsine BCl Boron Trichloride BF Boron Trifluoride ClF 4 Halocarbon 4 ClF Halocarbon F Halocarbon Acetylene Difluoroethylene F 4 Halocarbon 4A H 4 Ethylene HF Halocarbon SiH 8 Dimethylsilane C F Hexafluoropropylene C Halocarbon R8 C Perfluoropropane C F Hexafluoropropane C H C H 8 F H H 8 H C CBr CBrF CCl CClF CF 4 C (CH SiH CH Br CH Cl CH F Propene Propane Perfluorobutadiene Halocarbon C8 Butadiene Butene- Butane (normal Octafluorocyclopentene Halocarbon B Halocarbon B Halocarbon Halocarbon Halocarbon 4 Halocarbon Trimethylsilane Methyl Bromide Methyl Chloride Methyl Fluoride CH OH Methanol CH SiH Methysilane CH 4 Methane CHCl F Halocarbon CHF Halocarbon Cl Chlorine ClF Chlorine Trifluoride CO Carbon Monoxide CO Carbon Dioxide CO Carbonyl Fluoride Fluorine GeH 4 Germane Hydrogen Se Hydrogen Selenide S Hydrogen Sulfide HBr Hydrogen Bromide HCl Hydrogen Chloride He Helium HF Kr N N O Ne NF NH NO O PF PH SF 4 SF Si H SiCl 4 SiF 4 Si Cl SiH 4 Hydrogen Fluoride Krypton Nitrogen Nitrous Oxide Neon Nitrogen Trifluoride Ammonia Nitric Oxide Oxygen Phosphorous Pentafluoride Phosphine Sulfur Tetrafluoride Sulfur Hexafluoride Disilane Silicon Tetrachloride Silicon Tetrafluoride Dichlorosilane Silane SiHCl SO Te( H WF Xe Trichorosilane Sulfur Dioxide Diethyltelluride Tungsten Hexafluoride Xenon INH08//