Ready for Takeoff TURBOVAC MAGiNTEGRA 175.56.02
ADVANTAGES OF MAGNETICALLY LEVITATED TURBOMOLECULAR PUMPS TURBOVAC MAGiNTEGRA Insensitivity to process particles/dust Shock venting tolerance Reliability in industrial environments Robust and trouble-free operation Low cost of ownership Suitability for vibration-sensitive applications ADDITIONAL BENEFITS OF TURBOVAC MAGiNTEGRA Maintenance-free operation in most applications Monitoring of performance data Self-protection in case of exceeding operation limits or malfunction APPLICATIONS COATINGS SOLAR DISPLAY ANALYTICS Industrial glass coating Sputtering (TCO) Flat Panel Analytical systems Web CIGS PVD Electron microscopes Optical LCD Particle accelerators
Your Ticket to the next level of vacuum Our TURBOVAC MAGiNTEGRA combines accuracy, precision and reliability - qualities that are essential to the vacuum technology and aircraft industries alike. When it comes to vacuum technology, magnetically levitated turbomolecular pumps from Oerlikon Leybold Vacuum feature high pumping and gas throughput for faster pumpdown to improve equipment cycle times. The new 5-axis active magnetic bearing and drive system combines high reliability and efficient operation.
PUMPS AND OPTIONS MAG W 300, MAG W 400, MAG W 600, MAG W 700, MAG W 1300, MAG W 1600, MAG W 1700 and MAG W 2200 MAG W Turbomolecular pumps are available with these following features: Inlet fl anges ISO-K, ISO-F, Mounting position of the integrated controller and power supply fl anking: ip version bottom: ipl version Interfaces 9 pin 24V PLC, Profi bus, RS485, Ethernet and others based on the customer s particular needs. HIGHLIGHTS Fully integrated converter and power supply eliminate the need for a conventional rack-mounted controller and interconnecting cables Flexible design with controller position on the side or bottom for easy system integration Innovative and modular industrial communication solution allows easy integration with customer equipment to meet current and future requirements High robustness in industrial environment due to protective class IP 54 required in PVD, display, solar and optical coating applications TECHNICAL DATA High vacuum flange Pumping speed (PNEUROP) Max. compression ratio Max. gas throughput Ar He H 2 Ar He H 2 Ar PERFORMANCE DATA Max. forevacuum pressure 2200 Nominal speed Pumping speed (l/s) 2000 1800 1600 1400 1200 1000 800 600 400 200 0 10-6 10-5 10-4 10-3 10-2 10-1 High vacuum pressure (mbar) MAG W 2200 MAG W 1700 MAG W 1600 MAG W 1300 MAG W 700 MAG W 600 MAG W 400 MAG W 300 Ultimate pressure ISO-K/F Run-up time, approx. Foreline flange Purge gas / vent port Weight, approx. Noise level (according to ISO 3744) Purge gas / vent port
ACCESSORIES Choose from a wide range of accessories to control and monitor performance of the TURBOVAC MAGiNTEGRA: Controllers for pressure measurement Systems for active and passive sensors, water and air cooling facilities, venting valves, cables, etc. Forevacuum pumps and systems, engineering and application support MAG W 300 ip(l) 400 ip(l) 600 ip(l) 700 ip(l) 1300 ip(l) 1600 ip(l) 1700 ip(l) 2200 ip(l) DN 100 ISO-K 160 ISO-K 160 ISO-K 200 ISO-K D00 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F DN 100 160 160 200 200 250 250 l x s -1 300 365 550 590 1100 1600 1610 2100 l x s -1 1050 1470 1480 1900 l x s -1 260 280 570 600 1220 1770 1710 2050 l x s -1 190 200 410 430 1130 1570 1660 1750 > 10 10 > 10 10 > 10 10 > 10 10 > 10 8 > 10 7 > 10 8 > 10 8 > 10 8 > 10 7 > 10 8 > 10 8 at 1 sccm 9x10 4 9x10 4 2x10 6 2x10 6 2x10 5 6x10 4 2x10 5 5x10 4 at 1 sccm 3x10 3 3x10 3 3x10 4 3x10 4 8x10 3 1x10 3 4x10 3 5x10 3 mbar x l x s -1 > 10 > 10 > 15 > 15 > 30 > 60 > 30 > 30 > 20 > 30 > 20 > 20 mbar 8.0 8.0 6.0 6.0 4.0 1.0 4.0 2.5 min -1 58800 58800 48000 48000 37800 33000 33000 30600 mbar < 10-8 mbar < 10-10 min 5 5 6 6 7 8 8 9 DN 16 KF (clamped) 25 KF (clamped) 40 KF DN 16 KF (clamped) kg 12 12 17 17 40 45 45 50 db(a) < 41 µm < 0.01
ORDERING INFORMATION MAGiNTEGRA with 9 pin 24V PLC 3) 1) 2) # MAG W 300 ip(l) 400 ip(l) 600 ip(l) 700 ip(l) ISO-K ip 410300V0505 410400V0505 410600V0505 410700V0505 ipl on request on request 410600V0705 on request ip 410300V0506 410400V0506 410600V0506 410700V0506 ipl on request on request on request on request MAGiNTEGRA with Profibus interface 3) 1) 2) # MAG W 1300 ip(l) 1600 ip(l) 1700 ip(l) 2200 ip(l) ISO-F ip 411300V0504 411600V0504 411700V0504 412200V0504 ipl 411300V0704 411600V0704 411700V0704 412200V0704 ip 411300V0506 --- 411700V0506 412200V0506 ipl 411300V0706 --- 411700V0706 412200V0706 MAGiNTEGRA with 9 pin 24V PLC 3) ISO-F ip 411300V0514 411600V0514 411700V0514 412200V0514 ipl 411300V0714 411600V0714 411700V0714 412200V0714 ip 411300V0516 --- 411700V0516 412200V0516 ipl 411300V0716 --- 411700V0716 412200V0716 1) IP: flanking controller installation 3) Additional interface options, including RS485 and Ethernet, are available on request. 2) IPL: bottom controller installation Headquarter Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Köln T +49 (0) 221-347-0 F +49 (0) 221-347-1250 info.vacuum@oerlikon.com www.oerlikon.com/leyboldvacuum BICOM 11850.175.56.02 2.0.04.13 Printed in Germany on chlorine-free bleached paper Technical alterations reserved