Fraunhofer Institute for Material and Beam Technology



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Laser Micro Processing Dr. Udo Klotzbach Fraunhofer Institute for Material and Beam Technology Dresden

Overview Equipment - CO 2 -lasers - Solid state lasers (Nd:YAG, Disk, Fiber) - Diode lasers - Excimer lasers - CNC machines with up to 8 axes Employees 2010 app. 268 Revenues 2010 18.2 million Investment 2010 2,0 million Laboratory 5370 m² - PVD and CVD vacuum and non vacuum equipment - Plasma and induction equipment - Testing and metallography equipment - Sophisticated TEM and SEM

Competencies Over all Aim Solution of industrial problems Structuring Core Micro competencies Micro drilling Micro cutting Micro engraving Micro structuring Micro joining Cutting Engraving Drilling Joining Hybrid Technology Coating Laser Technology Technology System Engineering Micro Applied Structural Materials Analysis Technologies

Micro Drilling of Injection nozzles VIA s Printer heads Test leaks polymer 25-100 μm 20-100 μm hydroxyapatite silicon Source: Lambda Highlight steel Beam exit 100 μm Beam entry 30 μm

Micro Cutting of Decollating elements Contour cuts Aperture cuts tantalum polymer gadolinium glass

Micro Structuring of top view edge, 45 polyimide Fluidic structures Micro channels Surface modification Conducting paths silicon LTCC Source: Fraunhofer IKTS glass

Micro Joining of Polymer welding Sensor contacting Micro component joining Joining of different materials

Micro Systems SPR-biosensor platform micro fluidics and lab-on-a-chip system gold coated disposable polymer chips label free measurement of molecular interactions real time observation of binding kinetics simultaneous detection of multiple markers affinity ranking or affinity scouting (e.g., antibodies) measurement SPR-Signal signal in Pixel [pixel] 20 curve shape of the SPR-measurement 15 10 5 0 B O1 B O2 B O3 B O4 B O5 B -5 0 20 40 60 80 100 120 140 160 time [min] O1 O2 O3 O4 O5 O6-Reference Measurment of concentrations SPR device

Micro systems Cell based Sensorsystems Modular Sensorsystem integreated Sensors Microfluidic full contacted Design

Micro Systems Rapid Prototyping of Lab-on-a-Chip-Systems with integrated micro pumps mounted chip with fittings Micro fluidic structures are casted from a master with silicone (PDMS) based on GeSiM MicCell technology Master structures can be easily produced via laser-micro structuring Development targets: Reduction of up- and downturns High reliability Well defined flow rates Simple fluidic handling Air bubble free Lab-on-a-Chip-System with integrated micro pump

Micro systems OOC Design Layout

Micro Systems Actuation of micro pumps Microcontroller based actuation controller has been developed With or without display Remote controllable via RS-485 Able to drive peristaltic or nozzlediffusor pumps and additional valves Source of compressed air is needed Additional temperature control is possible micro fluidic for pump test actuation controller

Micro Systems Micro-Contact-Printing Micro-Contact-Printing procedure for wet-chemical surface functionalization of smallest substrate amounts Nano-Imprint procedure for the reproducible replica production of structure geometries up to the nm range (Insertion of microfluidic structures in gel).

Micro Systems Multi-cartridge plotter with integrated needle sensor for the dispensing of different media Production of scaffolds for tissue engineering Plotting of conductive coatings on medical products Dispense of photo sensitive materials Printing of living cells (Organic Printing) Production of soft tissue implants Plotting of sensors of conductive polymers Multi-cartidge plotter Scaffold made of collagen hydro gel

We have experience in: Lab-on-Chip Devices Diagnostics Life Sciences Research Clinical Diagnostics and POC Diagnostic Screening and Assay Development Genome Sequencing Veterinary Diagnostics Nucleic Acid Fractionation Enzymatic Screening Industrial and Environmental Applications Pharmaceutical Research and Drug Discovery

Fraunhofer Institute Material and Beam Technology Winterbergstraße 28 D-01277 Dresden http://www.iws.fraunhofer.de Dr. Udo Klotzbach E-Mail: udo.klotzbach@iws.fraunhofer.de Tel: +49 (0) 351 833913-252 Fax: +49 (0) 351 833913-300 Dr. Frank Sonntag E-Mail: Frank.Sonntag@iws.fraunhofer.de Tel: +49 (0) 351 833913-259 Fax: +49 (0) 351 833913-300