t Markus Sonnemann, Robert Bosch GmbH

Transcription

1 MST Baden-Württemberg, Stuttgart, Mikrosystemtechnik t Enabler für das Internet-der-Dinge t Markus Sonnemann, Robert Bosch GmbH 1

2 Bosch the MEMS Pioneer Start t of MEMS production in 1995 More than 5 billion MEMS sensors produced More than 1,000 MEMS patents 100% in-house from MEMS design to manufacturing Bosch is #1 MEMS sensor supplier worldwide 2

3 MEMS technology the Bosch process Thick epitaxy epi-poly DRIE Deep reactive ion etching Etching of sacrificial layers Epi-Poly Epi-poly Oxid Silizium Silicon APSM Advanced porous silicon membrane porous Si n + SMI540 System integration ASIC Gyro 10,3 mm 10,3 mm Accelerometer 1 axis gyro + 2 axis accelerometer 3

4 Wafer Fab Reutlingen Employees Production area Minifactories Products sqm Wafer fab, sensor frontend, sensor backend, test center IC,,p power S/C (chip and packaged), sensors (packaged, customer specific mold package) 150 mm module 200 mm module sqm wafer starts/day Technologies: BCD1, 2, 3, 3s, 4, 4s CMOS, Bipolar, PSC bipolar, MOS Pressure sensors Inertial sensors Process: 0.5 μm sqm 1000 wafer starts/day Technologies: BCD4, 4s, 6, 6sCu Advanced CMOS, HVCMOS Pressure sensors Inertial sensors Process 0.18 μm 4

5 Product portfolio MEMS for automotive ti Acceleration Angular rate Combined Pressure Mass flow sensors sensors inertial i sensors sensors sensors Central/peripheral l Rollover sensor Combined inertial Low pressure sensor Mass flow sensor acceleration sensor for occupant protection for occupant protection sensor (3-axis) (yaw rate and acceleration sensor) for VDC and RoSe for engine control for engine management Mid-pressure sensor for transmission Low-g acceleration control sensors for VDC, RoSe and active suspension and 3D for non-safety Yaw rate sensor for VDC and 3D for non-safety Combined inertial sensor (6-axis) (yaw rate and acceleration sensor) for navigation and non-safety applications Pressure sensor for occupant protection High pressure sensor for engine and brake systems 5

6 11 Se ensors MST Enabler für das Internet-der-Dinge More than 50 MEMS sensors in one car Engine Management e.g. Diesel 1 Mass flow sensor [Combustion] 1 Barometric air pressure sensor [BAP] 1 Pressure sensor [Particle filter] 2 Pressure sensors [Boost pressure, oil] 1 High pressure sensor [Common Rail] 1 Pressure sensor [Tank pressure] 1 Pressure sensor [Start/stop function] 2 Acceleration sensors [Active engine mounting] 1 Acceleration sensor [Onboard diagnosis] Comfort 16 Sen nsors 2 Pressure sensors [Automatic transmission] 5 Acceleration sensors [active suspension] 1 Pressure sensor, 1 Humidity sensor, 2 Thermopiles [Air conditioning] 1 Angular rate sensor, 1 Acceleration sensor [Navigation] 2 microphones [telephone] 1 Bolometer Array [Night vision] (Seldom: 16 Pressure sensors (up to 8 per seat)) 25 Se ensors Safety 2 High-g acceleration sensors (for airbag), 1 Angular rate sensor + 1 Low-g acceleration sensor (for roll-over sensing), 1 Acceleration sensor (Structure-borne sound sensor) [Airbag-ECU] 4 Acceleration sensors, 2 Pressure sensors [Peripheral airbag sensors] 2 Pressure sensors [Pedestrian safety] 1 Angular rate sensor, 1 Low-g acceleration sensor, 1 High pressure sensor [ESP (incl. ACC)] 1 Angular rate sensor [Active steering] 1 Acceleration sensor [ecall] 1 Acceleration sensor [Car alarm] 4 Pressure sensors [TPMS] 1 Pressure sensor [Occupant detection] 1 Pressure sensor [BrakeBooster] More than 50 MEMS sensors in one car today 6

7 Disruptive changes in the MEMS market Digital microphone Multi-sensor package Gyroscope Magnetic sensor Accelerometer Pressure sensor 7

8 Smartphone tipping-point i i t Rome, Via Della Conciliazione 2005 Rome, Via Della Conciliazione 2013 Source: dpa/ap Worldwide smartphone market ) : 1.3 bn shipments estimated ~7-8 billion sensors 2) 8 1) IDC Worldwide Mobile Phone Tracker, 3Q ) IHS Technology, MEMS Market Tracker Consumer and Mobile 2H 2013

9 MEMS penetrate t the markets Internet of Things (IoT) 3 rd wave Consumer Electronics 2 nd wave Automotive 1 st wave

10 More use cases than portrait / landscape Navigation Context t Fitness Wellness/stress ess/st ess Outdoor User s s context Step counter Wellbeing GPS In a meeting Fitness level Sleep monitoring Outside Calorie monitoring Activity Indoor Sitting and eating Socializing Step count + Watching TV Sports trainer heading Swimming Localization Activity recognition Running Snowboarding Climbing Improve with pressure Stress monitoring Speaker Assistant Stress level 10

11 MEMS sensors a multitude of markets Automotive Consumer Electronics Safety Systems Mobile Imaging Health & Fitness Motor Management Home Appliances Industrial & Logistics Smart Systems Internet of Things 11

12 Smart systems require new competences μc firmware design SW algorithms* (gesture, well-being, ) low power μc core design ASIC design, SystemC models FPGA as tool77 wireless connectivity (for 2 nd generation) advanced packaging (SiP WLCSP) MEMS design/technology (SiP WLCSP) Software and advanced packaging are gaining weight, SW is the new ASIC 12

13 Example indoor navigation Inertial sensor Sensors & Functions Low power consumption Acceleration Gyroscope Geomagnetic sensor Applications Step counter & dynamic orientation sensor indoor Path integration Pedestrian dead reckoning Benefits Navigation in shopping malls, public areas, parking decks, etc. 13

14 BMI160 inertial measurement unit The 6-axis sensor integrates a 3-axis accelerometer and an ultra-low power 3-axis gyroscope into a single package & = Developed specifically to support the demands of next generation applications such as indoor navigation, augmented reality and immersive gaming BMI160 with <1mA in full-operation mode for true always-on applications 14

15 BNO055 intelligent t absolute orientation ti sensor Absolute Orientation ti Sensor 3-axis accelerometer 3-axis gyroscope 3-axis geomagnetic sensor 32 bit μc running BSX3.0 FusionLib software 5.2 x 3.8 mm² footprint System in Package (SiP) approach Augmented Gaming Activity Navigation Context Power Home Logistics Reality monitoring awareness management automation BNO055 plus a RF interface (WiFi, BT, etc.) is a key block of IoT based sensing 15

16 Connected smart home 16

17 Example smart home Intrusion sensor Sensors & Functions Acceleration Gyroscope Geomagnetic sensor Buzzer Battery life time: up to two years ( closing cycles assumed) Wireless data transmission Applications Home safety monitoring Energy efficiency management Ambient Assisted Living Benefits Easy and fast installation Multiple event detection Flexible usage for doors and windows Extendibility to many different use cases 17

18 New: Gas Sensor BME680 BMP280 BME280 + BME680 BME680 + Sensing our world Quantify yourself Well-being recommendations Personalized environment Sport & fitness monitoring Personalized control Environmental monitoring Personal weather forecast Home automation Environmental measurement Pressure Humidity Temperature Gas (VOC, CO 2 alcohol) World s first environmental sensor combining pressure, humidity, temperature & indoor air quality 18

19 New: Gas Sensor BME680 Use cases Home automation control for personalized HVAC management Manual ventilation window open/close VOC detection (Volatile Organic Compounds) Indoor/outdoor detection to trigger GPS 3.0 mm Leakage detection, e.g. gas supply in stoves Smoke detection 30mm Human recognition indoor 3.0 Equips mobile devices and wearables with indoor air quality measurement 19

20 Product portfolio MEMS for Consumer Electronics 3-axis sensors 6-axis sensors 9-axis sensors environmental microphones Accelerometer Gyroscope Magnetometer ecompass IMU Absolute Orientation Sensor Application Specific Sensor Nodes (ASSNs, incl. μc) Barometric Pressure Sensor Integrated Environmental Unit Analog and digital MEMS microphones (Akustica) High quality voice input for mobile devices Sensor data-fusion software ties everything together 20

21 Three pillars of Bosch Bosch: No. 1 global supplier of MEMS sensors AMEMS pioneer with More than 20 years of experience More than 5 billion MEMS sensors produced More than patents in the MEMS sensor area 21

22 Bosch from MEMS to smart sensors & solutions Bosch: One source for MEMS, sensors, actuators and solutions Bosch Sensortec Akustica Bosch Connected Devices & Solutions CE & Industrial Acceleration Angular rate Pressure Mass flow sensors Accelerometers Geomagnetic sensors Gyroscopes Pressure sensors Humidity sensors Combo sensors ASSNs MEMS microphones Smart sensor / actuator nodes Embedded SW & Algorithms Customized IoT sensors & actuators solutions 22

23 Enabler for IoT MEMS technology innovation Size / power Integration / μc + SW New measurants Continuing i shrinking of sensor footprint / size and power consumption (e.g. accelerometer) Integration ti of multi-axis i sensors + μc + SW in combo package (e.g. motion / orientation) Rise / emergence of novel sensor clusters (e.g. environmental cluster T, p, H, ) MEMS technology is ready for IoT 23

24 MST Baden-Württemberg, Stuttgart, Danke! Mikrosystemtechnik Enabler für das Internet-der-Dinge 24