Overzicht (Low-Cost) Micro-Electro-Mechanical Systems (MEMS) Sensoren
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1 Workshop Integrated Navigation Delft 29 oktober 1993 Amsterdam 15 december 2006 Overzicht (Low-Cost) Micro-Electro-Mechanical Systems (MEMS) Sensoren Sam Storm van Leeuwen Vliegproef ingenieur 15 december 2006
2 Wat is MEMS? Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. Workshop Integrated Navigation
3 MEMS Sensoren per meetgrootheid Versnelling Hoeksnelheid Magnetische veldsterkte (kompas) Druk (hoogte/ snelheid) Temperatuur Tijd (atomic clock 1 cm 3, stability 1*10-11 ) Workshop Integrated Navigation
4 Integratie GPS met... GPS (koers en stand) Inertial sensors (versnelling, hoeksnelheid, veldsterkte) GSM Locale (indoor) plaatsbepalingssystemen Signals of Opportunity (WLAN, UWB, RFIS, radio, TV) (e)loran Map matching/ (differential) wheel speed sensors Workshop Integrated Navigation
5 Versnellingssensoren Eigenschappen Physical Mass [gram] Dimension [cm 3 ] Mounting Power [V, ma, mw] Environmental Temp range [Cel] Vibration [g] Shock [g] Ambient pressure [kpa] Operational Input range [g] Output type [V, ma, bit,..] Scale Factor [V/g, ma/g,..] Bias [V,..] Resolution [V,..] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/g/Cel] Scale Factor v.s. Supply [V/g/V,..] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,..] Misalignment [deg] Workshop Integrated Navigation
![.] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/g/Cel] Scale Factor v.s. Supply [V/g/V,.](/docs-images/43/7823716/images/page_5.jpg ".] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,.")
6 ADXL202 Typical Values Physical Mass: 5gram Dimension: 0.9x1x0.5 cm 3 Mounting: Solder Power: 5V, 0.6mA Environmental Temp range: 0/70 Cel Vibration:? Shock:? Ambient pressure:? Operational Input range: -2/+2g (2 axis) Output type: V (also duty cycle) Scale Factor: 312mV/g Bias: 625mV Resolution:? Warm-up time: 0.3msec Bandwidth: 500Hz Resonant Frequency: 10kHz Damping factor:? Latency:? Performance Non-Linearity: 0.2 % FSO Scale Factor TC: 0.5% reading delta from 25Cel Scale Factor v.s. Supply:? Scale Factor Stability:? Vibration Sensitivity:? Bias TC: 0.625mV/Cel Bias Repeatability:? Bias v.s. Supply: 6.25mV/V Hysteresis:? Noise: 0.156mV/ Hz Random Walk:? Misalignment: +/- 1 deg (between axis +/- 0.01deg) N.b.:de datasheet toont specs welke niet in deze tabel opgenomen zijn Workshop Integrated Navigation
7 Hoeksnelheidsensoren Eigenschappen Physical Mass [gram] Dimension [cm 3 ] Mounting Power [V, ma, mw] Environmental Temp range [Cel] Vibration [g] Shock [g] Ambient pressure [kpa] Operational Input range [deg/sec] Output type [V, ma, bit,..] Scale Factor [V/deg/sec,..] Bias [V,..] Resolution [V,..] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/deg/sec/Cel] Scale Factor v.s. Supply [V/deg/sec/V,..] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,..] Misalignment [deg] Workshop Integrated Navigation
![.] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/deg/sec/Cel] Scale Factor v.s. Supply [V/deg/sec/V,.](/docs-images/43/7823716/images/page_7.jpg ".] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,.")
8 Magnetisch veld sensoren (kompas) Eigenschappen Physical Mass [gram] Dimension [cm 3 ] Mounting Power [V, ma, mw] Environmental Temp range [Cel] Vibration [g] Shock [g] Ambient pressure [kpa] Operational Input range [deg, gauss] Output type [V, ma, bit,..] Scale Factor [V/deg/sec,..] Bias [V,..] Resolution [V,..] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/deg/sec/Cel] Scale Factor v.s. Supply [V/deg/sec/V,..] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,..] Misalignment [deg] Workshop Integrated Navigation
![.] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/deg/sec/Cel] Scale Factor v.s. Supply [V/deg/sec/V,.](/docs-images/43/7823716/images/page_8.jpg ".] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,.")
9 Invloed versnellings/ hoeksnelheid fouten op afgelegde weg stilstaand 2d inertiaal systeem z x Ideaal geval: x-accel = 0 (z-accel = 1 [g]) y-gyro = 0 z x Fout in accels: Fout in berekende x-afstand: x-accel = a x S x = ½ * a x * t 2 (z-accel = 1 + a z ) (y-gyro = 0) z z Fout in gyro: x y-giro = d y * t hierdoor fout in x-richting: 1 * sin( d x y * t) d y * t en fout in berekende afstand S x = 1 / 6 * d y * t 3 (fout in z-richting: 1 1 * cos( d y * t) 0) Tot. fout in x-richting:s x = ½ * a x * t / 6 * d y * t 3 Workshop Integrated Navigation
10 Invloed versnellings/ hoeksnelheid fouten op afgelegde weg (vervolg) S = 5* a*t 2 + 8*10-6 * d*t 3 S = fout in afgelegde weg [m] a = versnellingsmeter fout [g] 25e-6 d = hoeksnelheid (gyro) fout [deg/h] t = tijd [sec] 2e-3 accel [g] 2.50E gyro [deg/h] 2.00E Inertial grade Tactical grade a [g] 25 * * 10-3 d [deg/h] 2 * Workshop Integrated Navigation
![accel [g] 2.50E-05 1 2 3 4 5 6 7 gyro [deg/h] 2.](/docs-images/43/7823716/images/page_10.jpg "00E-03 0 0 0 0 0 0 0 9 8 Inertial grade Tactical grade a [g] 25 * 10-6 1 * 10-3 d [deg/h] 2 * 10-3 1 7 6 5 4 3 2")
11 MEMS (Inertial) Sensor - Fabrikanten (alfabetisch) Analog Devices: versnelling, hoeksnelheid (temperatuur) Bosch: versnelling, hoeksnelheid CFX Technologies: versnelling, hoeksnelheid Colibrys: versnelling EpsonToyo: hoeksnelheid (temperatuur, druk) Freescale: versnelling Hitachi Metals: versnelling, magnetische veldsterkte Honeywell: hoeksnelheid, magnetische veldsterkte (naast hun navigation grade IMU) Hokuriku: versnelling Kionix: versnelling Workshop Integrated Navigation
12 MEMS (Inertial) Sensor - Fabrikanten (vervolg) Memsic: versnelling Melexis: hoeksnelheid PCB Piezotronics: versnelling Murata: hoeksnelheid Silicon Sensing Sysytems: hoeksnelheid Silicon Designs, Inc: versnelling Sparton: magnetische veldsterkte Tronic s Microsystems: versnelling Workshop Integrated Navigation
13 MEMS (Inertial) Sensor - Fabrikanten (vervolg) STMicroelectronics: versnelling BEI Systron Donner: hoeksnelheid (versnelling?) NEC/Tokin: hoeksnelheid (versnelling, magnetische veldsterkte?) VTI Technologies: versnelling Workshop Integrated Navigation
14 MEMS Inertial Integrated Systems - Fabrikanten American GNC Corporation: Cloud Cap Technoloy: Crossbow: Data Tec Co: Inertial Science: Leica Geosystems: Micro Strain: Oxfors Technical Solutions: Sensorex: SSID=a636ea e98c5fa8912bd580 Systron Donner: Tokin: Verhaert: gies.pdf Xsens: Workshop Integrated Navigation
15 VRAGEN????????? Workshop Integrated Navigation
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