Embedded smart sensing devices incorporating piezoelectric energy harvesters.
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1 Embedded smart sensing devices incorporating piezoelectric energy harvesters. VERMON SA, France An NGUYEN-DINH, Vice-President, Director of Technology HORIZON 2020 EUROPEAN UNION FUNDING FOR RESEARCH & INNOVATION
2 Contents VERMON SA, France wireless SHM (Structure Health Monitoring) Piezoelectricity & Energy Harvesting Applications Perspectives / conclusions An NGUYEN-DINH, VERMON SA Vice-President Dir. of Tech an.nguyendinh@vermon.com
3 VERMON is anchored in both medical and industrial ultrasound markets SME created in pers (30 in R&D) Turnover: 26,5M (2014) >10% CAGR >20% of turnover dedicated to R&D 87% to export Facilities Located in Tours, France > 4000sqm ISO9001, ISO13485 and ISO14001 QMS. OEM provider of ultrasound turnkey solutions Main core technologies Bulk piezoelectric technologies Electrostatic MEMS-based technologies Applications Imaging / Monitoring Therapy NDT/SHM Energy harvesting 180 rue du Général Renault TOURS CEDEX 1, France
4 Energy harvesting system block diagram 4
5 Applications addressable by energy harvesters 5
6 Piezoelectric energy harvesting PIEZOELECTRICITY is unique in that allows the generation of electricity from what are considered as waste mechanical forces. Piezoelectric effect is defined as the electrical polarization of materials due to application of mechanical stress or strain. 6
7 Modes of operations Off-Resonance Resonance Mechanical sources Compression load Vibrations Frequency N/A Tunable Structure Stack / cymbal / drum.. Cantilever / bridge.. Intrinsic features High energy output Withstand high mechanical load Mechanical amplifier compatible (cymbal) Dynamic excitation stress Robust manufacturing process Tunable resonant frequency Simple structures Compact sizes / miniaturisable Cost efficient (development & fab) Reliable performance 7
8 Cantilever energy harvester bimorph cantilever in d31 piezoelectric mode 8
9 Embeddable autonomous sensor node (ASN) Piezo cantilever energy harvester (component) Piezo harvester + rectifier + rechargeable battery or super caps (scalable energy harvesting sub-system) Piezo harvester + rectifier + sensors + signal proc. + communication (embeddable autonomous sensor node) 9
10 Some previous generations of sensor nodes Next Gen: consumption<few µw / integrated energy harvesting / wireless transponder / adaptable lifespan / conformable / smart power management / etc.. 10
11 ASN network (a) Typical wireless sensor network scenario. (b) Sensor node block diagram. 11
12 Manufacturing process (cantilever) Surface roughness (PZT) Op5cal Thickness control Poling and electrode pla5ng X50 Thinned bulk PZT layers Metallic/Organic shim materials Assembly method (reliability & robustness) 12
13 Performance assessment RMS power Ω 35 Performances : 0,24G 24,5Hz 3Vrms Q=24 non-linear electromechanical behavior G 0.19G 0.23G 0.28G 0.32G 0.38G Time Frequency (Hz)
14 Structure health monitoring (SHM) Requirements for SHM energy harvester High reliability Embeddable within the structure Long lifespan Harsh environment compatible (T, pressure, radiation, chemical) Efficiency High power density Cost efficient Aircraft applications Maintenance costs for airlines companies: 10b$ 35% of them can be saved with embedded autonomous sensors. Various types of sensors: acoustic, LRU, inertial.. Vibration frequencies: Hz. Typical acceleration: 0,2 to 1G Constraints: flat design, robust, reliable, long lifespan. 14
15 ASN for SHM General specifications: Vibration conditions Harvesting frequency range from 10 to 50Hz 1G max acceleration Geometry Flat shape to be incorporated into a composite sandwich layer thickness Compatible with internal stress/strain Detection capabilities and localization Passive acoustic or LRU sensors for guided wave processing Other sensors Autonomous acous+c sensor nodes 15
16 Piezoelectric energy harvesters for medical Implantable vibrational low frequency energy harvester, VERMON Heart as vibrational source Direct conversion (external patches) Hear motion (external or internal capsules Power output >10µW/cm2 continuous power output Up to 2.5V voltage Quality standards & requirements years lifespan Comply with ISO60601 standards on active implantable medical devices Biocompatibility Electrical safety Conformal piezoelectric energy harvesting from motions of the heart, lung, and diaphragm C. Dagdeviren 16
17 Piezoelectric energy harvesting, a multi-disciplinary domain. low power Electronics smartintegration micromachining modelling Micromachining Test & validation Sensing Electronics Piezoelectric design academic-industry synergy WSN Integration 17
18 Piezoelectric energy harvesters technology comparison MEMS-based Macro-Fab Thin films Thin films Thick films Thinned bulk Chemical vapor deposition Sputtering Sol-gel Performances LF Energy harvesting cap. khz range khz range <100Hz 5-50Hz Power density mid mid mid high Aging na na na qualif. in prog Manufacturing capabilities bimorph difficult difficult average easy WLP / PLP yes yes yes yes piezo thickness <1µm <3µm <10µm 10µm-50µm Technology development Design adjustment level low low high high Feasibility development cost >200k >200k <100k <50k Product industrialization >1M >1,5M >250k <250k Product cost / equipment cost Cost/Unit <5 <5? >20 Quantity/wafer 160/ 6 wafer 160/ 6 wafer na na Development cycle >2years >2years >1 year 6 months 18
19 Conclusions Validated Competitive Performances (10-25µW/cm2) Low technology access investment High degree of flexibility Large choice of materials and dimensions Application compatibility An efficient way to fast prototyping and demonstrator validation Extended resonance frequency range (10Hz to 4KHz) Low to medium volume compatible Aging : > 10years lifespan Versatile (medical or industrial) Still in development Non-linear behavior (medium term) Robustness in harsh environment (short term) Reliability (medium term) On-going Research Programs ( ) Smart-Memphis, H2020-GA ( ) Laureat-ANR-French National Agency for Research; ANR-14-CE Contact: An Nguyen-Dinh an.nguyendinh@vermon.com Phone: Perspectives High expectation market potential Stable & well-known principles Proven durability Room for new designs and optimizations High degree of customization 19
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