SOLAR NEWSLETTER ISSUE #5 SOLAR/TFS CONTENTS *

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1 MANZ AUTOMATION AG 06/ SOLAR NEWSLETTER ISSUE #5 SOLAR/TFS CONTENTS * editorial.... p. 1 IQ scribe tester... p. 2 scribing systems.... p. 3 wet chemistry... p. 4 line controller... p. 5 m-ipcs and ipcs... p. 6 laser drilling... p. 7 people & news.... p. 8 E D I T O R I A L From an expert in automation systems to an expert in integrated solutions Dear Customers, With a higher degree of integration of production processes, automation is increasingly losing significance. Today, the share of sales of automation systems at Manz accounts for less than 30%! This is why the strategic repositioning process from an automation specialist to a specialist in integrated solutions was initiated several years ago. Since then, a lot of measures have been taken to achieve this goal. Besides concentrating on the development of process machines, such as laser or metallization tools, we have further extended our product range by taking over Intech in Taiwan, which is focused on wet chemical processes. Furthermore, the establishment of Manz Coating for the development of vacuum coating systems for the production of crystalline silicon solar cells or thin-film solar modules has constituted another decisive step into this direction. As a result, Manz will soon be in the position to cover 90% of the supply chain with its own products within both the thin-film and crystalline silicon solar businesses. With the introduction of our extended business model, the Manz CIGSfab, now we can even offer our customers an integrated turn-key production line for CIGS thin-film modules. The know-how licensing and co-operation contract with Würth Solar, the most experienced CIGS module producer, and the exclusive access to the results of research on CIGS glass modules carried out by the renowned research institute ZSW (holding the CIGS world record of 20.3%), makes it possible to offer our customers a joint roadmap for cost reduction and increase in efficiency and thus a maximum investment security. As you can see, our strategic positioning enables us as one of the world s leading technology providers in the photovoltaic industry to offer you a full range of single equipment or a totally integrated production line. All combine to an unbeatable competitive advantage for you: lowest cost of ownership, highest efficiency and thus the most profitable production ever! Axel Bartmann Head of Corporate Communication

2 page 2 page 3 D A T E S June 08 10, Intersolar Europe Munich, Germany I Q S c r i b e T e s t e r L A S E R S C R I B I N G 07 July 12 14, Intersolar North America San Francisco, USA 09 September 05 09, 26th EU PVSEC Hamburg, Germany 10 October 05 07, PV Taiwan Taipei, Taiwan >> more information and news: Manz IQ Scribe Tester Manz scribing systems optimized for maximum precision Current efforts to reduce production cost tools, it is fully compatible with the line With an installation base of more than contribution here. Inline monitoring, which The compact design of any individual and improve the efficiency of thin-film so- throughput and provides all important in- 100 machines, is a is important for purposes of quality assu- M-IPCS scribing head offers the chance to lar modules focus on an increase of the formation on the quality of your scribes: market leader in scribing systems. rance, reduces non-productive times to a use multiple needles to be operated in active cell area and on processing with Besides a full area scribe inspection, the These are available for various scribing minimum. Besides the highly accurate pro- parallel. Consequentially, this will lead to a higher throughputs. Generally, a side effect tester performs high resolution measure- processes: not only mechanical (CIS: P2, cesses and the high quality of the products, much higher throughput in the fab. of these optimizations is the narrowing of ments of the dimensions of all scribes as P3) but also laser-based (P1, P2 and P3) the well thought-out and flexible design of process windows. In order to maintain the well as electrical tests of the cell isolation. scribing operations can be performed with the systems is remarkable. It allows easy Highest throughput and efficiency: targeted production yield, a tighter pro- The modular setup allows configuring the maximum precision on Manz systems. integration into fully automated production more than double the throughput than cess control is required. For this purpose, tester for measurement tasks which are lines. most competitors due to number of Manz introduces the Inline Quality Scribe specific to each scribe type. Based on the For example, it is possible to produce thin- tools in parallel and scribing speed Tester on the Manz IQ platform. Manz IQ platform, the tester offers a high- film modules that have a decisive competi- The next logical step for Manz was to esta- lowest non productive times due to level data analysis, result summary & panel tive advantage: with the help of the active blish a comparable solution for mechanical online alignment, loading and The so-called P1, P2 & P3 scribing pro- classification as well as a statistical pro- tracking system IPCS (the Manz Inline Pre- scribing tools. With the newly developed unloading in parallel and ease of cesses in the production line of thin-film duction analysis. cision Control System) it is possible to M-IPCS (active tracking for mechanical maintenance solar modules are employed to convert a Your benefit as customer gets even higher achieve a dead area of < 200 μm. This scribers) a 100% online control of the scri- accuracy/precision during scribing stack of large area coatings into a series of when also choosing the scribing tools of unique feature was introduced to the bing process takes place. Each mechanical (alignment procedure; mechanical interconnected cell stripes: P1 and P3 split Manz. You profit from fewer interfaces, and market one year ago and has been sold scribing tip has its own camera & control design of the stage; control) the coatings into separated cells, and via the direct feedback from tester to scribing successfully to numerous customers. This system which aligns the P2 or P3 scribe to the P2 scribe, the series interconnection is tool will tap the ultimate optimization po- is a milestone compared with other sys- its corresponding P1 (P2) scribe. This active Most robust process due to active force established. The quality of the thin-film mo- tential and process control. Combined with tems on the market, where the dead area mechanism enables customers to minimize adjustment of scribing needle dule then critically depends on the electrical our worldwide manufacturing and service is approx μm above this figure. the dead area and compensate for sub- insulation between the single cells, the elec- structure, Manz Automation provides this The other advantages of Manz scribing sys- strate warp which might be induced by ther- Smallest dead area due to inline precision trical resistance of the series interconnect, comprehensive package wherever you are tems include the low operating costs. Top mal treatment during coating of the glass control (closed loop) and finally, on the dead area generated by located. Contact us we shall be pleased to throughput and maximum efficiency are substrates. This unique M-IPCS will immedi- each scribe triple. answer your questions. appreciated by our long-standing clients. In ately lead to an increased module efficiency In order to control the related scribing pro- particular, exact parallel processing, which of CI(G)S coated thin-film solar panels. cesses, Manz introduces the IQ Scribe Tes- more information: Dr. Wolfgang Henschel guarantees a reduction in cycle times with ter. Located subsequent to your scribing whenschel@manz.com consistent high quality, makes a major

3 page 4 page 5 W E T C H E M I S T R Y L i n e C o n t r o l l e r Manz introduces the new MCT series a module glass cleaner for the pv market Manz Line Controller Everyone in the PV industry is currently of cleaning systems, Manz previously suc- is also cost effective in both the thin-film and has been well position on the central corridor in a very Furthermore, the Manz Line Controller con- talking about cost reduction and efficiency cessfully introduced the GCT series to the crystalline module markets. known as a supplier of innovative auto- short period of time and to transport a cept is more focused on controlling buffer increase, but there is also another focus PV market. However, an excellent solution mation solutions in the LCD and PV indus- full cassette to the next process step. concepts than on inline processes. Since in manufacturing of crystalline solar cell combining high cleaning efficiency with a The MCT tool runs the process with DIW in tries for many years. Thus, a minimized cycle time can be the entire Line Controller concept is modu- modules and thin-film solar modules. low cost approach for the second cleaning the temperature range of room temperature achieved. lar, additional components can be connec- application is still missing in the market. up to 60 C with a combination of double After the successful market introduction In order to minimize costs for con- ted to the Line Controller. Manufacturers of PV modules have to gua- brush cleaning section and combined spray of the new Manz Total Fab Automation sumables such as inert gases etc. rantee a life-time minimum of 20 years for These market requirements for uncovered rinse, followed by our well known special AK Solution with a central automation corridor, the cassette stations can be individually In order to offer a flexible solution and a their modules. Because of this, the highest second glass cleaning in thin-film solar and drying unit. The whole tool design, including Manz is now offering its own Line Control- closed and purged with inert or dry field compatible approach for already esta- quality standards in the production process for incoming glasses in crystalline modu- loading and unloading conveyors for manual ler which is integrated as a new control gases, depending on the customer s blished MES-systems, the Manz Line Con- are mandatory from the very beginning. le manufacturing were reasons enough or automatic handling of the substrates is layer between MES/PLS and the equip- requirements. troller will be offered with exchangeable Therefore, the incoming cleaner plays an for Manz to introduce the new MCT (mo- extraordinarily compact for fast installation ment level. The Manz central automation corridor interfaces to the overlaid MES-systems. important role to ensure this quality for dule glass cleaning technology) series as and easy operation with low consumption is modular and can be extended as the later main lamination process. Thus our third product family, after GCT (Green and low requirements to the fab facility. The key features of the centralized auto- required. The control of the individual equipment far, simple metal-made glass cleaners from Cleaning Technology) and GTT (Green Tex- These are the key factors for the lowest COO mation corridor are: Of course, the entire concept is happens via transfer orders on i.e. carrier the architecture glass industry have been turing Technology) series, to the PV market. as well as the smallest investments for the Smallest footprint and highest designed for different glass sizes. level (cassettes) or part level (substrates). sufficient for this job. However, increasing tool. flexibility in automation solution offer The Manz Line Controller supports Manz demand will require a more sophisticated The new MCT cleaner series is designed for savings in space and investment. With the new Line Controller, Manz is now MES-SECS solar interfaces as well as Manz cleaning system without generating signifi- both market segments with a completely In conclusion, the new MCT series of Manz is The central buffer system allows able to define an additional interface bet- MES-XML solar interfaces. cantly higher costs. new approach for these applications which a new generation of the most cost effective chaotic storage which means that ween the MES/PLS and the equipment brings high level design rules like PP body high level cleaners in module manufacturing with this system, a significant amount level. One key benefit is that no hard-real The key benefits for customers are: Even the thin-film section of the PV industry and advanced AK drying or selected mate- of thin-film PV as well as of crystalline module of storage room can be saved. time data is required. Manz equipment is completely is facing the same challenge. Here, typi- rials like nylon brushes to this process step. manufacturing. The MCT series is available Furthermore, the automation system controlled by the Line Controller cally two incoming cleaners are used. The Of course some of these components were in two versions, either as MCT 1200 (glass will work in a highly efficient and The main purpose of the Manz Line Con- Only one interface communication one for the glass for later film deposition by derived from the high level cleaning system size up to 1200 mm x 1800 mm) or MCT 1400 cost-effective manner. troller is to implement an intelligent to the customer MES use of DIW or alkaline cleaning chemicals. GCT whereas other technical details were (glass size up to 1400 mm x 2000 mm). The cassette buffer system offers our connection to decentralized automation The other for the uncovered second glass newly designed from scratch in order to ad- customers an improved degree of components, such as Manz substrate where usually DIW is used for contamina- just the MCT series to specific applications more information: Dr. Klaus Rührnschopf flexibility. The central robot unit is robots (MSR) and Manz cassette robots tion removal. In the case of the first type and market requirements. This new design kruehrnschopf@manz.com positioned so that it can reach any given (MCR) on the control (automation) level.

4 page 6 page 7 L A B O R A T O R Y P L A T F O R M F O R L A S E R S C R I B I N G A N D M E C H A N I C A L S C R I B I N G T E S T S L A S E R D R I L L I N G F O R T H I N - F I L M M O D U L E S In order to complete the product portfolio of Manz, we are now offering our customers a great, new solution to drill through-holes at the border area of thinfilm solar modules. Depending on the module design, the bus The new laboratory platform with IPCS and M-IPCS allows scribe tracking for laser and mechanical scribing processes bars have to be pulled through the coated glass. But, glass substrates that have already been drilled before the high temperature coating processes, are subject to breakage because of possible thermal restraints. Therefore, this approach is a possible security risk. To counteract that potential risk, Manz supplies a solution for laser drilling of the through-holes after the laser edge ablation process. During that laser process the pulsed laser source is targeting the energy precisely, so that cracks and damages do not appear in the surrounding areas. Even laser drilling in the coated area does not lead to micro- After expanded its optical module, which is equipped with the modules. The most important client bene- Manz's Laboratory Platform will be deli- For more information, do not hesitate to cracks or thermal damages on the coated product range back in spring 2010 to in- innovative IPCS (inline precision control fits are improved processing accuracy and vered as a turnkey system, and contains get in touch with our team. surface that is surrounding the hole. clude an LSE machine platform for scri- system) for actively tracking P1 scribe lines an optimized module dead area. In addition, both a cooling and exhaust system. bing small thin-film solar modules, this when scribing P2 and P3 lines. This unique by eliminating calibration processes (parti- The high availability of the system as well tool's next stage of expansion can now be feature offers clients the ability to manu- cularly in the production tool), clients also With Manz's Laboratory Platform, clients as a stable accuary of the whole process is presented in Valencia. The Manz Labora- facture solar modules with the highest see improved process cycle times. gain important benefits: they can already achieved by using an aligned laser and scan- tory Platform was designed as a develop- efficiency. Thanks to the active tracking The Laboratory Platform's machine con- make use of Manz's well-proven and ner system, which are already approved ment and small batch system for a variety mechanism (IPCS), the system can achieve cept is designed in such a way that established scribing expertise components in other successful systems of different stages in the thin-film solar a minimal distance between P1/P2 and P3 during development applications and pro- during the development by Manz. module manufacturing process. lines, which ultimately results in a very totype tests, substrates with sizes such as phase for new thin-film solar small dead area and, in turn, extremely 300 mm 300 mm can be placed into the modules or when optimi- Customer's special needs and specifica- The system can be equipped with proces- efficient modules. Because the P2 and P3 machine. When designing the Laboratory zing existing technologies. tions, like drilling of free-forms, can easily sing sources for laser scribing thin-film scribes now actively track the correspon- Platform, Manz went to great lengths to en- Manz's many years of ex- be achieved by the software provided. modules as well as for mechanically scri- ding P1 lines, reference crosses no longer sure that it can be operated using the same perience in laser and me- bing CIGS solar modules. need to be added during P1 scribing. This process parameters as are used in Manz's chanical scribing will sup- Solutions in combination with other pro- Manz's Laboratory Platform is characterized saves time and optimizes cycle times during tools to process full-sized thin-film solar port them in their quest to cesses in the production process are by its extremely high level of flexibility. the scribing process. Moreover, this active modules. Of course, the processing speed develop and bring better, possible as is a stand alone version. Many processing tools can be simulta- tracking mechanism is now incorporated and the selection of processing sources more efficient, and more neously integrated into the machine, and into the processing head for mechanical are both identical to Manz's processing cost-effective thin-film mo- it was intended to be used with a variety scribing. With the new M-IPCS, the P2/P3 tools for modules with substrate sizes up to dules to market. of different laser sources. In this context, line is now also actively tracked along the generation 8.5 (2,200 mm 2,600 mm). Manz makes use of its established laser P1 line when mechanically scribing CIGS

5 MANZ AUTOMATION AG 06/ Steigaeckerstraße Reutlingen Germany Phone +49 [0] Fax +49 [0] info@manz.com Issued by Concept/Design Photo credits, Reutlingen; Andreas Körner, Stuttgart; istockphoto We reserve the right to correct errors and make technical changes. Readers are welcome to reprint individual articles provided that approval is obtained in advance. P E O P L E A T M A N Z N e w l o g o o f M a n z Joining the company on February 1st,, Jonathan Li will now strengthen Manz s thin-film solar activities in Asia. Jonathan holds a Ph. D. degree in Electrical Engineering. He has been working internationally for well-known semiconductor and solar manufacturing or equipment companies in Asia and Europe during the past 15 years. There, he has gained vast experience by successful equipment startup, processing technology transfer as well as customer support in both, the semiconductor and the solar industry. We are happy to welcome Jonathan among our team and wish him all the best for his career at Manz. contact information: Jonathan Li jli@manz.com Since you are an attentive reader of our newsletter, you might have noticed the change in our logo already. As a result of our long-time repositioning process, mentioned in the editorial of this newsletter, we are now successfully positioned as a supplier of production systems. It s about time that we visualize this important change to public. carried the supplement "automation" in its name and logo since it was founded in Thus, the decision to remove the automation from the logo and replace it with something else was not an easy one. But since the claim of a brand has to carry the core messages of the company, we have been faced with the challenge that "automation" just did not fulfill this requirement any more. "passion for efficiency", the new motto of Manz, represents the attitude that you will feel when you come to visit our facilities and get to know the people working there. I can tell you this from personal experience, since I started working for Manz six months ago. It is not only Dieter Manz, one of the pioneers in the photovoltaic business and our CEO, who embodies this passion to further increase efficiency of solar cells and modules. It is the spirit of the company to work passionately on efficiency boosting solutions with the aim to cut your costs and thus remain one of the leading pacemakers of the photovoltaic industry. contact information: Axel Bartmann abartmann@manz.com