Fundamentals and Applications of Microfluidics

Transcription

1 Fundamentals and Applications of Microfluidics Second Edition Nam-Trung Nguyen Steven T. Wereley ARTECH HOUSE BOSTON LONDON artechhouse.com

2 Contents Preface Acknowledgments xi xiii Chapter 1 Introduction What Is Microfluidics? Relationships Among MEMS, Nanotechnology, and Microfluidics Commercial Aspects Scientific Aspects Milestones of Microfluidics Device Development Technology Development Organization of the Book Chapter 2 Fluid Mechanics Theory Introduction Intermolecular Forces The Three States of Matter Continuum Assumption Continuum Fluid Mechanics at Small Scales Gas Flows Liquid Flows Boundary Conditions Parallel Flows Low Reynolds Number Flows Entrance Effects, Surface Tension ' Molecular Approaches MD DSMC Technique Electrokinetics Electro-osmosis Electrophoresis Dielectrophoresis Conclusion 51

3 VI Fundamentals and Applications of Microfluidics Chapter 3 Fabrication Techniques for Microfluidics Basic Microtechniques Photolithography Additive Techniques Subtractive Techniques Pattern Transfer Techniques Functional Materials Materials Related to Silicon Technology Polymers Silicon-Based Micromachining Techniques Silicon Bulk Micromachining Silicon Surface Micromachining Polymer-Based Micromachining Techniques Thick Resist Lithography Polymeric Bulk Micromachining Polymeric Surface Micromachining Microstereo Lithography Micromolding Other Micromachining Techniques Subtractive Techniques Additive Techniques Assembly and Packaging of Microfluidic Devices Wafer Level Assembly and Packaging Device Level Packaging Biocompatibility Material Response Tissue and Cellular Response Biocompatibility Tests Chapter 4 Experimental Flow Characterization Introduction Pointwise Methods Full-Field Methods Overview of upiv Fundamental Physics Considerations of upiv Special Processing Methods for upiv Recordings; Advanced Processing Methods Suitable for Both Micro/Macro-PIV Recordings upiv Examples Flow in a MicroChannel Flow in a Micronozzle Flow Around a Blood Cell Flow in Microfluidic Biochip Conclusions Extensions of the upiv Technique 153

4 Contents vu Microfluidic Nanoscope Microparticle Image Thermometry Infrared upiv Particle Tracking Velocimetry Chapter 5 Chapter 6 Chapter 7 Microfluidics for External Flow Control 5.1 Velocity and Turbulence Measurement Velocity Sensors Shear Stress Sensors 5.2 Turbulence Control Microflaps Microballoon Microsynthetic Jet 5.3 Microair Vehicles Fixed- Wing MAV Flapping-Wing MAV Microrotorcraft Microrockets Microfluidics for Internal Flow Control: Microvalves 6.1 Design Considerations Actuators Valve Spring Valve Seat Pressure Compensation Design 6.2 Design Examples Pneumatic Valves ^ Summary Thermopneumatic Valves Thermomechanical Valves Piezoelectric Valves Electrostatic Valves Electromagnetic Valves Electrochemical and Chemical Valves Capillary-Force Valves Microfluidics for Internal Flow Control: Micropumps 7.1 Design Considerations Mechanical Pumps Nonmechanical Pumps 7.2 Design Examples Mechanical Pumps Nonmechanical Pumps 7.3 Summary

5 viii Fundamentals and Applications of Microfluidics Chapter 8 Chapter 9 Microfluidics for Internal Flow Control: Microflow Sensors 8.1 Design Considerations Design Parameters Nonthermal Flow Sensors Thermal Flow Sensors 8.2 Design Examples Nonthermal Flow Sensors Thermal Flow Sensors 8.3 Summary Microfluidics for Life Sciences and Chemistry: Microneedles 9.1 Design Considerations Mechanical Design Delivery Modes 9.2 Design Examples Solid Microneedles Hollow Microneedles 9.3 Summary Chapter 10 Microfluidics for Life Sciences and Chemistry: Micromixers 10.1 Design Considerations Parallel Lamination Sequential Lamination Sequential Segmentation Segmentation Based on Injection Focusing of Mixing Streams Formation of Droplets and Chaotic Advection 10.2 Design Examples Passive Micromixers Active Micromixers 10.3 Summary Chapter 11 Microfluidics for Life Sciences and Chemistry: Microdispensers 11.1 Design Considerations Droplet Dispensers In-Channel Dispensers 11.2 Design Examples Droplet Dispensers In-Channel Dispensers 11.3 Summary

6 Contents 416 Chapter 12 Microfluidics for Life Sciences and Chemistry: Microfilters and Microseparators Microfilters, Design Considerations Design Examples Microseparator Cell and Particle Sorter Chromatography Summary Chapter 13 Microfluidics for Life Sciences and Chemistry: Microreactors Design Considerations Specification Bases for Microreactors Miniaturization of Chemical Processes Functional Elements of a Microreactor Design Examples Gas-Phase Reactors Liquid-Phase Reactors Multiphase Reactors Microreactors for Cell Treatment Hybridization Arrays Summary Appendix A List of Symbols 479 Appendix B Resources for Microfluidics Research 483 Appendix C Abbreviations of Different Plastics 485 Appendix D Linear Elastic Deflection Models 487 About the Authors 489 Index 491