and LUMINOUS CHEMICAL VAPOR DEPOSITION INTERFACE ENGINEERING HirotsuguYasuda University of Missouri-Columbia Columbia, Missouri, U.S.A.
|
|
- Scarlett Thornton
- 8 years ago
- Views:
Transcription
1 LUMINOUS CHEMICAL VAPOR DEPOSITION and INTERFACE ENGINEERING HirotsuguYasuda University of Missouri-Columbia Columbia, Missouri, U.S.A. MARCEL MARCEL DEKKER. NEW YORK DEKKER
2 Contents Preface iii Part I. Fundamentals of LCVD Chapter 1. Introduction 1 References 6 Chapter 2. Domain of Luminous Chemical Vapor Deposition 7 1. Terminology 7 2. Parylene Polymerization and Plasma Polymerization 8 3. Plasma-Induced Polymerization Plasma Surface Modiflcation of Polymers 11 References 12 Chapter 3. Luminous Gas Phase Luminous Columns in DC Discharge of Argon Electron Temperature and Electron Density Plasma and Luminous Gas Glow Discharge of Argon and of Acetylene Negative Glow in DC Discharge of Argon Cathode Glow in Glow Discharge of Trimethylsilane Dissociation of Molecule vs. Ionization Onion Layer Structure of Luminous Gas Phase Mode of Discharge and Onion Layer Structure 31 References 32 Chapter 4. Creation of Chemically Reactive Species in Luminous Chemical Vapor Deposition Polymerizable Species vs. Photon-Emitting Species LCVD on Electrode and in Gas Phase 36
3 vi Contents 3. Change of Gas Phase Composition with Discharge Time Change of Dissociation Glow and lonization Glow with Reaction Time Mixture of Polymerizable and Nonpolymerizable Gases Influence of Frequency of Power Source Polymerizable Species Created in DC Cathode Glow Polymerizable Species Created in Jet Stream of Luminous Gas Role of Free Radicals in Luminous Chemical Vapor Deposition 54 References 55 Chapter 5. Growth and Deposition Mechanisms Growth Mechanisms of Polymer Formation in Luminous Gas Polymerization in Vacuum Initiator and Polymerizable Species Growth Mechanisms of LCVD Deposition Mechanism in LCVD 71 References 81 Chapter 6. Dangling Bonds Free Radicals and Dangling Bonds Free Radicals in Plasma Polymer and Free Radicals in Substrate Dangling Bonds in Plasma Polymer Decay of the TMS Signal Ex Situ Estimation of Dangling Bonds and Polymer Free Radicals 111 References 112 Chapter 7. Chemical Structures of Organic Compounds for Luminous Chemical Vapor Deposition Hydrocarbons and Their Derivatives Perfluorocarbons Incorporation of Nonpolymerizable Gases in Plasma Polymers Derivatives of Silane and Siloxane 145 References 149 Chapter 8. Deposition Kinetics Mass Balance for Deposition in a Flow System Deposition in Luminous Gas Phase (Deposition G) Deposition on Electrode Surface (Deposition E) Partition Between Deposition E and Deposition G Properties of Plasma Polymers and Deposition Kinetics Deposition Kinetics in Low-Pressure Cascade Are Torch Powder Formation in Gas Phase 166 References 177 Chapter 9. Ablation by Luminous Gas (Low Pressure Plasma) Physical Sputtering and Chemical Etching Ablation of Polymers Simultaneous Sputter Coating and LCVD 187
4 Contents vii 4. Ablation-Influenced LCVD 192 References 195 Chapter 10. Competitive Ablation and Polymerization Chemical Etching and Material Formation Classification of Gases for Glow Discharge Plasma Sensitivity of Elements CAP Principle Effect of Consecutive Plasma Polymerizations Multistep Glow Discharge Treatment of Polymer Surface 216 References 219 Chapter 11. Internal Stress in Material Formed by Luminous Chemical Vapor Deposition Cause of Internal Stress in Plasma Polymer Curling of Bilayer Internal Stress in Glow Discharge Polymers Internal Stress in Plasma Polymers Prepared by LPCAT Internal Stress as a Function of Normalized Energy Input Parameter Correlation Between Internal Stress and Refractive Index 233 References 237 Part II. Operation of LCVD and LCVT Chapter 12. Modes of Operation and Scale-up Principle Modes of Overall Processing Pressure of a Steady-State Flow System (Without Pressure Control) System Pressure Under a Glow Discharge (Without Pressure Control) Factors That Determine Pressure Under a Glow Discharge in Flow Monomer Flow Rate Meaning of Flow Rate in an LCVD System Adsorption of Monomer on Substrate and Reactor Wall Surfaces Continuous LCVD Scale-up Principle 259 References 260 Chapter 13. Direct Current and Alternating Current Discharge Cathodic Polymerization vs. Plasma Polymerization in Negative Glow Role of Anode in DC Cathodic Polymerization TMS Deposition on Multiple Cathodes Without Anode Assembly DC LCVD in a Closed Reactor System 272 References 277
5 VIII Contents Chapter 14. Magnetron Discharge for Luminous Chemical Vapor Deposition Applicability of Magnetrons in LCVD Profile of Magnetic Field Effect of Magnetic Field on the Breakdown Voltage Effect of Magnetic Field on Voltage-Current Diagram Effect of Magnetic Field on the Sputtering of Electrode Materials Effect of Magnetic Field on the Deposition Rate of Plasma Polymer Significance of Magnetron Discharge in LCVD 305 References 306 Chapter 15. Anode Magnetron Discharge Cathode and Anode Magnetrons Electron Temperature and Electron Density Sputter Cleaning of Cathode Surface Anode Magnetron for Cathodic Polymerization 326 References 333 Chapter 16. Low-Pressure Cascade Are Torch Cascade Are Cascade Are Generator and Low-Pressure Cascade Are Torch Reactor Luminous Gas in Cascade Are Torch Deposition in Cascade Are Torch Characteristic Features of LPCAT Processing 357 References 361 Chapter 17. Anode Magnetron Torch Anode Magnetron Torch Structure of Anode Magnetron Torch Distribution of Anode Magnetic Field Strength A Comparison of AT and AMT Glow Discharge Effects of Physical Parameters in AMT Glow Discharge Infiuence of Various Parameters on the CDST in AMT Glow Discharge Infiuence of Operating Parameters on Sputter Cleaning 377 References 387 Chapter 18. Primary, Secondary and Pulsed Discharges Primary Plasma and Secondary Plasma "Secondary Plasma" Reactor Comparison of In-Glow and Off-Glow Treatments In-Glow and Off-Glow Treatment Without Ion and Electron Bombardment Surface Morphology of Treated PTFE Pulsed Glow Discharge 403 References 405
6 Contents ix Chapter 19. Reactor Size Tubulär Reactors with Different Diameters Deposition Characteristics Polymer Composition Change of Domain by Size of Reactor 417 References 422 Chapter 20. Flow Pattern Flow and Luminous Gas Volume Deposition of Fast-Polymerizing Monomer in Tubulär Reactor Deposition of Slowly-Polymerizing Monomer in Tubulär Reactor Effect of Flow Pattern Combined Effect of Flow Pattern and Energy Input Deposition on Electrode in a Bell Jar Type of Reactor Pinching of Luminous Gas Phase 443 References 447 Chapter 21. Composition-Graded Transition Phase Metal-Polymer Interface Transitional Buffering Film Deposition of Metal-Containing Polymer Films Activation of Nonconducting Surfaces for Electroless Plating Direct Electroplating onto Composition-Graded Composite Films Composition-Graded Transitional Buffering Film/Electrocopper Adhesion Durability Structure and Stability of Composition-Graded Transitional Buffering Phase 462 References 465 Chapter 22. Tumbler Reactor Needs for Tumbler Reactor Powder Surface Treatment or Coating Reactor with Basketlike Tumbler Electrodes for Basketlike Tumbler Reactor 470 Part III. Fundamentals of Surface and Interface Chapter 23. Surface Configuration Molecular Configuration vs. Surface Configuration Surface Characteristics of Gelatin Gel and of Agar-Agar Gel Oxygen Atoms Near the Top Surface of Ethylene-Vinyl Alcohol Copolymer O Atoms Detectable by XPS in Teflon PFA Film Localized Surface Configuration Change Under a Sessile Droplet of Water 482 References 486
7 X Chapter 24. Surface State Surface, Interface and Surface State Equilibration of Surface State Electrons on Contact Depth of Surface State and Influence of Bulk Phase Influence of the Surface State of Contacting Phase Durability and Breakdown of Surface State Significance of Surface Modification by LCVD 504 References 504 Chapter 25. Surface Dynamics Reference State for Surface Dynamics Incorporation of Tagging Atoms by Plasma Treatment Polymer Surfaces in Dry Condition Immersion of a Dry Polymer in Liquid Water Emersion or Drying of a Wet Surface Factors Involved in an Interface Molecular Interaction vs. Interfacial Interaction Interfacial Tension Between Polymer Surface and Liquid Water Surface Configuration Change When Polymer is Immersed in Water Surface Configuration Change in (Dry) Air Surface Dynamics of Hydrophilic Polymers Hydrophilic Polymers Immersed in Liquid Water Samples Exposed to High Humidity (Instead of Water Immersion) 521 References 523 Chapter 26. Contact Angle and Wettability Energy Balance at Liquid/Solid Interface Static Contact Angle Time Dependence of Sessile Droplet Contact Angle Advancing and Receding Sessile Droplet Contact Angles Dynamic Contact Angle Change of Meniscus Shape During Immersion and Emersion Processes Wilhelmy Dynamic Contact Angles and Wettability Contact Angle Hysteresis Correlation Between Wilhelmy (Dynamic) and Sessile Droplet (Static) Contact Angles Liquid Film on Surface on Wilhelmy Plate Wilhelmy Force Loops and Fluid Holding Time Effect of Wilhelmy Balance Parameters on Fluid Holding Time Meaning of Contact Angle 553 References 557 Chapter 27. Sessile Bubble Formation and Detachment Sessile Droplet Contact Angle vs. Sessile Bubble Contact Angle Force Balance in a Developing Sessile Bubble Bubble Formation from an Inclined Surface 567
8 Contents XI 4. Bubble Detachment from the Hydrophilic Surface Detachment of Drifted Bubbles from the Amphoteric Surface Criteria for Wettability 570 References 572 Part IV. Interface Engineering Chapter 28. System Approach Interface Engineering System Approach Interface Engineering for Corrosion Protection Corrosion Tests and Quantitative Evaluation of Results Pitting Corrosion Beneath Undamaged Coating Steps Involved in SAIE Nonelectrochemical Principle of Corrosion Protection Role of Adhesion in Electrochemical Impedance Spectroscopy Effects of Interfacial Damage on Corrosion Protection 597 References 603 Chapter 29. Creation of an Imperturbable Surface Origin of Surface Dynamical Instability Correlation Between Surface Dynamic Stability and Barrier Characteristics Segmental Mobility of the Substrate Polymer Stability of Top Surface of LCVD Film 618 References 621 Chapter 30. Creating Adhesion to Substrate Surface Modification of Surface Energy of Substrate Parylene C Film LPCAT (Treatment) and LCVD (Deposition) Increasing Adhesion of Inorganic Fillers and Fibers to PMMA Matrix 649 References 658 Chapter 31. Corrosion Protection of Aluminum AUoys SAIE Applied on Aluminum Alloys Pretreatment of Aluminum Alloys Surfaces Polarization Resistance Corrosion Test Results Chromated and Nonchromated Spray Paints on Plasma Polymer Surfaces 676 References 689 Chapter 32. Corrosion Protection of Ion Vapor-Deposited Aluminum Ion Vapor-Deposited Aluminum Cathodic LCVD With Anode Magnetron 694
9 XII Contents 3. Cathodic LCVD Without Anode Assembly Cathodic LCVD in Closed Reactor 707 References 718 Chapter 33. Corrosion Protection of Cold-Rolled Steel and Pure Iron Plasma Cleaning and In Situ Deposition of TMS Polymer on Cold-Rolled Steel Interfacial Chemistry Characterized by XPS and Sputtered Neutral Mass Spectroscopy Corrosion Test Results (Cold-Rolled Steel) Corrosion Protection of Pure Iron 732 References 741 Chapter 34. Membrane Preparation and Modifkation General Principles in Membrane Application of Luminous Chemical Vapor Deposition and Luminous Gas Treatment Luminous Gas Treatment LCVD on Nonporous Membrane LCVD on Nonporous/Porous Composite Membrane LCVD on Porous Membrane Macroporous Membrane for Gas/Liquid Reactions Membrane for Gas Bubbling Oxygenation of Blood Oxygenation of Water 771 References 776 Chapter 35. Application of Luminous Chemical Vapor Deposition in Biomaterials Signiflcance of Imperturbable Surface in Biocompatibility Principle of LCVD Coating for Biomaterials Applications of LCVD Coating on Silicone Contact Lens LCVD on Inner Surface of Polymer Tube LCVD for Blood Compatibility Biocompatibility of Imperturbable Surface 796 References 798 Chapter 36. Economical Advantages of Luminous Chemical Vapor Deposition Environmentally Benign (Green) Processing LCVD to Replace an Existing Hazardous Process LCVD as a New Manufacturing Process 800 Index 805
Coating Technology: Evaporation Vs Sputtering
Satisloh Italy S.r.l. Coating Technology: Evaporation Vs Sputtering Gianni Monaco, PhD R&D project manager, Satisloh Italy 04.04.2016 V1 The aim of this document is to provide basic technical information
More informationVacuum Evaporation Recap
Sputtering Vacuum Evaporation Recap Use high temperatures at high vacuum to evaporate (eject) atoms or molecules off a material surface. Use ballistic flow to transport them to a substrate and deposit.
More informationPlasma Cleaner: Physics of Plasma
Plasma Cleaner: Physics of Plasma Nature of Plasma A plasma is a partially ionized gas consisting of electrons, ions and neutral atoms or molecules The plasma electrons are at a much higher temperatures
More informationBNG 331 Cell-Tissue Material Interactions. Biomaterial Surfaces
BNG 331 Cell-Tissue Material Interactions Biomaterial Surfaces Course update Updated syllabus Homework 4 due today LBL 5 Friday Schedule for today: Chapter 8 Biomaterial surface characterization Surface
More informationHigh Rate Oxide Deposition onto Web by Reactive Sputtering from Rotatable Magnetrons
High Rate Oxide Deposition onto Web by Reactive Sputtering from Rotatable Magnetrons D.Monaghan, V. Bellido-Gonzalez, M. Audronis. B. Daniel Gencoa, Physics Rd, Liverpool, L24 9HP, UK. www.gencoa.com,
More informationPLASMA TECHNOLOGY OVERVIEW
PLASMA TECHNOLOGY OVERVIEW Plasmas are not a lab curiosity. Plasma processing has been an essential production tool for more than 30 years in the fabrication of microelectronic devices for example. Over
More informationTHIN FILM MATERIALS TECHNOLOGY
THIN FILM MATERIALS TECHNOLOGY Sputtering of Compound Materials by Kiyotaka Wasa Yokohama City University Yokohama, Japan Makoto Kitabatake Matsushita Electric Industrial Co., Ltd. Kyoto, Japan Hideaki
More informationIon Beam Sputtering: Practical Applications to Electron Microscopy
Ion Beam Sputtering: Practical Applications to Electron Microscopy Applications Laboratory Report Introduction Electron microscope specimens, both scanning (SEM) and transmission (TEM), often require a
More information2. Deposition process
Properties of optical thin films produced by reactive low voltage ion plating (RLVIP) Antje Hallbauer Thin Film Technology Institute of Ion Physics & Applied Physics University of Innsbruck Investigations
More informationTechnical Synopsis of Plasma Surface Treatments
Technical Synopsis of Plasma Surface Treatments Wesley Taylor Advisor: Dr. Bruce Welt University of Florida, Gainesville, FL December, 2009 Abstract Surface treatment technology delves into some of the
More informationReactive Sputtering Using a Dual-Anode Magnetron System
Reactive Sputtering Using a Dual-Anode Magnetron System A. Belkind and Z. Zhao, Stevens Institute of Technology, Hoboken, NJ; and D. Carter, G. McDonough, G. Roche, and R. Scholl, Advanced Energy Industries,
More informationLecture 11. Etching Techniques Reading: Chapter 11. ECE 6450 - Dr. Alan Doolittle
Lecture 11 Etching Techniques Reading: Chapter 11 Etching Techniques Characterized by: 1.) Etch rate (A/minute) 2.) Selectivity: S=etch rate material 1 / etch rate material 2 is said to have a selectivity
More information1. PECVD in ORGANOSILICON FED PLASMAS
F. FRACASSI Department of Chemistry, University of Bari (Italy) Plasma Solution srl SURFACE MODIFICATION OF POLYMERS AND METALS WITH LOW TEMPERATURE PLASMA OUTLINE METAL TREATMENTS 1 low pressure PECVD
More informationCombustion chemical vapor deposition
V I P Combustion chemical vapor deposition A technology to improve adhesion on surfaces to be coated Volkmar J. Eigenbrod, Christina Hensch, Alexander Kemper Introduction Combustion chemical vapor deposition
More informationA Remote Plasma Sputter Process for High Rate Web Coating of Low Temperature Plastic Film with High Quality Thin Film Metals and Insulators
A Remote Plasma Sputter Process for High Rate Web Coating of Low Temperature Plastic Film with High Quality Thin Film Metals and Insulators Dr Peter Hockley and Professor Mike Thwaites, Plasma Quest Limited
More informationReaction Engineering of Polymer Electrolyte Membrane Fuel Cells
Reaction Engineering of Polymer Electrolyte Membrane Fuel Cells A new approach to elucidate the operation and control of Polymer Electrolyte Membrane (PEM) fuel cells is being developed. A global reactor
More informationHow compact discs are made
How compact discs are made Explained by a layman for the laymen By Kevin McCormick For Science project at the Mountain View Los Altos High School Abstract As the major media for music distribution for
More informationDry Etching and Reactive Ion Etching (RIE)
Dry Etching and Reactive Ion Etching (RIE) MEMS 5611 Feb 19 th 2013 Shengkui Gao Contents refer slides from UC Berkeley, Georgia Tech., KU, etc. (see reference) 1 Contents Etching and its terminologies
More informationSupporting Information
Supporting Information Wiley-VCH 2007 69451 Weinheim, Germany Methanol Behavior in Direct Methanol Fuel Cells Younkee Paik, Seong-Soo Kim, and Oc Hee Han * Experimental Section Preparation of MEA: Standard
More informationElectrochemistry Revised 04/29/15
INTRODUCTION TO ELECTROCHEMISTRY: CURRENT, VOLTAGE, BATTERIES, & THE NERNST EQUATION Experiment partially adapted from J. Chem. Educ., 2008, 85 (8), p 1116 Introduction Electrochemical cell In this experiment,
More informationChemical Sputtering. von Kohlenstoff durch Wasserstoff. W. Jacob
Chemical Sputtering von Kohlenstoff durch Wasserstoff W. Jacob Centre for Interdisciplinary Plasma Science Max-Planck-Institut für Plasmaphysik, 85748 Garching Content: Definitions: Chemical erosion, physical
More informationSpecifications for Programs: 737, 747, 757, 767, 777, 787
= Performed by GKN BAC 5000 AN General Sealing 6-262, 6-265, 6-267, 6-270 PSD for 787 Only: 6-242, 6-269, 6-271 PSD for 777 Only: 6-261,6-264, 6-266, 6-269, 6-271 BAC 5004 L Installation of Permanent Fasteners
More informationPlasma Electronic is Partner of. Tailor-Made Surfaces by Plasma Technology
Precision Fair 2013 Stand 171 Plasma Electronic is Partner of Tailor-Made Surfaces by Plasma Technology Dr. J. Geng, Plasma Electronic GmbH Modern Surface Technology in 1900 Overview A short introduction
More informationDeposition of Thin Metal Films " (on Polymer Substrates)!
Deposition of Thin Metal Films " (on Polymer Substrates)! Shefford P. Baker! Cornell University! Department of Materials Science and Engineering! Ithaca, New York, 14853! MS&E 5420 Flexible Electronics,
More informationAdsorption at Surfaces
Adsorption at Surfaces Adsorption is the accumulation of particles (adsorbate) at a surface (adsorbent or substrate). The reverse process is called desorption. fractional surface coverage: θ = Number of
More informationSurface activation of plastics by plasma for adhesion promotion
Surface activation of plastics by plasma for adhesion promotion Uwe Stöhr, Ph. D. 1 Introduction In many fields a good adhesion between two materials is necessary. The adhesion should exist at the whole
More informationAtomic Structure. Atoms consist of: Nucleus: Electrons Atom is electrically balanced equal electrons and protons. Protons Neutrons
Basics of Corrosion Performance Metals Sacrificial anode manufacturer Specialize in aluminum alloy anodes All products made in the USA (Berks county, PA) ISO9001/2001 Certified Quality System Also traditional
More informationProperties and Classifications of Matter
PS-3.1 Distinguish chemical properties of matter (including reactivity) from physical properties of matter (including boiling point, freezing/melting point, density [with density calculations], solubility,
More informationModule 7 Wet and Dry Etching. Class Notes
Module 7 Wet and Dry Etching Class Notes 1. Introduction Etching techniques are commonly used in the fabrication processes of semiconductor devices to remove selected layers for the purposes of pattern
More informationBiomaterials in tissue engineering
Biomaterials in tissue engineering S. Swaminathan Director Centre for Nanotechnology & Advanced Biomaterials School of Chemical & Biotechnology SASTRA University Thanjavur 613 401 Tamil Nadu Page 1 of
More informationDeposition of Silicon Oxide, Silicon Nitride and Silicon Carbide Thin Films by New Plasma Enhanced Chemical Vapor Deposition Source Technology
General Plasma, Inc. 546 East 25th Street Tucson, Arizona 85713 tel. 520-882-5100 fax. 520-882-5165 and Silicon Carbide Thin Films by New Plasma Enhanced Chemical Vapor Deposition Source Technology M.
More informationSURFACE MODIFICATION OF METAL IMPLANTS WITH PLASMA SPRAYED LAYERS
SURFACE MODIFICATION OF METAL IMPLANTS WITH PLASMA SPRAYED LAYERS Prof. János Takács Budapest University of Technology and Economics (BME) Ozsváth Péter MSc Budapest University of Technology and Economics
More informationA thermal cure is then applied to obtain final properties of the paint film.
CHARACTERIZATION OF OXIDE LAYERS FORMED ON ALUMINUM ALLOYS DURING NEW PPG ELECTRODEPOSITED STRUCTURAL PAINT ECODESIGN - GRANT AGREEMENT N 267285 Dr Marion Collinet Ecole Nationale Supérieure de Chimie
More informationChemical Engineering - CHEN
Auburn University 1 Chemical Engineering - CHEN Courses CHEN 2100 PRINCIPLES OF CHEMICAL ENGINEERING (4) LEC. 3. LAB. 3. Pr. (CHEM 1110 or CHEM 1117 or CHEM 1030) and (MATH 1610 or MATH 1613 or MATH 1617
More informationKeystone Exams: Chemistry Assessment Anchors and Eligible Content. Pennsylvania Department of Education www.education.state.pa.
Assessment Anchors and Pennsylvania Department of Education www.education.state.pa.us 2010 PENNSYLVANIA DEPARTMENT OF EDUCATION General Introduction to the Keystone Exam Assessment Anchors Introduction
More informationDamage-free, All-dry Via Etch Resist and Residue Removal Processes
Damage-free, All-dry Via Etch Resist and Residue Removal Processes Nirmal Chaudhary Siemens Components East Fishkill, 1580 Route 52, Bldg. 630-1, Hopewell Junction, NY 12533 Tel: (914)892-9053, Fax: (914)892-9068
More informationLight metal corrosion protection with water-borne silane systems
Platzhalter Titelbild Light metal corrosion protection with water-borne silane systems Dr. Philipp Albert 14.06.2011 Agenda 1. lanes, hydrolysis and condensation, sol-gel process 2. Water-borne sol-gel
More informationDEPARTMENT OF DEFENSE ALLIED NATIONS TECHNICAL CORROSION CONFERENCE. November 15-19, 2015 Pittsburgh, PA, USA. Technical Program
DEPARTMENT OF DEFENSE ALLIED NATIONS TECHNICAL CORROSION CONFERENCE November 15-19, 2015 Pittsburgh, PA, USA Technical Program Corrosion Policy Track: Topic: Corrosion Management T.S. NAVAIR Corrosion
More informationWaterproofing System for Wastewater Tanks in Petrochemical Industries and Refineries
Waterproofing System for Wastewater Tanks in Petrochemical Industries and Refineries Introduction Wastewater of petrochemical industries and refineries contains high amounts of emulsified aliphatic or
More informationPolymer growth rate in a wire chamber with oxygen, water, or alcohol gas additives
SLAC-PUB-13 June 6, 8 Polymer growth rate in a wire chamber with oxygen, water, or alcohol gas additives Adam M. Boyarski Stanford Linear Accelerator Center, M.S. 95, 575 Sand Hill Rd, Menlo Park, CA 95,
More informationSecondary Ion Mass Spectrometry
Secondary Ion Mass Spectrometry A PRACTICAL HANDBOOK FOR DEPTH PROFILING AND BULK IMPURITY ANALYSIS R. G. Wilson Hughes Research Laboratories Malibu, California F. A. Stevie AT&T Bell Laboratories Allentown,
More informationNauki ścisłe priorytetem społeczeństwa opartego na wiedzy Artykuły na platformę CMS
S t r o n a 1 Author: Marta Miedźwiedziew METAL CORROSION AND PROTECTION AGAINST CORROSION Introduction The article is intended for high school students having courses in chemistry at both the basic and
More informationh e l p s y o u C O N T R O L
contamination analysis for compound semiconductors ANALYTICAL SERVICES B u r i e d d e f e c t s, E v a n s A n a l y t i c a l g r o u p h e l p s y o u C O N T R O L C O N T A M I N A T I O N Contamination
More informationLe nanotecnologie: dal Laboratorio al Mercato. Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia
Le nanotecnologie: dal Laboratorio al Mercato Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia Materials & Processes for micro nanotechnologies Laboratory http://www.polito.it/micronanotech
More informationBarrier Coatings: Conversion and Production Status
Transparent SiO 2 Barrier Coatings: Conversion and Production Status E. Finson and J. Felts, Airco Coating Technology, Concord, CA Keywords: Permeation barrier coatings; Reactive evaporation; SiO 2 ABSTRACT
More information1. Photon Beam Damage and Charging at Solid Surfaces John H. Thomas III
1. Photon Beam Damage and Charging at Solid Surfaces John H. Thomas III 1. Introduction............................. 2. Electrostatic Charging of Samples in Photoemission Experiments............................
More informationLecture 9. Surface Treatment, Coating, Cleaning
1 Lecture 9. Surface Treatment, Coating, Cleaning These processes are sometimes referred to as post-processing. They play a very important role in the appearance, function and life of the product. Broadly,
More informationPaper No. 4071 APPLICATION OF EQCM TO THE STUDY OF CO2 CORROSION
Paper No. 471 APPLICATION OF EQCM TO THE STUDY OF CO2 CORROSION Yang Yang, Bruce Brown and Srdjan Nešić Institute for Corrosion and Multiphase Technology, Department of Chemical and Biomolecular Engineering
More informationChapter 5 - Aircraft Welding
Chapter 5 - Aircraft Welding Chapter 5 Section A Study Aid Questions Fill in the Blanks 1. There are 3 types of welding:, and, welding. 2. The oxy acetylene flame, with a temperature of Fahrenheit is produced
More informationKeywords: polymer electrolyte membrane fuel cells; stack failure; gasket; indicators
Description of Gasket Failure in a 7 Cell PEMFC Stack Attila Husar, Maria Serra, Cristian Kunusch* Institut de Robòtica i Informàtica Industrial, Parc Tecnològic de Barcelona. Edifici U C. Llorens i Artigas,
More informationMulti-pollutant control solutions for coal based power plants
Multi-pollutant control solutions for coal based power plants By Luca Mancuso and Hans Janssen Content SOx control Wet Scrubbers Open towers Dual Flow Tray Technology Semi-Dry SDA CFB Scrubbers Dust control
More informationCambridge International Examinations Cambridge International General Certificate of Secondary Education
Cambridge International Examinations Cambridge International General Certificate of Secondary Education *0123456789* CHEMISTRY 0620/03 Paper 3 Theory (Core) For Examination from 2016 SPECIMEN PAPER 1 hour
More informationComparison of the Corrosion Protection Effectiveness of Vapor Corrosion Inhibitor and Nitrogen Blanketing System
Comparison of the Corrosion Protection Effectiveness of Vapor Corrosion Inhibitor and Nitrogen Blanketing System Behzad Bavarian 1, Jia Zhang 1, Lisa Reiner 1 and Boris Miksic, FNACE 2 Dept. of Manufacturing
More informationDecorative vacuum coating technologies 30.05.2014 Certottica Longarone. Thin Film Plasma Coating Technologies
Dr. Stefan Schlichtherle Dr. Georg Strauss PhysTech Coating Technology GmbH Decorative vacuum coating technologies 30.05.2014 Certottica Longarone Thin Film Plasma Coating Technologies Content The fascination
More informationPlants and systems for surface treatment with low-pressure plasma
Plants and systems for surface treatment with low-pressure plasma Plasma technology Contents Plasma technology 3 What is low-pressure plasma? 4-5 Activation and/or modification 6-7 Cleaning 8-9 Etching
More informationWhite Paper. Moisture in Hermetic Packages By Craig Hillman, PhD
White Paper Moisture in Hermetic Packages By Craig Hillman, PhD Moisture in Hermetic Packages Hermetic packaging of micro-electronic and opto-electronic devices is commonly utilized to protect the devices
More informationGood Boards = Results
Section 2: Printed Circuit Board Fabrication & Solderability Good Boards = Results Board fabrication is one aspect of the electronics production industry that SMT assembly engineers often know little about.
More informationPart B 2. Allow a total of 15 credits for this part. The student must answer all questions in this part.
Part B 2 Allow a total of 15 credits for this part. The student must answer all questions in this part. 51 [1] Allow 1 credit for 3 Mg(s) N 2 (g) Mg 3 N 2 (s). Allow credit even if the coefficient 1 is
More informationNeuere Entwicklungen zur Herstellung optischer Schichten durch reaktive. Wolfgang Hentsch, Dr. Reinhard Fendler. FHR Anlagenbau GmbH
Neuere Entwicklungen zur Herstellung optischer Schichten durch reaktive Sputtertechnologien Wolfgang Hentsch, Dr. Reinhard Fendler FHR Anlagenbau GmbH Germany Contents: 1. FHR Anlagenbau GmbH in Brief
More informationProjects and R&D activities
Projects and R&D activities J.M. Jimenez On behalf of the Vacuum, Surface and Coatings Group (VSC) Vacuum, Surface and Coatings group* Mandate Design, construction, operation, maintenance and upgrade of
More informationUNIT 4 METAL COATING PROCESSES
UNIT 4 METAL COATING PROCESSES Structure 4.1 Introduction Objectives 4.2 Metal and Non-metal Coatings 4.2.1 Metallic Coatings 4.2.2 Non-Metallic Coatings 4.3 Electroforming 4.4 Galvanizing 4.5 Anodizing
More informationLecture 12. Physical Vapor Deposition: Evaporation and Sputtering Reading: Chapter 12. ECE 6450 - Dr. Alan Doolittle
Lecture 12 Physical Vapor Deposition: Evaporation and Sputtering Reading: Chapter 12 Evaporation and Sputtering (Metalization) Evaporation For all devices, there is a need to go from semiconductor to metal.
More informationCHAPTER 2: LIQUID VISCOSITY MEASUREMENT
CHAPTER 2: LIQUID VISCOSITY MEASUREMENT Objective Calculate viscosity (dynamic or absolute, and kinematic) and determine how this property varies with changes in temperature for a constant-composition
More informationHow To Make A Plasma Control System
XXII. Erfahrungsaustausch Mühlleiten 2015 Plasmaanalyse und Prozessoptimierung mittels spektroskopischem Plasmamonitoring in industriellen Anwendungen Swen Marke,, Lichtenau Thomas Schütte, Plasus GmbH,
More informationA SHORT INTRODUCTION TO CORROSION AND ITS CONTROL
A SHORT INTRODUCTION TO CORROSION AND ITS CONTROL CORROSION OF METALS AND ITS PREVENTION WHAT IS CORROSION Corrosion is the deterioration of materials by chemical interaction with their environment. The
More informationPreface Light Microscopy X-ray Diffraction Methods
Preface xi 1 Light Microscopy 1 1.1 Optical Principles 1 1.1.1 Image Formation 1 1.1.2 Resolution 3 1.1.3 Depth of Field 5 1.1.4 Aberrations 6 1.2 Instrumentation 8 1.2.1 Illumination System 9 1.2.2 Objective
More informationOPTIMIZING OF THERMAL EVAPORATION PROCESS COMPARED TO MAGNETRON SPUTTERING FOR FABRICATION OF TITANIA QUANTUM DOTS
OPTIMIZING OF THERMAL EVAPORATION PROCESS COMPARED TO MAGNETRON SPUTTERING FOR FABRICATION OF TITANIA QUANTUM DOTS Vojtěch SVATOŠ 1, Jana DRBOHLAVOVÁ 1, Marian MÁRIK 1, Jan PEKÁREK 1, Jana CHOMOCKÁ 1,
More informationModular Glovebox Systems Gas Purifier Units Antechambers Accessories
Modular Glovebox Systems Gas Purifier Units Antechambers Accessories INERTGAS TECHNOLOGY Modular glovebox with screwed in flanged side panels Easy to extend or modify while keeping a flat work place Define
More informationMicrostockage d énergie Les dernières avancées. S. Martin (CEA-LITEN / LCMS Grenoble)
Microstockage d énergie Les dernières avancées S. Martin (CEA-LITEN / LCMS Grenoble) 1 Outline What is a microbattery? Microbatteries developped at CEA Description Performances Integration and Demonstrations
More informationbulk 5. Surface Analysis Why surface Analysis? Introduction Methods: XPS, AES, RBS
5. Surface Analysis Introduction Methods: XPS, AES, RBS Autumn 2011 Experimental Methods in Physics Marco Cantoni Why surface Analysis? Bulk: structural function Electrical/thermal conduction Volume increases
More informationCorrosion Inhibitors in Antifreeze Coolants
44th International Petroleum Conference, Bratislava, Slovak Republic, September 21-22, 2009 Corrosion Inhibitors in Antifreeze Coolants Bratislava 2009. 09. 22. Bálint Szilágyi Product development engineer
More informationDry Etch Process Application Note
G-106-0405 pplication ulletin Dry Etch Process pplication Note nthony Ricci Etch Process Overview The etching process removes selected areas from wafer substrates. The two types of etching processes used
More informationElectrochemical Impedance Spectroscopy (EIS): A Powerful and Cost- Effective Tool for Fuel Cell Diagnostics
Electrochemical Impedance Spectroscopy (EIS): A Powerful and Cost- Effective Tool for Fuel Cell Diagnostics Electrochemical Impedance Spectroscopy (EIS) is a powerful diagnostic tool that you can use to
More informationPerformance of Carbon-PTFE Electrodes and PTFE Separators in Electrochemical Double Layer Capacitors (EDLCs)
Performance of Carbon-PTFE Electrodes and PTFE Separators in Electrochemical Double Layer Capacitors (EDLCs) David Zuckerbrod, Robert Sassa, Marianne Szabo, Meagan Mizenko Abstract: W. L. Gore & Associates
More informationAn Introduction to Electrochemical Impedance Measurement
An Introduction to Electrochemical Impedance Measurement Technical Report No. 6 An Introduction to Electrochemical Impedance Measurement N D Cogger and N J Evans Technical Report No. 6 Part No.: BTR006
More informationIII. Wet and Dry Etching
III. Wet and Dry Etching Method Environment and Equipment Advantage Disadvantage Directionality Wet Chemical Solutions Atmosphere, Bath 1) Low cost, easy to implement 2) High etching rate 3) Good selectivity
More informationPROBLEM SOLVING FORUM
4 Dealing with Water Tank Blisters Amy Forsgren Swedish Corrosion Institute Stockholm, Sweden: Blistering of the paint system used in a steel water tank indicates that the steel surface was not cleaned
More informationComputational Fluid Dynamics (CFD) and Multiphase Flow Modelling. Associate Professor Britt M. Halvorsen (Dr. Ing) Amaranath S.
Computational Fluid Dynamics (CFD) and Multiphase Flow Modelling Associate Professor Britt M. Halvorsen (Dr. Ing) Amaranath S. Kumara (PhD Student), PO. Box 203, N-3901, N Porsgrunn, Norway What is CFD?
More informationState of the art in reactive magnetron sputtering
State of the art in reactive magnetron sputtering T. Nyberg, O. Kappertz, T. Kubart and S. Berg Solid State Electronics, The Ångström Laboratory, Uppsala University, Box 534, S-751 21 Uppsala, Sweden D.
More informationCrevice Corrosion on Stainless Steel Propeller Shafts
Crevice Corrosion on Stainless Steel Propeller Shafts A Quick Summary: What is it? How to Prevent it. How to Repair it. Stainless steel propeller shafts and running gear are subject to pitting & crevice
More informationDevelopment of New Inkjet Head Applying MEMS Technology and Thin Film Actuator
Development of New Inkjet Head Applying MEMS Technology and Thin Film Actuator Kenji MAWATARI, Koich SAMESHIMA, Mitsuyoshi MIYAI, Shinya MATSUDA Abstract We developed a new inkjet head by applying MEMS
More informationthe runnerless types of molds are explained post molding operations are described the basic methods of applied decoration methods are examined
Training Objectives After watching the video and reviewing this printed material, the viewer will gain knowledge and understanding of the various plastic finishing processes used in industry and their
More informationStudy of Surface Reaction and Gas Phase Chemistries in High Density C 4 F 8 /O 2 /Ar and C 4 F 8 /O 2 /Ar/CH 2 F 2 Plasma for Contact Hole Etching
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS Vol. 16, No. 2, pp. 90-94, April 25, 2015 Regular Paper pissn: 1229-7607 eissn: 2092-7592 DOI: http://dx.doi.org/10.4313/teem.2015.16.2.90 OAK Central:
More informationSeparation of Amino Acids by Paper Chromatography
Separation of Amino Acids by Paper Chromatography Chromatography is a common technique for separating chemical substances. The prefix chroma, which suggests color, comes from the fact that some of the
More informationPlastics and Polymer Business. Properties enhancement for Plastics
News Letter Vol. 18, issue October-December, 2012 Hyperdispersants and Coupling Agents for Thermoplastics and Thermosets Solplus, Ircolplus and Solsperse hyperdispersants and coupling agents have been
More informationSYNERGISTIC APPLICATION OF ADVANCED PRIMARY AND SECONDARY WASTEWATER TREATMENT SYSTEMS
SYNERGISTIC APPLICATION OF ADVANCED PRIMARY AND SECONDARY WASTEWATER TREATMENT SYSTEMS Published in Water and Waste Digest membrane issue, November 2008 Miroslav Colic; Chief Scientist, Clean Water Technology
More informationA New Membrane System for Efficient Removal of Water from Gear Oil Road to Commercialization
A New Membrane System for Efficient Removal of Water from Gear Oil Road to Commercialization Sudip Majumdar, Stuart Nemser Compact Membrane Systems, Wilmington, Delaware, USA Kal Farooq, Keith Benninghoff
More informationCORROSION PROTECTION METHODS OF STRUCTURAL STEEL AGAINST ATMOSPHERIC CORROSION
CORROSION PROTECTION METHODS OF STRUCTURAL STEEL AGAINST ATMOSPHERIC CORROSION E. Daflou a, E. Rakanta b, *G. Batis c a Chemical Engineer, Chemical Engineering School, Section of Materials Science and
More informationFluid Mechanics: Static s Kinematics Dynamics Fluid
Fluid Mechanics: Fluid mechanics may be defined as that branch of engineering science that deals with the behavior of fluid under the condition of rest and motion Fluid mechanics may be divided into three
More informationCHAPTER 7 THE DEHYDRATION AND SWEETENING OF NATURAL GAS
CHAPTER 7 THE DEHYDRATION AND SWEETENING OF NATURAL GAS Natural gases either from natural production or storage reservoirs contain water, which condense and form solid gas hydrates to block pipeline flow
More informationKeystone Review Practice Test Module A Cells and Cell Processes. 1. Which characteristic is shared by all prokaryotes and eukaryotes?
Keystone Review Practice Test Module A Cells and Cell Processes 1. Which characteristic is shared by all prokaryotes and eukaryotes? a. Ability to store hereditary information b. Use of organelles to control
More informationGuide to Reverse Phase SpinColumns Chromatography for Sample Prep
Guide to Reverse Phase SpinColumns Chromatography for Sample Prep www.harvardapparatus.com Contents Introduction...2-3 Modes of Separation...4-6 Spin Column Efficiency...7-8 Fast Protein Analysis...9 Specifications...10
More informationIssues and Solutions for Dealing With a Highly Capacitive Transmission Cable
Issues and Solutions for Dealing With a Highly Capacitive Transmission Cable F.N. Morgan and K.C. Cameron, Advanced Energy Industries, Inc., Fort Collins, CO ABSTRACT For glass coaters, the transmission
More informationChair: David Kroon Vice-Chair: Chuck Lawrence
CONFERENCE CALL MINUTES TASK GROUP 284 CATHODIC PROTECTION, GALVANIC ANODE FOR INTERNAL SUBMERGED SURFACES OF STEEL WATER STORAGE TANKS: REVIEW OF NACE SP0196-2011 ASSIGNMENT: To review and update NACE
More informationCoating of TiO 2 nanoparticles on the plasma activated polypropylene fibers
Coating of TiO 2 nanoparticles on the plasma activated polypropylene fibers Renáta Szabová*, Ľudmila Černáková, Magdaléna Wolfová, Mirko Černák a Department of Plastics and Rubber, Institute of Polymer
More informationPlasma activation from roll to roll
The manufacture of composite materials for packaging Plasma activation from roll to roll Figure 1: The wettability of the surfaces can be optimised thanks to different nozzle models (from left to right:
More informationConductivity of silicon can be changed several orders of magnitude by introducing impurity atoms in silicon crystal lattice.
CMOS Processing Technology Silicon: a semiconductor with resistance between that of conductor and an insulator. Conductivity of silicon can be changed several orders of magnitude by introducing impurity
More informationMethods of plasma generation and plasma sources
Methods of plasma generation and plasma sources PlasTEP trainings course and Summer school 2011 Warsaw/Szczecin Indrek Jõgi, University of Tartu Partfinanced by the European Union (European Regional Development
More informationSTATE UNIVERSITY OF NEW YORK COLLEGE OF TECHNOLOGY CANTON, NEW YORK COURSE OUTLINE CHEM 150 - COLLEGE CHEMISTRY I
STATE UNIVERSITY OF NEW YORK COLLEGE OF TECHNOLOGY CANTON, NEW YORK COURSE OUTLINE CHEM 150 - COLLEGE CHEMISTRY I PREPARED BY: NICOLE HELDT SCHOOL OF SCIENCE, HEALTH, AND PROFESSIONAL STUDIES SCIENCE DEPARTMENT
More informationPulsed laser deposition of organic materials
Pulsed laser deposition of organic materials PhD theses Gabriella Kecskeméti Department of Optics and Quantum Electronics University of Szeged Supervisor: Dr. Béla Hopp senior research fellow Department
More information