AX-28 Data Sheet Inner-Layer Version

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Transcription:

AX-28 Data Sheet Inner-Layer Version OLEC Automatic Exposure Machine Note1. Intensity depends on factor such as lamp height, lamp type, reflector type etc. Note2. Resolution capability depends on resist type, exposure energy and other process conditions e.g. pre-clean, lamination or Coating and developing. Note3. Maximum capacity depends on panel quality, machine parameters selected, vacuum delay time, exposure time and reflector/lamp age. Application Exposure Light Source Capability Registration System Glass Tooling Temperature Control General Points Utilities Resist Type Type employed Vacuum Lamp unit Uniformity Intensity Integrator range Exposure time Spectra Lamp cooling Exposure window Resolution Panel Size Panel Thickness Capability Panels Artwork Target definition Repeatability Setup time System Accuracy Cleanliness Control Heat Loading Safety Machine Flow Footprint Compressed Air Chilled water Power Weight Exhaust Inners (Post or Pre etch). Lead Frame Dy film or Liquid etch resist. OLEC Point Source Optics. Double-sided exposure. Soft contact, typically 8-12 inches Hg, monitored and alarmed. Two 8 km lamp units. Selectable low (2kw), medium (4 kw) and high power (8kw). Lamp change time typically 5 minutes per lamp. Typical +/- 10%. Approximately 25 mw/cm 2 0 to 999 units, selectable. Normally calibrate ] unit = 1 mj/cm 2. 0 to 999 seconds, selectable 3 OLEC Spectramatch Halide Lamp options available, L1280, L1281 and L1282. Forced air-cooling. Minimum blower voltage. 24" x 28" (610mm x 711mm) maximum. Option 24" x 30" (610mm x 762mm) <=1 mil line and space. See note 2 below. Minimum 12" x 12" (305mm x 305mm) Maximum 24" x 28" (610mm x 711mm) Minimum 0.002" (50 microns) Maximum 0.078" (2 mm). Note depending on panel size may need to employ. Approximately 180 panel/hour. See note 3 below. MechanicaI pre-registration either centrally crowded or edge banked. Panel handling by selectable and adjustable series of vacuum generators/cups. Panel transport controlled using solid state linear motion. Accuracy +/-10 microns Two point solid stale laser/detector system. Post-main vacuum confirm mode. X Y and theta control via pulsed stepper motor assemblies. Bottom artwork is employed as fixed reference. Using special pair of over-lapping film alignment targets. Detail available on request +/- 0.0005" (+/-12.5 microns). Option for <+/-0.0005" available. Selectable tolerance ranges available. Usually dependant upon panel size range, artwork size etc Details to be finalised with OLEC engineering. A standard range of tooling sets is also available. 6mm thick "Optiwhite" B grade standard. Other grades available. Artwork setup time <5 minutes. Closed loop feedback system employing IR pyrometry. OLEC Closed loop cooling. Setpoint +/- 2 C. Note Setpoint is typically 16 C-25 C depending on customer. AX28 employs positive pressure ventilation system. Air entering exposure chamber achieves spot class 100 by HEPA filtration. Transport bridges constructed from stainless steel Omron plc control including equipment handshakes, error signaling and networking capability Optional operator control door mounted or panel mounted. No heat loading to exposure room as closed loop cooling is employed. Safety interlocks on all doors, light curtain in exposure section and E-stop fitted. Meets UL, CE and Ontario Hydro approval. Left to right or right to left. 97" x 66.7" x 88" (2464mmx1694mmx2235mm) Note some clearances are needed. See OLEC AX28 Pre-installalion Guide. 30 cfm @ 90psi.(6.33kg/cm 2 ) 20 gpm @ 50 F (75.7 Ipm @ 10 C) or 10 gpm @ 45F (37.9 lpm @ 7.2 C) 200/208,240,480 VAC 3 phase @60 HZ, 380/415 VAC 3 phase at 50 Hz. 4000 lbs. (1800kg) None

Panel Transport Compliant cup mounting structure is tolerant to warped panels. Pre-Register/ Conveyor System Unique Tri-Stage TM Registration System for reliable and accurate panel positioning. Light Source & Integrator Point-source optics give fineline precision. faster exposures, and higher yield.

HEPA Filter The HEPA system provides a clean environment and positive pressure. Control Panel Single button pre-sets for fast and easy job settings. Automatic diagnostics and status tracking. Exposure Frame Designed for fast tool changes. Precise self-aligning registration. Unique pin system eliminates hole tolerance problems. Closed Loop Cooling Closed-loop cooling maintains constant panel temperature without disturbing clean room environment. The new AX 28 automated exposure system brings automation within reach for printed circuit fabricators Manufacturers who thought automation didn't fit their needs can now re-examine their options...with the AX 38. This easy to use system provides higher yields, cost efficiency, and reliable operation. As a standalone or integrated system the AX 28 exposes innerlayer. outerlayer, and solder mask.

2/96 68"/173cm 71"/180cm 27.5"/70cm 44"/11.2cm 99"/251cm 2 7. 5"/70cm 50"/127cm 65"/165cm Control Panel OLEC Corporation is the world's largest manufacturer of UV exposure equipment, used over two million times a day. The new AX 28 adds to OLEC's full line of exposure equipment. Call or write today for more information. Authorized Distributor SPECIFICATIONS EXPOSURE AREA LIGHT OUTPUT High Medium Low AVAILABLE VOLTAGE AVAILABLE CYCLES AX 28 24 x 28 864 x 1067 8000 (X2) 4000 (X2) 2000 (X2) 208, 240, 380, 420, 480 50, 60 Chilled water and compressed air required. UNITS Inch mm V~ Hz OLEC Corporation Irvine, California USA Phone 714 930 2500 Fax 714 930 2501 Lamp Options