Modular Glovebox Systems Gas Purifier Units Antechambers Accessories



Similar documents
OLED/PLED PROCESS TOOLS

Kompressoren. Adsorption Dryer AD

German engineering under high pressure

Material test chamber with mechanical convection

Electric Rotary Actuator - On/Off or programmable control actuator

Eurovacuum EV Series. Single Stage Oil Sealed Rotary Vane Pump

ultrafilter VARIOBLO Heat Regenerated Adsorption Dryer

data sheet DONATELLO Rev. I emiss - 25/10/ PRO03 code Automatic tissue processor DONATELLO

MOLECULAR DRAG PUMPS MDP SERIES

In-line 3D Sputtering Coating System. Fully automated. pst line

TECHNICAL SPECIFICATION. StirLIN-1 Economy Liquid Nitrogen System

Adsorption air dryers ADS 1 215

VDL 53 - Vacuum drying oven for flammable solvents

Vacuum drying oven for non-flammable solvents

MEDICAL AIR STATIONS FOR MEDICAL GAS PIPING SYSTEM. Key features: NOVAIR quality and service:

Product-friendly and fast...

Ready for Takeoff. TURBOVAC MAGiNTEGRA

york air-conditioning products Residential & VRF News 2015

EuroFID Total Hydrocarbon Analyzer. Precise Determination of Total Hydrocarbons in Air for Corrosive as well as Condensing Gases

pst line Fully automated In-line 3D Sputtering Coating System The right choice

clean and quiet dental

Technical Cleaning Ó

CelCulture. CelCulture CO2 Incubator Model CCL-170_-_. CO2 Incubator with Integrated Cooling System Solution for Highly Specialized Applications

Spetec. Laminar Flow Box. Portable Clean Room Technology

Incubator with mechanical convection

BB-18 Black Body High Vacuum System Technical Description

ThermoSorb Desiccant Dryers

SALES SPECIFICATION. SC7640 Auto/Manual High Resolution Sputter Coater

Climasys Thermal Management System. Schneider Electric Universal Enclosures 2009

Technical Concept. Filter Fan Unit COMPACT. Type COMPACT AC Type COMPACT EC

Clinic Washer-Disinfectors. Washer-Disinfector Line

ElastoFlake & ElastoTec

Equipment Information

How To Use A Ds340 (Dsp)

Coating Technology: Evaporation Vs Sputtering

INNOVATIVE SOLUTION OF DOMESTIC HEATING SPLIT TYPE SPLIT DHW INTEGRATED TYPE MONOBLOC TYPE

EcoCWave. The all-round talent for aqueous part cleaning.

ORGANIC SAMPLE PREPARATION

COMBIMASS. Technical Data COMBIMASS eco-bio +

Solar Hot Water Heaters

Precision Mass Flow Metering For CVD Applications.

Power consumption (kw)

3D Sputtering System Fully automated

Protection Systems. A UTC Fire & Security Company F Linear Heat Detector FEATURES DESCRIPTION APPLICATIONS BENEFITS

Installation and instruction manual for Laing DDC pumps

Informe Técnico IT - CDT

Lecture 30: Cleanroom design and contamination control

How To Control A Power Supply With A Mini Transmitter And Switch (Power Supply)

Two-Phase Evaporative Precision Cooling Systems

QGA Quantitative Gas Analyser

Solution heat treatment facility

How To Control A Medical Device With A Pc System

HYDRYER TYPE P Heat Regenerative Dryers ISO 9001 CERTIFIED

Compaq Rack Options and Accessories. Monitors and Keyboards

Hydraulic Control Solutions

ECOCIAT. Domestic hot water heat recovery unit

FTXS. Wall Mount Heat Pump or Cooling Only

Cooking at the Speed of light!

CRAC Precision climate control units for data centres

OUR PRODUCTS TRH-TRS-TRM-TRV. LIQUID RING VACUUM PUMPS AND COMPRESSORS Capacity up to 2100 ACFM Vacuum to 29 Hg. Our Other Products.

Automatic Back-Flushing Filter AutoFilt RF9.

TRIMMING TECH 150. IVD In vitro diagnostic-medical device. General information. Technical datasheet Trimmingtech150

DIESEL-FUELED, BLOWN AIR, DUCTABLE HEATERS

Medical Air Systems: Scroll

Research RF Sputtering Packages

Compact pressure switch Flameproof enclosure Ex d Model PCA

Visions become real. Temperature control and cooling systems. The innovative and reliable solution

AIR-CONDITIONER SPLIT TYPE

LyoBeta. R+D Freeze-Dryers

Zehnder Focus 200. Ventilation device

Filter Fan Unit SILENT. Type SILENT AC Type SILENT EC

LNG Fuel Tank System LNG Tank overview

CoolTop. A unique water cooled air-conditioning unit for server room cooling from the top AC-TOPx-CW-240/60

Laminar Flow Cabinets

Ontario Fire Code SECTION 5.13 DIP TANKS. Illustrated Commentary. Office of the Ontario Fire Marshal

ELECTRONIC THERMOSTAT AND THERMOMETER With SPEED CONTROL

CoolTeg Plus Chilled Water (CW) version: AC-TCW

Cooktop Low-Profile Ventilation Hoods

ECOplus Solar Cylinder

Refrigeration Air Dryers ADQ. Capacity: m 3 /h

Instruction Manual. Image of SP-3015 & SP Important Safeguards. Automatic Dispensing Hot Water Pot with Reboil Function

GenStore Archive Cabinet

Itho Products for Hot and Boiling water. product-

MTI10 Insertion and MTL10 In-line Thermal Mass Flowmeter and Temperature Transmitter

Installation and Service Instructions. Neutralization System Part no Grünbeck part no

Data sheet ECC 12 and 22

Concept WVM Brief description. Effi cient compressed-air adsorption dryer with vacuum regeneration. NEW! Now with improved ZDMC2

Balzers Sputter Coater SCD 050

VTS³ and VCS³ Stress Screening Systems. More Power for Maximum Quality Assurance

For Touch Panel and LCD Sputtering/PECVD/ Wet Processing

STAYFLEX CORROSION CONTROL AND THERMAL INSULATION SYSTEM

Enclosures DuraSystems Barriers, Inc. The Passive Fire Protection Specialists

Butterfly Valves PN 6/10/16 for flanged connection

Electric Flow Boiler

UB1 AIR CONDITIONING UNIT INSTALLATION INSTRUCTIONS

ThermoStar Refrigeration Air Dryers

Convection Ovens. BX Classic. Models BX4 / FG 189C, BX / FG 158C, BX10 / FG 180C. Operator's Manual

Transcription:

Modular Glovebox Systems Gas Purifier Units Antechambers Accessories INERTGAS TECHNOLOGY Modular glovebox with screwed in flanged side panels Easy to extend or modify while keeping a flat work place Define your specific system with suitables gas purifier units, s, sensors, feedthroughs Possibility to connect 2 gloveboxes directly or link them with an Large choice of accessories available as standard options BR08/V2 Spread by JS M. Braun Inertgas-Systeme GmbH Subject to be changed without notice! www.mbraun.com

Modular Glovebox System inner (outer) dimensions in mm. Different heights, lengths and depths are also available on request. 1250 (1280) 1500 (1530) 1800 (1830) 1000 900 (928) 900 (928) 1000 900 (928) 1000 900 (928) 2000 (2030) Length / Depth (in mm) Weight 1250/780 218 kg 1500/780 250 kg 1800/780 288 kg 2000/780 320 kg 1250/1000 265 kg 1500/1000 294 kg 1800/1000 344 kg 2000/1000 382 kg 1250/1200 293 kg 1500/1200 325 kg 1800/1200 378 kg 2000/1200 420 kg 1000 780 (850) 1000 (1060) 1200 (1260)

Several solutions to build your system with our modular glovebox system Round T-shaped 390 x 800 mm (D x L) With a T-shaped * Gas purification unit MB 20-G or MB 200-G for up to 5m³ of box volume Standard main 390 x 600 mm (D x L) Round junction 390 x 600 mm (D x L) With a junction * Gas purification unit MB 20-G or MB 200-G for up to 5m³ of box volume Partition wall with tight door D=390 mm or no separation to keep all the surface flat Standard main 390 x 600 mm (D x L) No in between* Gas purification unit MB 20-G or MB 200-G for up to 5m³ of box volume * Technical note: requires our option 2-box operation for purification in: box 1, box 2 or box 1 + box 2

Gas purifier units MB MB MB MB MB COMPACT Operation principle Closed loop recirculation Attainable purity level Moisture < 1 ppm, Oxygen < 1 ppm Recommended enclosure volume Up to 2 m³ Up to 5 m³ Up to 5 m³ Up to 12 m³ Up to 24 m³ Number of purification lines per purifier 1 1 2 2 2 Number of reactor columns per line 1 1 1 1 2 Number of reactor columns per purifier 1 1 2 2 4 Reactor capacity per purification line* (O2) Oxygen 20 l 36 l 36 l 91 l 182 l (H2O) Moisture 900 g 1350 g 1350 g 4420 g 8840 g Regeneration Automatic regeneration sequence Control unit PLC - M. Braun Siemens PLC Display Large color touch panel 7" color touch panel Box pressure control Automatic pressure control with foot switch (± 15mbar) Vacuum pump* Rotary vane pump with 17 m³/h (10 CFM) Blower (50 Hz / 60 Hz)* Variable speed Frequency controlled Frequency controlled Frequency controlled up to 88 m³/h up to 22 m³/h up to 250 m³/h up to 500 m³/h Main and side piping DN 40 ISO-KF Main and control valves DN 40 ISO-KF Electrical (FLA) (without options) Stainless steel 1.4301 Stainless steel 1.4301 Stainless steel 1.4301 Stainless Steel 1.4301 Stainless Steel 1.4301 Cooling water (optional) #REF! #REF! Regeneration gas N2/H2 mix. or Ar/H2 mix. (H2 2-10 %) Working gas Nitrogen, Argon or Helium Size 472 mm x 459 mm x 705 mm (L x W x H) 820 mm x 600 mm x 847,5 mm (L x W x H) 820 mm x 600 mm x 847,5 mm (L x W x H) 730 mm x 980 mm x 2040 mm (L x W x H) 1050 x 1230 x 2190 mm (L x W x H) Weight 50 kg (without vacuum 151 kg (without vacuum 171 kg (without vacuum 475 kg (without vacuum 855 kg (without vacuum Optional feature Moisture and oxygen analyzer Optional feature ECO Mode ECO Mode ECO Mode - - Optional feature Solvent vapor removal Optional feature - Regenerable solvent vapor removal Optional feature - Recirculation chiller for optimal working environment (RCC) Optional feature Dry pump upgrade Optional feature w/ MBRAUN glovebox Box Purge function Automatic box purge unit Optional feature w/ MBRAUN glovebox Antechamber automatic (time controlled) Antechamber automatic pressure controlled Optional feature w/ MBRAUN glovebox Freezer Freezer and box cooling Mode operation The ECO mode option is designed to reduce noise emission and reduce power consumption up to 90%. * Technical note: dependent upon operating conditions

Solvent traps Solvent filter MB Integrated into the glovebox (instead of the outer dust filters) Loading: Charcoal Easy exchange of loading Capacity*: 100 g solvent vapour Integrated dust filter HEPA H13 Solvent trap MB - LMF Integrated into the purifier unit or stand-alone Easy exchange of loading with bypass hand valves linked to the vacuum pump Loading: Charcoal Capacity*: 500 g solvent vapour Regenerable solvent trap MB - LMF - REG (integrated into the gas purifier unit) Integrated into the purifier unit or stand-alone Regeneration programm PLC-operated Loading: Molecular sieve Capacity*: about 810 g solvent vapour Accessories and options Sensors for: Oxygen Moisture Solvents CO2 Feedthroughs for: Liquid, gas, vacuum Cables (power supply, signal...) Fiber optic USB and other connectors Special equipment for gloveboxes: Oval gloveport feedthrough Antistatic / UV-cut window Vacuum cleaner (dust removal) Microscope Cold well * Technical note: dependent upon operating conditions

Standard s Description Size Comments Main, cylindrical volume: 72 l Ø 390 mm L: 600 mm Can be mounted on right or left end panel, length can be modified on request Mini, cylindrical volume: 7 l Ø 150 mm L: 400 mm Can be mounted on right or left end panel, length can be modified on request Round T-shaped volume: 75 l/100 l Ø 390 mm L: 600 / 800 mm Square Antechamber volume: 16 l / 36 l Square L-shaped volume: 36 l W: 200 mm H: 200 mm L: 400 mm or W: 300 mm H: 300 mm L: 400 mm W: 300 mm H: 300 mm L: 400 mm Can be mounted on right or left end panel Can be mounted on right or left end panel Square T-shaped volume: 54 l / 72 l W: 300 mm H: 300 mm L: 600 / 800 mm Specific s available on request

Standard ovens Name Description MB-VOH-Mini Stand alone controller Vacuum heating Maximum temperature: 150 C Ø 150 mm L: 400 mm MB-H-V-150-390 Stand alone controller Vacuum heating Maximum temperature: 150 C Ø 390 mm L: 600 mm MB-H-V-250-390-W PLC-operated Vacuum heating Maximum temperature: 250 C Ø 390 mm L: 600 mm Water cooled MB-H-V-600-390-W PLC-operated Vacuum heating Maximum temperature: 600 C Ø 390 mm L: 600 mm Water cooled More ovens available: Convection ovens Up to 2200 C (under vacuum) Large volume ovens

Examples of equipment integration Thin film deposition systems: Cylindrical or square Fully integrated in the glovebox Thermal, organic, e-beam, sputtering sources Cryo, turbo pumps Controllers and measurement devices Substrat pre-treatment or curing: UV-Clean Plasma cleaning Hot plates for ambient and vacuum Cryo, turbo pumps Wet coating solutions: Spin coaters Inkjet printers Slot die coating Screen printing Encapsulation solutions: UV Press UV Curing Vacupress Automatic dispensing robots Laminar flow: UDF Laminar flow enclosure: class 10 (according US-FED Standard 209E) or particle class 4 (according ISO 14644-1) Other solutions: Convection oven Automation M. Braun Inertgas-Systeme GmbH (Headquarters) Dieselstr. 31 D-85748 Garching Germany Phone: +49 89 32669-0 Fax: +49 89 32669-105 E-Mail Sales: info@mbraun.de E-Mail Service: service@mbraun.de M. Braun Incorporated 14 Marin Way Stratham, NH 03885 USA Phone: +1 (603) 773 9333 Fax: +1 (603) 773 0008 E-Mail Sales: info@mbraunusa.com E-Mail Service: service@mbraunusa.com M. Braun Inertgas Systems (Shanghai) Co., LTD Ground floor of building #1 No. 145 Jintang Road Tangzhen, Pudong, Shanghai 201201 P.R.China Phone: + 86 21 5032 02 57 Fax: + 86 21 5032 02 29 E-Mail: info@mbraunchina.com