Aerosol Jet International User Group Meeting Metallization and Functional Structures by Aerosol Jet deposition
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1 1 Aerosol Jet International User Group Meeting 2012 Metallization and Functional Structures by Aerosol Jet deposition Andreas Brose Institut für Mikro- und Sensorsysteme Lehrstuhl Mikrosystemtechnik
2 2 Introduction Otto von Guericke University Magdeburg Institute for Micro and Sensor Systems (IMOS) Chair of MEMS Technology MEMS MID Reliability
3 3 Facilities R & D Design and Simulation lab (30m 2 ) MEMS MEMS-cleanroom (class: 100, 150m²) Packaging Packaging labs (72m² + 100m²) Reliability Reliability lab (50m²)
4 4 3D-MID activities Equipment 1&2-shot injection molding LDS/Hot embossing/aerosol- Jet deposition PVD/Galvanic/Electroless Plating Soldering/Wire Bonding/Flip- Chip electric characterization with environment simulation X-ray Analysis Services Consultation/Conceptual Design Simulation/CAD Prototyping/Pilot Run Testing & Qualification Research MEMS on MID Reliability of Chip on MID/Flex Product Miniaturization by MID Medical MID Systems MID Sensor Structures
5 5 Pattern generation additive subtractive masked processes maskless processes Screen printing Stencil printing Thin film processes Inkjet Aerosol Flamecon Metallization Nano particle inks Catalytic seed layer (MicroCat) Passivation / Isolation (non conductive) Function materials (resistors, piezoelectric, medicals, )
6 6 Aerosol Jet IMOS Aerosol generation deposition head camera moving stage
7 7 Overview: applicated inks Nano particle based inks - Silver, Gold, Platinum, Copper Catalytic ink (MicroCat) - Seed layer for additional plating processes Function- and isolation layers - Dielectrics (adhesives, resists), Piezoelectrics (PZT) Sintering necessary Layer thickness < 1µm Electroless plating of Cu/Ni/Au No thermal treatment Viscosity up to 1000cP Particle size up to 500nm
8 8 2D-metallizations RF-resonant circuit Silver on glass (Pyrex) Gold electrodes on MEMS-Chip Platinum electrodes on Langasite (LGS) micro cantilever
9 9 3D-metallizations cooling device for high-power LED module Silver deposition on ceramic heat sink (AlN) challenge: covering the edges
10 10 3D-metallizations Copper issues: difficult wetting behavior heating substrate and ink insufficient jetting stability improvable conductivity cooling device for high-power LED module nano-copper ink (Intrinsiq Materials, Inc) sinter process: laser sintering (Nd:YAG)
11 11 Catalytic ink process flow Aerosol Jet deposition of catalytic ink - contains Palladium, 2component-adhesive, organic solvent Drying step Activation by reducing agent Electroless plating of - Copper/Nickel (NiP)/Gold Low temperature process no sintering good conductivity solderable surface noncorrosive
12 12 Antenna on 3D-MID 4 working planes continuous pattern
13 13 Reliability testing measuring and comparing the shear strength of SMDs mounted on MID-substrates metallization by aerosol deposition of catalytic ink LDS-metallization
14 14 Catheter marker for MR imaging insufficient contrast between polymer catheter and human tissue minimal invasive surgery requires new tools for better imaging Idea: local amplification of magnetic field with resonant circuit at the catheter tip 1st discrete version: coiled copper wire and SMD capacitor Objective: integration by Aerosol Jet metallization
15 15 MRI-Marker for catheter devices printed helix with catalytic ink electroless plating loose coupling with measure coil return loss S 11
16 16 MRI-Marker Multi layer layout metal 1: Cu (electroless plated) dielectric: PET heat shrink tubing metal 2: Cu/Au (electroless plated) C L
17 17 Validation with 3T-MRI Working Markers provide positive image contrast Positive contrast enables computerassisted tracking
18 18 3 Tesla-MRI installed at University of Magdeburg in September 2012 Only for scientific use!
19 19 Function materials Passivation layers - Selective deposited protective coating for encapsulation of SMD components PZT-layer on silicon membrane - PZT-powder containing suspension (95% of the particles < 300nm) - average layer thickness: 3µm - sintering at 600 C
20 20 Function materials X-ray analysis: permittivity layer thickness (µm) Permittivity of Aerosol Jet deposited PZT film higher than screen printed and electrophoretic deposited films X-ray analysis showed inhomogeneous film thickness
21 21 Aerosol coating of CMUT-gas sensor 0.2 mm 2.6 mm single element membrane cavity substrate In cooperation with chair of measurement and sensor technology at OvGU
22 22 Aerosol coating of CMUT-gas sensor Multi-channel CMUT coated with various sensing materials - Enables sensor array to analyze gas mixtures Coating materials: Material Abbreviation State Solvent Solvents BP ( ) Concentration (mg/ml) Methyl-β-Cyclodextrin β-cd Solid Ethanol or 6 4-tert-Amyl-Calix[8]arene CA Solid Chloroform Polyethylenimine PEI Liquid Water Cyanopropylphenyl Dimethylpolysiloxane OV 225 Liquid Polydimethylsiloxane PDMS Liquid Ethyl acetate Ethyl acetate In cooperation with chair of measurement and sensor technology at OvGU
23 23 Aerosol coating of CMUT-gas sensor Coffee ring dropping with micro pipette Advantages: Aerosol Jet coating precise patterning controllable output volume thin and uniform layers In cooperation with chair of measurement and sensor technology at OvGU
24 24 Contact Andreas Brose Otto-von-Guericke-University Magdeburg IMOS Phone: +49 (0) 391 / Fax: +49 (0) 391 / [email protected]
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