Six Reasons Why Mercury Encoders Will Make Your Designs Smaller, Faster and Smarter

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1 Mercury TM Encoder Technology Smaller, Faster, Smarter High-Performance Encoders

2 Six Reasons Why Mercury Encoders Will Make Your Designs Smaller, Faster and Smarter The Mercury Encoder Family: Programmable, Digital, Analog and Vacuum Models MicroE Systems has developed the most advanced encoder product line on the market. The revolutionary Mercury encoder family has everything you ll need, from smart programmable encoders, to digital, analog and vacuum-compatible models. Every encoder shares our miniature sensor for dramatic space savings and SmartPrecision electronics for 30-second alignment and setup. There are resolution ranges for every application. And all encoders are available in linear or rotary styles with many scale choices to complete your design. PurePrecision Optics Gives Mercury the Sensor Size Advantage MicroE Systems patented sensor creates a high fidelity signal with very compact optics. The result is a miniature, highperformance sensor that s just 8.4mm tall, weighing only a few grams. Mercury s miniature sensor. SmartPrecision Electronics for the Performance Advantage SmartPrecision electronics gives Mercury encoders true programmability and enhanced performance. Resolution can be set in integer steps, making system optimization easier than ever. The ultra-fast FPGA signal processing and unique algorithms also enhance accuracy and maximize operating speed. PurePrecision Optics and SmartPrecision Electronics Give You Instrument-Free Alignment PurePrecision optics gives Mercury sensors the broadest alignment tolerances _ a ± 2 sweet spot in the theta Z axis. That s 300% better than competing ± Mercury s broad alignment tolerances. technologies. When combined with our SmartPrecision electronics integral LED signal strength feature, you get an encoder that can be aligned and setup in under 30 seconds- with no test gear. Long Life, Rugged Design All Mercury encoders are designed for CE compliance, ultra-long service life and ultra-reliable operation. For example, we integrate sensor electronics onto a tiny hybrid for maximum reliability. We use double shielded cabling and house our SmartPrecision electronics in a metal enclosure for superior EMI protection. And finally, ISO 9001: 2000 certification and extensive testing insure world-class quality. SmartPrecision Software for Setup, Monitoring and Diagnostics Only MicroE Systems gives you software tools to optimize the performance of your encoder. The optional SmartPrecision software lets you set interpolation depth and output frequency. You can align the sensor using the signal level display or the Lissajous data plot. You can view position and velocity in real time, as well as capture SmartPrecision encoder software. alarms and signal data while the system operates unattended. We even offer DLLs to integrate with Windows control software. When you add up the advantages, why would you use any other encoder? All Mercury encoders are RoHS compliant.

3 The Innovative Mercury TM Encoder Product Line Four Families and 29 Models- A Solution for Every Application PROGRAMMABLE ENCODERS: M3500, M3500SI, M3000, M3000SI, M3000SIDAA, M2000 Mercuryprogrammable encoders feature SmartPrecision electronics, programmable resolution and output frequency, LED alignment indicators, and accuracy enhancement electronics. Our miniature sensor saves space and has broad alignment tolerances. The entire system is shielded for harsh environments. And our optional SmartPrecision software assures fast setup, flexible diagnostics and a variety of readouts. User Programmable Resolution: Linear: from 5µm to 5nm Rotary: from 6k CPR to 67M CPR Output options: A-quad-B High-speed serial interface Bi-directional, high-speed, ±1LSB DIGITAL OUTPUT ENCODERS: M1800S, M1800H, M1500S, M1500H The M1800 and M1500 series digital-in-thesensor-head encoders are the smallest devices in their class. Available in six resolutions, the series has two connector styles; D-sub or micro connector. Both have double shielded cables for harsh environments. What s more, alignment and setup are easy using SmartPrecision Alignment Tools and optional SmartPrecision software. Factory-set Resolution: Linear: from 5µm to 50nm Rotary: from 6k CPR to 6.5M CPR Output: A-quad-B Bi-directional, high-speed, up to ±1LSB ANALOG OUTPUT ENCODERS: M1200, M1000 Mercury analog encoders are ideal for use with your interpolation electronics. Both models have analog sine/cosine output. The M1200 is a 5.6mm tall, PC board-mount unit. The M1000 is a shielded unit terminated in a standard 15-pin D-sub connector. It features auto calibration to optimize accuracy and is aligned with the SmartPrecision Alignment Tool and optional software. Resolution Determined by Customer Electronics Linear: from 5µm to 0.078µm Rotary: from 6k CPR to 4.2M CPR Output: Sine / cosine, 1V PP Bi-directional, high-speed, 20µm VACUUM HARDENED ENCODERS: M3500V, M3500VSI, M3000V, M3000VSI, M2000V, M1500V, M1000V Mercury vacuum encoder systems are available in programmable, digital and analog styles. They are made with vacuum compatible materials rated to 10-8 Torr and are designed for a 48 hour bake out at 150 C. The sensor is vented and the cable is single shielded and terminated in color-coded bare leads to accommodate any vacuum connector. Resolution: Linear: from 5µm to 5nm Rotary: from 6k CPR to 67M CPR Output options: A-quad-B High-speed serial interface Sine / cosine, 1V PP Bi-directional, high-speed LINEAR AND ROTARY SCALES FOR ALL MERCURY MODELS MicroE Systems reflective glass encoder scales have a 20µm grating pitch. Standard scale lengths range from 5mm to 2 meters. Rotary diameters range from 12mm to 108mm. And all scales include an index mark. MicroE Systems also produces custom scales for OEM applications, including rotary segments. Creating miniature motion systems is easier than ever. For example, our 12mm rotary scale combined with a Mercury sensor creates a tiny rotary encoder capable of producing over 6 million CPR. NEW For Metal Tape Scale Applications, use Mercury II. See details at Access all the latest product data 24/7:

4 Compare Each Encoder Model To Select the Best One for Your New Design Mercury Encoder Models M3500 M3000 M2000 M1800 M1500 M1200 M Nanometers 20.0 Nanometers 0.1 Microns Encoder Resolution Range* INTERPOLATION ELECTRONICS Interpolation Level X4 - X4096 X4 - X1024 X4 - X256 X200, X400 X4, X8, X20, X40 X4 - X256 X4 - X256 Integer Steps Integer Steps Integer Steps Factory Select Factory Select Recommended Recommended Interpolation Circuits In SmartPrecision In SmartPrecision In SmartPrecision Digital in Digital in Customer Customer Connector Connector Connector Sensor Head Sensor Head Supplied Supplied SIGNAL OUTPUT A-QUAD-B High Speed Serial Word Analog Index Reference Mark 1LSB 1LSB 1LSB 1LSB 20µm 20µm 20µm CONNECTOR STYLE High Density (HD) or 15 Pin HD D-Sub 15 Pin HD D-Sub 15 Pin HD D-Sub 26 Pin HD D-Sub 15 Pin Std. D-Sub PCB Mount 15 Pin Std. D-Sub Standard (Std.) or or Micro Connector Micro Connector SMARTPRECISION Alignment Indicators Standard Standard Standard Accessory Accessory PCB Mount Accessory Software Setup Setup Setup Setup Setup Setup Alignment Alignment Alignment Alignment Alignment Alignment Configuration Configuration Configuration Monitoring Monitoring Monitoring Diagnostics Diagnostics Diagnostics Programmable Output Freq. & Interpolation Depth ACCURACY MINIATURE SENSOR SmartPrecision SmartPrecision SmartPrecision SmartPrecision Auto Accuracy Accuracy Accuracy Accuracy Calibration Enhancement Enhancement Enhancement Enhancement Sensor Height & Weight 8.4mm 8.4mm 8.4mm 8.9mm 8.4mm 5.6mm 8.4mm 5.0g 5.0g 5.0g 10.8g 5.0g 2.6g 5.0g Broad Alignment ± 2.0 Z theta ± 2.0 Z theta ± 2.0 Z theta ± 2.0 Z theta ± 2.0 Z theta ± 2.0 Z theta ± 2.0 Z theta Tolerance Broad Standoff 2.4mm ± mm ± mm ± mm ± mm ± mm ± mm ± 0.15 Clearance ENCODER STYLE 0.5 Microns 5.0 Microns Linear or Rotary Vacuum Compatible * See data sheets for rotary resolutions Get all the details to support your design:

5 Superior Encoder Technology Means Smaller, Faster, Smarter Motion Platform Designs MINIATURE SENSORS FOR COMPACT DESIGNS Shown at actual size on the right side of the page, Mercury sensors are 1/3rd the size of other high performance encoders. Our PurePrecision optics makes it all possible. And that can mean smaller, less costly motion platform designs with improved performance. It can also enable closed loop control where it would have been impossible before. Mercury Brand X Brand Y Mercury s sensor height is a fraction of other encoders. STANDARD PCB MOUNT SENSOR THE SIZE OF A DIME VACUUM MICROE MV 11/02 HIGH ACCURACY FOR SUPERIOR PERFORMANCE The entire Mercury encoder system - optics, electronics and scale - is optimized to insure the highest system accuracy and repeatability. MicroE Systems SmartPrecision models are also equipped with accuracy enhancing algorithms for the ultimate in performance. Comparison of Encoder Error vs. Position Position (mm) Error (µm) INTERPOLATION* ACCURACY: ± 0.12µm over any 20µm movement LONG-TRAVEL* ACCURACY: ±1µm accuracy available - consult MicroE ±3µm for scales up to 130mm ±5µm for scales 155mm to 1m ±5µm per meter for scales >1m *Maximum peak to peak error over specified movement compared to a NISTtraceable laser interferometer standard, used at room temp. with MicroE interpolation electronics. These specifications apply to programmable models. SmartPrecision software makes Mercury the easiest family of encoders to use. It lets you program, setup, monitor, and diagnose Mercury encoders with the click of a mouse. Compatible with Windows 95, 98, ME, NT, 2000, and XP. SMARTPRECISION SOFTWARE FOR FASTER SETUP SmartPrecision Lissajous data plot. PROGRAM MERCURY ENCODER ELECTRONICS Set interpolation level in integer steps Set output frequency to match controller Align sensor using signal display or data plot MONITOR ENCODER OPERATION Read encoder position in units of your choice Capture alarms during unattended operation Capture and data for rapid diagnostics FASTER ENCODER SPEED FOR OPTIMAL PERFORMANCE Mercury encoders give you more speed than competitive encoders with A-quad-B output at all resolutions, from 1 micron to 5 nanometers. For operation at the highest speed with maximum resolution, specify the M3500Si encoder with a high-speed serial interface. Speed (m/s) Comparison of Encoder Speed vs. Resolution 8 Mercury M3500Si 6 High Speed Serial Mercury M High Bandwidth A-quad-B Brand Y 2 Brand W Brand X Resolution (µm) RESOLUTION A-QUAD-B* HIGH SPEED* BEST* (MICRONS) OUTPUT SERIAL OUTPUT COMPETITOR See data sheets for rotary specifications. *All data in meters/second. LINEAR AND ROTARY SCALES FOR EVERY APPLICATION MicroE Systems offers a wide array of chrome on glass scales for the highest accuracy and best thermal stability. We also offer hubs for use with our rotary glass scales. Contact your local sales office for quotes on custom scales or rotary segments in OEM quantities. Linear Rotary Rotary Rotary Standard Standard Hub Segments Lengths Outer Dia. Available 25mm 12.00mm Yes Arc segment 50mm 19.05mm Yes Radius: 6mm - 52mm 75mm 31.75mm Yes 100mm 57.15mm Yes 125mm mm Yes 150mm. 2020mm 139.7mm Yes.. NEW For Metal Tape Scale Applications, use Mercury II. See details at Access all the latest product data 24/7:

6 A World of Enabling Technologies Bringing Your Advanced Manufacturing Applications to Life To learn more about Mercury encoders, or other MicroE Systems products, visit: To learn more about GSI Group, visit our corporate web site: MicroE Systems is a world leader in optical encoder technology with offices in major industrial centers around the globe. As one of fourteen product brands that comprise GSI Group, we deliver enabling technology that brings advanced applications to life in the motion control, medical, semiconductor, electronics and industrial markets. Headquarters MicroE Systems 8 Erie Dr. Natick, MA USA Tel: Fax: info@microesys.com Mercury Brochure Rev E 2007 MicroE Systems