ENGINEERED SYSTEMS CONTROLLERS ROBOTICS LINEAR ROTATION STAGES ROTATION

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1 for more information see: I info@micos.ws I fon: +49-(0) I fax: +49-(0)

2 500 Ultra Precision Rotation Stage UPR-270 AIR Load capacity up to 40 kg Ultra Precision Rotation Stage UPR-270 Load capacity up to 80 kg High precision air bearings Flatness and eccentricity < 0.1 µm Wobble < 2.5 µrad Option: Clean room High-precision ball bearings 05/07 Errors and technical modifications are subject to change Ultra Precision Rotation Stage UPR-160 AIR Load capacity up to 20 kg High precision air bearings Free center hole 35 mm diameter Flatness and eccentricity < 0.1 µm Wobble < 2.5 µrad Option: Clean room

3 501 Ultra Precision Rotation Stage UPR-160 Load capacity up to 40 kg Ultra Precision Rotation Stage UPR-100 AIR Load capacity up to 1.5 kg Ultra Precision Rotation Stage UPR-100 Load capacity up to 3 kg Free center hole 35 mm High-precision ball bearings High precision air bearings Free center hole 20 mm diameter Flatness and eccentricity < 0.2 µm Wobble < 5 µrad Option: Clean room Free center hole 20 mm diameter Option: Vacuum & Clean room

4 502 Torque Rotation Stage TRS-65 Travel range 45 +/ m Load capacity up to 0.5 kg Precision Rotation Stage PRS / m Maximum speed 120 /sec Load capacity up to 50 kg Clear aperture 120 mm Preloaded worm drive for zero backlash Cross-roller bearings 05/07 Errors and technical modifications are subject to change Rotation Stage DT /- 1 m Maximum speed 50 /sec Load capacity up to 40 kg Clear aperture 120 mm Preloaded worm drive for zero backlash

5 503 Precision Rotation Stage PRS-110 Rotation Stage DT-65 N +/- 0.2 m Maximum speed 200 /sec Load capacity up to 10 kg Clear aperture 35 mm Preloaded worm drive for zero backlash Precise, smooth continuous 360 +/- 2 m Maximum speed 60 /sec Load capacity up to 3 kg Integrated reference switch Clear aperture 25 mm Preloaded worm drive for zero backlash Rotation Stage RS /- 5 m Maximum speed 7 /sec Integrated reference switch Clear aperture 20 mm Worm gear drive Precise, smooth continuous

6 504 Rotation Stage DT-80 +/- 10 m Maximum speed 45 /sec Integrated reference switch Clear aperture 40 mm Rotation range 360, endless Rotation Stage DT-80 R /- 10 m Maximum speed 1100 /sec Clear aperture 40 mm Rotation range 360, endless 05/07 Errors and technical modifications are subject to change Rotation Stage DT /- 15 m Maximum speed 3600 /sec Load capacity up to 1 kg Integrated reference switch Clear aperture 20 mm Rotation Range 360, endless

7 505 Rotation Stage DT-25 Rotation Stage Pollux RSP-200 Goniometer WT-120 Maximum speed 1.5 /sec /- 50 m Maximum speed 1440 /sec Single-axis microstepping motor & controller combination / m Maximum speed 60 /sec Load capacity up to 20 kg Stand-alone system with integrated 2-phase stepper motor Serial Interface RS Baud 24 VDC power supply and RS-232 cable included Hardened worm gear drive Precise, smooth continuous 90, pair with WT-90 / PRS-110

8 506 Goniometer WT-90 Goniometer WT-100 +/- 0.5 m Maximum speed 30 /sec Load capacity up to 8 kg Precise, smooth continuous 90 Together with WT-120 one centre of rotation Option: Vacuum up to FV, pair with WT-120 / PRS-110 +/ m Maximum speed 15 /sec Clear aperture 60 x 25 mm Precise, smooth continuous 10, pair with WT-85 / DT-65 05/07 Errors and technical modifications are subject to change Goniometer WT / m Maximum speed 15 /sec Clear aperture 30 mm Precise, smooth continuous 10, pair with WT-100 / DT-65

9 507 Filter Wheel AFW-65 Slit ASS 5E Option: Vacuum up to FV /- 0.1 µm Maximum speed 0.8 mm/sec Integrated limit switches Clear aperture 5 mm High resolution Option: Vacuum up to FV

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