Surface Texture Measuring Instruments. Compact & Touch operetion type SURFCOM Series

Transcription

1 Surface Texture Measuring Instruments Compact & Touch operetion type SURFCOM Series

2 Surface Texture Measuring Instrument Operator-oriented Operation for the Workplace New Surface Texture Measuring Instrument for Easy Operation SURFCOM 480B-12 Supported Languages English, Japanese, German, French, Italian, Spanish and Chinese! JIS2001 compliant! Simplified automatic 16% rule application TFT Color LCD Touch Panel The color LCD touch panel with a wide field of view features high clarity. Simply touch the desired icon to perform operation. Touch panel input can be performed by using your finger or with the touch-pen provided, facilitating on-site measurements. Supports International Standards The 480A supports analysis parameters for JIS (2001/1994/1982), ISO, DIN, ASME and CNOMO standards, and can be switched between English, Japanese, German, Italian, French, Spanish and Chinese. In addition, any power source between AC100V and 240V can be used, and the unit satis-fies the European Directives for the CE Marking. Customize Icons The customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency. Host of Analysis Functions The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. The steps on electrical parts, film thickness, surface area and other items can be analyzed. AI Function (patented) The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions by simply entering the parameters and allowable values denoted on the machining drawing. This automates measurement. Guidance Function This function guides the user through the measuring procedures, enabling beginners to make measurements. Tilt Correction Function Six types of automatic tilt correction are provided: Linear, first half,latter half, both end, round surface and spline curve (patented). Evaluation Range Setting (patented) The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated. PC Card Slot Memo Function A short note or diagram can be entered with the touch pen and printed using the memo function. Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use. 2

3 Sample Display The customize function on the menu allows icons to be edited and arranged as desired. Sample Customized Screens Main Menu Sample data sheet Analysis Results Load curve Amplitude distribution curve Power graph Model X-axis (horizontal) Measuring Range Z-axis (vertical) Straightness accuracy Conformance Analysis items Parameters Evaluation curves Surface Characteristics graphs Tilt correction Vertical (Z-axis) Horizontal (X-axis) Filter types Measuring Speed Detector Measuring AI Special functions Step analysis function Standard accessories Power Source Dimensions and Installation dimensions weight Weight SURFCOM 480B 100mm 800μm (Measuring range/resolution: 800μm/10nm, 80μm/1nm, 8μm/0.1nm) ( L/1000) μm L: Measuring length (mm) Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R Δa, R Δq, R λa, R λq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, R δc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, amplitude distribution (ADF) curve, power graph Linear correction, round surface correction, fi rst half correction, latter half correction, both end correction, spline correction (linear, round surface, and both end correction are supported in an arbitrary range) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K,* 500K,* auto 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, auto Standard fi lter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 0.03, 0.06, 0.15, 0.30, 0.60, 1.5, 3, 6mm/s (8 speeds) Tip radius: 2μm, Material: Diamond, Measuring force: 0.75mN AI functions provide for easy procedures, enabling beginners to make measurements. Ideal for fi lm thickness and surface area measurement of semiconductor parts. Data output as text fi le for transfer to a personal computer. Standard specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), instruction manual AC V ±10%, 50/60Hz, 90VA 1000 W 800 D 750 H mm 88kg (for SURFCOM 480B-12) When high-magnification pickup is used 3

4 Surface Texture Measuring Instrument Operator-oriented Operation for the Workplace Compact Field Surface Measuring Instrument LCD Panel Simplifies Operation Simply select the desired operation from the color LCD touch panel with a wide field of view or the reasonable monochrome LCD. Highly Portable Compact Unit The unit is small enough for use at virtually any location. Supports International Standard Analysis Parameters Select the desired standard: JIS, ISO, DIN, ASME or CNOMO. Satisfies European Directives for CE Marking Monochrome LCD TFT color LCD Best of Class Straightness Accuracy 0.3 μ m/50mm!! Simplified 16% rule automatic discrimination Supported Languages English, Japanese, German, French, Italian, Spanish and Chinese! Customize Icons The customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency. Host of Analysis Functions The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. The steps on electrical parts, film thickness, surface area and other items can be analyzed. AI Function (patented) The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions by simply entering the parameters and allowable values denoted on the machining drawing. This automates measurement. Guidance Function This function guides the user through the measuring procedures, enabling beginners to make measurements. Tilt Correction Function Six types of automatic tilt correction are provided: Linear, first half, latter half, both end, round surface and spline curve (patented). Evaluation Range Setting (patented) The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated. PC Card Slot Memo Function A short note or diagram can be entered with the touch pen and printed using the memo function. Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use. 4

5 Convenient Mode Select Function for System Manager/Operator All functions are displayed for the system manager. Only required functions are displayed for the operator. Customized screen All-function screen Flexible Data Analysis Sample Data Sheet Analysis with ACCRETECH s integrated measuring system Display in RS-232C (E-SC-S288A) Desktop computer (E-MU-S50C) NOTE PC Outstanding Analysis Functions (E-MU-S50C)及びPC接続用RS-232Cケーブル(E-SC-S288A)はオプションです Step Profile Evaluation Example Measurement Hybrid IC R-Surface Correction 5.08 Example Measurement Shaft Measurement Can be used for hybrid IC, magnetic head, and other step measurement, film measurement, and surface area measurement. points A notched workpiece measuring function makes it possible to eliminated unused parted. 5

6 Options Roll Foot E-MA-S62A Pickup Holder for All-Orientations E-DH-S107A Pickup Holder for Horizontal Tracing E-DH-S17A Attachment for placing the drive unit on a roll shaped object for measurement Roll outer diameter: φ60 mm or more For measuring surface roughness of slanted surfaces, vertical surfaces, ceiling surfaces, and other non-flat surfaces. Photograph shows unit with E-MA-S63A roll foot. Attachment for horizontal tracing of items, such as a crankshaft, that have obstacles in the front and back in the measuring direction (using double-side straddling skid) Battery Option Set E-MA-S65A E-MU-S50C For measuring and recording in a location where there is no power outlet available. I n c l u d e d i t e m s : A C a d a p t o r, b a t t e r y, charger Provides storage for approximately 500 measurement conditions, or approximately 500 data measurements (100 text management items). Specifications: 64 MB Compact Measuring Stand E-ST-S130A SURFCOM 130A Model X-axis (horizontal) Measuring Range Z-axis (vertical) Straightness accuracy Standards Parameters Analysis items Evaluation curves Surface Characteristics graphs Tilt correction Vertical (Z-axis) Horizontal (X-axis) Filter types Measuring Speed Detector Special functions AI Function Step analysis Standard accessories Dimensions and weight 6 The height and inclination of the drive unit can be adjusted in accordance with the size and shape of the object being measured. Table size: 410x200mm Maximum measuring height: 200mm Power Source Installation dimensions Weight 50mm 800μm (Measuring range/resolution: 800μm/10nm, 80μm/1nm, 8μm/0.1nm) 0.3μm/50mm Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R Δa, RΔq, Rλa, Rλq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rδc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, amplitude distribution (ADF) curve, power graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface, and both end correction possible at arbitrary range) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K auto 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, 5K, auto Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 0.3, 0.6, 1.5, 3mm/s (4 speeds) Tip radius: 2μm, Material: Diamond, Measuring force: 0.75mN AI functions provides for easy procedures, enabling beginners to make measurements. Ideal for film thickness and surface area measurement of semiconductor parts. Data output as text file for transfer to a personal computer. Standard specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), instruction manual AC V ±10%, 50/60Hz, 30VA 700 (W) 300 (D) 150 (H) mm 8kg

7 Able to use PC based analysis software TiMS Light Offline ACCTee TiMS has achievements at many users. It provides various function and complicated analysis Newly developed ACCTee software is new generation of integrated software with new concept. It provide complicated analysis with comfortable operation. RS232C cable (E-SC-S288A) RS232C cable (E-SC-S366A) S480B Desktop computer S130A HandySurf TiMS Light or Online ACCTee (E-MU-S50C) (E-MU-S50C), PC Connection RS-232C cable (E-SC-S288A/S366A) are optional Data Transfer using an RS-232C interface (S130A, S480B, E35A) or (S130A, S480B). TiMS analysis display TiMS print display ACCTee analysis&print display Data save to files Allows analysis of measured data to be performed on-site. Computer-based operation allows sharing of data with other computers. TESCHART Excel Converter Any parameter value obtained as measured results can be transferred via RS-232C data communication in real time to a cell in Microsoft Excel running on a computer connected to the S130A/S480B or HANDY SURF. (Waveform data cannot be transferred.) Also effective for collecting data from multiple workpieces. RS232C cable S130A/S480B Computer TESCHART-Excel Converter 7

8 Head Office , Ishikawa-machi, Hachioji-city,Tokyo , Japan TEL.81(42) FAX.81(42) International Marketing Dept. 4, Higashi-Nakanuki-cho,Tsuchiura-city, Ibaraki , Japan TEL.81(29) FAX.81(29) We reserve the right to change the contents of this catalog, including product specifications, without notice when products are updated. ISO 9001 and ISO14001 awarded to the Hachioji and Tsuchiura Plants B E-1012_1