HEATER SYSTEMS for Science and Semiconductor application

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1 representing HEATER SYSTEMS for Science and Semiconductor application

2 & Advanced Heater Systems + maintenance friendly + excellent life time + cost saving

3 In Cooperation with Presenting Today ADVANCED HEATER SYSTEMS with up to 450 C line operation

4 1- Requirements for heater application Anlagen- und Komponententechnik GmbH Dresden Benefits from heating Reduction of particles Greater process yield Better run-to-run repeatability Increased uptime More throughput Reduced PM effort fewer pump rebuilds, less line cleaning Increased pump lifetime

5 B - Special Features of Heater Jackets differences in heater construction Anlagen- und Komponententechnik GmbH Dresden exists 3 big construction groups & some mixtures between fibre free Insulated heater Silicon foam heater Glass fibre / mineral wool insulated heater Construction causes differences in quality features

6 A key advantage! HEMI Heater Jackets Less particle! Special Glass fibre free insulation NOMEX multi layer sandwich construction Insulation: 4-layer META-Aramide fibres Thickness: 26mm ( 4x6mm ).Maximum jacket temp: 200 degr. C. Thermal conductivity: 200 degr.c : 0,055 W/mk Less outgassing!

7 2 - Special construction of HEMI Heater JAckets is creating Anlagen- und Komponententechnik GmbH Dresden HEMI MAIN FEATURES A) full CLEANROOM COMPATIBLE Very Low Particle Load for max. yield lowest cross contamination B) 200 C TEMPERATURE CAPABILITY C) extended lifetime (keeps the budget fair) Long time stable & proper construction D) High Energy efficiency

8 HEMI Heater Jackets d high energy efficiency construction Anlagen- und Komponententechnik GmbH Dresden Ø POWER CONSUMPTION vs. TEMP. Cycled medium power [ W ] at reference section reference heater B reference heater A HEMI-Heating Jacket Object temperature [ C ]

9 HEMI Heater Jackets d high energy efficiency construction Compare 2 different products in your fab Anlagen- und Komponententechnik GmbH Dresden CONNECTED POWER

10 HEMI Heater Jackets d high energy efficiency construction POWER CONSUMPTION AT 1 TOOL Anlagen- und Komponententechnik GmbH Dresden exhaust line + forvacuum line in total per heated tool 1.0 : 2.6 kw plus 2.8 : 7.3 kw = 3.8 kw or 9.9 kw :

11 POWER CONSUMPTION in 1 fab 3.8 : 9.9 kw per heated chamber ~ MWh saving in 5 years. Connected heater load per fab 244 : 634 kw = 390 kw difference in power supply MWh saving p.a. No. Heated tool chambers tool-chamber 1 CVH01-A 2 CVH01-B 3 CVH01-C 4 CVP01-A 5 CVP01-B 6 EMT01-A 7 EMT01-B 8 EMT01-C 9 EMT01-D 10 FHT FNT FPY CVL 01-A 14 CVL 01-B 15 CVW 01-A 16 CVW 01-B 17 CVW 01-C 18 CVB 01-A 19 CVB 01-B 20 CVB 01-C 21 EPY 01-A 22 EPY 01-B 23 EPY 01-C in 1 fab No. tool-chamber 24 CVB 02-A 25 CVB 02-B 26 CVB 02-C 27 CVW 02-A 28 CVW 02-B 29 CVW 02-C 30 EMT 02-A 31 EMT 02-B 32 EMT 03-A 33 EMT 03-B 34 FNT FHT FPY CVL 02-A 38 CVL 02-B 39 EPY 02-A 40 EPY 02-B 41 EPY 02-C 42 FNT FHT EPY 03-A 45 EPY 03-B No. Anlagen- und Komponententechnik GmbH Dresden tool-chamber 46 CVP 02-A 47 CVP 02-B 48 EMT 04-A 49 EMT 04-B 50 EMT 05-A 51 EMT 05-B 52 CVW 03-A 53 CVW 03-B 54 CVW 03-C 55 CVP 21-A 56 CVP 21-B 57 EPY 04-A 58 EPY 04-B 59 EPY 05-A 60 EPY 05-B 61 EMT 42-A 62 EMT 42-B 63 FNT OCR-EOX 22-A total 64 chamber

12 D high energy efficiency construction LOW CONNECTING POWER LOW THERMAL LOSSES TO INSTALLATION AREA LOW RUNNING COSTS Energy cost saving construction

13 - Special construction of HEMI Heater Jackets Touch protection limit Silicon rubber jacket 80 HEMI-Heating Jacket 70 The 60 higher You heat - The longer you free (from cleaning) Jacket surface temperature [ C ] B Process Flexibility and Object Temp UVV limit For harsh proceses Object temperature [ C ]

14 APPLICATION NOTES

15 The full range of vacuum heater application throttle valves possible up to DN from 500 DN one hand Isolation valve valve from arrays DN 25 We are serving not only simple tube heater... heater - but all types of special components required in a real process installation (hook up)) ( incl. metal flex lines, bellows, valves,..) incl. functional elements from many manufacturers Jalapeno valves

16 from one hand Anlagen- und Komponententechnik GmbH Dresden full range of gas supply heater Pressure Regulator heater ( CO2, N2O,...) Gas supply line heater (BCl 3, DCS, C 4 F 8,...) MFC heater Gas cylinder heater (NH 3, CO 2, N 2 O,...)

17 heater for ALD gas supply (R & D ) Heater jackets for gas components up to 230

18 UHV supply heater (R & D ) DN500 vacuum system with L/s cryo pumps

19 heater for Solar Cell manufacturing Complete DN150 vacuum system with 450 C temperature range

20 XHV Physics & Analytics

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22 pipe trace heater systems Thermo Regulating devices Customized Monitoring systems

23 Central fab controller Anlagen- und Komponententechnik GmbH Dresden

24 Semi central fab controller

25 Semi central fab controller -Group Anlagen- und Komponententechnik GmbH Dresden

26 Signalisation & Monitoring systems with increasing steps of function control TOTAL PROCESS MONITORING INDIVIDUAL JACKET CONTROL HIGH / LOW DEVIATION CONTROL CONTROL DESK SIGNALISATION

27 HEMI HEATING pipe trace heater system MAIN FEATURES 200 C TEMPERATURE CLEANROOM COMPATIBLE LOW PARTICLE LOAD IN CONFORMITY WITH UVV LOW COO STATUS INDICATION TOTAL PROCESS MONITORING INDIVIDUAL JACKET CONTROL HIGH / LOW DEVIATION CONTROL CONTROL DESK SIGNALISATION FLEXIBLE FIT TOTAL COVERING NO COLD SPOTS STABLE CONSTRUCTION LOW CONNECTING POWER LOW THERMAL LOSSES

28 & Advanced Heater Systems + cost saving + maintenance friendly + full range of heater solution

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30 heater systems thank you for your attention end