1 SOFT START AUU AES W W W. K S I S T. O acuum alves Two-Stage alves
2 Features and Benefits Provides soft pumpdown and isolation of your vacuum system Reduces particulate contamination during early turbulent pumpdown Adjustable conductance for variable pumpdown speed Eliminates the need for small bypass lines that clog easily Bellows-sealed poppet valves Bellows are formed for less particle trapping and a longer cycle life Angle or inline option Available in five port diameters ranging from 1 to 4 inches hoice of KF flanges, F flanges, or weld stubs, as well as ISO-Universal flanges for larger port sizes cycle life. The bellows stroke length is optimized to ensure a longer cycle life while maintaining a high conductance. Elastomer seal choices include iton and hemraz, which has a higher chemical resistance. acuum exposed parts are clean and free of lubricants. Options include air solenoids for electropneumatic control and a limit switch for the main valve for remote indication of valve position (open or closed). If a heated Two-Stage alve is required, please refer to our Jalapeño alve brochure. For more information, call KS Instruments at Or visit our website at Applications To achieve a soft pumpdown and isolate your vacuum system, KS recommends its Two-Stage alve. It integrates a small bypass valve into an isolation valve, significantly simplifying system setup and reducing costs. The Two-Stage alve is best suited for high vacuum applications, specifically semiconductor or optical processing for which a cleaner environment is necessary. With the integrated slow pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage to your product. Description Traditionally, the method to soft start a vacuum system had been to run a secondary bypass line with a small orifice valve around the main vacuum isolation valve. The use of bypass lines in semiconductor nitride and etch processes requires special engineered designs that are hardware intensive. These lines also clog easily and result in higher costs. KS has designed the Two-Stage alve specifically to accommodate space constraints and soft start the system in two steps. In the first stage, the bypass valve allows slow pumping from atmospheric pressure to a user-specified vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. The Two-Stage alve features a removable small orifice within the bypass valve to vary slow pump speeds. The standard bypass orifice diameter is 0. inches. See specifications for other available sizes. A normally closed, pneumatically actuated valve at both stages, the Two-Stage alve is offered with an optional thumbscrew or micrometer head for the bypass valve. This allows for flow adjustment by limiting the stroke. The body is made of high grade, corrosion resistant, 304 stainless steel using clean, tungsten inert gas (TIG) welding for significantly fewer entrapment areas, resulting in less contaminant build-up. A formed 321 stainless steel bellows, not edge-welded, prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valve s Specifications - ain Port Size in. (W) 1.0 (25) 1.5 (40) 2.0 (50) 3.0 (80) 4.0 (100) Angle 3.0 (1.4) 6.0 (2.7) 13.8 (6.3) 20.4 (9.3) 26.3 (11.9) Weight lb (kg) onductance onductance (iters/second) Specifications acuum Range Suggested ominal Pressure Supply Helium eak Rate aximum Bakeout Temp. imit Rating Single Pole, Single Throw In-ine 3.0 (1.4) 6.6 (3.0) 17.5 (8.0) 28.5 (13.0) 38.5 (17.5) Pressure (Torr) Specifications - s Available Pneumatic ylinder Displacement olume Approximate Pneumatic losing Time Blow-By Pressure aximum Internal Spring losing Pressure ylinder olume in 3 (cm 3 ) 3.6 (59) 4.8 (79) 13.3 (218) 27.6 (453) 27.6 (453) Atmosphere to 1.0 x 10-9 Torr 65 psig 1.0 x 10-9 std cc/sec Body 5A A 5A - 30 D Actuation Time (msec) Opening (closing) 500 (1,000) 1,000 (2,000) 1,000 (2,000) 2,000 (2,000) 2,000 (2,000) Blow-By Pressure psia W 100 W 80 W 50 W 40 W 25.,.063,.125,.187 and custom 0.25 in 3, (4.1 cm 3 ) 100 msec 45 psia 40 psia ax. Internal Spring losing Pressure psia
3 W 25 Angle Dimensions W 25 Inline Dimensions A 2.47 (63) 2.61 (66) 2.47 (63) B 1.97 (50) 2.02 (51) 1.88 (48) A 4.97 (126) 5.62 (143) 5.37 (136) W 25 Two-Stage alve Ordering Information Body onfiguration imit onfiguration oltage* AK KF 25 Angle IK KF 25 Inline AT 1 Tube Angle IT 1 Tube Inline A F 2 1 /8 Angle I F 2 1 /8 Inline w/ imit w/o imit iton hemraz 50/60 Hz A 50/60 Hz A 50/60 Hz 220A 50/60 Hz : Add the price of the options to the price of the body. Sample part number: AK---. * includes one solenoid each for the bypass and main valve.
4 W 40 Angle Dimensions W 40 Inline Dimensions A 4.00 (102) 4.03 (102) 3.85 (98) B 3.00 (76) 3.03 (76) 3.85 (98) A (305) (307) (297) W 40 Two-Stage alve Ordering Information Body onfiguration imit onfiguration oltage* AK KF 40 Angle IK KF 40 Inline AT 1 1 /2 Tube Angle IT 1 1 /2 Tube Inline A F 2 3 /4 Angle I F 2 3 /4 Inline w/ imit w/o imit iton hemraz 50/60 Hz A 50/60 Hz A 50/60 Hz 220A 50/60 Hz : Add the price of the options to the price of the body. Sample part number: AK---. * includes one solenoid each for the bypass and main valve.
5 W 50 Angle Dimensions W 50 Inline Dimensions A 4.75 (121) 4.81 (122) 4.61 (117) B 3.50 (89) 3.55 (90) 3.35 (85) A (305) (307) (297) W 50 Two-Stage alve Ordering Information Body onfiguration imit onfiguration oltage* AK KF 50 Angle IK KF 50 Inline AT 2 Tube Angle IT 2 Tube Inline A F 3 3 /8 Angle I F 3 3 /8 Inline w/ imit w/o imit iton hemraz 50/60 Hz A 50/60 Hz A 50/60 Hz 220A 50/60 Hz : Add the price of the options to the price of the body. Sample part number: AK---. * includes one solenoid each for the bypass and main valve.
6 W 80 Angle Dimensions W 80 Inline Dimensions KF/F F Tube A 5.50 (140) 5.59 (142) 5.25 (134) KF/F F Tube B 4.00 (102) 4.09 (104) 3.75 (95) A (457) (462) (444) W 80 Two-Stage alve Ordering Information Body onfiguration imit onfiguration oltage* A F 80 Angle I F 80 Inline AK KF 80 Angle IK KF 80 Inline AT 3 Tube Angle IT 3 Tube Inline A F 4 5 /8 Angle I F 4 5 /8 Inline w/ imit w/o imit iton hemraz 50/60 Hz A 50/60 Hz A 50/60 Hz 220A 50/60 Hz : Add the price of the options to the price of the body. Sample part number: AK---. * includes one solenoid each for the bypass and main valve.
7 W 100 Angle Dimensions W 100 Inline Dimensions KF/F F Tube A 6.50 (165) 6.65 (169) 6.25 (159) KF/F F Tube B 4.88 (124) 5.03 (128) 4.63 (118) A (457) (465) (444) W 100 Two-Stage alve Ordering Information Body onfiguration imit onfiguration oltage* A F 100 Angle I F 100 Inline AK KF 100 Angle IK KF 100 Inline AT 4 Tube Angle IT 4 Tube Inline A 6 F Angle I 6 F Inline w/ imit w/o imit iton hemraz 50/60 Hz A 50/60 Hz A 50/60 Hz 220A 50/60 Hz : Add the price of the options to the price of the body. Sample part number: AK---. * includes one solenoid each for the bypass and main valve.
8 Spare s Port Size in (mm) 1.0 (25) 1.5 (40) 2.0 (50) 3.0 (80) 4.0 (100) ain alve Internals, iton Seals imit iton Seal Set * hemraz Seal Set * * In each set, the bonnet and nosepiece seals are of the material specified, and all other seals are of their original material. Replacement Solenoid alves oltage and Frequency 50/60 Hz 12 D A 50/60 Hz A 50/60 Hz 220A 50/60 Hz Watts alve Spare s, iton Seals icrometer Internal Rebuild Kits onversion Kits ** ** onversion kits are for converting one bypass actuator type to another (i.e. thumbscrew to micrometer head). KS Global quarters 2 Tech Drive, Suite 201 Andover, A Tel: Tel: (in USA) Web: KS acuum alves Six Shattuck Road Andover, A Tel: Two-Stage alves - 9/ KS Instruments, Inc. All rights reserved. KS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst is a trademark of KS Instruments, Inc.
Mark One Control Valves Body Assembly Fail-safe spring Heavy Guiding Two widely spaced guides on large-diameter stem. Plug does not guide in retainer O S High Thrust Cylinder Actuator Three standard sizes
Technical Note 84-3-424, Rev CA September 212 Rosemount Radar Transmitters Guidelines for Choosing and Installing Radar in Stilling Wells and Bypass Chambers INTRODUCTION This document provides a guideline
Products Air Conditioner - General Specifications, Sizing, Selection, & Options................................. 372-374 Air Conditioners Type 12 Mini Panel-Mounted...............................................................
GENERAL VALVE Four-way Diverter Valve VALVES & MEASUREMENT Table of Contents GENERAL VALVE FOUR-WAY DIVERTER VALVE Features and Benefits... 2 Types of Operation Gear Operated... 4 Hydraulic Operated...
Quick Start Guide DVC6200 Digital Valve Controllers Fisher FIELDVUE DVC6200 Series Digital Valve Controllers Contents Before You Begin... 2 Step 1. Install the DVC6200 on the Valve... 3 Step 2. Connect
Series 910 Transducer Operation and Maintenance Manual Series 910 Transducer Part # 100014436 Series 910 Transducer Part # K Please fill in the transducer part and flange type numbers in the space above
Principles of Direct-Operated Regulators Introduction Pressure regulators have become very familiar items over the years, and nearly everyone has grown accustomed to seeing them in factories, public buildings,
CATALOG DIRECT MOUNT 08.2010 DIRECT-MOUNT SYSTEMS F O R T H E N A T U R A L G A S I N D U S T R Y ISO 9001: 2008 Certified Quality System Stabilized Connectors Stabilized Connectors P to Static Adapters
Kompressoren Adsorption Dryer AD Adsorption Drying: why? Modern industries require compressed air that is increasingly filtered with low dew point and condensate. Today, the equipment is more sophisticated
GX 3-Way Valve and Actuator Product Bulletin Fisher GX 3-Way Control Valve and Actuator System The Fisher GX 3-Way is a compact, state-of-the-art control valve and actuator system, designed to accurately
SEE VICTAULIC PUBLICATION 10.01 FOR DETAILS Victaulic Tri-Service valve is an assembly (shipped as individual components) of a standard Victaulic butterfly or Vic-Plug valve and a check valve. This combination
PROVEN SOLUTIONS FLIUD END MACHINING FLUID END MACHINING PROVEN SOLUTIONS & TOOLING SECO PROVEN SOLUTIONS WILL IMPROVE YOUR PROCESS When you partner with Seco, our team of metalworking experts evaluate
WÄRTSILÄ 34DF PRODUCT GUIDE Copyright by WÄRTSILÄ FINLAND Oy All rights reserved. No part of this document may be reproduced or copied in any form or by any means (electronic, mechanical, graphic, photocopying,
Data Sheet Models MT 3809 & 3819 Brooks Models MT 3809 and 3819 Metal Tube Variable Area Flowmeters with Optional Transmitters and Alarms Broad range of flow capacities 2% Full scale accuracy Versatile
GE Inspection Technologies Eddy Current Probes and Accessories Catalogue GE Inspection Technologies A global leader in technology-driven inspection solutions that deliver productivity, quality and safety
Instruction Manual 88 6//06 Veri-Flame Single Burner Monitoring System Model 5600 Version.2 Modulation Model No Purge Model Purge Model Copyright Disclaimer notice Copyright 2006 by Eclipse, Inc. All rights
Control Valve Product Guide Experience In Motion Experience In Motion Control valve solutions for all of your applications 6 PERFORMANCE! Valve Sizing and Selection Suite Performance! puts the power of
Current Limiting Protector For Systems rated 2.8-38kV and continuous currents through 5000A. Arc Flash and Arc Blast reduction Network protection SCADA adaptable Indoor/outdoor application Professional
Section: R100 Bulletin: R100.51 Date: 07/13 Supersedes: New TRUST Your Water Level Steam you can depend on, 24/7 Boiler Level Indication System Boiler Level Indication System Where s your water? For over
Design Engineering Guide Page General Standard NFP Mounting dditional Information Cylinder Basics Tie Rod Mount Flange Mount Side Mount and Lug Mounts Pin Mount and Trunnion Mount Solid Flange Mount, Key
Reduced Volume - Improved Performance - Flexible Packaging The patented Direct Flow technology provides the flexibility to optimize the air system performance to size ratio, meeting the demands of today
GENERAL VALVE Twin Seal Double Block and Bleed Plug Valve GENERAL VALVE 2 TABLE OF CONTENTS GENERAL VALVE TWIN SEAL Installation.... 4 Operation.... 5 Series 400, 800 & 900 Integral Bushing/Retained Ring
A New Generation in Magnetic Level Indication Capabilities 2. The Next Generation of MLIs: It took a whole new company to bring it to you. Orion Instruments was created with one objective: to devise new