Inaugural session of the Microsystems Chair

Transcription

1 Inaugural session of the Microsystems Chair Prof. Laurent A. FRANCIS Louvain-la-Neuve, March 18 th, 2008

2 Macro-... Micro-... Nano-systems Meter (m) Millimeter (mm) Micrometer (µm) Nanometer (nm) Electromechanical MEMS NEMS MICROSYSTEMS Nanobots (fiction!!!)

3 Moore, and after?... Gordon E. Moore (born Jan. 3rd, 1929) Moore s law 19 April 1965 in Electronics Magazine More Moore Beyond CMOS More than Moore [Source: Intel]

4 European research context - Horizon 2020 «More than Moore» from ENIAC Strategic Research Agenda 2006 In addition to the dedicated non traditional CMOS semiconductor process technologies needed to implement high-voltage, low power, analogue, and radio frequency devices, solid state lighting, new technologies are needed to realise mechanical, thermal, acoustic, chemical and optical functions. Nano- and bio- technology are also around the corner (...) In the world of Ambient Intelligence it will eventually lead to a direct interface with the human body or the environment; embedding power sources with the electronics; enhancing electronics with non-electronic functions. More than Moore enables functions equivalent with the eyes, ears, noses, arms and legs of human being, along with the brain provided by microprocessor and memory subsystems.

5 Where are found microsystems? Automotive: airbags accelerometers, tyre pressure sensors, stability gyroscopes, exhaust sensors,... Aeronautics/spatial: health monitoring, altimeter, compass,... Less weight, more human-machine interfacing. Telecoms: RF-MEMS switches, acoustic resonators and filters, optical switches (MOEMS),... Biomedical: implantable electrodes, cochlear implants, drug delivery miropumps, pressure sensors for surgery, point-of-care biosensors,... Environmental monitoring: gas and fluid sensors, humidity sensors,... Industrial monitoring: flux, temperature, vibrations,... Consumers electronics and leisure

6 Low power Fast answer New physics Small (almost invisible) Niche markets Large volumes production MEMS Law : One MEMS = One process Strengths Weaknesses Low forces Opportunities Threats Reliability Full autonomy

7 Microelectronics research at UCL - a brief history One of the earliest european centre for microelectronics Silicon technologies (Prof. Jespers, Trullemans and Van de Wiele) 1990 Technologies based on Silicon-on-Insulator (SOI) Microwave components, quantum devices 1998 CeRMiN established: UCL research centre for Micro and Nanoscopic Materials and Electronic Devices, true multidisciplinarity 2000 MEMS, sensors (biochemical, optical), organic devices 2005 to 2010 NANOTIC - Walloon region excellence program at UCL convergence of ICT, nanotechnologies and biotechnologies 2007/2008 WINFAB and Microsystems Chair

8 Example of UCL microsystem: MEMS-CMOS air flux sensor MEMS CMOS Circuit

9 1 st floor: ballroom Technical area Total cleanroom laboratory area about 1000 m 2 on 2 levels Working area of Class M1 at rest (< 10 particules of 100 nm/ft 3 air) Equipment park with more than 40 specialized tools dedicated to microand nano-fabrication Opened to industrial collaborations Baseline process: 3 wafer size, larger wafer sizes possible Web:

10 A Microsystems Chair at UCL To strenghten existing research partnerships (Académie Louvain, regional... european... international levels) and create new partnerships in the field of MEMS and NEMS towards More than Moore: Autonomous systems: wireless, battery-less sensors networks Co-integrated MEMS/CMOS component and more organic electronics Nano-bio convergence (implantable devices, bio-mimetism) To foster developments and industrial implementation of innovative microsystems in direct collaboration with regional industries, SME s, research centers and spin-off s (in line with Wallonia s Marshall Plan) To develop with key partners a MEMS center of expertise in Belgium To bring more education related to micro- and nanotechnologies through new cursus and regular seminars at the Louvain School of Engineering

11 The Microsystems Chair is supported by uclouvain.be/fondation-louvain.html

12 Inaugural Session: Keynote Presentations Dr. Bernhard Schönlinner EADS Innovation Works RF MEMS at EADS: Concept, Designs, and Applications Jérémie Bouchaud WTC Wicht Technologie Consulting MEMS Industry and Market Overview

13 Acknowledgements For the Microsystems Chair: The generous sponsors and godfathers of the Chair The rectoral council of UCL Caroline Mouligneau, Catherine Dumont and Nicolas Grosjean (Fondation Louvain) Jean-Didier Legat (Dean EPL - Louvain School of Engineering) Luc Vandendorpe (President Electrical Eng. Dpt.) Denis Flandre (Microelectronics Lab.) Jean-Pierre Raskin (Microwave Lab.) And more precisely, for the success of the «MEMS and Nanotechnology» day: The invited speakers for their presence: Harrie Tilmans, Sylvain Ballandras, Lionel Buchaillot, Herc Neves, Bernhard Schönlinner and Jérémie Bouchaud F.R.S.-FNRS and their graduate schools MAIN and MUSICS for sponsorship Bernard Nysten and Isabelle Huynen (NanoWal) Isabelle Sion Marie Roland, Dominique Hoebeke, Isabelle Decoster The scientific and technical staffs of the Electrical Eng. Dpt. And many many many others...

14 Thank you for your attention and enjoy now the keynote presentations! Contact: Website: