Micro-Nano Technology XIII

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1 Brochure More information from Micro-Nano Technology XIII Description: Series: Key Engineering Materials, Volume 503 Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology.. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Review from Book News Inc.: The 81 papers cover the micro/nano transducer/actuator/robot, microfluidic devices and systems, micro/nano fabrication and measurement technologies, microfluidics and nano fluids, nano material research/nanotube/nanowire devices, MEMS/NENS and applications, nanometer biological/nano medicine, and packaging technology. Among specific topics are micro-machined electrochemical seismic sensors with interdigital electrodes, a simple method for depositing DNA on the mica, an analytical model of a fluxgate system, analyzing broken wires during gold wire bonding process, and an integrated micro-sensor system to gather meteorological information. Contents: Table of Contents (82 papers, 10 per page listed) The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid Meng Zhao, Ji Bin Zou, Jing Shang A Monolithic Integrated Pressure Sensor Zheng Yuan Zhang, Cao Yang, Yong Mei, Zhi Cheng Feng, Xiao Gang Li, Jian Gen Li, Guo Xiang Hu A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope Qiang Li, Xiao Yun Tan, Guan Shi Wang Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports Wu Zhou, Bei Peng, Xiao Hong Hao Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror Chi Zhang, Yun Han Chen, Zheng You Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane Ming Xin Xue, Meng Wei Liu, Xin Li, Jun Hong Li New Isolation Optimization Method of RF MEMS Capacitive Switches Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors Chuan Guo Dou, Yan Hong Wu, Heng Yang, Xin Xin Li MEMS Grating with Interdigitated-Comb Structure Heng Zhang, Jun Yao, Feng Gang Tao, Xu Ye Zhuang Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor Yu Xin Li, De Yong Chen, Jun Bo Wang Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes

2 Guang Bei Li, De Yong Chen, Wen Tao He, Jun Bo Wang Optimal Design of Micro Plastic Heat Radiator Yue Han, Ya Jun Zhang, Da Ming Wu, Jian Zhuang, Kai Fang Dang A Miniaturized Piezoelectric Wind Flutter Generator Xing Qiang Zhao, Zhi Yu Wen, Zhi Gang Du Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS Wen Tao He, De Yong Chen, Guang Bei Li, Jun Bo Wang A Flush-Mounted Resonant Ice Detection Sensor with High Sensitivity Qiang Shi, Jun Bo Wang, De Yong Chen, Yan Long Shang Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers Yan Liu, Yu Long Zhao, Lu Sun Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology Tong Liu, Xiao Ping Liao Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films Xiu Jian Chou, Miao Xuan Du, Yong Bo Lv, Jun Liu, Wen Dong Zhang Heating Carve Technique for Polymer Microfluidic Microchannel Xiao Wei Han, Wei Wang, G.H. Ye, Xiao Wei Liu, Li Tian, Zhi Gang Mao Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness W.P. Chen, Yi Bo Yang, Y. Yu MEMS Bionic Vector Hydrophone Guo Jun Zhang, Chen Yang Xue, Ji Jun Xiong, Wen Dong Zhang, Xiao Yao Wang, Lin Xian Liu, Xiao Yang Ge Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator Zhen Lu Wang, Xue Jin Shen, Ling Zhou, Xiao Yang Chen Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer Xing Hua Wang, Zhi Hua Chen, Ding Bang Xiao, Xue Zhong Wu An Interface for Low-Q Micromachined Gyroscope Guan Shi Wang, Mu Tao, Xiao Wei Liu A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer Bing Jun Lv, Peng Fei Wang, Dong Bo Wang, Jun'an Liu, Xiao Wei Liu Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide Xiao Yuan Ren, Li Shuang Feng, Zhen Zhou, Huai Yong Yu, Xue Wen Deng A Simple Method for Depositing DNA on the Mica Yu Zhang Wang, Jing Jie Sha, Lei Liu, Hong Yan Fu, Yun Fei Chen A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution Yu Lv, Hong Juan Cui, Pei Tao Dong, Zhi Hua Chen, Xue Zhong Wu Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical Gyro Hui Lan Liu, Ru Ya Li, Huai Yong Yu, Jun Jie Wang, Zhi Chao Jiao Analysis and Improvement of a 3 Axis Accelerometer Shi Tao Wang, Yu Bin Jia, Bin Zhen Zhang, Xue Song Liu, Qin Wen Huang, Yi Long Hao A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror Wei Min Wang, Feng Gang Tao, Jian Fei Zhang, Jun Yao

3 Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes Bing Mo, Huo Zhou, Qi Zheng, Si Hao Chen, Chao Dong Ling Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope Bing Mo, Qi Zheng, Si Hao Chen, Huo Zhou, Chao Dong Ling Design and Simulation of Multi-Microchannel for Thermal Wind Sensor Rong Sen Hong, Wen Zhong Lou, Hui Chao Liu, Yue Zhao Study of High Sensitivity Sensor Based on the Principle of Photoionization Kun Wang Niu, Ting Liang, Fang Yang, Qing Meng, Kai Wang, Ji Jun Xiong Design and Simulation of a Capacitive Biaxial Microaccelerometer Yu Liu, Zhi Yu Wen, Li Chen, Hong Yun Yang Air Gap Flux Density for the Planar Motor Xiao Hong Hao, Xue Kang Li, Wu Zhou, Bei Peng A High-Performance Mash Fourth-Order Sigma-Delta Modulator Wen Yan Liu, Bin Zhang, Long Chen, Chao Gao, Xiao Wei Liu Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation Yan Long Shang, Jun Bo Wang, De Yong Chen, Qiang Shi, Guang Bei Li A Novel Preconcentration Method for Microchip Based Electrophoresis and its Numerical Simulation Hao Yuan Cai, Xing Chen, Hui Li, Da Fu Cui Simulation of Injection Molding of Ultra-Thin Light Guide Plate with Hemispherical Microstructures Peng Wei Dong, Zhong Li Zhao, Da Ming Wu, Ya Yun Zhang, Jian Zhuang Design of a MEMS Broadband Microstrip Patch Antenna Based on Minkowski Fractal Boundary Chong Ying Lu, Li Xin Xu Investigation on Transmittance and Uniformity of Light Diffuser Plate of Scattering Optical Transmission Polymer Xiao Xiang He, Da Ming Wu, Ya Jun Zhang, Jian Zhuang, Xiu Ting Zheng, Yang Zhou Analytical Model of Fluxgate System Ming Yuan Ren, Xiao Wei Liu, Hao Ran Li, Zhi Gang Mao Optimal Design and Simulation of a Cross-Plane Micro-Thermoelectric Generator Xiao Liang Zhu, De Sheng Li, Ben Dong Liu, Jiang Zhe Eliminating the External Libration Sound for the Optical Microsphere-Taper Coupling Structure Li Wang, Peng Fei Xu, Yu Guang Zhang, Ying Zhan Yan, Shu Bin Yan Development of a Portable Phosphate Detection System Using Cobalt Based Microelectrodes Bei Lei Deng, Jian Hua Tong, Yin Bai, Chao Bian, Gui Li Yan, Hong Zhang, Shan Hong Xia Effect of Micro Structures of Diffusers on Optical Properties of LED Light Yang Zhou, Da Ming Wu, Xiu Ting Zheng, Ya Jun Zhang, Jian Zhuang, Xiao Xiang He A Refined Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order Reduction Le Guan, Jia Li Gao, Zhi Wen Wang, Guo Qing Zhang, Jin Kui Chu A Novel Micro Mirror Spectrometer and Test Experiment Biao Luo, Zhi Yu Wen, Hai Tao Liu, Li Chen, Rong Rong Qi A Ground Target Positioning Method Facing Small UAVs Qi Guo, Shao Peng Liu, Wei Xiong, Zhao Ying Zhou

4 Study of a MEMS Short-Circuit Fuse Based on Electro-Thermal Theory Yue Zhao, Dong Guang Li, Wen Zhong Lou, Long Fei Zhang, Jian Hua Li, Mao Bo Fang Simulation on S Parameter of an X-Band Wilkinson Power Divider He Chao Liu, Xiao Ping Liao Application of ICP Deep Trenches Etching in the Fabrication of FBAR Devices Zheng Guo Shang, Dong Ling Li, Sheng Qiang Wang, Jian Hua Liu Analysis of Broken Wires during Gold Wire Bonding Process Ming Qiang Pan, Tao Chen, Li Guo Chen, Li Ning Sun A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors Peng Fei Wang, Yuan Yuan, Dong Bo Wang, Xiao Wei Liu, Jun'an Liu An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency Han Chen, Hua Rong Design and Simulation for Tri-Axial Piezoresistive MEMS Accelerometer Meng Liu, Wei Zhang, Yi Long Hao Emulated Analysis of the Preview-LQG Controller for Micromachined Tunneling Gyroscope Yi Fang Liu, Ling Yun Wang, De Zhi Wu, Dao Heng Sun Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology Shao Hua Wu, Zhan Zhao, Li Jun Guo, Li Dong Du, Li Xiao, Zhen Fang, Jun Juan Zhao, Yun Dong Xu Research on the Hydrophobicity of Black Silicon Based on Virtual Process Xin Li, Chen Wang, Guang Yi Sun, Xin Zhao, Hai Xia Zhang, Gui Zhang Lu Investigation of Silicon Lapping and Polishing Technique for Micro-Inertial Device Zhang Long, Zhu Jian The Microfluid-Driven Control by Forced Wave Ping Zhu Analysis and Simulation of Micro-Fluidic Inertial Switch Yi Lin, Tao Yang, Ting Ting Liu, Guang Yan Chen, Chao Wang Experimental Study on a Small Flux, High Pressure Peristaltic Micropump Min Du, Zheng Mao Lu, Xiong Ying Ye Numerical Simulation of Multi-Physical Fields Coupling and Design of a Digital Microfluidics Chip Tao Chen, Li Guo Chen, Ming Qiang Pan, Ming Xiang Ling, Li Ning Sun Design and Simulation of Micro-Power Generator Based on Piezoelectric Effect for MEMS Devices Applications Xiu Jian Chou, Ya Ting Zhang, Mao Xiang Guo, Tao Guo, Ji Jun Xiong Structures and Dielectric Properties of (Pb, La)(Zr, Ti)O3 Antiferroelectric Thick Films Prepared by Different Sintering Procedures Wen Ping Geng, Xiu Jian Chou, Yong Bo Lv, Ji Jun Xiong, Wen Dong Zhang Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius Hua Rong, Chang Ling Yu Boron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVD Xiu Qin Wang, Jian Ning Ding, Ning Yi Yuan, Shu Bo Wang Design and Realization of Modular MEMS-Based Attitude Measurement and Control System Based Wireless Sensor Networks Shao Peng Liu, Zhao Ying Zhou, Xing Yang, Qiu Sheng Liu, Qiong Wang, Qi Guo

5 Effects of Different Package Structures on Thermal Properties of High Power White LED Zhe Ran Sun, Da Ming Wu, Ya Jun Zhang, Jian Zhuang, Kai Fang Dang Design of Ethernet Interface Based on FPGA and W5300 Sheng Kun Li, Xue Song Wang Size-Dependence on Load Properties of a Silicon Nanobeam Jing Wang, Hong Yan Zhang Integrated Micro-Sensor Detection System of Meteorological Information Hui Chao Liu, Wen Zhong Lou, Rong Sen Hong, Shao Peng Zu Design of a Digital Decimation Filter for High-Precision 4-Order Sigma-Delta ADC Wei Ping Chen, Qiang Fu, Xiao Wei Liu, Yan Xiao, Bin Zhang, Yu Heng Yang Detecting DNA Using a Single Graphene Pore by Molecular Dynamics Simulations Wei Si, Jing Jie Sha, Lei Liu, Jia Peng Li, Xiao Long Wei, Yun Fei Chen An Improved Sensitivity Non-Enzymatic Glucose Sensor Based on a Nano-Gold Modified Ag Electrode Jia Hong He, Qiang Xu, Zhi Qiang Gao, Zhong Rong Song Study on Anodic Bonding Process of Slender Vitreous Body Ming Qiang Pan, Li Guo Chen, Tao Chen, Zhen Hua Wang, Li Ning Sun Trial-Constructing a Novel Image of AAO Template Hong Mei Zheng, Yu Cheng Wu, Xin Min Huang, Jie Wu Cui, Yan Wang An Alignment Method for Lift-Off on Shallow Grooves in Transparent Substrates for Integrated Dual Grating Structures Jin Yang Feng, Feng Chen, Yuan Fang Shang, Xiong Ying Ye Composite Content Influence on Multiwall Carbon Nanotubes-SiO2 Film Humidity Sensors at AC Testing Tuo Li, Xiao Wei Liu, Zhen Gang Zh Ordering: Order Online - Order by Fax - using the form below Order by Post - print the order form below and send to Research and Markets, Guinness Centre, Taylors Lane, Dublin 8, Ireland.

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