Data Usage. SEMICON Japan ISMI NGF Briefing and e-manufacturing Workshop December 2, 2008

Transcription

1 Data Usage Accelerating Manufacturing Productivity SEMICON Japan ISMI NGF Briefing and e-manufacturing Workshop December 2, 2008 David Stark Copyright 2008 SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

2 Agenda Two projects that require high quality data from equipment: Predictive Preventive Maintenance (PPM) Enhanced Equipment Quality Assurance (EEQA) What, Why, Who, When,

3 Agenda - PPM What is Predictive Preventive Maintenance (PPM)? Why develop and implement PPM? cost and productivity impact Who is already doing PPM (other industries)? will perform PPM in the semiconductor industry? equipment supplier and device maker responsibilities When will PPM development and deployment occur? Resources

4 What is PPM? PPM is an application that uses mathematical algorithms applied to tool and process data to sense tool component failure and tool performance degradation before they occur Simple example: Your vehicle Change the oil and filter every 3 months or 3000 miles is a time-based or usebased scheduled maintenance PPM applied to oil and filter change may monitor oil viscosity, pressure drop across the filter, oil clarity, engine resistance at idle, etc., and report a countdown until oil and/or filter change is required

5 What is PPM? PPM for semiconductor factories will apply mathematical models to equipment and factory data to predict tool failure and then act on those predictions to optimize factory productivity PPM will be developed for key equipment where Technically possible, and Adequate business value exists This is NOT every tool Equipment side PPM will monitor tool and predict failure Factory side PPM will make business rule based decisions about scheduling PM, parts, personnel, and WIP

6 Why Develop and Implement PPM? Cost and productivity impacts Reduced unscheduled equipment downtime, since impending failure is sensed and advance warning is issued Avoid sudden disruption to work in progress (WIP) flow through the factory [reroute WIP] Avoid complete loss [scrap] or rework cost for in-process WIP Reduced time to diagnose and repair since PPM identifies failure part or subsystem [lower maintenance cost] Equipment engineer can review the correct maintenance procedure Needed parts identified in advance and pulled from inventory or JIT Increased net uptime/availability

7 Why Develop and Implement PPM? Cost and productivity impacts Reduced cost of parts, since lifetime of scheduled parts, replaced under time-based PM policies may be extended Reduced variability of tool availability decreases cycle time (modeling shows 5-10% cycle time reduction for zero variability in MTBF and MTTR in reference model)

8 Who is already doing PPM? (in other industries) PPM is famous in Automotive industry in the modern automobile, especially the engine Toyota in the car/truck assembly line Aeronautics General Electric aircraft engines Defense and Space programs Advanced fighter jet NASA and International Space Station Heavy Industry John Deere, Komatsu in earth moving equipment Power plant generators

9 Who will perform PPM in IC industry? Equipment suppliers will develop PPM in the tool envelope most complete data resident knowledge of tool and component design installed base field performance Device makers can add a layer to the equipment model for recipe mix, metrology, or yield data will develop the factory-side applications that use the equipment PPM application signals to make decisions about maintenance scheduling, messaging, WIP routing, and parts

10 Equipment PPM Equipment Data PCA Visualization Prediction Information

11 ISMI PPM Interaction with Equipment Suppliers Equipment Supplier 1 MC MC MC MC MC WG ISMI 1:1 1:1 1:1 1:1 1:1 Equipment Supplier 2 Equipment Supplier 3 Equipment Supplier 4 Focused engagement in H Development Demo - Pilot Generic guidelines to full community 1:1 Equipment Supplier 5 Equipment Supplier n

12 Documentation Pilots Demos Development When Will PPM Development and Deployment Occur? Contracting

13 PPM Resources from ISMI ISMI Consensus Preventive and Predictive Maintenance Vision Guideline ISMI Predictive and Preventive Maintenance Equipment Implementation Guideline

14 PPM Questions and Answers

15 Agenda Enhanced Equipment Quality Assurance (EEQA) What is EEQA? Why develop and implement EEQA? cost and productivity impacts Who will perform EEQA? equipment supplier and device maker responsibilities When will EEQA development and deployment occur? Resources

16 What is EEQA? EEQA is an element of the Equipment Engineering System (EES) that has been proposed by JEITA in collaboration with International SEMATECH and SELETE since 2000 EEQA is using Equipment Engineering Data to enhance the ability to establish and validate the equipment s performance The foundation is the Equipment Engineering Data Data that adequately describes the functional performance of the equipment Should utilize Interface A and the metadata structure

17 Data Hierarchy EQPT Specific tool ID serial # MODULE 1..n Transfer, Process 1, Process 2, SUBSYSTEM 1..n Gas, Vacuum, RF, Chuck, COMPONENT 1..n MFC1..n, shutoff valve 1..n This dataset, the Interface A metadata, includes all atomic data, static and dynamic, for the subject tool

18 What about data for EEQA? EEQA requires IDM access to all the Interface A atomic metadata, AND Functional performance data Time dependant hardware performance Example: wafer handling wafer move performance distributions, pump down time distributions, others Trace data transformation to information Example: MFC, Power Supply, RF Match, Pumping Ramp time, Overshoot amplitude, Settling time, Integrated performance to setpoint (mean, stdev), Shutoff time, transients/noise Effective process time In a Standardized Way, so multiple applications can Uniformly Access the data

19 Why Develop and Implement EEQA? Cost and productivity impacts to device maker All tool data consuming applications will access the structured dataset for their purpose EEQA functional performance value-added data available from the equipment in a standardized way Decreases cost to develop applications Increases effectiveness of applications [PPM, ECM, APC,VM,...] Equipment Supplier can use EEQA concepts for Improved quality in-house and up the supply chain Improved field support capability Installation validation

20 Who will Perform EEQA? Equipment suppliers most complete data resident knowledge of tool and component design installed base field performance Device makers will develop the VMfactory-side applications that use the equipment EEQA data ECM APC PPM Graphic from the JEITA documents

21 When will EEQA Development and Deployment occur? Develop functional performance data from metadata and establish ability to collect the value added data using the Interface A port (through 2009)

22 Resources JEITA 300mm Prime Guidelines Requirement on Enhanced Equipment Quality Assurance upon Equipment Installation (EEQA) Translation%20V1.0.pdf

23 EEQA Questions and Answers