Workshop Integrated Navigation Delft 29 oktober 1993 Amsterdam 15 december 2006 Overzicht (Low-Cost) Micro-Electro-Mechanical Systems (MEMS) Sensoren Sam Storm van Leeuwen Vliegproef ingenieur samsvl@nlr.nl 15 december 2006
Wat is MEMS? Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. Workshop Integrated Navigation 19-12-06 2
MEMS Sensoren per meetgrootheid Versnelling Hoeksnelheid Magnetische veldsterkte (kompas) Druk (hoogte/ snelheid) Temperatuur Tijd (atomic clock 1 cm 3, stability 1*10-11 ) Workshop Integrated Navigation 19-12-06 3
Integratie GPS met... GPS (koers en stand) Inertial sensors (versnelling, hoeksnelheid, veldsterkte) GSM Locale (indoor) plaatsbepalingssystemen Signals of Opportunity (WLAN, UWB, RFIS, radio, TV) (e)loran Map matching/ (differential) wheel speed sensors Workshop Integrated Navigation 19-12-06 4
Versnellingssensoren Eigenschappen Physical Mass [gram] Dimension [cm 3 ] Mounting Power [V, ma, mw] Environmental Temp range [Cel] Vibration [g] Shock [g] Ambient pressure [kpa] Operational Input range [g] Output type [V, ma, bit,..] Scale Factor [V/g, ma/g,..] Bias [V,..] Resolution [V,..] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/g/Cel] Scale Factor v.s. Supply [V/g/V,..] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,..] Misalignment [deg] Workshop Integrated Navigation 19-12-06 5
ADXL202 Typical Values Physical Mass: 5gram Dimension: 0.9x1x0.5 cm 3 Mounting: Solder Power: 5V, 0.6mA Environmental Temp range: 0/70 Cel Vibration:? Shock:? Ambient pressure:? Operational Input range: -2/+2g (2 axis) Output type: V (also duty cycle) Scale Factor: 312mV/g Bias: 625mV Resolution:? Warm-up time: 0.3msec Bandwidth: 500Hz Resonant Frequency: 10kHz Damping factor:? Latency:? Performance Non-Linearity: 0.2 % FSO Scale Factor TC: 0.5% reading delta from 25Cel Scale Factor v.s. Supply:? Scale Factor Stability:? Vibration Sensitivity:? Bias TC: 0.625mV/Cel Bias Repeatability:? Bias v.s. Supply: 6.25mV/V Hysteresis:? Noise: 0.156mV/ Hz Random Walk:? Misalignment: +/- 1 deg (between axis +/- 0.01deg) N.b.:de datasheet toont specs welke niet in deze tabel opgenomen zijn Workshop Integrated Navigation 19-12-06 6
Hoeksnelheidsensoren Eigenschappen Physical Mass [gram] Dimension [cm 3 ] Mounting Power [V, ma, mw] Environmental Temp range [Cel] Vibration [g] Shock [g] Ambient pressure [kpa] Operational Input range [deg/sec] Output type [V, ma, bit,..] Scale Factor [V/deg/sec,..] Bias [V,..] Resolution [V,..] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/deg/sec/Cel] Scale Factor v.s. Supply [V/deg/sec/V,..] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,..] Misalignment [deg] Workshop Integrated Navigation 19-12-06 7
Magnetisch veld sensoren (kompas) Eigenschappen Physical Mass [gram] Dimension [cm 3 ] Mounting Power [V, ma, mw] Environmental Temp range [Cel] Vibration [g] Shock [g] Ambient pressure [kpa] Operational Input range [deg, gauss] Output type [V, ma, bit,..] Scale Factor [V/deg/sec,..] Bias [V,..] Resolution [V,..] Warm-up time [sec] Bandwidth [Hz] Resonant Frequency [Hz] Damping factor [1] Latency [msec] Performance Non-Linearity [V,.., % FSO] Scale Factor TC [V/deg/sec/Cel] Scale Factor v.s. Supply [V/deg/sec/V,..] Scale Factor Stability [ppm] Vibration Sensitivity [V/g 2,.. ] Bias TC [V/Cel,..] Bias Repeatability [V,..] Bias v.s. Supply [V/V,..] Hysteresis [V,..] Noise [V,..] Random Walk [V/ Hr,..] Misalignment [deg] Workshop Integrated Navigation 19-12-06 8
Invloed versnellings/ hoeksnelheid fouten op afgelegde weg stilstaand 2d inertiaal systeem z x Ideaal geval: x-accel = 0 (z-accel = 1 [g]) y-gyro = 0 z x Fout in accels: Fout in berekende x-afstand: x-accel = a x S x = ½ * a x * t 2 (z-accel = 1 + a z ) (y-gyro = 0) z z Fout in gyro: x y-giro = d y * t hierdoor fout in x-richting: 1 * sin( d x y * t) d y * t en fout in berekende afstand S x = 1 / 6 * d y * t 3 (fout in z-richting: 1 1 * cos( d y * t) 0) Tot. fout in x-richting:s x = ½ * a x * t 2 + 1 / 6 * d y * t 3 Workshop Integrated Navigation 19-12-06 9
Invloed versnellings/ hoeksnelheid fouten op afgelegde weg (vervolg) S = 5* a*t 2 + 8*10-6 * d*t 3 S = fout in afgelegde weg [m] a = versnellingsmeter fout [g] 25e-6 d = hoeksnelheid (gyro) fout [deg/h] t = tijd [sec] 2e-3 accel [g] 2.50E-05 1 2 3 4 5 6 7 gyro [deg/h] 2.00E-03 0 0 0 0 0 0 0 9 8 Inertial grade Tactical grade a [g] 25 * 10-6 1 * 10-3 d [deg/h] 2 * 10-3 1 7 6 5 4 3 2 1 0 0 50 100 150 200 250 Workshop Integrated Navigation 19-12-06 10
MEMS (Inertial) Sensor - Fabrikanten (alfabetisch) Analog Devices: versnelling, hoeksnelheid (temperatuur) http://www.analog.com/en/cat/0,2878,764,00.html Bosch: versnelling, hoeksnelheid http://www.bosch.com/content/language2/html/3315.htm CFX Technologies: versnelling, hoeksnelheid http://www.cfxtech.com Colibrys: versnelling http://www.colibrys.com EpsonToyo: hoeksnelheid (temperatuur, druk) http://www.epsontoyocom.co.jp/english/product/product_set.html Freescale: versnelling http://www.freescale.com/webapp/sps/site/homepage.jsp?nodeid=011269 Hitachi Metals: versnelling, magnetische veldsterkte http://www.hitachimetals.com Honeywell: hoeksnelheid, magnetische veldsterkte (naast hun navigation grade IMU) http://www.ssec.honeywell.com Hokuriku: versnelling http://www.hdk-america.com Kionix: versnelling http://www.kionix.com Workshop Integrated Navigation 19-12-06 11
MEMS (Inertial) Sensor - Fabrikanten (vervolg) Memsic: versnelling http://www.memsic.com Melexis: hoeksnelheid http://www.melexis.com/productcategory.aspx?nid=97 PCB Piezotronics: versnelling http://www.pcb.com Murata: hoeksnelheid http://www.murata.com/sensor/index.html Silicon Sensing Sysytems: hoeksnelheid http://www.spp.co.jp/sssj/silicon-e.html Silicon Designs, Inc: versnelling http://www.silicondesigns.com/prod.html Sparton: magnetische veldsterkte http://www.thedigitalcompass.com Tronic s Microsystems: versnelling http://www.tronics-mst.com/solutions.html Workshop Integrated Navigation 19-12-06 12
MEMS (Inertial) Sensor - Fabrikanten (vervolg) STMicroelectronics: versnelling http://www.st.com/stonline/products/families/sensors/sensors.htm BEI Systron Donner: hoeksnelheid (versnelling?) http://www.systron.com/products.asp NEC/Tokin: hoeksnelheid (versnelling, magnetische veldsterkte?) http://www.nec-tokinamerica.com/products.html VTI Technologies: versnelling http://www.vti.fi/en/products-solutions/products/accelerometers Workshop Integrated Navigation 19-12-06 13
MEMS Inertial Integrated Systems - Fabrikanten American GNC Corporation: http://www.americangnc.com Cloud Cap Technoloy: http://www.cloudcaptech.com/crista_imu.htm Crossbow: http://www.xbow.com/home/homepage.aspx Data Tec Co: http://www.performtech.de/english/products/products.html Inertial Science: http://www.inertialscience.com/products.htm Leica Geosystems: http://www.vectronix.ch/index.php?show=35 Micro Strain: http://www.microstrain.com/inclinometers.aspx Oxfors Technical Solutions: http://www.oxts.co.uk Sensorex: http://www.sensorex.fr/en/technologies/02inclinometres.php4?phpse SSID=a636ea1034039052e98c5fa8912bd580 Systron Donner: http://www.systron.com/products.asp Tokin: http://www.nec-tokinamerica.com/products.html Verhaert: http://www.mastersininnovation.com/pdf/papers/inertial%20technolo gies.pdf Xsens: http://www.xsens.com Workshop Integrated Navigation 19-12-06 14
VRAGEN????????? Workshop Integrated Navigation 19-12-06 15