Mass Flow Meter (MFM) for Gases

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Mass Flow Meter (MFM) for Gases Bypass MFM with capillary technology for nominal flow rates from 5 ml N /min to 10 l N /min Applicable for aggressive gases Fieldbus option Type 8700 can be combined with... Type 1150 Multi-channel program controller Type 0330 3/2 or 2/2- way valve Type 6013 2/2-way valve MassFlowCommunicator Communications software Mass flow meters are used in process technology for the direct measurement of the mass flow of gases. In case of volumetric flow meters, it is necessary to measure the temperature and the pressure either the density, because gases change their density or rather their volume depending on the pressure. The measurement of the mass flow, on the other hand, is independent of the pressure and the temperature. The digital mass flow meter Type 8700 uses a classic bypass sensor (see the description on page 2). The actual flow is given as an analog output signal or could be read out over RS-communication, also fieldbus devices are available. Type 8700 can optionally be calibrated for two different gases, the user is able to switch between these two gases. The materials of the parts that come into contact with the medium are selected according to customer specification so that the unit can be operated with the complete range of standard process gases. Typical application areas are gas flow measurement in: Test benches Environmental technology Gas consumption metering Analytical equipment Technical data Full scale range 1) (Q nom ) 5 to 10,000 ml N /min N 2 equivalent Operating media Neutral or aggressive gases, others on request Max. operating pressure 10 bar (145 psi) (inlet pressure) Calibration medium Operating gas or N 2 with conversion factor Medium temperature -10 to +70 C Ambient temperature -10 to +50 C Accuracy ±1.5% o.r. ±0.3% F.S. (after 30 min. warm up time) Linearity ± 0.1% F.S. Repeatability ± 0.1% F.S. Control range 1:50 Response time (t 95% ) <3 s Body material Stainless steel Electronic Housing PC (Polycarbonate) Sealing material FKM, EPDM, FFKM Port connections NPT 1/4, G 1/4, sub-base or screw-in fi tting, others on request Electrical connection Plug Sub D 15-pin Plug M12 (DeviceNet, CANopen) 5-pin Socket M12 (PROFIBUS-DP) 5-pin 1) at standard conditions 1.013 bar (a) and 0ºC Power supply 24V DC Voltage tolerance ±10 % Residual ripple <2 % Power consumption max. 2.5 W, max. 5 W (Fieldbus version) Output signal Max. current (volt. output) Max. load (current output) Fieldbus communication Protection class Dimensions [mm] Total Weight Mounting position Light emitting diode display Binary input Binary output 0-5 V, 0-10 V, 0-20 ma or 4-20 ma 10 ma 600 Ω PROFIBUS-DP, DeviceNet, CANopen, RS232/485 (RS Interface with adapter) IP40 See drawings ca. 750 g (stainless steel) Horizontal or vertical Indication for Power, Limit (with analog signals)/ Communication (with fi eldbus) and Error Two 1. not assigned 2. not assigned One relay-output for 1. Q nom almost reached max. load: 25V, 1A, 25VA www.burkert.com p 1/5

Measurement principle Measurement is based on the bypass principle. A laminar flow element in the main channel generates a small pressure drop. This drives a small flow, proportional to the main flow through the bypass (sensor tube). Two heater resistors, which are connected in a measuring bridge, are wound on this narrow stainless steel tube. In the zero-flow state, the bridge is balanced, but with flow, heat is transported in the flow direction and the bridge becomes unbalanced. The dynamics of the measurement is determined by the tube walls, which act as a thermal barrier. Through use of suitable software in the controller, measuring times are obtained that are adequate for a large part of applications (in the range of a few seconds). With contaminated media, we recommend to install filter elements upstream. This avoids changes in the division ratio between main flow and sensor tube, as well as changes in the heat transmission caused by deposits on the walls of the sensor tube. With these sensors, even aggressive gases can be controlled, because all essential parts in contact with the medium are fabricated in stainless steel. With this sensor principle it is also possible to convert between different gases. In the table you will find a choice of factors, others on request. Q(Gas) = f x Q(N 2 ) Gas Factor f N 2 1.00 Air 1.00 O 2 0.98 H 2 1.01 Ar 1.4 He 1.42 CO 2 0.77 By using the gas factors it is possible that the accuracy is not within the datasheet specification. For applications which need high accuracy it is recommended to calibrate under application conditions. The compatibility of the sealing materials of the MFMs should be checked before use with another gas. Notes regarding the selection of the unit The decisive factors for the perfect functioning of a MFM within the application are the fluid compatibility, the normal inlet pressure and the correct choice of the flow meter range. The pressure drop over the MFM depends on the flow rate and the operating pressure. The request for quotation form on page 5 contains the relevant fluid specification. Please use in this way the experience of Bürkert engineers already in the design phase and provide us with a copy of the request containing the data of your application together with your inquiry or order. Ordering table for accessories (connectors are not included in the delivery) Article Item no. 15-pin Electrical Connection Sub-D socket 15-pin solder connection 918 274 Sub-D hood for Sub-D socket, with screw locking 918 408 Sub-D socket 15-pin with 5m cable, ass. on one side 787 737 Sub-D socket15-pin with 10m cable, ass. on one side 787 738 PROFIBUS DP M12 plug 918 198 M12 (coupling) socket 918 447 PROFIBUS T-Fitting 902 098 Adapter RS232 Adapter for PC connection 654 748 RS485 Adapter 654 538 PC 2m extension cable for RS232 9 pin. socket/plug 917 039 USB Adapter 670 639 Communications software MassFlowCommunicator Info. at www.burkert.com p 2/5

Dimensions [mm] Standard version Port size A: G1/4 or NPT 1/4 Sub-base version p 3/5

Pin Assignment Plug Sub-D 15-pin 1 relay NC contact 2 relay NO contact 3 relay - C contact 4 GND 24 -V-supply and binary inputs 5 24 V supply + 6 8 V output (For factory use only!) 7 not used 8 not used 9 Process value output GND 10 Process value output + 11 DGND (for RS232) 12 Binary input 1 13 Binary input 2 14 RS232 RxD (without driver) 15 RS232 TxD (without driver) Only with fieldbus version PROFIBUS DP socket B-encoded M12 (DPV1 max. 12 Mbaud) 1 VDD 2 RxD / TxD - N (A-line) 3 DGND 4 RxD / TxD - P (B-line) 5 not used DeviceNet, CANopen Plug M12 1 Shield 2 not used 3 DGND 4 CAN_H 5 CAN_L p 4/5

MFC/MFM applications - request for quotation Please fill out and send to your nearest Bürkert sales centre* together with your inquiry or order Company Contact person Customer No. Address Postcode/Town Department Tel./Fax E-mail MFC application MFM application Quantity Required delivery date Medium data Type of gas (or gas proportion in mixtures) Density [kg/m 3 ] 1) Medium temperature [ºC or ºF] Moisture content [g/m 3 ] Abrasive components / solid particles Fluidic data no ºC ºF yes, as follows: Maximum flow Q nom Minimum flow Q nom l N /min 1) cm N3 /min 1) m N3 /h 1) cm S3 /min (sccm) 2) kg/h l S /min (slpm) 2) l N /min 1) cm N3 /min 1) Inlet pressure at Q nom p 1 = Outlet pressure at Q nom p 2 = Max. inlet pressure p 1max Pipe run (external-ø) MFC/MFM- port connection Ambient temperature Material data without screw-in fitting 1/4 G thread (DIN ISO 228/1) 1/4 NPT thread (ANSI B1.2) with screw-in fitting sub-base version ºC m N3 /h 1) cm S3 /min (sccm) 2) kg/h l S /min (slpm) 2) metric, mm imperial, inch Sealing material FKM EPDM FFKM Electrical data Output Signal with standard signal with fieldbus 0-5 V PROFIBUS DP 0-10 V DeviceNet 0-20 ma CANopen 4-20 ma Please quote all pressure values as overpressures with respect to atmospheric pressure [barg] 1) at: 1.013 bar (a) and 0ºC 2) at: 1.013 bar (a) and 20ºC To find your nearest Bürkert facility, click on the orange box www.burkert.com In case of special application conditions, please consult for advice. Subject to alterations Christian Bürkert GmbH & Co. KG 0905/2_EU-en_00891881 p 5/5