Operating Manual Fast Thermal Conductivity Detector FTC110-OEM

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Operating Manual Fast Thermal Conductivity Detector FTC110-OEM Version 12_09 Messkonzept GmbH

Operating Manual 2 1. Features Precise and long term stable thermal conductivity measurement High sensitivity (e.g. 0-0.5% H 2 in N 2 ) independent of ambient temperature Fast response with a T 90 time of less than 1 sec Measurement independent of gas flow and pressure in a wide range Small and robust flow-through device made of stainless steel Signal processing included and thereby easy adaptation to customer s electronics Calibrated signal output e.g. ranging from 1V for N 2 to 10V for H 2 2. Applications The thermal conductivity of a gas mixture depends on the individual gas components and on the composition of the mixture. Under certain conditions, therefore, the concentration of individual gas components can be determined by measuring the thermal conductivity. In other cases the identification of certain properties of gases is of special interest e.g. for quality control or safety reasons. Often these properties are related to the thermal conductivity and thereby identified. The concentration can be determined with higher precision if one of the following conditions is met: (a) The gas mixture consists of only two components, for example measuring O 2 in Ar or H 2 in N 2. (b) The gas mixture consists of more than two components but only concentrations of two components vary, for example measuring CO 2 in air. (c) The gas mixture consists of more than two components but the component of interest has a thermal conductivity that is very different from the other components (quasibinary mixtures), for example monitoring impurities in H 2. 3. Description The FTC110 detector is based on a micro-mechanical silicon chip with a thin membrane. Two thin film resistors are integrated into the membrane and are used for both heating the membrane and detecting its temperature. Both resistors are protected by an inert coating in order to prevent chemical reactions with the gas molecules. Above and underneath the membrane, two cavities are etched into the silicon. The measuring gas diffuses into the cavities and depending on the thermal conductivity of the gas more or less energy is dissipated from the membrane (source) which is held at a higher temperature than the remaining chip (hollow). The quantity measured is the voltage that is needed to keep the temperature of the membrane at the higher level. The micro-mechanical chip is fitted into a stainless steel housing where the measuring gas flows through. Gas inlet and outlet are made of 6mm Swagelok fittings. In order to allow a temperature controlled operation mode of the detector, the temperature of the stainless steel housing is controlled using two heating elements and a temperature sensor that are attached to the housing. The temperature control circuit is on a first board mounted underneath the housing. The temperature may be set with a 10-turn potentiometer. The default value is

Operating Manual 3 60 C. Above the housing, a second board controls the temperature of the membrane (~105 C) and generates the output signal. 4. Technical Data 4.1 Absolute maximum ratings: min. typ. max. Units Ambient temperature -20 --- +55 C Sensor temperature --- +60 +75 C Gas pressure (absolute) 0.4 1 10 bar 4.2 Specifications: min. typ. max. Units Weight --- ~200 --- g Gas flow 20 50 150 l/h T90 time at a flow of 50 l/h --- <1 --- sec Volume of the device --- ~1.5 --- cm 3 Warm-up time --- --- ~20 --- min 4.3 Material: Material exposed to the gas Stainless steel (LF316SS), Kovar, Si, SiOxNy, gold, epoxy, Viton 5. Dimensions and Installation The following diagrams show the top and side view of the FTC110-OEM detector. Dimensions are given in mm. The detector might be mounted at the sides with four 3mm screws. It is recommended to install it in an upright position so that the signal processing board points up. Top View: SS (LF316) Housing 42 44 25 42 ~ 88

Operating Manual 4 Side view: Signal Processing Board ~ 12 6mm- Swagelok Fitting 10 25 6mm- Swagelok Fitting 19 Temperature Control Board ~ 8 Warning: Check the leak tightness after installation. Warning: Avoid condensation inside the sensor device. Ensure liquids, aerosols, dust and particles are removed from the sample before it enters the sensor device. 6. Electrical Connection The electrical connection of the FTC110 detector is made with five wires. The color code is given below: Color Connection Yellow Blue Gray White Brown Ground; Signal Processing +24V; Signal Processing Signal Output Ground; Temperature Controller +24V; Temperature Controller Warning: Do not interchange common and plus wires. This causes serious damage to the electronics and/or sensor element. Warning: The return for the signal must be gripped where the ground of the signal processing, the temperature controller and the power supply are connected. Specifications: Description Specification Recommended Current Power Supply; Signal Processing 18V to 24V DC 24V DC up to 50mA Power Supply; Temp. Controller 18V to 24V DC 24V DC up to 400mA Signal Output 0.7V - 12.5V Load Impedance >10kOhm The output signal of the FTC110 detector may not be linear.

Operating Manual 5 7. Calibration The following diagram shows a schematic of the flow-through device along with the signal processing and the temperature control board. Depending on the application the membrane excess temperature, origin and amplification of the signal as well as the basic temperature of the sensor may be set with the indicated potentiometers. P3; Amplification P1; Temperature of the Membrane P2; Origin Signal Processing Board Heating Elements Gas Connector P4; Temperature of the Housing Temperature Control Board The setting of the potentiometer P1 depends on the application (gases and ranges) and should only be changed by personnel who is familiar with the FTC110 detector. The potentiometer P2 is used to set the origin of the measurement range. Apply the gas with the lowest thermal conductivity (e.g. N2) to the detector and turn P2 until the output is 1V. Apply the gas with the highest thermal conductivity (e.g. H2) to the detector and turn P3 until the output is 10V. Check again the origin and the span. Now the output of the FTC110 detector is calibrated ranging from 1V to 10V. The interval of calibration depends very much on the application and might vary from weeks to months. The potentiometer P4 might be used to set the basic temperature of the stainless steel housing of the sensor element up to 75 C. In order to achieve this, insert a temperature sensor through the gas inlet or outlet and position it in between the heating elements. While carefully watching the temperature indication, turn the potentiometer stepwise until the desired temperature is reached. 8. Measuring Ranges and Specifications Typical Measurement Ranges: Gas to be Background Range Measured Gas H 2 N 2 or Air 0% - 0.5% H 2 N 2 or Air 0% - 100% H 2 N 2 or Air 98% - 100% H 2 Ar 0% - 0.3% H 2 He 20% - 100%

Operating Manual 6 He N 2 or Air 0% - 0.8% He N 2 or Air 0% - 100% He N 2 or Air 97% - 100% CO 2 N 2 or Air 0% - 4% CO 2 N 2 or Air 0% - 100% Ar N 2,Air or O2 0% - 3% Ar N 2 or Air 96% - 100% Ar N 2 or Air 0% - 100% CH 4 N 2 or Air 0% - 2% CH 4 N 2 or Air 96% - 100% CH 4 N 2 or Air 0% - 100% Other ranges on demand. Warning: Consultation with Messkonzept is required if the measuring gas contains corrosive components like SO 2 or H 2 S. Specifications: T90 time < 1 sec at a flow of 50 l/h Noise < 1% of smallest range Drift < 2% of smallest range per week Repeatability < 1% of range Influence of ambient temp. < 2% of smallest range / 10 C Influence of gas flow < 1% of smallest range from 40l/h - 150l/h for mixtures mainly consisting of N2 < 2% of smallest range from 40l/h - 60l/h for mixtures mainly consisting of H2 Influence of pressure between < 0.4% of smallest measuring range 800 and 1200 hpa per 10 hpa < 0.04% of largest measuring range per 10 hpa Warning: These are approximate values which might differ for some gases. Manufacturer: MessKonzept GmbH Phone +49 69 53056444 Niedwiesenstr. 33 Fax +49 69 53056445 60431 Frankfurt Germany