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MT-9560A Ultra-Low Power, Ultra-Small 32.768 khz MEMS TCXO Features 32.768 khz ±5 ppm frequency stability over temp Operating temperature ranges: 0 C to +70 C and -40 C to +85 C Package:1.5 x 0.8 mm CSP Ultra-low power: <1 μa Vdd supply range: 1.5V to 3.63V Improved stability reduces system power with fewer network timekeeping updates Internal filtering eliminates external Vdd bypass cap and saves space Pb-free, RoHS and REACH compliant Applications RTC Reference Clock Smart Meters (AMR) Health and Wellness Monitors Pulse-per-Second (pps) Timekeeping Wireless BLE Connectivity Automotive Industrial Controls and Automation Performance Specifications Parameter and Conditions Symbol Min. Typ. Max. Unit Condition Frequency and Stability Output Frequency fout 32.768 khz Initial Tolerance F_init -5.0 5.0 ppm T A=25 C, includes reflow. Tested with Agilent 53132A freq. counter, gate time 100ms. -5.0 5.0 Stability part number code = E, includes ±20% load variation Frequency Stability Over F-stab -10 10 ppm Stability part number code = F, includes ±20% load variation Temperature -20 20 Stability part number code = 1, includes ±20% load variation Frequency Stability vs Voltage F_vdd -0.75 0.75 1.8V ±10% ppm -1.5 1.5 1.5V - 3.63V First Year Frequency Aging F_aging -1.0 1.0 ppm TA = 25 C, Vdd = 3.0V Jitter Performance (TA = over temp) Long Term Jitter 2.5 µspp 81920 cycles (2.5 sec), 100 samples Period Jitter 35 ns RMS N = 10,000, TA = 25 C, Vdd = 1.5V - 3.63V Supply Voltage and Current Consumption Operating Supply Voltage Vdd 1.5 3.63 V TA = -40 C to +85 C Core Supply Current Idd 0.99 TA = 25 C, Vdd = 1.8V, LVCMOS Output configuration, No Load µa 1.52 TA = -40 C to +85 C, Vdd = 1.5V - 3.63V, No Load Power-Supply Ramp t_vdd_ Ramp 100 ms Vdd Ramp-Up 0 to 90% Vdd, TA = -40 C to +85 C Start-up Time at Power-up t_start 200 300 ms Valid Output with frequency stability specifications Operating Temperature Range Commercial Temperature 0 70 C Op_Temp Industrial Temperature -40 85 C LVCMOS Output Output Rise/Fall Time tr, tf 100 200 ns 10-90%, 15 pf Load Output Clock Duty Cycle DC 48 52 % Output Voltage High VOH 90% V Vdd: 1.5V - 3.63V. I OH = -1 µa, 15 pf Load Ouptut Voltage Low vol 10% v Vdd: 1.5V - 3.63V. I OL = -1 µa, 15 pf Load Notes: 1. Core operating current does not include output driver operating current or load current. To derive total operating current (no load), add core operating current + output driver operating current, which is a function of the output voltage swing. See the description titled, Calculating Load Current. Page 1 of 7

Performance Pin Specifications Functionality (continued) SMD Pin CSP Pin SOT23-5 Pin 1 n/a 2 NC No Connect 2 1, 4 1, 5 GND Pin Connections Symbol I/O Functionality Power Supply Ground 3 2 4 CLK Out out 4 3 3 Vdd Power Supply No Connect. Will not respond to any input signal. When interfacing to an MCU s XTAL input pins, this pin is typically connected to the receiving IC s X Out pin. In this case, the MT-9560A will not be affected by the signal on this pin. If not interfacing to an XTAL oscillator, leave pin 1 floating (no connect). Connect to ground. All GND pins must be connected to power supply ground. The GND pins on the SOT23 and CSP packages can be connected together, as long as both GND pins are connected ground. Oscillator clock output. When interfacing to an MCU s XTAL, the CLK Out is typically connected to the receiving IC s X IN pin. The MT-9560A oscillator output includes an internal driver. As a result, the output swing and operation is not dependent on capacitive loading. This makes the output much more flexible, layout independent, and robust under changing environmental and manufacturing conditions. Connect to power supply 1.5V Vdd 3.63V. Under normal operating conditions, Vdd does not require external bypass/decoupling capacitor(s). Internal power supply filtering will reject more than 500 mv pp with frequency components through 10 MHz. Contact factory for applications that require a wider operating supply voltage range. CSP Package (Top View) Block Diagram Page 2 of 7

Absolute Maximum Attempted operation outside the absolute maximum ratings cause permanent damage to the part. Actual performance of the IC is only guaranteed within the operational specifications, not at absolute maximum ratings. Parameter Test Condition Value Unit Continuous Power Supply Voltage Range (Vdd) -05 to 3.63 V Short Duration Maximum Power Supply Voltage (Vdd) 30 minutes 4.0 V Continuous Maximum Operating Temperature Range Vdd = 1.5V - 3.63V 105 C Short Duration Maximum Operating Temperature Range Vdd = 1.5V - 3.63V, 30 mins 125 C Human Body Model (HBM) ESD Protection JESD22-A114 3000 V Charge-Device Model (CDM) ESD Protection JESD22-A115 750 V Machine Model (MM) ESD Protection JESD22-C101 300 V Latch-up Tolerance JESD78 Compliant Mechanical Shock Resistance Mil 883, Method 2002 10,000 g Mechanical Vibration Resistance Mil 883, Method 2007 70 g 1508 CSP Junction Temperature 150 C Storage Temperature -65 C to 150 C Thermal Consideration Package θja, 4 Layer Board ( C/W) θja, 2 Layer Board ( C/W) θjc, Bottom ( C/W) 1508 CSP TBD Page 3 of 7

Description The MT-9560A is an ultra-small and ultra-low power 32.768 khz TCXO optimized for battery-powered applications. Vectron s silicon MEMS technology enables the first 32 khz TCXO in the world s smallest footprint and chip-scale packaging (CSP). Typical core supply current is only 1 μa. Vectron s MEMS oscillators consist of MEMS resonators and a programmable analog circuit. Our MEMS resonators are built with a unique MEMS First process. A key manufacturing step is EpiSeal during which the MEMS resonator is annealed with temperatures over 1000 C. EpiSeal creates an extremely strong, clean, vacuum chamber that encapsulates the MEMS resonator and ensures the best performance and reliability. During EpiSeal, a poly silicon cap is grown on top of the resonator cavity, which eliminates the need for additional cap wafers or other exotic packaging. As a result, Vectron s MEMS resonator die can be used like any other semiconductor die. One unique result of Vectron s MEMS First and EpiSeal manufacturing processes is the capability to integrate Vectron s MEMS die with a SOC, ASIC, microprocessor or analog die within a package to eliminate external timing components and provide a highly integrated, smaller, cheaper solution to the customer. TCXO Frequency Stability The MT-9560A is factory calibrated (trimmed) over multiple frequency points to guarantee extremely tight stability over temperature. Unlike quartz crystals that have a classic tuning fork parabola temperature curve with a 25 C turnover point with a 0.04 ppm/c2 temperature coefficient, the MT-9560A temperature coefficient is calibrated and corrected over temperature with an active temperature correction circuit. The result is 32 khz TCXO with extremely tight frequency variation over the -40 C to +85 C temperature range. When measuring the MT-9560A output frequency with a frequency counter, it is important to make sure the counter s gate time is >100ms. The slow frequency of a 32kHz clock will give false readings with faster gate times. Power Suppy Noise Immunity In addition to eliminating external output load capacitors common with standard XTALs, this device includes special power supply filtering and thus, eliminates the need for an external Vdd bypass-decoupling capacitor to keep the footprint as small as possible. Internal power supply filtering is designed to reject more than 500 mv noise and frequency components from low frequency to more than 10 MHz. Start-up and Steady-State Supply Current The MT-9560A TCXO starts-up to a valid output frequency within 300 ms (150ms typ). To ensure proper start-up, Vdd power-supply ramp, from a power-down state to 90% of final Vdd, must be less than 100ms. During initial power-up, the MT-9560A power-cycles internal blocks, as shown in the power-supply start-up and steady state plot in the Typical Operating Curves section. Power-up and initialization is typically 200 ms, and during that time, the peak supply current reaches 28 μa as the internal capacitors are charged, then sequentially drops to its 990 na steady-state current. During steady-state operation, the internal temperature compensation circuit turns on every 350 ms for a duration of approximately 10 ms. Output Voltage The MT-9560A has standard LVCMOS output swing. For DC-coupled applications, output VOH and VOL are individually factory programmed to the customers requirement. VOH programming range is between 600 mv and 1.225V in 100 mv increments. Similarly, VOL programming range is between 350 mv and 800 mv. For example; a PMIC or MCU is internally 1.8V logic compatible, and requires a 1.2V VIH and a 0.6V VIL. Page 4 of 7

Typical Operating Curves (T A = 25 C, Vdd = 1.8V, unless otherwise stated) Initial Tolerance Histogram Start-up and Steady-State Current Profile Frequency Stability Over Temperature LVCMOS Output Waveform (MT-9560AE-JA-DCC-32K768, 10 pf Load) Calculating Load Current No Load Supply Current When calculating no-load power for the MT-9560A, the core and output driver components need to be added. Since the output voltage swing can be programmed to minimize load current, the output driver current is variable. Therefore, no-load operating supply current is broken into two sections; core and output driver. The equation is as follows: Total Supply Current (no load) = Idd Core + Idd Output Driver Example 1: Full-swing LVCMOS Vdd = 1.8V Idd Core = 990nA (typ) Voutpp = 1.8V Idd Output Driver: (Cdriver)(Vout)(Fout) = (3.5pF)(1.8V) (32768Hz) = 206nA Total Supply Current with Load To calculate the total supply current, including the load, follow the equation listed below. Total Current = Idd Core + Idd Output Driver + Load Current Example 1: Full-swing LVCMOS Vdd = 1.8V Idd Core = 990nA Load Capacitance = 10pF Idd Output Driver: (Cdriver)(Vout)(Fout) = (3.5pF)(1.8V) (32768Hz) = 206nA Load Current: (10pF)(1.8V)(32768Hz) = 590nA Total Current = 990nA + 206nA + 590nA = 1.79μA Supply Current = 990nA + 206nA = 1.2μA Page 5 of 7

Packaging Options Package Outline & Dimensions (Unit: mm) Recommended Land Pattern (Unit: mm) Notes: 3. Top marking: Y denotes manufacturing origin and XXXX denotes manufacturing lot number. The value of Y will depend on the assembly location of the device Ordering Information MT-9560A E - J A - D C C - 32K768 Family MT-9560A Temp Range T: 0 to 70 C E: -40 to 85 C Package Size J: 1.5 mm x 0.8 mm CSP Output Clock Frequency (khz) 32.768 khz DC-coupled Output V OL or AC Swing C: rail-to-rail LVCMOS Stability A: ±5ppm B: ±10ppm E: ±20ppm DC-coupled Output V OH C: rail-to-rail LVCMOS AC- or DC-coupled D: DC-coupledd Signal Path or Rail-toRail LVCMOS Page 6 of 7

Revision History Revision Change Summary Date 1.0 Product Release August 2014 1.1 Removed Preliminary Designation December 2014 1.2 Removed NanoDrive Capability February 2015 1.3 Added Stablilities B and E June 2015 For Additional Information, Please Contact USA: Vectron International 267 Lowell Road, Suite 102 Hudson, NH 03051 Tel: 1.888.328.7661 Fax: 1.888.329.8328 Europe: Vectron International Landstrasse, D-74924 Neckarbischofsheim, Germany Tel: +49 (0) 7268.801.100 Fax: +49 (0) 7268.801.282 Asia: 68 Yin Cheng Road(C), 22nd Floor One Lu Jia Zui Pudong, Shanghai 200120, China Tel: +86 21 6194 6886 Fax: +86 21 6194 6699 Disclaimer Vectron International reserves the right to make changes to the product(s) and or information contained herein without notice. No liability is assumed as a result of their use or application. No rights under any patent accompany the sale of any such product(s) or information. Page 7 of 7