Human Performance Applications for MEMS and Sensors

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1 Human Performance Applications for MEMS and Sensors Shaping the Future of MEMS and Sensors September 10,

2 Desich SMART Center Microsystems packaging development services The Desich SMART Center is a microsystems package, assembly, and test development foundry Located in Elyria, Ohio about 20 miles west of Cleveland Opened in September 2011 with 2000 sq ft class 10,000 cleanroom Newly built world-class 47,000 sq ft facility with class 1000 cleanrooms Professionally staffed with senior technical consultants, engineering and technical staff 2

3 Human Performance Research Identified as key area for sensor development Human Performance Council Conceived as a translational research forum to explore common goals among research organizations in Northeast Ohio Case Western Reserve University Cleveland State University University of Akron Lorain County Community College Cleveland Clinic NASA Glenn Research Center A Virtual Center of Excellence, with the mission to explore and develop more complete insights and understanding of the following themes: Models for complex human systems; Human performance sustainment or protection at the limits of performance; Predicting and influencing behavioral responses to environmental stress. 3

4 Problem Statement New opportunities highlighted for MEMS solutions Capture of real-time physiological data as a decision-making tool in a variety of environments requires robust sensor performance Limited data sets require trained a expert to analyze and interpret data Measurement and interpretation of human responses simultaneously with external stimuli is extremely desirable Vital signs body temperature, heart rate (pulse), blood pressure, and respiratory rate recorded by a health professional captures an insignificant amount of the total data Applications presented here sports, physical fitness, personal wellness, the warfighter, and patient management 4

5 Outline 1. MEMS Sensors for Consumer Electronics 2. MEMS: An Enabling Technology 3. Applications Sports and Physical Activity Physical Fitness Personal Wellness Warfighter Patient Management 4. Conclusions 5

6 MEMS Sensors for Consumer Electronics 6

7 MEMS Market 7

8 Handheld Devices MEMS sensor products Microphones for cell phones Accelerometer for portrait/landscape image rotation Accelerometer/gyroscope for gaming motion detection Gyroscope for camera image stabilization 8

9 MEMS/Sensors in Cell Phones # Temperature Temperature Temperature Temperature 2 Simple RF filters Simple RF filters Simple RF filters Advanced RF MEMS 3 Camera Rear facing camera Rear facing camera 4 Microphone Front facing camera Front facing camera 5 Microphone Microphone array (2-5) 6 Ambient light sensor Ambient light sensor 7 Proximity sensor Proximity sensor 8 Acceleration Acceleration 9 Gyro Gyro 10 Compass Compass 11 Touch screen Touch screen 12 GPS GPS 13 Altimeter 14 Humidity sensor 15 CO sensor 16 Projector 17 Health sensors Janusz Bryzek, Accelerating MEMS Market to $Trillion/Trillion Units, Sensors for Internet of Things, MEPTEC, May 23,

10 MEMS: An Enabling Technology 10

11 MEMS Advantages Transparent in the System Ultra-small form factor Low power Low cost High performance 11

12 A Definition Micro-electro-mechanical systems are mechanical sensors and actuators that are fabricated using techniques similar to those used for integrated circuits. They are micrometer sized mechanical structures, such as: cantilevers, combs, membranes, and channels that are often integrated with logic circuitry. inemi MEMS University / Industry Collaboration, April 26,

13 What is a Sensor? Sensor: a device that responds to a physical stimulus (as heat, light, sound, pressure, magnetism, or a particular motion), and transmits a resulting impulse (as for measurement or operating a control) 13

14 Examples of MEMS Structures Classical structures Capacitive touch Biosensors-chemical Other 14

15 Sensor Infrastructure Technology platforms for sensor integration Existing technologies that can accelerate the use of MEMS sensors in products Wireless/Internet connectivity Multi-functional systems on a chip or in a package Sensor fusion Creative packaging 15

16 Sports and Physical Activity 16

17 Sports and Physical Activity Motion measurements for improving performance and safety Xsens Movea Syride Riddell 17

18 Sports and Physical Activity Classical MEMS with multiple degrees of freedom MEMS Inertial Sensors Tri-axis accelerometer Tri-axis gyroscope Tri-axis magnetometer Pressure sensor Technology Affordable 10DoF MEMS inertial sensing Batteries; energy harvesting Wireless technologies Pressure sensors Navigation integration Software fusion Data management Low cost actigraphic platforms 18

19 Sports and Physical Activity Advantages Enhanced learning through instant sensor feedback Better understanding of humans in sports Based on accurate, actionable data not perception or trial and error Improved safety and performance Databases lead to better product engineering 19

20 Physical Fitness 20

21 Physical Fitness Addition of physiology Virtual Trainer Motion data recorded with inertial sensors Algorithms provide actionable information Can be combined with measured physiological responses Non-motion based responses Heart rate Galvanic skin response Respiration rate ECG Exhaled breath 21

22 Physical Fitness Advantages Access to customize training plans and tips from virtual coaches Improved performance achieved through monitoring exertion and vital signs real time Wireless communication and mobile app Body Media Fit Nike+ Adidas MiCoach 22

23 What about ketones? Exercise physiology monitoring Breath sensor enables self-management of diet Ketones are a byproduct of fat metabolism Positive results mean - Blood sugar imbalance - Dehydration - Over-exercising Athletes focused on dietary balance 23

24 MEMS Breath Sensor Sold as consumer electronic product 24

25 Personal Wellness 25

26 Personal Wellness Product should be A self-monitoring device and easy to use Cost suitable for reimbursement Accurate and reliable Patient-acceptable for increased compliance Therefore reducing medication and emergency room visits Breath sensing for home-care medical applications Asthma monitoring Oxygen therapy Sleep apnea Other based on biomarkers 26

27 Personal Wellness Biosensor for Asthma Monitoring (2005) 27

28 Personal Wellness Asthma Inflammation Measurement Technology 28

29 Personal Wellness NO sensor for breath Sensor approach Electro-chemical sensor using semiconductor oxides, thin films, and nanostructured materials Other device structures considered: resonator, membrane, cantilever, QMB Issues involve environmental compatibility, affects from interference gases, and low ppb detection limits Potential for low cost, light weight sensor 29

30 Warfighter 30

31 F22 Hypoxia Issues Portable Unit for Metabolic Analysis (PUMA) PUMA is a portable unit that measures six quantities necessary to evaluate metabolic function The oxygen subsystem uses the fluorescence quenching properties of a ruthenium-based dye. The carbon dioxide subsystem uses the strong and unique infrared absorption properties. The flow measurement subsystem utilizes a modified commercial ultrasonic sensor Commercial sensors are used for pressure, temperature, and heart rate National Aeronautics and Space Administration, Technology Opportunity, Technology Transfer and Partnership Office, TOP

32 Patient Management 32

33 Patient Management Measuring Human Exposure during Medical Transport Relative mortality increases % for post-transfer patients Database environmental conditions of flight transport Stressors trigger endocrinological response that cannot be measured Physical Stressors of Flight Hypoxia Temperature Changes Barometric Pressure Third-spacing Decreased humidity Gravitational forces Noise Vibration Reimer, Andrew P., PhD, RN, Dorothy Ebersbach Academic Center For Flight Nursing, Case Western Reserve University, September 5,

34 Patient Management Measuring Human Exposure during Medical Transport Physiologic behavior is understood but varies from patient to patient: Increased heart rate Increased blood pressure Decrease in respiration rate Decrease in oxygen saturation Looking for real-time, physiological measurement solution In the mean time using off the shelf MEMS components to track environmental conditions: Gyroscope Accelerometer Microphone Thermometer Barometer Magnetometer Reimer, Andrew P., PhD, RN, Dorothy Ebersbach Academic Center For Flight Nursing, Case Western Reserve University, September 5,

35 Conclusions 35

36 Conclusions De-coupling motion and physiological responses can improve measurements related to the human experience Both consumer and clinical applications can benefit from more comprehensive data Consumerization of MEMS sensors have enabled new products that have begun to define a path: Miniaturization with cost reduction Use of branding and software to overcome performance tradeoffs Growing area of health care products 36

37 Conclusions The bridge between consumer and clinical applications still has hurdles Establishment, interpretation, and management of clinical data bases - EMR Clinical requirements more heavily weighted on technology performance Regulatory and adoption paths are burdensome Products for wellness and monitoring typically do not require regulatory approval therefore becomes good space for vetting technology 37

38 Thank You! Matt Apanius Director, Desich SMART Center 151 Innovation Drive Elyria, Ohio (440)

39 Questions? 39

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