Review of NSOM Microscopy for Materials

Transcription

1 Review of NSOM Microscopy for Materials Yannick DE WILDE ESPCI Laboratoire d Optique Physique UPR A0005-CNRS, PARIS, FRANCE

2 Outline : Introduction : concept of near-field scanning optical microscopy (NSOM) A. Aperture NSOM B. Scattering type NSOM C.Thermal Radiation Scanning Tunnelling Microscope D.NSOM with active fluorescent nano object

3 Far-field optical microscopy Resolution limit : Image plane Airy spot Object plane Rayleigh criterion : Ducourteux, thèse - ESPCI Numerical aperture : NA=n sinθ Example : λ~0.5 µm (visible) r = 0.6 λ nsin θ ref : n = 1 sin θ = 0.95 r 320 nm

4 Far-field optical microscopy Resolution limit : Image plane Airy spot Object plane Rayleigh criterion : Ducourteux, thèse - ESPCI Numerical aperture : NA=n sinθ Example : λ~0.5 µm (visible) r = 0.6 λ nsin θ n = 1 sin θ = 0.95 r 320 nm

5 Near-field :definition Source 10 nm k=(ω/c)n z x E ( ) = Ê( ) i k x+ k y+ k z x, y, z k, k ;0 e x y z dk dk x y x y Spatial Fourier transform ( ) k = k k k with Im{k z } 0 z x y Plane waves : i kxx+ k y y ikz e kx + k y k e, Low spatial frequencies Evanescent waves : i kxx+ k y y kzz e kx + k y > k e, High spatial frequencies Distance is a low-pass filter!

6 Near-field scanning optical microscopy NSOM : principle

7 Near-field scanning optical microscopy NSOM : principle Piezoelectric scanning unit

8 A. Aperture NSOM Synge s idea (1928) to illuminate the sample through a subwavelength hole Synge, Phylos. Mag. 6, 356 (1928)

9 A. Aperture NSOM Practical realization : D. W. Pohl (1984) - Appl. Phys. Lett. 44, 651 (1984) Subwavelength hole on an AFM scanning unit J. A. Veerman, et al. Appl. Phys. Lett. 72, 3115 (1998).

10 A. Aperture NSOM Different operating modes

11 Single fluorescent molecules : A. Aperture NSOM Applications : luminescence z y x J.A. Veerman, et al., J. Microsc. 194, 477 (1999) Analyzer Detector Organic molecule : DiIC18 Molecule dipole // z Image : 1.2 x1.2 µm Field distribution around fiber tip aperture (incident polarization // x) Possibility to know dipole orientation from image symmetry. Les nouvelles microscopies Belin (2006)- images L. Aigouy

12 A. Aperture NSOM Applications : luminescence Luminescence in quantum heterostructures : Global luminescence spectrum Local spectra Energy resolved imaging V. Emiliani, et al., Phys. Rev. B 64, (2001).

13 B. Scattering type NSOM s-nsom : Principle Light scattering by subwavelength objects : Classical (far field) microscopy image Each nano particle = dipole Dipole moment Scattering cross section p = ε mαe0 4 k Cscat ( ω) = α 6π 2 Image size: 35 µm x 35 µm Scattered intensity I C E scat 2 0 Gold beads (φ ~ 50 nm ) Visible illumination ( λ ~ 500 nm )

14 B. Scattering type NSOM s-nsom : Principle Controlled displacement of a single subwavelength scatterer Idea : In practice : Recording of scattered signal vs. AFM tip position Near-field optical image with resolution ~ φ

15 Vertical tip modulation B. Scattering type NSOM ω s-nsom : Principle ω - To extract E tip (ω) from the background - Surface topography ( AFM, «tapping» mode )

16 B. Scattering type NSOM Example of s-nsom design Two modes : Visible : λ=655 nm Infrared : λ=10.6 µm Y. De Wilde, F. Formanek, L. Aigouy, Rev. Sci. Instrum. 74, 3889 (2003)

17 s-nsom with visible or infrared laser illumination : experimental results SUBWAVELENGTH HOLES (φ=200nm) : INFRARED imaging Microscopie électronique (C. Bainier et D. Courjon) Formanek, De Wilde, Aigouy, J. Appl. Phys. 93, 9548 (2003) AFM AFM (topography) GDR Optique de champ proche Appl. Optics 42, 691 (2003) s-nsom 1.18 µm 1.21 µm AFM (Profile) Optical resolution ~ nm ~ λ/200 SNOM (3µmx3µm) Infrared illumination λ=10,6 µm

18 s-nsom:relation to materials dielectric functions The optical signal is due to scattering of the coupled probe dipole image dipole system Probe dipole E 0 p = α E 0 Tip r t ε t d Scattering cross section 4 k Cscat ( ω) = α 6π E = E 0 + E image eff 2 Effective polarizability α eff ( 1+ β ) α = αβ 1 16 π d 3 Image dipole p =βp ε s Sphere dipole α = 4π r ε 3 t 1 t εt + 2 Image dipole β = ε s 1 ε + 1 s E dipole = p 2π r 3 B. Knoll and F. Keilmann, Opt. Comm. 182, 321 (2000).

19 Relation to materials properties ( IR, λ ~ 10µm ) Doping in Si SiC Au SiC R. Hillenbrand et al., Nature 418, 159 (2002) Phonon-polariton resonance in α eff Nanolett. 6, 774 (2006). A. Huber, et al., A. Lahrech, et al., Appl. Phys. Lett. 71, 575 (1997). Amorphous vs. crystalline SiC N. Ocelic and R. Hillenbrand Nature Mater. 3, 606 (2004). Crystal structure R. Hillenbrand, et al. Collaboration with Infineon (J. Wittborn) (Presented at NFO9 - to be published)

20 s-nsom : Nano Raman spectroscopy Typical molecule : Incident radiation ν Scattered radiation C scat ~10-30 cm 2 Solution : local field enhancement ν 0 h(ν 0 -ν) Material identification via the energy of molecular vibrations Lightning rod effect SERS Ducourtieux et al., Phys. Rev. B 64, (2001). TERS Anderson et al., Materials Today (2005).

21 s-nsom : Nano Raman spectroscopy TERS on Carbon nanotubes Nano Raman Imaging N. Anderson J. Opt. A: Pure Appl. Opt. 8, S227 (2006). TERS on strained silicon H. Qian, et al., Phys. Stat. Sol. (b) 243, 3146 (2006). N. Hayazawa, et al., SPIE Newsroom /

22 Quantum cascade lasers s-nsom-imaging working semiconducting devices InGaAs/AlInAs, GaAs/AlGaAs, InAs/AlSb λ: mid-ir (λ 3-24 µm) & THz (λ µm) TEM image ur E k r ~20 µm mm 55 nm SEM Active area 15 µm R. Colombelli (Institut Electronique Fondamentale, Orsay,FR) V. Moreau - M. Bahriz (PhD students) L. Wilson, A. Krysa (University of Sheffield,UK) Y. De Wilde (ESPCI, Paris,FR) P.-A. Lemoine (PhD student)

23 Quantum cascade lasers Air confinement structure s-nsom-imaging working semiconducting devices Wavelength (µm) (b) (c) 300K Power(a.u.) λ = 7.78 µ m n eff = 3.4 (a) Wave number (cm -1 ) Laser cavity modes λ δy = = µ m 2n eff

24 Quantum cascade lasers Air confinement structure s-nsom-imaging working semiconducting devices Laser cavity modes δ y 1.2 µ m V. Moreau, P.-A. Lemoine, et al., Appl. Phys. Lett. (2007)

25 Quantum cascade lasers Air confinement structure s-nsom-imaging working semiconducting devices Calculation Experiment V. Moreau, P.-A. Lemoine, et al., Appl. Phys. Lett. (2007)

26 C. Thermal radiation scanning tunnelling microscope TRSTM

27 Infrared night vision camera Far-field thermal infrared microscope Resolution ~ 5 µm Gray body : Spectrum ( λ, ) = Σ ( λ ) ( λ, ) G T B T Detection of thermal radiation emitted by the object itself m

28 Far-field thermal infrared microscope Image of a point : 550 nm (green) 4 µm (Infrared) Two points 600 nm apart : Resolution limit ~ λ/2

29 Near-field detection of thermal radiation : TRSTM (Thermal Radiation STM) PRINCIPLE Vertical oscillation Detector Tip Ω Sample Ω Hot plate (sample holder) tip (W) Apertureless SNOM without any external source. Scattering of near-field thermal radiation at the surface at T 0.

30 Energy selection : TRSTM images with filter at λ = 10.9 µm A B C SiC Au TRSTM A B Topography (AFM) T=170 C C De Wilde, Formanek, Carminati, Gralak, Lemoine, Mulet, Joulain, Chen, Greffet, Nature 444, 740 (2006). Fringes coherence in near-field thermal radiation

31 Energy selection : TRSTM images with filter at λ = 10.9 µm A B C Prospect for metrology : TRSTM The spectrum of TRSTM signal is specific to each material. Topography (AFM) To use the TRSTM as a local temperature sensor De Wilde, Formanek, Carminati, Gralak, Lemoine, Mulet, Joulain, Chen, Greffet, Nature 444, 740 (2006).

32 D. Active fluorescent probes L. Aigouy, et al. Appl. Phys. Lett. 87, (2005). Principle : to use a fluorescent nano object at the extremity of an AFM tip as a local temperature sensor

33 D. Active fluorescent probes L. Aigouy, et al. Appl. Phys. Lett. 87, (2005). Principle : to use a fluorescent nano object at the extremity of an AFM tip as a local temperature sensor

34 Conclusions : NSOM microscopy is an active field of research to achieve optical material characterization Most far-field methods are nowadays accessible in the near-field: luminescence, Raman scattering, Infrared imaging, thermal emission A large variety of NSOM types have been developed : Aperture-probe, scattering type-nsom, TRSTM,active probes. Current trend : To use new concepts such as optical nano antenna to improve the NSOM efficiency. T.H. Taminiau, et al., Nanolett. 7,.28 (2007). J. N. Farahani, et al., Phys. Rev. Lett. 95, (2005)