CORE SYSTEM LASER IMAGE PROFILER
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1 < SCANNING LASER IMAGE PROFILER > Works Load/Unload Inspection Unit X-Y-θ Stage Motor Controller Monitor CSM-Series System Configurations Laser Control Unit PC Unit 1
2 SCANNING LASER IMAGE PROFILER -- Applications Advantages Wider Area of Surface Distortion Inspection at Nano Level with CORE patented Scanning Laser Technology Hard Disk Semiconductor Wafer LCD FPD Panel ITO Film Electronics Components Optical Components Precision Parts Surface Distortion: Roughness, Distortion Surface Defects: Scratches, Dirt Surface Foreign Particles: Dust Particles, Laminated mask/film surface distortion etc.. detect by superb high resolution Digital Data & 3D Image Display 2
3 CSM-Series System Configurations AD Board Laser Scanning Mirror Motor Analog Board MAIN INSPECTION UNIT Criteria Setting / Inspection Display Light Detector Fibre (Trigger Signal Control Panel Control Unit Work-Stage Controller Pulse Motor X-Y-θ Stage Works Loading Stage 3
4 Basic Working Principle LASER Assumption Laser Light Reflected Light at P Work 4
5 Patented Optical Technology OPTICAL LAYOUT OPTICAL CONCEPT Laser Light Receiver Light Source Focus Lens Mirror-2 Scanning Mirror (Rotate) Mirror-2 Light Receiver Mirror-1 Works Mirror-1 Works Scanning Mirror (Rotate) 5
6 Surface Profile Inspection Results: Identical to Optical Measurement (Over 98%) Point CORE SYSTEM LASER MEASUREMENT RESULT SAMPLE 2500 POINTS: Works: Polygon Mirror, Measured Distance: about 5mm, 1MHz 8bit A COMPANY OPTICAL MEASUREMENT RESULT (MM) 6
7 Inspection Field of View Comparison (Surface Area) Height Inspection Resolution Z-Axis Normally, Increase of Height Resolution will reduce Area of Field of View. Light Interference Contact Pin #Wide Field of View & High Resolution Projection Microscope Laser Beam Microscope Electron Microscope #CORE System Development Target 7
8 Field of View Comparison (Aluminium HD) Inspection deformation from Bottom-side: CORE written with Pencil CSM Inspection Results 8
9 Field of View Comparison - Test CORE CSM System can detect image clearly. CORE CSM Inspection Results 9
10 Field of View Comparison - Test Refer Page 9, Inspect points a & b on Veeco WYKO System. Possible to inspect when distortions are small. Veeco Standard Defects Profile 10
11 Field of View Comparison - Test Refer Page 8, Inspect same CORE on VEECO WYKO System. Impossible to inspect when distortions are big. Veeco Standard Defects Profile 11
12 CSM-Series ITO PATTERN INSPECTION 30x30mm Wide Field of View & High Resolution Inspection Image ENLARGED REFERENCES X-Axis Surface Profile Y-Axis Surface Profile 12
13 CSM-Series ITO PATTERN INSPECTION ITO Pattern Lines Bridging 13
14 CSM-Series ITO PATTERN INSPECTION Height Variation due to embedded Dust Particles 14
15 CSM-Series ITO PATTERN INSPECTION Glass Substrate 15
16 CSM-Series ITO PATTERN INSPECTION Minute Defect caused by Dust Particle 16
17 SILICON WAFER INSPECTION Outer Circumference Inspection Flatness Inspection Inspection: Outer Circumference / 5 / Step 72 Points 17
18 LCD OPTICAL RUBBING TEST To inspect the test result of Optical Rubbing on Liquid Crystal (To spot UV on laminated PVC mask on transparent glass.) Micro Waviness Inspection Liquid Crystal Deposition 18
19 HARD-DISK DUST PARTICLES INSPECTION <CCD vs CSM-02 > CORE CSM Profile Dust Particles on HD Surface CCD Profile 19
20 HARD-DISK DUST PARTICLES INSPECTION <CCD vs CSM-02 > Marking CORE Inspection Profile Hard-Disk Surface CCD Profile vs CSM Profile Relative Comparison Marking CCD Inspection Profile 20
21 HARD-DISK DUST PARTICLES INSPECTION <CCD vs CSM-02 > CSM Particles Image SEM Image 21
22 HARD-DISK DUST PARTICLES INSPECTION < SEM Verifications of CSM Detected Defects > CSM Enlarged Visual Image SEM Image SEM Image CSM Visual Image 22
23 HARD-DISK DUST PARTICLES INSPECTION < SEM Verifications of CSM Detected Defects > SEM Image CSM Enlarged Visual Image SEM Image 23
24 WAFER SURFACE INSPECTION Wafer Surface Finishing Inspection Image: CSM04 300mm x 300mm - Center Inspection Center Grinding Mark Enlargement 24
25 WAFER SURFACE INSPECTION Wafer Surface Finishing Inspection Image: CSM04 25
26 MARKET DEMAND Hard-Disk Surface Inspection The increasing requirements of high density (Vertical Recording / Discrete Format) Hard-Disk Inspection for Surface Flatness Defects is now beyond the limits of Optical Inspections. [MARKET REQUIREMENTS] *Surface Flatness: 1nm *Defect Size: Ø80nm x Depth 50nm *Defects Analysis *In-Line 100% Inspection System Inspection Speed: 500pph [MARKET REQUIREMENTS] *Surface Flatness: 10nm *Defect Size: Ø500nm x Depth 500nm [CORE SYSTEM CSM SERIES] *Surface Flatness: 0,1nm *Defect Size: Ø80nm x Depth 50nm»Composite Analysis System Dev.»In-Line 100% Inspection System Inspection Speed: 500pph 26
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