High Precision Positioning Stages. Single and Multi-axis Positioning Stages for High Precision Motion Control Systems. Stages

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2 High Precision Positioning Single and Multi-axis Positioning for High Precision Motion Control Systems

3 Engineered For Precision... Anorad Stage Features Applications: Semiconductor Inspection Laser Machining Automated Assembly Optical Inspection Photonics Assembly Biomedical Dispensing General Automation Construction Features: High strength aluminum alloys Meehanite cast iron Stainless steel Internal and external cable management systems Cleanroom and vacuum compatible options Bellows and plate sealing options Preloaded Bearing Systems assure high precision: Recirculating ball linear guides Crossed roller ways Precision radial bearings Stainless steel crossed roller radial bearings Actuation Methods: Zero cogging linear and rotary motors High force iron core linear motors Precision ground ball screws High load capacity precision rotary actuators Multi-Axis Systems: Choose from X,Y,Z and rotary assemblies Stacked and split-axis Pre-assembled linear, rotary, and Z-wedge combinations High Resolution Feedback is matched to speed and accuracy specifications: Optical incremental linear encoders and multipliers Tape scale encoders Glass scale encoders Error mapping upon request

4 Precision Positioning Stage Selection Guide For over 30 years Anorad has been the technological leader in the design, manufacture and application of precision positioning stages. Following is a brief description of our diverse line of precision stages for designing state-of-the-art motion control systems. The Linear stages are Light-Weight aluminum systems actuated by Anorad s patented linear servo motors: The LW7 is an extremely versatile positioning stage. Designed using precision ground recirculating element linear guides, it is available with several linear motor, encoder, cable and sealing options. These stages are easily arranged in stacked or split-axis configurations. The LW10 is the largest member of the LW family. With its wide stance, low profile, and high force motor options, the LW10 forms an ideal base upon which to build a multi-axis system. Like the LW7, it can also be optimized with an array of options to choose from. ICON 150 crossed roller bearing stages are used in short-stroke ultra high precision applications such as those found in the photonics industry. WKY integrated XY stages offer ultra smooth motion in step-and-scan applications. Available in an open frame construction, they are ideal for optical inspection applications needing dual-sided workpiece access or bottom illumination. Anorad also produces several rotary positioning tables and verical lift stages: The DDR-150 is a direct drive rotary table for highly accurate and repeatable rotary motion featuring a stainless steel top plate and unlimited travel. The GR-XA is a high capacity worm gear driven stage built with a stainless steel crossed roller bearing for high rigidity in moderate precision applications. The Z-wedge precision vertical lift stage features crossed roller bearings for maximum rigidity and glass scale encoders for ultra high precision applications. In addition to the above designs, Anorad also offers: Anoride crossed roller way precision linear stages DDR-90 direct drive miniature rotary stages Stage Section Contents Linear LW7 LW10 ICON WKY XY Rotary DDR-150 GR-XA Vertical Lift Stage Z-wedge

5 LW7 High Precision Stage Product Features Accuracy better than ± 1 µm per inch Velocity to 3 m/s Accelerations to 5 g s Travels from 50 to 1200 mm Resolution to 20 nm Lightweight and durable aluminum construction Non-contact linear motor and encoder Compact footprint with internal cables and seals Ideal for: Semiconductor Processing Test & Inspection Equipment Laser Machining Systems Electronic Assembly and more The LW7 is a versatile precision positioning stage designed to handle many challenging applications. With a wide selection of motors, encoders and cabling options, the LW7 is an excellent choice for designers seeking high performance and great value. The LW7 features an anodized aluminum table and base to create a lightweight, yet rigid structure. The sliding carriage is supported by four precision ground and preloaded linear guide bearings and actuated by Anorad s popular line of direct drive linear servo motors. The zero-cogging epoxy core LEM-S-3 motor offers extremely tight velocity control and provides the ultimate in accuracy. For high performance applications with rigorous duty cycles or heavy loads, the higher force iron core LCK-S-1 motor (with optional air cooling) is the ideal choice. All motors are noncontacting, are available with either sinusoidal or trapezoidal Hall effect commutation, and are compatible with Anorad s line of amplifiers and controls. In addition to our standard options, Anorad can further modify the LW7 stage to seamlessly integrate into your design. Typical modifications include special cable carriers, user-specified mounting holes in the table or base, assembly to tighter tolerances, error mapping, and custom engineering for high volume programs.

6 LW7 High Precision Stage Specifications Positioning Capabilities Units Performance Specifications Nominal Stroke in mm Accuracy 1 µm ± 1.0 µm per 25 mm/nte ± 6 µm per 300 mm Repeatability (3 σ bi-directional) µm ± 0.5 (with resolution of 0.1 µm or better) Load Capacity kg 83 (based on 500,000 km bearing life) Straightness/Flatness µm ± 1.0 µm per 25 mm/nte ± 8 µm per 300 mm Motor Options & Specifications Units LEM-S-3 LCK-S-1 LCK-S-1-AC Continuous Force (coil at 125 C) N Peak Force N Moving Slide Weight kg Continuous Current (coil at 125 C) A rms Peak Current A rms Encoder Specifications Internal: MERS50- External: to 256x max Multiplier Ratio 1x 5x 10x 50x 25x 32x 64x 256x Resolution 2 µm Maximum Velocity 3 m/s LW7 Construction Stationary Base Moving Slide Linear Servo Motor 4 Slide Bearings Encoder Limit Switches Bellows/Seals Mounting Holes Hard Stops Cables/Connectors Stacked Mechanical Features Stress relieved aluminum with black anodized finish Stress relieved aluminum with black anodized finish Epoxy core LEM or iron core LCK (air cooling optional) High precision preloaded recirculating ball bearing linear guides Non-contact optical encoder with internal or external multiplier options Magnetic end of travel limits, home sensor with ± 5 µm repeatability Accordian style PVC/nylon bellows (standard) Reinforced with helicoil inserts, custom machining by request Spring stops mounted to base (3 mm overtravel before contact) High flex strain relieved cables with 3 D -type connectors on end plate Orthogonality ± 10 arc seconds standard, special tolerances available Notes: All specifications are per axis, tested at 5 kg load, fully supported 25 mm above center of slide. 1 Non-Cumulative. For higher performance options or software error mapping, please contact Anorad application engineering. 2 Resolution includes 4x multiplication at controller. 3 Limitation based on count frequency into encoder multiplier electronics. Assumes motor driver has suitable current and voltage. 4 Refer to Anorad s Linear Motor section for details.

7 LW7 High Precision Stage Dimensions (mm) A LEM LCK x #10-32 Tap thru for LCK-AC Motor B D x C Slide Length E x Base Mounting Holes for M6 or 1/4 Cap Screw Slide Width x Slide Mounting Holes M6-1 x 9mm DP Mounting Data (mm) Model- Stroke Nominal Travel 1 A Overall Length B Distance to First Hole C Bolt Pattern Length D Bolt Spaces 1 Travel may be increased by removing standard bellows. Contact Application Engineering for details. E Mounting Holes Weight (kg) LW LW LW LW LW LW LW Connectors Hall Effect 9 Pin D Motor 9 Pin D Encoder 25 Pin D M 1 M A1 A2 1 A3 A4 M 1 Sinusoidal Pin Signal 1 I+ 2 A+ 3 B+ 5 Shield 6 I- 7 A- 8 B- Trapezoidal Pin Signal 1 +5V 2 S2 3 S3 5 Shield 6 Return 7 S1 8 N/C * Analog encoder output for external multiplier. ** Digital encoder output from internal multiplier. Pin Signal A1 Phase 1 A2 Phase 2 A3 Phase 3 A4 Ground 1 Thermistor 3 Thermistor 5 Shield Analog* Pin Signal 1 Shield 2 Ref+ 3 Qsens 4 +5V 5 Sin+ 6 Return 7 Cos- 14 Psens 15 Ref 16 N/C 17 Return 18 Sin- 19 Cos V Digital** Pin Signal 1 Shield Qsens 4 +5V 5 A+ 6 Return 7 B- 14 Psens 15 I- 16 N/C 17 Return 18 A- 19 B V

8 LW7 High Precision Stage Ordering Specifications Select the following six features to specify your Anorad LW7 High Precision Stage: Example: P/N = LW A - E - B - A Nominal Travel (in.): Linear Motor Type Hall Effect A. LEM3 Epoxy Core None B. LEM3 Epoxy Core Trapezoidal C. LEM3 Epoxy Core Sinusoidal D. LCK-1 Iron Core None E. LCK-1 Iron Core Trapezoidal F. LCK-1 Iron Core Sinusoidal G. LCK-1-AC Air Cooled None H. LCK-1-AC Air Cooled Trapezoidal I. LCK-1-AC Air Cooled Sinusoidal 3. Encoder (resulting resolution): A = MERS-50* (analog to external multiplier) B = MERS-50-1x (5.0 µm) C = MERS-50-5x (1.0 µm) D = MERS-50-10x (0.5 µm) E = MERS-50-50x (0.1 µm) * Using an external multiplier may enable resolution < 0.1 µm 4. Home Location: A = Opposite Connector B = At Connector (standard) C = Center of Travel 5. Seals: A = Bellows (standard) B = None 6. Custom Mounting Holes: 0 = None (standard) A = Tapped (± mm)* B = Jig Bored (± mm)* C = Both* * Customer drawing required Serial # (specified by Anorad)

9 LW10 High Precision Stage Product Features Widely spaced linear bearings offer high load capacity and excellent stiffness Rigid slide assembly exhibits superior move and settle times Non-contact linear motor and encoder minimize wear Optimize your design with a wide selection of motors and encoders Accuracy better than ± 1 µm per inch Repeatability ± 0.5 µm Ideal for: Microelectronic Test Equipment Semiconductor Probe & Scan Flat Panel Inspection The LW10 is the high load capacity member of Anorad s family of LW stage. Created with exceptional performance in mind, it incorporates many of the best features proven in our installed base of thousands of LW series stages. The LW10 is actuated by the latest versions of Anorad s patented brushless linear servo motors. The medium force LEA and high force LEB epoxy core motors are non-cogging, have no eddy currents, and zero magnetic attraction to offer tight velocity control and sub-micron stability. For point-to-point positioning, the powerful iron core LCK motor delivers excellent value and performance. These stages are ruggedly built with non-contact optical encoders and an array of multiplier options to get the resolution and speed ideal for your application. Combined with non-contact, direct drive motors, these stages require minimal maintenance, thus assuring high reliability and worry-free operation. The low profile LW10 stage has an extremely rigid slide mounted on low friction linear guide bearings with a nearly one-to-one aspect ratio. The result is a stable and stiff motion platform with a very high natural frequency and unsurpassed move and settle characteristics. Additional features include: Internal and external cable management systems Spring protected hard stops with overtravel Home and limit switch location selection Plate seal or bellows options

10 LW10 High Precision Stage Specifications Positioning Capabilities Units Performance Specifications Nominal Stroke in mm Accuracy 1 µm ± 1.0 µm per 25 mm/nte ± 6 µm per 300 mm Repeatability (3 σ bi-directional) µm ± 0.5 (with resolution of 0.1 µm or better) Maximum Load Capacity kg 110 (based on 500,000 km bearing life) Straightness/Flatness 1 µm ± 1.0 µm per 25 mm/nte ± 8 µm per 300 mm Motor Options & Specifications LCK-S-1 LEA-S-4 LEB-S-4 (-AC) Continuous Force (coil at 125 C) N (145) Peak Force N Continuous Current (coil at 125 C) A rms (2.6) Peak Current A rms Moving Slide Weight kg Encoder Specifications Internal MERS50- External: 256x max Multiplier Ratio 1x 5x 10x 50x 25x 32x 64x 256x Resolution 2 µm Maximum Velocity 3 m/s LW10 Construction Stationary Base Stress relieved aluminum with black anodized finish Mechanical Features Moving Slide Linear Servo Motor 4 Slide Bearings Encoder Limit Switches Bellows/Seals 5 Mounting Holes Hard Stops Cables/Connectors Cable Carrier 5 Stacked Stress relieved aluminum with black anodized finish Epoxy core LEA, LEB (air cooling optional) or iron core LCK High precision preloaded recirculating ball bearing linear guides Non-contact optical encoder with internal or external multiplier options Magnetic end of travel limits, home sensor with ± 5 µm repeatability Accordian style polyurethane/nylon (open type std.), or plate seal option Plate seal available with LEA-S-4 motor only Reinforced with helicoil inserts, custom machining by request Spring stops mounted to slide (3 mm overtravel before contact) High flex strain relieved cables with 3 D -type connectors on end plate Flex cable used with internal & external cabling up to 24 stroke Used with external cable routing from 30 to 72 stroke for LEA and LEB motors LCK motor option must use external cable routing Orthogonality ± 10 arc seconds standard, special tolerances available Notes: All specifications are per axis, tested at 5 kg load, fully supported 25 mm above center of slide. 1 Non-Cumulative. For higher performance options or software error mapping, please contact Anorad application engineering. 2 Resolution includes 4x multiplication at controller. 3 Limitation based on count frequency into encoder multiplier electronics. Assumes motor driver has suitable current and voltage. 4 Refer to Anorad s Linear Motor section for details. 5 Plate seal and internal cable carrier options available with LEA-S-4 motors only with travel up to 24.

11 LW10 High Precision Stage Dimensions (mm) PS = Plate Seal PS= Dashed lines represent external cable option dimensions 4.7 B D x A C E x Base Mounting Holes for M6 or 1/4 Cap Screws 2 x #10-32 Barbed fitting for LEB-AC Motor Raised mounting surface for plate seal only 1.8 PS Only Slide Width PS Only PS only x (6 for PS) Mounting Holes M6-1 x 9mm DP Mounting Data (mm) 2 x Slide Length Model- Stroke Nominal Travel A Overall Length B Distance to First Hole C Bolt Pattern Length D Bolt Spaces E Mounting Holes Weight (kg) LW LW LW LW LW LW LW LW LW Connectors Hall Effect 9 Pin D Motor 9 Pin D Encoder 25 Pin D M M 1 M 1 1 A1 A2 A3 A4 Sinusoidal Pin Signal 1 I+ 2 A+ 3 B+ 5 Shield 6 I- 7 A- 8 B- Trapezoidal Pin Signal 1 +5V 2 S2 3 S3 5 Shield 6 Return 7 S1 8 N/C * Analog encoder output for external multiplier. ** Digital encoder output from internal multiplier. Pin Signal A1 Phase 1 A2 Phase 2 A3 Phase 3 A4 Ground 1 Thermistor 3 Thermistor 5 Shield Analog* Pin Signal 1 Shield 2 Ref+ 3 Qsens 4 +5V 5 Sin+ 6 Return 7 Cos- 14 Psens 15 Ref 16 N/C 17 Return 18 Sin- 19 Cos V Digital** Pin Signal 1 Shield Qsens 4 +5V 5 A+ 6 Return 7 B- 14 Psens 15 I- 16 N/C 17 Return 18 A- 19 B V

12 LW10 High Precision Stage Ordering Specifications Select the following seven features to specify your Anorad LW10 High Precision Stage: Example: P/N = LW R - E - B - A - A Nominal Travel (in.): 06,12, 18, 24, 30, 36, 48, 60, Linear Motor Type Hall Effect Sensor: D = LCK-S-1 Iron Core None E = LCK-S-1 Iron Core Trapezoidal F = LCK-S-1 Iron Core Sinusoidal J = LEA-S-4-NC None K = LEA-S-4-NC Trapezoidal L = LEA-S-4-NC Sinusoidal P = LEB-S-4-NC None Q = LEB-S-4-NC Trapezoidal R = LEB-S-4-NC Sinusoidal S = LEB-S-4-AC None T = LEB-S-4-AC Trapezoidal U = LEB-S-4-AC Sinusoidal * NC = No Cooling, AC = Air Cooling (Available with LEB and external cable only) 3. Encoder (resulting resolution): A = MERS-50* (analog to external multiplier) B = MERS-50-1x (5.0 µm) C = MERS-50-5x (1.0 µm) D = MERS-50-10x (0.5 µm) E = MERS-50-50x (0.1 µm) * Using an external multiplier may enable resolution < 0.1 µm 4. Home Location: A = Opposite Connector (standard) B = At Connector C = Center of Travel 5. Seals: 0 = None A = Open Style Bellows (standard) B = Closed Bellows (consult factory) C = Plate Seal D = Plate Seal and Closed Bellows (consult factory) 6. Cable Option: A = Internal (available on LEA-S-4-NC up to 24 ) B = External (standard) 7. Custom Mounting Holes: 0 = None (standard) A = Tapped (± mm)* B = Jig Bored (± mm)* C = Both* * Customer drawing required Serial # (specified by Anorad)

13 ICON 150 Positioning Stage Product Features Versatile positioning stage ideal for fiber align applications 4 nm resolution for ultra precision Optimized bearing geometry for high stability Stackable design for XYZT motion 1 g acceleration and 300 mm/s velocity helps maximize throughput The ICON series stages provide excellent accuracy and repeatability for demanding fiber alignment applications. The ICON 150 stage is actuated by Anorad s patented LEM zero cogging linear motor. The lightweight yet rigid aluminum structure combined with precision ground crossed roller bearing ways featuring PACT (Patented Anti-Creep Technology) and a high resolution optical encoder assures the system will deliver submicron accuracy and nanometer resolution. Anorad s first priority in designing the ICON 150 stages was 24/7 reliability in manufacturing environments. Anorad has built a reputation on robust stage designs that meet and exceed expectations for reliability and lifetime in critical manufacturing processes where downtime equates to loss of revenue. Our ICON 150 stages are your best choice for satisfying ultra-precise assembly and test process automation needs. The ICON 150 stages can be assembled in various configurations, along with our rotary stages, to tailor a multi-axis solution to meet your specifications.

14 ICON 150 Positioning Stage Specifications Dimensions (mm) (4) M4 x 8 mm DP (4) M6-1 x 12 mm DP (4) CB for M Specifications Parameter Specification Parameter Specification Travel 32 mm Straightness ± 0.5 µm/25 mm Accuracy (full stroke) ± 1.0 µm Flatness ± 0.5 µm/25 mm Repeatability ± 0.35 µm Pitch ± 5 arc sec/25 mm Maximum Velocity 300 mm/s Yaw ± 2 arc sec/25 mm Encoder Resolution 4 nm Roll ± 5 arc sec/25 mm

15 WKY XY Stage Product Features Integrated XY construction lowers profile and reduces moving mass Widely spaced precision ground crossed roller bearings Zero cogging brushless linear servo motors for ultra high precision High accuracy optical encoder with resolution to 0.1 µm Travels available from 50 mm x 50 mm to 300 mm x 300 mm Ideal for: Laser Direct Write 2 D Visual Inspection Laser Diamond Cutting Reticle Inspection The WKY XY Stage delivers extremely smooth and accurate two-dimensional motion. The three-layered design is machined from high-strength aluminum alloy for light weight and rigidity. The middle section serves as both the moving carriage of the lower axis and as the sliding base of the upper axis. This lowers overall mass to allow higher acceleration and increased throughput. The compact, low profile design also reduces angular errors to enable extremely high accuracy and repeatability. The WKY XY Stage is available in an open frame configuration option. This version has an aperture through the entire system to allow visual access to both sides of a workpiece. This is ideal for bottom illumination and can also be used in automated optical inspection (AOI) applications. The WKY XY Stage incorporates several high precision components that contribute to its dynamic performance. It is actuated by Anorad's patented LEM epoxy core linear servo motors. The zero cogging motors are sinusoidally commutated to minimize velocity ripple in scanning applications. The motors are also neatly mounted into the aluminum stages to reduce system footprint and overall height. Precision ground cross roller bearing ways also help to enhance the stage's performance. They are widely spaced to create a highly stable, stiff platform and feature PACT (Patented Anti-Creep Technology) to prevent retainer migration, reduce friction, and improve accuracy of motion.

16 WKY XY Stage Specifications Positioning Capabilities Performance Specifications Accuracy 1 X-axis (lower) ± 2 µm + 1 µm/50 mm Y-axis (upper) ± 2 µm µm/50 mm Repeatability 2 (3 σ bi-directional) ± 1 µm (with resolution 0.5 µm or better) Straightness ± 3 µm + 1 µm/50 mm Flatness X-axis ± 4 µm + 1 µm/50 mm Y-axis ± 4 µm + 2 µm/50 mm Roll, pitch, yaw X-axis ± 4 arc sec arc sec/50 mm Y-axis ± 4 arc sec + 3 arc sec/50 mm Orthogonality ± 10 arc sec Dynamic Performance 50x50 100x x x x x300 Acceleration 3 (m/sec 2 ) WKY-C X-axis Y-axis WKY-O X-axis Y-axis Maximum Velocity 4 (mm/s) X-axis Y-axis Load capacity (kg) Weight (kg) WKY-C WKY-O Notes: 1 Including bi-directional repeatability 2 Specifications measured without additional load and 50 mm above the slide and per axis 3 Load dependent; assuming customer load < 5 kg 4 With MERS-50D50 speed is limited to 400 mm/s WKY Construction Base and slide materials Bearings Drive mechanism Precision machined black anodized aluminum Mechanical Features Precision ground crossed roller bearing guideways with PACT Anorad's patented LEM brushless, epoxy core, sinusoidal linear servo motor Encoder 50 lines/mm reflective scale linear encoder with either sinusoidal output signals or TTL encoder pulses Readhead MERS-50 -D1 -D5 -D10 -D50 Resolution (µm) Analog (sin/cos) Limits (2) magnetic, fixed at factory; sensor integral to encoder readhead Home (1) magnetic, fixed at factory; sensor integral to encoder Cables/Connectors High flex cable internal for encoder, motor and limits/home Sub-D type connectors on bulkhead

17 WKY-C Series Stage WKY-C Series (Closed table top) Stage Specifications Dimensions (mm) Connector Bulkhead Sub-D type Connector Stage Mounting Holes (4) M6 C.B. Carriage Mounting Holes (8) M6 x 12 mm DP Travel A B C D E F G K L 50x x x x x x For detailed dimensional specifications, please contact factory for certified drawing.

18 WKY-0 Series Stage WKY-O Series (Open table top) Stage Specifications Dimensions (mm) Connector Bulkhead Sub-D type Connector Stage Mounting Holes (4) M6 C.B. Carriage Mounting Holes (8) M6 x 12 mm DP 50 Through Hole (4) M5 x 10 mm DP 85 mm Bolt Circle Underside Base Travel A B C D E F G 50x x x x x x For detailed dimensional specifications, please contact factory for certified drawing.

19 DDR-150 Rotary Stage Product Features Direct drive brushless DC servo motor Precision ground ABEC-7 4-point contact bearings Durable stainless steel top plate with through hole Resolution to 0.2 arc seconds Highly repeatable Hall effect home and limit switches Optional encoder scale cover Ideal for: Wafer Inspection Precision Assembly Laser Machining Low Profile Direct Drive Rotary Stage Anorad's new DDR-150 rotary positioning stages are designed for precise position and velocity control in light to medium force applications. High performance is achieved through use of a brushless DC servo motor, high resolution optical encoder and precision bearing set all housed in a compact and precisely machined aluminum base with a rugged stainless steel top plate. The direct drive servo control of the brushless DC motor has several advantages over conventional gear driven rotary stages. Backlash is eliminated, torque variation is minimized, plus gear and brush wear are no longer factors in long term usage. Added benefits include speeds up to 360 rpm, 0.2 arc second resolution and ±1 arc second repeatability. Step-and-settle time is also reduced due to increased servo bandwidth. Available options for the DDR-150 include a variety of encoder resolutions to meet your speed and accuracy requirements. An axial through hole for use with pneumatic or optical devices; adjustable home, limit and hardstop positions; and a sheet metal cover to protect the encoder and internal components

20 DDR-150 Rotary Stage Specifications Dimensions (mm) Counterbored Slot for M6 SHCS M5-0.8 x 6 mm DP (4) on 72 mm BC (4) on 115 mm BC Specifications Parameter Specification Parameter Specification Travel unlimited Maximum Velocity rpm Accuracy ± 20 arc sec Acceleration 34 rad/s 2 Repeatability 1 (bi-directional) ± 1 arc sec Axial Capacity 25 kg Resolution arc sec Axial Runout (TIR) 5 µm Stability ± 2 counts Radial Runout (TIR) 5 µm Minimum move arc sec Wobble3 ±8 µm Peak Torque 7.4 Nm Thru Hole dia 35 µm Continuous Torque 1.4 Nm Concentricity (Thru hole) ±2 µm Inertia kg-m 2 Stage Weight 3.5 µm DDR-150 Construction Mechanical Features Stationary Base High strength aluminum alloy with black anodized finish (Nickel plating optional) Rotating Table Stainless steel with passivated finish Bearing System ABEC-7 precision ground 4-point contact radial bearing Encoder Incremental optical encoder with reflective tape scale (50 lines/mm) Limit Switches Hall effect home and limit switches Notes: 1 With arc sec resolution (256x multiplication) 2 At lowest resolution (top speed dependent on controller and resolution) 3 Measured at 60 mm radius

21 GR-XA Crossed Roller Stage Product Features Worm gear drive with self-aligning flexure in 45:1, 90:1, or 180:1 ratios Crossed roller bearings for high load capacity and rigidity Hard-coat anodized top plate with solid, through hole or custom mounting surface Motor mounting for NEMA23 frame servo or stepper motor Magnetic reed switch home sensor included Optimize your design with a variety of gear ratio, encoder & multiplier options Repeatability to ± 0.2 arc-minute Ideal for: Rotary Indexing Applications Automated Assembly Compact Rotary Positioning Stage Anorad s GR-XA rotary positioning stages are designed for precise positioning and heavy load applications requiring continuous or programmable motion. The GR-XA rotary stage utilizes a revolutionary stainless steel crossed roller bearing with a unique preloaded worm gear drive to provide excellent stiffness in a variety in mounting orientations. The GR-XA s low profile construction helps minimize Abbe offset errors when stacked on a supporting stage while its aluminum alloy construction reduces overall system weight. The crossed roller radial bearing provides extremely smooth rotary motion with rigidity and load capacity greater than many competitive stages. Additionally, the selection of gear ratios allows for optimization of speed and load capacity in any given application. The GR-XA rotary stage offers several design features that provide unrivaled performance in its class. The unique worm gear uses a self-compensating factory set preload that allows users to achieve rotary positioning of ± 2 arc minutes. The GR-XA is well suited for many applications requiring precise positioning, heavy load capacity or automated rotary motion.

22 GR-XA Crossed Roller Stage Specifications Dimensions (mm) (8) M6-1 x 9 mm DP (4) on mm B.C. (4) on mm B.C Standard Mount Accepts NEMA 23 Frame Motor (4) C'Bored Holes for 1/4 or M6 SHCS with Optional Thick Rotating Plate GR-XA 6 Crossed Roller Rotary Stage Performance Specifications 1 Average Accuracy of Position ± 2 arc minutes (with 500 lines/rev encoder) Repeatability 2 ± 0.2 arc minute unidirectional Flatness of Rotation 3 Load Capacity: Horizontal Vertical Input Torque Required Stage Weight (without motor) Home ± 0.4 arc minute bidirectional ± 12.5 microns 45 kg (speed and gear ratio dependent) 23 kg (speed and gear ratio dependent) 0.07 to 0.11 N-m 3.6 kg Home magnetic reed switch Speed vs. Load Gear Ratio Max Speed Max Speed Max Low Speed 45:1 30 RPM 4.5 kg RPM 90:1 10 RPM 11 kg 45 5 RPM 180:1 7 RPM 11 kg 45 3 RPM Limit Switch Option LS-1 (under 320 ) Rotary Encoder Option RE-500/1000 Options Limit switch (normally open and closed output) 500 and 1000 line encoder (Encoders are easily applied to the back of the motor to accurately read positions for motion profiles.) Motor Options: 2302 Step motor (includes cable and connector) 5302 Brushed servo motor 1616 Brushless servo motor Concentricity at Center Hole ± 5 microns Notes: 1 All specifications are based on measurements taken while the unit is mounted to a surface, flat within 2.5 µm. 2 Repeatability is achieved provided the motor and drive resolution is better than 0.1 arc minute 3 Flatness of rotation is measured while stage is mounted to a flat granite table. The indicator base is placed on the granite and the indicator needle is placed on the edge of the GR-XA top plate (approximately 75 mm from the center). While the stage may rotate flat, this specification does not apply to the parallelism of the top plate to the base.

23 Z-Wedge Precision Vertical Lift Stage Product Features Compact footprint easily integrates into multi-axis positioning systems Ballscrew drive provides high stiffness and excellent stability Glass scale encoder for ultra-high resolution feedback Repeatable to ±0.5 um Rugged aluminum construction for lightweight and great value Cross roller linear bearings provide smooth motion and maximize rigidity Maximum travel 12 mm Ideal for: Autofocus stages Wafer scanning 360 degree access to workpiece High Accuracy Vertical Motion Stage. The Anorad Z-Wedge provides high precision motion control for vertical applications requiring 360-degree workpiece access. The stage design has been optimized for smoothness and rigidity by careful engineering of all critical positioning components. A precision ground ballscrew, mounted in rigid support bearings, provides extremely repeatable position control. A stiff metallic bellows-type coupling attaches the ballscrew to the drive motor to minimize angular deflections and maximize system response. The vertical lift stage rides on a set of high precision, preloaded ultra-smooth crossed roller bearing ways to permit extremely fine mechanical resolution. Resolution is further enhanced by collecting feedback information from a highly stable, glass scale encoder with a signal interpolator that provides nanometer level electrical resolution. Pure vertical motion is assured by a second set of ground linear guides along the Z-axis. The net result of all this engineering expertise is a compact, rigid yet lightweight stage that offers excellent stability, resolution and speed control. Rapid move and settle times as well as very tight constant velocity control are all readily achieved using the Anorad Z-Wedge vertical lift stage.

24 Z-Wedge Precision Vertical Lift Stage Specifications Dimensions (mm) x x Slide Length 2 x x Base mounting holes for M6 or 1/4" SHCS 6 x Carriage Mounting Holes M5-0.8 x 10 mm DP ± Slide Width 76.5 Shown at upper most travel Base Length Base Width Positioning Capabilities Performance Specification Travel 12 mm Linear Accuracy 2.0 µm (3 mm travel) Repeatability 0.5 µm Electrical Resolution 1 nm (with 4096 x interpolation) Minimum Step Size 50 nm Maximum Velocity 1 12 mm/s Maximum Load Capacity 20 kg Straightness/Flatness ± 2 µm (full travel) Pitch/Yaw Accuracy ± 5.4 arc sec/mm Stage Weight ~ 5 kg Move & Settle Times 1 (3mm) Move (µm) Settle (µm) ± ±0.1 ± 0.1 Time (ms) Constant Velocity Performance 1 (3mm) Speed (µm/s) Variance (%) Notes: 1 Maximum acceleration and speed are a function of customer payload and move profile.

25 Additional Stage Offerings Anoride Linear Rigid highly damping Meehanite cast iron construction Elegant two-piece design with factory set permanent preload Linear motor and ball screw actuation options DDR-90 Rotary Direct drive servo motor provides quick response Miniature size for small form factor photonics applications High resolution feedback to 0.43 arc-seconds Compact Linear Small, low profile design Crossed roller bearings for smooth motion Cleanroom version available

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