Surface Scanning Probes for Lighthouse Particle Counters Solair Gen D/E

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1 1. Why surface particulate detection? In many branches of industry the manufacture of an ultraclean surface is crucial to the functionality and quality of the product. Particles have an impact on the overall effectiveness of process equipment, decreasing tool availability and increasing defects, reject rates and costs. Therefore avoiding particles on surfaces is an essential task of an effective quality assurance. The question is how to obtain reliable data giving evidence of the cleanliness of critical parts, work surface and process equipment etc.? 2. The Solution Surface Scan Probes hooked up to ordinary APCs With Surface Scan Systems the user can instantly assess the cleanliness of critical surfaces (e. g. supply chain QA) and the effectiveness of cleaning procedures. Its unique technology and portable design makes Surface Scan Systems the perfect tool Companies concerned with surface cleanliness. 3. Benefits of Surface Scan Systems Inspection of cleanliness before and after cleaning processes (work pieces, tools, equipment, cleanrooms, etc.). Qualification of processes Cleanliness qualification of incoming and outgoing materials Reduction of down times (e. g. maintenance circles) Reduction of defect and reject rates and hence increase of productivity 4. Major pros of Surface Scan Systems - Online I Direct I Rapid - Making the standard Solair airborne particle counter a double use system (APC + SPC = surface particle counter) - Available for multiple airflows ( ) - Non destructive - Eliminating human error sources - Antistatic design (10-9 Ω) - Ionization unit as accessory available (XL.50.P-ILS) PAGE 1 / 5

2 SURFACE SCANNING PROBES HOOKING UP TO LIGHTHOUSE SOLAIR GEN D and GEN E 1 P.12.P- SURFACE SCAN PROBE P.12.P-HARDLIP FACEPLATE- PROBE : 12 MM 2 P.20.P- SURFACE SCAN PROBE P.20.P-HARDLIP FACEPLATE- PROBE : 20 MM 3 P.30.P- SURFACE SCAN PROBE P.30.P-HARDLIP PROBE : 30 MM 4 P.50.P- SURFACE SCAN PROBE P.50.P-HARDLIP PROBE : 50 MM 5 P.70.P- SURFACE SCAN PROBE P.70.P-HARDLIP PROBE : 70 MM PAGE 2 / 5

3 SURFACE SCANNING PROBES FOR LIGHTHOUSE SOLAIR GEN D and GEN E SOLAIR 5500 PICTURE(S) ITEM # FLOW RATE 6 P.12.P-HLP- 7 P.20.P-HLP- 8 P.30.P-HLP- 9 P.50.P-HLP- 10 P.70.P-HLP- SURFACE SCAN PROBE P.12.P-HARDLIP FACEPLATE- PROBE : 12 MM FLOW RATE: SURFACE SCAN PROBE P.20.P-HARDLIP FACEPLATE- PROBE : 20 MM FLOW RATE: SURFACE SCAN PROBE P.30.P-HARDLIP FACEPLATE- PROBE : 30 MM MIKRON ( MIKRON) FLOW RATE: SURFACE SCAN PROBE P.50.P-HARDLIP FACEPLATE- PROBE : 50 MM FLOW RATE: SURFACE SCAN PROBE P.70.P-HARDLIP FACEPLATE- PROBE : 70 MM FLOW RATE: PAGE 3 / 5

4 SURFACE SCANNING PROBES FOR LIGHTHOUSE SOLAIR GEN D and GEN E PICTURE(S) ITEM # FLOW RATE 11 P.12.P-HLP- 12 P.20.P-HLP- 13 P.30.P-HLP- 14 P.50.P-HLP- 15 P.70.P-HLP- SURFACE SCAN PROBE P.12.P-HARDLIP FACEPLATE- PROBE : 12 MM FLOW RATE: SURFACE SCAN PROBE P.20.P-HARDLIP FACEPLATE- PROBE : 20 MM FLOW RATE: SURFACE SCAN PROBE P.30.P-HARDLIP FACEPLATE- PROBE : 30 MM FLOW RATE: SURFACE SCAN PROBE P.50.P-HARDLIP FACEPLATE- PROBE : 50 MM FLOW RATE: SURFACE SCAN PROBE P.70.P-HARDLIP FACEPLATE- PROBE : 70 MM AIRFLOW: PAGE 4 / 5

5 SURCHARGE ACCESSORIES & UPGRADES FOR SCANNING PROBES (EXCEPT XL.50.P-ILS-) µm 0.1F SOFT-LIP- RIM SOFT ALL SOLAIRS ALL SOLAIRS IMPROVED DOWN TO 0.1 MIKORN IN CASE OF COMBINING THE SCANNING PROBES TO 0.1 µm APCs such Solair 1100 LD 30 OR 50 MM FACEPLATE WITH SOFT-LIP-RIM MADE OF LATEX RUBBER GUARANTEEING A 100% CLOSE TIGHTHNESS TO AMBIENT CONDITIONS AND A PERFECT NESTLING TO UNEVEN SURFACES (NOT AVAILABLE FOR 70 MM SCANNING PROBES) 18 AD-GEN D/E ALL SOLAIRS ADAPTER CABLE FROM SCANNING PROBE TO PIC CONNECTOR OF GEN E SOLAIRS 19 CRIT-ORI- CRITICAL ORIFICE IN LINE FOR REDUCING AIRFLOW OF OR SOLAIRS TO 1 CFM SURFACE SCAN PROBE XL.50.P-ILS FOR BOULDER 20 ION.XL. (30) 50.P-ILS 21 ION.XL. (30)50.P-ILS 30/ 5.0 µm 30/ () 5.0 µm TO BOULDER BOULDER COUNTER FOR USE WITH BOULDER COUNTER SURFACE SCAN PROBE ION.XL. (30)50.P-ILS (ILS = INTEGRATED LASER DIODE SENSOR) FOR DETECTION AND ANALYSIS OF PARTICLE DEPOSITS ON SURFACES ABOVE 5 MICRONS PROBE : 50 MM STANDARD (STANDARD RANGE): 5 MIKRON (5-100 MIKRON) THE BOULDER LASER DIODE SENSOR IS DIRECTLY INTEGRATED IN THE SCANNING PROBE HEAD. IONISATION UNIT (IN LINE INSTALLED) FOR SURFACE SCANPROBE XL.(30)50.P-ILS PAGE 5 / 5

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