Surface Cleanliness Martin Derks

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1 Surface Cleanliness Martin Derks 1

2 Contamination Monitoring Solutions: Contamination: "Any foreign material or energy that has a detrimental effect on a product or process Monitoring Solutions for: Particles Airborne Molecular Contamination Electrostatic Charge Electrostatic Discharge EMI Humidity Temperature Pressure Air Velocity Vibration Colony Forming Units TOC,pH, Resistivity And more 2

3 Headquarters: Fremont, CA Medford Research and Development Engineering Pilot Production Executive Management Fremont 3

4 Lighthouse Benelux Boven Leeuwen 4

5 How Clean is Clean "how clean is clean in relation to given parameters? "how clean is clean enough? "how clean are the results of one cleaning process compared to another cleaning process?" 5

6 Particles Solid aerosol particles are all around us. 6

7 Distribution of Aerosol Particles >20µm = Gravitational influence dominates N/ log(d) = 24.0d <0.1µm = Electrostatic attraction and diffusion dominates 7

8 Optical Particle Counting Particle Counter ANNO

9 OK monitoring systemen 9

10 :05: :45: :25: :05: :45: :25: :05: :45: :25: :05: :45: :25: :05: :45: :25:23 Activiteiten. Alarmering? , , , , , ,0 OK 8 0,5 micron Alarm , , ,0 0,0 10

11 :05: :35: :05: :35: :05: :35: :05: :35: :05: :35: :05:13 Schoonmaak probleem. Alarmering? OK 8 5,0 micron ,0 Deeltjes 5,0µm , , , ,0 OK 8 Inleiding 5,0 micron 40000, ,0 0,0 11

12 Deeltjesneerslag Afmeting in µm Gemiddelde valsnelheid ronde deeltjes in stilstaande lucht Valsnelheid in mm/s Valtijd over 1 m tijd 0.5 0,01 25 uur 1 0,04 8 uur 5 0,7 25 min min sec sec sec 12

13 Deeltjes depositie vs Oppervlakte reinheid DDK Deeltjesdepositie klasse DDK is de toename van het aantal deeltjes per dm² per uur op een testoppervlakte Als basis voor de klasse is 1µm gekozen DDK is hulpmiddel om risico van contaminatie doorneerslag van deeltjes te bepalen: RISICO: = bloodstellingstijd DDK 100 betekent: 10 deeltjes >10µm per dm² per uur 2 deeltjes >50µm per dm² per uur 1 deeltje> 100µm per dm² per uur 13

14 Relative Size Micron Scale Andenovirus Micron Virus 0.1 Micron Human Blood Cell 7 Micron E-Coli 0.5 Micron Human Hair Micron 35 Micron Visible Particles 14

15 Relative Size Gas Molecules (AMC) 2-50 Å ( µm) 0.3 µm particle 0.1 µm particle 15

16 Personeel als grootse Vervuiler 5 tot 10 miljoen huidcellen per dag (30 gram) 2300 micro-organisme per cm² 25µm vallende deeltjes 5µm zwevende deeltjes Tussen 5µm en 25µm overgangsgebied 16

17 Surface Testing Methods: Non-Standard Surfaces Some Surfaces May Be Located in Hard to Reach Areas Some Parts May Be Too Small Alternate Testing Methods May Be Used 1. Tape Lift 2. Part Rinse 17

18 Deeltjes Depositie Klasse 18

19 Surface Particle Cleanliness Class ISO SPC 19

20 Witness plates Deposited particles can have a greater impact on high-technology manufacturing processes than airborne particles. A witness plate is a flat, particle-free object made from the same materials as the product being manufactured (for example: if you make ABS plastic products, you should use ABS plastic witness plates). 20

21 wafer inspection system > 0,1µm 21

22 PartSense: Portable System > 2,0µm 22

23 Measuring Principle: Technique Illumination with Glancing Light Fading out the rough surface Imaging of the Particles Using Optics Image Recording Using a Digital Camera Analysis of the Images Using Digital Image Processing 23

24 Measuring Principle > 25µm 24

25 Surface Cleanliness qualification method GSA Grade 4 cat. 1, 2 & 3 UV-A Blacklight inspection GSA

26 Fluorescentie UV light source Camera Filter λ 375nm λ 400/500 nm 26

27 Application area : Grade 1, 2, 3, and 4 Measurement area : 100 x 100 mm Every surface / substrate can be measured, except fluorescent one s. ( only when the tool can be placed correctly, stray light should be eliminated! ) Roughness / reflectivity of the substrate is not an issue. 27

28 Functionality : P.A.C. ( Percentage of Area Covered ) Size of the individual fluorescent particle s on the surface Number of fluorescent particle s on the surface. Length and width of the individual fluorescent particles Measurements are reproducible Ability to do a qualitative check of a surface s particle contamination and have immediate feedback OK or NOK 28

29 UV Surface Particle Counter - Produced by Lighthouse - Developed by ASML Only UV (λ 375nm) fluorescent particles / fibers can be seen with the tool. (range is 400 / 900 nm light ) 29

30 Substrate is a Circuit Board with Components. 30

31 Circuit Board with Components, Detail from previous slide. 31

32 Product surface = 1 dm 2 Specification = 4 particles/dm 2 Product 1dm 2 R Q no action required Cleaning needed 4 particles/dm 2 6 particles/dm

33 GSA vs Area size Product surface < 1 dm 2 Specification = 4 particles/dm 2 Product 0.5 dm 2 1dm 2 Calculation = amount of detected particles x (1 dm 2 / product area) eg 6 = 3 X (1/0.5) = 3 X 2 R Q no action required Cleaning required 4 particles/dm 2 6 particles/dm

34 GSA vs Area size Product surface > 1 dm 2 Specification = 4 particles/dm 2 Product 4 dm 2 1dm 2 R no action required 4 particles/dm

35 GSA vs Area size Product surface > 1 dm 2! Specification = 4 particles/dm 2 Product 4 dm 2 1dm 2 Q R CLEANIN G NEEDED! 35

36 Particle Fallout prediction Particle deposition on critical surfaces affect the functionality of ASML scanners.. The simple mechanism of PFO spread at ASML cleanrooms: Production Activities Particle generation Airborne contamination N c (particles/m 3 ) Time & Space dependent deposition PFO rate ṅ (particles/m 2 /time) The project involved experimental modeling of this mechanism to establish a relationship between N c and ṅ of the form shown below: n( x m,t) (N c) t (Distance) 36

37 Dust feeder witnesswafers Particle Counters 0,1µm 37

38 Surface Particle Counter 38

39 50µm Particles Vezel 39

40 Resultaat metingen: - DNK (Deeltjes Neerslag Klasse) - ORK (Oppervlakte Reinheid Klasse) - Deeltjeslijst ( positie deeltje en eigenschappen) - Aantal deeltjes per klasse 40

41 Surface Particle Probe Counter 41

42 42

43 Thank You 43

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