0 / SEISMIC & VIBRATION MEMS SENSORS

0 / SEISMIC & VIBRATION MEMS SENSORS

BORN FROM TECHNOLOGY AND GROWN TO AN INDUSTRIAL LEADER Colibrys started in 2001 as a spin-off from a Swiss technological incubator CSEM and matured as a SAFRAN Group company from 2013

MEMS SENSORS MEMS capacitive sensors are: Small Resistant Performant Cost Effective One technology, numerous applications:

WHY ARE VC SENSORS REPLACING PIEZO SOLUTIONS? 3 technologies available for vibration sensing, VC is the newest Piezo Electric (PE) quartz/ceramic 3Hz 30kHz 20000g -200 C 700 C excellent signal to noise no DC signal accuracy 10% sensitive to temperature variation no self-test Piezo Resistive (PR) bridge DC 0Hz 6kHz 2000g (crash test) -55 C 125 C good signal to noise bad drift (zero shift) accuracy 10% sensitive to temperature variation (need external compensation) no self-test 3D Bulk MEMS Variable Capacitance (VC) DC 0Hz 6kHz ±1,2,5,10,30,50,100,200g -55 C 175 C (SOI +300 C) excellent signal to noise accuracy 0.1% high stability over time and temperature (durability testing) true internal self-test 3 /

NEW STATE OF THE ART 6 SILICIUM FOUNDRY 8+ Million MEMS delivered 1+ Million MEMS Sensors 25+ years of experience Extensive designs for multiple applications Worldwide support & distribution Best in class equipment Own unique processes 54 patents

ColibrysACCELERATION Reference in Accuracy ColibrysVIBRATION MEMS For Low To Medium Frequency Inertial Sensor Inclinometer Vibration Sensor Seismic Sensor ColibrysGYRO Cost Effective Alternative To FOG Gyrometer Sensor Gyrometer Module ColibrysCUSTOM MEMS Experts At Your Service Foundry Services Custom Solutions 6 /

COLIBRYS PRODUCT PORTFOLIO 2001 02 03 04 05 06 07 08 09 10 11 12 13 14 15 16 20 MS8000 HS8000 MS9000 RS9000 TS1000T MS7000 Legacy products SiFlex SF1600+SF2006 VS9000 VS1000 SEISMIC SI1000 GS1000 Future products 7 /

RAILWAY TECHNOLOGY INNOVATIVE BOGIE MONITORING SYSTEM Colibrys vibration sensors qualified by Siemens to build high-speed trains

TEST & MEASUREMENT AUTOMOTIVE TESTING Colibrys MEMS world reference ride quality / durability, vehicle dynamics, ride & NVH, head rest vibration 9 /

MONITORING & CONTROL VIBRATION MONITORING track in real time frequencies, overload, vibration and shock 10 /

SEISMIC STRONG MOTION SEISMIC Class C 90dB the VS1000 has an ultra-low noise in band of 7μg/ Hz for the ±2g range 11 /

WHAT IS INSIDE THE NEW VS1000? MEMS SENSOR Optimized frequency response Improved die attach NEW ASIC Improved bandwidth, non linearity, noise Overload detection and recovery after shocks Differential output LCC SUBSTRATE The new Colibrys ASIC represents a multi-million dollars project, with approximately 10 full-time top-notch engineers during 4 years (2012-2015) Identical mechanical design as VS9000 New pinout 13 /

HOW DOES THE VS1000 WORK? Functional Block Diagram g MEMS OUTP V t dc dv Amplifier t OUTN Self-Test Error ERR Reset Temperature TEMP ISO 9001, ISO 14001, OHSAS 18001 14 /

VS1000 PRELIMINARY DATASHEET Parameter, typical values VS1002 VS1005 VS1010 VS1030 VS1050 VS1100 VS1200 Unit Full-scale acceleration ± 2 ± 5 ± 10 ± 30 ± 50 ± 100 ± 200 g Frequency range (±5 %) 0-700 0-1 150 0-2 000 0-2300 0-2700 0-2 900 0-2 500 Hz Frequency range (±3dB) 0-1 150 0-1 900 0-3 200 0-4 000 0-4 500 0-5 000 0-7 000 Hz Non-linearity (full scale) 0.1 0.1 0.1 0.1 0.1 0.1 0.1 % Noise (in band) 7 17 34 102 170 339 678 µg/ Hz Scale factor (nominal) 1 350 540 270 90 54 27 13.5 mv/g Scale factor temperature coefficient 120 120 120 120 120 120 120 ppm/ C Bias temperature coefficient ±0.2 ±0.5 ±1 ±3 ±5 ±10 ±20 mg/ C Shock Survivability 6 000 6 000 6 000 6 000 6 000 6 000 6 000 g 15 /

NEW ASIC 200 000 HZ CLOCK OFFERS OUTSTANDING FLAT FREQUENCY RESPONSE Gain Frequency range from DC 0Hz up to 2500Hz (typ) @ ±5%, 7000Hz @ ±3dB 1.02 1 0.98 0.96 0.94 0.92 VS9030 VS1030 0.9 0 500 1000 1500 2000 Frequency [Hz] 16 /

Sensitivity [µv/g] INCOMPARABLE TEMPERATURE STABILITY EXCELLENT LINEARITY FOR EASY COMPENSATION Output at 0g [mv] Scale factor temperature coefficient (Sz) = 120ppm/ C (typ) Bias temperature coefficient (So) = ±0.2mg/ C (min/max) for VS1002 2000 1500 1000 500 0-500 -1000-1500 VS9000 VS1000-2000 -50 0 50 100 Temperature [ C] 20 15 10 5 0-5 -10-15 VS9000 VS1000-20 -50 0 50 100 Temperature [ C] 17 /

Non-linearity [% FS] NON-LINEARITY BECOMES ALMOST NONEXISTENT Non-linearity < 0.1% (typ) of full scale, under vibrations 0.3 0.2 0.1 0-40 -20-0.1 0 20 40 VS9030 VS1030-0.2-0.3 Acceleration [g] 18 /

LOWER NOISE FOR BETTER MEASUREMENTS Noise in band (typ) VS1002 : 7μg/ Hz VS1005 : 17μg/ Hz VS1010 : 34μg/ Hz 19 /

VS1000 & VS9000 PERFORMANCE IMPROVEMENTS 20 /

VS1000 : THE NEW REFERENCE IN PERFORMANCE 21 /

COMPARISON NOISE VS1000 VS COMPETITOR S 22 /

SELF-TEST FUNCTION Self-test signal (internally generated) on the differential acceleration output (frequency: 24Hz / amplitude 1g) 23 /

RECOMMENDED CIRCUIT + PCB LAYOUT (GERBER FILE) Power Supply Accelerometer Sensor Output signal conditioning 24 /

EACH PRODUCT IS FULLY TESTED AND QUALIFIED TO THE STRONGEST COLIBRYS STANDARDS. Frequency response Non linearity Bias calibration Bias temperature coefficient Scale factor calibration Scale factor temperature coefficient Self-test function Temperature sensor Reset function POR (Power- On-Reset) function Operating current consumption

ALL DOCUMENTATION YOU NEED IN ONE CLICK Datasheet ±2,5,10,30,50,100,200g Recommended circuit Application notes Automotive testing Bogie monitoring Machine health monitoring (MHM) Seismic prevention Structural health monitoring (SHM) Wind turbine Technical notes Design an evaluation board Gerber file to manufacture the PCB board of the evaluation board Convert a differential output into a single output Handling, mounting & soldering recommendations All on colibrys.com 29 /

MEMS IS THE FUTURE o Colibrys is currently developing the next generation of seismic MEMS sensors Class B o Our current target is an ultra-low noise in band of 0.6μg/ Hz (typ) for a ±3g acceleration range and 1.0μg/ Hz (typ) for a ±5g ; a frequency range from <0.1Hz to 1000Hz ; a power consumption of 40mW ; a hermetic ceramic package of 0.8cm3. o Please contact us for further information concerning the datasheet and the availability of samples. 30 /