Leader in Vacuum Valves

Leader in Vacuum Valves

Vacuum Valve Applications 2 Today s high-tech manufacturing and research often require a reliable, high quality vacuum environment. Applications for vacuum valves include: - Semiconductor manufacturing - Solar cell manufacturing - Flat panel production - Glass and tool coating - Metallurgy - Surface analysis - High energy physics - Synchrotrons - Laser technology - Space simulation - Nuclear processes Such a variety of applications asks for a wide choice of vacuum valves. VAT offers by far the largest choice of vacuum valves worldwide: A variety of more than 1000 stand ard valves can be ordered from our catalog. VAT valves have the highest market share worldwide. They are standard components in production equip - ment as well as at R&D facilities. 3 4 1 VAT Swiss Headquarters and R&D 2 Cleanroom Assembly 3 Parts Production 4 Sales & Service Center Final Products based on Vacuum Technologies Vacuum Production Systems Vacuum Valves

Committed to Inno ion 1 InnoVATion Since its foundation in 1964 VAT has fully specialized in vacuum valve technology. One third of the company is R&D, product groups and labs. Important sealing technologies have been invented and patented by VAT under trade names such as VATLOCK, VATRING and MONOVAT. Long-Term Commitment VAT today employs more than 700 people, mainly technical staff. VAT is family owned and totally self financed. We are committed to be the best partner to our customers for vacuum valves. We are proud to both support valves sold more than 20 years ago and collaborate in engineering the vacuum systems of tomorrow. VATLOCK VATRING MONOVAT

Development and Verification Virtual Prototype During product development, many calculations and simulations are carried out to allow a high degree of product maturity to be reached by the time of the first prototoye. Design Verification Innovation is important, but equally important is reliability. This is why we verify the specification of our products. We do both design verification of new products and product audits from routine manufacturing. Valve Laboratory This is our most important lab. Typical tests done here are: - Vacuum performance - Lifetime (cycle life) and mechanical wear - Bake-out - Pressure rise tests, spectrum analysis of residual gases - Opening / closing speed - Pressure control performance - Alternative sealing materials

Quality & Process Management Particle Laboratory Especially for semiconductor equipment it is essential to keep particle counts at the lowest levels. In this lab we measure particles generated by cycling valves under various conditions. Quality for us means meeting commitments and continuous improvement. We are committed to ingenious products, state-of-theart manufacturing and excellent customer service. acting environmentally conscious and adhering to the standards regarding work safety and business ethics. Quality & Process Management VAT maintains a company wide, intranet based Quality & Process Management System (QMS) according to ISO 9001/ 14001. This QMS covers all aspects of product quality, process excellence, work safety and environmental protection. Closed loop controls and monitoring of key performance indicators ensure ongoing improvements and progress. On request, we provide Certificates of Compliance, Inspection & Test Certificates, ISO Assessment Certificates etc. Customer acceptance tests at our Swiss manufacturing facilities are always welcome upon agreement.

Manufacturing Competence Centers for Parts In order to enable short lead times and develop key manufacturing technologies, one third of VAT's parts manufacturing is done internally in specialized production cells. Each cell s responsibilities include process quality - first article inspection (FAI) and statistical process control (SPC) as well as on time deliveries and cost control. Machined Parts Cell Machining is fully automated. Our machines are linked together with direct numerical control (DNC). For extended capacity an unmanned night shift can easily be brought on-line. Vulcanized Parts Cell Today s semiconductor processing tools demand a variety of sealing compounds. Here we develop the bonding and vulcanization tools and processing equipment.

Electronic Controller Cell Design and development for all electronic valve controllers is carried out by VAT. This includes both software and hardware. Design verification, order configuration, 100% final inspection and testing are all carried out internally. Valve Assembly All valves undergo a computer control led final inspection which includes several functional cycles, leak rate measurements and other parameters. Data is stored and analyzed for assur ance of a good safety margin for long -term reliability. Welded Components Cell For precise alignment of flanges and narrow tolerances of valve bodies both semiautomatic tooling and robot welding is applied.

Angle Valves Vacuum Series 24 Aluminum, Stainless Steel 10-7 Angle or inline valve with shaft feedthrough for large gas flows Manual, pneumatic Flange: ISO-KF, ISO-K Sizes: I.D. 10 to 1000 mm (⅜" to 40") High Vacuum 10-8 Series 26 Aluminum, Stainless Steel Angle or inline valve with bellows feedthrough Manual, pneumatic, electro-magnetic Flange: ISO-KF, ISO-K, CF-R Sizes: I.D. 10 to 160 mm (⅜" to 6") Ultra High Vacuum 10-10 Series 28 Flange: Sizes: Stainless Steel Angle valve with bellows feedthrough and metal bonnet seal for extremely low outgassing rate Manual, pneumatic CF-R I.D. 16 to 63 mm (⅝" to 2½") Extreme High Vacuum <10-10 Series 54, 57 Stainless Steel All-metal angle valve for UHV and XHV applications Manual, pneumatic Flange: CF-R Sizes: I.D. 16 to 160 mm (⅝" to 6") Vacuum range in mbar / mtorr

Gate Valves Series 012, 08, 12 Aluminum Low cost gate valve with shaft feedthrough Manual, pneumatic Flange: ISO-KF, ISO-F, JIS, DIN insert Sizes: I.D. 16 to 320 mm (⅝" to 12") (for sizes > DN 320 see series 19) Series 14 Stainless Steel General purpose gate valve with rotary feedthrough Manual, pneumatic Flange: ISO-F, CF-F, ASA-LP, ASA, JIS Sizes: I.D. 63 to 400 mm (2½" to 16") Series 010, 10 Stainless Steel Gate valve with bellows and metal bonnet seal for UHV applications Manual, pneumatic Flange: ISO-KF, CF-F, ISO-F, ASA-LP Sizes: I.D. 25 to 320 mm (1" to 12") (for sizes > DN 320 see series 19) Series 48 Stainless Steel All-metal gate valve for UHV and XHV applications Manual, pneumatic Flange: CF-F Sizes: I.D. 16 to 320 mm (⅝" to 12")

Transfer Valves Door Valve Series 07 Aluminum, Stainless Steel Door valve for load lock chambers, virtually particle and vibration free Pneumatic Flange: SEMI interface and various other types Sizes: Height: 37 mm (1.5") to 250 mm ( 10") Width: 160 mm (6.3") to 3500 mm (140") Transfer Valve with linear drive Series 02, 03 Aluminum, Stainless Steel Transfer valve or insert, virtually particle and vibration free Pneumatic Flange: SEMI interface and various other types Sizes: Height: 25 mm (1.0") to 56 mm (2.2") Width: 160 mm (6.3") to 700 mm (28") Transfer Valve with L-actuation Series 04, 05 Aluminum Transfer valve or insert for corrosive processes, virtually particle and vibration free Pneumatic Flange: SEMI interface Sizes: 46 x 236 mm (1.8" x 9.3") 50 x 336 mm (1.9" x 13.2") Large Size Transfer Valves For FPD and PV production systems or any other large coating systems. Wide variety of sizes up to 3000 mm (120")

Control Valves Soft-pump / Vent Valve Series 29 Aluminum, Stainless Steel Angle valve with adjustable throttling position for pump down and venting with reduced turbulences, particle and substrate agitation and condensation Pneumatic Flange: ISO-KF Sizes: I.D. 25 to 250 mm (1" to 10") Throttling System or Throttling & Isolation System Series 61 Aluminum, Stainless Steel Butterfly valve pressure control system for downstream applications Stepper motor, actuated via adaptive, integrated controller Flange: ISO-KF, ISO-F, CF-F, ASA-LP, JIS Sizes: I.D. 25 to 250 mm (1" to 10") Throttling & Isolation System Series 64 Stainless Steel Gate valve pressure control system for downstream applications 3-position pneumatics or stepper motor, actuated via adaptive pressure controller Flange: ISO-F, CF-F, ASA-LP, ASA, JIS Sizes: I.D. 100 to 400 mm (4" to 16") Throttling & Isolation System Series 65 Aluminum (Option: hard anodized) Pendulum valve pressure control system for downstream applications Stepper motor, actuated via adaptive, integrated controller and pneumatics for leaktight closing Flange: ISO-F, JIS Sizes: I.D. 100 to 400 mm (4" to 16")

Compact Valves Vatterfly Valve Series 20 Aluminum, Stainless Steel Compact isolation valve with two-step turn-and-tilt mechanism, virtually particle free Manual, pneumatic Flange: ISO-F, CF-F Sizes: I.D. 63 to 200 mm (2½" to 8") Pendulum Valve Series 16 Aluminum (Option: hard anodized) Compact isolation valve, ideal for demanding semiconductor processes as well as for large coating and FPD production systems, virtually particle free Pneumatic Flange: ISO-F, ASA-LP, JIS Sizes: I.D. 63 to 500 mm (2½" to 20 ) Heating Compounds and Coatings Self-regulating heating device with insulation Choice of sealing materials Uniform temperature distribution Heating jackets for controlled bakeout Various surface coatings

Valves for Specific Applications Series 47 RF-Bridge Valve All metal gate valve used as sector valve in accelerators and storage rings Series 75, 77 Fast Closing Valves/Shutters Series 19 VERY LARGE Gate Valve for large vacuum vessels used in e.g. fusion research and space simulation Sizes: I.D. 400 to 1600 mm (16" to 63") 75: Seals vacuum-tight within milliseconds 77: Reduces full conductance to a small leak within milliseconds Accessories Series 31 33 Fittings Range of quality accessories Series 35 VATSEAL Patented metal seal for flat flanges Bellows COMVAT: www.comvat.com

Multi-valve Modules and Customized Valves Multi-valve Modules Various valves or valve mechanisms are interconnected or integrated in a common housing to provide multiple functions within only one component. The design is customerspecific and thus allows optimal adaptation to the customer system and ample scope to meet also unusual customer requirements. Advantages are: - Compact - Cost-saving - Easy installation - Low risk of leakage - Only one contact Inserts A variety of valve types can be integrated. Early involvement of VAT s product engineers in the design phase of customer systems ensures both optimized technical solutions and lowest cost. Special Valves Despite our vast choice, you may still require a special solution. With more than 40 years of experience and a broad knowledge of sealing and valve technology, VAT has the resources to offer reliable and cost efficient solutions.

Engineering Support Joint Development We offer a Variety of Support Engineering Compe tence through specialized Product Groups In order to meet performance and cost targets of today s OEM systems a close collaboration among engi neering is necessary. Please contact us! - On-site workshops - Valve specification advice - On-site design collaboration for specials and integrated solutions - Design verification PG 1 Angle Valves PG 2 Gate Valves PG 3 All-Metal Valves PG 4 Transfer Valves PG 5 Control Valves PG 6 Large Transfer Valves PG 7 Multi-valve Modules

Global Support USA/Canada VAT Inc. 500 West Cummings Park Suites 5450-5650 Woburn, MA 01801 Tel (0781) 935 1446 Fax (0781) 935 3940 Email US@vatvalve.com KOREA VAT Korea Ltd. # 391 Chilgue-Dong Pyongtaek-City Gyeonggi-Do, 459-050 Tel (031) 662 68 56 Fax (031) 662 68 71 Email KR@vatvalve.com TAIWAN VAT Taiwan Ltd. 8F-6, No. 81, Shui-Li Road Hsin-Chu City 300 Tel (03) 516 90 88 Fax (03) 516 90 99 Email TW@vatvalve.com JAPAN VAT Ltd. (Sales Office) Yokohama Plaza Building Kinko-cho Kanagawa-ku Yokohama 221-0056 Tel (045) 440 0340 Fax (045) 440 0342 Email JP@vatvalve.com (Sales & Service Center) 67-1325 Kizu, Ako City, Hyogo Pref. 678-0165 Tel (079) 148 1680 Fax (079) 148 1681 CHINA VAT Vacuum Valves (Shanghai) Co., Ltd. 848 Yunqiao Road, Building 1, 4th Floor Pudong New Area Shanghai 201206 Tel (021) 5032 6658 Fax (021) 5032 6320 Email CN@vatvalve.com SINGAPORE VAT Singapore Pte. Ltd. Wisdom Industrial Building 38A Jalan Pemimpin # 01-01 Singapore 577179 Tel +65 6252 5121 Fax +65 6252 5127 Email SG@vatvalve.com BENELUX VAT Contact Office Zuiderstraat 30 NL-3434 BN Nieuwegein Tel (031) 30 6018251 Fax (031) 30 6018252 Email NL@vatvalve.com FRANCE VAT S.A.R.L. Z. I. des Godets, SILIC 419 F-91374 Verrières-le-Buisson Tel (0) 1 69 20 69 11 Fax (0) 1 69 20 90 08 Email FR@vatvalve.com GERMANY VAT Deutschland GmbH Am Hochacker 4 D-85630 Grasbrunn Tel (089) 46 50 15 Fax (089) 46 37 65 Email DE@vatvalve.com GREAT BRITAIN VAT Vacuum Products Ltd. Edmund House, Rugby Road Leamington Spa Warwickshire CV32 6EL Tel 01926 45 27 53 Fax 01926 45 27 58 Email UK@vatvalve.com Headquarters SWITZERLAND VAT Vakuumventile AG CH-9469 Haag Tel +41 81 771 61 61 Fax +41 81 771 48 30 Email CH@vatvalve.com Representatives in many other countries www.vatvalve.com YB1111EA