Eleventh International Conference on Plasma Surface Engineering

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1 Eleventh International Conference on Plasma Surface Engineering Conference and Exhibition Program September 15 19, 2008 Garmisch-Partenkirchen (Germany) Main Sponsors: Organized by: European Joint Committee on Plasma and Ion Surface Engineering (EJC/PISE)

2 You make it first we make it last Globally in our 45 Coating Centers Component coatings Tool coatings Decorative coatings Medical coatings IonBond Coating Equipment PVD PA-CVD CVD IonBond Group Worldwide Network of 45 Centers Headquartered in Switzerland PVD, CVD, PA-CVD Technology

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18 Monday, September 15, morning Room Richard-Strauss 09:00-09:40 Official Opening Riccardo d'agostino, Conference Chairman Welcome Address Thomas Schmid, Mayor of Garmisch-Partenkirchen Materials Research in the 7th Framework Programme Stefan F. NILSSON, Unit G3 - Industrial technologies - Value Added Materials Research Directorate-General European Commission, Brussels 09:40-10:30 Plenary Lecture PL0000 Chairman: Günter Bräuer, Braunschweig, Germany Challenges and Perspectives of Thin-Film Photovoltaics Bernd Rech Department Silicon-Photovoltaics, Helmholtz Centre Berlin for Materials and Energy, Berlin, Germany 10:30-11:05 Coffee break Oral Session 11:05-11:35 Keynote Lecture KN0100 Session 1: Film growth and structure Chairmen: Ivan Petrov, Illinois, US Marcela Bilek, Sydney, Australia Control of the structure in reactively sputtered Ag-Cu-(Mn)-O films Jean-François PIERSON 1, Carine PETITJEAN 2, David HORWAT 3 1,2,3 LSGS - Ecole des Mines, NANCY, France 11:35-11:55 OR0101 Non-monotonous kinetics of surface roughness during deposition of island films Arvaidas Galdikas 1, Reda Cerepaite-Trusinskiene 2 1,2 Kaunas University of Technology, Kaunas, Lithuania 11:55-12:15 OR0102 Growth mechanisms of MAX phase alloys Mark Tucker 1, Mathew Guenette 2, Johanna Rosén 3, Per Persson 4, Marcela Bilek 5, David McKenzie 6 1,2,3,4,5,6 The University of Sydney, Sydney, Australia 12:15-12:35 OR0103 Structural, electronic, mechanical and thermal properties of Cr-O-N thin films Lorenzo Castaldi 1, Denis Kurapov 2, Andreas Reiter 3, Valery Shklover 4, Patrick Schwaller 5, Joerg Patscheider 6 1 ETH Zurich; Empa, Duebendorf, Duebendorf, Switzerland 2,3 OC Oerlikon, Balzers, Liechtenstein 4 ETH, Zurich, Switzerland 5 Empa, Thun, Switzerland 6 Empa, Duebendorf, Switzerland 16 PSE 2008

19 Monday, September 15, morning Room Richard-Strauss 12:35-12:55 OR0104 Low-temperature formation of highly basal plane oriented Ti2AlN Mn+1AXn phase thin films on amorphous substrates Manfred Beckers 1, Fredrik Eriksson 2, Per. O. Å. Persson 3, Carsten Baehtz 4, Lars Hultman 5 1,2,3,5 Linköping University, Linköping, Sweden 4 ROBL-CRG at the ESRF, Grenoble, France 12:55-14:20 Lunch break PSE

20 Monday, September 15, morning Room Zugspitze Oral Session 11:05-11:35 Keynote Lecture KN :35-11:55 OR0201 Session 2: Photovoltaics coatings Chairmen: Günter Bräuer, Braunschweig, Germany Yuichi Setsuhara, Osaka, Japan Plasma enhanced chemical vapor deposition of ZnO:Al layers for thin film photovoltaics: control on the film growth Mariadriana Creatore 1, I. Volintiru 2, C.I.M.A. Spee 3, M.C.M. van de Sanden 4 1,2,4 Eindhoven University of Technology, Eindhoven, Netherlands 3 TNO Science and Industry, Eindhoven, Netherlands New Development of Cu(In, Ga)Se target materials Stefan Britting 1, Astrid Borkowski 2, Claudia Duetsch 3, Ralph Simon 4, Karl- Uwe van Osten 5 1,2,3,4,5 GfE Metalle und Materialien GmbH, Nuernberg, Germany 11:55-12:15 OR0202 High productive deposited molybdenum layers for back ohmic contacts of solar cells J.-P. Heinß 1, F. Händel 2, T. Meyer 3 1,2,3 Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik FEP, Dresden, Germany 12:15-12:35 OR0203 Influence of Hydrogen Plasma on the Defect Passivation of Small and Large-grained Polycrystalline Si Thin Films Benjamin Gorka 1, Björn Rau 2, Kyu-Youl Lee 3, Pinar Dogan 4, Frank Fenske 5, Christiane Becker 6, Stefan Gall 7, Bernd Rech 8 1,2,3,4,5,6,7,8 HMI, Berlin, Germany 12:35-12:55 OR0204 ATMOSPHERIC PRESSURE PLASMAS FOR COATING AND ETCHING OF SOLAR WAFERS Birte Dresler 1, Ines Dani 2, Elena Lopez 3, Birte Dresler 4, Moritz Heintze 5, Rainer Möller 6, Harald Wanka 7, Ales Poruba 8, Radim Barinka 9, Mathias Kirschmann 10 1,2,3,4 Fraunhofer IWS, Dresden, Germany 5,6,7 centrotherm photovoltaics GmbH, Blaubeuren, Germany 8,9 SOLARTEC s.r.o., Roznov pod Radhostem, Czech Republic 1 Q-Cells AG, Bitterfeld-Wolfen, Germany 12:55-14:20 Lunch break 18 PSE 2008

21 Monday, September 15, morning Room Olympia Oral Session 11:05-11:35 Keynote Lecture KN0300 Session 3: Films for biomedical applications I Chairmen: Michael Wertheimer, Montreal, Quebec, Canada Eloisa Sardella, Bari, Italy Low pressure plasma inactivation of bacterial spores on thermolabile materials Michael Mueller 1, Anke Burger-Kentischer 2, Iris Trick 3, Christian Oehr 4 1,2,3,4 Fraunhofer IGB, Stuttgart, Germany 11:35-11:55 OR :55-12:15 OR0302 Removal of pathogenic biological residuals by means of low pressure inductively coupled plasma discharge Ondej Kylian 1, Hubert Rauscher 2, Lucel Sirghi 3, Francesco Fumagalli 4, Francois Rossi 5 1 European Commission JRC IHCP, Ispra, Italy 2,3,4,5 European Commission JRC IHCP, Ispra, Italy Determination of fundamental sterilization mechanisms in low pressure discharges Helmut Halfmann 1, Benjamin Denis 2, Nikita Bibinov 3, Peter Awakowicz 4 1,2,3,4 Ruhr-Universität, Bochum, Germany 12:15-12:35 OR :35-12:55 OR0304 Reduction of biofilmformation on a-c:h coated implants: investigation of biofilm-surface-interactions by variation of thin film properties Lisa Kleinen 1, Norbert Laube 2 1 Institute of Thin Films Technology, Kaiserslautern University of Technology, Rheinbreitbach, Germany 2 University of Bonn Department of Urology, Bonn, Germany Nano Metal oxide thin films in bio-medical engineering : Oxygenation of human blood with photocatalytic reaction A Subrahmanyam 1, T P J Ramesh 2, R Raj 3, J Gopal 4, K Jagadeesh Kumar 5 1,5 IIT Madras, Chennai, India 2,3,4 Apollo Hospital, Chennai, India 12:55-14:20 Lunch break PSE

22 Monday, September 15, afternoon Room Richard-Strauss 14:20-15:05 Plenary Lecture PL0001 Chairman: Michael Wertheimer, Montreal, Quebec, Canada Plasma processing: Controlling complexity through in situ analysis M.C.M. van de Sanden Eindhoven University of Technology, Eindhoven, Netherlands 15:15-16:25 Poster Session 1, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN0400 Session 4: Tribological coatings I Chairmen: Jörg Vetter, Bergisch Gladbach, Germany Klaus Bewilogua, Braunschweig, Germany Tribological behaviour of titanium carbide/amorphous carbon nanocomposite coatings Juan Carlos Sánchez-López 1, Diego Martínez-Martínez 2, Carlos López- Cartes 3, Asunción Fernández 4 1,2,3,4 Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain 17:15-17:35 OR0401 Nano-designed PVD Hard Coatings in Industrial Research and Application Jörg Vetter 1, Georg Erkens 2, Juergen Mueller 3 1,2,3 Sulzer Metaplas, Bergisch Gladbach, Germany 17:35-17:55 OR :55-18:15 OR :15-18:35 OR0404 Can W-Se-C sputtered coatings be competitive in relation to other self lubricating coatings? Manuel Evaristo 1, Tomas Polcar 2, Albano Cavaleiro 3 1 SEG-CEMUC - Department of Mechanical Engineering, University of Coimbra, Coimbra, Portugal 2 SEG-CEMUC - Department of Mechanical Engineering Universiry of Coimbra, Coimbra, Portugal 3 SEG-CEMUC - Department of Mechanical Engineering Universiry of Synthesis of boron nitride by high power impulse and RF magnetron sputtering Akram Soussou 1, Cyril Duquenne 2, Bassam Abdallah 3, Mihai Ganciu 4, Pierre-Yves Jouan 5, Mohamed-Abdou Djouadi 6 1,2,3,5,6 Institut des Matériaux Jean Rouxel - IMN UMR CNRS 652, Nantes, France 4 Laboratoire de Physique de Gaz et Plasmas CNRS/Universite de Paris-Sud, Orsay, France Effect of the tribochemical reacted film on friction and wear properties of DLC Kentaro Yoshida 1, Takahiro Horiuchi 2, Makoto Kano 3, Masao Kumagai 4 1,2,3,4 Kanagawa Industrial Technology Center, Ebina, Japan 18:35-18:55 OR0405 Smart, temperature-adaptive tribological coatings with wear sensing capability Chris Muratore 1, Jianjun Hu 2, Andrey Voevodin 3 1 Air Force Research Laboratory/UTC, Wright-Patterson AFB, United States 2 Air Force Research Laboratory/UDRI, Wright-Patterson AFB, United States 3 Air Force Research Laboratory, Wright-Patterson AFB, United States 20 PSE 2008

23 Monday, September 15, afternoon Room Zugspitze 14:20-15:05 Plenary Lecture PL0001, Room Richard-Strauss 15:15-16:25 Poster Session 1, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN0500 Session 5: Plasma surface interaction Chairmen: Wolfhard Möller, Dresden, Germany Jorgen Bottiger, Aarhus C, Denmark Oxide target surface modification due to ion bombardment and the applications to reactive sputtering. Tomas Kubart 1, Tomas Nyberg 2, Soren Berg 3 1,2,3 The Angstrom laboratory Uppsala university, Uppsala, Sweden 17:15-17:35 OR0501 Modeling the growth of reactively sputtered TiN by determining the substrate fluxes. Stijn Mahieu 1, Diederik Depla 2 1,2 Ghent University, Ghent, Belgium 17:35-17:55 OR0502 Surface Hardening of AISI H13 Steel Using Pulsed Plasma Electrolytic Carburizing (PPEC) Peyman Taheri 1, Changiz Dehghanian 2, Mina Yaghmazadeh 3 1 University of Tehran, Tehran, Iran 2,3 University of Tehran, Tehran, 17:55-18:15 OR0503 Modification of oxide films on metals by means of low temperature plasmas Peter Thissen 1, Miroslaw Giza 2, Tobias Titz 3, Guido Grundmeier 4 1,2,3,4 Max-Planck Institut für Eisenforschung, Düsseldorf, Germany 18:15-18:35 OR :35-18:55 OR0505 Investigations on the Effect of Dielectric Barrier Discharge (DBD) as Preconditioning Method for Low Temperature Silicon Wafer Bonding Benedikt Michel 1, Marko Eichler 2, Claus-Peter Klages 3 1 TU Braunschweig (IOT), Braunschweig, Germany 2 Fraunhofer IST, Braunschweig, Germany 3 TU Braunschweig (IOT) and Fraunhofer IST, Braunschweig, Germany Structural, corrosion and wear characterization of pulsed nanocrystalline plasma electrolytic carburized CP-Ti Mahmood Aliofkhazraei 1, Alireza Sabour Rouhaghdam 2, Ehsan Mohsenian 3 1,2 Tarbiat Modares University, Tehran, Iran 3 University of Potsdam, Potsdam, Germany PSE

24 Monday, September 15, afternoon Room Olympia 14:20-15:05 Plenary Lecture PL0001, Room Richard-Strauss 15:15-16:25 Poster Session 1, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN :15-17:35 OR :35-17:55 OR0602 Session 6: Films for biomedical applications II Chairman: Christian Oehr, Stuttgart, Germany Pietro Favia, Bari, Italy Plasma- and Photo-chemically Deposited Organic Coatings for Biomedical Applications: the Role of Primary Amines Pierre-Luc Girard-Lauriault 1, Florina Truica-Marasescu 2, Patrick Desjardins 3, Wolfgang E. S. Unger 4, Andreas Lippitz 5, Michael R. Wertheimer 6 1,2,3,6 Ecole Polytechnique de Montréal, Montreal, Canada 4,5 Bundesanstalt für Materialforschung und -prüfung, Berlin, Germany New surfaces for linker free covalent attachment of bioactive protein created using a plasma polymerization process with energetic ion bombardment Marcela Bilek 1, Alexey Kondyurin 2, Yongbai Yin 3, Neil Nosworthy 4, David McKenzie 5, Hynek Biederman 6 1,2,3,4,5 University of Sydney, Sydney, Australia 6 Charles University, Prague, Czech Republic Configuration of plasma processes for the generation of a chemical triple pattern for cell-based RNA arrays Karsten Schröder 1, Benedikt Busse 2, Hartmut Steffen 3, Andreas Ohl 4, Antje Quade 5, Klaus-Dieter Weltmann 6 1,3,4,5,6 INP, Greifswald, Germany 2 zell-kontakt GmbH, Nörten-Hardenberg, Germany 17:55-18:15 OR0603 Deposition of biodegradable polylactic acid coatings using an inline atmospheric pressure plasma system John Tynan 1, Denis Dowling 2, Gerald Byrne 3 1,2,3 University College Dublin, Dublin, Ireland 18:15-18:35 OR0604 Plasma Enhanced Chemical Vapor Deposition of Nano-Structured Fluorocarbon Surfaces Eloisa Sardella 1, Pietro Favia 2, Francesca Intranuovo 3, Pasqua Rossini 4, Marina Nardulli 5, Roberto Gristina 6, Riccardo d\'agostino 7 1,6 Institute of Inorganic Methodologies and Plasma (IMIP) CNR, Bari, Italy 2,3,5,7 Department of Chemistry University of Bari, Bari, Italy 4 Plasma Solution Srl Spin off of the University of Bari, Bari, Italy 22 PSE 2008

25 Monday, September 15, afternoon Room Olympia 18:35-18:55 OR0605 Plasma Processes combined with colloidal lithography to producwe nanostructured surfaces for cell-adhesion Bianca Rita Pistillo 1, Roberto Gristina 2, Eloisa Sardella 3, Sara Lovascio 4, Pietro Favia 5, Marina Nardulli 6, Riccardo d'agostino 7 1 Department of Chemistry, University of Bari, Bari, Italy 2,3 CNR IMIP, Bari, Italy 4,5,6,7 Department of Chemistry University of Bari, Bari, Italy PSE

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30 Tuesday, September 16, morning Room Richard-Strauss 08:30-09:15 Plenary Lecture PL0002 Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR :15-10:35 OR :35-10:55 OR0703 Chairman: Albano Cavaleiro, Coimbra, Portugal Control of Micro- and Nanostructure in Hard Coatings Ivan Petrov Univerisity of Illinois, Urbana, United States Session 7: Tribological coatings II Chairmen: Gerry J. van der Kolk, Venlo, Netherlands Otmar Zimmer, Dresden, Germany PVD oxide coatings for tooling applications Denis Kurapov 1, Jürgen Ramm 2, Wolfgang Kalss 3, Theo Bachmann 4, Max Döbeli 5 1,2,3,4 Oerlikon Balzers AG, Balzers, Liechtenstein 5 Paul Scherrer Institute and ETH, Zürich, Switzerland Disperse- Strengthened by Nanoparticles Coatings Produced by Pulse Electrospark Deposition (PED) and Chemical Reaction Assisted PED Evgeny Levashov 1, Evgenia Zamulaeva 2, Yury Pogozhev 3, Victoria Kurbatkina 4 1,2,3,4 State Technological University "Moscow Institute of Steel and Alloys", Moscow, Russian Federation Bonding structure and tribomechanical properties of Ti-B-C coatings Manuel David Abad 1, Daniel Cáceres 2, Yury S. Pogozhev 3, Dmitry V. Shtansky 4, Juan Carlos Sánchez-López 5 1,5 Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain 2 Departamento de Física, Universidad Carlos III, Spain 3,4 State Technological University, Moscow, Russian Federation Physical and mechanical properties of nanocrystalline or nanocomposite ternary systems for wood machining applications Corinne Nouveau 1, Yacine Benlatreche 2, Hamid Aknouche 3, Luc Imhoff 4, Nicolas Martin 5, Joseph Gavoille 6, Jean-Yves Rauch 7, David Pilloud 8, Christophe Rousselot 9 1,2,3 Arts et Métiers ParisTech, Cluny, France 4 IC Bourgogne, Dijon, France 5,6 ENSMM, Besançon, France 7,8,9 Institut FEMTO ST/CREST, Montbéliard, France 10:55-11:15 Coffee break 11:15-11:35 OR0704 Effect of the High Ion Irradiation on the Structure, Tribological and High Temperature Performance of CrAlYN/CrN Nanoscale Multilayer Coatings Deposited by the Combined HIPIMS/UBM Technology Papken Eh. HOVSEPIAN 1, Arutiun P. Ehiasarian 2, Yashodhan Purandare 3, Reinhold Braun 4, Ian M. Ross 5 1,2,3 Sheffield Hallam University, Sheffield, United Kingdom 4 German Aerospace Centre Institute of Materials Research, Cologne, Germany 5 University of Sheffield, Sheffield, United Kingdom 28 PSE 2008

31 Tuesday, September 16, morning Room Richard-Strauss 11:35-11:55 OR :55-12:15 OR :15-12:35 OR :35-12:55 OR0708 Properties of (Ti,Al,Si)N coatings for high demanding metal cutting applications deposited by HPPMS in an industrial coating unit Rainer Cremer 1, Hans-Gerd Fuß 2, Stephan Bolz 3, Kirsten Bobzin 4, Nazlim Bagcivan 5, Phillip Immich 6 1,2 CemeCon AG, Wuerselen, Germany 3,4,5,6 Surface Engineering Institute RWTH Aachen, Aachen, Germany Growth-temperature dependent crystallinity and mechanical characteristics of magnetron sputtered TiAlON coatings Jian Ye 1, Sven Ulrich 2, Michael Stüber 3, Carlos Ziebert 4 1 Forschungszentrum Karlsruhe, IMF I, Eggenstein-Leopoldshafen, Germany 2,3,4 Forschungszentrum Karlsruhe IMF I, Eggenstein-Leopoldshafen, Germany Microstructure influence on the tribological properties of (Cr,Ti)-Al- SiN nanocomposites under thermal oxidation Jose Antonio García Lorente AIN, Cordovilla (Pamplona), Spain TRIBOLOGICAL COATING OF ELASTOMERS WITH THE PLASMASPOT WORKING AT ATMOSPHERIC PRESSURE Bert Verheyde 1, Annick Vanhulsel 2, Danny Havermans 3, Matthias Wangenheim 4, Lidia Martinez 5, Elisa Roman 6 1,2,3 VITO, Mol, Belgium 4 University of Hannover - IDS, Hannover, Germany 5,6 ICMM- CSIC, Madrid, Spain 12:55-14:20 Lunch break PSE

32 Tuesday, September 16, morning Room Zugspitze 08:30-09:15 Plenary Lecture PL0002, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR0801 Session 8: Plasma sources Chairmen: Werner Fleischer, Dresden, Germany Ken Yukimura, Kyoto, Japan Low-Damage Processing of Polymers with Reactive High-Density Plasmas Driven by Multiple Low-Inductance Antenna Modules Yuichi Setsuhara 1, Kosuke Takenaka 2, Ken Cho 3, Akinori Ebe 4, Jeon G. Han 5 1 JWRI, Osaka Univ. / JST, CREST, Osaka, Japan 2,3 JWRI Osaka Univ. / JST CREST, Osaka, Japan 4 EMD Corp., Kyoto, Japan 5 CAPST SungKyunKwan University, Suwon, Korea, South Selective Surface Modification of Polymers Using the Underwater Plasma Ranjit Joshi 1, Jörg Friedrich 2 1,2 Bundesanstalt für Materialforschung und -prüfung, Berlin, Germany 10:15-10:35 OR0802 Microstructural characterization of in-flight particles in plasma spray process Cagri Tekmen 1, Yoshiki Tsunekawa 2, Masashi Yoshida 3, Masahiro Okumiya 4 1,2,3,4 Toyota Technological Institute, Nagoya, Japan 10:35-10:55 OR0803 Development and characterisation of a microwave-heated atmospheric plasma torch Martina Leins 1, Lukas Alberts 2, Mathias Kaiser 3, Matthias Walker 4, Andreas Schulz 5, Uwe Schumacher 6, Ulrich Stroth 7 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,3 Fraunhofer Institut für Chemische Technologie, Pfinztal, Germany 4,5,6,7 Institut für Plasmaforschung, Stuttgart, Germany 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR0805 An Integrated Atmospheric Microwave Plasma Source Reinhold Kovacs 1, Nikita Bibinov 2, Peter Awakowicz 3, Horia-Eugen Porteanu 4, Silvio Kühn 5, Roland Gesche 6 1 Aurion Anlagentechnik GmbH, Seligenstadt, Germany 2,3 Ruhr-Universität-Bochum Allg. Elektro- und Plasmatechnik, Bochum, Germany 4,5,6 Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, Germany Plasma and thin film growth control in dual frequency driven capacitive discharges Egmont Semmler 1, Deborah O'Connell 2, Timo Gans 3, Ayhan Yüce 4, Peter Awakowicz 5, Achim von Keudell 6 1 Center for Plasma Science and Technology (CPST) Ruhr Universität Bochum, Bochum, Germany 2,4,5,6 Center for Plasma Science and Technology (CPST) Ruhr Universität Bochum, Bochum, Germany 3 Centre for Plasma Physics Queen's University Be 30 PSE 2008

33 Tuesday, September 16, morning Room Zugspitze 11:55-12:15 OR0806 PLASMA-ASSISTED ATOMIC LAYER DEPOSITION OF Al2O3 AT ROOM TEMPERATURE Tommi Kääriäinen 1, David Cameron 2 1,2 Lappeenranta University of Technology, Mikkeli, Finland 12:15-12:35 OR0807 MAGNETICALLY ENHANCED HOLLOW CATHODE A NEW PLASMA SOURCE FOR HIGH-RATE DEPOSITION PROCESSES F. Fietzke 1, H. Morgner 2, S. Günther 3 1,2,3 Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik FEP, Dresden, Germany 12:35-12:55 OR0808 PRINCIPLES OF OPERATIONS, DESIGN AND INVESTIGATIONS OF PULSED PERIODIC PLASMATRON Yuri Chivel Institute of Physics, Minsk, Belarus 12:55-14:20 Lunch break PSE

34 Tuesday, September 16, morning Room Olympia 08:30-09:15 Plenary Lecture PL0002, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN0900 Session 9: Plasma assisted diffusion Chairmen: Reinar Grün, Siegen, Germany Carlos Figueroa, Caxias do Sul, Brazil Fundamental and innovations in plasma assisted diffusion of austenitic stainless steels and related alloys Thierry Czerwiec 1, marcos gregory 2, michel henri 3 1,2,3 LSGS, Nancy, France 09:55-10:15 OR0901 Plasma nitriding for fuel cell applications Peter Kaestner 1, Kyong-Tschong Rie 2, Guenter Braeuer 3 1,2,3 TU Braunschweig, Braunschweig, Germany 10:15-10:35 OR :35-10:55 OR0903 Influence of different plasma nitriding treatments on the wear behaviour of coated forging tools Martin Weber 1, Peter Kaestner 2, Helge Thomsen 3, Hanno Paschke 4, Günter Bräuer 5 1,2,3,4,5 Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany Surface Modification of Aluminum Using a Combined Technique of Barrel Nitriding and Plasma Nitriding Masahiro Okumiya 1, Masashi Yoshida 2, Ryuta Ichiki 3, Cagri Tekmen 4, Waleed Khalifa 5, Yoshiki Tsunekawa 6, Kazushi Tanaka 7 1,2,3,4,5,6 Toyota Technological Institute, Nagoya, Japan 7 CHUBU Electric Power Co., Nagoya, Japan 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR0905 CORROSION BEHAVIOUR OF MARTENSITIC AND PRECIPITATION HARDENING STAINLESS STEELS TREATED BY PLASMA NITRIDING Sonia Brühl 1, Raúl Charadia 2, Sebastián Suárez 3, Amado Cabo 4, Silvia Simison 5 1 Universidad Tecnológica Nacional, Concepcion del Uruguay, Argentina 2,3 Universidad Tecnológica Nacional, Concepción del Uruguay, Argentina 4 IONAR S.A., Buenos Aires, Argentina 5 INTEMA Universidad Nacional de Mar del Plata, Mar del Plata, NEW FINDINGS ABOUT THE NATURE OF EXPANDED AUSTENITE BY ION NITRIDING OF AISI 316 Carlos Figueroa 1, Rodrigo Basso 2, Israel Baumvol 3, Sylvan Weber 4, Thierry Czerwiec 5 1 Centro de Ciências Exatas e Tecnologia, Universidade de Caxias do Sul, , Caxias do Sul, RS, 2 Instituto de Física Gleb Wataghin Unicamp Campinas SP Brazil, Campinas, Brazil 3 Centro de Ciências Exatas e Tecnol 32 PSE 2008

35 Tuesday, September 16, morning Room Olympia 11:55-12:15 OR :15-12:35 OR :35-12:55 OR0908 Carbide - nitride transformation and the role of Si during plasma nitriding of 5% Cr tempered martensitic steels Mariann Lovonyak 1, Reinhold Ebner 2, Thomas Müller 3, Ingo Siller 4 1,2 Materials Center Leoben Forschung GmbH, Leoben, Austria 3 Rübig GmbH & Co KG, Wels, Austria 4 Böhler Edelstahl GmbH & Co KG, Kapfenberg, Austria COMBINED LASER ALLOYING/DISPERSING AND PLASMA NITRIDING, AN EFFICIENT TREATMENT FOR IMPROVING THE LIFETIME OF FORGING DIES Cristian RUSET 1, Thorsten Glaser 2, Sascha Bausch 3, Eduard Grigore 4, Teddy Craciunescu 5, Ion Tiseanu 6 1 The National Institute for Laser, Plasma and Radiation Physics, Magurele-Bucharest, Romania 2,3 Fraunhofer Institute for Production Technology IPT, Aachen, Germany 4,5,6 The National Institute for Laser Plasma and Radiation Physics, Ma Improvement of surface characteristics by duplex hard chromium coatings and pulsed nanocrystalline plasma electrolytic nitrocarburising Alireza Sabour Rouhaghdam 1, Seyed Haman Hedayat Mofodi 2, Mahmood Aliofkhazraei 3 1,2,3 Tarbiat Modares University, Tehran, Iran 12:55-14:20 Lunch break PSE

36 Tuesday, September 16, afternoon Room Richard-Strauss 14:20-15:05 Plenary Lecture PL0003 Oral Session 15:15-15:45 Keynote Lecture KN1000 Chairman: Mariadriana Creatore, Eindhoven, Netherlands Plasma-Surface Interactions: Molecular Dynamics and Beam Studies of Plasma-Surface Interactions David Graves UC Berkeley, Berkeley, United States Session 10: PVD Chairmen: Hans K. Pulker, Innsbruck, Austria Michael Stüber, Karlsruhe, Germany Some more equations describing reactive magnetron sputtering Diederik Depla 1, Stijn Mahieu 2, Wouter Leroy 3, Johan Haemers 4, Roger De Gryse 5 1 Ghent University, Gent, Belgium 2,3,4,5 Ghent University, Ghent, Belgium 15:45-16:05 OR :05-16:25 OR :25-16:45 OR1003 Laser diode induced fluorescence on sputtered metallic species in magnetron discharges Catalin Vitelaru 1, Ludovic de Poucques 2, Tiberiu Marian Minea 3, Caroline Boisse-Laporte 4, Jean Bretagne 5, Gheorghe Popa 6 1 Laboratoire de Physique des Gaz et Plasmas - UMR 8578 CNRS - Université Paris Sud- XI, Orsay, France 2,3,4,5 Laboratoire de Physique des Gaz et Plasmas - LPGP UMR 8578 CNRS - Université Paris Sud-XI, Orsay, France 6 Pl MC-simulation of the metallic flux during magnetron sputtering Koen Van Aeken 1, Stijn Mahieu 2, Max Horkel 3, Yolanda Aranda- Gonzalvo 4, Diederik Depla 5, Christoph Eisenmenger-Sittner 6 1,2,5 UGent, Gent, Belgium 3,6 TUWien, Wien, Austria 4 Hiden Analytical Ltd., Warrington, United Kingdom Ion Energy Distributions in Magnetron Sputtering of Zinc Aluminium Oxide Thomas Welzel 1, Ronny Kleinhempel 2, Thoralf Dunger 3, Frank Richter 4 1,2,3,4 Chemnitz University of Technology, Chemnitz, Germany 16:45-17:15 Coffee break 17:15-17:35 OR :35-17:55 OR1005 Production of thick metallic lithium layer by sputter evaporation. Christophe Rigaux 1, Franz Bodart 2, Stephane Lucas 3 1 Laboratoire d Analyses par Réactions Nucléaires (LARN), Centre de Recherche en Physique de la Matièr 2,3 Laboratoire d Analyses par Réactions Nucléaires (LARN) Centre de Recherche en Physique de la Matièr, Namur, Belgium SENSORS FOR RECTIVE MAGNETRON SPUTTERING Victor Bellido-Gonzalez 1, Benoit Daniel 2 1,2 GENCOA LTD, Liverpool, United Kingdom 17:55-18:15 OR1006 Growth of nano crystalline TaN thin films using improved rotating cylindrical magnetron cathode Krishna Valleti 1, A Subrahmanyam 2, Shrikant V Joshi 3 1,2 IIT Madras, chennai, India 3 ARCI, Hyderabad, India 34 PSE 2008

37 Tuesday, September 16, afternoon Room Richard-Strauss 18:15-18:35 OR1007 Combined interferometric study of neutral particles velocity and temperature in magnetron sputtering Nikolay Britun 1, Soo-Ghee Oh 2, Jeon Geon Han 3 1 CAPST, SungKyunKwan univ., Suwon, Korea, South 2 Department of Physics Ajou University, Suwon, Korea, South 3 CAPST SungKyunKwan univ., Suwon, Korea, South 18:45-23:00 Poster Session 2, Foyer 18:45-23:00 Industrial Evening, Room Werdenfels, Foyer, Restaurant PSE

38 Tuesday, September 16, afternoon Room Zugspitze 14:20-15:05 Plenary Lecture PL0003, Room Richard-Strauss Oral Session 15:15-15:45 Keynote Lecture KN :45-16:05 OR :05-16:25 OR1102 Session 11: Plasma treatment of polymers Chairmen: Pietro Favia, Bari, Italy Hynek Biedermann, Prag, Czech Republic Monosort functionalization of polymer surfaces as anchoring points for graft syntheses Joerg Friedrich BAM, Berlin, Germany Microplasma stamps for the area-selective modification of polymer surfaces Nina Lucas 1, Alena Hinze 2, Raimo Franke 3, Ronald Frank 4, Claus-Peter Klages 5, Stephanus Büttgenbach 6 1,6 Institut für Mikrotechnik / TU Braunschweig, Braunschweig, Germany 2,5 Institut für Oberflächentechnik / TU Braunschweig, Braunschweig, Germany 3,4 Helmholtz Zentrum für Infektionsforschung, Braunschweig, Germany Generation and Recombination Effects of Radicals in Plasma Polymer Coatings Michael Haupt 1, Maike Schmidt 2, Christian Oehr 3 1,2,3 Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany 16:25-16:45 OR1103 PLASMA SOURCES IN WEB COATING APPLICATIONS Victor Bellido-Gonzalez 1, Alf Smith 2 1 GENCOA LTD, Liverpool, United Kingdom 2 DALMATIAN TECHNOLOGY LTD., Kelsall Tarporley, United Kingdom 16:45-17:15 Coffee break 17:15-17:35 OR1104 Plasma Treatment of Ultra High Molecular Weight Polyethylene (UHMWPE) Cords for Adhesion Improvement Steluta Teodoru 1, Yukihiro Kusano 2, Noemi Rozlosnik 3, Poul Michelsen 4 1,2,3,4 RISØ DTU, Roskilde, Denmark 17:35-17:55 OR1105 Novel Plasma Device for Particle Surface Modification at Atmospheric Pressure Patrick Reichen 1, Axel Sonnenfeld 2, Philipp Rudolf von Rohr 3 1,2,3 ETH Zurich, Zurich, Switzerland 17:55-18:15 OR1106 Some effects of corona plasma treatment of polylactide/montmorillonite nanocomposite films Marian Żenkiewicz 1, Jozef Richert 2, Piotr Rytlewski 3 1,3 Kazimierz Wielki University, Bydgoszcz, Poland 2 Institute for Engineering of Polymer Materials and Dyes, Toru?, Poland 36 PSE 2008

39 Tuesday, September 16, afternoon Room Zugspitze 18:15-18:35 OR1107 Plasma and vacuum ultraviolet treatment of medical polymers for regulation biological properties Victor Vasilets 1, Viktor Sevastianov 2 1 Institute for Energy Problems of Chemical Physics, Russian Academy of Sciences, Chernogolovka, Russi 2 Research Institute of Transplantology and Artificial Organs, Moscow, Russian Federation 18:45-23:00 Poster Session 2, Foyer 18:45-23:00 Industrial Evening, Room Werdenfels, Foyer, Restaurant PSE

40 Tuesday, September 16, afternoon Room Olympia 14:20-15:05 Plenary Lecture PL0003, Room Richard-Strauss Industrial Workshop IW0 15:15-15:45 IW1 15:45-16:05 IW2 16:05-16:25 IW3 16:25-16:45 IW4 Thin Films for Solar Technologies Chairmen: Johannes Strümpfel, Dresden, Germany Ric Shimshock, Society of Vacuum Coaters, USA Developments of Thin Film Silicon PV at Oerlikon Solar Johannes Meier OERLIKON Solar-Lab SA, Neuchâtel, Switzerland Modular system solutions for large area plasma processes for solar cell manufacturing Silvia Roth ROTH & RAU AG, Hohenstein-Ernstthal, Germany Plasma Technologies for Photovoltaics Practiced in Solar Valley Matthias Junghänel Q-CELLS AG, Thalheim, Germany Plasma Deposition of Amorphous and Microcrystalline Silicon for Thin Film Solar Modules Thilo Kilper R&D CENTER, Jülich, Germany 16:45-17:15 Coffee break 17:15-17:35 IW5 17:35-17:55 IW6 17:55-18:15 IW7 Manufacturing of CIS Thin Film Solar Modules Using Large-Area Sputter Deposition Technologies Axel Neisser SULFURCELL Solartechnik GmbH, Berlin, Germany New Generation DC-Power Supplies with Minimum Arc Energies for TCO coatings in Photovoltaics Martin Volkmar1 1, Dirk Ochs1 2, Pawel Ozimek2 3 1 HUETTINGER Elektronik, Freiburg, Germany, 2 HUETTINGER Electronic, Zielonka, Poland Industrial Magnetron-Sputtering for Thin Film Photovoltaics Johannes Strümpfel VON ARDENNE, Dresden, Germany 18:45-23:00 Industrial Evening, Room Werdenfels, Foyer, Restaurant 38 PSE 2008

41 Plasma Characterisation The Hiden EQP and PSM advanced mass/energy analysers provide detailed plasma analysis for plasma reaction kinetics, characterisation and enhanced process understanding. EQP/PSM Features include: High Sensitivity: Sub PPM detection of ions, neutrals and radicals. Ion Energy Analysis: Ion energy distributions of plasma ions are acquired in seconds. 100 and 1000eV versions available. Time-Resolved Studies: Programmable signal gating module provides fully integrated and software controlled timing circuitry with 100 nanosec resolution for pulsed plasma applications. Positive and Negative Ion Measurement: Pre-set software modes for switching between analysis modes. Neutral and Radical Detection: Integral electron impact analyser provides analysis of neutral and radical species. Electron Attachment: Soft ionisation technique for analysis of electronegative species in plasma. Wide Pressure Range: 2 and 3 stage molecular beam sampling inlets for high pressure plasma diagnostics MID Mode: Multi-Ion Detection EQP: Mass/Energy Analyser surface science vacuum analysis gas analysis plasma diagnostics Hiden Analytical Ltd. Tel +44 (0) Europa Boulevard, Warrington Fax +44 (0) WA5 7UN, ENGLAND info@hiden.co.uk PSE

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45 Wednesday, September 17, morning Room Richard-Strauss 08:30-09:15 Plenary Lecture PL0004 Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR1201 Chairman: Wolfhard Möller, Dresden, Germany Pulsed Magnetron Sputtering Process Overview and Applications Peter Kelly Manchester Metropolitan University, Manchester, United Kingdom Session 12: Carbon based coatings Chairmen: Roel Tietema, Venlo, Netherlands Alix Gicquel, Villetaneuse, France Evaluation of adhesion and wear resistance of DLC film coated by various deposition methods Takahiro Horiuchi 1, Kentaro Yoshida 2, Makoto Kano 3, Masao Kumagai 4, Tetsuya Suzuki 5 1 Kanagawa Industrial Technology Center, Kanagawa Ebina, Japan 2,3,4 Kanagawa Industrial Technology Center, 75-1 shimoimaizumi Ebina Kanagawa , Japan 5 Center for Materials Science Keio University, Hiy Effect of the substrate geometry on plasma synthesis of DLC coatings Koray Yilmaz 1, Kirsten Bobzin 2, Nazlim Bagcivan 3, Nico Goebbels 4 1,2,3,4 Surface Engineering Institute RWTH Aachen, Aachen, Germany 10:15-10:35 OR1202 Etching in cavities as a pre-deposition process Arnd Müller 1, Siegfried Krassnitzer 2, Markus Esselbach 3, Helmut Rudigier 4 1,2,3,4 OC Oerlikon Balzers AG, Balzers, Liechtenstein 10:35-10:55 OR1203 ta-c and modified ta-c:x films for demanding tribological applications Volker Weihnacht 1, Hans-Joachim Scheibe 2, Andreas Leson 3 1,2,3 Fraunhofer Institut Werkstoff- und Strahltechnik, Dresden, Germany 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR1205 A high density hollow cathode plasma PECVD technique for depositing films on the internal surfaces of cylindrical substrate David Lusk 1, Mark Gore 2, Bill Boardman 3, Tom Casserly 4, Kathik Boinapally 5, Munish Gupta 6, Miguel Oppus 7, Andrew Tudhope 8, Yifan Cao 9, Deepak Upadhyaya 10 1,2 Sub-One Europe, Aberdeen, United Kingdom 3,4,5,6,7,8,9,1 Sub-One Technology, Pleasanton, United States Novel Approach Towards The Deposition of Hard Diamond-Like Carbon Coatings By Advanced PVD Techniques Michael Stueber 1, Sven Ulrich 2, Yuriy Ivanov 3, Thorsten Zufraß 4, Klaus Bewilogua 5, Peter Willich 6, Hans-Joachim Scheibe 7, Joerg Vetter 8 1,2 Forschungszentrum Karlsruhe, Eggenstein-Leopoldshafen, Germany 3,4 SVS Vacuum Coating Technologies, Karlstadt, Germany 5,6 Fraunhofer IST, Braunschweig, Germany 7 Fraunhofer IWS, Dresden, Germany 8 Sulzer Metaplas GmbH, Bergisch- PSE

46 Wednesday, September 17, morning Room Richard-Strauss 11:55-12:15 OR :15-12:35 OR :35-12:55 OR1208 OES Analysis of a Large Scale HIPIMS/UBM Sputtering Process to Produce C-DLC Coatings Nikita Bibinov 1, Stefan Kunkel 2, Peter Awakowicz 3, Wolf-Dieter Münz 4 1,3 Ruhr-University, Bochum, Germany 2,4 SVS Vacuum Coating Technologies, Karlstadt, Germany Super hard Carbon Coatings deposited by pulsed DC-arc-Process Werner Grimm 1, Volker Weihnacht 2 1 Inovap, Grosserkmannsdorf, Germany 2 Fraunhofer Institut Werkstoff- und Strahltechnik, Dresden, Germany Carbon based multilayer coatings prepared by PACVD with industrial scale up Klaus Bewilogua 1, Ingmar Bialuch 2, Hartmut Ruske 3, Kai Weigel 4, Reinar Grün 5, Jürgen Okun 6, Ivonne Seher 7, Hans-Joachim Günther 8 1,2,3,4 Fraunhofer IST, Braunschweig, Germany 5,6,7,8 PlaTeG GmbH, Siegen, Germany 12:55-14:20 Lunch break 44 PSE 2008

47 Wednesday, September 17, morning Room Zugspitze 08:30-09:15 Plenary Lecture PL0004, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR :15-10:35 OR :35-10:55 OR1303 Session 13: AP Plasma CVD Chairmen: Volkmar Hopfe, Dresden, Germany Masaru Hori, Nagoya, Japan Non-thermal non-equilibrium AP-PECVD processes for the deposition of oxides Farzaneh Arefi-Khonsari 1, Jerome Pulpytel 2, Virendra Kumar 3, Camille Petit-Etienne 4, V. Micheli 5, Nadhira Laïdani 6 1 ENSCP-UPMC, Paris Cedex 5, France 2,3,4 Laboratoire de Génie des Procédés Plasmas et Traitements de Surfaces - UPMC, Paris, France 5,6 Ricerca Scientifica e Tecnologica, Trento, Italy Polymer Surface Modification by Aerosol Based Corona Treatment of Foils Renate Mix 1, Jörg Friedrich 2, Alexander Rau 3 1,2 Bundesanstalt f. Materialforschung und -prüfung, Berlin, Germany 3 Ahlbrandt System GmbH, Lauterbach, Germany On the deposition mechanism of the silica like films in atmospheric pressure glow discharge Sergei Starostin 1, Hindrik de Vries 2, Mariadriana Creatore 3, Roger Paffen 4, M.C.M. van de Sanden 5 1,3,5 Technishe Universiteit Eindhoven, Eindhoven, Netherlands 2,4 FUJIFILM Manufacturing Europe b.v., Tilburg, Netherlands Influence of gas composition on particulate generation during the deposition of siloxane films using atmospheric pressure plasmas Denis Dowling 1, Amsarani Ramamoorthy 2, Mahfujur Rahman 3, Damian Mooney 4, Don MacElroy 5 1 School of Electrical, Electronic and Mechanical Engineering, University College Dublin, Dublin, Irel 2,3,4,5 School of Chemical and Bioprocess Engineering University College Dublin, Dublin, Ireland 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR1305 FUNCTIONALIZATION OF COPPER SURFACES BY ATMOSPHERIC DBD PLASMA TREATEMENTS TO IMPROVE ADHESION OF EPOXY RESINS Juliano Borges 1, Thierry Belmonte 2, Jérôme Guillot 3, David Duday 4, Jean- Nicolas Audinot 5, Patrick Choquet 6, Henri-Noël Migeon 7 1 Département Science et Analyse des Matériaux Centre de Recherche Public Gabriel Lippmann, Belvaux, 2 Laboratoire de Science et Génie des Surfaces Nancy-Université CNRS Parc de Saurupt CS 14234, Nancy, France 3,4,5,6,7 D Atmospheric pressure plasma jet sources for deposition of adhesion promoting layers on aluminium Philipp Bringmann 1, Oliver Rohr 2, Franz-J. Gammel 3, Irene Jansen 4 1,2,3 EADS Innovation Works, Ottobrunn, Germany 4 Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, Germany PSE

48 Wednesday, September 17, morning Room Zugspitze 11:55-12:15 OR :15-12:35 OR1307 Recent advances in the atmospheric pressure PECVD of fluorocarbon films: influence of air and water vapour impurities Fiorenza Fanelli 1, Francesco Fracassi 2, Riccardo d'agostino 3 1 Department of Chemistry, University of Bari, Bari, Italy 2,3 Department of Chemistry, University of Bari, Italy EQUIPMENT FOR ATMOSPHERIC PRESSURE PLASMA PROCESSING Birte Dresler 1, Gerrit Mäder 2, Julius Roch 3, Patrick Grabau 4, Birte Dresler 5, Dorit Linaschke 6, Sebastian Tschöcke 7, Elena Lopez 8, Volkmar Hopfe 9 1,2,3,4,5,6,7,8,9 Fraunhofer IWS, Dresden, Germany 12:35-12:55 OR1308 Deposition of thin SiOx films by direct precursor in atmospheric pressure microwave torch (TIA) Syed Salman Asad 1, Christelle Dublanche- Tixier 2, Cedric Jaoul 3, Christophe Chazelas 4, Pascal Tristant 5, Caroline Boisse- Laporte 6, Jean- Pierre Lavoute 7 1 University of Limoges CNRS Sciences des Procédés Céramiques et Traitement de Surfaces SPCTS, Limog 2,3,4,5,7 University of Limoges CNRS Sciences des Procédés Céramiques et Traitement de Surfaces SPCTS, Limoges, France 6 Universit 12:55-14:20 Lunch break 46 PSE 2008

49 Wednesday, September 17, morning Room Olympia 08:30-09:15 Plenary Lecture PL0004, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR1401 Session 14: HIPIMS /HPPMS I Chairmen: Jaroslav Vlcek, Plzen, Czech Republic Ulf Helmersson, Linköping, Sweden Comparative Investigation of HIPIMS and Arc Deposited AlTiN Coatings Frank Papa 1, Arutiun P. Ehiasarian 2, Yashodhan Purandare 3, Thomas Krug 4, Roel Tietema 5, Christian Strondl 6 1,4,5,6 Hauzer Techno Coating BV, Venlo, Netherlands 2,3 Sheffield Hallam University, Sheffield, United Kingdom High Power Impulse Magnetron Sputtering (HIPIMS): the basic parameter study Grzegorz Greczynski 1, Johan Böhlmark 2 1,2 Chemfilt Ionsputtering, Linköping, Sweden 10:15-10:35 OR :35-10:55 OR1403 Electrical characteristics of the hybrid plasma of 195 khz-burst RF plasma with arc-free HPPS glow plasma in reactive gases Ken Yukimura 1, Ryosuke Mieda 2, Kingo Azuma 3, Hiroshi Tamagaki 4, Tadao Okimoto 5 1 Department of Electrical Engineering, Doshisha University, Kyotanabe, Japan 2 Department of Electrical Engineering, Doshisha University, Japan 3 Electrical Engineering and Computer Science, University of Hyogo, Japan 4,5 Machinery & Enginee Measurements of deposition rate and substrate heating rate in a HIPIMS discharge Glen West 1, Peter Kelly 2, Paul Barker 3, Anurag Mishra 4, James Bradley 5 1,2,3 Manchester Metropolitan University, Manchester, United Kingdom 4 University of Liverpool, Liverpool, United Kingdom 5 university of Liverpool, Liverpool, United Kingdom 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR1405 Influence of the Target Material and the Cathode Impedance on the Resulting Peak Power at High Power Pulse Magnetron Sputtering HPPMS Ralf Bandorf 1, Ulrich Kricheldorf 2, Sandra Falkenau 3 1,2,3 Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany The Effects of Unbalanced Magnetron Cathodes on Modulated Pulse Power Sputtering William Sproul 1, Roman Chistyakov 2, Bassam Abraham 3, John Moore 4, Jianliang Lin 5 1 Reactive Sputtering, Inc., San Marcos, CA, United States 2,3 Zond Inc. / Zpulser LLC, Mansfield MA 248, United States 4 Colorado School of Mines, Golden CO 841, United States 5 Colorado School of Mines, Golden CO 841, Unite PSE

50 Wednesday, September 17, morning Room Olympia 11:55-12:15 OR1406 Deposition of crystalline alumina coatings using reactive high power impulse magnetron sputtering process and film properties Erik Wallin 1, Torbjörn I. Selinder 2, Mattias Elfwing 3, Ulf Helmersson 4 1,4 Linköping University, Linköping, Sweden 2,3 Sandvik Tooling, Stockholm, Sweden 12:15-12:35 OR :35-12:55 OR1408 Structure and properties of TiN and CrNX films prepared by HIPIMS Jörg Paulitsch 1, Paul Mayrhofer 2, Wolf-Dieter Münz 3, Markus Schenkel 4 1 Materials Center Leoben Forschung GmbH, Leoben, Austria 2 Department of Physical Metallurgy and Materials Testing Montanuniversität Leoben, Leoben, Austria 3,4 SVS Vacuum Coating Technologies, Karlstadt, Germany Experimental measurements of cathode current density distributions and optical imaging of HIPIMS discharges Gregory Clarke 1, James Bradley 2, Anurag Mishra 3, Peter Kelly 4 1,2,3 The University of Liverpool, Liverpool, United Kingdom 4 Manchester Metropolitan University, Manchester, United Kingdom 12:55-14:20 Lunch break 48 PSE 2008

51 Wednesday, September 17, afternoon Room Richard-Strauss 14:20-15:05 Plenary Lecture PL0005 Chairman: Jeon G. Han, Suwon, Korea Microplasma Sources for Surface Engineering: Design and Characteristics Kunihide Tachibana Kyoto University, Kyoto, Japan 15:15-16:25 Poster Session 3, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN :15-17:35 OR1501 Session 15: Tribological nanocomposites Chairmen: Papken Eh. Hovsepian, Sheffield, UK Evgeny A. Levashov, Moscow, Russian Federation Self-lubricating nanostructured coatings based on transition metal dichalcogenides alloyed with carbon Tomas Polcar 1, Manuel Evaristo 2, Albano Cavaleiro 3 1 Czech Technical University, Prague, Czech Republic 2,3 SEG-CEMUC University of Coimbra, Coimbra, Portugal Ti-Zr-C Nanocomposite Films For Biomedical Applications Olga Kubová 1, Diego Martínez-Martínez 2, Marie-Paule Delplancke- Ogletree 3 1,2,3 Univesité libre de Bruxelles, Bruxelles, Belgium 17:35-17:55 OR :55-18:15 OR1503 Constitution and mechanical properties of nanocrystalline reactive magnetron sputtered V-Al-C-N hard coatings as a function of the carbon content Carlos Ziebert 1, Ulrich Albers 2, Michael Stueber 3, Sven Ulrich 4, Helmut Holleck 5 1 Forschungszentrum Karlsruhe, Institut für Materialforschung I, Eggenstein- Leopoldshafen, Germany 2,3,4,5 Forschungszentrum Karlsruhe Institut für Materialforschung I, Eggenstein-Leopolds, Germany Structure and Properties of AlN-Si3N4 nanoscaled multilayer thin films Jörg Patscheider 1, Aude Pélisson 2, Magdalena Parlinska-Wojtan 3, Hans- Josef Hug 4 1,2,3,4 Empa, Dübendorf, Switzerland 18:30-23:00 Bavarian Evening, Bayernhalle" PSE

52 Wednesday, September 17, afternoon Room Zugspitze 14:20-15:05 Plenary Lecture PL0005, Room Richard-Strauss 15:15-16:25 Poster Session 3, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN :15-17:35 OR1601 Session 16: LP CVD Chairmen: Dirk Hegemann, St. Gallen, Switzerland Andreas Holländer, Golm, Germany An investigation of surface coating by repeated plasma-assisted grafting and cross-linking of molecular precursors Andreas Ohl 1, Wilfried Besch 2, Hartmut Steffen 3, Rüdiger Foest 4, Michael Arens 5, Klaus Wandel 6 1 INP Greifswald, Greifswald, Germany 2,3 Leibniz-Institut für Plasmaforschung und Technologie, Greifswald, Germany 4 Leibniz-Institut für Plasmaforschung und Technologie, Berlin, Germany 5 SENTECH Instruments GmbH, Berlin, Germany 6 SENTECH Titanium nitriding coating deposited by PECVD using Titanium(IV) ethoxide liquid source F. Alvarez 1, R. Basso 2, D. Wisnivesky 3 1,2,3 Unicamp, Campinas, Brazil 17:35-17:55 OR1602 Feasibility study of mesoplasma lateral epitaxial overgrowth for high rate and low temperature deposition of large gained crystalline Si thick films Makoto Kambara 1, Jose M.A. Diaz 2, Masaki Yoshioka 3, Toyonobu Yoshida 4 1,2,3,4 The University of Tokyo, Tokyo, Japan 17:55-18:15 OR1603 Process Optimization of a Plasma Down Stream Reactor for Particle Surface Modification Christian Roth 1, Adrian Spillmann 2, Axel Sonnenfeld 3, Philipp Rudolf von Rohr 4 1,2,3,4 ETH Zurich, Zurich, Switzerland 18:30-23:00 Bavarian Evening, Bayernhalle" 50 PSE 2008

53 Wednesday, September 17, afternoon Room Olympia 14:20-15:05 Plenary Lecture PL0005, Room Richard-Strauss 15:15-16:25 Poster Session 3, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN1700 Session 17: HIPIMS /HPPMS II Chairmen: James Bradley, Liverpool, UK Bill Sproul, San Marcos, USA Impulse Plasma Magnetron Technology Georgy Khodachenko 1, Dmitry Mozgrin 2, Igor Fetisov 3 1,2,3 The Moscow Engineering and Physics Institute, Moscow, Russian Federation 17:15-17:35 OR :35-17:55 OR :55-18:15 OR1703 The influence of the magnetic field configuration on the deposition rate during high power pulsed magnetron sputtering Stanislav Mráz 1, Yan Jiang 2, Jens Emmerlich 3, Rony Snyders 4, Jochen M. Schneider 5 1 Materials Chemistry, RWTH Aachen University, Aachen, Germany 2,3,5 Materials Chemistry RWTH Aachen University, Aachen, Germany 4 Laboratoire de Chimie Inorganique et Analytique Université de Mons, Mons, Belgium Ion Composition Produced by HIPIMS Discharges Near the Substrate and Influence of Target Current Arutiun P. Ehiasarian 1, Ante Hecimovic 2, Alena Vetushka 3, Stephanos Konstantinidis 4 1,2,3 Sheffield Hallam University, Sheffield, United Kingdom 4 Materia Nova, Mons, Belgium Deposition of oxide optical films by combined HPPMS waveforms Michael Vergoehl 1, Oliver Werner 2, Stefan Bruns 3 1,2,3 Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany 18:30-23:00 Bavarian Evening, Bayernhalle" PSE

54 Thursday, September 18, morning Room Richard-Strauss 08:30-09:15 Plenary Lecture PL0006 Chairman: Riccardo d'agostino, Bari, Italy Challenges for producing very high quality diamond for high power future applications Alix Gicquel 1, François Silva 2, Jocelyn Achard 3, Ovidiou Brinza 4, Aurélia Secroun 5, Xavier Bonnin 6, Khaled Hassouni 7 1,2,3,4,5,6,7 CNRS, Villetaneuse, France Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR1801 Session 18: Film properties Chairmen: Konstantinos-D. Bouzakis, Thessaloniki, Greece G.C.A.M. Janssen, Delft, NL Is the future of electronics transparent? Elvira Fortunato FCT-UNL, Caparica, Portugal Computational evaluation of fracture toughness of erosion-resistant PVD coatings Mariusz Bielawski 1, Kuiying Chen 2 1,2 National Research Council Canada, Ottawa, Canada 10:15-10:35 OR :35-10:55 OR1803 The Stoney Equation for Si (001)- and Si (111)-wafers G.C.A.M. Janssen TU Delft, Delft, Netherlands Elastic properties of V2AlC and Cr2AlC MAX phase thin films by magnetron sputtering and nanoindentation Darwin Purba Sigumonrong 1, Mirjam Scholz 2, Denis Music 3, Riza Iskandar 4, Joachim Mayer 5, Jochen M. Schneider 6 1, Aachen, Germany 2,3,6 Materials Chemistry, Aachen, Germany 4,5 Central Facility for Electron Microscopy, Aachen, Germany 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR1805 CONTACT FATIGUE BEHAVIOUR OF PVD COATED STEELS G. Ramírez 1, E. Tarrés 2, B. Casas 3, I. Valls 4, R. Martinez 5, L. Llanes 6 1 Department of Materials Science & Metallurgical Engineering Universitat Politècnica de Catalunya, B 2,6 Department of Materials Science & Metallurgical Engineering Universitat Politècnica de Catalunya, Barcelona, Spain 3,4 Rovalma S.A., Te MECHANICAL CHARACTERISATION OF THIN FILMS UNDER COMPLETE CONSIDERATION OF SUBSTRATE INFLUENCE: YIELD STRESS AND ELASTIC MODULUS OF a-c:h FILMS AS AN EXAMPLE Matthias Herrmann 1, Siegfried Peter 2, Frank Richter 3 1 Institute of Physics, Solid State Physics, Chemnitz University of Technology, Chemnitz, Germany 2,3 Institute of Physics, Chemnitz, Germany 52 PSE 2008

55 Thursday, September 18, morning Room Richard-Strauss 11:55-12:15 OR1806 A Comprehensive Computational Survey of M2AX Phase Elastic Properties Myles Cover 1, Oliver Warschkow 2, Marcela Bilek 3, David McKenzie 4 1,2,3,4 The University of Sydney, Sydney, Australia 12:15-12:35 OR :35-12:55 OR1808 Evaluation of thermal stability and anti-stick properties of PVD coatings to prevent adhesion of oil residue on truck engine Mahfujur Rahman 1, Denis Dowling 2 1 School of Electrical Electronic and Mechanical Engineering University College Dublin, Dublin, Irela 2 School of Electrical Electronic and Mechanical Engineering University College Dublin, Dublin, Ireland CHARACTERIZATION OF PVD COATING PROPERTIES ON COATED OIL WAVE BEARING RINGS Konstantinos-Dionysios Bouzakis 1, Antonios Asimakopoulos 2, Michail Batsiolas 3, Florin Dimofte 4, Nicoleta Ene 5 1,2,3 Aristoteles University of Thessaloniki, Thessaloniki, Greece 4,5 NASA Glenn Research Center, Cleveland, United States 12:55-14:20 Lunch break PSE

56 Thursday, September 18, morning Room Zugspitze 08:30-09:15 Plenary Lecture PL0006, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR :15-10:35 OR1902 Session 19: Plasma characterization Chairmen: Jürgen Meichsner, Greifswald, Germany Peter Awakowicz, Bochum, Germany Dynamics of radio-frequency discharges Timo Gans Quenn's University Belfast, Belfast, United Kingdom Simultaneous monitoring of absolute densities of multi metallic atoms in magnetron sputtering employing micro hollow cathode lamp Takayuki Ohta 1, Yoshihiro Tachibana 2, Naoki Takota 3, Masafumi Ito 4, Seigou Takashima 5, Yasuhiro Higashijima 6, Hiroyuki Kano 7, Shoji Den 8, Masaru Hori 9 1,2,3,4 Wakayama university, Wakayama, Japan 5,9 Nagoya university, Nagoya, Japan 6 NU System CO. LTD., Nagoya, Japan 7 NU EcoEngineering CO. LTD., Nagoya, Japan 8 Katagiri Engineering CO. LTD., Kawasaki, Japan Optical emission spectroscopy analysis of Ar/N2 plasma in reactive magnetron sputtering Angelique Bousquet 1, Laurent Spinelle 2, Joel Cellier 3, Eric Tomasella 4 1,2,3,4 Laboratoire des Matériaux Inorganiques, Aubière, France 10:35-10:55 OR1903 Direct measurements of the energy transfer in deposition or etching low pressure plasma processes Anne-Lise THOMANN GREMI, CNRS / polytech'orleans, Orleans, France 10:55-11:15 Coffee break 11:15-11:35 OR1904 Diagnostics and Modelling of Chemical Processes in Fluorocarbon Discharges Jakob Barz 1, Achim Lunk 2, Christian Oehr 3 1,3 Fraunhofer IGB, Stuttgart, Germany 2 Universität Stuttgart, Stuttgart, Germany 11:35-11:55 OR :55-12:15 OR1906 A technique for obtaining high temporal resolution ion energy distribution functions in pulsed plasma environments Anurag Mishra 1, Gregory Clarke 2, James Bradley 3, Peter Kelly 4 1,2,3 University of Liverpool, Liverpool, United Kingdom 4 Manchester Metropolitan University, Manchester, United Kingdom Langmuir probe and laser photodetachment measurements in an argon and oxygen DC magnetron discharge Robert Dodd 1, Shao Dong 2, Paul Bryant 3, James Bradley 4 1,2,3,4 University of Liverpool, Liverpool, United Kingdom 54 PSE 2008

57 Thursday, September 18, morning Room Zugspitze 12:15-12:35 OR :35-12:55 OR1908 Carbon Dust Growth in a RF Discharge Yan PENG 1, Robert HUGON 2, Frédéric BROCHARD 3, David LACROIX 4, Jean-luc VASSEUR 5, Jamal BOUGDIRA 6 1,2,3,5,6 Université de Nancy LPMIA, Vandoeuvre-lès-Nancy, France 4 Université de Nancy LEMTA, Vandoeuvre-lès-Nancy, France Diagnostics of an Atmospheric Pressure Plasma Beam for Surface Treatment Dirk Pasedag 1, Hans-Erich Wagner 2, Ruben Wiese 3, Alfred Baalmann 4, Guido Ellinghorst 5, Uwe Lommatzsch 6 1 Institute of Physics, Greifswald, Germany 2 Institute of Physics IfP, Greifswald, Germany 3 Leibnitz-Institute for Plasma Science and Technology INP, Greifswald, Germany 4,5,6 Fraunhofer-Institute for Manufacturing Engineering and Applie 12:55-14:20 Lunch break PSE

58 Thursday, September 18, morning Room Olympia 08:30-09:15 Plenary Lecture PL0006, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR2001 Session 20: Protecting and barrier coatings Chairmen: Cristina Louro, Coimbra, Portugal Jean-François PIERSON, Nancy, France Plasma-Immersion-Ion-Implantation of Fluorine to Protect TiAl- Components against High Temperature Oxidation Alexander Donchev DECHEMA e.v., Frankfurt/Main, Germany Al-Cr-O Thin Films as an Efficient Hydrogen Permeation Barrier Jürgen Ramm 1, Denis Levchuk 2, Harald Bolt 3, Max Döbeli 4, Simon Eggenberger 5, Beno Widrig 6 1,5,6 OC Oerlikon Balzers AG, LI Balzers, Liechtenstein 2,3 Max-Planck-Institut für Plasmaphysik, D Garching, Germany 4 Paul Scherrer Institute and ETH Zurich, CH- 893 Zürich, Switzerland 10:15-10:35 OR2002 Development of graded low friction SiCN coatings with extended high temperature stability above 1200 C Holger Hoche 1, Christina Berger 2 1 MPA Darmstadt, Darmstadt, Germany 2 MPA-Darmstadt, Darmstadt, Germany 10:35-10:55 OR2003 Hard amorphous Si B C N films with ultra high thermal stability Jaroslav Vlcek 1, Jiri Houska 2, Stanislav Hreben 3, Jiri Capek 4, Petr Zeman 5, Radomir Cerstvy 6 1,2,3,4,5,6 University of West Bohemia, Plzen, Czech Republic 10:55-11:15 Coffee break 11:15-11:35 OR2004 Role of the stratification of TiSiN based nanocomposite films deposited on steel by a hybrid PVD/CVD process, on the thermal cycling resistance Philippe STEYER 1, Alexandre MEGE-REVIL 2, Jean-Francois PIERSON 3, Rodica CHIRIAC 4, Catherine SIGALA 5 1,2 INSA de Lyon/MATEIS, Villeurbanne, France 3 Ecole des Mines/LSGS, Nancy, France 4,5 Université Claude Bernard/LMI, Villeurbanne, France 11:35-11:55 OR :55-12:15 OR2006 Investigations on the oxidation behaviour of MAX-phase based Ti2AlC coatings on gamma-tial Maik Fröhlich 1, Christoph Leyens 2 1 DLR-German Aerospace Center, Köln, Germany 2 Technical University of Brandenburg at Cottbus, Cottbus, Germany HYBRID LAYERS DEPOSITED BY AN ATMOSPHERIC PRESSURE PLASMA PROCESS FOR CORROSION PROTECTION OF GALVANIZED STEEL julien bardon 1, Jérôme Bour 2, Doriane Del Frari 3, David Ruch 4, Bert Verheyde 5, Dirk Vangeneugden 6 1,2,3,4 CRP Henri Tudor, Esch sur Alzette, Luxembourg 5,6 VITO, Mol, Belgium 56 PSE 2008

59 Thursday, September 18, morning Room Olympia 12:15-12:35 OR2007 Multilayer diffusion barrier coatings on polypropylene with improved temperature durability Lutz Körner 1, Axel Sonnenfeld 2, Philipp Rudolf von Rohr 3 1,2,3 ETH Zurich, Zurich, Switzerland 12:35-12:55 OR2008 SiOx-based multilayer barrier coatings produced by a single PECVD process Alessandro Patelli 1, Simone Vezzu' 2, Lorenzo Zottarel 3, Stefano Costacurta 4 1,2,3,4 CIVEN, Marghera Venezia, Italy 12:55-14:20 Lunch break PSE

60 Thursday, September 18, afternoon Room Richard-Strauss 14:20-15:05 Plenary Lecture PL0007 Chairman: Jaroslav Vlcek, Plzen, Czech Republic Ionized-PVD with HiPIMS Industrial Potentials and Scientific Challenges Ulf Helmersson Linköping University, Linköping, Sweden 15:15-16:25 Poster Session 4, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN :15-17:35 OR :35-17:55 OR :55-18:15 OR2103 Session 21: Optical coatings Chairmen: Fiorenza Fanelli, Bari, Italy Hans K. Pulker, Innsbruck, Austria Production of Photocatalytically Active Titania Layers at Ambient Temperature and their Biological Properties Eva Maria Moser 1, Damien Gilliéron 2, Anna Campiche 3, Rudolf Bijlenga 4, Jukka Lausmaa 5 1,2,3,4 Geneva School of Engineering, Geneva, Switzerland 5 SP Technical Research Institute of Sweden, SE Borås, Sweden A new technique for the production of functional films on polymeric web Paul Barker 1, Glen West 2, Peter Kelly 3, James Bradley 4 1,2,3 Manchester Metropolitan University, Manchester, United Kingdom 4 University of Liverpool, Liverpool, United Kingdom Correlation between electrochromic coloration and the relative density in tungsten trioxide thin films prepared by electron beam evaporation Krishnamoorthy Muthukaruppasamy 1, A Subrahmanyam 2, A. Karuppasamy 3 1,2 IITMadras, Chennai, India 3 Fraunhofer Institute for Electron Beam and Plasma Technology, Dresden, Germany Creating antireflective nanostructures on polymers by initial layer deposition before plasma etching Irmina Wendling 1, Peter Munzert 2, Ulrike Schulz 3, Norbert Kaiser 4, Andreas Tuennermann 5 1,2,3,4,5 Fraunhofer Institute for Applied Optics and Precision Engineering, Jena, Germany 18:15-18:35 OR2104 Application of large area ion beam technology for optical coatings Sebastian Lipfert 1, Peter Gawlitza 2, Stefan Braun 3, Andreas Leson 4 1,2,3,4 Fraunhofer IWS, Dresden, Germany 18:35-18:55 OR2105 N-doping of TiO2 thin films prepared by plasma enhanced chemical vapour deposition Agustin Gonzalez-Elipe 1, Pablo Romero-Gómez 2, Angel Barranco 3, Jose Cotrino 4, Juan Pedro Espinós 5 1,2,3,4,5 Instituto de Ciencia de Materiales de Sevilla, Sevilla, Spain 58 PSE 2008

61 Thursday, September 18, afternoon Room Zugspitze 14:20-15:05 Plenary Lecture PL0007, Room Richard-Strauss 15:15-16:25 Poster Session 4, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN :15-17:35 OR :35-17:55 OR :55-18:15 OR2203 Session 22: Plasma modelling Chairmen: David B. Graves, Berkeley, US Achim Lunk, Stuttgart, Germany Insights into low-temperature atmospheric pressure plasmas through computer simulations Felipe Iza 1, David Liu 2, James L. Walsh 3, Michael G. Kong 4, Jae Koo Lee 5 1,2,3,4 Loughborough University, Loughborough, United Kingdom 5 Postech, Pohang, Korea, South Modelling and Experiment on Pulsed DC Magnetron Discharges James Bradley 1, Philippa Browning 2, Philip Thomason 3 1 University of Liverpool, Liverpool, United Kingdom 2,3 University of Manchester, Manchester, United Kingdom FEM approach in simulation of the silicon nitride CVD using the RLSA source Jozef Brcka 1, Song-Yun Kang 2, Toshio Nakanishi 3 1 TEL US Holdings Inc., Technology Development Center, Albany, United States 2 TEL Ltd Technology Development Center, Amagasaki City, Japan 3 TEL AT Ltd Kansai Technology Center, Amagasaki City, Japan Surface Waves for Technical Applications: Numerical Model of the Plasmaline Christian Hunyar 1, Eberhard Räuchle 2, Lukas Alberts 3, Matthias Graf 4, Mathias Kaiser 5, Klaus-Dieter Nauenburg 6 1,2,3,4,5,6 Fraunhofer ICT, Pfinztal, Germany 18:15-18:35 OR :35-18:55 OR2205 Particle-In-Cell/Monte Carlo Collisions model for the reactive sputter-deposition of nitride layers Evi Bultinck 1, Annemie Bogaerts 2, Stijn Mahieu 3, Diederik Depla 4 1,2 Research group PLASMANT University of Antwerp, Antwerp, Belgium 3,4 Ghent University Department for Solid State Sciences, Ghent, Belgium Model and measurement of the Child sheath capacitance in planar, cylindrical, and spherical geometries Sergey Nikiforov 1, Hyeon Oh 2, Sung Chung 3, Dong Lee 4, Jeong Jeon 5 1,2,3,4,5 KERI, Changwon, Korea, South PSE

62 Thursday, September 18, afternoon Room Olympia 14:20-15:05 Plenary Lecture PL0007, Room Richard-Strauss 15:15-16:25 Poster Session 4, Foyer 16:25-16:45 Coffee break Oral Session 16:45-17:15 Keynote Lecture KN :15-17:35 OR2301 Session 23: Plasma polymerization Chairmen: Jörg-Florian Friedrich, Berlin, Germany Francesco Fracassi, Bari, Italy Surface modification with pressure pulse plasmas Andreas Holländer Fraunhofer Institut für Angewandte Polymerforschung, Potsdam, Germany NEW INSIGHTS INTO PLASMA POLYMERIZATION OF ACRYLIC ACID Dirk Hegemann 1, Enrico Körner 2, Sébastien Guimond 3 1,2,3 Empa, St.Gallen, Switzerland 17:35-17:55 OR :55-18:15 OR :15-18:35 OR2304 RF plasma polymerization of polythiophene like thin films Bogdana Mitu 1, Veronica Satulu 2, Aurelian Catalin Galca 3, George Dinescu 4 1 National Institute for Lasers, Plasma and Radiation Physics, Magurele Bucharest, Romania 2,4 National Institute for Lasers Plasma and Radiation Physics, Magurele - Bucharest, Romania 3 National Institute for Material Physics, Magurele - Buchar Silicon substrate pretreatment and plasma polymer film deposition monitored by in situ spectroscopic ellipsometry Bozena Cechalova 1, Jan Mistrik 2, Sona Lichovnikova 3, Vladimir Cech 4 1,3,4 Institute of Material Chemistry Brno University of Technology, Brno, Czech Republic 2 Department of Physics University of Pardubice, Pardubice, Czech Republic A NOVEL METHOD TO OBTAIN POLYPYRROLE-LIKE THIN FILMS BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION Jose Luis Yagüe 1, Núria Águlló 2, Salvador Borrós 3 1,2,3 Institut Químic de Sarrià, Barcelona, Spain 18:35-18:55 OR2305 Preparation of polymer composite membranes with asymmetry of conductivity L. Kravets 1, V. Satulu 2, G. Dinescu 3, A. Gilman 4 1 Joint Institute for Nuclear Research, Dubna, Russian Federation 2,3 National Institute for Laser Plasma and Radiation Physics, Bucharest, Romania 4 Enikolopov Institute of Synthetic Polymer Materials, Moscow, Russian Federation 60 PSE 2008

63 Friday, September 19, morning Room Richard-Strauss 08:30-09:15 Plenary Lecture PL0008 Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR :15-10:35 OR2402 Chairman: Christian Oehr, Stuttgart, Germany Cold plasma treatment of materials. Low pressure vs. atmospheric pressure operation. Francesco Fracassi Università di Bari Dipartimento Chimica, BARI, Italy Session 24: Films for special electrical, magnetic functions Chairmen: Eberhardt Schultheiß, Dresden, Germany Jeon G. Han, Suwon, Korea Electrical properties and structure of transparent conductive oxide films deposited by pulsed reactive magnetron sputtering Mykola Vinnichenko 1, A. Rogozin 2, S. Cornelius 3, N. Shevchenko 4, F. Munnik 5, R. Gago 6, A. Mücklich 7, A. Kolitsch 8, W. Möller 9 1 Institute of Ion Beam Physics and Materials Research Forschungszentrum Dresden- Rossendorf, Dresden, 2,3,4,5,7,8,9 Institute of Ion Beam Physics and Materials Research Forschungszentrum Dresden-Rossendorf, Dresden, Germany 6 Electrical insulation properties of sputter deposited alumina, silica and silicon nitride films at high temperatures Hagen Bartzsch 1, Daniel Glöß 2, Peter Frach 3, Matthias Gittner 4, Eberhard Schultheiß 5, Wolfgang Brode 6, Johannes Hartung 7 1,2,3,5 Fraunhofer FEP, Dresden, Germany 4 Technische Universität Dresden Institut für Festkörperelektronik, Dresden, Germany 6 Siegert TFT GmbH, Hermsdorf, Germany 7 Von Ardenne Anlagentechnik GmbH, Dresden, Germany Magnetron reactive sputtering deposition of oxide films for SOFC Ekaterina Rezugina 1, Anne-Lise Thomann 2, Pascal Brault 3, Vincent Dolique 4, Yves Tessier 5 1,2,3,4,5 GREMI UMR 666 CNRS, Orleans, France 10:35-10:55 OR2403 Elaboration of SmNiO3 and NdNiO3 thin films prepared by DC magnetron sputtering followed by ex-situ air annealing Fabien Capon 1, David Horwat 2, Jean-François Pierson 3 1,2,3 LSGS, Nancy, France 10:55-11:15 Coffee break 11:15-11:35 OR2404 PROPERTIES OF SILVER FILMS ON PET FIBERS Martin Amberg 1, Manfred Heuberger 2, Dirk Hegemann 3, Giuseppino Fortunato 4 1,2,3,4 Empa Swiss Materials Science & Technology, St. Gallen, Switzerland 11:35-11:55 OR2405 Al top cathode deposition on OLED using DC magnetron sputtering tae hyun gil 1, Christian May 2, Hubert Lakner 3, Karl Leo 4, Stefan Keller 5 1,2,3,4 IPMS fraunhofer institute, Dresden, Germany 5 AMAT Applied materials, Alzenau, Germany PSE

64 Friday, September 19, morning Room Richard-Strauss 11:55-12:15 OR :15-12:35 OR :35-13:20 Closing Plenary Lecture PL0009 Effect of the copper to nitrogen atomic ratio on the addition of silver in sputtered copper nitride films Jean-François PIERSON 1, Marie-Liesse DOUBLET 2, Jean-François PIERSON 3 1,3 LSGS - Ecole des Mines, NANCY, France 2 ICG - Université Montpellier II, MONTPELLIER, France Structure and electrical properties of Apatite-like Lanthanum Silicate electrolytes obtained by annealing of La-Si-O reactively sputtered thin films Joao Oliveira 1, Milena Vieira 2, Aliaksandr Shaula 3, Albano Cavaleiro 4 1,3,4 SEG-CEMUC Department of Mechanical Engineering University of Coimbra, Coimbra, Portugal 2 School of Technology and Management of the Polytechnic Institute of Leiria, Leiria, Portugal Chairman: Riccardo d'agostino, Bari, Italy Novel Design and Synthesis of Thin Film for Emerging Flexible Electronics Jeon G. Han 1, Nikolay Britun 2 1,2 CAPST SungKyunKwan Univ., Suwon, Korea, South 62 PSE 2008

65 Friday, September 19, morning Room Zugspitze 08:30-09:15 Plenary Lecture PL0008, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN2500 Session 25: Nanoparticles Chairmen: Holger Kersten, Kiel, Germany Annick Vanhulsel, Mol, Belgium On the growth mechanism of carbon nanowalls using plasma enhanced chemical vapor deposition Masaru Hori 1, Wakana Takeuchi 2, Shingo Kondo 3, Mineo Hiramatsu 4 1,2,3 Nagoya Universtiy, Nagoya, Japan 4 Meijo University, Nagoya, Japan 09:55-10:15 OR2501 Analytical Investigation of the Composition of plasma-induced functional Groups on Carbon Nanotube Sheets Nicolas Peer Zschoerper 1, Verena Katzenmaier 2, Bjoern P. Moller 3, Uwe Vohrer 4, Michael Haupt 5, Christian Oehr 6 1,2,3,4,5,6 Fraunhofer IGB, Stuttgart, Germany 10:15-10:35 OR :35-10:55 OR2503 DC magnetron sputtering deposition of titanium oxide nanoparticles: influence of temperature, pressure and deposition time on the deposited layer morphology and surface wetting properties Laurent Dreesen 1, Francesca Cecchet 2, Stephane Lucas 3 1 Laboratoire d Analyses par Réactions Nucléaires (LARN), Centre de Recherche en Physique de la Matièr 2 Laboratoire Lasers et Spectroscopie (LLS) Centre de Recherche en Physique de la Matière et du Rayo, Namur, Belgium 3 Laboratoire d Analyses par Effect of pressure on the size of carbon nanoparticles deposited by pulsed plasma enhanced CVD of methane Ahmad Reza Rastkar 1, Babak Shokri 2, Mohammad Reza Rahimipour 3 1 Laser and Plasma Institute, Shahid Beheshti University, Tehran, Iran 2 Laser and Plasma Research Institute Shahid Beheshti University Evin , Tehran, Iran 3 Material and Energy Research Center, Karaj, Iran 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR2505 Functionalization of multi-walled carbon nanotubes by atomic nitrogen produced by MW plasma Ar-N2 Benoit Ruelle 1, Sophie Peeterbroeck 2, Carla Bittencourt 3, Thomas Godfroid 4, Gustaaf Van tendeloo 5, Jean-Pierre Dauchot 6, Rony Snyders 7, Philippe Dubois 8, Michel Hecq 9 1,3,6,7,8,9 Université de Mons-Hainaut, Mons, Belgium 2,4 Materia Nova, Mons, Belgium 5 University of Antwerp, Antwerp, Belgium Plasma Enhanced Chemical Vapor Deposition on Particulate Solidstate Materials for Improved Powder Processing Adrian Spillmann 1, Zorica Dimitrova 2, Axel Sonnenfeld 3, Philipp Rudolf von Rohr 4 1,2,3,4 ETH Zurich, Zurich, Switzerland PSE

66 Friday, September 19, morning Room Zugspitze 11:55-12:15 OR :15-12:35 OR2507 Functionalization and coating of carbon nanotubes in low pressure r.f. discharges Lenka Zajickova 1, Marek Elias 2, Zuzana Kucerova 3, Ondrej Jasek 4, Jana Houdkova 5, Magdalena Kadlecikova 6, Jirina Matejkova 7 1 Dept Phys Electronics Masaryk University, Brno, Czech Republic 2,3,4 Dept Phys Electronics Masaryk University, Brno, Czech Republic 5 Institute of Physics AS CR, Praha, Czech Republic 6 Slovac University of Technology, Bratislava, Slovak Chemically directed assembly of functionalized luminescent nanocrystals onto plasma modified substrates toward sensing and optoelectronic applications Eloisa Sardella 1, Francesco D. Liuzzi 2, Roberto Comparelli 3, Nicoletta Depalo 4, Angela Agostiano 5, M. Lucia Curri 6, Marinella Striccoli 7, Pietro Favia 8, Riccardo d'agostino 9 1 Institute of Inorganic Methodologies and Plasma (IMIP) CNR, Bari, Italy 2,4,5,8,9 Department of Chemistry University of Bari, Bari, Italy 3,6,7 CNR-IPCF Bari Division, Bari, Italy 12:35-13:20 Closing Plenary Lecture 9, Room Richard-Strauss 64 PSE 2008

67 Friday, September 19, morning Room Olympia 08:30-09:15 Plenary Lecture PL0008, Room Richard-Strauss Oral Session 09:25-09:55 Keynote Lecture KN :55-10:15 OR :15-10:35 OR2602 Session 26: Growth and structure of nanocomposites Chairmen: Jörg Patscheider, Dübendorf, Switzerland Albano Cavaleiro, Coimbra, Portugal Plasma nanostructuring for advanced functional materials Antonella Milella 1, Rosa Di Mundo 2, Elena Dilonardo 3, Francesca Intranuovo 4, Fabio Palumbo 5, Francesco Fracassi 6, Piero Favia 7, Riccardo d'agostino 8 1 University of Bari, Dept. of Chemistry, Bari, Italy 2,3,4,6,7,8 University of Bari Dept. of Chemistry, Bari, Italy 5 Institute of Inorganic Methodologies and Plasmas IMIP CNR, Bari, Italy Morphology and structure of C:Co, C:V and C:Cu nanocomposite films Markus Berndt 1, Gintautas Abrasonis 2, Matthias Krause 3, Arndt Mücklich 4, Frans Munnik 5, Andreas Kolitsch 6, Wolfhard Möller 7 1 Forschungszentrum Dresden-Rossendorf e.v, Dresden, Germany 2,3,4,5,6,7 Forschungszentrum Dresden-Rossendorf e.v., Dresden, Germany Thermal stability and phase transformations of aluminum oxide thin films Per Eklund 1, Madana Sridharan 2, Michael Sillassen 3, Jørgen Bøttiger 4 1 inano, University of Arhus, Arhus, Denmark 2,3,4 inano, University of Arhus, Denmark 10:35-10:55 OR2603 Effect of pulsed mode on the formation of nanoparticles and on the nanostructure and properties of SnO2 thin films deposited by PECVD Jerome PULPYTEL 1, Marie JUBAULT 2, Nadhira LAIDANI 3, Farzaneh AREFI-KHONSARI 4 1 Laboratoire de Genie des Procedes Plasmas et Traitements de Surfaces ENSCP UPMC Paris Universitas, 2,4 Laboratoire de Génie des Procédés Plasmas et Traitement de Surface ENSCP UPMC Paris Universitas, Paris, France 3 Fondazione Bruno Kessler- R 10:55-11:15 Coffee break 11:15-11:35 OR :35-11:55 OR2605 Influence of W addition on the oxidation behaviour of C-based films Cristina Louro 1, Carlos Moura e Silva 2, José Tavares Branco 3, Albano Cavaleiro 4 1 SEG-CEMUC-Mechanical Engineering Department, University of Coimbra, Coimbra, Portugal 2 REDEMAT - Laboratório de Engenharia e Modificações de Superfícies, Belo Horizonte Minas Gerais, Brazil 3 REDEMAT - Laboratório de Engenharia e Annealing Studies of Cr/Sc-based Soft X-ray Multilayer Mirrors Fredrik Eriksson 1, Naureen Ghafoor 2, Eric Gullikson 3, Lars Hultman 4, Jens Birch 5 1 Thin Film Physics, Linköping university, Linköping, Sweden 2,4 Thin Film Physics, Linköping university, Sweden 3 Lawrence Berkeley Lab, Berkeley CA, United States 5 Thin Film Physics, Linköping university, United States PSE

68 Friday, September 19, morning Room Olympia 11:55-12:15 OR :15-12:35 OR2607 A versatile system for large area coating of nanocomposite thin films Ralph Schmittgens 1, Marcus Wolf 2, Eberhard Schultheiss 3 1,2 Institut für Festkörperelektronik/TU Dresden, Dresden, Germany 3 Fraunhofer FEP, Dresden, Germany A COMPARATIVE STUDY OF NANOCOMPOSITE COATINGS OF Ni- CrN PREPARED BY MOCVD AND MAGNETRON SPUTTERING Kuppusami Parasuraman 1, Arup Dasgupta 2, Thirumurugesan R.T. 3, Divakar R. 4, Mohandas E. 5 1,2,3,4,5 Indira Gandhi Centre for Atomic Research, Kalpakkam, India 12:35-13:20 Closing Plenary Lecture 9, Room Richard-Strauss 66 PSE 2008

69 Monday, September 15, 2008 Poster Session, 15:15-16:25 Poster - Plasma sources PO1001 Comparative study of plasma parameters in a pulsed DC magnetron and hollow cathode plasma jet sputtering systems Martin Čada 1, Petr Virostko 2, Štěpán Kment 3, Zdeněk Hubička 4 1,2,3,4 Institute of Physics of the ASCR v.v.i., Prague 8, Czech Republic PO1002 Plasma sheath dynamics in dielectric barrier-free atmospheric pressure radio-frequency glow discharges Johann Laimer 1, Alexander Puchhammer 2, Herbert Störi 3 1,2,3 Vienna University of Technology, Wien, Austria PO1003 PO1004 Development of a non self-coating electrode for DBD-PECVD processes at atmospheric pressure Michael Thomas 1, Eugen Schlittenhardt 2, Frank Förster 3, Peter Palm 4, Claus-Peter Klages 5 1,2,5 Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany 3,4 SOFTAL electronic Erik Blumenfeld GmbH & Co. KG, Hamburg, Germany Atmospheric plasma surface modification analysis by Energy Resolved Molecular Beam Mass Spectrometry and SIMS Yolanda Aranda Gonzalvo 1, Graham A. Cooke 2, Terry D. Whitmore 3, David L. Seymour 4, Claire L. Greenwood 5, John A. Rees 6 1,2,3,4,5,6 Hiden Analytical Ltd., Warrington, United Kingdom PO1005 PO1006 Improvement of the adhesion of a galvanic metallization of polymers by surface functionalization using dielectric barrier discharges at atmospheric pressure Jochen Borris 1, Antje Zänker 2, Michael Thomas 3, Andreas Möbius 4, Danica Elbick 5, Ernst-Rudolf Weidlich 6, Claus-Peter Klages 7 1,2,3,7 Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany 4,5 Enthone GmbH, Langenfeld, Germany 6 GRT GmbH & Co. KG, Hamm, Germany DIRECT CURRENT DISCHARGE FORMATION AND EXPANSION AT ATMOSPHERIC PRESSURE Damian Dudek 1, Juergen Engemann 2, Peter Awakowicz 3 1,2 University of Wuppertal, Wuppertal, Germany 3 University Bochum, Bochum, Germany PO1007 Development of DBD- Plasmas across Fibre Rovings Vladimir Ermel 1, Michael Kurrat 2 1,2 TU Braunschweig, Braunschweig, Germany PO1008 Atmospheric pressure plasma jets based on radiofrequency barrier discharges of various configurations Gheorghe Dinescu 1, Maximilian Teodorescu 2, Ioana Luciu 3, Cristian Stancu 4, Eusebiu Rosini Ionita 5, Tomy Acsente 6 1 National Institute for Lasers, Plasma and Radiation Physics, Magurele - Bucharest, Romania 2,3,4,5,6 National Institute for Lasers Plasma and Radiation Physics, Magurele- Bucharest, Romania PSE

70 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1009 Surface Functionalization Using Atmospheric Plasma Angelo Yializis 1, Angelo Yializis 2, Antonio Vieira 3 1,2 Sigma Technologies International, Tucson, United States 3 CeNTI, Famalicão, Portugal PO1010 ELECTRICAL CHARACTERISATION OF A LINEARLY EXTENDED ARC DISCHARGE AT ATMOSPHERIC PRESSURE Birte Dresler 1, Gerrit Mäder 2, Ines Dani 3, Volkmar Hopfe 4 1,2,3,4 Fraunhofer IWS, Dresden, Germany PO1011 PO1012 PO1013 Multi-layer photoresist stamps for selective plasma treatment in micrometer scales Uwe Stöhr 1, Antje Zänker 2, Michael Thomas 3, Klaus Kadel 4, Holger Reinecke 5 1,5 Freiburg University, Freiburg, Germany 2,3 Fraunhofer-Institute for Surface Engineering and Thin Films, Braunschweig, Germany 4 Boehringer Ingelheim microparts GmbH, Dortmund, Germany Production of VHF excited H2 plasma by new method of superposing the standing waves Shinji Tsuji 1, Hirohumi Kaneko 2, Akio Kodera 3, Yukio Soejima 4, Masayoshi Murata 5 1 Y.A.C.Co., Ltd, Akishima City Tokyo, Japan 2,4,5 Y.A.C.Co., Akishima Tokyo, Japan 3 Y.A.C.Co., Akishoma Tokyo, Japan Development of VHF Plasma Source with short discharge gap for solar cells Yoshinobu Kawai 1, Yasuhiro Yamauchi 2, Tomoyoshi Baba 3, Yoshiaki Takeuchi 4, Hiromu Takatsuka 5, Hiroshi Muta 6 1,6 Kyushu University, Kasuga, Japan 2,5 Mitsubishi Heavy Industries Ltd., Isahaya, Japan 3,4 Mitsubishi Heavy Industries Ltd., Nagasaki, Japan PO1014 PO1015 The Microwave Concentrator Stack: A source for free-standing, linearly homogeneous plasma Ulrich Schweitzer 1, Andreas Schulz 2, Christian Langbein 3, Matthias Walker 4, Ulrich Stroth 5, Uwe Schumacher 6, Horst Mügge 7, Klaus-Martin Baumbärtner 8 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,3,4,5,6 Institut für Plasmaforschung, Stuttgart, Germany 7,8 Muegge Electronic GmbH, Reichelsheim, Germany Designing Modular Linear Microwave Based Plasma Sources Lukas Alberts 1, Christian Hunyar 2, Matthias Graf 3, Mathias Kaiser 4, Eberhard Räuchle 5, Andreas Schulz 6, Matthias Walker 7 1,2,3,4,5 Fraunhofer ICT, Pfinztal, Germany 6,7 IPF uni-stuttgart, Stuttgart, Germany PO1016 Improvement of compact electron-beam-excited-plasma (EBEP) source Ryuta Ichiki 1, Yusuke Kubota 2, Tamio Hara 3 1,2,3 Toyota Technological Institute, Nagoya, Japan 68 PSE 2008

71 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1017 Cylindrical hot refractory anode vacuum arc Stephen Muhl 1, Sandra Rodil 2, Dagoberto Carmona 3, Enrique Camps 4, Luis Escobar 5 1,2,3 IIM-UNAM, Mexico, Mexico 4,5 ININ, Mexico, Mexico PO1018 Ferromagnetic Enhanced Internal Linear Inductively Coupled Plasma source for the Large Area Processing JungKyun Park 1, JongHyuek Lim 2, KyongNam Kim 3, GeunYoung Yeom 4 1,2,3,4 Sungkyunkwan University, Suwon, Korea, South PO1019 PO1020 Spatio-Temporal Control of Low-Inductance-Antenna-Driven RF Plasmas for Advanced Ultra-Low-Damage Processes Yuichi Setsuhara 1, Kosuke Takenaka 2, Akinori Ebe 3 1 JWRI, Osaka Univ. / JST, CREST, Osaka, Japan 2 JWRI Osaka Univ. / JST CREST, Osaka, Japan 3 EMD Corporation, Kyoto, Japan UNIFORMITY DEPOSITION FOR SEMICONDUCTOR APPLICATIONS Victor Bellido-Gonzalez 1, Dermot Monaghan 2 1,2 GENCOA LTD, Liverpool, United Kingdom PO1021 PO1022 PO1023 PO1024 Active-Screen Plasma Surface Engineering Technology - Currents Status and Future Directions Hanshan Dong The University of Birmingham, Birmingham, United Kingdom Investigation of patterned deposition of thin films using the Active Mask Ulrike Heckmann 1, Frank Hesse 2, Jan Duesing 3, Ulrich Klug 4, Ralf Bandorf 5 1,2,5 Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany 3,4 Laser Zentrum Hannover e.v., Hannover, Germany Optimized porous gas inlets for patterned surface coating with microplasmas at atmospheric pressure Uwe Stöhr 1, Antje Zänker 2, Michael Thomas 3, Holger Reinecke 4, Claus- Peter Klages 5 1,4 Freiburg University, Freiburg, Germany 2,3,5 Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany Deposition of barrier layers for thin film solar cells sustained by bipolar substrate-biasing Evelyn Häberle 1, Jochen Kopecki 2, Andreas Schulz 3, Matthias Walker 4, Ulrich Stroth 5 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,3,4,5 Institut für Plasmaforschung, Universität Stuttgart, Germany PSE

72 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1025 PO1026 PO1027 Formation of microplasmas for functionalization of small capillaries Sarah Panowitz 1, Jakob Barz 2, Michael Müller 3, Joachim Franzke 4, Christian Oehr 5 1,2,3,5 Fraunhofer IGB, Stuttgart, Germany 4 Institute for Analytical Sciences, Dortmund, Germany Metallisation of carbon nanofibres by Physical Vapor Deposition Volker Brüser 1, Tim Schubert 2, Ruben Wiese 3 1,3 Leibniz-Institute for Plasma Science and Technology e. V., Greifswald, Germany 2 FutureCarbon GmbH, Bayreuth, Germany Thin metal film deposition on the surface of microparticles trapped in RF magnetron discharge plasma Alexander Serov 1, Alexander Pal 2, Alexander Rudavets 3, Alex Ryabinkin 4 1,2,3,4 MSU Skobeltsyn Institute of Nuclear Physics, Moscow, Russian Federation PO1028 PO1029 Methane pyrolysis with a microwave plasma source for application in space Martina Leins 1, Tilman Schaefer 2, Klaus-Martin Baumgärtner 3, Matthias Walker 4, Andreas Schulz 5, Uwe Schumacher 6, Ulrich Stroth 7 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2 Astrium GmbH, Friedrichshafen, Germany 3 Muegge Electronic GmbH, Reichelsheim, Germany 4,5,6,7 Institut für Plasmaforschung, Stuttgart, Germany Elucidation of the role of ozone in a gas-liquid discharge reactor used for treatment of polluted aqueous effluents stephanie ognier 1, michael Redolfi 2, Simeon Cavadias 3 1,2,3 université Pierre et Marie Curie-LGPPTS, paris, France Poster - Plasma assisted diffusion PO1030 On the Surface Properties of Plasma Nitrided 316L Thin Film by Nano- and Micro-indentation Levent Trabzon 1, Cem Igdil 2 1,2 Istanbul Technical University, Istanbul, Turkey PO1031 PO1032 Nitrogen diffusion in single crystalline austenitic stainless steel during ion beam nitriding and subsequent thermal annealing Andrius Martinavičius 1, Gintas Abrasonis 2, Wolfhard Möller 3, Claude Templier 4, Jean Paul Rivière 5, Alain Declémy 6, Yuriy Chumlyakov 7 1,2,3 Forschungszentrum Dresden-Rossendorf e. V., Dresden, Germany 4,5,6 Laboratoire de Métallurgie Physique, Poitiers, France 7 Siberian Physical Technical Institute, Tomsk, Russian Federation Titanium nitriding by microwave atmospheric pressure plasma: Towards single crystal synthesis. Rodrigo Perito Cardoso 1, Grégory Arnoult 2, Thierry Belmonte 3, Gérard Henrion 4, Sylvain Weber 5 1,2,3,4 Laboratoire de Science et Génie des Surfaces, Nancy, France 5 Laboratoire de Physique des Matériaux, Nancy, France 70 PSE 2008

73 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1033 Effect of Pre-Deforming on Low Temperature Plasma Nitriding of Austenitic Stainless Steel Akio Nishimoto 1, Katsuya Akamatsu 2 1,2 Kansai University, Osaka, Japan PO1034 Plasma Nitriding of 90CrMoV8 Tool Steel for the Enhancement of Hardness and Corrosion Resistance Corinne Nouveau 1, Ram Mohan Rao 2, Philippe Steyer 3 1,2 Arts et Métiers ParisTech, Cluny, France 3 INSA, Villeurbanne, France PO1035 PO1036 Mechanical Properties of Aluminum Nitride Layer Formed by Duplex Coating of Barrel Nitriding and Plasma Nitriding Masashi Yoshida 1, Masahiro Okumiya 2, Ryuta Ichiki 3, Waleed Khalifa 4, Cagri Tekmen 5, Yoshiki Tsunekawa 6, Tamio Hara 7, Kazushi Tanaka 8 1,2,3,4,5,6,7 Toyota Technological Institute, Nagoya, Japan 8 Chubu Electric Power Co., Nagoya, Japan MULTI-DIPOLAR PLASMAS FOR INNOVATIVE THERMOCHEMICAL DIFFUSION PROCESSES: Thierry Czerwiec 1, Gregory Marcos 2, Henri Michel 3 1,2 LSGS, Nancy, France 3 LSGS, nancy, France PO1037 PO1038 PO1039 PO1040 Cold plasma nitriding of C 38 steel at ambient temperature: Microstructural and Electrochemical characterizations Charafeddine JAMA 1, Fatima Zahra Bouanis 2, Michel Traisnel 3, Jean Bernad Vogt 4, Fouad Bentiss 5 1 Laboratoire PERF LSPES UMR , Villeneuve D'Ascq, France 2,3 Laboratoire PERF LSPES UMR , Villeneuve D'Ascq, France 4 LMPGM CNRS UMR 8517, Villeneuve D'Ascq, France 5 Laboratoire de Chimie de Coordination et d'analytiq The effect of plasma nitriding on the corrosion and electrical properties of AISI 316L Won-Hyuk Hong 1, Dong-Hoon Han 2, Jung-Joong Lee 3 1,2,3 Department of Material Science and Engineering Seoul National University, Seoul, Korea, South Mechanical properties of surface layers produced by DC-pulsed plasma nitriding on an AISI 4140 low-alloy steel Pablo Corengia 1, Luciano Dutrey 2, Evangelina De Las Heras 3, Daniel Egidi 4, Hernán Svoboda 5, Marta Brizuela 6, Gabriel Lopez 7 1,6 INASMET-Tecnalia, Donostia-San Sebastián, Spain 2 Centro de Investigación y Desarrollo en Mecánica - Instituto Nacional de Tecnología Industrial, Prov. Buenos Aires - San Martín, Argentina 3,4 Centro de Investigación y Desarrollo en Me Corrosion Resistance of Low Temperature Plasma Diffusion Treated Austenitic Stainless Steel Masato Tsujikawa 1, Motoo Egawa 2, Nobuhiro Ueda 3, Takumi Sone 4, Kazuhiro Nakata 5 1 Osaka Prefecture University, Sakai-shi, Japan 2,3,4 Technology Research Institute of Osaka Prefecture, Izumi-shi, Japan 5 Joining and Welding Research Institute of Osaka University, Ibaraki-shi, Japan PSE

74 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1041 PO1042 PO1043 Nitriding of AISI M2 high speed steel by inductively coupled plasma Dong-Hoon Han 1, Bohwan Park 2, Won-Hyuk Hong 3, Jung-joong Lee 4 1,2,3,4 School of Material Science and Engineering Seoul National University, Seoul, Korea, South Effect of Solution Treatment Temperature on Case Thickness by Low Tempetature Nitriding and Carburizing Mitsuhiro Sakamoto 1, Masato Tsujikawa 2, Motoo Egawa 3, Nobuhiro Ueda 4, Takumi Sone 5, Kazuhiro Nakata 6 1,2 Osaka Prefecture University, Sakai-shi, Japan 3,4 Technology Research Institute of Osaka Prefecture, Izumi-shi, Japan 5 Technology Research Institute of Osaka Prefecture, Izimi-shi, Japan 6 Joining and Welding Research Institute of Osa Monitoring method and control system for pulse-supplied plasma nitriding processes practical verification Jan Walkowicz 1, Jerzy Smolik 2, Rafal Brudnias 3, Jan Przybylski 4 1,2,3,4 Institute for Sustainable Technologies - National Research Institute, Radom, Poland PO1044 PO1045 PO1046 Comparative investigation of the N-alloyed stainless steel coatings and surface modified layers produced on stainless steel by low temperature plasma nitriding Eduard Grigore 1, Cristian Ruset 2, Xiao Li 3, Hanshan Dong 4 1 National Institute for Laser, Plasma and Radiation Physics, Magurele-Bucharest, Romania 2 National Institute for Laser Plasma and Radiation Physics, Magurele- Bucharest, Romania 3,4 The University of Birmingham, Birmingham, United Kingdom MODIFICATIONS OF TRIBOLOGICAL BEHAVIOUR OF STAINLESS STEEL BY DUPLEX TREATMENTS Gonzalo G Fuentes 1, Rafael J Rodríguez 2, Rosario Martínez 3, Joaquín Yagüe 4, Juan J de Damborenea 5, Alfredo Frutos 6, Francesc Montalá 7, Jonathan Housden 8 1,2,3,4 Center of Advanced Surface Engineering, Cordovlla-Pamplona, Spain 5,6 National Center of Metallurgical Research CENIM, Madrid, Spain 7 Tratamientos Térmicos Carreras, Barcelona, Spain 8 Tecvac Ltd, Cambridge, United Kingdom Applications of the multilayer structures diffusion layer / thin antiwear coating obtained by different hybrid method Jerzy Smolik 1, Jan Walkowicz 2 1,2 Institute for Sustainable Technologies - National Research Institute, Radom, Poland PO1047 Poster - LP CVD PO1048 Influence of noble gas atomic-attrition on nitrogen diffusion F. Alvarez 1, E. Ochoa 2, R. Droppa 3, T. Czerwiec 4, M.C. dos Santos 5 1,2 Unicamp, Campinas, Brazil 3 LNLS, Campinas, Brazil 4 Laboratoire de Science et Genie des Surfaces, Nancy, France 5 USP, Sao Paulo, Brazil Kinetic modelling of BN-film deposition in the system B-N-H-F Achim Lunk 1, Jens Matheis 2, Sarah Panowitz 3 1,2,3 University of Stuttgart, Stuttgart, Germany 72 PSE 2008

75 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1049 Spectroscopy of pulsed microwave N2/CH4 plasma for silicon carbon nitride thin films deposition Simon Bulou 1, Laurent Le Brizoual 2, Robert Hugon 3, Mohammed Belmahi 4, Jean Luc Vasseur 5, Jamal Bougdira 6 1,2,3,4,5,6 Nancy Université, Nancy, France PO1050 PO1051 Deposition of silicon oxide and plasma-polymer-layers using Magnetron-PECVD on flexible substrates J. Fahlteich 1, M. Fahland 2, B. Meyer 3, T. Vogt 4, W. Schönberger 5, N. Schiller 6 1,2,3,4,5,6 Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik FEP, Dresden, Germany Deposition of dielectric layers with Plasma Enhanced Chemical Vapour Deposition with Inductively Coupled Plasma Sandro Jatta 1, Klaus Haberle 2, Andreas Klein 3, Benjamin Kögel 4, Peter Meissner 5 1,2,4,5 TU Darmstadt Hochfrequenztechnik, Darmstadt, Germany 3 TU Darmstadt Institute of Materials Science Surface Science Division, Darmstadt, Germany Poster - Plasma polymerization PO1052 Effect of plasma treatment on polymer track membranes L. Kravets 1, S. Dmitriev 2, G. Dinescu 3, A. Lazea 4, V. Satulu 5 1,2 Joint Institute for Nuclear Research, Dubna, Russian Federation 3,4,5 National Institute for Laser Plasma and Radiation Physics, Bucharest, Romania PO1053 PO1054 PO1055 Characterization of Pyrrole Based Polymer Films Deposited in a 60 MHz Low Pressure Discharge Marcus Wolf 1, Ralph Schmittgens 2, Eberhard Schultheiss 3 1,2 Institut für Festkörperelektronik/TU Dresden, Dresden, Germany 3 Fraunhofer FEP, Dresden, Germany Fire retardant performance of Polyamide 6,6 coated by organosilicon thin films using cold plasma process Hélène GALLOU 1, Maude Jimenez 2, Charafeddine Jama 3 1, Laboratoire des Procédés d Elaboration de Revêtements Fonctionnels / LSPES CNRS- UMR , France 2,3 Laboratoire PERF/LSPES CNRS-UMR , Villeneuve d\'ascq, France Characterization of functional a-c:h:n plasma polymer thin films Sebastien Guimond 1, Enrico Körner 2, Barbara Hanselmann 3, Dirk Hegemann 4 1,2,3,4 Empa Swiss Materials Science and Technology, St.Gallen, Switzerland PO1056 CF4 microwave plasmas for the deposition of teflon-like films Antje Quade 1, Karsten Schröder 2, Andreas Ohl 3, Klaus-Dieter Weltmann 4 1,2,3,4 INP, Greifswald, Germany PSE

76 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1057 POLYMERIC MEMBRANES SYNTHESIS BY PLASMA POLIMERIZATION FOR CO2 SEPARATION Ekain Fernández-Gesalaga 1, Pablo Corengia 2, Inés Rincón 3, Lourdes Yurramendi 4, Alberto García-Luis 5, Marta Brizuela 6, Daniel González- Santamaría 7 1,2,3,4,5,6,7 INASMET-Tecnalia, Donostia-San Sebastián, Spain PO1058 PO1059 Long term stability of organosilicon plasma polymers Lenka Zajickova 1, Zuzana Kucerova 2, Daniel Franta 3, Vilma Bursikova 4, David Necas 5, Vratislav Perina 6 1 Dept Phys Electronics Masaryk University, Brno, Czech Republic 2,3,4,5 Dept Phys Electronics Masaryk University, Brno, Czech Republic 6 Institute of Nuclear Physics AS CR, Rez, Czech Republic Diagnostics of nylon sputtering by means of RF magnetron Jaroslav Kousal 1, Jan Hanus 2, Andrei Choukourov 3, Oleksandr Polonskyi 4, Hynek Biederman 5, Danka Slavinska 6 1,2,3,4,5,6 Charles University in Prague; Faculty of Mathematics and Physics, Prague, Czech Republic Poster - AP Plasma CVD PO1060 Film-Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure in He/O2/HMDSO and He/N2O/HMDSO mixtures Igor Vinogradov 1, Achim Lunk 2 1,2 IPF, Stuttgart, Germany PO1061 Chemical composition of SiOx films deposited by an atmospheric pressure plasma jet (APPJ) on polymer surfaces Jan Schäfer 1, Rüdiger Foest 2, Antje Quade 3, Andreas Ohl 4, Klaus-Dieter Weltmann 5 1,2,3,4,5 Leibniz-Institut für Plasmaforschung und Technologie, Greifswald, Germany PO1062 PO1063 PO1064 Adhesion improvement of polyimide/metal interface by atmospheric pressure plasma polymerization Yoon Kee Kim Hanbat National University, Daejeon, Korea, South Deposition of super hydrophobic a-c:f films by dielectric barrier discharge at atmospheric pressure Yoon Kee Kim 1, Duk Jae Kim 2 1 Hanbat National University, Daejeon, Korea, South 2 Plasma Systems and Materials Inc., Seongnam, Korea, South Preparation, properties and gas permeability of SiOx membranes deposited by plasma jet system Amsarani Ramamoorthy 1, Michael McCann 2, Mahfujur Rahman 3, Damian Mooney 4, Don MacElroy 5, Denis Dowling 6 1 School of Chemical and Bioprocess Engineering, University College Dublin, Dublin, Ireland 2,3,4,5 School of Chemical and Bioprocess Engineering University College Dublin, Dublin, Ireland 6 School of Electrical Electronic and Mechanical 74 PSE 2008

77 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1065 PO1066 In situ spectroscopic investigations of atmospheric pressure plasmas used in the chemical vapour deposition of metal-silica composite films. David Sawtell 1, David Massey 2, Philip Martin 3, David Sheel 4 1,3 The University of Manchester, Manchester, United Kingdom 2,4 The University of Salford, Manchester, United Kingdom MOLECULAR STRUCTURE CHARACTERIZATION OF ORGANOSILICON COATINGS DEPOSITED BY MEANS OF AN ATMOSPHERIC PRESSURE DIELECTRIC BARRIER DISCHARGE PROCESS Jérôme Bour 1, Julien Bardon 2, David Ruch 3, Bert Verheyde 4, Dirk Vangeneugden 5 1,2,3 CRP Henri Tudor, Esch sur Alzette, Luxembourg 4,5 VITO, Mol, Belgium PO1067 PO1068 PO1069 Aerosol assisted plasma deposition of hydrophobic coatings on PP film Rino Morent 1, Nathalie De Geyter 2, Tinneke Jacobs 3, Christophe Leys 4 1,2,3,4 Research Unit Plasma Technology - Department of Applied Physics - Ghent University, Ghent, Belgium Carbon material growth at atmospheric pressure by radiofrequency jet PECVD Bogdana Mitu 1, Sorin Ionut Vizireanu 2, Eusebiu Rosini Ionita 3, Claudia Elena Stancu 4, Daniel Stoica 5, Leona Nistor 6, Gheorghe Dinescu 7 1 National Institute for Lasers, Plasma and Radiation Physics, Magurele Bucharest, Romania 2,3,4,5,7 National Institute for Lasers Plasma and Radiation Physics, Magurele Bucharest, Romania 6 National Institute for Material Physics, M Preparation of silicon oxide thin films by atmospheric pressure plasma chemical vapour deposition Kerstin Horn 1, Andreas Pfuch 2, Martin Polster 3 1,2,3 INNOVENT e.v., Jena, Germany Poster - Nanofilms PO1070 Mechanical study of high resistance silicon carbide based multinano-layers grown by multifrequency PACVD Laurent Thomas 1, Mickael Joinet 2, Farida Rebib 3, Tony Da Silva 4, René Gras 5, Isabelle Caron 6, Fabienne Cournut 7 1,2,3 PROMES/CNRS, Perpignan, France 4,5,6 LISMMA/ISMEP, Saint Ouen, France 7 EADS France - Innovation Works, Suresnes, France PO1071 Deposition and characterisation of CrN/Ag and CrSiN/Ag nanoscale multilayers Mira Baraket 1, Pascal Briois 2, David Mercs 3, Christian Coddet 4 1,2,3 LERMPS-UTBM, belfort, France 4 LERMPS - UTBM, belfort, France PO1072 Synthesis and characterization of multilayered TiSiN/Cu and TiSiN/Ni hard coatings Mariana Braic 1, Mihai Balaceanu 2, Viorel Braic 3 1,2,3 National Institute for Optoelectronics, Magurele-Bucharest, Romania PSE

78 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1073 PO1074 PO1075 Residual Stress study of Ti1-xAlxN / Ti1-xAlxN superlattices Carlos Figueroa 1, Eduardo Tentardini 2, Eduardo Blando 3, Roberto Hübler 4, Rodrigo Basso 5, Roosevelt Droppa Jr. 6, Israel Baumvol 7 1 Centro de Ciências Exatas e Tecnologia, Universidade de Caxias do Sul, , Caxias do Sul, RS, 2,7 Centro de Ciências Exatas e Tecnologia Universidade de Caxias do Sul Caxias do Sul RS, Caxias do Sul, Brazil Fabrication of APS nanostructured Al2O3 coatings from spray-dried powders Emilie Bannier 1, Enrique Sánchez 2, Arnaldo Moreno 3, María Dolores Salvador 4, Francisco Segovia 5, Elizabeta Klyatskina 6, Eduardo Martínez 7, Fernando Sapiña 8 1 Instituto de Tecnología Cerámica (ITC) - Asociación de Investigación de las Industrias Cerámicas (AI 2,3 Instituto de Tecnología Cerámica (ITC) - Asociación de Investigación de las Industrias Cerámicas (AI, Castellón de la Plana, Spain 4,5 Multicomponent nanocomposite films. From fundamental principles to application Dmitry Shtansky 1, Philip Kiryukhantsev-Korneev 2, Alexander Sheveiko 3, Irina Bashkova 4, Dmitry Sorokin 5, Evgeny Levashov 6 1,2,3,4,5,6 Moscow Institute of Steel and Alloys, Moscow, Russian Federation PO1076 PO1077 Synthesis and Properties of CrN-Cu Nanocomposites Prepared by Pulsed DC Magnetron Sputtering Kuppusami Parasuraman 1, Elangovan T. 2, Thirumurugesan R. 3, Mohandas E. 4, Mangalaraj D. 5 1,3 Indira Gandhi Centre for Atomic Research, Kalpakkam, India 2,5 Bharathiar university, Coimbatore, India 4 Indira gandhi Centre for Atomic Research, Kalpakkam, India CARBOXYL FUNCTIONALIZED PLASMA POLYMER FILMS WITH EMBEDDED SILVER NANOPARTICLES Enrico Körner 1, Giuseppino Fortunato 2, Sébastien Guimond 3, Dirk Hegemann 4 1,2,3,4 Empa Swiss Materials Science & Technology, St. Gallen, Switzerland PO1078 PO1079 Plasma immersion ion densification of polymer based nanocomposites to form noble metal nanoparticle containing diamond like carbon Florian Schwarz 1, Götz Thorwarth 2, Bernd Stritzker 3 1,3 Universität Augsburg, Augsburg, Germany 2 Swiss Federal Institute for Materials Testing & Research (EMPA), Dübendorf, Switzerland Enhanced photocatalysis and gas sensing by dendrite structured TiO2-WO3 nanocomposites deposited by pulsed DC magnetron sputtering A. Karuppasamy 1, A. Delan 2, E. Schultheiß 3 1,2 Institut für Festkörperelektronik Technische Universität Dresden, Dresden, Germany 3 Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik, Dresden, Germany 76 PSE 2008

79 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1080 PO1081 PO1082 PO1083 Nano-scratch resistance of hard nitride nanocomposites: correlation with mechanical properties Ben Beake 1, Vladimir Vishynakov 2, John Colligon 3 1 Micro Materials Ltd, Wrexham, United Kingdom 2,3 Manchester Metropolitan University, Manchester, United Kingdom Deposition of TiN-WS2 nanocomposite coatings by a hybrid process: sputtering + cluster gun D Bharathi Mohan 1, V Severo 2, A Cavaleiro 3 1 SEG-CEMUC Mechanical Engineering Department, University of Coimbra, Coimbra, Portugal 2 LED&Mat Instituto Pedro Nunes Quinta da Nora, Coimbra, Portugal 3 SEG- CEMUC Mechanical Engineering Department University of Coimbra, Coimbra, Portugal Magnetron sputtering of reactive sintered TiAlSi composite Hyesook joo 1, Youlgwun Ji 2, Chi sun Lee 3, Jinkyu Lee 4, Min Seok Song 5, Young Hwan Kim 6, Hanshin Choi 7, Seung Koo Kang 8 1,2,3,4,7 Korea Institute of Industrial Technology, Incheon, Korea, South 5,6,8 Shinhan Diamond Industrial Co. Ltd. R & BD CENTER, Incheon, Korea, South Effect of the target chemical composition on the structure of sputtered Ag-Cu-O films Carine PETITJEAN 1, David HORWAT 2, Jean-François PIERSON 3 1,2,3 LSGS- Ecole des Mines, Nancy, France PO1084 PO1085 PO1087 RF magnetron sputtering of tin in Ar/n-hexane working gas mixture Jindrich Matousek 1, Jaroslav Pavlik 2, Zdenek Stryhal 3, Tomas Vagner 4, Vladimir Stary 5, Danka Slavinska 6, Hynek Biederman 7 1,2,3,4 University of J.E.Purkinje, Usti nad Labem, Czech Republic 5 Czech Technical University, Prague, Czech Republic 6,7 Department of Macromolecular Physics Faculty of Mathematics and Physics Charles University, Prague, Czech Rep Multifunctional Nanocomposite Carbide Thin Films for Electrical and Mechanical Contacts Jonas Lauridsen 1, Torbjörn Joelsson 2, Henrik Ljungcrantz 3, Åke Öberg 4, Hans Högberg 5, Lars Hultman 6 1,5,6 Thin Film Physics Division, Linköping, Sweden 2,3 Impact Coatings AB, Linköping, Sweden 4 ABB Corporate Research, Västerås, Sweden Nanostructures and mechanical/optical properties: a new approach for transparent intelligent PECVD coatings Alessandro Patelli 1, Stefano Costacurta 2, Simone Vezzu' 3, Paolo Falcaro 4 1,2,3,4 CIVEN, Marghera Venezia, Italy PO1088 Nanostructured composite films of Ni-Al-Co type prepared by thermionic vacuum arc deposition Ana Mihaela Lungu 1, Cristian Petrica Lungu 2, Ion Mustata 3, Radu Piticescu 4, Roxana Piticescu 5, Victor Ciupina 6, Gabriel Prodan 7 1,2,3 NILPRP, Bucharest, Romania 4,5 IMNR, Bucharest, Romania 6,7 Ovidius University, Constanta, Romania PSE

80 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1089 PO1090 PO1091 PO1092 PO1093 Study of Fe-Co Nanocomposite Films by Mössbauer Spectroscopy Adriana Lancok 1, Frantisek Fendrych 2, Jaroslav Kohout 3, Jan Lancok 4 1 Institute of Inorganic Chemistry, Husinec-Rez, Czech Republic 2,4 Institute of physics AS CR, Prague, Czech Republic 3 Charles University, Prague, Czech Republic Plasma Deposited Nanocomposites of Metallic Nanoparticles Embedded in Plasma Polymer Films Marcus Wolf 1, Ralph Schmittgens 2, Eberhard Schultheiss 3 1,2 Institut für Festkörperelektronik/TU Dresden, Dresden, Germany 3 Fraunhofer FEP Dresden, Dresden, Germany Nanocomposite Protective Coatings Based on Ti-N-Cr/Ni-Cr-Si-B- Mo, their Structure Alexander Pogrebnjak Sumy Institute for Surface Modification, Sumy, Ukraine PHYSICO-MECHANICAL and PHYSICO-CHEMICAL Ti-Al-N/Ni-Cr-Mo- B-Si CHARACTERISTICS in NANOCOMPOSITE COMBINATION COATINGS Alexander Pogrebnjak Sumy Institute for Surface Modification, Sumy, Ukraine Industrialisation study of nanocomposite coatings for electrical contact applications Erik Lewin 1, Torbjörn Joelsseon 2, Benny André 3, Henrik Ljungcrantz 4, Ulf Jansson 5 1,3,5 Uppsala university, Uppsala, Sweden 2,4 Impact Coatings AB, Linköping, Sweden PO1094 Tribological performance of CrAlSiN coatings at high temperatures Tomas Polcar 1, Tomas Vitu 2, Tomas Kubart 3, Jozef Sondor 4, Albano Cavaleiro 5 1,2 Czech Technical University, Prague, Czech Republic 3 Uppsala university, Uppsala, Sweden 4 Liss Company, Roznov pod Radhostem, Czech Republic 5 SEG-CEMUC - Department of Mechanical Engineering University of Coimbra, Coimbra, Portugal Poster - Nanoparticles PO1095 Size Dependence Surface Activity of Metallic Nano-Particles Maziar Sahba Yaghmaee 1, Babak Shokri 2, M. Reza Rahimipour 3 1,2 Shahid Beheshti University, Tehran, Iran 3 Materials and Energy Research Center, Tehran, Iran PO1096 Raman Spectroscopy of Plasma Functionalized Carbon Nanotubes Verena Katzenmaier 1, Nicolas Peer Zschoerper 2, Bjoern P. Moller 3, Michael Haupt 4, Uwe Vohrer 5, Christian Oehr 6 1,2,3,4,5,6 Fraunhofer IGB, Stuttgart, Germany 78 PSE 2008

81 Monday, September 15, 2008 Poster Session, 15:15-16:25 PO1097 PO1098 PO1099 PO1100 PO1101 PO1102 PO1103 Optimization of an atmospheric pressure plasma copolymerization process for nanopowder functionalization. Hubert Hody 1, Patrick Choquet 2, Henri-Noël Migeon 3, Jean-Jacques Pireaux 4 1 Centre de Recherche Public Gabriel Lippmann - Département Science et Analyse des Matériaux, Belvaux, 2,3 Centre de Recherche Public Gabriel Lippmann - Département Science et Analyse des Matériaux, Belvaux, Luxembourg 4 University of Namur - La Synthesis of radioactive carbon nanocomposite by DC magnetron sputtering and gas aggregation techniques. Virginie Bouchat 1, Olivier Féron 2, Bernard Gallez 3, Bernard Masereel 4, Carine Michiels 5, Thierry Vander Borght 6, Stéphane Lucas 7 1 Laboratoire d Analyses par Réactions Nucléaires (LARN), Centre de Recherche en Physique de la Matièr 2 Unité de Pharmacothérapie (FATH) - Université catholique de Louvain (UCL), Brussels, Belgium 3 Laboratoire de résonance magnétique biomédicale ( Study of the effects of hydrogen plasma pre-treatment on the growth of carbon nanotubes by MPACVD. Badreddine ASSOUAR 1, Sandra Rizk 2, Badreddine Assouar 3, Mohammed Belmahi 4, Jamal Bougdira 5 1 LPMIA, CNRS, Nancy University, Vandoeuvre cedex, France 2,3,4,5 LPMIA CNRS Nancy University, Vandoeuvre les Nancy, France PVD synthesis and transfer into water-based solutions of functionalized gold nanoparticles Nicolas Moreau 1, Olivier Feron 2, Bernard Gallez 3, Bernard Masereel 4, Carine Michiels 5, Thierry Vander Borght 6, Stéphane Lucas 7 1 Laboratoire d'analyses par Réactions Nucléaires - Centre de recherches en Physique de la Matière et 2 Unité de Pharmacothérapie (FATH) - Université Catholique de Louvain (UCL), Brussels, Belgium 3 Laboratoire de Résonance Magnétique Biomédicale (C Mechanical Properties of Carbon Nanotube Composite Zuzana Kucerova 1, Lenka Zajickova 2, Vilma Bursikova 3, Ondrej Jasek 4, Marek Elias 5, Petr Synek 6 1 Faculty of Science, Masaryk University, Brno, Czech Republic 2,3,5,6 Faculty of Science Masaryk University, Brno, Czech Republic 4 Faculty of Science Masaryk University, Brno, Czech Republic Effect of cold forming on low temperature plasma nitriding and carburizing characteristics of austenitic stainless steel Motoo Egawa 1, Yasushi Matsuda 2, Nobuhiro Ueda 3, Takumi Sone 4, Masato Tsujikawa 5, Kazuhiro Nakata 6 1 Technology Research Institute of Osaka Prefecture, Izumi-shi, Osaka, Japan 2 Sumitomo metal technology inc., Amagasaki-shi Hyogo, Japan 3,4 Technology Research Institute of Osaka Prefecture, Izumi-shi Osaka, Japan 5 Osaka Prefecture Universi Deposition of TiO2-based layer on textile substrate experimental and theoretical study Lenka Volfová 1, Petr Bartoš 2, Petr Špatenka 3 1 Technical university of Liberec-department of Material science, Liberec, Czech Republic 2,3 University of South Bohemia-Department of Physics, České Budějovice, Czech Republic PSE

82 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 Poster - Film properties PO2001 Online analysing of layers by X-ray fluorescence Joachim Piltz amtec GmbH, Leipzig, Germany PO2002 PO2003 PO2004 Thickness control of coatings by means of Modulated IR radiometry F. Macedo 1, F. Vaz 2, P. Carvalho 3, J. Nzodoum Fotsing 4, J. Gibkes 5, J. Pelzl 6, B. Bein 7 1 Phys. Dep. University of Minho, Braga, Portugal 2,3 Phys. Dep. University of Minho, Guimarães, Portugal 4,5,6,7 Exp. Phys.III Solid State Spectroscopy Ruhr- University Bochum, D Boc Spatial distribution of defect density during sputter deposition of PVD hard coatings Peter Panjan 1, Darja Kek Merl 2, Matjaž Panjan 3, Miha Čekada 4, Lidija Čurković 5, Rainer Cremer 6 1,2,3,4 Jozef Stefan Institute, Ljubljana, Slovenia 5 University of Zagreb Faculty of Mechanical Engineering and Naval Architecture, Zagreb, Croatia, Republic of 6 CemeCon, Wurselen, Germany Study of mechanical properties of plasma polymer films Rutul Trivedi 1, V Cech 2 1,2 Brno University of Technology, Brno, Czech Republic PO2005 PO2006 PO2007 PO2008 Mechanical properties and structure of amorphous and crystalline B4C films Petr Bohac 1, Valeriy Kulikovsky 2, Vladimir Vorlicek 3, Radim Ctvrtlik 4, Martin Stranyanek 5, Alexander Deyneka 6, Lubomir Jastrabik 7 1 Institute of Physics AS CR, v.v.i., Prague 8, Czech Republic 2 Institute for Problems of Materials Science Academy of Sciences of Ukraine, Kiev, Ukraine 3,4,5,6 Institute of Physics AS CR v.v.i., Prague 8, Czech Repub Indentation Loading Behaviour and Simulation of Nanocrystalline Diamond-Composite Films Georg Dinger 1, Srikanth Vadali 2, Hisham Abu Samra 3, Christoph Friedrich 4, Xin Jiang 5, Holger Hoche 6, Stefan Gross 7 1,4 University of Siegen Department of Engineering Design MVP, Siegen, Germany 2,3,5 University of Siegen Department of Materials Science LOT, Siegen, Germany 6,7 TU Darmstadt State Materials Testing Institute MPA, Darmstadt, Germany Investigation of Wear Resistance and Microstructure of W18Cr4V Steel implanted by boron and/or nitrogen ion Kebing Zhou 1, Zhi-hai Cai 2, Ping Zhang 3, Jun-jun Zhao 4 1,2,4 Academy of Armored Forces Engineering, beijing, China 3 National Key Laboratory for Remanufacturing, beijing, China Testing of Tensile and Adhesive Strength by Centrifuge Technology Uwe Beck 1, Georg Reiners 2, Dietmar Lerche 3, Uwe Rietz 4 1,2 BAM, Berlin, Germany 3 LUM GmbH, Berlin, Germany 4 LUM and BAM, Berlin, Germany 80 PSE 2008

83 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2009 PO2010 PO2011 PO2012 PO2013 The Oliver and Pharr method for coated materials Lars Geidel 1, Heinz Kleinbach 2, Norbert Schwarzer 3 1 Saxonian Institute of Surface Mechanics, Eilenburg, Germany 2 HELMUT FISCHER GMBH+CO.KG Institut für Elektronik und Messtechnik, Sindelfingen, Germany 3 Saxonian Institute of Surface Mechanics, Ummanz / Ruegen, Germany A physical scratch test analysis for coated materials Nick Bierwisch 1, Ben Beake 2, Thomas Wagner 3, Vladimir Vishnyakov 4, Norbert Schwarzer 5 1, Leipzig, Germany 2 Micro Materials Ltd, Wrexham, United Kingdom 3 LOT-Oriel GmbH & Co. KG, Darmstadt, Germany 4 Manchester Metropolitan University, Manchester, United Kingdom 5 Saxonian Institute of Surface Mechanics, Ummanz, Germany Comparative FEM analysis for ball-coating contact in the tribological pin-on-disc test Martina Fricova 1, Tomas Vitu 2, Tomas Polcar 3, Josef Jurenka 4 1 Department of Mechanics, Biomechanics and Mechatronics, FME, CTU in Prague, Prague, Czech Republic 2 Department of Applied Mathematics Faculty of Transportation Sciences Czech Technical University in, Prague, Czech Republic 3 Department of Control EFFECT OF PVD-FILM MICRO-BLASTING ON THE CUTTING PERFORMANCE OF COATED TOOLS IN MILLING Konstantinos-Dionysios Bouzakis 1, Stefanos Gerardis 2, Georgios Katirtzoglou 3, Stelios Makrimallakis 4, Georgios Skordaris 5, Maria Pappa 6, Nikolaos Michailidis 7, Fritz Klocke 8, Emmanouil Bouzakis 9 1,2,3,4,5,6,7 Aristoteles University of Thessaloniki, Thessaloniki, Greece 8,9 RWTH Aachen, Aachen, Germany Fatigue behavior of diamond coated cobalt-cemented tungsten carbide subjected to repeated mechanical loading Shoji Kamiya 1, Hitoshi Sekino 2, Hiroyuki Hanyu 3, Joana Madaleno 4, Jose Gracio 5 1,2 Nagoya Institute of Technology, Nagoya, Japan 3 OSG corporation, Toyokawa, Japan 4,5 University of Aveiro, Aveiro, Japan PO2014 PO2015 Fabrication and characterization of multilayered thermal barrier coatings Sebastian Winkler 1, Stefan Braun 2, Peter Gawlitza 3, Dirk C. Meyer 4 1 IWS Dresden, Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden, Germany 2,3 IWS Dresden, Dresden, Germany 4 TU Dresden Institut für Strukturphysik, Dresden, Germany Compressive stress generation in titanium nitride films Raymond Machunze 1, G.C.A.M. Janssen 2 1,2 Delft University of Technology, Delft, Netherlands PO2016 Measurement and control of internal stress of magnetron sputtered tungsten coatings and correlation to hardness Peter Worbs 1, Freimut Koch 2, Aurelia Herrmann 3, Jeong-Ha You 4, Rainer Piechoczek 5 1,2,3,4,5 Max-Planck-Institut für Plasmaphysik, Garching bei München, Germany PSE

84 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2017 PO2018 PO2019 PO2021 Thermal stability and influence of the thickness on the internal stresses of Cr and Ti- based nitride coatings obtained by magnetron sputtering Corinne Nouveau 1, Lounis Chekour 2, Yacine Benlatreche 3, Nasreddine Tamacha 4, A Khelil 5 1,3 Arts et Métiers ParisTech, Cluny, France 2 University Mentouri, Constantine, Algeria 4,5 University of Oran, Oran, Algeria An Analysis of Residual Stresses in Thermal Barrier Coatings: A FE Performance Assessment Imdat Taymaz 1, Kemal Cakir 2 1 Sakarya University, Engineering Faculty, Adapazari, Turkey 2 Sakarya University, Engineering Faculty, Turkey Structural Properties of AlN Films Deposited by Magnetron Sputtering and Correlation with surface and strain energy bassam abdallah 1, Nouari Rouarg 2, M-abdou djouadi 3, P-Yves jouan 4 1 LPCM, Nanates, France 2 Laboratoire Optoélectroniques et composants Département de physique UFAS Sétif Alegria, sétif, Algeria 3,4 Institut des Matériaux Jean Rouxel IMN- LPCM, Nantes, France Preparation of transparent repellent films on plastic plate by low temperature RF plasma using C2H2H2 gas Yasunori Ohtsu 1, Norikazu Wada 2, Tatsuya Misawa 3, Hiroharu Fujita 4 1,2,3,4 Saga University, Saga, Japan PO2022 Deposition of hydrophobic fluorocarbon coating via Plasma polymerization of 1H,1H,2H,2H-perfluorodecylacrylate on thermanox surfaces: Effect of plasma process conditions on properties of the coatings. Farzaneh Arefi-Khonsari 1, Virendra Kumar 2 1 ENSCP-UPMC, Paris Cedex 0 5, France 2 ENSCP-UPMC, Paris, France Poster - Photovoltaics coatings PO2023 Deposition and characterization of carbon based nanostructured thin films as possible solar absorbers Mariana Braic 1, Viorel Braic 2, Mihai Balaceanu 3, Rodica Vladoiu 4, Catalin- Nicolae Zoita 5 1,2,3,5 National Institute for Optoelectronics, Magurele-Bucharest, Romania 4 "Ovidius" University Departement of Physics, Constanta, Romania PO2024 Fabrication of ZnTe-based thin film solar cells with improved performance Sara Panahian Jand 1, Rasul Ajeian 2, Moosa Nakhai 3 1,2,3 Iran University of Science and Technology, Tehran, Iran PO2025 Effect of various dilution gas on the properties of microcrystalline silicon thin film for internal linear type-icp PE-CVD deposited at room temperature Hyoung-Cheol Lee 1, Tae-Hong Min 2, Geun-Young Yeom 3 1,2,3 Sungkyunkwan University, Suwon, Korea, South 82 PSE 2008

85 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2026 PLASMA CHEMICAL ETCHING FOR IN-LINE C-SI SOLAR CELL PROCESSING AT ATMOSPHERIC PRESSURE Birte Dresler 1, Dorit Linaschke 2, Harald Beese 3, Gerrit Mäder 4, Ines Dani 5, Volkmar Hopfe 6, Mathias Kirschmann 7, Hubert-Joachim Frenck 8 1,2,3,4,5,6 Fraunhofer IWS, Dresden, Germany 7,8 Q-Cells AG, Bitterfeld-Wolfen, Germany PO2027 PO2028 PO2029 ATMOSPHERIC PRESSURE MICROWAVE PECVD OF SILICON NITRIDE LAYERS FOR PASSIVATION OF SOLAR WAFERS Birte Dresler 1, Julius Roch 2, Ines Dani 3, Volkmar Hopfe 4, Beate Leupolt 5, Ales Poruba 6, Radim Barinka 7, Mathias Kirschmann 8, Hubert-Joachim Frenck 9 1,2,3,4,5 Fraunhofer IWS, Dresden, Germany 6,7 SOLARTEC s.r.o., Roznov pod Radhostem, Czech Republic 8,9 Q-Cells AG, Bitterfeld-Wolfen, Germany Relations between Anode Structure Composed of Plasma Treated TiO2 Particles and Light-to-Electric Energy Conversion Efficiency in Dye-Sensitized Solar Cell Kenji Yamada 1, Hirokazu Yamane 2, Shigenori Matsushima 3, Hiroyuki Nakamura 4, Tatsuhiko Sonoda 5, Kenji Takehara 6, Kensuke Matuki 7 1 Department of Materials Science and Chemical Engineering, Kitakyushu National College of Technology, 2,3,5 Kitakyushu National College of Technology, Kitakyushu, Japan 4,6,7 Kitakyushu National College of Technology, Kitakyushu, J Leading edge arc management capability for advanced processes drives the solar effort Uwe Krause 1, Mark Lutz 2, Rob Hall 3 1,2,3 Advanced Energy Industries, Filderstadt, Germany Poster - Optical coatings PO2030 MULTILAYER INTERFERENCE FILTERS PREPARED BY MAGNETRON SPUTTERING FOR HIGH TEMPERATURE APPLICATIONS ON LAMPS Arnd Ritz Philips Forschungslaboratorien Aachen, Aachen, Germany PO2031 Toward electroluminescent devices based on CaTiO3:Pr3+ deposited by radiofrequency reactive magnetron sputtering Angelique Bousquet 1, Ludovic Sarakha 2, Philippe Boutinaud 3, Rachid Mahiou 4 1,2,3,4 Laboratoire des Matériaux Inorganiques, Aubière, France PO2032 REACTIVE DC SPUTTERING OF TiOxNy BY MODULATION OF THE DISCHARGE CURRENT Frederic Lapostolle 1, Pascal Briois 2, Joao Oliveira 3, Albano Cavaleiro 4, Alain Billard 5 1,2,5 LERMPS, Belfort, France 3,4 Universidade de Coimbra, Coimbra, Portugal PSE

86 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2033 PO2034 PO2035 PO2036 PO2037 Influence of material properties and morphology of plasma enhanced chemical vapor deposited titanium oxide films on their optical behavior in the ultraviolet range Axel Sonnenfeld 1, Philipp Rudolf von Rohr 2 1 ETH Zurich, Institute of Process Engineering, Zurich, Switzerland 2 ETH Zurich Institute of Process Engineering, Zurich, Switzerland Comparability and Differentiation in Testing Hard and Decorative PCVD and PVD Coatings on PC Plastic Parts Klaus-Dieter Nauenburg 1, Ralf Dreher 2, Jiri Cerman 3, Petr Spatenka 4, Lukas Alberts 5, Mathias Kaiser 6 1,2,5,6 Fraunhofer ICT, Pfinztal, Germany 3,4 Technical University of Liberec, Liberec, Czech Republic Effect of nitrogen partial pressure on the optical properties of sputtered amorphous silicon nitride films a:sin Abdellah ATTAF 1, Mohamed Salah Aida 2, Hanane Saidi 3, Nadia Lehraki 4, Malika Nouadji 5, Mohamed Lotfi Benkhedir 6 1,3,4,5 Université de Biskra, Biskra, Algeria 2 Université de Constantine, Constantine, Algeria 6 Université de Tebessa, Tebessa, Algeria Fabrication of tunable band pass filters for CWDM applications Stefan Meister TU Berlin, Berlin, Germany Inner Coating of EUV Collector Shells Sebastian Lipfert 1, Stefan Braun 2, Peter Gawlitza 3, Jürgen Schmidt 4, Andreas Leson 5 1,2,3,4,5 Fraunhofer IWS, Dresden, Germany PO2038 SYNTHESIS AND CHARACTERIZATION OF PEROVSKITE TYPE OXIDES OBTAINED BY REACTIVE MAGNETRON CO-SPUTTERING Mohammad Arab Pour Yazdi 1, Pascal Briois 2, Alain Billard 3 1,2,3 LERMPS-UTBM, Belfort, France PO2039 PO2040 A comparative study on the photocatalytic and gas sensing properties of pure and N-doped TiO2 thin films Annekatrin Delan 1, Alagarsamy Karuppasamy 2, Eberhard Schultheiß 3 1,2 Institut für Festkörperelektronik / Technische Universität Dresden, Dresden, Germany 3 Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik, Dresden, Germany Surface Modification of the TiO2 thin Films by Metal Nanoparticles Marta Horakova 1, Nicholas Martin 2, Eric Aubry 3, Petr Spatenka 4, Ales Kolouch 5, Pavlina Hajkova 6 1,5,6 Technical University in Liberec, Liberec 1, Czech Republic 2,3 Institut FEMTO-ST Departement MN 2 S UFC CNRS ENSMM UTBM, Besancon, France 4 University of South Bohemia Department of Physics, Ceske Budejovice, Czech Republic 84 PSE 2008

87 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2041 PO2042 Low Temperature Deposition of ITO Thin Film by Facing Targets Sputtering Youn J. Kim 1, Doo H. Song 2, Min J. Keum 3, Jeon G. Han 4 1 Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Korea, South 2,3,4 Ceter for Advanced Plasma Surface Technology/Sungkyunkwan Univ., Suwon, Korea, South Characterization of titanium dioxide thin films produced by plasma deposition Espedito Vassallo 1, Anna Cremona 2, Laura Laguardia 3, Daria Ricci 4 1,2,3,4 CNR, Milano, Italy PO2043 FORMATION OF PHOTOCATALYTICALLY ACTIVE TiO2 THIN FILMS BY MePIII&D Darina Manova 1, K. Nonnenmacher 2, G. Altin 3, J.W. Gerlach 4, W. Assmann 5, S. Mändl 6 1,2,3,4,6 IOM Leipzig, Leipzig, Germany 5 LMU, München, Germany PO2044 PO2045 PO2046 The influence of surface treatment on photocatalytic activity of PECVD TiO2 thin films Pavlína Hájková 1, Petr Špatenka 2, Petr Exnar 3, Jörg Krumeich 4, Aleš Kolouch 5, Irena Horská 6, Marta Horáková 7 1,5,7 Technical University of Liberec - Department of material science, Liberec, Czech Republic 2 University of South Bohemia - Department of Physics, České Budějovice, Czech Republic 3,6 Technical University of Liberec - Department of C Low temperature multi hollow cathode plasma jet system for nanocoatings of photoactive TiOx, TiOx:N thin layers Stepan Kment 1, Petr Kluson 2, Zdenek Hubicka 3, Martin Cada 4, Petr Virostko 5, Jiri Olejnicek 6, Olexandr Churpita 7 1,3,4,5,6,7 Institute of Physics of the ASCR, Prague, Czech Republic 2 Institute of Chemical Technology - ICT Prague, Prague, Czech Republic Influence of ion bombardment and annealing on the structural and optical properties of TiOx thin films deposited in an inductively coupled TTIP/O2 plasma Agnes Granier 1, Thomas Begou 2, Akram Soussou 3, Thomas Schneider 4, Marie-Paule Besland 5, Etienne Gaviot 6, Bruno Beche 7, Antoine Goullet 8 1,2,3,4,5,8 IMN, NANTES, France 6 LAUM, Le mans, France 7 IPR, RENNES, France PO2047 Comparison of different ceramic Al-doped ZnO target materials Volker Sittinger 1, Bernd Szyszka 2, Wolfgang Werner 3, Florian Ruske 4 1,2,3 Fraunhofer IST, Braunschweig, Germany 4 Hahn Meitner Institute, Berlin, Germany PO2048 Ion assisted magnetron sputtering of photocatalytic TiO2 on plastic substrates Oliver Werner 1, Frank Neumann 2, Michael Vergöhl 3 1,2,3 Fraunhofer IST, Braunschweig, Germany PSE

88 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2049 PO2050 Dielectric multilayer films fabricated by magnetron sputtering: how far can the iridescence be tuned? Olivier Deparis 1, Marie Rassart 2, Cédric Vandenbem 3, Victoria Welch 4, Jean Pol Vigneron 5, Laurent Dreesen 6, Stéphane Lucas 7 1,2,3,4,5 Laboratoire de Physique du Solide (Facultés Universitaires Notre-Dame de la Paix), Namur, Belgium 6,7 Laboratoire d Analyses par Réactions Nucléaires (Facultés Universitaires Notre-Dame de la Paix), Namur, Belgium Characterization of Mg-Al oxides grown by reactive magnetron sputtering Marta Saraiva 1, Stijn Mahieu 2, Wouter Leroy 3, Rosita Persoons 4, Diederik Depla 5 1,2,3,5 Ghent University, Gent, Belgium 4 VITO - Materials Technology, Mol, Belgium PO2051 Plasma modified plastic optical fiber for the selective detection of gases Sabrina Grassini 1, Emma Angelini 2, Domenico Mombello 3, Marco Parvis 4, Alessandra Neri 5 1,2,3,4,5 Politecnico di Torino, torino, Italy PO2052 PO2053 Study on the thermal stability of Ti(C,O,N) decorative coatings C. Moura 1, L Cunha 2, J.M. Chappé 3, F. Vaz 4 1 Physics Department - University of Minho, Braga, Portugal 2 Physics Department- University of Minho, Braga, Portugal 3,4 Physics Department-University of Minho, Guimarães, Portugal Si-C-N thin films produced by magnetron sputtering: a structural and optical characterization C. Moura 1, L. Cunha 2 1,2 Physics Department - University of Minho, Braga, Portugal PO2054 PO2055 The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films F. Macedo 1, P. Carvalho 2, F. Vaz 3, J. Gibkes 4, B. Bein 5, J. Pelzl 6 1 Phys. Dep. University of Minho, Braga, Portugal 2,3 Physics Department University of Minho, Guimarães, Portugal 4,5,6 Exp.Phys.III Solid State Spectroscopy Ruhr-University Bochum, D Bochum, Germany Study of double plasmon resonance behavior of Silver nanoparticles deposited using dc planar magnetron M.Ranjan, T.W.H.Oates, S.Facsko, W.Möller Forschungszentrum Dresden-Rossendorf, Dresden, Germany Poster - Films for special electrical, magnetic functions PO2056 Sputter Deposition of Strain Gages on Technical Surfaces Holger Gerdes 1, Ralf Bandorf 2, Ulrike Heckmann 3, Volker Schmidt 4, Ulrich Kricheldorf 5 1,2,3,4,5 Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany 86 PSE 2008

89 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2057 La2Mo2-xWxO9 sputtered deposit under reactive atmosphere Pascal BRIOIS 1, Alain Billard 2 1,2 LERMPS-UTBM, Belfort, France PO2058 PO2059 PO2060 Organic Light-Emitting Diodes with BaO as an Electron-injecting Layer and Built-in Potential Analyses in These Devices Jong Tae Lim 1, June Hee Lee 2, Yang Su Kim 3, Geun Young Yeom 4 1 Sungkyunkwan university, Suwon, Korea, South 2 Sungkyunkwan University, Suwon, Korea, South 3,4 Sungkyunkwan University, Suwon, United States Characteristics of Optical Emission Spectroscopy of Plasma Induced by Laser Beams and Crystallization Behavior of PBZNZT Thin Films Hsiu-Fung Cheng 1, Yu-Wen Chen 2, I-Nan Lin 3 1 Department of Physics, National Taiwan Normal University, Taipei, Taiwan 2 Department of Physics National Taiwan Normal University, Taipei, Taiwan 3 Department of Physics Tamkang University, Tamsui, Taiwan Research for achieving free carrying structures with surface micromachining Andra Mihaela Stoica 1, Andrei Predescu 2 1,2 University Politehnica, Bucharest, Romania PO2061 PO2062 PO2063 PO2064 Characteristics of low-k plasma-polymer on nanostructured conductive carbon Yong Seob Park 1, Sang-Jin Cho 2, Jin-Hyo Boo 3, Byungyou Hong 4 1 Sungkyunkwan University, Suwon, Korea, South 2,3 Center for Advanced Plasma Surface Technology Sungkyunkwan University, Suwon, Korea, South 4 School of information and communication Engineering Sungkyunkwan University, Suwon, Korea, South Polythiophene-like thin films preparation and basic properties Oleksandr Polonskyi 1, Jindrich Matousek 2, Martin Drabik 3, Jan Hanus 4, Danka Slavinska 5, Hynek Biederman 6, Doug Pleticha 7, Luke Hanley 8 1,2,3,4,5,6 Charles University, Prague, Czech Republic 7,8 University of Illinois at Chicago, Chicago, United States Structure and electrical properties of Apatite-like Lanthanum silicate electrolytes obtained by oxidation of La-Si sputtered thin films Milena Vieira 1, Joao Oliveira 2, Aliaksandr Shaula 3, Albano Cavaleiro 4 1 School of Technology and Management of the Polytechnic Institute of Leiria, Leiria, Portugal 2,3,4 SEG-CEMUC Department of Mechanical Engineering University of Coimbra, Coimbra, Portugal Low damage etching of Ge2Sb2Te5 by halogen-based neutral beam Se-Koo Kang 1, Gwang Ho Gweon 2, Jong Sik Oh 3, Byung Jae Park 4, Sung Woo Kim 5, Jong Hyeuk Lim 6, Geun-Young Yeom 7 1 SKKU Advanced Institue of Nano Technology (SAINT), Suwon, Korea, South 2,3,4,5,6,7 Sungkyunkwan University, Suwon, Korea, South PSE

90 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2065 Effect on the chromium concentration on the structure and the properties of reactively sputtered lanthanum strontium chromite thin films. Jean-François PIERSON 1, David HORWAT 2, Silvère BARRAT 3, Jean- François PIERSON 4 1,2,3,4 LSGS - Ecole des Mines, NANCY, France PO2066 PO2067 PO2068 PO2069 PO2070 PO2071 Magnetic-field induced strains in Ni2MnGa SMAs Florent Bernard 1, Christophe Rousselot 2, Patrick Delobelle 3, Laurent Hirsinger 4 1,2 Institut FEMTO-ST / Dpt. MN 2 S, Montbeliard, France 3,4 Institut FEMTO-ST / Dpt. MN 2 S, Besançon, France Sputtered thin films of powders finemet alloys for soft magnetic applications RABAH HAMZAOUI FEMTO-ST LPMO CNRS, Besançon cedx, France NANOSTRUCTURED ALLOYED LAYERS WITH MAGNETIC PROPERTIES OBTAINED BY THE IMPULSE PLASMA DEPOSITION Katarzyna Nowakowska-Langier 1, Krzysztof Zdunek 2 1 Faculty of Materials Science and Engineering, Warsaw University of Technology, Warsaw, Poland 2 Faculty of Materials Science and Engineering Warsaw University of Technology, Warsaw, Poland Influence of substrate biasing on the structural and electrical properties of sputtered zirconia thin films Farida REBIB 1, Angélique Bousquet 2, Eric Tomasella 3, Victor Micheli 4, Nadhira Laidani 5 1 PROMES-CNRS, perpignan, France 2,3 Laboratoire des Matériaux Inorganiques, Clermont Ferrand, France 4,5 Fondazione Bruno Kessler, Trento, Italy Field emission enhancement in nitrogen ion implanted ultrananocrystalline diamond films I-Nan Lin Department of Physics, Tamkang U., Taipei, Taiwan Magnetorezisitive properties of magnesium fluoride cobalt films prepared by thermionic vacuum arc Cristian LUNGU 1, Ion Mustata 2, Oana Pompilian 3, Marius Badulescu 4, Cornel Porosnicu 5, Alexandru Anghel 6, Ana Mihaela Lungu 7, Victor Kuncser 8, Gabriel Schinteie 9, Doina Predoi 10 1,2,3,4,5,6,7 NILPRP, Bucharest, Romania 8,9,10 NIMP, Bucharest, Romania PO2072 ELECTRIC CHARACTERIZATION AND SELECTIVE ETCHING OF ALUMINUM OXIDE Piotr Firek 1, Jan Szmidt 2, Katarzyna Nowakowska-Langier 3, Krzysztof Zdunek 4 1,2 Institute of Microelectronics and Optoelectronics Warsaw University of Technology, Warsaw, Poland 3,4 Faculty of Materials Science and Engineering Warsaw University of Technology, Warsaw, Poland 88 PSE 2008

91 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2073 Thermal stability of TaN-based thin layers for Cu metallization Julien Nazon 1, Marie-Hélène Berger 2, Joël Sarradin 3, Jean-Claude Tedenac 4, Nicole Fréty 5 1 Institut Charles Gerhardt- Université Montpellier 2, Montpellier, France 2 Centre des Matériaux P.M. Fourt - Ecole Nationale Supérieure des Mines de Paris, Evry, France 3,4,5 Institut Charles Gerhardt - Université Montpellier 2, Montpe Poster - Films for biomedical applications PO2074 Mechanisms of plasma sterilisation for food packaging application Andreas Schulz 1, Joachim Schneider 2, Matthias Walker 3, Ulrich Stroth 4 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,3,4 Institut für Plasmaforschung der Universität Stuttgart, Stuttgart, Germany PO2075 Inactivation of bacillus subtilis by atmospheric RF plasma for security and relief in life Yasunori Ohtsu 1, Tatsuya Misawa 2, Hiroharu Fujita 3 1,2,3 Saga University, Saga, Japan PO2076 PO2077 PO2078 PO2079 The research of cold plasma as an effective tool for wound disinfection and treatment Aleksandr Galov PetrSU, Petrozavodsk, Russian Federation Sterilization mechanism of Penicillium digitatum Using Nonequilibrium Atmospheric Pressure Plasma Takayuki Ohta 1, Sachiko Iseki 2, Keiji Yamamoto 3, Masafumi Ito 4, Hiroyuki Kano 5, Yasuhiro Higashijima 6, Masaru Hori 7 1,2,3,4 Wakayama university, Wakayama, Japan 5 NU EcoEngineering CO. LTD., Nagoya, Japan 6 NU system CO. LTD., Nagoya, Japan 7 Nagoya university, Nagoya, Japan Surface coating with nanoparticles for biomedical applications with aid of atmospheric plasmas Ronny Brandenburg 1, Manfred Stieber 2, Jörg Ehlbeck 3, Wolf-Dieter Jülich 4, Klaus-Dieter Weltmann 5, Gerold Lukowski 6 1,2,3,5 INP Greifswald e.v., Greifswald, Germany 4,6 IMAB Greifswald e.v. (Institute for Marine Biotechnology), Greifswald, Germany Sterilization of Escherichia coli colonies by means of Ar+NO microwave plasmas José L. Hueso 1, Victor J. Rico 2, José E. Frías 3, José Cotrino 4, Agustín R. González-Elipe 5 1 Instituto de Ciencia de Materiales de Sevilla (ICMS-CSIC) y Dpto. Química Inorgánica de la Universid 2 Instituto de Ciencia de Materiales de Sevilla (ICMS-CSIC), Seville, Spain 3 Instituto de Bioquímica Vegetal y Fotosíntesis (IBVF-CSIC), Seville, PO2080 Cleaning of textiles by dielectric barrier discharges Siegfried Müller 1, Rolf - Jürgen Zahn 2, Kirsten Anklam 3, Torsten Koburger 4 1,2,3 INP, Greifswald, Germany 4 Hygiene Nord GmbH, Greifswald, Germany PSE

92 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2081 PO2082 PO2083 PO2084 Plasma Polymer Coatings as Interlayer Platforms for Covalent Immobilisation of Small Oligopeptides Marek Jasieniak 1, Hans Griesser 2 1 Ian Wark Research Institute, University of South Australia, Adelaide, Australia 2 Ian Wark Research Institute University of South Australia, Adelaide, Australia Vacuum-Ultraviolet (VUV) Photo-polymerisation of Amine-rich Biomaterials Florina Truica-Marasescu 1, Juan-carlos Ruiz Bucio 2, Michael R. Wertheimer 3 1 Ecole Polytechnique, Montreal, Quebec, Canada 2,3 Ecole Polytechnique, Montreal, Canada Temperature forced deposition of poly(ethylene glycol) like films in RF plasma and chemical structure model Jürgen Meichsner 1, Jan Schäfer 2 1 University Greifswald, Institute of Physics, Greifswald, Germany 2 INP Greifswald, Greifswald, Germany Green and clean: DBD atmospheric plasma deposition of antibacterial coatings Sanaa Sarghini 1, Sabine Paulussen 2, Herman Terryn 3 1,2 VITO, Mol, Belgium 3 VUB, Brussels, Belgium PO2085 PO2086 Fixation of active principles on cold plasma treated vascular implants through grafting of polyacrylic acid. Maude JIMENEZ 1, F. Chai 2, N. Blanchemain 3, B. Martel 4, H.F. Hidelbrand 5, C. Jama 6, M. Traisnel 7 1 Laboratoire PERF-LSPES UMR , Villeneuve d'ascq cedex, France 2,5 Groupe de Recherche Biomatériaux (GRB), Lille, France 3,4 LCOM, Villeneuve d'ascq, France 6 PERF-LSPES, Villeneuve d'ascq, France 7 PERF-LSPES, Villeneuve d'as Quality control of metallic plasma spryed coatings for biomedical implants by abrasion wear test Friederike Deuerler 1, Henry Pusch 2, Philip Gruner 3 1,2 University of Wuppertal, Wuppertal, Germany 3 Medicoat AG, Mägenwil, Switzerland PO2087 Duplex PIII and PVD Treatment of Titanium for Biomedical Applications Stephan Mändl 1, I. Raaif 2, D. Manova 3 1,2,3 Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany PO2088 Influence of Substrate Bias and Methane Flow on the Properties of Modified Carbon-based Thin Films Deposited by Reactive Magnetron Sputtering for Bio-tribological Applications Emanuel Santos Jr 1, Diego Martínez-Martínez 2, Glória A. Soares 3, Sérgio S. Camargo Jr. 4, Marie-Paule Delplancke-Ogletree 5, Olga Kubova 6 1 Federal University of Rio de Janeiro PEMM/COPPE, Rio de Janeiro, Brazil 2,5,6 Free University of Brussels, Brussels, Belgium 3,4 Federal University of Rio de Janeiro PEMM/COPPE, Rio de Janeiro, Brazil 90 PSE 2008

93 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2089 PO2090 PO2091 PO2092 PO2093 PO2094 Wear Mechanism, Wear Rate and Contact Pressure in PIII Nitrided CoCr Alloys Johanna Lutz 1, Stephan Mändl 2 1 Universität Leipzig, Translational Centre for Regenerative Medicine (TRM Leipzig), Leipzig, Germany 2 Leibniz Institute of Surface Modification, Leipzig, Germany EFFECTS OF THE MORPHOLGY AND STRUCTURE ON THE BIOLOGICAL BEHAVIOUR OF TiON BASED COATINGS Sandra Carvalho 1, Cristina Oliveira 2, B. G. Almeida 3, R. Escobar- Galindo 4, M. Henriques 5, M. Susano 6, R. Oliveira 7 1 University of Minho - Physics Dept, Guimaraes, Portugal 2 Universidade do Minho Dept. Física, Guimaraes, Portugal 3 Universidade do Minho Dept. Física, Braga, Portugal 4 Instituto de Ciencia de Materiales de Madrid (ICMM -CSIC), Madrid, Spain DC magnetron sputtering of Ti in Ar/n-hexane mixture for biomedical uses Andrey Grinevich 1, Andrej Choukourov 2, Lubica Grausova 3, Vera Lisa 4, Lucie Bacakova 5, Danka Slavinska 6, Hynek Biederman 7 1,2,6,7 Charles University, Prague, Czech Republic 3,4,5 Institute of Physiology Academy of Sciences of the Czech Republic, Prague, Czech Republic Preparation and biological evaluation of Zr-based hard coatings for osteosynthesis purposes Mariana Braic 1, Iulian Antoniac 2, Mihai Balaceanu 3, Viorel Braic 4, Cosmin Mihai Cotrut 5, Alina Vladescu 6 1,3,4,6 National Institute for Optoelectronics, Magurele-Bucharest, Romania 2,5 Politehnica University of Bucharest, Bucharest, Romania Plasma polymerized thin functional films for biomaterials:stability and reactivity in aqueous solution Luis Duque 1, Renate Förch 2, Salvador Borros 3, Wolfgang Knoll 4 1,2,4 Max Planck Institute for Polymer Research, Mainz, Germany 3 Institut Químic de Sarrià-Universitat Ramon Llull, Barcelona, Spain On structure retention and water stability of microwave plasma polymerized films Birgit Finke 1, Karsten Schröder 2, Andreas Ohl 3 1,2,3 INP, Greifswald, Germany PO2095 Wear behavior of UHMWPE against DC-pulsed plasma nitrided (DCPPN) and duplex treated AISI 316L used in hip joint replacements Ezequiel Perez 1, Leonardo Pazos 2, Evangelina De Las Heras 3, Belen Parodi 4, Pablo Corengia 5, Iñigo Braceras 6 1 Instituto Nacional de Tecnología Industrial, San Martín, Buenos Aires, Argentina 2,3,4 Instituto Nacional de Tecnología Industrial, San Martín, Argentina 5,6 INASMET-Tecnalia, Donostia-San Sebastián, Spain PSE

94 Tuesday, September 16, 2008 Poster Session, 18:45-23:00 PO2096 PO2097 PO2098 THE EFFECT OF THE MULTILAYER COATING COMPOSITION ON BONE IMPLANT INTERFACE FORMATION IN VIVO TESTS Vladimir Luk'yanchenko 1, Anna Gudakova 2, Sergey Danilchenko 3, Leonid Sukhodub 4, Dennis McGowan 5, Oleg Vyrva 6, Anna Zykova 7, Vladimir Safonov 8 1 INMASTERS Ltd, Kharkov, Ukraine 2,3,4 Institute of Applied Physics NAS, Sumy, Ukraine 5 Inmasters Ltd, Kearneu NE, United States 6 Sytenko Institute of Spine & Joint Pathology, Kharkov, Ukraine 7 Institute of Surface Engineering, Khark H2/NH3 plasma-grafted PEEK-WC-PU membranes improve the biological behaviour of human hepatocytes Stefania Laera 1, Linda Caterina Lopez 2, Loredana De Bartolo 3, Sabrina Morelli 4, Simona Salerno 5, Antonella Piscioneri 6, Marina Nardulli 7, Roberto Grisitina 8, Riccardo d Agostino 9, Pietro Favia 10 1,2,7 Univerity of Bari, Bari, Italy 3,4,5,6 CNR-ITM c/o University of Calabria, Rende (Cs), Italy 8 CNR-IMIP, Bari, Italy 9,10 Univerity of Bari CNR-IMIP Plasma Solution Srl Spin off of the University of Bari, Bari, Italy New antimicrobial materials based on polymers with nanostructured surface modified by organic fullerene [60] derivatives Vera Elinson 1, Marina Yurovskaya 2, Andrey Lyamin 3, Natalia Ovchinnikova 4, Alexandr Naumkin 5 1,3 MATI -Russian State Technological University, Moscow, Russian Federation 2,4 Moscow State University Chemical Department, Moscow, Russian Federation 5 Institute of Elementoorganic Substances of RAS, Moscow, Russian Federation 92 PSE 2008

95 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 Poster - Plasma characterization PO3001 Micro-Particles as Electrostatic Probes for Plasma Sheath Diagnostic Matthias Wolter 1, Moritz Haass 2, Taalke Ockenga 3, Josef Blazek 4, Ralf Basner 5, Holger Kersten 6 1 IEAP, University of Kiel, Kiel, Germany 2,3,6 IEAP, University Kiel, Germany 4 Department of Physics, University of South Bohemia, Czech Republic 5 INP, Greifswald, Germany PO3002 PO3003 Spatially Resolved Measurement of the Energy Influx in rf-plasma Processes Matthias Wolter 1, Marc Stahl 2, Christoph Terasa 3, Holger Kersten 4 1 IEAP, University of Kiel, Kiel, Germany 2,3 IEAP University Kiel, Kiel, Germany 4 IEAP University of Kiel, Kiel, Germany Investigation of Synthesis-Gas Production via CH4-O2-Ar gas Mixture through Microwave Plasma Torch Maziar Sahba Yaghmaee 1, Babak Shokri 2, Neda Hafez Khiabani 3, Abdollah Sarani 4 1,2,3,4 Shahid Beheshti University, Tehran, Iran PO3004 The ion energy distribution function in an expanding thermal plasma as determined by means of a retarding field energy analyzer P. Kudlacek 1, S. V. Singh 2, M. Creatore 3, M. C. M. van de Sanden 4 1,2,3,4 Eindhoven University of Technology, Eindhoven, Netherlands PO3005 PO3006 Characterization of Plasmas used to Deposit Thin Films for Cutting Tool and Bio-Medical Applications Matt Gordon University of Arkansas, Fayetteville, United States Study of plasma interaction effects on electron confinement and electron drifts Kishor Kumar 1, Subroto Mukherjee 2 1 FCIPT, IPR, Gandhinagar, Gujarat., India 2 FCIPT IPR, Gandhinagar Gujarat, India PO3007 Multi-dipolar plasmas for innovative thermochemical diffusion processes: plasma diagnostics Gregory MARCOS 1, Thierry Czerwiec 2, Henri Michel 3, Gerard Henrion 4, Thierry Belmonte 5 1,2,3,4,5 LSGS Laboratory, Nancy, France PO3008 Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiO2 Thin Films Petr Virostko 1, Zdenek Hubicka 2, Martin Cada 3, Jiri Olejnicek 4, Stepan Kment 5, Lubomir Jastrabik 6, Milan Tichy 7 1,2,3,4,5,6 Institute of Physics of ASCR, Prague, Czech Republic 7 Charles University in Prague, Prague, Czech Republic PSE

96 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3009 PO3010 Plasma parameters measurement using an newly designed rf compensated Langmuir Probe in a MHz capacitively coupled air plasma M.Ranjan, S.Mukherjee,P.Kikani,P.I.John FCIPT,Institute for Plasma Research, Gandhinagar, India Probing active screen plasma using high-temperature optical fibre assisted OES method S. Corujeira Gallo 1, V. R. Machavaram 2, G. F. Fernando 3, H. Dong 4 1,2,3,4 The University of Birmingham, Birmingham, United Kingdom PO3011 PO3012 In situ spectroscopic investigations of atmospheric pressure plasmas used for the chemical vapour deposition of silica films. David Sawtell 1, David Massey 2, Philip Martin 3, David Sheel 4 1,3 The University of Manchester, Manchester, United Kingdom 2,4 The University of Salford, Manchester, United Kingdom Time and space resolved detection of NH-Radicals in an RF-driven glow discharge using combined CRD and 2-D LIF-spectroscopy Andreas Schenk 1, Martin Visser 2, Thorsten Kroker 3, Karl-Heinz Gericke 4 1,2,3,4 Institut für Physikalische und Theoretische Chemie, Braunschweig, Germany PO3013 PO3014 A CONTINUOUSLY WORKING THERMAL PROBE FOR THE MEASUREMENT OF THE ENERGY INFLUX AT PLASMA- TECHNOLOGICAL PROCESSES Ruben Wiese 1, Holger Kersten 2 1 Institut für Plasmaforschung und Technologie (INP), Greifswald, Germany 2 Institut für Experimentelle und Angewandte Physik, Kiel, Germany Retarding field analyser for ion energy distribution measurement at a radio-frequency and pulse biased electrode David Gahan 1, Borislav Dolinaj 2, Mike Hopkins 3 1,3 Dublin City University, Dublin, Ireland 2 Impedans Ltd, Dublin, Ireland PO3015 Mass spectrometry of plasma processes during reactive DC pulsed magnetron sputtering Jiri Bulir 1, Petr Pokorny 2, Michal Novotny 3, Martin Misina 4, Jan Lancok 5, Jindrich Musil 6 1 Institute of Physics, ASCR, v.v.i., Prague, Czech Republic 2,3,4,5,6 Institute of Physics ASCR v.v.i., Prague, Czech Republic Poster - Plasma modelling PO3016 Monte Carlo Simulation of Electrons and Ions trajectories in Magnetron Sputtering Systems Miroslav Holik 1, James Bradley 2, Victor Bellido-Gonzalez 3 1,2 The University of Liverpool, Liverpool, United Kingdom 3 Gencoa Ltd., Liverpool, United Kingdom 94 PSE 2008

97 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3017 Nitrogen atom recombination in N2 flowing afterglow. Effect of Oxygen addition andre ricard 1, anne-marie pointu 2 1, Toulouse, France 2 Plasmas Phys. Lab, orsay, France PO3018 PO3019 PO3020 PO3021 PO3022 Plasma-Surface Interactions during Plasma Oxidation Process Stanislav Novak 1, Rudolf Hrach 2, Jaroslav Pavlik 3, Vera Hrachova 4 1,2,3 J. E. Purkinje University, Usti nad Labem, Czech Republic 4 Charles University, Prague, Czech Republic Modelling of capacitively coupled radio-frequency discharges in nitrogen Luis Marques 1, C. D. Pintassilgo 2, C. López-Santos 3, J. Cotrino 4, L. L. Alves 5 1 Centro de Física da Universidade do Minho, Braga, Portugal 2,5 Instituto de Plasmas e Fusão Nuclear Instituto Superior Técnico, Lisboa, Portugal 3,4 Instituto de Ciencia de Materiales de Sevilla, Sevilla, Spain INVESTIGATION OF PLASMA PARAMETERS IN A VHF PLASMA WITH NARROW GAP UNDER HIGH-GASEOUS PRESSURE H. Muta 1, M. Y. Tanaka 2, Y. Yamauchi 3, T. Baba 4, Y. Takeuchi 5, H. Takatsuka 6, Y. Kawai 7 1,2,7 Kyushu University, Kasuga, Japan 3,6 Nagasaki Shipyard & Machinery Works Mitsubishi Heavy Industries Ltd., Isahaya, Japan 4,5 Nagasaki Research & Development Center Mitsubishi Heavy Industries Ltd., Fukahori, Japan Comment on the fluid approach for DC magnetron discharge modelling under low pressure conditions Lise Caillault 1, Claudiu Costin 2, Gheorghe Popa 3, Tiberiu Minea 4 1 Laboratoire de Physique des Gaz et des Plasmas, CNRS UMR 8578, ORSAY, France 2,3 Al. I. Cuza University Faculty of Physics, Iaşi, Romania 4 Laboratoire de Physique des Gaz et des Plasmas, Orsay, France ABOUT AEROSOL PLASMA GENERATION IN THE PROCESS OF BULK CONDENSATION Naum Kortsenshteyn 1, Evgeniy Samuilov 2 1,2 Krzhizhanovsky Power Engineering Institute, Moscow, Russian Federation PO3023 Ion Processes in Plasma Chemical Reactor (PChR) - A Multifluid Numerical Model Piotr Kazimierski 1, Adam Twardowski 2, Dorota Kotecka 3 1,2,3 Technical University of Lodz, LODZ, Poland Poster - Plasma surface interaction PO3024 Effect of displaced electrons during conditions similar to short pulse plasma immersion ion implantation Subroto Mukherjee 1, Satyananda Kar 2 1,2 Institute for Plasma Research, Gandhinagar, India PSE

98 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3025 PO3026 PO3027 PO3028 PO3029 PO3030 PO3031 Depth profiling of oxygen PIII modified titanium surfaces Martin Polak 1, Antje Quade 2, Andreas Ohl 3, Klaus Dieter Weltmann 4, Marion Quaas 5, Harm Wulff 6 1,2,3,4 INP-Greifswald, Greifswald, Germany 5,6 Universität Greifswald, Greifswald, Germany ENHANCING THE CORROSION RESISTANCE OF DENTISTRY DRILLS BY PLASMA IMMERSION NITROGEN ION IMPLANTATION OF AISI 434-BASED SS Regulo Lopez-Callejas 1, Arturo Eduardo Muñoz-Castro 2, Raul Valencia- Alvarado 3, Samuel R. Barocio 4, Rosendo Peña-Eguiluz 5, Antonio Mercado-Cabrera 6, Anibal de la Piedad Beneitez 7 1 ININ, Ocoyoacac, Estado de Mexico, Mexico, Mexico 2,3,4,5,6 ININ, Ocoyoacac, Mexico 7 ITT, Metepec, Mexico Studies on the Effects of Low Energy Plasma Immersion Ion Implantation of Nitrogen on Titanium Subroto Mukherjee 1, K. Ram Mohan Rao 2, Edgar Richter 3, Indranil Manna 4 1 Institute for Plasma Research, Gandhinagar, India 2 Ecole Nationale Supérieur d Arts et Métiers La.Bo.Ma.P., Cluny, France 3 Forschungszentrum Dresden e.v., Dresden, Germany 4 Metallurgical and Materials Engineering Department Indian Institute Characterisation of DBD plasma in air by treatment of water and other surfaces Priyadarshini Rajasekaran 1, Nikita Bibinov 2, Peter Awakowicz 3 1 Allgemeine Elekrotechnik und Plasmatechnik, Ruhr Universität, Bochum, Germany 2,3 Allgemeine Electrotechnik und Plasma Technik Ruhr Universität, Bochum, Germany The influence of the coating thickness on the phase and element composition of a Ti coating / steel system surface layer treated by a compression plasma flow Nikolai Cherenda 1, Vladimir Uglov 2, Marina Poluyanova 3, Valentin Astashynski 4, Anton Kuzmitski 5, Alexander Pogrebnjak 6 1,2,3 Belarusian State University, Minsk, Belarus 4,5 Institute of Physics, Minsk, Belarus 6 Sumy Institute of Surface Modification, Sumy, Ukraine Study inductive coupled hydrogen and argon plasma interaction with SiO2 Glass Atis Skudra 1, Gita Revalde 2, Zanda Gavare 3, Natalja Zorina 4, Donats Erts 5 1 University of Latvia,Institute of Atomic Physics and Spectroscopy, Riga, Latvia 2,3,4 University of Latvia Institute of Atomic Physics and Spectroscopy, Riga, Latvia 5 University of Latvia Institute of Chemical Physics, Riga, Latvia Bulk Structure Changes in Tubes from Zr alloys due to the Long- Range Effect of Ion-Plasma Surface Treatment Yuriy Perlovich 1, Margarita Isaenkova 2, Maxim Grekhov 3, Olga Krymskaya 4, Valeriy Polskiy 5, Vladimir Yakushin 6 1,2,3,4,5,6 Moscow Engineering Physics Institute (State University), Moscow, Russian Federation 96 PSE 2008

99 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3032 PO3033 PO3034 PO3035 PO3036 PO3037 PO3038 Change of composition and morphology of a surface of sapphire after a high-temperature pulse plasma irradiation Valery Nikulin 1, Lev Ivanov 2, Irina Borovitskaya 3, Oleg Krokhin 4, Igor Yaminsky 5, Olga Sinitsina 6 1,4 P.N. Lebedev Physical Institute of Russian Academy of Sciences, Moscow, Russian Federation 2,3 A.A. Baikov Institute of Metallurgy and Material Science of Russian Academy of Sciences, Moscow, Russian Federation 5,6 A.N.Nesmeyanov Ins Texture Changes in Rolled Zr-1%Nb Alloy under Electron Irradiation Margarita Isaenkova 1, Yuriy Perlovich 2, Maxim Grekhov 3, Valentin Lazorenko 4, Vyacheslav Kolokoltcev 5, Vasiliy Tovtin 6 1,2,3 Moscow Engineering Physics Institute (State University), Moscow, Russian Federation 4,5,6 Institut of Metallurgy RAS, Moscow, Russian Federation Water plasma effect on the surface modification of carbon residues from petrochemical refinery processes José L. Hueso 1, Victor J. Rico 2, José Cotrino 3, Juan P. Espinós 4, Agustín R. González-Elipe 5 1 Instituto de Ciencia de Materiales de Sevilla (ICMS-CSIC) y Dpto. Química Inorgánica de la Universid 2 Instituto de Ciencia de Materiales de Sevilla (ICMS-CSIC), Seville, Spain 3 Instituto de Ciencia de Materiales de Sevilla (ICMS-CSIC) y Dpto. F Creation and modification for Nanostructurized Surfaces of Aluminium Foil in the Plasma of Stationary and Impulse Magnetron Discharges Mickael Atamanov 1, Georgy Khodachenko 2, Dmitry Mozgrin 3, Galina Krashevskaya 4 1 Russian Scientific Center, Kurchatov Institute of Atomic Energy, Moscow, Russian Federation 2,3,4 The Moscow Engineering and Physics Institute, Moscow, Russian Federation Interaction of Stearic Acid Deposited on Si Samples with Ar/N2 and Ar/O2 Atmospheric Pressure Microwave Post-Discharges Cedric Noel 1, David Duday 2, Stéphane Verdier 3, Patrick Choquet 4, Thierry Belmonte 5, Henri-Noël Migeon 6 1,2,4,6 Centre de Recherche Public Gabriel Lippmann - Departement SAM, Belvaux, Luxembourg 3 Novelis - Foil Innovation Centre, Belvaux, Luxembourg 5 Laboratoire de Sciences et Génie des Surfaces, Nancy, France CREATION OF VIAS WITH OPTIMIZED PROFILE FOR 3-D THROUGH SILICON INTERCONNECTS (TSV) Karola Richter 1, Kay Viehweger 2, Jian He 3, Johann-Wolfgang Bartha 4 1,2,3,4 Technische Universität Dresden, Department of Electrical Engineering and Information Technology, Dresden, Germany TREATMENT OF HEXATRIACONTANE BY Ar-O2 REMOTE PLASMA: A ROUTE TO CLARIFY CLEANING MECHANISMS Thierry BELMONTE 1, Marcio MAFRA 2, Fabienne PONCIN-EPAILLARD 3, Ana MALISKA 4 1,2 LSGS Nancy-Université CNRS, NANCY, France 3 LPCI-Université du Maine-CNRS, Le Mans, France 4 Universidade Federal de Santa Catarina, Laboratório de Materiais, Brazil PSE

100 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3039 The study of the possibilities of both ion-stimulated etching and polymer surface activation in the plasma of high current low pressure diffuse discharge at magnetic field Tatiana Shukshina 1, Dmitry Mozgrin 2, Igor Fetisov 3, Ilya Ivanov 4, Aleksey Snegirev 5 1,2,3,4,5 The Moscow Engineering and Physics Institute, Moscow, Russian Federation PO3040 PO3041 PO3042 Laser Plasma Hybrid Ablation of Parylene Coatings. Christina Pflugfelder 1, Nils Mainusch 2, Jürgen Ihlemann 3, Wolfgang Viöl 4 1,2,4 HAWK-HHG, Göttingen, Germany 3 Laser-Laboratorium Göttingen e.v., Göttingen, Germany Simple dry etching method for Si related materials without etching source gases by atmospheric-pressure plasma enhanced chemical transport Hiromasa Ohmi 1, Kazuya Kishimoto 2, Hiroaki Kakiuchi 3, Kiyoshi Yasutake 4 1 Department of Precision Science & Technology, Osaka university, Suita, Japan 2,3,4 Department of Precision Science & Technology Osaka university, Suita, Japan Reactive plasma jet high-rate etching of SiC Thomas Arnold 1, Inga-Maria Eichentopf 2, Georg Böhm 3 1,2,3 Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany PO3043 Simulation of the substrate temperature field for Plasma Assisted Chemical Etching Thomas Arnold 1, Johannes Meister 2 1,2 Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany PO3044 Positron annihilation study on the Fe-Cr alloys foreseen for fusion reactor DEMO Vladimir Slugen 1, Vladimir Krsjak 2, Martin Petriska 3, Stanislav Sojak 4 1,2,3,4 Slovak University of Technology, Bratislava, Slovakia PO3045 PO3047 Characterization of Cl2/BCl3 etching plasmas applied for silicon etching in dual frequency discharges Stefan Riedel 1, Gunter Krautheim 2, Stephan Wege 3 1,2 University of Applied Sciences Zwickau, Zwickau, Germany 3 Qimonda Dresden GmbH & Co. OHG, Dresden, Germany Polyethylene porous films functionalized by cold plasma Igor Novak 1, Galina Elyashevich 2, Ivan Chodak 3, Aleksey Olifirenko 4, Marian Steviar 5, Milena Špírková 6, Angela Kleinova 7, Ferenc Szocs 8, Natalia Saprykina 9, Elena Vlasova 10 1,3,5,7,8 Polymer Institute of the Slovak Academy of Sciences, Bratislava, Slovakia 2,4,9,10 Institute of Macromolecular Compounds of the Rusian Academy of Sciences, St Petersburg, Russian Federation 6 Institute of macrom 98 PSE 2008

101 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3048 PO3049 PO3050 PO3051 Characterisation of nanocrystalline oxide layers produced by pulsed direct current plasma electrolytic oxidation Ahmad Reza Rastkar 1, Sara Babaei 2, Babak Shokri 3 1 Laser and Plasma Institute, Shahid Beheshti University, Tehran, Iran 2,3 Laser and Plasma Institute, Shahid Beheshti University, Iran New model conceptions of influence electric mode at the mechanism of microarc oxidation of aluminum alloys Ilya Bardin 1, Alexandr Chujko 2, Kirill Chujko 3, Alexandr Rakoch 4, Pavel Zharinov 5, Irina Tschedrina 6 1 LLC Plazma, Bugulma, Russian Federation 2,3,4,5 LLC Plasma, Bugulma, Russian Federation 6 STU MISA, Moscow, Russian Federation Surface treatment of Mg alloy powder consolidates using Plasma Electrolytic oxidation. Jae Ho Kim 1, Taek Soo Kim 2, Han Shin Choi 3, Do Hyang Kim 4, Duck Young Hwang 5, Dong Hyuk Shin 6 1,2,3 Korea Institute of Industrial Technology, Incheon, Korea, South 4 Yonsei university, Seoul, Korea, South 5,6 Hanyang University, Ansan, Korea, South Electrochemical behaviour of pulsed plasma electrolytic oxidized magnesium alloy Parthasarathy Bala Srinivasan 1, Carsten Blawert 2, Wolfgang Dietzel 3, Karl Ulrich Kainer 4 1,2,3,4 GKSS Forschungszentrum Geesthacht GmbH, Geesthacht, Germany PO3052 Study of shape and distribution of TiO2 nanorods produced by atmospheric pressure plasma Mahmood Aliofkhazraei 1, Alireza Sabour Rouhaghdam 2, Ehsan Mohsenian 3 1,2 Tarbiat Modares University, Tehran, Iran 3 University of Potsdam, Potsdam, Germany PO3053 Poster - PVD PO3054 Structures and Properties of Ti alloys after Double Implantation Alexander Pogrebnjak Sumy Institute for Surface Modification, Sumy, Ukraine EPITAXIAL GROWTH OF ALUMININUM NITRIDE SPUTTERED THIN FILMS AT VERY LOW DEPOSITION TEMPERATURE FOR THERMAL DISSIPATION IN III-N POWER MICROWAVE DEVICES. Cyril Duquenne 1, Marie-Paule Besland 2, Pierre-Yves Tessier 3, Raphaël Aubry 4, Sylvain Delage 5, Yves Scudeller 6, Mohammed-Abdou Djouadi 7 1 Université de Nantes, CNRS, Institut des Matériaux Jean Rouxel IMN UMR , Nantes, France 2,3,7 Université de Nantes CNRS Institut des Matériaux Jean Rouxel IMN UMR , Nantes, France 4,5 Alcatel-Thales III-V La PSE

102 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3055 PO3056 Modeling and experimental measurement of the thickness of cuprous oxide nanolayers deposited on glass by dc reactive magnetron sputtering Ahmad Reza Rastkar 1, Alireza Niknam 2, babak Shokri 3 1 Laser and Plasma Institute, Shahid Beheshti University, Tehran, Iran 2,3 Laser and Plasma Institute, Shahid Beheshti University, Iran Modified targets for enhanced reactive sputter deposition rates Tomas Kubart 1, Soren Berg 2, Tomas Nyberg 3 1,2,3 The Angstrom laboratory Uppsala university, Uppsala, Sweden PO3057 PO3058 Studying the reactive magnetron sputtering deposition of oxides, with mass spectrometry Wouter Leroy 1, Stijn Mahieu 2, Yolanda Aranda-Gonzalvo 3, Diederik Depla 4 1,2,4 Ghent University, Gent, Belgium 3 Plasma & Surface Analysis Division Hiden Analytical Ltd., Warrington, United Kingdom Copper thin films on polymer substrate deposited by RF-IPVD. Material and plasma investigations Ismael Guesmi 1, Ludovic De Poucques 2, Lionel Teule-Gay 3, Jean Bretagne 4, Caroline Boisse-Laporte 5 1,2,3,4,5 LPGP, orsay, France PO3059 A study into the sputtering mechanisms of mixed oxide magnetron targets for doped-tco film production Glen West 1, Peter Kelly 2 1,2 Manchester Metropolitan University, Manchester, United Kingdom PO3060 BROADBEAM ION SPUTTER DEPOSITION OF METALLIC ALLOYS Stephan Mändl 1, D. Manova 2, H. Neumann 3 1,2,3 Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany PO3061 PULSED MAGNETRON SPUTTERING WITH HIGH POWER IN INDUSTRIAL SCALE HARD COATING PROCESSES H. Klostermann 1, F. Fietzke 2, R. Labitzke 3, U. Köbe 4, N. Tümmler 5 1,2,3 Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik FEP, Dresden, Germany 4,5 TLU-Thüringer Leistungselektronik Union TLU GmbH, Ilmenau, Germany PO3062 PO3064 Study of pulsed magnetron deposition process during formation of thin TiOx films Vitezslav Stranak University of Greifswald, Greifswald, Germany Physico-chemical study of HiPIMS plasmas by time-resolved mass spectrometry Maria Palmucci 1, Stephanos Konstantinidis 2, Jean-Pierre Dauchot 3, Rony Snyders 4, Michel Hecq 5 1,3,4,5 University of Mons-Hainaut, Mons, Belgium 2 Materials Chemistry University of Aachen, Aachen, Germany 100 PSE 2008

103 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3065 Synthesis of alumina coatings using the ICP enhanced reactive magnetron sputtering system Jan Walkowicz 1, Aleksandr Zykov 2, Stanislav Dudin 3, Stanislav Yakovin 4, Rafal Brudnias 5 1,5 Institute for Sustainable Technologies - National Research Institute, Radom, Poland 2,3,4 Kharkov National Universty Department of Physical Technologies, Kharkov, Ukraine PO3066 PO3067 Comparison between conventional reactive sputtering process and reactive gas pulsing process on the composition and the properties of iron oxynitride films Jean-François PIERSON 1, Moussa GRAFOUTE 2, Christophe ROUSSELOT 3, Jean-François PIERSON 4 1,4 LSGS - Ecole des Mines, NANCY, France 2,3 FEMTO-ST - Université de Franche- Comté, MONTBELIARD, France Synthesis, Thermal evolution and Catalytic Properties of Pt-Pd-O Thin Films David Horwat 1, José Luis Endrino 2, Jean-françois Pierson 3, André Anders 4, Antoinette Boreave 5, Réda Karoum 6, Philippe Vernoux 7 1,3 LSGS, Nancy, France 2,4 LBNL, Berkeley, United States 5,6,7 IRCE Lyon, Lyon, France PO3068 PO3069 Optical and Langmuir probe diagnostics in a magnetised Hollow Cathode Arc Achim Lunk 1, Gonzalo Avaria 2, Attila Schröder 3, Igor Vinogradov 4 1,3,4 University of Stuttgart, Stuttgart, Germany 2 Pontificia Universidad Católica de Chile, Santiago, Chile Arc Ion Plating process monitoring by Optical Emission Spectroscopy exemplified for Chromium containing coatings Kirsten Bobzin 1, Nazlim Bagcivan 2, Philipp Immich 3, Sebastian Theiß 4 1,2,3,4 Surface Engineering Institute, Aachen, Germany PO3070 PO3071 Nickel cathodic arc plasma characterization and optimization for the deposition of quality films CRISTINA SURDU-BOB INFLPR, MAGURELE, Romania P+-process - Hollow cathode plasma assisted AlTiSiN-thin film Tobias Schmidt 1, Michael Falz 2, Martin Holzherr 3 1,2,3 VTD Vakuumtechnik Dresden GmbH, Dresden, Germany PO3072 EB-PVD based hybrid processes for creation of multilayer protective coatings tailored for extreme working conditions Jan Walkowicz 1, Vladimir Safonov 2, Rafal Brudnias 3 1,3 Institute for Sustainable Technologies - National Research Institute, Radom, Poland 2 National Science Center Kharkov Institute of Physics and Technology', Kharkov, Ukraine PSE

104 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3073 PO3074 PO3075 NMR study of PE and PEO-like plasma polymer films Jan Hanuš 1, Lenka Hanyková 2, Andrei Choukourov 3, Jaroslav Kousal 4, Oleksandr Polonskyi 5, Danka Slavínská 6, Hynek Biederman 7 1 Charles University in Prague, Department of Macromolecular Physics, Prague, Czech Republic 2,3,4,5,6,7 Charles University in Prague Department of Macromolecular Physics, Prague, Czech Republic SIC LAYERS PREPARED BY HYBRID LASER DEPOSITION AND PLD Miroslav Jelinek Institute of Physics AS CR, Prague 8, Czech Republic Homogeneity of large area magnetron discharges investigated by Particle-in-Cell Monte-Carlo plasma simulation Andreas Pflug 1, Michael Siemers 2, Bernd Szyszka 3 1,2,3 Fraunhofer IST, Braunschweig, Germany Poster - Film growth and structure PO3076 Structure and properties of wear-resistant composites based on the system Fe-W-C forming by energy streams influence Alexei Ilyasov 1, Anatoly Ryzhkin 2, Victor Ilyasov 3 1,2,3 Don State Technical University, Rostov-on-Don, Russian Federation PO3077 Structure and surface of magnetron co-sputtered Fe:SnO2 coatings from single target in on-axes and off-axes configurations Martin Kormunda 1, Jaroslav Pavlik 2 1,2 J.E. Purkinje University, Usti nad Labem, Czech Republic PO3078 Formation of crystalline Al-Ti-O thin films and their properties Václav Šatava 1, Jindřich Musil 2, Radomír Čerstvý 3, Petr Zeman 4, Tomáš Tölg 5 1,2,3,4,5 University of West Bohemia, Pilsen, Czech Republic PO3079 Amorphous and nanocrystalline WxZr1-x coatings deposited by magnetron sputtering David Horwat 1, Moukrane Dehmas 2, Eric Aubry 3, Julien Zollinger 4, Jeanfrançois Pierson 5 1,3,5 LSGS, Nancy, France 2,4 LSG 2 M, Nancy, France PO3080 Hybrid inorganic-organic functional coatings for injection molding applications Frank Burmeister 1, Jan Hagen 2, Guenter Kleer 3, Joern Denter 4, Marco Wirth 5, Alexander Fromm 6 1,2,3,4,5,6 Fraunhofer IWM, Freiburg, Germany PO3081 Morphological analyses of CrN thin films and correlation between residuals stresses, resistivity and growth of chromium thin films Corinne Nouveau 1, F.-Z. Mammeri 2, Yacine Benlatreche 3, Lounis Chekour 4, N Rouag 5 1,3 Arts et Métiers ParisTech, Cluny, France 2,4 Université Mentouri, Constantine, Algeria 5 Université Mentouri, constantine, Algeria 102 PSE 2008

105 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3082 PO3083 Study of nanoparticles formation in pulsed acetylene magnetron discharge Valérie De Vriendt 1, Fabrizio Maseri 2, Stéphane Lucas 3 1 Laboratoire d'analyses par Réactions Nucléaires (LARN), Centre de Recherche en Physique de la Matièr 2 Research and Development - ArcelorMittal Liège, Liège, Belgium 3 Laboratoire d'analyses par Réactions Nucléaires (LARN) - Centre de Reche STRUCTURAL AND OPTICAL INVESTIGATIONS OF SILICON CARBON NITRIDE THIN FILMS DEPOSITED BY MAGNETRON SPUTTERING. Eric Tomasella 1, Farida Rebib 2, Laurent Spinelle 3, Marc Dubois 4, Celine Eypert 5, Jean Paul Gaston 6, Joel cellier 7 1,3,4,7 Lab Matériaux Inorganiques, Aubiere, France 2 PROMES-CNRS, Perpignan, France 5,6 Horiba-Jobin-Yvon, Chilly-Mazarin, France PO3084 PO3085 Advanced characterisation of multilayer coatings by Glow Discharge Optical Emission Spectroscopy Ramon Escobar Galindo 1, Patrick Chapon 2, Clyde Chmielinski 3, Jose María Albella 4 1,4 Instituto de Ciencia de Materiales de Madrid, Madrid, Spain 2,3 Horiba Jobin Yvon, Longjumeau, France Rapidly Solidified Thick Iron Base Alloy Deposit with Vanadium Carbide Particles Produced by Plasma Spraying Yasuhiro Hoshiyama 1, Kentaro Hirano 2, Hidekazu Miyake 3 1,3 Kansai University, Suita, Japan 2 Asahi-seiren Co. Ltd, Yao, Japan PO3086 Synthesis and characterisation of thin film MAX phase alloys Mathew Guenette 1, Mark Tucker 2, Yongbai Yin 3, Marcela Bilek 4, David McKenzie 5 1,2,3,4,5 University Of Sydney, Sydney, Australia PO3087 PO3088 PEO-like coatings prepared by plasma-based techniques Andrey Shukurov 1, Oleksandr Polonskyi 2, Jan Hanus 3, Jaroslav Kousal 4, Andrey Grinevich 5, Danka Slavinska 6, Hynek Biederman 7 1 Charles University in Prague, Faculty of Mathematics and Physics, Prague, Czech Republic 2,3,4,5,6,7 Charles University in Prague, Faculty of Mathematics and Physics, Czech Republic Film microstructure control and characterization of plasmadeposited SiO2- like films by means of ellipsometric porosimetry. Gianfranco Aresta 1, N.M. Terlinden 2, M. Creatore 3, M.C.M. van de Sanden 4 1 eindhoven University of Technology, Eindhoven, Netherlands 2,3,4 Eindhoven University of Technology, Eindhoven, Netherlands PSE

106 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3089 PO3090 Statistical Approach for Interpretation of the Growth of Sputtered AlN Thin Films Mohamed Zadam 1, Jose Adamczyk 2, Arnaud Tricoteaux 3, Nicolas Horny 4, Bassam Abdallah 5, Pierre-Yves Jouan 6, Mohamed Abdou Djouadi 7, Mohamed Yacine Debili 8 1 Département d'électronique,university Badji Mokhtar BP 12, Annaba, Algeria 2,3 IUT de Valenciennes Département Mesures Physiques UVHC Z.I. du Champ de l Abbesse , Maubeuge, France 4 GRESPI Université de Reims Champagne-Ardenne M Synthesis and characterization of AlCoCrCuFeNi high entropy alloy thin films by magnetron sputtering Vincent Dolique 1, Anne-Lise Thomann 2, Ekaterina Rezugina 3, Pascal Brault 4 1,2,3,4 GREMI, Orleans, France PO3091 Influence of sample rotation on microstructural and mechanical properties of sputtered hard coatings Matjaz Panjan 1, Miha Čekada 2, Peter Panjan 3, Reiner Cremer 4 1,2,3 Jozef Stefan Institute, Ljubljana, Slovenia 4 CemeCon AG, Wurselen, Germany PO3092 PO3093 PO3094 PO3095 Structural and mechanical behavior of TiAlN thin films submitted to thermal treatments Gregory Covarel 1, Tarek Berchi 2, Myriam Brosse 3, Marie-Hélène Tuilier 4, Christophe Rousselot 5 1 Laboratoire Mécanique, Matériaux et Procédés de Fabrication, UHA, Mulhouse, France 2 Laboratoire Mécanique Matériaux et Procédés de Fabrication UHA, Mulhouse, France 3 Laboratoire Mécanique Matériaux et Procédés de Fabrication UHA, Mulhouse, Franc First principles study of titanium oxycarbides Luis Marques 1, H. Pinto 2, A. C. Fernandes 3, M. M. D. Ramos 4, F. Vaz 5 1 Centro de Física da Universidade do Minho, Braga, Portugal 2,3,4,5 Centro de Física da Universidade do Minho, Braga, Portugal Orientation control of layered atomic structures in pulsed plasmas Chris Muratore 1, Jianjun Hu 2, Andrey Voevodin 3 1 Air Force Research Laboratory/UTC, Wright-Patterson AFB, United States 2 Air Force Research Laboratory/UDRI, Wright-Patterson AFB, United States 3 Air Force Research Laboratory, Wright-Patterson AFB, United States Optimization of the deposition process of zirconium boron nitride and aluminium nitride thin films on Si(100) and low alloy steel Abdelouahad CHALA 1, Chahinez SAIED 2, Abdou DJOUADI 3 1 Laboratoire de Chimie Appliquée, Université de Biskra, BISKRA, Algeria 2 Laboratoire de Chimie Appliquée, Université de Biskra, Algeria 3 Institut des Matériaux de Nantes, Nantes, France Poster - Plasma spraying PO3096 Microstructure and Oxidation Resistance of Fe3Al Coatings on Austenitic Stainless Steel by Spark Plasma Sintering Akio Nishimoto 1, Katsuya Akamatsu 2 1,2 Kansai University, Osaka, Japan 104 PSE 2008

107 Wednesday, September 17, 2008 Poster Session, 15:15-16:25 PO3097 Rapidly Solidified Thick Deposit of Fe-C-V-Cr-Ni Alloy by Plasma Spraying Yasuhiro Hoshiyama 1, Kentaro Hirano 2, Hidekazu Miyake 3 1,3 Kansai University, Suita, Japan 2 Asahi-seiren Co. Ltd, Yao, Japan PO3098 PO3099 PO3100 PO3101 Atmosphere Plasma Spraying of Bronze/Ni coated diamond composite for optimized manufacturing of diamond abrasive wheel Hyuntaek Na 1, S Kumar 2, Soodong Park 3, Hanshin Choi 4, Hyungjun Kim 5, Changhee Lee 6 1,2,3,6 Hanyang university, Seoul, Korea, South 4 Korea Institute of Industrial Technology, Incheon, Korea, South 5 Research Institute of Industrial Science & Technology, Pohang, Korea, South Optimum microstructure tailoring for enhanced lubrication of atmospheric plasma sprayed coating Kicheol Kang 1, Hanshin Choi 2, Youlgwun Ji 3, Changhee Lee 4 1,4 Hanyang Univ., Seoul, Korea, South 2,3 Korea Institute of Industrial Technology, Incheon, Korea, South Properties of WC-CoCr based coatings deposited by different HVOF thermal spray processes Josep A. Picas 1, Miquel Punset 2, M. Teresa Baile 3, Enric Martín 4, Antonio Forn 5 1 Light Alloys and Surface Treatments Design Centre-Technical University of Catalonia, Vilanova i la G 2,3,4,5 Light Alloys and Surface Treatments Design Centre-Technical University of Catalonia, Vilanova i la Geltrú, Spain Thin protective aluminum layer on Mg-Li alloy by plasma spraying and cold rolling Sachio Oki 1, Masato Tsujikawa 2, Taiki Morishige 3, Masaichiro Kamita 4 1 Kinki University, Higashi osaka-shi, Japan 2,3 Osaka Prefecture University, Sakai, Japan 4 Yamani Co. Ltd., Osaka, Japan PO3102 Effect of molybdenum on the microstructure and corrosive wear resistance of Nickel-based laser cladded coatings Jingping Yuan 1, lingdong Meng 2, Kebing Zhou 3, Zhijie Liang 4 1,2,3,4 Academy of Armored Forces Engineering, beijing, China PO3103 Distribution and Deviation of Shear Test Results of thermally sprayed Coatings Sven Hartmann 1, Friederike Deuerler 2, Reinhard Winkler 3 1 RHV-Technik, Waiblingen, Germany 2 Bergische Universität, Wuppertal, Germany 3 SLV Duisburg NL der GSI mbh, Duisburg, Germany PSE

108 Thursday, September 18, 2008 Poster Session, 15:15-16:25 Poster - Plasma treatment of polymers PO4001 Advancement of adhesion of hot-melt laminated textiles by DBD treatment Albrecht Dinkelmann 1, Volkmar von Arnim 2, Thomas Stegmaier 3, Alexander Rau 4 1,2,3 Institut für Textil- und Verfahrenstechnik, Denkendorf, Germany 4 Ahlbrandt System GmbH, Lauterbach, Germany PO4002 Analysis of radical species in plasma polymer coatings Maike C. Schmidt 1, Michael Haupt 2, Michaela Müller 3, Christian Oehr 4 1,2,3,4 Fraunhofer IGB, Stuttgart, Germany PO4003 Introduction of Covalently Bonded Flexible Spacers into Polymer- Metal Interfaces Renate Mix 1, Jörg Friedrich 2 1,2 Bundesanstalt f. Materialforschung und -prüfung, Berlin, Germany PO4004 Plasma Treatment of Polyethylene Powder Particles in Hollow Cathode Glow Discharge Holger Kersten 1, Meike Quitzau 2, Matthias Wolter 3, Sven Bornholdt 4 1 IEAP, University of Kiel, Kiel, Germany 2,3,4 IEAP University of Kiel, Kiel, Germany PO4005 PO4006 Corona discharge plasma treatment of a LDPE film for improved adhesion to polyethylene foams for composite laminates Rafael Balart 1, Lourdes Sanchez 2, Octavio Fenollar 3, Oscar Calvo 4, Monica Pascual 5 1,2,3 Polytechnic University of Valencia, Alcoy, Spain 4,5 Textile Research Institute (AITEX), Alcoy, Spain Surface analysis of styrene-butadiene rubber modified with different atmospheric pressure plasma processes Maryline MORENO 1, Patrick CHOQUET 2, Jerôme GUILLOT 3, Laurent NITTLER 4, Henri-Noel MIGEON 5 1,2,3,4,5 Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg PO4007 PO4008 IMPROVEMENT OF WETTABILITY OF NONWOVEN TEXTILE FABRICS BY LOW PRESSURE DISCHARGE PLASMA David Garcia 1, Rosa López 2, Rafael Balart 3, Oscar Calvo 4, Rosa Sanchis 5 1,3 Polytechnic University of Valencia, Alcoy, Spain 2,4,5 Textile Research Institute, Alcoy, Spain Density and aging-behavior of primary amino groups on afterglow plasma-treated low-density polyethylene (LDPE) Kristina Lachmann 1, Benedikt Michel 2, Claus-Peter Klages 3 1,2,3 TU Braunschweig IOT, Braunschweig, Germany 106 PSE 2008

109 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4009 In-situ XPS study of the plasma activation of PET and LDPE polymers Carmen Lopez-Santos 1, Angel Barranco 2, Francisco Yubero 3, Jose Cotrino 4, Agustin R Gonzalez-Elipe 5 1,2,3,4,5 Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain PO4010 PO4011 PO4012 Remote atmospheric pressure DC glow discharge for adhesion improvement of PDMS Nathalie De Geyter 1, Rino Morent 2, Tinneke Jacobs 3, Fabrice Axisa 4, Léon Gengembre 5, Christophe Leys 6, Jan Vanfleteren 7, Edmond Payen 8 1,2,3,6 Research Unit Plasma Technology - Department of Applied Physics - Ghent University, Ghent, Belgium 4,7 TFCG Microsystems - Department of Electronics and Information Systems - Ghent University, Ghent, Belgium 5,8 Unité de Effect of He-CF4 DBD operating parameters on PP and PET surface modification Tinneke Jacobs 1, Nathalie De Geyter 2, Rino Morent 3, Christophe Leys 4 1,2,3,4 Research Unit Plasma Technology - Department of Applied Physics - Ghent University, Ghent, Belgium Patterned (de)wetting of PET foil with atmospheric pressure plasmas Ariël de Graaf 1, Ando Kuypers 2, Paul Poodt 3, Paul Blom 4 1,2,3,4 TNO Science and Industry, Eindhoven, Netherlands PO4013 PO4017 PO4018 Comparison between non-equilibrium atmospheric-pressure and low-pressure plasma treatments of poly(styrene-butadiene-styrene) elastomers Jacek Tyczkowski 1, Jakub Zielinski 2, Iwona Krawczyk 3, Agnieszka Kopa 4, Boguslaw Wozniak 5 1,2,3,4 Technical University of Lodz, Lodz, Poland 5 Leather Research Institute, Lodz, Poland Surface modification on teflon film by an atmospheric pressure plasma Shouguo Wang Academy of Opto-electronic, ACS, Beijing, China High selective polymer surface functionalization by using plasmas of Br-containing precursors with very low ionization potential Sascha Wettmarshausen 1, Reanate Mix 2, Asmus Meyer-Plath 3, Manfred Hennecke 4, Jörg-Florian Friedrich 5 1,2,3,4,5 Bundesanstalt für Materialforschung und -prüfung, Berlin, Germany Poster - HIPIMS / HPPMS PO4019 High-power pulsed reactive magnetron deposition of TiN films Branislav Zustin 1, Kristyna Burcalova 2, Jaroslav Vlcek 3, Jan Lukas 4 1,2,3,4 University of West Bohemia, Plzen, Czech Republic PSE

110 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4020 PO4021 PO4022 PO4023 PO4024 PO4025 PO4026 PO4027 Cross-field ion transport in high power impulse magnetron sputtering and its effect on deposition rates Daniel Lundin 1, Petter Larsson 2, Erik Wallin 3, Martina Lattemann 4, Ulf Helmersson 5, Nils Brenning 6 1,2,3,4,5 Linköping University, Linköping, Sweden 6 Royal Institute of Technology, Stockholm, Sweden Time Resolved Optical Emission Spectroscopy in HPPMS/HIPIMS Discharge for the deposition of optical oxide coatings Till Wallendorf 1, Michael Vergöhl 2, Oliver Werner 3 1 IfU Diagnostic Systems GmbH, Lichtenau, Germany 2,3 IST Fraunhofer Institut für Schicht- und Oberflächentechnologie, Braunschweig, Germany AlN THIN FILMS DEPOSITION: A COMPARISON BETWEEN HIPIMS AND CONVENTIONAL DC SPUTTERING AMELIE GUILLAUMOT 1, Joao Carlos OLIVEIRA 2, Frédéric LAPOSTOLLE 3, Alain BILLARD 4, Albano CAVALEIRO 5, Cécile LANGLADE 6 1,3,4,6 LERMPS, Belfort cedex, France 2,5 Departamento de Engenharia Mecânica - Universidade de Coimbra, Coimbra, Portugal A close confinement magnetron design for use with HiPIMS Mattias Samuelsson 1, Nils Brenning 2, Torbjörn Joelsson 3, Ulf Helmersson 4 1 Plasma and coatings physics division, Linköping university & Impact coatings, Linköping, Sweden 2 Royal Institute of Technology Stockholm, Stockholm, Sweden 3 Impact Coatings, Linköping, Sweden 4 Plasma and coatings physics division Linköping un Investigation of Ti3SiC2-Films prepared with DC, HPPMS and DC superimposed HPPMS Ralf Bandorf 1, Frank Hesse 2 1,2 Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany A comparative study of the microstructure of the Cr1-x-yAlxSiyN1+z nanocomposites deposited by UBM and HIPIMS Christina Wüstefeld 1, David Rafaja 2, Arutiun P. Ehiasarian 3, Ante Hecimovic 4, Volker Klemm 5, Milan Dopita 6, Dietrich Heger 7 1 Institute of Materials Science, TU Bergakademie Freiberg, Freiberg, Germany 2,5,6,7 Institute of Materials Science TU Bergakademie Freiberg, Freiberg, Germany 3,4 Nanotechnology Centre for PVD Research Materials and Engineering Res Stress reduction in HIPIMS deposited thin films Glen West 1, Peter Kelly 2, Paul Barker 3, James Bradley 4 1,2,3 Manchester Metropolitan University, Manchester, United Kingdom 4 University of Liverpool, Liverpool, United Kingdom HIPIMS plasma properties and deposition at different magnetic field configurations Alena Vetushka 1, Arutiun Ehiasarian 2 1,2 Sheffield Hallam University, Sheffield, United Kingdom 108 PSE 2008

111 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4028 Time evolution of ion energies in HIPIMS of Chromium plasma discharge Ante Hecimovic 1, Arutiun Ehiasarian 2 1,2 Sheffield Hallam University, Sheffield, United Kingdom Poster - Tribological coatings PO4029 Importance of thermal conductivity of hard coatings for high speed cutting application Kenji Yamamoto 1, Hirotaka Ito 2, Aya Miyake 3, Syugo Miyake 4 1,2 Kobe Steel Ltd., Kobe, Japan 3,4 Kobelco Research Institute Inc., Kobe, Japan PO4030 PO4031 PO4032 Deposition of Ti-O-N-C coatings by plasma immersion ion implantation and deposition David Duday 1, Patrick Choquet 2, Jérome Guillot 3, Jaafar Ghanbaja 4, Henri-Noel Migeon 5 1 SAM-CRP-Gabriel Lippmann, Belvaux, Luxembourg 2,3,5 SAM-CRP-Gabriel Lippmann, Belvaux, Luxembourg 4 Service Commun de Microscopie Électronique à Transmission UHP Nancy 1, Vandoeuvre-lès-Nancy, France (Al, Zr) N THIN FILMS DEPOSITED BY A HYBRID HIPIMS/DC SPUTTERING PROCESS AMELIE GUILLAUMOT 1, Joao Carlos OLIVEIRA 2, Pascal BRIOIS 3, Frédéric LAPOSTOLLE 4, Alain BILLARD 5, Albano CAVALEIRO 6, Cécile LANGLADE 7 1,3,4,5,7 LERMPS, Belfort cedex, France 2,6 Departamento de Engenharia Mecânica - Universidade de Coimbra, Coimbra, Portugal Experimental investigation of the mechanical micro structural and thermal properties of thin CrAlN layers deposited by PVD technique for various aluminum percentages. Corinne Nouveau 1, Tlili Brahim 2, T Ghrib 3, N Mustapha 4, Yacine Benlatreche 5, Corinne Nouveau 6, Michel Lambertin 7 1,5,6,7 Arts et Métiers ParisTech, Cluny, France 2,3,4 ENIT, Tunis, Tunisia PO4033 Comparative studies on Mo-Cr-N and Al-Cr-N coatings obtained by PVD dual magnetron sputtering Corinne Nouveau 1, Yacine Benlatreche 2, Issam Rahil 3, Lounis Chekour 4 1,2 Arts et Métiers ParisTech, Cluny, France 3,4 University Mentouri, Constantine, Algeria PO4034 EFFECT OF THE PLASMA DEPOSITION PARAMETERS ON THE PROPERTIES OF TixCy THIN FILMS FOR HARD COATINGS APPLICATIONS SAOULA NADIA 1, Henda KARIM 2, Kesri Rafika 3 1,2 CDTA, Babahassen, Algeria 3 USTHB, Babezzouar, Algeria PO4035 Effect of surface treatments such as sand-blasting and CrAlN hard coatings on the cutting edge s peeling tools wear resistance Corinne Nouveau 1, Chafik Labidi 2, Robert Collet 3, Abdou Djouadi 4 1,2,3 Arts et Métiers ParisTech, Cluny, France 4 IMN, Nantes, France PSE

112 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4036 Effect of Substrate biasing and post deposition annealing on Titanium Nitride Hard Coating Ramkrishna Rane 1, Kishor kumar 2, Mukesh Ranjan 3, Vandana Sharma 4, Naresh Vaghela 5, Subroto Mukherjee 6 1,2,3,4,5,6 Institute for Plasma Research, Gandhinagar, India PO4037 The effect of Si content on the properties of thermal annealed B-C:Si sputtered coatings Cristina Louro 1, Joao Carlos Oliveira 2, Manish Chhowalla 3, Albano Cavaleiro 4 1 SEG-CEMUC-Mechanical Engineering Department, University of Coimbra, Coimbra, Portugal 2,4 SEG-CEMUC Mechanical Engineering Department University of Coimbra, Coimbra, Portugal 3 Materials Science and Engineering Rutgers Unive PO4038 Research on Cracking Behavior of NiCrBSiMo Alloy Laser Cladded Coatings Lingdong Meng 1, Jin-ping Yuan 2, Zhi-jie Liang 3, Lei Sun 4 1,2,3,4, beijing, China PO4039 Influence of Mg and Sn addition on the structure and the properties of arc-evaporated TiN coatings Jean-François PIERSON 1, Fabien CAPON 2, David HORWAT 3, Jean- François PIERSON 4 1,2,3,4 LSGS - Ecole des Mines, NANCY, France PO4040 Mechanical properties of aluminum oxynitride films prepared by r.f.- sputtering Masateru Nose 1, Tokimasa Kawabata 2, Shouhei Ueda 3, Takekazu Nagae 4, Atushi Saiki 5, Kiyoshi Terayama 6, Susumu Ikeno 7 1,4 University of Toyama, Takaoka, Japan 2,3,5,6,7 University of Toyama, Toyama, Japan PO4041 Influence of different pulse parameters on the deposition of Al2O3 Kirsten Bobzin 1, Nazlim Bagcivan 2, Philipp Immich 3, Mara Ewering 4 1,2,3,4 Surface Engineering Institute, Aachen, Germany PO4042 PO4043 STRUCTURE-PROPERTY RELATIONS IN ZrCyN1-y COATINGS FOR TRIBOLOGICAL APPLICATIONS Sandra Carvalho 1, E. Silva 2, M. Rebelo de Figueiredo 3, R. Franz 4, C. Mitterer 5, R. Escobar-Galindo 6, J. P. Mendonça 7 1 University of Minho - Physics Dept, Guimaraes, Portugal 2 Universidade do Minho Dept. Física, Guimaraes, Portugal 3,4 Christian Doppler Laboratory for Advanced Hard Coatings Department of Physical Metallurgy and Mater, Leoben, Austria 5 Chri Deposition and characterization of hard coatings in the material system V-Al-N by reactive magnetron sputter deposition Szilárd Kolozsvári 1, Peter Pesch 2, Carlos Ziebert 3, Sven Ulrich 4 1,2 TZO-Technologiezentrum für Oberflächenzentrum Rheinbreitbach GmbH, Rheinbreitbach, Germany 3,4 Forschungszentrum Karlsruhe Institut für Materialforschung I, Eggenstein-Leopoldshafen, Germany 110 PSE 2008

113 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4044 PO4045 PO4046 Composition-constitution-morphology relationship for Al2O3 thin films deposited by plasma assisted chemical vapor deposition Kaiyun Jiang 1, Rony Snyders 2, Denis Music 3, Alexander Reinhold 4, Jochen M. Schneider 5 1 Materials Chemistry/RWTH AACHEN, Aachen, Germany 2,3,5 Materials Chemistry/RWTH AACHEN, AACHEN, Germany 4 Central Facility for Electron Microscopy/RWTH AACHEN, AACHEN, Germany Silicon carbon nitride thin films deposited by magnetron reactive physical vapour deposition: Structural, chemical and mechanical characterization Ahoutou Paul KOUAKOU 1, Virginie HODY 2, Patrick CHOQUET 3, Mohammed BELMAHI 4, Jamal BOUGDIRA 5, Henri-Noel MIGEON 6 1 CRPGL, Belvaux, Luxembourg 2,3,6 CRPGL, Belvaux, Luxembourg 4,5 LPMIA, Nancy, France Hard coatings with elevated film thickness prepared by PVD Otmar Zimmer 1, Frank Kaulfuß 2 1,2 Fraunhofer IWS Dresden, Dresden, Germany PO4047 PO4048 PO4049 PO4050 Wear behaviour of (Cr,Al,Y)N PVD- coatings at elevated temperatures Herbert Scheerer TU Darmstadt, Darmstadt, Germany EFFECT OF CUTTING WEDGE CURVATURE ON THE PERFORMANCE OF COATED TOOLS Konstantinos-Dionysios Bouzakis 1, Stefanos Gerardis 2, Giorgos Katirtzoglou 3, Stelios Makrimallakis 4, Antonios Bouzakis 5, Rainer Cremer 6 1,2,3,4,5 Aristoteles University of Thessaloniki, Thessaloniki, Greece 6 CemeCon AG, Würselen, Germany The influence of age-hardening on cutting and milling performance of Ti-Al-N coated inserts Li Chen University of Leoben, Leoben, Austria Fingerprint Resistant Decoative Coatings Yuriy Ivanov 1, Thorsten Zufraß 2 1,2 SVS, Karlstadt, Germany Poster - Carbon based coatings PO4051 Conductivity and structural Properties of Mo, Cu, Ag and Au doped diamond-like carbon deposited using selective bias plasma immersion ion implantation and deposition Jose Luis Endrino Instituto de Ciencia de Materiales de Madrid, Madrid, Spain PSE

114 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4052 Improvement of the adhesion of PECVD-deposited DLC films on NiTi shape memory alloys Janine Schauer 1, Jörg Winter 2 1,2 Ruhr-Universität Bochum, Bochum, Germany PO4053 Thermal evolution of WC/C nanostructured coatings by Raman and in situ XRD analysis Said El Mrabet 1, Manuel David Abad 2, Carlos López-Cartes 3, Diego Martínez-Martínez 4, Juan Carlos Sánchez-López 5 1,2,3,4,5 Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain PO4054 Influence of the nanocrystalline/amorphous carbon ratio in the tribomechanical properties of nanostructured WC/a-C coatings Juan Carlos Sánchez-López 1, Manuel David Abad 2, Miguel Angel Muñoz- Márquez 3, Said El Mrabet 4, Angel Justo 5 1,2,3,4,5 Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain PO4055 On the plasma-chemistry of CH4-H2-Ar system relevant to diamond deposition process by plasma enhanced chemical vapor deposition Babak Shokri 1, Maziar Sahba Yaghmaee 2, Abdollah Sarani 3 1,2,3 Shahid Beheshti University, Tehran, Iran PO4056 Low temperature Dual Frequency Plasma Enhanced Chemical Vapor Deposition of Diamond Like Carbon Babak Shokri 1, S.Iman Hosseini 2 1,2 Shahid Beheshti University, Tehran, Iran PO4057 PO4058 PO4059 A novel form of hard hydrogenated amorphous carbon grown under long gas residence time conditions M.C.M. van de Sanden 1, S.V. Singh 2, T. Zaharia 3, M. Creatore 4, R. Groenen 5, K. Van Hege 6 1,2,3,4 Eindhoven University of Technology, Eindhoven, Netherlands 5,6 NV Bekaert SA Dept. of Advanced Coating Technologies, Zwevelgem, Belgium Production of high-density capacitively coupled plasma with RF multi-hollow cathode and/or high secondary electron emission Yasunori Ohtsu 1, Tatsuya Misawa 2, Hiroharu Fujita 3, Morito Akiyama 4, Ken Yukimura 5 1,2,3 Saga University, Saga, Japan 4 National Institute of Advanced Industrial Science and Technology, Tosu, Japan 5 Doshisha University, Kyoto, Japan Formation of Thin Carbon Films in a Crossed Field Discharge in Argon Anton Sasin 1, Ilya Chernov 2, Boris Ignatyev 3, Saul Wagner 4 1,2,3,4 Karelian State Pedagogical University, Petrozavodsk, Russian Federation 112 PSE 2008

115 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4060 PO4061 PO4062 PO4063 Thermal stability and oxidation resistance of nanocomposite TiC/a- C protective coatings Diego Martínez-Martínez 1, Carlos López-Cartes 2, Raúl Gago Fernández 3, Asunción Fernández-Camacho 4, Juan Carlos Sánchez-López 5 1 Instituto de Ciencia de Materiales de Sevilla (Centro Mixto CSIC-Universidad de Sevilla), Sevilla, 2,4,5 Instituto de Ciencia de Materiales de Sevilla (Centro Mixto CSIC-Universidad de Sevilla), Sevilla, Spain 3 Instituto de Ciencia de M Duplex treatment of high speed steel for well-adherent DLC coatings by using a plasma beam source Martin Fenker 1, Martin Balzer 2, Nadja Bermayer 3, Monika Rinke 4, Michael Stüber 5, Sven Ulrich 6 1,2,3 FEM, Schwäbisch Gmünd, Germany 4,5,6 Forschungszentrum Karlsruhe, Eggenstein- Leopoldshafen, Germany Effects of vacuum levels on physical properties of a:c-h film Motoo Watanabe 1, Hideyuki Kodama 2, Tetsuya Suzuki 3, Atsusi Hotta 4, Masaki Nakaya 5 1,3,4 Keio University, Yokohama, Japan 2 Kanagawa Academy of Science and Technology, Kanagawa, Japan 5 KIRIN, Yokohama, Japan Annealing effect on electrical and physical properties of cyclohexene plasma-polymer synthesized by rf-pecvd methed on diamond-like carbon films Yong Seob Park 1, Sang-Jin Cho 2, Jin-Hyo Boo 3, Byungyou Hong 4 1,2,3,4 Sungkyunkwan University, Suwon, Korea, South PO4064 PO4065 Ralationship between stresses and structure of DLC thin films Mohammed Ouchabane 1, Mohamed Kechouane 2, Matthias Hermann 3, Siegfried Peter 4, Frank Richter 5 1 CDTA, Baba Hassen, Algeria 2 Laboratoire des couches minces et semiconducteurs Institut de physique USTHB BP 32 El Alia, Bab-ezzouar Alger, Algeria 3 TU Chemnitz, Chemnitz , Germany 4,5 TU Chemnitz Institut of Physics, Chemnitz Properties of ta-c-films on Tools and Machinery Parts Werner Grimm 1, Frank Präßler 2, Thomas Chudoba 3 1,2 Inovap, Grosserkmannsdorf, Germany 3 ASMEC, Grosserkmannsdorf, Germany PO4066 PO4067 Deposition and Characterisation of GLC Coatings on AZ31 Magnesium Alloy Wenwen Wu 1, Bailing Jiang 2, Hanshan Dong 3 1,3 The University of Birmingham, Birmingham, United Kingdom 2 Xi'an University of Technology, Xi'an, China Tribological Behavior of Amorphous Carbon-Silicon-Coatings on Nitrided and Post-Oxidized Steels Deposited by DC-PACVD Daniel Heim University of Applied Sciences Wels, Wels, Austria PSE

116 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4068 PO4069 PO4070 PO4071 Structural modifications of DLC layers after wear tests Olivier Jarry 1, Cedric Jaoul 2, Pascal Tristant 3, Thérèse Merle-Mejean 4, Maggy Colas 5, Christelle Dublanche-Tixier 6, Helene Ageorges 7, Claude Lory 8, Jean-Marie Jacquet 9 1 SPCTS, Limoges, France 2,3,4,5,6,7 University of Limoges CNRS SPCTS, Limoges, France 8,9 Sorevi Bekaert, Limoges, France Low friction coefficient carbon-tin (C-Sn) coatings for tribological applications Cornel Porosnicu 1, Oana Pompilian 2, Ana Mihaela Lungu 3, Petrica Chiru 4, Carmen Cristina Surdu Bob 5, Cristian Lungu 6, Dorina Manole 7, Victor Ciupina 8 1,2,3,4,5,6 NILPRP, Bucharest, Romania 7 Ovidius University, Constanta, Romania 8 Ovidius University, Bucharest, Romania Modified DLC coatings with anti-fouling properties Ingmar Bialuch 1, Klaus Bewilogua 2, Wolfgang Augustin 3, Florian Albert 4, Timo Geddert 5, Stephan Scholl 6 1,2 Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany 3,4,5,6 Technical University of Braunschweig Institute for Chemical and Pocess Engineering, Braunschweig, Germany Hard C-DLC coatings deposited by combined HIPIMS / UBM techniques Yuriy Ivanov 1, Thorsten Zufraß 2, Markus Schenkel 3 1,2,3 SVS, Karlstadt, Germany PO4072 Coating Material Criteria for Antiwear Applications Stephane NEUVILLE Tetrahedral Carbon Engineering, CUISY, France Poster - Protecting and barrier coatings PO4073 Investigation of Corrosion Behavior of Carbon Steel Coated with Pulsed Plasma Electrolytic Bronzing Technique via Electrochemical Impedance Spectroscopy Peyman Taheri 1, Changiz Dehghanian 2, Seyyed Habib Alavi 3 1 University of Tehran, Tehran, Iran 2,3 University of Tehran, Tehran, PO4074 Effects of Morphological Aspects of Nanocrystalline Microstructures on Abrasion and Corrosion properties of AISI H13 steel Produced by Pulsed Plasma Electrolytic Nitrocarburizing Peyman Taheri 1, Changiz Dehghanian 2, Golnaz Ashtari Alnakhaei 3 1 University of Tehran, Tehran, Iran 2,3 University of Tehran, Tehran, PO4075 Nitrocarburized corrosion behavior of AISI H13 tool steel F. Alvarez 1, R. Basso 2, R. Candal 3, D. Wisnivesky 4 1,4 Unicamp, Campinas, Brazil 2 Instituo de Fisica, Campinas, Brazil 3 Universidad de Buenos Aires, Buenos Aires, Argentina 114 PSE 2008

117 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4076 PO4077 Development of Decorative and Corrosion Resistant Coatings for the Surface Refinement of Magnesium Alloys by Plasma-Based Methods Holger Hoche 1, Stefan Groß 2, Juergen Schmidt 3, Frank Hollstein 4 1 MPA Darmstadt, Darmstadt, Germany 2 MPA-Darmstadt, Darmstadt, Germany 3 Innovent, Jena, Germany 4 IOT FH-Zittau, Zittau, Germany Iridium coatings for precision molding of RoHS-compliant glasses Jan Hagen 1, Frank Burmeister 2, Mario Hug 3, Gerd Spiess 4, Peter Manns 5, Günter Kleer 6 1,2,3,4,5,6 Fraunhofer IWM, Freiburg, Germany PO4078 Corrosion studies of TiSixCy-coated steels deposited by plasmaactivated chemical vapour deposition and pulsed magnetron sputtering Volker Buck 1, Martin Balzer 2, Martin Fenker 3 1 Uni. Duisburg-Essen, Duisburg, Germany 2,3 FEM, Schwaebisch Gmuend, Germany PO4079 PO4080 ON LOW PRESSURE PLASMA PROCESSING STRATEGIES TO METAL PROTECTION Fabio Palumbo 1, Sabrina Grassini 2, Fracassi Francesco 3, Emma Angelini 4, Riccardo d Agostino 5, Stefania Laera 6, Antonella Milella 7 1 CNR-IMIP, Bari, Italy 2,4 Politecnico di Torino, Torino, Italy 3,5,6,7 Università di Bari, Bari, Italy Effect of time and frequency on corrosion resistance of coatings formed by pulsed plasma electrolytic oxidation Alireza Sabour Rouhaghdam 1, Ashkan Danesh Maslak 2, Mahmood Aliofkhazraei 3 1,2,3 Tarbiat Modares University, Tehran, Iran PO4081 PO4082 Properties of the TixCr(1-x)N coatings on SUS316L prepared by ICP assisted DC magnetron sputtering Hyoseok Choi Department of Materials Science and Engineering, Seoul National University, Seoul, Korea, South Decorative coating for Mg alloys by magnetron sputtering Hanshin Choi 1, Hyesook Joo 2, Jinkyu Lee 3, Youlgwun Ji 4, Chi sun Lee 5 1,2,3,4,5 Korea Institute of Industrial Technology, Incheon, Korea, South PO4083 DIFFERENT UNDERLYING CORROSION MECHANISM FOR Mg BULK ALLOYS AND Mg THIN FILMS Carsten Blawert 1, Nico Scharnagl 2, Darina Manova 3, Stephan Mändl 4 1,2 GKSS Forschungszentrum Geesthacht GmbH, Geesthacht, Germany 3,4 Leibniz- Institut für Oberflächenmodifizierung, Leipzig, Germany PSE

118 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4084 Investigation the effect of pre-oxidation of substrate and oxidation of coating to corrosion protection Garip ERDOGAN 1, Fatih USTEL 2, Ahmet TURK 3, Fevzi YILMAZ 4, Ekrem ALTUNCU 5 1,2,3,4 Sakarya Univesity, Sakarya, Turkey 5 Kocaeli University, Kocaeli, Turkey PO4085 Thermal evolution study of hardness in CrAlN and CrAlN:Y coatings and their oxidation process Alessandro Patelli 1, Simone Vezzu' 2, Lorenzo Zottarel 3, Marino Colasuonno 4 1,2,3,4 CIVEN, Marghera Venezia, Italy PO4086 PO4087 PO4088 Development of new anticorrosion thin films with self-healing properties by atmospheric pressure plasma deposition David Duday 1, Chems-Eddine Barchiche 2, Patrick Choquet 3, Emmanuel Rocca 4, Juliano Borges 5, Henri-Noël Migeon 6 1 SAM-CRP-Gabriel Lippmann, Belvaux, Luxembourg 2,4 Laboratoire de Chimie du Solide Minéral - UMR CNRS 7555, Vandoeuvre-lès-Nancy, France 3,5,6 SAM - CRP Gabriel Lippmann, Belvaux, Luxembourg THE COMPARATIVE ANALYSIS OF PROTECTIVE PROPERTIES OF MULTILAYER COATINGS DEPOSITED ON STAINLESS STEEL AND Ti4Al6V SUBSTRATES Anna Zykova 1, Vladimir Safonov 2, Jan Walkowich 3, Renata Rogowska 4, Stanislav Yakovin 5 1,2 Institute of Surface Engineering, Kharkov, Ukraine 3,4 Institute for Sustainable Technologies National Research Institute, Radom, Poland 5 Kharkov National University, Kharkov, Ukraine Structure and Corrosion Properties of Magnetron-Sputtered Mgx- Al1-x Coatings Michael Störmer 1, Carsten Blawert 2, Christian Horstmann 3, Volker Heitmann 4, Wolfgang Dietzel 5 1,2,3,4,5 GKSS research centre GmbH, Geesthacht, Germany PO4089 Effect of the Gas Mixture Composition on High-Temperature Behaviour of Magnetron Sputtered Si-B-C-N Coatings Jiri Capek 1, Petr Zeman 2, Pavel Calta 3, Jaroslav Vlcek 4, Radomir Cerstvy 5 1,2,3,4,5 University of West Bohemia, Plzen, Czech Republic PO4090 Structure and mechanical properties of Al-Si-N thin films with a low and high Si content Martin Šašek 1, Jindřich Musil 2, Petr Zeman 3 1,2,3 University of West Bohemia, Plzeň, Czech Republic PO4091 Plasma Enhanced Digital Layer Deposition (PE DLD) of SiO2 Diffusion Barrier Coatings Maximilian Baier 1, Michael Haupt 2, Christian Oehr 3 1,2,3 Fraunhofer IGB, Stuttgart, Germany 116 PSE 2008

119 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4092 PO4093 PO4094 PO4095 PO4096 PO4097 Silicon oxide permeation barrier coating and plasma sterilization of PET bottles and foils Michael Deilmann 1, Helmut Halfmann 2, Simon Steves 3, Nikita Bibinov 4, Peter Awakowicz 5 1 Ruhr-Universität Bochum, Institute for Electrical Engineering and Plasma Technology, IC 1 / 157, Bochu 2,3,4,5 Ruhr-Universität Bochum, Institute for Electrical Engineering and Plasma Technology, Germany Possibilities of Ion Assisted EB PVD to design functionally graded coatings Abram Lyutovich 1, Eberhard Roos 2, Karl Maile 3, Karl Berreth 4, Khatam Ashurov 5 1 Materialpruefungsanstalt Universität Stuttgart MPA, Stuttgart, Germany 2,3,4 Materialprüfungsanstalt Universität Stuttgart MPA, Stuttgart, Germany 5 Institut of Electronics, Tashkent, Uzbekistan Refractory zirconates and hafnates of lanthanides for plasma deposition Nikolay A. Ignatov 1, Vladimir G. Sevastyanov 2, Elizaveta P. Simonenko 3, Nikolay T. Kuznetsov 4 1 N.S. Kurnakov Institute of General and Inorganic Chemistry of Russian Academy of Sciences, Moscow, R 2,3,4 N.S. Kurnakov Institute of General and Inorganic Chemistry Russian Academy of Sciences, Moscow, Russian Federation The properties of carbon barrier films synthesized by pulsed DC magnetron sputtering Sung I Kim 1, Su B Jin 2, Jeon G. Han 3 1 Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Korea, South 2,3 Center for Advanced Plasma Surface Technology Sungkyunkwan University, Suwon, Korea, South Silicon oxide barrier coatings deposited on polymer materials for applications in food packaging industry Joachim Schneider 1, Jerôme Dutroncy 2, Martina Leins 3, Dennis Kiesler 4, Andreas Schulz 5, Matthias Walker 6, Uwe Schumacher 7, Ulrich Stroth 8 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,3,4,5,6,7,8 Institut für Plasmaforschung Universität Stuttgart, Stuttgart, Germany Plasma Enhanced Chemical Vapor Deposition of silicon dioxide-like films: a chemical structure study for barrier applications Anna Maria Coclite 1, Antonella Milella 2, Fabio Palumbo 3, Riccardo d Agostino 4 1,2,4 University of Bari, Bari, Italy 3 CNR, Bari, Italy PO4098 SiOx-based gas barrier coatings by atmospheric plasma jet deposition. Paolo Scopece 1, Andrea Viaro 2, Roberta Sulcis 3, Illya Kulyk 4, Alessandro Patelli 5, Massimo Guglielmi 6 1,3,4,5 CIVEN (Coordinamento Interuniversitario Veneto per le Nanotecnologie), Venezia, Italy 2,6 Dipartimento di Ingegneria Meccanica - Settore Materiali, Padova, Italy PSE

120 Thursday, September 18, 2008 Poster Session, 15:15-16:25 PO4099 PO4100 ICPECVD of SiNx using a SiH4/NH3/Ar chemistry and silicon nitridelike thin films with BDMADMS as moisture barrier layer on PET and PES Rainer Wolf 1, Klaus Wandel 2, Christine Boeffel 3 1 OUT e.v., Berlin, Germany 2 SENTECH Instruments GmbH, Berlin, Germany 3 Fraunhofer-Institut für Angewandte Polymerforschung, Berlin, Germany Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 C Petr Zeman 1, Jiri Capek 2, Radomir Cerstvy 3, Jaroslav Vlcek 4 1,2,3,4 Department of Physics/University of West Bohemia, Plzen, Czech Republic PO4101 PO4102 Oxidation characteristics of the MCrAlY coatings modified by laser remelting Utu Ion-Dragos 1, Viorel-Aurel Serban 2, Gabriela Marginean 3 1,2 Politehnica University of Timisoara, Timisoara, Romania 3 University of Applied Sciences Gelsenkirchen, Gelsenkirchen, Germany An Investigation of The Thermal Shock Behaviour of Plasma Sprayed T/EBC Ekrem Altuncu 1, Garip ERDOGAN 2, Fatih USTEL 3, Ahmet TURK 4 1 Kocaeli University/ Vocational School of Asim Kocabiyik, Kocaeli, Turkey 2,3,4 Sakarya University Department of Materials and Metallurgical Engineering, Sakarya, Turkey 118 PSE 2008

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124 PSE 2008, Garmisch-Partenkirchen, Germany September 15-19, 2008 Payment conditions for conference fees A letter of confirmation of your registration to the PSE 2008 will be sent to you by including the invoice. The preferred methods of payment are by credit card (VisaCard / MasterCard / AmericanExpressCard) or by wire bank transfer (drawn on a German bank) within 14 days after receipt of the invoice. Late and on-site registrations can only be accepted after payment by credit card (VisaCard / MasterCard / AmericanExpressCard) or in cash at the beginning of the conference. Cancellations and substitutions are accepted if written notification is received. In case of your registration cancellation a cancellation fee of EUR 100 will be charged before June 10, After that date, a refund is not possible. Accompanying exhibition Please, find detailed information in the exhibition flyer and on the PSE 2008 website ( Accommodation Tourist Information (Ms Hofmann) Postfach Garmisch-Partenkirchen Germany Phone.: +49 (0) Fax: +49 (0) tourist-info@gapa.de Insurance The European Society of Thin Films as organizer of the conference cannot accept responsibility for personal accidents or loss of or damage to private property of participants and accompanying persons which may occur either during, or arising from the conference. Therefore, participants should take whatever steps they consider necessary regarding insurance. Restaurants A variety of restaurants in town offer local and international food for lunch and dinner. During the conference a lunch will be offered against cash in the Café of the Congress Center. Taxi Taxis can be ordered by calling +49 (0) and +49 (0) (Marienplatz) or +49 (0) (Bahnhofsplatz). 122 PSE 2008

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