RPS Repair/Overhaul Introduction

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Abigayle Rich
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1 RPS Repair/Overhaul Introduction

1.RPS Model List Type Model Capacity ASTRON AX7650 / AX7651 / AX7657 / FI20620 / FI20620-1 ASTRON i AX7670-16 / AX7670-19 / AX7670-21 / AX7670-30 ASTRON e AX7680 / FI80130 ASTRON ex

2 1.RPS Model List Type Model Capacity ASTRON AX7650 / AX7651 / AX7657 / FI20620 / FI ASTRON i AX / AX / AX / AX ASTRON e AX7680 / FI80130 ASTRON ex AX7685 / FI80131 / FI80132 / FI80133 ASTRON hf-s AX7645 RH,PS 2L 3L 6L,8L 15L ASTRONhf AX7635 (LCD) R*evolution AX-7690LAM-23 / AX-7690PSK-01 / AX-7690NOV-01 XStream 22L 4L,7500 W 6K / 8K LS3200

3 2.Repair Parts List Items Parts Repair Chamber Al Block Gas Nozzle Consumable Parts PCB Electric Board Anodized Chamber Al Block Application (SG New coating material) Anodized Gas Nozzle Application (SG New coating material) Kalez O-Ring, Ceramic Ring, sapphire Glass, Ignition Button, etc. Power FET, Resistance, Capacitor, Transformer, Converter, etc. Exchange Exchange Exchange Repair / Exchange Chamber Al Block Thermal pad Ignition Button/ Sapphire glass O-ring(Centering) IC/FET

3.Repair Process 1 2 3 Incoming inspection

Test) PCB Board Repair Parts Replacement

Disassembly Exchange Al Block & Source Over

4 3.Repair Process Incoming inspection (2days) Repair & Cleaning (2days) Repeatability Test (3days) Incoming Inspection (Visual inspection & Incoming Test) PCB Board Repair Parts Replacement Leak Check Ignition & Plasma Test Disassembly Exchange Al Block & Source Over temp check & Aging Test Assembly Packing Incoming Release (21 business days)

3.Repair Process Step. Classification Content SemiGroup Texas, LLC 1.

symptoms by using the system Customer s Item Analysis for failed issue and period Administrative control for each

processing Composition - Micro Computer, Data Process Board, Data Measurement Board, Micro SD Card for Data Storage,

5 3.Repair Process Step. Classification Content SemiGroup Texas, LLC 1. Incoming Test Cause analysis for failure symptoms SPMS Check for Actual Power data & Alarm Analysis for failure symptoms by using the system Customer s Item Analysis for failed issue and period Administrative control for each models Smart Power Monitoring System * Function GUI(Graphic User Interface) - Display Panel, Graphic and Data processing Composition - Micro Computer, Data Process Board, Data Measurement Board, Micro SD Card for Data Storage, System Connection Housing, Serial Interface Measurable DATA - Oscilloscope, Current Probe, Voltage Probe, Digital Multi Meter, Data Logger, Computer SPMS - Actual power monitoring Installed Tool

Certificate Al Block & Consumable Parts Replacement Particle Issue NEW OEM Parts Replacement - Kalez O-Ring, Ceramic Ring,

Repair Preventive Maintenance Main Fail Parts Replacement : IC, FET of PCB Board * Inspection of Board Level specification *

6 3.Repair Process Step. Classification Content SemiGroup Texas, LLC Remark New Al Block ASS y Replacement (Including New GAS Nozzle) *(Annex) -Coating Certificate Al Block & Consumable Parts Replacement Particle Issue NEW OEM Parts Replacement - Kalez O-Ring, Ceramic Ring, Sapphire Glass, Ignition Button assembly, etc. 2. Repair Preventive Maintenance Main Fail Parts Replacement : IC, FET of PCB Board * Inspection of Board Level specification * (Annex) 1. Board Level specification Burn-out Improvement by high pressure trans arcing Replacement : (Exposed) Old Trans (Molding) New Trans Quality Improvement Improvement for fail issue Old type Trans Revision for Al Block structure New type Trans 1. Prevention of Coil heat 2. Improvement for life extension

Monitoring System - Unit to unit Actual power check 3.

7 3.Repair Process Step. Test SemiGroup Texas, LLC Remark Spec administration for RPS Model Standard of Actual power specification (Annex) Smart Power Monitoring System - Unit to unit Actual power check 3. Reliability Test Ignition Test Development of Self auto test system - * RPS System recipe Prevention of human error Aging & Over temp Test - 8 hours Aging Test (Annex) RPS System recipe EX.) *Aging test condition - FI (2L) / N2 500 / Ar 500 / Actual power 5.5 KW (Max power) Auto Test System

3.Repair Process Incoming Plasma Test Incoming inspection NG PCB Repair Plasma Failed Chamber Block Repair Control Check Hardware Check PCB core parts all Replacement (PM Repair) Chamber Block Ass y

8 3.Repair Process Incoming Plasma Test Incoming inspection NG PCB Repair Plasma Failed Chamber Block Repair Control Check Hardware Check PCB core parts all Replacement (PM Repair) Chamber Block Ass y Cobtrol Board Check Chamber Leak Check NG Leak Trace All Consumable Parts Changed Leak Trace NG Block Leak Check Relay Board Power Board Water Leak Check NG Water Leak Trace RPS Re-Ass y NG Fuse Board Boost Board PCB Repair NG Final Test Middle Inspection ( or NG) NG Packing

9 4.Repair Status RPS lifetime Items Capacity Average lifetime ASTRON AX7650 / AX7651 / AX7657 / FI20620 / FI l 420 ASTRON i AX / AX / AX /AX l 380 ASTRON e AX7680 / FI80130 ASTRON ex AX7685 / FI80131 / FI80132 / FI l, 6l 378 ASTRON hf-s AX7645 RH,PS 15l 382 ASTRON AX l 420

10 5.Working data (A ) Thickness No difference in thickness start 1M 2M 3M 4M 5M 6M M 사 SGT Spec : TEOS 5000A ±100A

11 5.Working data (A ) Clean rate No Difference in Clean Rate start 1M 2M 3M 4M 5M 6M M 사 SGTS Spec : TEOS 20000A (10 clean recipe)

12 5.Working data Particle No difference in Particles start 1M 2M 3M 4M 5M 6M M 사 SGT Spec : 30ea (size: 0.09um)

6.Competitiveness BEFORE IMPROVEMENT AFTER IMPROVEMENT Flat point Comparison 2 1 2 1 Corner -Description Coating Thickness Deviation Previous Al Block

Flat point & Corner s Coating thickness deviation 12 μm deviation Improved Al Block Corner R - F radical's Back stream phenomenon and stagnant

13 6.Competitiveness BEFORE IMPROVEMENT AFTER IMPROVEMENT Flat point Comparison Corner -Description Coating Thickness Deviation Previous Al Block Corner R - Anodizing film Impairment is intensified by accelerating the F radical Velocity - Back stream is occurred by F radical. Flat point & Corner s Coating thickness deviation 12 μm deviation Improved Al Block Corner R - F radical's Back stream phenomenon and stagnant phenomenon decreasing Clean Efficiency is expected. Flat point & Corner s Coating thickness deviation 6 μm deviation (it is possible to prolong the life time with Al coating layer)

AL6061-T651(Imported) : completion of heat treatment Using for new product AL6061-T6(Domestic)

14 6.Competitiveness Category SemiGroup OTHERS 2L 3L 6L Image Proofing Method Material Regenerative Possibility Illumination of surface(ra) 5 axis proofing 3 axis proofing AL6061-T651(Imported) : completion of heat treatment Using for new product AL6061-T6(Domestic) : incompletion heat treatment Using for new product 0.8 μm 1.3 μm Life time More than 12 months More than 6 months

15 6.Competitiveness SGT New Gas Nozzle Others Usage for a long time and regeneration for Gas Nozzle New Gas Nozzle Usage for a long time and regeneration for Gas Nozzle When it is recycled, Inner Gas Nozzle s Hole size will be extended. It is SemiGroup's policy to replace Gas Nozzle for every repair.

16 6.Competitiveness Comparison with other vendors Items SemiGroup OTHERS Chamber Al Block <Replacement> Anodized Chamber Al Block (New) New coating material <Recycle> Failed Al Block Gas Nozzle <Replacement> Anodized Gas Nozzle New coating material <Recycle> Failed Gas Nozzle Consumable Parts <Replacement> Kalez O-Ring, Ceramic Ring, sapphire Glass, Ignition Button, etc. <Recycle> Failed Consumable Parts PCB Electric Board <Replacement> Power FET, Resistor, Capacitor, Transformer, Converter <Repair>- Other parts inside of PCB Board <Recycle> PCB Electric Board

17 7.Benefit Description Parts Supply Content - Using the all new parts. - Supply all parts through US partner. (Discontinued and customized parts) Improvement Reliability Test - Life time extension expected with improved parts application (New coating material, Rounded corner of AL Block) - Calibration tests are done based on OEM specification. - Test Equipment *Auto self test software * SPMS(Smart Power Monitoring System) Customer Service Contingency Plan - Offer trouble shooting procedure - Spare RPS Prepared for core-exchange RPS 2L 2ea, 6L 1ea - Exchange for other units Spares will be ready in 3Q of 2015 according to customer s demand - Dispatch engineer (2016 1~2Q) Lead time & Price - Fast Lead time (Maximum 3 weeks / A lot of spare parts in stock)competitive price

Gas Oven Repair Guide

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