ILS Technology. Solutions for Manufacturing Intelligence and Secure Collaboration. December, 2005

Transcription

1 ILS Technology Solutions for Manufacturing Intelligence and Secure Collaboration December, 2005 Copyright, ILS Technology, ll Rights Reserved.

2 Design For Manufacturing Requirements: Our industry challenge is to maintain Moore s Law Drive CMOS technology as far as it can go, while in parallel develop new technology nanoelectronics Consensus in the industry is that alliances and partnerships are necessary to meet this challenge Growing complexity of technology Cost Reduced time to market pressures Partnerships may cross the boundaries of academia, industry, government and nations. > Semiconductor manufacturers > Equipment suppliers > Design shops > Mask shops > Materials suppliers > Government consortiums Copyright, ILS Technology, ll Rights Reserved.

3 Design for Manufacturing Requirements: DFM requires very fast, closed-loop processes: To design, qualify, and characterize masks, both initially and in reaction to design changes and/or process results To share design parameters and manufacturing process information Intellectual Property (IP) protection is a critical element of partnerships and alliances: IP by one constituent in the partnership must be secured from unauthorized use by other constituents Protection must be in place to protect pre-existing IP being brought to partnership by its constituents, but also to bring protection and security to data evolving during the course of the relationship. Copyright, ILS Technology, ll Rights Reserved.

4 Bi-directional Collaboration and Security Secure Worldwide Collaboration between Enterprises, Engineers and Equipment Chat (private or group) Enterprise-wide ED Client Display FTP file transfer (authenticated and authorized) High performance Remote Tool Operation (view or control) Scheduled, or event-based FTP (by site or global) Dynamic Data Collection Plan Mgmt. (by status, trace, event) Bi-directional communications between partners HTTPS connection to Intranet servers direct from the production floor HTTP Proxy and reverse proxy (to/from servers) Remote pplication ccess (command line access to the server) Copyright, ILS Technology, ll Rights Reserved.

5 Bi-directional Collaboration and Security Secure Fab Wide access to equipment / factory controllers Session security; uthentication / uthorization / udit FTP virus protected file staging Double Data Encryption via SSL and HTTPS Flexible Security Wrapper Scalable, dynamic data and data base access/ filtering as a function of: > User, Roles > Factory context Copyright, ILS Technology, ll Rights Reserved.

6 Secure End-to-End Connectivity Worldwide remote access to / from the production floor; intranet or internet Collaborative knowledge sharing with absolute IP protection. Copyright, ILS Technology, ll Rights Reserved.

7 Secure Real-time Information Chain from Tool and/or Databases to Engineers Worldwide Real-time & Historical Process/Product.. in the Fab Data... at the DFM Partners FSW Collaboration Server ServiceNet ServiceNet FSW Circuit Design EES & PC pps Real-time & Historical Tool Data ED Interface SECS/ GEM/ HSMS Sensor Bus Mask Sho[p FSW FSW FSW Process & Metrology Equipment, Sub-systems, Sensors Equipment Copyright, ILS Technology, ll Rights Reserved.

8 Sessions Multiple Simultaneous Sessions Foundry Taiwan Multiple Users, equipment data, data bases in one Design Shop Session PVD Etch Fab Mgmt. CMP shers Lithography Firew all Equip. Eng. Diffusion F irew all CVD Ion Implant Process Dev. Metrology Cleanroom Isolation LN Mask House Fab IntraNet Equipment Supplier JV Partner PVD Fab Mgmt. Diffusion F irew all F irew all CVD CVD Io n Implant Io n Implant Process Dev. Metrology Process Dev. Metrology Process Dev. Metrology Equip. Eng. Diffusion F irew all F irew all CVD Io n Implant Cleanroom Isolation LN Lithography Equip. Eng. Diffusion F irew ir ew al alll shers Lithography Equip. Eng. Fab Mgmt. CMP shers shers Fab Mgmt. CMP Lithography F irew all PVD Etch Etch Etch CMP PVD Fab IntraNet Cleanroom Isolation LN Fab IntraNet Copyright, ILS Technology, ll Rights Reserved. Cleanroom Isolation LN Fab IntraNet

9 ILS Technology s End to End Three Layer Security System ICM Factory Context (E10, Recipe Mgmt, MES) Tools Interface, RTO, R, HTTP, file transfer Virtual Factory Façade SSL Interface SSL etc. LDP Users Layer 3: Flexible Security Wrapper (FSW) Layer 1: ServiceNet Site-to-Site VPN Connection Layer 2: Client Connection 128 bit SSLv3/TLS V1.0 3Des encryption Pre-shared Key or Certificate based authentication Copyright, ILS Technology, ll Rights Reserved.

10 Level One: ServiceNet Secure Site-to-Site VPN Connection Each collaborating partner has a single connection to the VPN Service core Cross connects are prevented by firewalls. VPN is configured using a Pre-shared key or x.509 cert 3 Inside Service Net 2 1 VPN 1 Internet 2 VPN 3 VPN IC IC VPN IC C Copyright, ILS Technology, ll Rights Reserved.

11 Level Two: Collaborative Client Each collaborative partners clients uses a Java client to connect to. User access is only provided through the Java based client 128 bit SSLv3/TLS V1.0 3Des encryption is used between the client and the server ILS Technology, self signed, C certificates are used for SSL negotiation Client automatically disconnects from the server if there is no client activity Only uthorized features are available to the user in the client uthentication/authorization credentials are stored in a secure LDP User authentication is performed over the SSL connection. Supported authentication mechanisms are Userid/Password or SecurID SSL connection is used within the IPSec connection. This ensures the traffic cannot be monitored within the Service Net core Copyright, ILS Technology, ll Rights Reserved.

12 Level Three: Flexible Security Wrapper Security Framework Current technology/policy. > Efforts to-date have addressed connection security Establishing a secure pipe between remote sites Controlling basic access, i.e. user authentication, authorization > Security is currently: routers, switches and firewalls configured by IT engineers only and FSW allows the same level of security to be granted without involving IT resources (greater flexibility and response to changes) Flexible Security Wrapper. > FSW provides the means to automate IT security policies Put rules in FSW SW for constant use and later verification Copyright, ILS Technology, ll Rights Reserved.

13 Level Three: Flexible Security Wrapper FSW addresses content security What specific data items can be accessed? What commands can be issued? Under what conditions? > May depend on dynamic factory state (tool, MES, etc.) > May depend on other active users > May depend on aggregation of data items How should the data be transformed? > Hiding, categories, ranges, selective sampling, etc. > What additional types of encryption are required? Copyright, ILS Technology, ll Rights Reserved.

14 FSW Flow Diagram Remote DFM User 1 Creates Rules based on: Tool Data Model Users/Roles Factory Context Rules Configuration Tool 2 Rules Engine(s) Evaluates Rules: TRUE, FLSE or CONDITIONL (Transform) FSW 3 Virtual Factory Façade 7 Manages: Client Sessions ctive/defined Plans Filtering of Reports Interfaces to the VF Distributes Factory Context Requests/ Responses 8 Factory MES Manages Factory Context extracted from the Factory MES Internet LDP Filter(s) uthenticator 4 uthenticates Users udits all Requests and Responses 5 udit Trail 6 Tool Data access via a Portal application or Interface Copyright, ILS Technology, ll Rights Reserved.

15 FSW Security Features Rules Configuration Tool uthentication, Encryption (ES), Digital Signatures, CKs, Message Stamps Rules Engine HTTPS w/client auth Message Stamps Filter HTTPS w/client auth, HeartBeats Tool HTTPS w/client auth uthentication, Encryption (ES), Digital Signatures, CKs, Message Stamps udit Trail uthenticator Copyright, ILS Technology, ll Rights Reserved.

16 FSW Environment External End User Data Plan Creation Data Collection Plans Internal Users FSW Data Collection Manager PLC Process Database Sensor Data Tool Copyright, ILS Technology, ll Rights Reserved.

17 Key Message.. ILS Technology s suite of products enables secure access to equipment, sensors and databases to enable knowledge and information sharing to any enterprise application within or external to a specific site. - secure collaborative sessions (multiple individuals, databases and/or tools) ServiceNet - a one to many VPN-secured connection hub for secure access between users and tools. xcoupler - affords real-time secure connectivity, compliant to Interface, between factory controllers and enterprise and/or database applications. Copyright, ILS Technology, ll Rights Reserved.

18 THNK YOU! Copyright, ILS Technology, ll Rights Reserved.