Innovative Motion Control ABOUT ETEL MOTION CONTROL MULTI-AXIS MOTION CONTROLLERS MOTION CONTROL RANGE COMMUNICATION INDUSTRY SECTORS

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1 Motion Control

2 ABOUT ETEL MOTION CONTROL MULTI-AXIS MOTION CONTROLLERS Machine Control Motion Control Axes Sync. ETEL is the world s leading supplier for direct drive and advanced motion systems. It supports high-tech industries with a comprehensive range of products. Linear and torque motors, positioning systems, motion control hardware and software help customers get the most out of ETEL s direct drive solutions as quickly as possible. The full ETEL solution allows machine builders to simplify integration in their machine thanks to a very consistent design. It also gives customers the opportunity to focus on their core competence and technology while ETEL takes care of motion systems development. MOTION CONTROL ARCHITECTURE SEMICONDUCTORS MOTION CONTROL RANGE ETEL s motion control solutions have been integrated into leading edge machines of various high-tech industries for more than fifteen years. ETEL s range of motion and position controllers allows machine builders to drive any available servo motors on the market (brushless, DC motors, steppers) with the highest performance regulation in a minimal footprint. Its decentralized architecture ensures the same level of performance and speed regardless the number of axes driven in the machine. Distributed architecture also makes cabling easier to manage and to maintain in the field. Last but not least, the software environment simplifies software development, machine installation, and maintenance. MACHINE + PC APPLICATION MOTION CONTROLLERS DUAL AXIS POSITION CONTROLLERS EDI Machine Control Human Machine Motion Control Axes Sync. Position Control Position Loop Current Loop Power Bridge Interface INDUSTRY SECTORS Below are some examples of industry sectors where ETEL s controllers are successfully used, providing our customers in these areas a distinct competitive advantage. Process control Lithography Wafer and die level packaging Photovoltaic Printing / scanning OTHER SECTORS ELECTRONICS Test and control equipment Placement machines Flat panel display (FPD) UltimETs are available in three form factors in order to adapt to OEMs configuration: The PCI or PCIexpress versions are integrated into a PC, which is very well suited for high speed applications requiring real-time deterministic communication. The TCP/IP version is embedded into an AccurET position controller. This configuration is best for stand-alone machines, in which the motion control application is far from the PC controlling the machine. COMMUNICATION UltimET Light motion controller is the master on the TransnET bus and can manage up to 63 axes. More significantly, the communication performance will be the same regardless of the number of axes. To provide the best price/performance solution to its customers, ETEL designed two versions of the motion controller: the UltimET Light smart gateway is designed for price sensitive applications requiring synchronized movements. The UltimET Light interpolation version is best suited for interpolated movements. The optional I/O board fits into an AccurET optional board slot adding 4 analog Inputs and 4 analog Outputs, as well as 8 digital Inputs and 8 digital Outputs. A WAGO gateway module can be connected to the UltimET board allowing communication through Modbus TCP, interfacing up to 16 analog Inputs and 16 analog Outputs as well as 128 digital Inputs and 128 digital Outputs. UltimET Light provides different ways to manage multi-axis movements, depending on the needs: Movements can be either synchronized, or interpolated with G-code based, ULM (Universal Linear Movements), PVT (Position Velocity Time), PT (Position Time) and LKT (LooK-up Table) motion profiles. Advanced control feature requiring slave to slave communication between the different position controllers need an UltimET as a TransnET master: - 3D mapping allows for correction of a stage s known mechanical errors - Gantry acceleration feed-forward - Etc. TransnET is a gigabit ethernet based field bus designed to be the communication channel in ETEL s distributed motion control architecture. TransnET manages the real-time commands between the UltimET Light motion controller and AccurET position controllers driving up to 63 motors at the same time. It allows for handling of highly reliable deterministic synchronization and interpolation. In addition, TransnET nanosecond synchronization jitter allows for master to slave, slave to master, or slave to slave communication within the same cycle. This is a major advantage for high-end machines, since most require extensive slave to slave communication to perform 3D mapping, gantry control, and more. Input and output interfaces Each AccurET controller has embedded inputs and outputs to interface or trigger external devices. Please refer to the table at the end of this brochure. In case you need a higher number of motion control related I/Os, ETEL also proposes: 2 Motion Control Motion Control 3

3 POSITION CONTROLLERS Position Control Position Loop Current Loop Power Bridge POSITION CONTROLLERS POWER RANGE Their modular mounting design makes AccurET position controllers a very compact solution: Each controller can drive two axes and a single power supply can be used for multiple AccurETs sharing the same DC bus voltage. AccurET position controllers cover a wide range of voltage and current levels in a compact solution. This makes the integration of various servo motors in a single machine easier than ever. Max. DC bus voltage 600 V 400 V 340 V 48 V MODULAR 600 MODULAR 400 MODULAR 400 MODULAR 400 MODULAR 300 MODULAR 300 MODULAR 48 MODULAR 48 An optional board can be embedded into an AccurET, such as the UltimET motion controller 2.5 / 5 Arms 4 / 7.5 Arms 5 / 10 Arms 7 / 15 Arms 10 / 20 Arms 15 / 40 Arms Cont. / peak current [Arms] or the I/O board. No rack is needed, making the required volume only dependent on the number of driven axes. Simplified power and communication cabling as well as modular cooling unit make the machine installation and maintenance easy to perform. Machine builders will appreciate this design: cost effective, compact, quickly integrated, and easy to replace in the field. Increase the throughput of your machine thanks to AccurET AccurET s current loop is highly reliable: parasitic movements can be avoided thanks to its very low noise. In addition, its high bandwidth allows one to: - Maximize the bandwidth of the position loop - Benefit from advanced feed forward, and better compensate for friction, viscosity, as well as repeatable perturbations such as cogging, etc. ETEL s advanced regulator provides all one needs to maximum performance from the mechanical design. All together, AccurET minimizes errors during axes movement and therefore dramatically reduces the settling time. Increase your machine accuracy with AccurET 3D mapping is available standard so you can compensate repeatable defaults such as mechanical distortions. ETEL position controllers can handle a variety of external signals. For example, fast position capture or fast trigger allows the management of other devices such as laser, camera, etc. They can either be based on the real or on the theoretical position of the axis, or time based depending on application s requirement. AccurET is also very well suited for high speed applications requiring high accuracy at the same time: the trajectory filter function is an enhanced vibration suppression function used to reduce machines vibrations and settling time. It is designed to avoid transmitting chassis vibrations on the load. In addition, customized motion sequences can be run on each controller thanks to the ETEL structured programming language. The user defined macro functions allow machine builders to customize their position controller to their machine process. For more performance, each controller can run up to two motion sequences in parallel, independently of the other axes. As an example, one motion sequence can process all distance information to maintain a constant gap to the processed surface. While another sequence running in parallel handles errors for the same motor. AccurET position controllers contain integrated protection and diagnostics for machine and, more importantly, stage protection: over-temperature detection, over-current and voltage, loss of feedback, etc. ETEL provides all necessary features to build a reliable machine. ETEL controllers support standard encoders of the market, such as analog 1 Vpp, Absolute EnDat 2.1 and 2.2, as well as TTL. Absolute position feedback enables one to perform the machine initialization phase without any axis movement. This saves startup time and avoids any collision risk during this phase. AccurET supports different communication types: ETEL TransnET for multi-axis real-time applications. TransnET s synchronization jitter in the nanosecond level is the right answer for deterministic and reliable communication within machines. Ethernet TCP/IP allows commissioning and machine management during operations. This can be used in cases where controllers are used in standalone configuration. USB can be used for commissioning and maintenance at any time. SOFTWARE ENVIRONMENT ETEL motion control architecture: various access levels for more performance ETEL motion control architecture provides different levels of access, from motion sequences, at the controller level to EDI software library, to design machine Human Machine Interface (HMI). A very flexible and powerful structured programming language including mathematical functions (logic, arithmetic, trigonometric...) has been designed so the user can run any kind of motion sequence. Up to 3 simultaneous multi-axis motion sequences running at 100 μs sample period can be embedded on the UltimET and run in parallel. At the AccurET level, 2 motion sequences per motor can run as well. Human Machine Interface (HMI) Customer specific software layer. Human Machine Interface Standard software environment for commissioning and maintenance. ETEL Device Interface (EDI) Library designed to interface customer specific software to ETEL equipment. Can run 3 multi-axis structured code motion sequences at the same time. Available both in interpolated and synchronized modes. Can run two multi-axis structured code motion sequences on each axis. 4 Motion Control Motion Control 5

4 Bode and Nyquist diagrams Lissajoux diagram ComET is a user friendly interface for maintaining and commissioning ETEL controllers. ComET interface walks you through the process of setting up your motion system, step-by-step. The complete auto-setting provides an initial set of parameters to control motors and systems making the tuning fast and easy: Connect to the ETEL motion and position controllers, and select the motor & encoder used. Their characteristics will automatically be loaded allowing encoder signal adjustment, thanks to the Lissajoux graphical feedback. Choose the homing mode and its movement profile in ComET. Click only once to perform the auto-tuning process: this reduces commissioning time dramatically. That is all it takes to setup your motion controller with ComET! Once complete, the customer can use advanced tools to setup the system s protections, or fine tune any of the parameters. Advanced tools help the customer to get the most performance out of his mechanical design: The identification tool helps with analyzing the system s behavior: a system s immunity to disturbances can be checked, helping the user to optimize the machine design during the development phase, or the parameters set at the manufacturing stage for improved machine reliability. The multi-axis scope can register and display position, current, speed or any physical value, assisting in the fine tuning of the system at development or maintenance phase. ComET also includes a programming environment so the machine builders can test, implement, compile, and download motion sequences either in AccurET or in UltimET Light. EDI The ETEL Device Interface is a library which enables communication between ETEL s motion control system and customer s application: Group of functions allowing the user to access all ETEL products functionalities Libraries for C, interface C++, C#, VB.NET (.NET Framework 4) Compatible with Windows XP / Win7/8 (32 & 64 bits) / RTX2012 TRAINING AND SUPPORT ACCURET DUAL AXIS POSITION CONTROLLERS SPECIFICATIONS ACCURET 48 ACCURET 300 ACCURET 400 ACCURET 600 Bus voltage 48 VDC 340 VDC 400 VDC 600 VDC Current [Arms] 2.5 / 5 Arms 4 / 7.5 Arms 05 / 10 Arms 10 / 20 Arms 05 / 10 Arms 07 / 15 Arms 15 / 40 Arms 15 / 40 Arms 5 /10A & 10/20A 260 x 240 x 50 Size (H x D x W) Without optional board 130 x 180 x x 217 x / 40 A 260 x 240 x 75 [mm] With optional board 130 x 180 x x 217 x x 240 x x 240 x 75 PWM frequency update 10, 20 khz 10, 20 khz 10, 20 khz 5, 10 khz Number of motor phases supported 1, 2, 3 3 Encoder Incremental analog (1 Vpp), Absolute EnDat 2.1 and 2.2, TTL, Built-in interpolation by Inputs / Digital (per motor) 4 I / 2 O (not insulated) 4 I / 2 O (not insulated) 5 I / 2 O 5 I / 2 O Outputs Fast digital (for both motors) 6 I / 4 O 6 I / 4 O 4 I / 4 O 4 I / 4 O Power supply characteristics Optional I/O board interface Communication Nb of phases supported or 3 3 Input voltage range VAC VAC VAC Max. input current - 10 Arms 10 Arms 10 Arms Max. output voltage 48 V (3rd party supplier) ETEL 340 V ETEL 400 V ETEL 600 V Max. current in brake resistor - 10 A 20 A 20 A Control for external input relay Output voltage via connectors / busbars Connectors Connectors Busbar Busbar ETEL real-time bus / cycle time USB Ethernet (TCP/IP) 4 analog Inputs (16 bits, ±10 V differential) / 4 analog Outputs (16 bits, ±20 V differential) 8 digital Inputs and 8 digital Outputs (opto-isolated, 24 V or 5 V) TransnET at 1 Gbps / 100 µs (up to 50 µs) 2.0 full speed 10 / 100 MHz Trigger / Fast position capture Fast trigger based on theoretical or real position with advanced features (20 ns resolution) Structured programming language sequences 2 threads of structured programming language sequences Initialization of motor for communication Very flexible procedure with very short initialization movement up to a few microns Homing procedures Wide range of homing procedures. Flexible, fast and easy to use Regulator type Position state regulator with feed forward and advanced second order filters Movement types Trapezoidal, S-Curve, Sine, Sine modified, LooK-up Table,... Encoder scaling Stage error mapping on target position Trajectory filter Avoiding machine / system vibration at the end of the motion Operating temperature (non-condensing) 10 C - 40 C Advanced Force Control capabilities High level competences Customer satisfaction is crucial to us. ETEL not only focuses on supplying reliable products, but also on offering high quality support. In order to better serve its customers, ETEL developed a variety of competences allowing ETEL to propose the appropriate skills depending on machine builders support requirements: Hotline & Technical support: ETEL s hotline is operated by qualified engineers having detailed product knowledge, not only on motion controllers, but also on direct drive motors and systems, which is critical to provide efficient service. Moreover, on-site support can also be organized whenever it is required. High level trainings: ETEL organizes standard or customized training courses on request at its facilities in Switzerland. These training courses are conducted by motion control and direct drive specialists. Applications engineering: OEMs and standard machine builders may require help integrating ETEL products in their machine. Application engineers can specifically focus on their application to get the best outcome. Mechatronic experts: we reach nanometer stability on several hundreds of machines a year. Our mechatronic experts can provide a valuable help in your machine & motion control optimization. ULTIMET MOTION CONTROLLERS SPECIFICATIONS ULTIMET FAMILY Hardware format versions PCI / PCIexpress / TCP/IP as optional board for AccurET UltimET versions UltimET interpolation (interpolated mvts) / UltimET smart gateway (synchronized mvts) Number of supported interpolation group 2 Max number of axes (i.e. directions) per interpolation group 4 (X, Y, Z, theta) Interpolation movement types LKT, G-code based, ULM, PVT, PT and kinematic transform functionalities TransnET real-time communication bus 1 Gbps TransnET bus cycle time 100 µs (up to 50 µs) Number of supported axes on the real-time bus up to 63 Trace pre / post trigger functionnality Structured programming language sequences 3 threads of structured programming language sequences On board I/O PCI & PCIexpress versions: 4 I / 4 O / TCP/IP version: 2 I / 2 O Compatibility with external I/O module Wago Modbus on TCP/IP: Analog: 16 I / 16 O / Digital: 128 I / 128 O Real-time channels Slave to slave, master to slave, slave to master data exchange 6 Motion Control Motion Control 7

5 GROUP SUBSIDIARIES AND SALES OFFICES HEADQUARTERS AMERICAS CHINA CZECH REPUBLIC FRANCE GERMANY GREAT BRITAIN HONG KONG ITALY KOREA SINGAPORE SWITZERLAND TAIWAN THE NETHERLANDS ETEL S.A. Zone Industrielle CH Môtiers Switzerland T +41 (0) F +41 (0) etel@etel.ch OTHER COUNTRIES internationalsales@etel.ch REPRESENTATIVES ISRAEL comotech@medital.co.il SPAIN farresa@farresa.es version /15 - subject to modifications without previous notice