SIHI boost CL Sizes 3500, 5000, 6500, 8000

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Dual Stage Vacuum System incl. Liquid Ring Vacuum Pump in Compact Design SIHI boost CL Sizes 3500, 5000, 6500, 8000 Pressure range: Suction Speed: < 0,01 to 1013 mbar 2700 to 5700 m³/h DESIGN SIHI boost CL Vacuum systems have been developed for the requirements of industrial applications. The compact skid consists of a Liquid Ring Vacuum Backing Pump and a Booster Spindle Pump with integrated drives. This dual stage system solution offers the following unique features: Handling of gases and condensable vapours Optimized for process and load lock applications Capable of handling solid carry over Entirely oil free operation Simple to maintain Highly reliable Low noise and vibration Condition monitoring options adaptable APPLICATION Processing of gases and condensable vapours, capable of handling particles. Particles from process carry over are being washed out in the Liquid Ring Vacuum Pump which acts like a scrubber in order to provide a pre-cleaned discharge flow. NOTE In contradiction to conventional shaft synchronisation via a mechanic gear box in Roots Blowers, the SIHI boost spindles are electronically synchronized. This well established, innovative concept in all SIHI Dry Pumps not only enables a silent operation, it also makes all efforts for maintaining and changing gear oil obsolete. SIHI Liquid Ring Vacuum Pumps are simple, single shaft pumps with outstanding reliability and robustness. HYDRAULIC DATA Max. Pump Speed with Backing Pump Speed: Air or N 2 with 0,5 mbar inlet pressure / 20 C 160 m³/h 2700 3500 4500 5600 250 m³/h 2800 3600 4600 5600 500 m³/h 2900 3700 4800 5700 Ultimate Pressure Compression allowance mbar a < 0,02 < 0,007 < 0,005 < 0,003 max. static mbar ü 200 max. dynamic mbar a 2000 Noise level DIN ISO 9614 / 21680 db (A) < 75 VACUUM TECHNOLOY SIHI boost CL 133.80010.51.01 E 06/2014

Benefits Integral System Control + integrated continuous system control + condition monitoring + opportunity for data communication Innovative Booster-Stage + high pressure ratio + very energy efficient + no gear oil Dual Stage System + remarkably high pump speed at low pressure + no process contamination + low energy consumption + small footprint + simple maintenance Utilization of the most reliable Liquid Ring Vacuum Backing Pump + forgiving with particle carry over + absorbs process particles + absorbs condensable process media + long life bearings + no wearing parts + contact less Plug and Pump + quick connectors for utilities Available drive versions The Standard-Version of SIHI boost - Vacuum systems have been designed specifically for process applications for remarkably high performance combined with low power consumption. The Ultra-Version is based on the concept of the Standard-Version however specifically tuned for load lock applications, when the most prominent focus is on cycle time and pump down time. 2

Chamber pressure Chamber pressure Pump speed SIHI boost CL Pump Speed Curves 10000 m³/h 1000 100 10 1 0,001 0,01 0,1 1 10 100 1000 Inlet pressure mbar CL 3500 / 160 CL 5000 / 160 CL 6500 / 160 CL 8000 / 160 Data valid under following conditions: Media : dry air: 20 C Service Liquid (LRVP): water: 25 C Cooling water inlet: water: 25 C Discharge pressure: 1013 mbar (atm) The inlet pump speed is related to the inlet pressure Data deviation tolerance 10% Pump down curve (600 l camber) Pump down curve (5 m³ camber) Example: SIHI boost CL 8000 / 160 Ultra Example: SIHI boost CL 5000 / 500 1000 1000 mbar mbar 100 100 10 10 1 1 0,1 0,1 0,01 0 1 2 3 4 5 6 7 8 9 10 11 12 Pump Down Time sec 0,01 0 0,5 1 1,5 2 2,5 3 Pump Down Time min 3

Electrical Data Backing pump 160 250 500 160 250 500 160 250 500 160 250 500 Max Power Ultimate Pressure kw < 5,0 < 5,5 < 14 < 5,5 < 6,0 < 15 < 6,5 < 7,0 < 16 < 7,5 < 8,0 < 17 max at 400V / 50Hz max at 460V / 60Hz Electrical Connection kw 17,0 18,5 28,0 17,0 18,5 28,0 17,0 18,5 28,0 17,0 18,5 28,0 kw 18,5 20,5-18,5 20,5-18,5 20,5-18,5 20,5-50 Hz V AC 400 ± 10 % 60 Hz V AC 460 ± 10 % Classification TN-System (L1, L2, L3, PE (without N) DIN EN 60529 IP 42 Purge gas Purge Gas Connection Media allowance Pressure Allowance Nitrogen / Argon / CDA see specification (Purge purity following ISO 8573-1:2010: min Class 2.4.2) bar ü 6 to 8 Max. Flow Nl/min 30 30 40 54 Cooling water / service liquid Backing pump 160 250 500 General Requirements Cooling Water Temperature Max. stat. Supply Pressure Connection N5.1 Media allowance C 5 to 25 bar ü 6 Water Conductivity > 50 µs (Distilled water on request) Min. Flow l/min 23 23 10 Connection N5.2 Media allowance - - Water Conductivity > 50 µs Min. Flow l/min - - 35 Connection N5.3 Media Water (recommended Quality: ph 6,5 to 8,5; Carbonate 7 dh bis 9 dh) 4

Dimensions Dimensions in mm. (N 1) (N 2) (N2) Design material Backing pump 160 250 500 Process Exposed Parts SIHI boost Cast Iron / SS - Cr Internal Piping PTFE / PVC / SS CrNi PTFE / SS CrNi Backing Pump Service Liquid Loop Cooling Loop Discharge Pipe / Valves SS-CrNi ABS / EPDM / PP / PTFE / SS CrNi EPDM / PAN / PUN / SS - CrNi / Brass Mild Steel / SS - Cr / SS CrNi 5

Connections Backing pump 160 250 500 Process media N1: Gas Inlet ISO K/F DN250 N2: Gas Outlet ISO K 100 Purge Gas N4.1: Inlet Quick Connector - G½ (IG) Cooling System N5.1: CW Inlet Quick Connector - G½ (IG) N6.1: CW Outlet Additional Cooling Backing Pump Quick Connector - G½ (IG) N5.2: Cooling Water Inlet - Quick Connector G1 (IG) N6.2: Cooling water Outlet - Quick Connector G1 (IG) Service Liquid Backing Pump N5.3: Liquid Fill N8.1: Liquid Drain Quick Connector - G½ (IG) G½ (AG) Electrical Connection * : Process Communication SACCBP M12FSB 2CON M16 ** : Ethernet VS DISV M12FSD/1,0 RJ45 *** : Power Supply HAN K4/0 STI S MALE HAN K6/6 - M (IG) : Female Thread (AG) : Male Thread 6

Accessories 1 2 3 4 5 1 Inlet Valve This optional, pneumatically actuated valve enables a safe isolation of the suction line which prevents residue media to enter the pump as well as back flow from the discharge while pump is shut down. 2 Inline Flush In order to clean the pump chamber of the SIHI boost, this option allows the introduction of cleaning liquid via an inlet flush module. The compact system can be then operated in a flush mode initiated and controlled by the customer on demand. This measure enables significantly shorter maintenance phases. 3 Control Unit On customer demand, the compact system can be optionally equipped with the following control modules: Profibus PROFINET EtherCAT DeviceNET I/O-Schnittstelle See data sheet for details. 4 Membrane-Purge gas module SIHI boost only acceptable purge gas is Nitrogen. In case Nitrogen is not available, this option can be added to generate Nitrogen from CDA. 5 Filter unit for service liquid The Liquid Ring Vacuum Backing Pump offers the advantage of capturing particles from the process in the service liquid. With increasing contamination of the service liquid with solids, the liquids however needs cleaning. This filter enables this continuous cleaning function while operating. 6 Gas Dilution (not shown) This optional, additional gas dilution can be added in order to handle larger amounts of particles or excessive amounts of condensable vapor. In order to prevent too high purge gas consumption, this option only gets activiated by the control in Vacuum Mode. 7

Accessories 7 Service-Tool Kit This service tool kit enables an efficient and ergonomic cleaning procedure of the SIHI boost - spindle and housing on site via trained personnel. The Service-Lifting device permits the disassembly of the spindle unit. The design is set for the gravity point of the unit, for ergonomic and easier handling. The spindle rest is a device to safely place the spindle unit after removal from the casing for better cleaning. Sterling SIHI GmbH Lindenstr. 170, D-25524 Itzehoe, Germany Tel.: +49 (0) 4821 771-01 Fax.: +49 (0) 4821 771-274 www.sterlingsihi.com 8